JP2649472B2 - Dissolved oxygen reduction device - Google Patents
Dissolved oxygen reduction deviceInfo
- Publication number
- JP2649472B2 JP2649472B2 JP8756793A JP8756793A JP2649472B2 JP 2649472 B2 JP2649472 B2 JP 2649472B2 JP 8756793 A JP8756793 A JP 8756793A JP 8756793 A JP8756793 A JP 8756793A JP 2649472 B2 JP2649472 B2 JP 2649472B2
- Authority
- JP
- Japan
- Prior art keywords
- dissolved oxygen
- bubbling
- tank
- inert gas
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Degasification And Air Bubble Elimination (AREA)
- Physical Water Treatments (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、溶存酸素低減装置に関
し、詳しくは、半導体製造工程等で用いられる超純水の
ように、溶存酸素量が問題となる液中の溶存酸素を低減
する装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for reducing dissolved oxygen, and more particularly to an apparatus for reducing dissolved oxygen in a liquid in which the amount of dissolved oxygen is a problem, such as ultrapure water used in a semiconductor manufacturing process or the like. About.
【０００２】[0002]
【従来の技術及び発明が解決しようとする課題】従来、
液中の溶存酸素を低減する装置として、真空脱気装置が
多く用いられてきたが、この装置は大型であり、電力コ
ストもかかるなどの問題があった。さらに、この装置で
除去できる溶存酸素濃度は、１００ｐｐｂ程度までであ
った。2. Description of the Related Art
As a device for reducing dissolved oxygen in a liquid, a vacuum deaerator has been used in many cases, but this device has a problem in that it is large in size and requires a high power cost. Furthermore, the concentration of dissolved oxygen that can be removed by this apparatus was up to about 100 ppb.
【０００３】しかし、最近、半導体製造工程に用いる超
純水中の溶存酸素により形成されるシリコンウェハー上
の自然酸化膜がデバイス特性を悪化させることが報告さ
れたことから、半導体製造工程に使用する超純水中の溶
存酸素濃度を、１０ｐｐｂ以下に抑える必要性が出てき
た。However, recently, it has been reported that a natural oxide film on a silicon wafer formed by dissolved oxygen in ultrapure water used in a semiconductor manufacturing process deteriorates device characteristics. It has become necessary to suppress the dissolved oxygen concentration in ultrapure water to 10 ppb or less.
【０００４】この溶存酸素量１０ｐｐｂ以下の超純水
は、不活性ガスを水中にバブリングさせて水と不活性ガ
スとを接触させ、水中の酸素分圧を低減させて溶存酸素
を除去する方法により得ることができる。[0004] Ultrapure water having a dissolved oxygen content of 10 ppb or less is prepared by bubbling an inert gas into water to bring the water and the inert gas into contact with each other and reducing the oxygen partial pressure in the water to remove dissolved oxygen. Obtainable.
【０００５】一方、超純水を製造するための装置を構成
する材料には、従来からポリ塩化ビニル（ＰＶＣ）が用
いられてきている。しかしながら、本発明者らの研究に
よれば、上記のように溶存酸素量１０ｐｐｂ以下の超純
水を供給するための装置におけるバブリング槽やバブリ
ング処理後の水を供給する配管にＰＶＣを用いた場合、
ＰＶＣを透過する僅かな空気によって溶存酸素量が増大
することが知見された。このため、槽や配管の材料に空
気の透過性の低い材料を用いることも一つの手段ではあ
るが、この種の材料は一般に高価であり、設備費がかか
るという不都合がある。なお、金属材料は、一般に空気
を透過させないが、水中に金属イオンが入り込むため、
半導体等の分野では使用することはできない。On the other hand, polyvinyl chloride (PVC) has been conventionally used as a material constituting an apparatus for producing ultrapure water. However, according to the study of the present inventors, when PVC is used for a bubbling tank or a pipe for supplying water after bubbling treatment in a device for supplying ultrapure water having a dissolved oxygen amount of 10 ppb or less as described above. ,
It has been found that the amount of dissolved oxygen is increased by the slight air passing through the PVC. For this reason, it is one means to use a material having low air permeability as a material for the tank and the piping. However, this kind of material is generally expensive and has a disadvantage that the equipment cost is high. In addition, metal materials generally do not allow air to permeate, but because metal ions enter water,
It cannot be used in fields such as semiconductors.
