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JP2677205B2 - Method for growing β-BaB2O4 single crystal - Google Patents
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JP2677205B2 - Method for growing β-BaB2O4 single crystal - Google Patents

Method for growing β-BaB2O4 single crystal

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Publication number
JP2677205B2
JP2677205B2 JP22435794A JP22435794A JP2677205B2 JP 2677205 B2 JP2677205 B2 JP 2677205B2 JP 22435794 A JP22435794 A JP 22435794A JP 22435794 A JP22435794 A JP 22435794A JP 2677205 B2 JP2677205 B2 JP 2677205B2
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JP
Japan
Prior art keywords
crystal
melt
temperature
single crystal
grown
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JP22435794A
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Japanese (ja)
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JPH0891996A (en
Inventor
光 古宇田
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NEC Corp
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NEC Corp
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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】この発明は、β−BaB2 4
結晶の育成方法に関し、さらに詳しくは位相整合方位に
引上げるように加工した種結晶を用いて長尺の高品質結
晶を育成する方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for growing a β-BaB 2 O 4 single crystal, and more specifically, it grows a long high-quality crystal by using a seed crystal processed so as to be pulled up to a phase matching orientation. On how to do.

【0002】[0002]

【従来の技術】波長変換素子に応用されるβ−BaB2
4 (ベータバリウムボレイト、以後BBOと略す)単
結晶は、従来は白金棒を種結晶の代わりに用いてBaB
2 4組成融液から引上法で育成するか、結晶軸である
c軸方向の種結晶を用いた引上法によって育成されてい
た。
2. Description of the Related Art β-BaB 2 applied to a wavelength conversion element
O 4 (beta-barium borate, hereinafter abbreviated as BBO) single crystal is conventionally formed by using a platinum rod instead of a seed crystal, and is made of BaB.
It was grown by the pulling method from the 2 O 4 composition melt or by the pulling method using a seed crystal in the c-axis direction which is the crystal axis.

【0003】c軸方向に育成されたBBO単結晶は、波
長変換素子として高調波を得るために、結晶中で発生し
た高調波と入射した基本波の屈折率が等しくなる方法
(位相整合方法)に加工することが必要である。よっ
て、この結晶はX線とレーザ光線を用いて波長変換のた
めの位相整合方位が定められ、波長変換素子に加工する
工程が取られていた。
The BBO single crystal grown in the c-axis direction has a method in which the harmonics generated in the crystal and the incident fundamental wave have the same refractive index in order to obtain higher harmonics as a wavelength conversion element (phase matching method). It is necessary to process into. Therefore, a phase matching azimuth for wavelength conversion of this crystal is determined using X-rays and a laser beam, and a step of processing into a wavelength conversion element has been taken.

【0004】BBO波長変換素子の位相整合方位は基本
波のレーザ光の波長や偏光方向等によって変化するが、
常光線の基本波から異常光線の高調波を得る場合の例で
はθは式1で表される。
The phase matching azimuth of the BBO wavelength conversion element changes depending on the wavelength and polarization direction of the fundamental laser light,
In the example of obtaining the harmonics of the extraordinary ray from the fundamental wave of the ordinary ray, θ is represented by Equation 1.

【0005】[0005]

【数1】 (Equation 1)

【0006】(n0 は常光の屈折率、ne は異常光の屈
折率、ωは基本波、2ωは高調波を示す。)
(N 0 is the refractive index of ordinary light, n e is the refractive index of extraordinary light, ω is the fundamental wave, and 2ω is the harmonic wave.)

【発明が解決しようとする課題】ところで、波長変換素
子に必要な位相整合方位で長尺のBBO単結晶を引き上
げることができれば加工工程の削減や歩留まりの向上等
のメリットが期待できる。しかしBBO単結晶の場合、
c軸から角度を持った方位で結晶を育成しようとする
と、引き上げ方向に対して直径が減少する方向に発達す
るc面に近い方位の晶癖が発達してしまうため、結晶が
融液から切り離されてしまう。従来はこれを避けるた
め、晶癖が生じ始めたところで融液温度を制御して直径
の変動抑制を試みていたが、融液温度を変動させた部分
からグレインバウンダリーやインクルージョンが発生す
るため高品質で長尺な結晶育成ができなかった。
By the way, if the long BBO single crystal can be pulled in the phase matching azimuth necessary for the wavelength conversion element, merits such as reduction of the processing steps and improvement of the yield can be expected. However, in the case of BBO single crystal,
When a crystal is grown in an orientation with an angle from the c-axis, a crystal habit develops in an orientation close to the c-plane, which develops in a direction in which the diameter decreases with respect to the pulling direction. Get lost. In the past, in order to avoid this, the melt temperature was controlled at the point where crystal habit started to occur, and attempts were made to suppress diameter fluctuations.However, since grain boundaries and inclusions are generated from the part where the melt temperature is fluctuated, it is high. It was not possible to grow a long crystal with high quality.

