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JP2658064B2 - Optical waveguide end forming method - Google Patents
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JP2658064B2 - Optical waveguide end forming method - Google Patents

Optical waveguide end forming method

Info

Publication number
JP2658064B2
JP2658064B2 JP62179514A JP17951487A JP2658064B2 JP 2658064 B2 JP2658064 B2 JP 2658064B2 JP 62179514 A JP62179514 A JP 62179514A JP 17951487 A JP17951487 A JP 17951487A JP 2658064 B2 JP2658064 B2 JP 2658064B2
Authority
JP
Japan
Prior art keywords
optical waveguide
optical fiber
optical
substrate
waveguide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP62179514A
Other languages
Japanese (ja)
Other versions
JPS6423208A (en
Inventor
直之 女鹿田
實 清野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP62179514A priority Critical patent/JP2658064B2/en
Publication of JPS6423208A publication Critical patent/JPS6423208A/en
Application granted granted Critical
Publication of JP2658064B2 publication Critical patent/JP2658064B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/30Optical coupling means for use between fibre and thin-film device

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Optical Integrated Circuits (AREA)

Description

【発明の詳細な説明】 〔概 要〕 光ファイバを接続する光導波路の端部形成方法に関
し、 接続強度の向上と光導波路端部形成工数の削減による
低廉化を目的とし、 光導波路が形成されている光導波路基板の一端表面上
に、該光導波路基板と同一材料で且つほぼ同一の厚さの
固定片を接着した後、該固定片を光導波路の直角断面方
向に、少なくとも該固定片の厚さに光ファイバ径の半径
を加えた深さまで、回転式のカッティング・ソーを用い
て、切断削除して光導波路を露出させるように光導波路
端部を構成する。
DETAILED DESCRIPTION OF THE INVENTION [Overview] Regarding a method for forming an end portion of an optical waveguide for connecting an optical fiber, an optical waveguide is formed for the purpose of improving the connection strength and reducing the man-hour for forming the end portion of the optical waveguide to reduce the cost. After adhering a fixed piece of the same material and substantially the same thickness as the optical waveguide substrate on one end surface of the optical waveguide substrate, the fixed piece is attached to at least the fixed piece in a direction perpendicular to the optical waveguide. Using a rotary cutting saw, the end of the optical waveguide is configured to be cut and removed to expose the optical waveguide to a depth obtained by adding the radius of the optical fiber diameter to the thickness.

〔産業上の利用分野〕[Industrial applications]

本発明は光通信システムを構成するデバイスに係り、
特に光ファイバを接続する光導波路の端部形成方法に関
する。
The present invention relates to a device constituting an optical communication system,
In particular, the present invention relates to a method for forming an end portion of an optical waveguide for connecting an optical fiber.

光通信技術が普及するに伴い、光通信システムを構成
する各種部品や装置の信頼性向上や、小型化、低廉化等
の要求が強くなっている。
2. Description of the Related Art As optical communication technology has become widespread, there has been an increasing demand for various components and devices constituting an optical communication system to be improved in reliability, downsized, and inexpensive.

特に光通信システムにおける光信号の伝送効率を左右
する重要な要素である光導波路と光ファイバとの接続に
は種々の手段が講じられているが、更に特性的に安定し
且つ量産性に富み安価に供給できる接続方法の開発が望
まれている。
In particular, various means have been taken to connect the optical waveguide and the optical fiber, which are important factors that affect the transmission efficiency of the optical signal in the optical communication system, but the characteristics are more stable, the mass productivity is high, and the cost is low. There is a demand for the development of a connection method that can be supplied to a computer.

〔従来の技術〕[Conventional technology]

第4図は従来の光導波路端部形状と光ファイバ接続の
状態を示した図であり、第5図は従来の他の光導波路端
部形状と光ファイバ接続の状態を示した図である。
FIG. 4 is a diagram showing a conventional optical waveguide end shape and an optical fiber connection state, and FIG. 5 is a diagram showing another conventional optical waveguide end shape and an optical fiber connection state.

第4図(A)で、1はニオブ酸リチウム(LiNbO3)等
の電気光学結晶よりなる光導波路基板であり、その表面
にはチタン(Ti)蒸着膜をパターニングした後に熱拡散
させて光導波路基板よりも屈折率の大きい光導波路2が
形成されている。
In FIG. 4 (A), reference numeral 1 denotes an optical waveguide substrate made of an electro-optic crystal such as lithium niobate (LiNbO 3 ), on which a titanium (Ti) vapor-deposited film is patterned and thermally diffused. An optical waveguide 2 having a larger refractive index than the substrate is formed.