【０００６】そこで本発明は、不活性ガスのバブリング
により溶存酸素を低減させる装置において、バブリング
槽や配管を形成する材料を透過して液中に酸素が侵入す
ることを防止し、溶存酸素量１０ｐｐｂ以下の液を容易
に得ることができる溶存酸素低減装置を提供することを
目的としている。Accordingly, the present invention provides an apparatus for reducing dissolved oxygen by bubbling an inert gas, which prevents oxygen from penetrating into a liquid forming a bubbling tank or a pipe and penetrating into a liquid, and a dissolved oxygen amount of 10 ppb. It is an object of the present invention to provide a dissolved oxygen reducing device capable of easily obtaining the following liquid.
【０００７】[0007]
【課題を解決するための手段】上記した目的を達成する
ため、本発明の溶存酸素低減装置は、液中に不活性ガス
をバブリングして液中の溶存酸素を除去する溶存酸素低
減装置において、該溶存酸素低減装置を構成するバブリ
ング槽及びバブリング処理後の液が流れる配管を外槽で
覆って二重構造とし、前記バブリング槽及び配管と外槽
との間を不活性ガスでシールしたことを特徴とし、さら
に、前記シール用の不活性ガスとして、前記バブリング
槽に用いた後の不活性ガスを用いることを特徴としてい
る。Means for Solving the Problems To achieve the above object, a dissolved oxygen reducing apparatus according to the present invention comprises a dissolved oxygen reducing apparatus for bubbling an inert gas in a liquid to remove the dissolved oxygen in the liquid. That the bubbling tank and the pipe through which the liquid after the bubbling process flows are covered with an outer tank to form a double structure, and that the space between the bubbling tank and the pipe and the outer tank is sealed with an inert gas. The present invention is further characterized in that the inert gas used for the bubbling tank is used as the inert gas for the seal.
【０００８】[0008]
【作 用】上記のようにバブリング槽及び配管の外周を
不活性ガスでシールすることにより、バブリング槽及び
配管の周囲の酸素分圧を低くでき、バブリング槽や配管
を形成する材料を透過する酸素量を低減できる。これに
より、溶存酸素濃度１ｐｐｂ以下の超純水を供給するこ
とも可能となる。また、バブリングに使用した後の不活
性ガスをシールガスとして用いることにより、不活性ガ
ス量の低減が図れる。[Operation] By sealing the outer periphery of the bubbling tank and the piping with the inert gas as described above, the oxygen partial pressure around the bubbling tank and the piping can be reduced, and the oxygen permeating the material forming the bubbling tank and the piping can be reduced. The amount can be reduced. Thereby, it becomes possible to supply ultrapure water having a dissolved oxygen concentration of 1 ppb or less. In addition, by using the inert gas used for bubbling as the seal gas, the amount of the inert gas can be reduced.
【０００９】[0009]
【実施例】以下、本発明を、図面に示す一実施例に基づ
いてさらに詳細に説明する。図１は、２塔のバブリング
槽Ｂ１，Ｂ２を備えた溶存酸素低減装置の一実施例を示
すもので、例えば半導体製造装置に用いる超純水を製造
する工程中に設けられるものである。第２バブリング槽
Ｂ２の上部に設けられる導入管２ａは、第１バブリング
槽Ｂ１の導入管１ａよりも低い位置に取付けられてお
り、導入管１ａから供給された原液は、まず、第１バブ
リング槽Ｂ１の上部に導入されてバブリング処理された
後、該第１バブリング槽Ｂ１の底部から導入管２ａを介
して第２バブリング槽Ｂ２の上部に導入されて２段階の
バブリング処理が行われる。バブリング処理が終了した
処理液は、第２バブリング槽Ｂ２の底部から供給管２ｂ
に導出され、次の工程に送られる。DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in more detail with reference to an embodiment shown in the drawings. FIG. 1 shows an embodiment of a dissolved oxygen reducing apparatus provided with two tower bubbling tanks B1 and B2, which is provided, for example, during a process of manufacturing ultrapure water used in a semiconductor manufacturing apparatus. The introduction pipe 2a provided at the upper part of the second bubbling tank B2 is attached at a position lower than the introduction pipe 1a of the first bubbling tank B1, and the stock solution supplied from the introduction pipe 1a is first supplied to the first bubbling tank. After being introduced into the upper part of B1 and subjected to the bubbling treatment, it is introduced from the bottom of the first bubbling tank B1 to the upper part of the second bubbling tank B2 via the introduction pipe 2a, and is subjected to two-stage bubbling treatment. After the completion of the bubbling process, the processing solution is supplied from the bottom of the second bubbling tank B2 to the supply pipe 2b.