【0007】本発明の目的は、c軸から角度を持った方
位で結晶を育成するときの育成条件を検討することで、
グレインバウンダリーやインクルージョンの発生のない
高品質で長尺な結晶育成を可能にすることである。
An object of the present invention is to study the growth conditions for growing a crystal in an orientation with an angle from the c-axis,
This is to enable high quality and long crystal growth without generation of grain boundaries and inclusions.

【0008】[0008]

【課題を解決するための手段】本発明は、BBO単結晶
をc軸から傾いた方位の種結晶を用い、シーディング後
融液の温度を一定の割合で降下させることを特徴とする
引上法による長尺なBBO結晶の育成方法である。
The present invention is characterized in that a BBO single crystal is used as a seed crystal having an orientation tilted from the c-axis, and the temperature of the melt after seeding is lowered at a constant rate. It is a method for growing a long BBO crystal by the method.

【0009】育成結晶の直径が減少する方向に発生する
BBOのc面に近い方位の晶癖は融液から熱輻射を受け
て結晶の温度が上昇するため、結晶径は徐々に減少して
いく。結晶径の減少を融液の温度を強制的に制御して抑
制すると育成界面の熱流条件が急激に変動するためグレ
インバウンダリーやインクルージョンの発生が生じる。
しかし育成を開始して晶癖が発生する前から育成される
結晶の直径の変動とは無関係に一定の割合で融液の温度
を降下させることにより、図1のように晶癖の発生間隔
を一定の周期を持たせながら育成界面での熱流条件を急
激に変動させずに引き上げ育成することができる。その
ため育成界面でのグレインバウンダリーやインクルージ
ョンの発生が生じず、結晶を融液から切り放さずに位相
整合方位を引き上げ方向にもつ長尺で高品質なBBO単
結晶を育成することが可能となる。
The crystal habit of BBO, which is generated in the direction in which the diameter of the grown crystal decreases, in the direction close to the c-plane, receives the heat radiation from the melt to increase the temperature of the crystal, so that the crystal diameter gradually decreases. . If the decrease in crystal size is suppressed by forcibly controlling the temperature of the melt, the heat flow conditions at the growth interface change abruptly, and grain boundaries and inclusions occur.
However, by lowering the temperature of the melt at a constant rate irrespective of the variation in the diameter of the crystal grown before the crystal habit is generated after the growth is started, the crystal habit generation interval is set as shown in FIG. It is possible to carry out pulling and growing while maintaining a constant period without rapidly changing the heat flow conditions at the growing interface. Therefore, no grain boundary or inclusion is generated at the growth interface, and it becomes possible to grow a long and high-quality BBO single crystal having a phase matching orientation in the pulling direction without cutting the crystal from the melt. .

【0010】[0010]

