JP2701320B2 - Processing method of inkjet head - Google Patents
Processing method of inkjet headInfo
- Publication number
- JP2701320B2 JP2701320B2 JP63125177A JP12517788A JP2701320B2 JP 2701320 B2 JP2701320 B2 JP 2701320B2 JP 63125177 A JP63125177 A JP 63125177A JP 12517788 A JP12517788 A JP 12517788A JP 2701320 B2 JP2701320 B2 JP 2701320B2
- Authority
- JP
- Japan
- Prior art keywords
- ink
- processing
- flow path
- jet head
- present
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000003672 processing method Methods 0.000 title description 4
- 238000000034 method Methods 0.000 claims description 12
- 239000011368 organic material Substances 0.000 claims description 6
- 239000000126 substance Substances 0.000 description 9
- 239000000758 substrate Substances 0.000 description 5
- 238000005266 casting Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 238000007639 printing Methods 0.000 description 4
- 238000005520 cutting process Methods 0.000 description 3
- 239000000428 dust Substances 0.000 description 3
- 238000000465 moulding Methods 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 239000004695 Polyether sulfone Substances 0.000 description 1
- 229920000122 acrylonitrile butadiene styrene Polymers 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229920002492 poly(sulfone) Polymers 0.000 description 1
- 229920005668 polycarbonate resin Polymers 0.000 description 1
- 239000004431 polycarbonate resin Substances 0.000 description 1
- 229920006393 polyether sulfone Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 230000008961 swelling Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
- B41J2/1634—Manufacturing processes machining laser machining
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明はインクジェットプリンタ装置のインクジェッ
トヘッドのうち、主として有機物で構成されたインクジ
ェットヘッドのインク流路やインク噴出口またはインク
吸入口の加工方法に関する。Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for processing an ink flow path, an ink ejection port, or an ink suction port of an ink jet head mainly made of an organic material among ink jet heads of an ink jet printer. .
従来のインクジェットプリンタ用ヘッドでインクに接
する部分が主に有機物を用いたヘッドは他の材料を用い
たものに比べ極めて安価にできるという特性がありその
インク流路やノズルの形成方法には １）光硬化性樹脂
を注形型中で硬化させ型より取り出す方法。２）射出成
形機を用いて成形する方法。３）切削加工やドリル、プ
レス等の機械的に行なう方法。４）炭酸ガスレーザ等を
用いて、局部的に加熱溶融させる方法などがある。Conventional ink-jet printer heads, which mainly use an organic material at the part in contact with the ink, have the characteristic that they can be made extremely inexpensive as compared with those using other materials. A method in which a photocurable resin is cured in a casting mold and removed from the mold. 2) A method of molding using an injection molding machine. 3) Mechanical methods such as cutting, drilling and pressing. 4) There is a method of locally heating and melting using a carbon dioxide gas laser or the like.
しかし、前述の従来技術では下記のような技術課題が
あった。前述の加工方法の１）および２）については、
注形型や成形型から取り出す場合に破損したり、注形型
や成形型そのものの加工を精密に行なうことが困難であ
った。３）については溝加工や穴加工時にバリが発生し
てインク流路を詰まらせたり、不要部分にクラックが発
生しやすかった。４）では加工部分だけでなく加工部周
辺に広く熱変形や溶融を発生させ易く、微細な加工を行
なえなかった。そこで本発明は、上記のような技術課題
を解決するもので、その目的とするところは、インク滴
の大きさや速度が均一な安定したインク噴出を行うこと
ができ、良好な印字が得られるインクジェットヘッドの
加工方法を提供することにある。However, the above-mentioned prior art has the following technical problems. Regarding the above-mentioned processing methods 1) and 2),
It has been difficult to break the casting mold or the mold itself when taking it out of the casting mold or the molding die, and to precisely process the casting mold or the molding die itself. In the case of 3), burrs were generated at the time of groove processing and hole processing, and clogged the ink flow path, and cracks were easily generated at unnecessary portions. In 4), thermal deformation and melting easily occur not only in the processed portion but also around the processed portion, so that fine processing could not be performed. Accordingly, the present invention is to solve the above technical problems, and an object of the present invention is to provide an ink jet that can perform stable ink ejection with uniform size and speed of ink droplets and obtain good printing. An object of the present invention is to provide a head processing method.