次いで上記光導波路基板1の導波路を形成した面上
に、該基板1と同一の材料で且つほぼ同じ厚さを有する
長方形状の固定片3をエポキシ系接着剤4で接着し、導
波路2の直角断面で上記固定片3および光導波路基板1
を共にラッピング等の機械的手段を用いて端面研磨して
光導波路2の接合面2aを露出させている。
Next, a rectangular fixing piece 3 made of the same material as that of the substrate 1 and having substantially the same thickness is adhered on the surface of the optical waveguide substrate 1 on which the waveguide is formed with an epoxy-based adhesive 4. Fixed section 3 and optical waveguide substrate 1
Are both polished using mechanical means such as lapping to expose the bonding surface 2a of the optical waveguide 2.

第4図(B)は、この場合の光ファイバと接続した状
態を示している。即ち上記光導波路2の接合面2a部分に
研磨面と同等の平滑面を接続端面とする光ファイバ5の
接合面をあてがい、図示されていない装置側で光信号を
観察しながら最良の条件となる位置を見い出した状態
で、接合面を速硬性のUV硬化接着剤6で接着固定してい
る。
FIG. 4B shows a state where the optical fiber is connected to the optical fiber in this case. That is, the bonding surface of the optical fiber 5 having a smooth surface equivalent to a polished surface as a connection end surface is applied to the bonding surface 2a of the optical waveguide 2, and the best condition is obtained while observing an optical signal on a device (not shown). In a state where the position is found, the joint surface is bonded and fixed with a fast-curing UV-curing adhesive 6.

また、第5図(A)は他の実施例であって、光導波路
基板1上の導波路2が形成されている部分に、エッチン
グによって細くした光ファイバ5の外径(例えば20μ
m)に相当する20μm程度の幅で、深さが外径のほぼ半
分の10μm程度,長さが数mmの溝を、通常のパターニン
グ等の手段によってエッチング除去している。尚、この
場合の光導波路2の接合面2aは、上記のエッチング溝に
露出している。
FIG. 5A shows another embodiment in which the outer diameter (for example, 20 μm) of the optical fiber 5 which is thinned by etching is formed on the portion of the optical waveguide substrate 1 where the waveguide 2 is formed.
A groove having a width of about 20 μm corresponding to m), a depth of about 10 μm, which is almost half of the outer diameter, and a length of several mm is removed by etching by means of ordinary patterning or the like. In this case, the bonding surface 2a of the optical waveguide 2 is exposed in the above-described etching groove.

このときの光ファイバとの接続は、第5図(B)に示
す如く光ファイバ5の接合面を光導波路2の接合面2aに
あてがい、光信号を観察しながら最良の条件となる位置
で光ファイバ5と光導波路2の接合面および光ファイバ
5と光導波路基板1の上記エッチング溝をそれぞれUV硬
化接着剤6で接着固定している。
At this time, the connection with the optical fiber is made by applying the bonding surface of the optical fiber 5 to the bonding surface 2a of the optical waveguide 2 as shown in FIG. The joint surface between the fiber 5 and the optical waveguide 2 and the etching groove between the optical fiber 5 and the optical waveguide substrate 1 are bonded and fixed with a UV curing adhesive 6, respectively.

〔発明が解決しようとする問題点〕[Problems to be solved by the invention]

第4図記載の如き光導波路端部で光ファイバの先端接
合面のみを接着固定する方法では、 光導波路端部を機械的手段によって研磨する工程が必
要であると共に、接着面積が小さいため接着部分で剥離
し易いと云う問題があった。
The method of bonding and fixing only the front end bonding surface of the optical fiber at the end of the optical waveguide as shown in FIG. 4 requires a step of polishing the end of the optical waveguide by mechanical means, and the bonding area is small because the bonding area is small. There is a problem that it is easy to peel off.