【作用】融液から結晶を育成する場合には必ず育成界面
に熱流が存在する。その熱流は融液から結晶への固化率
や育成速度、界面の形状を決める重要なパラメータであ
る。この熱流の変動は結晶品質低下の原因であるグレイ
ンバウンダリーやインクルージョンの発生原因となる。
つまり熱流のコントロールをいかに適正に行うかが育成
結晶の品質を左右する。BBOの場合BaB2 4 組成
融液から大きな過冷却を利用して直接低温相であるβ相
を育成しているため、他の結晶と比較して熱流の変化に
伴う品質の劣化の度合いが大きい。BBOをc軸から傾
いた位相整合方位の種結晶で引き上げ育成すると育成結
晶の側面にc面に近い方位の晶癖が現れ、この面は育成
結晶の直径が減少する方向に発達していくため融液温度
を一定にして引き上げを続けると結晶は融液から結晶が
切り離れてしまう。そこで直径変動の少ない結晶を育成
するために融液の温度を上下させると、それに伴い育成
界面での熱流も変化する。従って育成結晶の直径を融液
温度で制御しようとするとグレインバウンダリーの発生
等結晶の品質が劣化してしまう。つまりBBOの場合、
位相整合方位に高品質で長尺な結晶を育成するためには
結晶径の変動が生じてから融液の温度を制御する方法で
はすでに遅いことがわかる。
When a crystal is grown from the melt, a heat flow always exists at the growth interface. The heat flow is an important parameter that determines the solidification rate from the melt to the crystal, the growth rate, and the shape of the interface. This fluctuation in heat flow causes grain boundaries and inclusions that cause deterioration of crystal quality.
That is, the quality of the grown crystal depends on how to properly control the heat flow. In the case of BBO, since the β phase, which is a low temperature phase, is grown directly from the BaB 2 O 4 composition melt by using a large amount of supercooling, the degree of deterioration of quality due to changes in heat flow is higher than that of other crystals. large. When BBO is pulled up and grown with a seed crystal having a phase matching orientation tilted from the c-axis, a crystal habit of an orientation close to the c-plane appears on the side surface of the grown crystal, and this surface develops in a direction in which the diameter of the grown crystal decreases. If the temperature of the melt is kept constant and pulling is continued, the crystal will separate from the melt. Therefore, when the temperature of the melt is raised or lowered in order to grow a crystal with a small diameter variation, the heat flow at the growth interface also changes accordingly. Therefore, if the diameter of the grown crystal is controlled by the melt temperature, the quality of the crystal deteriorates due to the occurrence of grain boundaries. So in the case of BBO,
It can be seen that in order to grow a high quality and long crystal in the phase matching direction, the method of controlling the temperature of the melt after the crystal diameter fluctuates is already slow.

【0011】そこで育成結晶の直径の変動を融液温度で
抑制するのでは無く、直径を変動させながらも育成界面
の熱流変化をなるべく少ないようにして長尺の結晶を育
成することを考えた。晶癖が成長して直径が変動する前
から融液の温度降下率を適当な一定の割合で選んでやる
ことにより、晶癖が成長して直径が減少していってもあ
る時点で再び直径が増加する方向に変化させることがで
きる。この場合育成界面での熱流は直径が変化しても大
きく変動しないため結晶中にグレインバウンダリーやイ
ンクルージョンが発生せず、図1のように一定の間隔で
くびれを持った長尺の高品質結晶を育成することが可能
となる。
Therefore, it was considered to grow a long crystal by suppressing the change of the heat flow at the growth interface as much as possible while changing the diameter, instead of suppressing the change of the diameter of the grown crystal by the melt temperature. Even if the crystal habit grows and the diameter decreases, by selecting the temperature drop rate of the melt at an appropriate constant rate before the crystal habit grows and the diameter fluctuates Can be changed in an increasing direction. In this case, the heat flow at the growth interface does not change significantly even if the diameter changes, so grain boundaries and inclusions do not occur in the crystal, and a long, high-quality crystal with constrictions at regular intervals as shown in FIG. Can be trained.

【0012】[0012]

【実施例】【Example】

(実施例1)YAGレーザのFHG光(第4高調波)を
得るためのTypeIの位相整合方位はθ=47.6°
である。この方位を長手方向にもつ長さ20mm直径4mm
に加工した種結晶をシーディングして2mm/hrで引き
上げを開始した後、融液の温度勾配を0.5−3.0℃
/hrの一定の割合で降下させたところ1.5±0.2
℃/hrの割合で降下させた場合に図1のように直径が
変動しながらも、位相整合方位で長尺でグレインバウン
ダリーやインクルージョンの含まれない高品質なBBO
単結晶が育成できることがわかった。
(Example 1) The phase matching azimuth of Type I for obtaining the FHG light (fourth harmonic) of the YAG laser is θ = 47.6 °.
It is. Length 20mm with this direction in the longitudinal direction 4mm in diameter
After seeding the seed crystal processed into 2 and starting pulling up at 2 mm / hr, the temperature gradient of the melt was adjusted to 0.5-3.0 ° C.
1.5 ± 0.2 when descending at a constant rate of / hr
High-quality BBO that does not include grain boundaries and inclusions in a long phase-matching azimuth while the diameter fluctuates as shown in Fig. 1 when the temperature is lowered at a rate of ° C / hr.
It was found that a single crystal can be grown.