本発明のインクジェットヘッドの加工方法は、インク
と接する部分が有機物で構成されたインクジェットヘッ
ドの加工方法において、前記有機物に紫外線レーザービ
ームを照射して、前記有機物を化学的に分解することに
よりインク流路及び／又はインク噴出口となる溝または
穴を形成することを特徴とする。The method for processing an ink-jet head according to the present invention is the method for processing an ink-jet head, wherein a portion in contact with the ink is formed of an organic substance. The method according to claim 1, wherein the organic substance is irradiated with an ultraviolet laser beam to chemically decompose the organic substance. It is characterized in that a groove or a hole serving as a passage and / or an ink ejection port is formed.
本発明の上記の方法によれば、紫外線レーザビームは
波長が短かく、強度も強いため、有機物を構成している
分子の結合エネルギーより高いエネルギーの光子が多量
に照射できるため、有機物を構成している分子そのもの
を高速に効率よく切断でき、機械歪や熱歪を発生しな
い。さらに有機物をCO2やH2Oなどの低分子にまで切断し
てしまうために、バリや切断時のゴミを発生しない。According to the above method of the present invention, since the ultraviolet laser beam has a short wavelength and a high intensity, a large amount of photons having an energy higher than the binding energy of the molecules constituting the organic substance can be irradiated in large quantities. The molecule itself can be cut efficiently at high speed without mechanical or thermal distortion. Further, since organic substances are cut into low molecules such as CO 2 and H 2 O, no burr or dust is generated when cutting.
第１図は本発明の実施例の一例を示す概略説明図であ
る。紫外線のレーザ光源１より発射された紫外光ビーム
２をビームエキスパンダ３で拡げ、平行紫外光ビーム
２′として光ビームを整え、集束レンズ群４を用いて加
工しようとする有機物材料を用いた基板５上に照射し
た。基板５は可動ステージ６に固定しておき、コントロ
ーラ７から可動ステージ６に設置したサーボモータ８に
制御電力を供給することにより基板５を可能ステージ６
と共に所定の軌道上を精密に移動させながら紫外線光ビ
ームを集光照射して加工を行なった。パルスコントロー
ラ９を用いてレーザ光源１に制御パルスを供給すること
により、光ビーム２の強度や照射回数を制御して加工速
度や加工深さを制御した。さらに図には画いてないが集
光レンズ群４を移動させ、該レンズ群の合成焦点を変化
させることにより、集光ビーム径を変化させて、基板５
上の加工溝の幅や穴径やテーパを制御した。本発明では
紫外線レーザ光源１にエキシマーレーザを用いた。レー
ザ発光を行なうために用いた気体はフッ素ガスおよびXe
やKrなどの不活性元素と塩素またはフッ素の結合したも
のを用いた。使用したエキシマレーザ光源の出力は10mJ
以上のものを用い、集束レンズ群４の合成焦点を変化さ
せることにより、10μｍ〜5mmの間で照射ビーム径を変
化させることができた。光ビーム２のパルス幅を約10-8
〜２×107秒の間の所定値に設定し、または変化させ
て、さらに、1Hz〜5KHzの周波数でくり返しまたは単発
照射を行なった。第２図は本発明を用いて、インクジェ
ットヘッド基板を加工し、それらを主に用いて形成した
インクジェットヘッドの概略構成を示す部分断面図であ
る。ただし図を簡単にするためピエゾ振動子などは省略
して画いてある。インクジェットヘッドは、材料にポリ
サルフォン樹脂またはポリエーテルサルフォン樹脂また
は、ABSやポリカーボネート樹脂を用いた。インクの発
射されるノズル穴10やインク流路11、インク吸入口12の
形成を行なった所、前記ノズル穴10やインク流路11、イ
ンク吸入口12の周辺部にバリや盛り上りや変形がほとん
ど発生せず、真円度の高い穴や加工誤差のきわめて小さ
い溝が形成された。またノズル穴10やインク流路11、お
よびインク吸入口12の内部壁は非常になめらかに形成さ
れており、本発明を用いて形成したノズル穴やインク流
路およびインク吸入口を有するインクジェットプリンタ
用ヘッドを製造して印字試験を行なったところ、ノズル
穴より発射されるインク滴の大きさや速度が均一で、良
好な印字を得ることができた。また、紫外線レーザを照
射して、インク流路やインク注入口およびインク噴射ノ
ズル穴などを加工する際に酸素が混入した気体中で行な
うと、加工速度が大きくなり加工効率も向上したばかり
でなく、加工した部分は局部的にインクに対しぬれ性が
飛躍的に向上し、インクの供給や流れ、噴出が非常に安
定した。またインクジェットヘッド内部に気泡が混入し
ても、インクを流すことによってすべて容易に排出する
ことができるようになった。FIG. 1 is a schematic explanatory view showing an example of an embodiment of the present invention. An ultraviolet light beam 2 emitted from an ultraviolet laser light source 1 is expanded by a beam expander 3, a light beam is prepared as a parallel ultraviolet light beam 2 ′, and a substrate using an organic material to be processed using a focusing lens group 4. 5 was irradiated. The substrate 5 is fixed to a movable stage 6, and a control power is supplied from a controller 7 to a servomotor 8 installed on the movable stage 6, whereby the substrate 5 can be moved to a movable stage 6.
