JP2656801B2 - Vibration suppression support device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to vibrations caused by earthquakes, micro-vibrations caused by automobiles and the like, and floors and equipment mounting tables mounted thereon. The present invention relates to a vibration damping support device used to construct a vibration damping support structure that absorbs and suppresses vibration in the vertical direction.

<Conventional technology> In LSI manufacturing factories and laser application product factories, even micro-vibration causes product failure, so it is necessary to suppress those vibrations. As shown in the overall plan view of the structure and the overall side view of FIG. 5, respectively, at four locations in the circumferential direction between the device mounting table 01 for mounting the manufacturing device and the support 02 such as the floor of the structure. , Interposed spring element 03 such as laminated rubber and air spring,
The device mounting table 01 is elastically supported by the spring elements 03 so as to absorb fine vibrations efficiently by an air spring while reducing shocks caused by vibrations. An actuator 04 such as a linear motor is interposed between the mounting table 01 and the support body 02, and a control force is applied by the actuator 04 according to the vibration of the apparatus mounting table 01 to suppress the vibration of the apparatus mounting table 01. Was configured.

<Problems to be solved by the invention> However, according to the configuration of the conventional example, the spring element 03 for alleviating the impact due to vibration and the actuator 04 for applying the control force are separate members separated from each other. Due to the configuration, there is a disadvantage that a lot of labor is required for assembling the apparatus mounting table 01 and the support body 02, respectively.Moreover, a space for installing these many members is secured between the apparatus mounting table 01 and the support body 02. However, there is a disadvantage that the whole vibration damping support structure becomes large.

Further, the support position of the device mounting table 01 by the spring element 03,
Since the position at which a control force is applied to the device mounting table 01 by the actuator 04 differs, for example, when the actuator 04 is applied to the rectangular device mounting table 01 in plan view as shown in the drawing, providing the actuator 04 at four corners will The element 03 cannot be provided at the four corners, and although the control force can be effectively applied, the support by the spring element 03 becomes unstable,
Conversely, if spring elements 03 are provided at the four corners, the actuator
Depending on the shape of the device mounting table 01, depending on the shape of the device mounting table 01, it is not possible to provide the 04 at the four corners, and it is not possible to effectively apply the control force even if it can be stably supported by the spring element 03.
There was a disadvantage that one of the supporting force and the control force was insufficient.

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and has a structure in which a vibration-damping support structure can be assembled in a small amount of time and in a compact manner. It is an object of the present invention to provide a vibration-damping support device that can effectively act on both the control force and the control force.

<Means for Solving the Problems> In order to achieve such an object, the vibration damping support device of the present invention has an orifice provided between the connecting member connected to the device mounting table and the air tank. An air spring is provided in a state in which the actuator is connected to the air tank, and an actuator is provided in the air tank, and the actuator and the connecting member are interlocked and connected via a connecting member passing through the orifice. .

<Operation> According to the above configuration, the air spring and the actuator can be assembled at once by fixing the air tank to the support body and attaching the connecting member to the device mounting table, and the elasticity of the air spring can be improved. The control force by the actuator is applied to the connecting member itself that transmits the supporting force to the apparatus mounting table, so that the vibration of the apparatus mounting table can be reduced and controlled.

<Example> Next, an example of the present invention will be described in detail with reference to the drawings.

<First Embodiment> Fig. 1 is a front view, partially cutaway, of a supporting device for vibration damping according to the present invention.

In this figure, reference numeral 1 denotes an apparatus mounting table, and a linking member 2 connected to the apparatus mounting table 1 and a floor 3a as a support.
An air spring 4 is provided between the air spring 3 and the air tank 3, and the air spring 4 and the air tank 3 are connected to each other through an orifice 5.

A voice coil type linear motor 6 as an actuator is provided in the air tank 3, and the linear motor 6 and the connecting member 2 are interlocked and connected via a connecting member 7 through an orifice 5. .