また第5図記載の如き光導波路端部で光ファイバをエ
ッチング溝にはめ込んで接着固定する方法では、 LiNbO3等の電気光学結晶がエッチングされにくい材料
であるため、エッチング溝の形成に時間を要すると共
に、光導波路2の接合面がエッチング時に多少の凹凸を
生ずるため光ファイバ接合面と密着せず、光信号を伝送
する際に接続面で損失を伴ない易いと云う問題があっ
た。
In the method of inserting and fixing an optical fiber in an etching groove at the end of an optical waveguide as shown in FIG. 5, it takes time to form an etching groove because an electro-optical crystal such as LiNbO 3 is a material that is difficult to be etched. At the same time, the bonding surface of the optical waveguide 2 has some irregularities during etching, so that it does not adhere to the bonding surface of the optical fiber, and there is a problem that loss is easily accompanied by a connection surface when transmitting an optical signal.

〔問題点を解決するための手段〕[Means for solving the problem]

上記問題点は、光ファイバと光導波路との接続方法に
おいて、光導波路が形成されている光導波路基板の一端
表面上に、固定片を固定する工程と、該固定片及び該光
導波路基板の一部を切断除去することにより、該光導波
路の端部をその切断面上に露出させる工程と該切断面に
露出した光導波路の端部と、該光ファイバの端面とを対
向させ、且つ両者が光学的に接続する位置で該光ファイ
バを固定する工程とからなることを特徴とする光ファイ
バと光導波路との接続方法により解決される。
The above problem is that, in the method for connecting an optical fiber and an optical waveguide, a step of fixing a fixing piece on one end surface of the optical waveguide substrate on which the optical waveguide is formed, and a step of fixing the fixing piece and the optical waveguide substrate. By cutting and removing the portion, the step of exposing the end of the optical waveguide on its cut surface, the end of the optical waveguide exposed on the cut surface, and the end surface of the optical fiber, and both are Fixing the optical fiber at a position where the optical fiber is optically connected.

〔作 用〕(Operation)

光導波路の切断加工に超高精密研削切断機(カッティ
ッグ・ソー)を使用しているために、それぞれの切断加
工面はいずれも光学研磨した場合とほぼ同等の平滑性を
備えている。
Since an ultra-high-precision grinding cutter (cutting saw) is used for cutting the optical waveguide, each cut surface has almost the same smoothness as that obtained by optical polishing.

即ち光ファイバと接続する光導波路の接合面は、光フ
ァイバとの接続に際して伝送損失の生じない良好な面を
形成しているため、改めて研磨する必要がない。
That is, since the joint surface of the optical waveguide connected to the optical fiber forms a good surface where transmission loss does not occur when connected to the optical fiber, there is no need to re-polish.

更に、光ファイバと光導波路との接続も、接合面相互
の接着固定ばかりでなく、光導波路基板と光ファイバ間
でも固定できる。
Furthermore, the connection between the optical fiber and the optical waveguide can be fixed not only between the bonding surfaces of the optical fibers but also between the optical waveguide substrate and the optical fiber.

従って、引っ張り力等の外力に強く且つ加工時間の短
縮による低廉化が可能でまた量産性に富む光導波路と光
ファイバの接続が実現できる。
Accordingly, the connection between the optical waveguide and the optical fiber, which is resistant to external forces such as a pulling force and can be reduced in cost by shortening the processing time and which is rich in mass productivity, can be realized.

〔実施例〕〔Example〕

以下添付図によって本発明の実施例について説明す
る。
An embodiment of the present invention will be described below with reference to the accompanying drawings.

第1図は、本発明になる光導波路端部形成方法を示す
工程図であり、また第2図は本発明になる光導波路端部
と光ファイバの接続状態を示した図、また第3図は本発
明になる他の実施例を示した図である。
FIG. 1 is a process chart showing a method of forming an optical waveguide end according to the present invention, FIG. 2 is a view showing a connection state between an optical waveguide end and an optical fiber according to the present invention, and FIG. FIG. 7 is a view showing another embodiment according to the present invention.

第1図(A)で、1はLiNbO3等の電気光学結晶よりな
る数100〜1000μm程度の厚さを有する光導波路基板で
あり、その表面上には、導波路を形成する如くにパター
ニング等の手段を用いてTiを蒸着し更に熱拡散して形成
した、該基板1より屈折率が大きい光導波路2が形成さ
れている。
In FIG. 1 (A), reference numeral 1 denotes an optical waveguide substrate made of an electro-optic crystal such as LiNbO 3 and having a thickness of about several hundreds to 1000 μm. On the surface thereof, patterning or the like is performed so as to form a waveguide. An optical waveguide 2 having a larger refractive index than that of the substrate 1 is formed by vapor-depositing Ti using the means described above and further thermally diffusing the Ti.