At the same time, processing was performed by condensing and irradiating an ultraviolet light beam while moving precisely on a predetermined track. By supplying a control pulse to the laser light source 1 using the pulse controller 9, the processing speed and the processing depth were controlled by controlling the intensity and the number of irradiations of the light beam 2. Further, although not shown, the converging lens group 4 is moved to change the combined focal point of the lens group, thereby changing the converging beam diameter, and
The width, hole diameter and taper of the upper machining groove were controlled. In the present invention, an excimer laser is used as the ultraviolet laser light source 1. The gases used for laser emission were fluorine gas and Xe
A substance in which an inert element such as chromium or Kr is combined with chlorine or fluorine is used. The output of the used excimer laser light source is 10mJ
By using the above and changing the combined focal point of the focusing lens group 4, the irradiation beam diameter could be changed between 10 μm and 5 mm. Pulse width of light beam 2 is about 10 -8
A predetermined value between ２2 × 10 7 seconds was set or changed, and further, repetitive or single shot irradiation was performed at a frequency of 1 Hz to 5 KHz. FIG. 2 is a partial sectional view showing a schematic configuration of an ink jet head formed by processing an ink jet head substrate using the present invention and mainly using them. However, the piezo oscillator and the like are omitted for the sake of simplicity. The inkjet head used a polysulfone resin, a polyethersulfone resin, or an ABS or polycarbonate resin as a material. After the formation of the nozzle hole 10, the ink flow path 11, and the ink suction port 12 from which the ink is ejected, burrs, swelling and deformation around the nozzle hole 10, the ink flow path 11, and the ink suction port 12. Almost no occurrence occurred, and holes with high roundness and grooves with extremely small processing errors were formed. In addition, the inner wall of the nozzle hole 10, the ink flow path 11, and the ink suction port 12 are formed very smoothly, and the ink jet printer having the nozzle hole, the ink flow path, and the ink suction port formed by using the present invention is used. When the head was manufactured and a printing test was performed, the size and speed of the ink droplets ejected from the nozzle holes were uniform, and good printing could be obtained. In addition, when irradiating an ultraviolet laser to process the ink flow path, the ink injection port, the ink injection nozzle hole, and the like in a gas containing oxygen, the processing speed is increased and the processing efficiency is improved. In addition, the wettability of the processed portion with respect to the ink was dramatically improved, and the supply, flow and ejection of the ink were very stable. In addition, even if air bubbles enter the inside of the ink jet head, the ink can be easily discharged by flowing the ink.