A compressor 9 is communicatively connected to the air tank 3 via an on-off valve 8 to supply air into the air spring 4 and the air tank 3 and to adjust the air supply amount to control the internal pressure of the air spring 4. In other words, it is configured such that the elastic supporting force on the device mounting table 1 is adjusted, and the receiving force against the static force can be adjusted.

A control device 10 is connected to the linear motor 6, and a vertical vibration sensor 10 attached to the device mounting table 1.
In response to the signal from a, the controller 10 sends the linear motor 6
When the control signal is output to and the device mounting table 1 is vibrated,
The linear motor 6 is actuated to apply a dynamic force to the apparatus mounting table 1 and to displace the apparatus mounting table 1 with respect to the floor 3a so as to maintain an absolutely stationary state.

As shown in the overall plan view of the vibration-damping support structure in FIG. 2 and the overall front view in FIG. 3 of the vibration-damping support device A configured as described above, the device mounting table is rectangular in plan view. The linear motor 6 is interposed between the floor 1a and the floor 3a at respective four corners of the device mounting table 1 and operated by a control signal from the control device 10 in response to a signal from the vibration sensor 10a. The vibration damping support structure is configured so that a dynamic force having a predetermined strength is applied to effectively absorb and control the vibration of the apparatus mounting table 1.

Here, the case where the present invention is applied to the device mounting table 1 having a rectangular shape in a plan view is shown, but the present invention can also be applied to the device mounting table 1 having a circular shape in a plan view. What is necessary is just to interpose the vibration damping support device A at a position where the center angles are different by 90 ° or 120 ° in the circumferential direction.

In the above-described embodiment, the linear motor 6 is used as an actuator for applying a dynamic force to the apparatus mounting table 1 so as to be advantageous in increasing the response. However, an actuator such as a hydraulic cylinder is used instead. Is also good.

<Effect of the Invention> According to the vibration damping support device of the present invention, the actuator is built in the air spring and the air tank, and the connecting member to be mounted on the device mounting table is shared, so that the air spring and the actuator are individually mounted. As a result, it is possible to provide a vibration-damping support device that can reduce the assembling labor by half as well as the space for installing them is small and the vibration-damping support structure can be made compact.

Moreover, since the vibration of the device mounting table is alleviated and controlled at the same position with respect to the device mounting table via the same connecting member, even when the device mounting table is mounted on the rectangular device mounting table in a plan view, the device mounting can be performed. Regardless of the shape of the device mounting table, both the supporting force and the control force are effective for the device mounting table, for example, both the vibration reduction and control of the mounting table can be applied to the four corners. Can be acted upon.

[Brief description of the drawings]

The drawings show an embodiment of the vibration damping support device according to the present invention,
FIG. 1 is a partially cut-away schematic front view of a support device for vibration suppression
2 is an overall plan view of the vibration damping support structure, FIG. 3 is an overall front view thereof, FIG. 4 is an overall plan view of a conventional vibration damping support structure, and FIG. 5 is an overall front view thereof. is there. DESCRIPTION OF SYMBOLS 1 ... Device mounting stand 2 ... Connecting member 3 ... Air tank 4 ... Air spring 5 ... Orifice 6 ... Linear motor as an actuator 7 ... Connecting material

 ──────────────────────────────────────────────────続 き Continuing from the front page (72) Inventor Kazuki Katayama 3-1-1, Mokudori, Mihara-cho, Minamikawachi-gun, Osaka Prefecture Osaka Research Center, Takenaka Corporation Technical Research Institute Co., Ltd. (72) Inventor Masashi Yasuda Hyogo 5-17-43 Minamitsukaguchicho, Amagasaki-shi Patent Equipment Co., Ltd. (72) Inventor Atsuhiko Mori 1-1-33 Kita-Kasugaoka, Ibaraki-shi, Osaka Mori Technical Research Institute Co., Ltd. (56) References JP-A Sho 62 -114011 (JP, A)

Claims (1)

(57) [Claims] An air spring is provided between a connecting member connected to an apparatus mounting table and an air tank so as to be connected to the air tank via an orifice, and an actuator is provided in the air tank. The actuator and the connecting member are interlockingly connected via a connecting member passing through the orifice.