And sent to the next step.
【００１０】一方、溶存酸素を除去するために供給され
る不活性ガス、例えば窒素ガスは、所定圧力で窒素供給
主管３から各バブリング槽毎に設けられたバブリングガ
ス供給管３ａ，３ｂに分岐し、それぞれの流量調節器４
ａ，４ｂで流量を調節された後、各バブリング槽の底部
に導入される。各バブリング槽に導入された窒素ガス
は、ノズル５ａ，５ｂから微細な気泡になって液中を上
昇し、溶存酸素を同伴して槽頂部の排気口６ａ，６ｂか
ら排気管７に排出される。なお、供給管２ｂに沿って流
れる窒素ガスは、該供給管２ｂの終端部等から排出すれ
ばよく、この供給管２ｂの延長が長い場合には、適当な
位置に窒素ガスの導入口と排気口とを設けておくことが
好ましい。On the other hand, an inert gas, for example, nitrogen gas, supplied for removing dissolved oxygen is branched at a predetermined pressure from the nitrogen supply main pipe 3 to bubbling gas supply pipes 3a, 3b provided for each bubbling tank. , Each flow controller 4
After the flow rate is adjusted in a and 4b, they are introduced into the bottom of each bubbling tank. The nitrogen gas introduced into each bubbling tank rises in the liquid as fine bubbles from the nozzles 5a and 5b, and is discharged to the exhaust pipe 7 from the exhaust ports 6a and 6b at the top of the tank together with dissolved oxygen. . The nitrogen gas flowing along the supply pipe 2b may be discharged from the end of the supply pipe 2b or the like. If the supply pipe 2b is long, the nitrogen gas inlet and the exhaust gas may be located at appropriate positions. It is preferable to provide a mouth.
【００１１】そして、本実施例に示す溶存酸素低減装置
では、上記バブリング槽Ｂ１，Ｂ２の外周及び第１バブ
リング槽Ｂ１から下流のバブリング処理後の液が流れる
配管、即ち導入管２ａ，供給管２ｂの外周を外槽１０で
覆って二重構造とし、バブリング槽及び各配管と外槽１
０との間にシール用空間部１１を形成するとともに、該
シール用空間部１１に不活性ガス（窒素ガス）を導入し
てシールしている。このシールガスとして用いられる窒
素ガスは、前記窒素供給主管３からシールガス供給管１
２ａ，１２ｂに分岐し、それぞれの流量調節器１３ａ，
１３ｂで流量を調節されてシール用空間部１１に導入さ
れ、該シール用空間部１１を流れて前記排気管７から排
出される。In the apparatus for reducing dissolved oxygen shown in the present embodiment, the pipes through which the liquid after the bubbling process flows downstream from the outer circumferences of the bubbling tanks B1 and B2 and the first bubbling tank B1, ie, the inlet pipe 2a and the supply pipe 2b. Is covered with an outer tank 10 to form a double structure.
The sealing space 11 is formed between the sealing space 11 and the sealing space 11 by introducing an inert gas (nitrogen gas) into the sealing space 11. The nitrogen gas used as the seal gas is supplied from the nitrogen supply main pipe 3 to the seal gas supply pipe 1.