【0013】(実施例2)YAGレーザのTHG(第3
高調波発生)方位であるθ=31.1°の種結晶で同じ
ように実験したところ、温度降下率が1.6±0.2℃
/hrの場合に図1と同様な、直径変動はあるもののイ
ンクルージョン、グレインバウンダリーの無い長尺の結
晶を育成することができた。
(Embodiment 2) THG of the YAG laser (third embodiment)
The same experiment was conducted with a seed crystal having a direction of generation of harmonics of θ = 31.1 °, and the temperature drop rate was 1.6 ± 0.2 ° C.
In the case of / hr, it was possible to grow a long crystal similar to that shown in FIG. 1, although there was a diameter variation, but no inclusion or grain boundary.

【0014】(実施例3)YAGレーザのSHG(第2
高調波発生)方位であるθ=22.8°の種結晶で実施
例1と同様に結晶の育成を行ったところ、温度降下率が
1.7±0.2℃/hrの場合に図1と同様な、直径変
動はあるもののインクルージョン、グレインバウンダリ
ーの無い長尺の結晶を育成することができた。
(Embodiment 3) YAG laser SHG (second
When a crystal was grown in the same manner as in Example 1 with a seed crystal having θ = 22.8 °, which is the direction of generation of higher harmonics, when the temperature drop rate was 1.7 ± 0.2 ° C./hr, Similar to the above, it was possible to grow a long crystal without inclusion and grain boundary, although there was a diameter variation.

【0015】以上、c軸からの角度θと温度降下率との
相関関係を表1に示す。
Table 1 shows the correlation between the angle θ from the c-axis and the temperature drop rate.

【0016】[0016]

【表1】 [Table 1]

【0017】以上示したように、c軸からの角度θを0
〜90°変化させても、その方位に適当な温度降下率を
選択することにより、高品質なBBO単結晶育成が可能
である。なお、本実施例においては直径が40ミリの坩
堝を使用して実験を行った。
As shown above, the angle θ from the c-axis is 0.
Even if the temperature is changed by 90 °, high-quality BBO single crystal can be grown by selecting an appropriate temperature drop rate in that direction. In the present example, an experiment was conducted using a crucible having a diameter of 40 mm.

【0018】(比較例1)実施例1と同じθ=47.6
°の方位を長手方向にもつ長さ20mm直径4mmに加工し
た種結晶をシーディングして2mm/hrで引き上げを開
始し、融液の温度を一定にして結晶を引き上げたとこ
ろ、図2のようにc面に近い晶癖が成長して直径が減少
し結晶が融液から切り離れた。
(Comparative Example 1) Same as in Example 1 θ = 47.6
Seed crystal seeded with a length of 20 mm and a diameter of 4 mm with the orientation of ° in the longitudinal direction was seeded and started to pull up at 2 mm / hr, and the temperature of the melt was kept constant to pull up the crystal. The crystal habit near the c-plane grew and the diameter decreased, and the crystal separated from the melt.

【0019】(比較例2)実施例1と同じθ=47.6
°の方位を長手方向にもつ長さ20mm直径4mmに加工し
た種結晶をシーディングして2mm/hrで引き上げを開
始し、結晶の直径を約10mmに保つように融液の温度を
コントロールして単結晶を育成したところ、図3のよう
に結晶にインクルージョンが含まれ、またグレインバウ
ンダリーが多い結晶が育成された。
(Comparative Example 2) Same as in Example 1 θ = 47.6
Seed crystal processed to have a length of 20 mm and a diameter of 4 mm with the azimuth direction in the longitudinal direction is seeded and the pulling is started at 2 mm / hr, and the temperature of the melt is controlled so that the diameter of the crystal is maintained at about 10 mm. When a single crystal was grown, a crystal containing inclusions and having a large grain boundary was grown as shown in FIG.

【0020】なお、本発明の結晶成長法は本実施例で示
したYAGレーザ用結晶のみならず、YLFレーザ、Y
VO4 レーザ用結晶にも適用できることはいうまでもな
い。この時、各々のSHG、THG、FHG方位はYA
Gレーザの各々の方位±0.5°の範囲内に存在するの
で方位をこの範囲内で適宜使用するレーザにあわせるこ
とで最適な結晶を育成することができる。
The crystal growth method of the present invention is not limited to the YAG laser crystal shown in this embodiment, but may be a YLF laser or Y crystal.
It goes without saying that it can also be applied to a crystal for a VO 4 laser. At this time, each SHG, THG, FHG direction is YA
Since each direction of the G laser exists within a range of ± 0.5 °, an optimum crystal can be grown by adjusting the direction within this range to a laser used appropriately.