また、上記光導波路基板1上の一端には、該基板
(1)と同一の材料で且つほぼ同じ厚さを有する長方形
状の固定片3が、エポキシ系接着剤4で接着固定してあ
る。
At one end on the optical waveguide substrate 1, a rectangular fixing piece 3 made of the same material as the substrate (1) and having substantially the same thickness is adhered and fixed with an epoxy adhesive 4.

第1図(B)は、回転式のカッティング・ソーで加工
中の状態を示したもので、7はカッティング・ソーの加
工刃を表している。
FIG. 1 (B) shows a state in which a rotary cutting saw is working, and reference numeral 7 denotes a working blade of the cutting saw.

固定片3表面からの加工深さ即ち図示d寸法は、固定
片3の厚さに光ファイバ径の半径を加えた寸法よりも数
μm程度大きくなる如くに設定する。
The processing depth from the surface of the fixing piece 3, that is, the dimension d shown in the figure, is set to be several μm larger than the dimension obtained by adding the radius of the optical fiber diameter to the thickness of the fixing piece 3.

この条件で図示矢指方向(図示R方向)に加工刃7を
回転させながら幅方向(図示Y方向)に移動し、幅全体
に加工溝を形成する。
Under these conditions, the processing blade 7 is moved in the width direction (Y direction in the figure) while rotating the processing blade 7 in the arrow direction (R direction in the figure) to form a processing groove over the entire width.

更に加工刃7をその回転軸方向(図示X方向)に少し
づつずらしながら溝を拡げるたかちで加工を継続する。
Further, the processing is continued by gradually expanding the groove while slightly shifting the processing blade 7 in the rotation axis direction (X direction in the drawing).

第1図(C)はその途中における光導波路端部の形状
を示したものであり、形成された加工溝には、表面を研
磨した場合と同等の平滑性を備えた光導波路2の切断断
面2bが露出している。
FIG. 1 (C) shows the shape of the end of the optical waveguide in the middle thereof, and the formed processing groove has a cut cross section of the optical waveguide 2 having the same smoothness as when the surface is polished. 2b is exposed.

その後、光導波路基板1の端部まで加工を継続して、
第2図(D)に示す本発明になる光導波路の端部を形成
している。
Thereafter, the processing is continued up to the end of the optical waveguide substrate 1,
An end portion of the optical waveguide according to the present invention shown in FIG. 2 (D) is formed.

第2図は本発明になる光導波路端部と光ファイバの接
続状態を示した図である。
FIG. 2 is a diagram showing a connection state between an optical fiber end and an optical fiber according to the present invention.

即ち研磨面と同等の平滑面を接続端面とする光ファイ
バ5の接合面を、光導波路2の加工面に露出した切断断
面2b(第1図(D)に図示)にあてがい、図示されてい
ない装置側で伝送される光信号を観察しながら最良の条
件となる位置でそれぞれの接合面および光ファイバ5と
光導波路基板1の加工面を共に速硬性のUV硬化接着剤6
で接着固定している。
That is, the joining surface of the optical fiber 5 having the connection end surface having the same smooth surface as the polished surface is applied to the cut section 2b (shown in FIG. 1 (D)) exposed on the processing surface of the optical waveguide 2, and is not shown. While observing the optical signal transmitted on the device side, the respective bonding surfaces and the processing surfaces of the optical fiber 5 and the optical waveguide substrate 1 are both fast-cured UV-curing adhesive 6 at the position where the best conditions are obtained.
It is fixed with adhesive.

第3図は本発明になる他の実施例を示す図である。 FIG. 3 is a view showing another embodiment according to the present invention.

即ち、他の実施例としての光導波路端部の形状を示す
第3図(A)は、前述の第1図(C)の状態から加工方
向を90゜変更して光導波路2の光軸中心と合致するよう
な位置方向で、且つ前記加工条件のまま光ファイバが容
易に挿入できる幅w(光ファイバ径が125μmの場合で
は130μm程度)を持つ溝を形成したものである。
That is, FIG. 3A showing the shape of the end of the optical waveguide as another embodiment is different from the state of FIG. 1C described above in that the processing direction is changed by 90 ° and the center of the optical axis of the optical waveguide 2 is changed. And a groove having a width w (about 130 μm when the optical fiber diameter is 125 μm) that allows the optical fiber to be easily inserted under the above processing conditions.

