JP2689613B2 - Method of manufacturing thin film magnetic head for perpendicular recording - Google Patents

Description

The present invention relates to a method of manufacturing a thin film magnetic head of a perpendicular magnetization recording type used in a magnetic disk device, a magnetic tape device, etc., in which a structure of a main magnetic pole disposition region of a magnetic substrate is improved, A groove having a V-shaped bottom surface on a magnetic substrate and a V-shaped groove formed in a direction orthogonal to the longitudinal direction of the V-shaped groove for the purpose of enhancing a shield effect against an external leakage magnetic field concentrated on the tip of the main pole. A groove having a flat bottom and shallower than the groove, and filling the V-shaped groove and the groove with a non-magnetic insulating material, and then forming an interlayer insulating layer and a thin film so as to cover the groove. A coil and an interlayer insulating layer are sequentially formed, and a main magnetic pole for recording / reproducing is formed on the magnetic substrate surface at the rear end including the interlayer insulating layer, and at the front end is non-magnetic in the V-shaped groove. It is formed so as to respectively extend on the surface of the insulating material, and The ends along the longitudinal direction of the groove on the inclined surface closer to the cutout portion of the V-shaped groove constituting comprises the step of ablating with magnetic substrate.

[Industrial applications]

The present invention relates to a method for manufacturing a perpendicular magnetization recording type thin film magnetic head used in magnetic disk devices, magnetic tape devices and the like.

Perpendicular magnetic recording is drawing attention as a method that can overcome the limit of high density of the commonly used horizontal magnetic recording. In such perpendicular magnetic recording method, perpendicular anisotropy is formed on the soft magnetic layer having high magnetic permeability. A single-pole thin-film magnetic head for perpendicular recording capable of realizing high-density magnetic recording by magnetizing information in a direction perpendicular to the surface of a perpendicular magnetic recording medium having a double-layer film structure in which magnetic recording layers are laminated. Already proposed.

Such a single magnetic pole type thin film magnetic head is easily affected by a leakage magnetic field from the outside, and the main magnetic pole is abnormally excited by the external leakage magnetic field to partially demagnetize or erase already recorded magnetization information. There is a tendency to do. Therefore, there is a demand for a method of easily manufacturing a perpendicular recording thin-film magnetic head having improved reliability by preventing the influence of such an external leakage magnetic field.

[Conventional technology]

The conventional single-pole type thin-film magnetic head for perpendicular recording is the fourth type.
As shown in the plan view of the drawing and the cross-sectional view of FIG. 5 taken along the line AA ′ in FIG. 4, the Ni-Zn, Mn-Zn to be a slider is formed.
A wide groove 12 having a V-shaped bottom surface 12a at the center of the bottom is formed in a predetermined area of a magnetic substrate 11 made of ferrite, and a non-magnetic insulating material 13 such as glass or SiO ₂ is embedded in the groove 12. To do.

Then, on the embedded region of the non-magnetic insulating material 13, a thin film coil 15 and an interlayer insulating layer 14b each having a spiral shape are sequentially formed through an interlayer insulating layer 14a made of a thermosetting insulating resin material or the like as shown in the figure, Further, on the interlayer insulating layer 14b, for example 0.3 ~
A recording / reproducing main magnetic pole 16 made of an amorphous Co—Zr magnetic thin film having a film thickness of 0.5 μm is provided, and its tip portion 16a has the groove 12
On the V-shaped bottom surface 12a of the non-magnetic insulating material 13 and the rear end portion 16b.
Are formed so as to respectively extend on the surface of the magnetic substrate 11.

Further, in the area on the main magnetic pole 16 excluding the tip portion 16a, 3
The magnetic resistance of the main magnetic pole 16 is made low by stacking a raised magnetic layer 17 made of Ni-Fe having a film thickness of about μm, and a high recording / reproducing efficiency is obtained by combining the magnetic pole 11 with the magnetic substrate 11 having a low magnetic resistance. I am trying to get it.

Further, the raised magnetic layer 17 including the main magnetic pole tip portion 16a.
A protective film 18 of Al ₂ O ₃ or the like is formed on the upper surface of the groove 12 and the tip 16a of the main magnetic pole is formed on one inclined surface of the V-shaped bottom surface 12a of the groove 12 along the longitudinal direction of the groove 12. The protective film 18, the non-magnetic insulating material 13 and the magnetic substrate 11 buried in the groove 12 are cut and removed, and a medium facing surface 19 is formed by polishing finish, and the medium facing surface 19 is cut by a slider. It has a shape.

The thin film magnetic head for perpendicular recording having such a structure has a high magnetic permeability soft magnetic layer interposed between the disk substrate and the magnetic recording layer of the perpendicular magnetic recording medium facing each other at the time of recording / reproducing. By using it for the magnetic path between the magnetic pole 16 and the magnetic substrate 11 functioning as a magnetic flux return yoke, high density magnetic recording in the direction perpendicular to the magnetization recording layer of the medium can be achieved.
Playback is possible.