2a and 12b, and the respective flow controllers 13a and
The flow rate is adjusted at 13 b and introduced into the sealing space 11, flows through the sealing space 11, and is discharged from the exhaust pipe 7.
【００１２】また、本実施例に示す溶存酸素低減装置で
は、前記バブリング槽Ｂ１，Ｂ２及びバブリング処理後
の液が流れる配管２ａ，２ｂを、バインディング剤中の
不純物を低減したクリーンポリ塩化ビニル（Ｃ−ＰＶ
Ｃ）で形成するとともに、外槽１０を安価な通常のポリ
塩化ビニル（ＰＶＣ）で形成している。In the dissolved oxygen reducing apparatus shown in this embodiment, the bubbling tanks B1 and B2 and the pipes 2a and 2b through which the liquid after the bubbling process flows are provided with clean polyvinyl chloride (C) in which impurities in the binding agent are reduced. -PV
C), and the outer tank 10 is formed of inexpensive ordinary polyvinyl chloride (PVC).
【００１３】このように、バブリング処理後の液が流れ
る部分を二重構造とし、バブリング槽及び各配管の周囲
を窒素ガスのような不活性ガスでシールすることによ
り、バブリング槽等の周囲の酸素濃度を低減することが
できる。この結果、バブリング槽等を透過する酸素量を
低減し、溶存酸素量が増大することを防止できるので、
溶存酸素量１ｐｐｂ以下の液体を得ることができる。As described above, the portion through which the liquid after the bubbling process flows has a double structure, and the surroundings of the bubbling tank and each pipe are sealed with an inert gas such as nitrogen gas, so that the oxygen around the bubbling tank and the like can be reduced. The concentration can be reduced. As a result, the amount of oxygen passing through the bubbling tank and the like can be reduced, and the amount of dissolved oxygen can be prevented from increasing.
A liquid having a dissolved oxygen content of 1 ppb or less can be obtained.
【００１４】ここで、バブリング槽等を透過する酸素量
（Ｑ）は、酸素ガスの透過係数をＤ、バブリング槽等の
表面積をＡ、時間をｔ、外部雰囲気の酸素濃度をＣ、材
料の厚さをＸとすると、 Ｑ＝（Ｄ×Ａ×ｔ×Ｃ）／Ｘ で表すことができる。すなわち、バブリング槽等を透過
する酸素量は、酸素ガスの透過係数，バブリング槽等の
表面積，時間及び外部雰囲気の酸素濃度に比例し、材料
の厚さに反比例する。したがって、上記のように溶存酸
素低減装置を構成するバブリング槽や配管の周囲を窒素
ガス等の不活性ガスでシールして外部雰囲気の酸素濃度
を低減することにより、バブリング槽等を透過する酸素
量を大幅に低減することができる。Here, the oxygen amount (Q) permeating the bubbling tank or the like is represented by D, the permeation coefficient of oxygen gas,
Table area A, time t, the oxygen concentration of the ambient atmosphere C, and the thickness of the material is X, it can be expressed by Q = (D × A × t × C) / X. That is, the amount of oxygen permeating the bubbling tank or the like is determined by the permeation coefficient of oxygen gas,
Table area, proportional to the oxygen concentration of the time and the outside atmosphere, is inversely proportional to the thickness of the material. Therefore, as described above, the amount of oxygen permeating through the bubbling tank or the like is reduced by sealing the surroundings of the bubbling tank or piping constituting the dissolved oxygen reducing device with an inert gas such as nitrogen gas to reduce the oxygen concentration in the external atmosphere. Can be greatly reduced.
【００１５】また、バブリング槽や配管を形成する材料
及び外槽を形成する材料として、一般的なＣ−ＰＶＣや
ＰＶＣを用いることができるので、装置の製造価格も低
く抑えることができる。また、窒素ガス等の不活性ガス
の使用量の低減や装置の小型化も図ることができる。In addition, since general C-PVC or PVC can be used as a material for forming the bubbling tank or the piping and a material for forming the outer tank, the manufacturing cost of the apparatus can be reduced. Further, the amount of use of an inert gas such as a nitrogen gas can be reduced, and the size of the apparatus can be reduced.