【0021】[0021]

【発明の効果】本発明によればBBO単結晶を位相整合
方位の種結晶を用いて引上法で育成する場合に、グレイ
ンバウンダリー、インクルージョンの無い高品質な長尺
の単結晶を育成することができる。
According to the present invention, when a BBO single crystal is grown by a pulling method using a seed crystal having a phase matching orientation, a high quality long single crystal without grain boundary and inclusion is grown. be able to.

【図面の簡単な説明】[Brief description of the drawings]

【図1】θ=47.6°の方位の種結晶で融液温度を
1.5℃/hrで降下させて育成したBBO単結晶の模
式図である。
FIG. 1 is a schematic view of a BBO single crystal grown with a seed crystal having an orientation of θ = 47.6 ° and a melt temperature lowered at 1.5 ° C./hr.

【図2】図1と同種結晶で融液の温度を一定にして育成
したBBO単結晶の模式図(比較例1)である。
FIG. 2 is a schematic diagram (Comparative Example 1) of a BBO single crystal grown with the same kind of crystal as in FIG. 1 while keeping the melt temperature constant.

【図3】図1と同種結晶で融液温度を制御して直径の変
動を抑えて育成したBBO単結晶の模式図(比較例2)
である。
FIG. 3 is a schematic diagram of a BBO single crystal grown by controlling the melt temperature with the same kind of crystal as in FIG. 1 to suppress the diameter variation (Comparative Example 2).
It is.

【符号の説明】[Explanation of symbols]

1 種結晶 2 晶癖 3 バウンダリー 4 インクルージョン 1 Seed crystal 2 Crystal habit 3 Boundary 4 Inclusion

Claims (4)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】β−BaB2 4 単結晶をc軸から傾いた
方位の種結晶を用い、シーディング後融液の温度を一定
の割合で降下させて引上法で長尺な結晶を育成すること
を特徴とするβ−BaB2 4 単結晶の育成方法。
1. A long crystal is obtained by pulling up a β-BaB 2 O 4 single crystal by using a seed crystal having an orientation tilted from the c-axis and decreasing the temperature of the melt after seeding at a constant rate. A method for growing a β-BaB 2 O 4 single crystal, which comprises growing the single crystal.
【請求項2】θ=22.8±0.5°の方位を長手方向
にもつように加工した種結晶をシーディングして引上げ
を開始した後、融液の温度を1.7±0.2℃/hrの
割合で降下させながらさらに引上げを行うことを特徴と
するβ−BaB2 4 単結晶の育成方法。
2. A seed crystal processed to have an orientation of θ = 22.8 ± 0.5 ° in the longitudinal direction is seeded to start pulling, and then the temperature of the melt is 1.7 ± 0. A method for growing a β-BaB 2 O 4 single crystal, which is characterized in that pulling is further performed while lowering at a rate of 2 ° C./hr.
【請求項3】θ=31.1±0.5°の方位を長手方向
にもつように加工した種結晶をシーディングして引上げ
を開始した後、融液の温度を1.6±0.2°/hrの
割合で降下させながらさらに引上げを行うことを特徴と
するβ−BaB2 4 単結晶の育成方法。
3. A seed crystal processed to have an orientation of θ = 31.1 ± 0.5 ° in the longitudinal direction is seeded to start pulling, and then the temperature of the melt is set to 1.6 ± 0. A method for growing a β-BaB 2 O 4 single crystal, which is characterized by further pulling while lowering at a rate of 2 ° / hr.
【請求項4】θ=47.6±0.5°の方位を長手方向
にもつように加工した種結晶をシーディングして引上げ
を開始した後、融液の温度を1.5±0.2°/hrの
割合で降下させながらさらに引上げを行うことを特徴と
するβ−BaB2 4 単結晶の育成方法。
4. A seed crystal processed so as to have an orientation of θ = 47.6 ± 0.5 ° in the longitudinal direction is seeded to start pulling, and then the temperature of the melt is set to 1.5 ± 0. A method for growing a β-BaB 2 O 4 single crystal, which is characterized by further pulling while lowering at a rate of 2 ° / hr.
JP22435794A 1994-09-20 1994-09-20 Method for growing β-BaB2O4 single crystal Expired - Fee Related JP2677205B2 (en)

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JP22435794A JP2677205B2 (en) 1994-09-20 1994-09-20 Method for growing β-BaB2O4 single crystal

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JPH0891996A JPH0891996A (en) 1996-04-09
JP2677205B2 true JP2677205B2 (en) 1997-11-17

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