Further, the end surface of the magnetic substrate 11 in contact with the non-magnetic insulating material 13 embedded in the groove 12 in the medium facing surface 19 is inclined, and the edge of the exposed surface of the magnetic substrate 11 and the surface in contact with the non-magnetic insulating material 13 Since the edges of the portions are obtuse, the concentration of magnetic flux from the opposing medium is reduced and the occurrence of edge noise (reproduced waveform distortion) due to the magnetic flux concentration is prevented.

[Problems to be solved by the invention]

By the way, the thin-film magnetic head for perpendicular recording as described above is caused by the presence of the soft magnetic layer in the perpendicular magnetic recording medium of the double-layered film structure described above which is used in combination with the magnetic pole because it is a single magnetic pole type. And is easily affected by a leakage magnetic field from a magnetic mechanism portion such as a medium driving motor or a head driving voice coil motor in a device such as a magnetic disk device, and structurally, the tip of the main magnetic pole shown in FIG. As shown in the medium facing surface where the portion 16a is exposed, since the gap between the main magnetic pole 16 and the magnetic substrate 11 functioning as a magnetic shield is widely separated, the magnetic substrate 11 causes the above-mentioned leakage magnetic field to the main magnetic pole 16. Since the effect of shielding the magnetic field is not sufficiently exerted, the above-mentioned leakage magnetic field is absorbed by, for example, the soft magnetic layer in the perpendicular magnetic recording medium, and the leakage magnetic field absorbed by the soft magnetic layer faces the medium surface. The main magnetic pole 16 of the magnetic head
Since the magnetic field is concentrated on the tip portion 16a of the medium, the main magnetic pole 16 is excited to the extent that it magnetizes the medium, thereby reducing and deteriorating the information on the medium, and in the worst case, erasing. was there.

In view of the above-mentioned problems of the present invention, the present invention has a novel thin film magnetic layer for perpendicular recording in which the structure of the main magnetic pole disposition region of the magnetic substrate is improved to enhance the shield effect against the external leakage magnetic field concentrated at the tip of the main magnetic pole. It is an object to provide a method for manufacturing a head.

[Means for solving the problem]

In order to achieve the above-mentioned object, the present invention has a groove having a V-shaped bottom surface on a magnetic substrate, and a bottom surface which is shallower and flatter than the V-shaped groove in a direction orthogonal to the longitudinal direction of the V-shaped groove. A V-shaped groove and the notch are filled with a non-magnetic insulating material, and then an interlayer insulating layer, a thin-film coil, and an interlayer insulating layer are sequentially formed so as to cover the notch. The recording / reproducing main magnetic pole, including the interlayer insulating layer, has a rear end extending on the magnetic substrate surface and a front end extending on the non-magnetic insulating material surface in the V-shaped groove. And the front end portion of the main magnetic pole is cut along with the magnetic substrate along the longitudinal direction of the groove on the inclined surface near the cutout portion of the V-shaped groove.

(Operation)

In the thin-film magnetic head for perpendicular recording obtained by the manufacturing method of the present invention, the substrate facing surface of the main pole and both side surfaces thereof are surrounded by the magnetic substrate functioning as a magnetic shield via the embedded non-magnetic insulating material. Since the structure is provided, the shield effect of the external leakage magnetic field on the main pole can be enhanced. As a result, demagnetization or erasure of the magnetization information for the already recorded medium is prevented, stable reproduction output characteristics are obtained, and reliability is improved.

〔Example〕

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

1 and 2 are views for explaining an embodiment of a method of manufacturing a thin film magnetic head for perpendicular recording according to the present invention. FIG. 1 is a magnetic substrate in which a non-magnetic insulating material is embedded and a main magnetic pole. FIG. 2 is a plan view of the main part showing the relationship with
It is sectional drawing along the B'cut line.

In each of these drawings, the same parts as those in FIGS. 4 and 5 are designated by the same reference numerals.

In the embodiment, as shown in these figures, the slider is used.
A groove 21 having a V-shaped bottom surface 21a is provided in a region where the main magnetic pole 16 is provided on a magnetic substrate 11 made of ferrite such as Ni-Zn or Mn-Zn.
And a notch 22 having a flat bottom surface shallower than the V-shaped groove 21 in a direction orthogonal to the longitudinal direction of the V-shaped groove 21 and having a width narrower than the main magnetic pole 16, for example, mechanically. Formed by a simple grinding process, and glass is formed in the V-shaped groove 21 and the notch 22.
A non-magnetic insulating material 13 made of SiO ₂ , Al ₂ O ₃ or the like is buried by a heating melting method, a sputtering method or the like.