【００１６】次に、図２は、バブリング槽Ｂ１，Ｂ２で
バブリング処理に用いた後の不活性ガス、例えば窒素ガ
スをシール用ガスとしてシール用空間部１１に導入する
ように構成した実施例を示すものである。なお、前記実
施例と同一要素のものには同一符号を付して、その詳細
な説明は省略する。Next, FIG. 2 shows an embodiment in which an inert gas, for example, nitrogen gas, which has been used for bubbling in the bubbling tanks B1 and B2, is introduced into the sealing space 11 as a sealing gas. It is shown. The same components as those in the above embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted.
【００１７】窒素供給主管３から供給された窒素ガス
は、前記同様にバブリングガス供給管３ａ，３ｂに分岐
し、流量調節器４ａ，４ｂを介してバブリング槽Ｂ１，
Ｂ２に導入され、ノズル５ａ，５ｂから微細な気泡にな
って液中を上昇し、排気口６ａ，６ｂからシール用空間
部１１内に導入される。シール用空間部１１内に導入さ
れた窒素ガスは、該空間部を流れて外槽１０の適当な個
所に設けられた排気管１４ａ，１４ｂ，１５を介して排
出される。The nitrogen gas supplied from the nitrogen supply main pipe 3 branches into the bubbling gas supply pipes 3a and 3b in the same manner as described above, and flows through the bubbling tanks B1 and B1 via the flow controllers 4a and 4b.
It is introduced into B2, becomes fine bubbles from the nozzles 5a and 5b, rises in the liquid, and is introduced into the sealing space 11 from the exhaust ports 6a and 6b. The nitrogen gas introduced into the sealing space 11 flows through the space and is discharged through exhaust pipes 14a, 14b, and 15 provided at appropriate locations in the outer tank 10.
【００１８】このように、バブリング槽内を通した窒素
ガスをシール用空間部１１内に導入することにより、上
記のように溶存酸素量１ｐｐｂ以下の液体を得ることが
できるとともに、窒素ガスの使用量の低減や流量調節器
の省略等が図れ、コストダウンを図ることができる。As described above, by introducing the nitrogen gas passed through the bubbling tank into the sealing space 11, a liquid having a dissolved oxygen amount of 1 ppb or less can be obtained as described above, and the use of the nitrogen gas can be achieved. The amount can be reduced, the flow controller can be omitted, and the cost can be reduced.
【００１９】なお、両実施例では、２塔のバブリング槽
を備えた装置を例示したが、バブリング槽の数は任意に
設定することができる。また、バブリング槽を複数設け
た場合、全ての回路を上記のような二重構造にすること
なく、下流側のバブリング槽や配管部分を二重構造とし
てシールするだけでも、従来より溶存酸素濃度が低い液
を得ることが可能である。In each of the embodiments, an apparatus having two towers of a bubbling tank is illustrated, but the number of the bubbling tanks can be arbitrarily set. In addition, when a plurality of bubbling tanks are provided, the dissolved oxygen concentration can be reduced as compared with the related art by merely sealing the downstream bubbling tank and the piping portion as a double structure without forming all circuits in a double structure as described above. It is possible to obtain low liquids.
【００２０】図３は、溶存酸素濃度７０００ｐｐｂの原
水を前記図１に示した実施例装置と同様の構造で、４塔
のバブリング槽を備えた実験装置を用いて処理した実験
結果を示すもので、窒素と水の供給比率（気液比＝窒素
／水［Ｎｍ3 ／ｍ3 ］）に対する第３バブリング槽及び
第４バブリング槽の出口部の溶存酸素濃度を表してい
る。なお、溶存酸素の測定には、Ｏｒｂｉｓｈｅｒｅ
（Ｍｏｄｅｌ ２７１３）を用いた。FIG. 3 shows an experimental result obtained by treating raw water having a dissolved oxygen concentration of 7000 ppb using an experimental apparatus having the same structure as that of the embodiment apparatus shown in FIG. 1 and having four bubbling tanks. Represents the concentration of dissolved oxygen at the outlet of the third and fourth bubbling tanks with respect to the supply ratio of nitrogen and water (gas-liquid ratio = nitrogen / water [Nm 3 / m 3 ]). In addition, for measurement of dissolved oxygen, Orbishere
(Model 2713) was used.