この場合の光ファイバ5との接続状態を示した第3図
(B)は、光ファイバ5と光導波路2のそれぞれの接合
面および光ファイバ5と光導波路基板1の上記溝部分の
両方2個所で第2図の場合と同様に速硬性のUV硬化接着
剤6で接着固定している。
FIG. 3 (B) showing the connection state of the optical fiber 5 and the optical fiber 5 in this case is shown in FIG. As in the case of FIG. 2, a fast-curing UV-curing adhesive 6 is used for bonding and fixing.

〔発明の効果〕〔The invention's effect〕

上述の如く本発明により、光ファイバと強固に接続が
できると共に、加工時間の短縮による低廉化が可能で量
産性に富む光導波路端部形状が提供できる。
As described above, according to the present invention, it is possible to provide an end shape of an optical waveguide that can be firmly connected to an optical fiber, can be reduced in cost by shortening a processing time, and is rich in mass productivity.

【図面の簡単な説明】[Brief description of the drawings]

第1図は本発明になる光導波路端部形成方法を示す工程
図、 第2図は本発明になる光導波路端部と光ファイバの接続
状態を示した図、 第3図は本発明になる他の実施例を示した図、 第4図は従来の光導波路端部形状と光ファイバ接続の状
態を示した図、 第5図は従来の他の光導波路端部形状と光ファイバ接続
の状態を示した図、 である。図において、 1は光導波路基板、 2は光導波路、2bは切断断面、 3は固定片、4はエポキシ系接着剤、 5は光ファイバ、6はUV硬化接着剤、 7は加工刃、 をそれぞれ表している。
FIG. 1 is a process diagram showing a method of forming an optical waveguide end according to the present invention, FIG. 2 is a diagram showing a connection state between an optical waveguide end and an optical fiber according to the present invention, and FIG. 3 is the present invention. FIG. 4 is a view showing another embodiment, FIG. 4 is a view showing a conventional optical waveguide end shape and a state of optical fiber connection, and FIG. 5 is another conventional optical waveguide end shape and a state of optical fiber connection. FIG. In the figure, 1 is an optical waveguide substrate, 2 is an optical waveguide, 2b is a cut section, 3 is a fixing piece, 4 is an epoxy adhesive, 5 is an optical fiber, 6 is a UV curing adhesive, and 7 is a processing blade. Represents.

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】光ファイバと光導波路との接続方法におい
て、 光導波路が形成されている光導波路基板の一端表面上
に、固定片を固定する工程と、 該固定片及び該光導波路基板の一部を切断除去すること
により、該光導波路の端部をその切断面上に露出させる
工程と該切断面に露出した光導波路の端部と、該光ファ
イバの端面とを対向させ、且つ両者が光学的に接続する
位置で該光ファイバを固定する工程とからなることを特
徴とする光ファイバと光導波路との接続方法。
1. A method for connecting an optical fiber to an optical waveguide, comprising: fixing a fixing piece on one end surface of the optical waveguide substrate on which the optical waveguide is formed; By cutting and removing the portion, the step of exposing the end of the optical waveguide on its cut surface, the end of the optical waveguide exposed on the cut surface, and the end surface of the optical fiber, and both are Fixing the optical fiber at a position where the optical fiber is to be optically connected.
JP62179514A 1987-07-17 1987-07-17 Optical waveguide end forming method Expired - Fee Related JP2658064B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62179514A JP2658064B2 (en) 1987-07-17 1987-07-17 Optical waveguide end forming method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62179514A JP2658064B2 (en) 1987-07-17 1987-07-17 Optical waveguide end forming method

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JPS6423208A JPS6423208A (en) 1989-01-25
JP2658064B2 true JP2658064B2 (en) 1997-09-30

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JP2522641Y2 (en) * 1989-02-03 1997-01-16 日本電気株式会社 Waveguide type optical device
JP4682111B2 (en) * 2006-09-14 2011-05-11 富士通株式会社 Waveguide type optical device and manufacturing method thereof

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JPS5834415A (en) * 1981-08-24 1983-02-28 Nippon Telegr & Teleph Corp <Ntt> Coupling method between optical waveguide and optical fiber

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