以上述べたように、本発明のインクジェットヘッドの
加工方法によれば、有機物に紫外線レーザービームを照
射して、前記有機物を化学的に分解することによりイン
ク流路及び／又はインク噴出口となる溝または穴を形成
することにより、有機物が紫外線レーザービームにより
機械歪み、熱歪みを発生させることなく、また、バリや
切断時のゴミを発生させることなく、インク流路やイン
ク噴出口を形成できる。従って、歪み、バリ、ゴミなど
がインク流路やインク噴出口に発生せずなめらかに形成
されるとともに、インクに対するぬれ性を向上させるこ
とができるため、インク滴の大きさや速度が均一な安定
したインク噴出を行うことができ、良好な印字が得られ
るインクジェットヘッドを提供できる。As described above, according to the inkjet head processing method of the present invention, an organic substance is irradiated with an ultraviolet laser beam to chemically decompose the organic substance, thereby forming an ink flow path and / or a groove serving as an ink ejection port. Alternatively, by forming the holes, the ink flow path and the ink ejection port can be formed without causing the organic substance to generate mechanical distortion and thermal distortion due to the ultraviolet laser beam, and without generating burrs or dust at the time of cutting. Therefore, distortion, burrs, dust, and the like are smoothly formed without being generated in the ink flow path and the ink ejection port, and the wettability to the ink can be improved. It is possible to provide an ink jet head capable of ejecting ink and obtaining good printing.
第１図は本発明の実施例の一例を示す概略説明図。 第２図は本発明を用いて形成したインクジェットヘッド
の概略構成部分断面図。 １……レーザ光源、２……紫外光ビーム ５……基板、２′……平行紫外光ビーム 10……ノズル穴 11……インク流路 12……インク吸入口FIG. 1 is a schematic explanatory view showing an example of an embodiment of the present invention. FIG. 2 is a schematic partial cross-sectional view of an ink jet head formed by using the present invention. DESCRIPTION OF SYMBOLS 1 ... Laser light source, 2 ... Ultraviolet light beam 5 ... Substrate, 2 '... Parallel ultraviolet light beam 10 ... Nozzle hole 11 ... Ink flow path 12 ... Ink suction port
Claims (1)
インクジェットヘッドの加工方法において、 前記有機物に紫外線レーザービームを照射して、前記有
機物を化学的に分解することによりインク流路及び／又
はインク噴出口となる溝または穴を形成することを特徴
とするインクジェットヘッドの加工方法。1. A method for processing an ink jet head in which a portion in contact with ink is made of an organic material, wherein the organic material is irradiated with an ultraviolet laser beam to chemically decompose the organic material, thereby forming an ink flow path and / or an ink. A method of processing an ink jet head, wherein a groove or a hole serving as a jet port is formed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63125177A JP2701320B2 (en) | 1988-05-23 | 1988-05-23 | Processing method of inkjet head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63125177A JP2701320B2 (en) | 1988-05-23 | 1988-05-23 | Processing method of inkjet head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01294047A JPH01294047A (en) | 1989-11-28 |
| JP2701320B2 true JP2701320B2 (en) | 1998-01-21 |
Family
ID=14903802
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63125177A Expired - Lifetime JP2701320B2 (en) | 1988-05-23 | 1988-05-23 | Processing method of inkjet head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2701320B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE69130854T2 (en) * | 1990-11-21 | 1999-08-05 | Canon K.K., Tokio/Tokyo | Laser processing machine |
| DE60030638T2 (en) * | 1999-07-27 | 2007-09-13 | Canon K.K. | Method of making an ink jet recording head |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6024957A (en) * | 1983-07-20 | 1985-02-07 | Seiko Epson Corp | Ink jet recording head and manufacture thereof |
| JPH0649373B2 (en) * | 1984-12-06 | 1994-06-29 | キヤノン株式会社 | Method for manufacturing ink jet recording head |
-
1988
- 1988-05-23 JP JP63125177A patent/JP2701320B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01294047A (en) | 1989-11-28 |
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