【００２１】図３において、△印及び○印は、シール用
空間部に窒素ガスを導入せず、バブリング槽等の周囲の
雰囲気を大気状態、即ち酸素濃度２１％の状態とした場
合の第３槽（△印）及び第４槽（○印）の出口部の溶存
酸素濃度を示し、▲印及び●印は、シール用空間部に窒
素ガスを導入してシールし、バブリング槽等の周囲の酸
素濃度を４０ｐｐｍとした場合の第３槽（▲印）及び第
４槽（●印）の出口部の溶存酸素濃度を示している。In FIG. 3, the marks Δ and ○ represent the third case in which nitrogen gas is not introduced into the sealing space and the atmosphere around the bubbling tank or the like is in the atmospheric state, that is, the state where the oxygen concentration is 21%. The concentration of dissolved oxygen at the outlet of the tank (△) and the outlet of the fourth tank (○) are shown. The symbols ▲ and ● indicate that nitrogen gas is introduced into the sealing space and sealed. It shows the dissolved oxygen concentration at the outlet of the third tank (（) and the fourth tank (（) when the oxygen concentration is 40 ppm.
【００２２】この図から明らかなように、バブリング槽
等の周囲の酸素濃度を４０ｐｐｍとした場合、気液比が
０．７のときに第３バブリング槽出口から溶存酸素量６
ｐｐｂの水が得られ、第４バブリング槽出口では溶存酸
素量０．６ｐｐｂの水が得られることがわかる。一方、
窒素ガスでシールしない状態では、気液比が同様に０．
７のときに第３バブリング槽出口で溶存酸素量２０ｐｐ
ｂ、第４バブリング槽出口で溶存酸素量１０ｐｐｂであ
り、また、従来装置では、気液比を増加させても溶存酸
素をある程度以下にするのは極めて困難であることがわ
かる。As is apparent from this figure, when the oxygen concentration around the bubbling tank and the like is 40 ppm, when the gas-liquid ratio is 0.7, the dissolved oxygen amount from the outlet of the third bubbling tank is 6
It can be seen that ppb of water was obtained, and water with a dissolved oxygen amount of 0.6 ppb was obtained at the outlet of the fourth bubbling tank. on the other hand,
In a state where the gas-liquid ratio is not sealed with nitrogen gas, the gas-liquid ratio is also set to 0.1.
At 7 the dissolved oxygen content is 20 pp at the outlet of the third bubbling tank
b, The dissolved oxygen amount at the outlet of the fourth bubbling tank is 10 ppb, and it can be seen that it is extremely difficult to reduce the dissolved oxygen to a certain level or less with the conventional apparatus even if the gas-liquid ratio is increased.
【００２３】また、上記実験は、シール用空間部におけ
る酸素濃度を４０ｐｐｍとしたが、該酸素濃度を低くす
れば、例えば１ｐｐｍにすれば、処理液中の溶存酸素濃
度を更に低減することが可能である。さらに、上記実験
では、外槽をＰＶＣで形成したが、シール用空間部にお
ける酸素濃度を、例えば４０ｐｐｍ以下に保つことがで
きる材料ならば各種のものを使用することが可能であ
り、金属でもよい。In the above experiment, the oxygen concentration in the sealing space was set to 40 ppm. However, if the oxygen concentration was reduced, for example, to 1 ppm, the dissolved oxygen concentration in the processing solution could be further reduced. It is. Further, in the above experiment, the outer tank was formed of PVC, but various materials can be used as long as the material can keep the oxygen concentration in the sealing space at, for example, 40 ppm or less, and metal may be used. .