Next, on the notch 22 in which the non-magnetic insulating material 13 is embedded in the magnetic substrate 11, a spiral thin film coil or the like is provided via an interlayer insulating layer 14a made of a thermosetting insulating resin material as shown in the drawing. 15, an interlayer insulating layer 14b is formed in this order, and a main magnetic pole 16 made of an amorphous Co--Zr magnetic thin film having a film thickness of 0.3 to 0.5 .mu.m is formed on the interlayer insulating layer 14b. The non-magnetic insulating material 13 embedded in the V-shaped groove 21 and the rear end 16b thereof are formed so as to extend on the magnetic substrate 11 surface.

Then, in the area excluding the tip portion 16a on the main magnetic pole 16,
As in the conventional case, a raised magnetic layer 17 made of Ni—Fe is laminated and formed, and a protective film 18 made of Al ₂ O ₃ or the like is formed on the raised magnetic layer 17 including the tip 16a of the main magnetic pole.

Then, the head constituent substrate is attached to the main magnetic pole tip portion 16a.
So that the medium facing surface 19 is formed by cutting the V-shaped groove 21 along the longitudinal direction of the groove 21 at a position corresponding to the inclined surface on the side close to the notch 22. Finalize.

In the thin-film magnetic head constructed by such a method, as shown in the medium facing surface of the main magnetic pole tip 16a in FIGS. 1 and 3, the tip 16a of the main magnetic pole 16 is shown. Since the substrate facing surface and both side surfaces of the first half portion including are surrounded by the magnetic substrate 11 which functions as a magnetic shield through the embedded non-magnetic insulating material 13, the external leakage magnetic field from the medium side Is absorbed by the portion of the magnetic substrate 11 having a large capacitance surrounding the main pole 16 and the concentration of the external leakage magnetic field at the tip 16a of the main pole is reduced. It is possible to prevent the occurrence of an unexpected situation such as demagnetization or deletion.

〔The invention's effect〕

As is clear from the above description, according to the method of manufacturing the perpendicular recording thin-film magnetic head of the present invention, the magnetic member having a low magnetic resistance, that is, the magnetic substrate is arranged so as to surround the main pole on the medium facing surface. Since it has a different structure,
The shield effect of the external leakage magnetic field with respect to the main pole is remarkably enhanced, and the problem that the magnetization information recorded on the medium is demagnetized or erased is prevented, so that the reliability is improved and the practically excellent effect is exhibited.

[Brief description of the drawings]

FIG. 1 is a plan view of relevant parts for explaining an embodiment of a method of manufacturing a thin film magnetic head for perpendicular recording according to the present invention, and FIG. 2 is a cross section taken along the line BB ′ shown in FIG. FIGS. 3A and 3B are plan views of relevant parts showing the vicinity of the tip of the main pole on the medium facing surface of the perpendicular recording thin-film magnetic head according to the present invention, and FIG. 4 describes a conventional method for manufacturing a perpendicular recording thin-film magnetic head. FIG. 5 is a sectional view taken along the line AA ′ shown in FIG. 4, and FIG. 6 is a main magnetic pole tip portion on the medium facing surface of the conventional perpendicular recording thin film magnetic head. It is a principal part top view which shows the vicinity. In FIGS. 1 to 3, 11 is a magnetic substrate, 13 is a non-magnetic insulating material, 14a and 14b are interlayer insulating layers, 15 is a thin film coil, 16 is a main pole, 16a is a main pole tip portion, and 16b is a main pole. A rear end portion, 17 is a raised magnetic layer, 18 is a protective film, 21 is a V-shaped groove, 21a is a V-shaped bottom surface, and 22 is a notch.

Claims (1)

(57) [Claims] 1. A groove (21) having a V-shaped bottom surface on a magnetic substrate (11), and the V-shaped groove (21) extending in a direction orthogonal to the longitudinal direction of the V-shaped groove (21). A notch (22) having a shallow and flat bottom is provided, and the V-shaped groove (21) and the notch (22) are filled with a non-magnetic insulating material (13), and then the notch. An interlayer insulating layer (14a), a thin film coil (15), and an interlayer insulating layer (14b) are sequentially formed so as to cover (22), and a recording / reproducing main pole (16) is further formed on the interlayer insulating layer (14b).
The rear end including the top is formed so as to extend on the surface of the magnetic substrate (11), and the front end is formed so as to extend on the surface of the non-magnetic insulating material (13) in the V-shaped groove (21). The magnetic pole (16a) of the main pole (16) is formed along the longitudinal direction of the groove (21) on the inclined surface of the V-shaped groove (21) near the notch (22). 11) A method of manufacturing a thin-film magnetic head for perpendicular recording, characterized by including the step of cutting with.