【００２４】このように、液中に不活性ガスをバブリン
グして液中の溶存酸素を除去する溶存酸素低減装置にお
いて、装置を構成するバブリング槽やバブリング処理後
の液が流れる配管を二重構造とし、その間を不活性ガス
でシールすることにより、より少ない不活性ガス量で多
くの溶存酸素を除去することができ、例えば、半導体産
業で用いる超純水中の溶存酸素量を容易に１ｐｐｂ以下
にすることができる。As described above, in a dissolved oxygen reducing apparatus for removing dissolved oxygen in a liquid by bubbling an inert gas into the liquid, a bubbling tank constituting the apparatus and a pipe through which the liquid after the bubbling treatment flows have a double structure. By sealing the space with an inert gas, a large amount of dissolved oxygen can be removed with a smaller amount of inert gas. For example, the dissolved oxygen amount in ultrapure water used in the semiconductor industry can be easily reduced to 1 ppb or less. Can be
【００２５】なお、上記実施例では、窒素ガスを用いて
純水中の溶存酸素を低減する例を挙げて説明したが、ア
ルゴンやヘリウム等、他の不活性ガスを用いることも可
能であり、純水以外の液体、例えば、ジュース等の飲料
用原水中の溶存酸素を低減する場合にも適用することが
可能である。In the above embodiment, an example in which dissolved oxygen in pure water is reduced by using nitrogen gas has been described. However, other inert gases such as argon and helium can be used. The present invention can also be applied to a case where dissolved oxygen in a liquid other than pure water, for example, raw water for drinking such as juice is reduced.
【００２６】[0026]
【発明の効果】以上説明したように、本発明の溶存酸素
低減装置は、該装置を構成する部材を二重構造に形成し
て不活性ガスでシールし、バブリング槽及び配管の周囲
の酸素分圧を低くしたので、安価で一般的な材料を用い
て装置を構成しても、槽や配管を構成する材料を透過し
て液中に侵入する酸素量を低減でき、最終的な溶存酸素
量を１０ｐｐｂ以下に低減することができる。As described above, in the dissolved oxygen reducing apparatus of the present invention, the members constituting the apparatus are formed in a double structure, sealed with an inert gas, and the oxygen content around the bubbling tank and the piping is reduced. Since the pressure is reduced, even if the apparatus is constructed using inexpensive and general materials, the amount of oxygen that permeates the material constituting the tank and piping and penetrates into the liquid can be reduced, and the final dissolved oxygen amount Can be reduced to 10 ppb or less .
【００２７】したがって、バブリングに必要な不活性ガ
ス量の低減や装置価格の低減が図れ、設備コストや運転
コストの低減とともに、溶存酸素を低減した液の使用先
での信頼性も向上できる。また、バブリングに使用した
後の不活性ガスをシールガスとして用いることにより、
不活性ガス量の低減が図れる。 Therefore, the amount of inert gas necessary for bubbling can be reduced and the cost of the apparatus can be reduced, and the equipment cost and the operating cost can be reduced, and the reliability of the solution in which the dissolved oxygen has been reduced can be improved. Also used for bubbling
By using the later inert gas as the seal gas,
The amount of inert gas can be reduced.
【図１】 本発明の一実施例を示す概略系統図である。FIG. 1 is a schematic system diagram showing one embodiment of the present invention.
【図２】 本発明の他の実施例を示す概略系統図であ
る。FIG. 2 is a schematic system diagram showing another embodiment of the present invention.
【図３】 気液比と溶存酸素濃度の関係を示す図であ
る。FIG. 3 is a diagram showing a relationship between a gas-liquid ratio and a dissolved oxygen concentration.
Ｂ１，Ｂ２…バブリング槽、１ａ，２ａ…導入管、２ｂ
…供給管、３…窒素供給主管、４ａ，４ｂ…窒素供給
管、４ａ，４ｂ…流量調節器、５ａ，５ｂ…ノズル、６
ａ，６ｂ…排気口、７…排気管、１０…外槽、１１…シ
ール用空間部、１２ａ，１２ｂ…シールガス供給管B1, B2 ... bubbling tank, 1a, 2a ... introduction pipe, 2b
... supply pipe, 3 ... nitrogen supply main pipe, 4a, 4b ... nitrogen supply pipe, 4a, 4b ... flow rate controller, 5a, 5b ... nozzle, 6
a, 6b: exhaust port, 7: exhaust pipe, 10: outer tank, 11: sealing space, 12a, 12b: seal gas supply pipe
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭63−16086（ＪＰ，Ａ) 特開 平２−222769（ＪＰ，Ａ) 大矢晴彦監修「純水・超純水製造法− 要素技術と応用システム−」（昭60−３ −20）株式会社幸書房 Ｐ．170 ────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-63-16086 (JP, A) JP-A-2-22769 (JP, A) Supervised by Haruhiko Oya “Pure water / ultra pure water production method-element technology and Application System-”(Showa 60-3-20) Koshobo Co., Ltd. 170
Claims (2)
の溶存酸素を除去する溶存酸素低減装置において、該溶
存酸素低減装置を構成するバブリング槽及びバブリング
処理後の液が流れる配管を外槽で覆って二重構造とし、
前記バブリング槽及び配管と外槽との間を不活性ガスで
シールしたことを特徴とする溶存酸素低減装置。In a dissolved oxygen reducing apparatus for removing dissolved oxygen in a liquid by bubbling an inert gas into the liquid, a bubbling tank constituting the dissolved oxygen reducing apparatus and a pipe through which the liquid after the bubbling treatment flows are provided outside. Covered with a tank to form a double structure,
A device for reducing dissolved oxygen, wherein a space between the bubbling tank and the piping and the outer tank is sealed with an inert gas.
リング槽に用いた後の不活性ガスを用いることを特徴と
する請求項１記載の溶存酸素低減装置。2. The dissolved oxygen reducing apparatus according to claim 1, wherein the inert gas for the seal is an inert gas used in the bubbling tank.
Priority Applications (9)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8756793A JP2649472B2 (en) | 1993-04-14 | 1993-04-14 | Dissolved oxygen reduction device |
| US08/338,547 US5766321A (en) | 1993-04-14 | 1994-04-11 | Apparatus for reducing dissolved oxygen |
| PCT/JP1994/000601 WO1994023816A1 (en) | 1993-04-14 | 1994-04-11 | Dissolved oxygen reducing apparatus |
| KR1019940704347A KR0162115B1 (en) | 1993-04-14 | 1994-04-11 | Dissolved oxygen reducing device |
| DE69427728T DE69427728T2 (en) | 1993-04-14 | 1994-04-11 | DEVICE FOR REDUCING OXYGEN SOLVED |
| KR1019980705314A KR0168313B1 (en) | 1993-04-14 | 1994-04-11 | Apparatus for reducing dissolved oxygen |
| EP94912082A EP0646400B1 (en) | 1993-04-14 | 1994-04-11 | Dissolved oxygen reducing apparatus |
| TW083104635A TW260617B (en) | 1993-04-14 | 1994-05-23 | |
| KR1019980705313A KR0168314B1 (en) | 1993-04-14 | 1998-07-10 | Dissolved oxygen reducing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8756793A JP2649472B2 (en) | 1993-04-14 | 1993-04-14 | Dissolved oxygen reduction device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06296959A JPH06296959A (en) | 1994-10-25 |
| JP2649472B2 true JP2649472B2 (en) | 1997-09-03 |
Family
ID=13918576
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8756793A Expired - Fee Related JP2649472B2 (en) | 1993-04-14 | 1993-04-14 | Dissolved oxygen reduction device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2649472B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2501861B (en) * | 2011-03-15 | 2018-11-28 | Mks Instr Inc | System to remove dissolved gases selectively from liquids |
-
1993
- 1993-04-14 JP JP8756793A patent/JP2649472B2/en not_active Expired - Fee Related
Non-Patent Citations (1)
| Title |
|---|
| 大矢晴彦監修「純水・超純水製造法−要素技術と応用システム−」（昭６０−３−２０）株式会社幸書房 Ｐ．１７０ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06296959A (en) | 1994-10-25 |
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