JP2706767B2 - Working robot - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION 〔table of contents〕   Overview   Industrial applications   Conventional technology   Problems to be solved by the invention   Means for solving the problem (Fig. 1)   Action   Example (A) Description of the overall configuration of the robot body (Fig. 2) (B) Description of the X-axis module and pallet (FIG. 3,
(Fig. 4, Fig. 5, Fig. 6) (C) Description of X-axis module operation (FIGS. 7 and 8) (D) Description of Y-axis and Z-axis modules and working means (No. 9)
(Fig. 10, Fig. 11, Fig. 11) (E) Description of the jig (FIG. 12, FIG. 13, FIG. 14, FIG. 15)
(Fig.) (F) Description of the configuration of the robot control device (Fig. 16) (G) Description of basic control operation of robot control device (17th
(Fig. 18, Fig. 18) (H) Description of work operation (Figs. 19, 20, 21,
(Fig. 22, Fig. 23, Fig. 24, Fig. 25, Fig. 26) (I) Description of magnetic disk assembly work (FIGS. 27 and 28)
(Fig.)   The invention's effect 〔Overview〕   A work robot in which the work means contacts an article to perform work
A force detection means for detecting the force applied to the working means
Step and a first module for driving the working means in a plurality of axial directions
And an article mounted and driven and positioned in different axial directions
Based on the module 2 and the output of the force detecting means.
And control means for controlling driving of the module.
Work is performed at high speed and with high accuracy.
You. [Industrial applications]   The present invention relates to articles such as taking out, attaching, and screwing articles.
Robot for working means to perform work in contact with
In particular, work robots capable of high-speed, high-precision work
About the tut.   In recent years, with the development of factory automation
Various automatic working machines are used. Such automatic
For work machines, in particular, automatic machines called robots are used.
Have been.   In such robots, work on articles is
A hand to carry out contact with the goods by the hand.
Hand and the hand is 3
Dimensional positioning is performed. [Conventional technology]   In conventional robots, articles are generally jigs, pallets, etc.
Is used, and the hand side is three-dimensionally positioned.
This positioning is based on the position feedback system.
It was done by Him. [Problems to be solved by the invention]   However, in the conventional robot, the hand side is tertiary.
The robot's own inertia is large due to the original positioning.
And it is difficult to drive at high speed.
In addition, the positioning accuracy is determined by the accuracy of the positioning mechanism.
Therefore, high-precision positioning, including positional errors of the target article, is difficult.
When driven at high speed, the impact at the time of contact damages the article.
Problem that precision work is difficult
It was hot.   The present invention relates to a work robot capable of performing high-speed and precise work.
The purpose is to provide a tut. [Means for solving the problem]   FIG. 1 is a diagram illustrating the principle of the present invention.   In the figure, A1 is the first module, and the working means CH is duplicated.
Driving in several axes (for example, two axes of Y axis and Z axis)
2 is a module, and the article DE to be worked is
For positioning on different axes (eg X-axis), BS
Is a force detecting means that detects the force applied to the working means CH
The CT is the control means, which is output from the force detection means BS.
Drive the first module A1 and the second module A2
Dynamic control.   Therefore, the movement of the article DE and the movement of the working means CH
At least three-dimensional positioning and force detection
This positioning is controlled by the output of the means BS.
Become.   That is, the present invention provides an
Movement for moving the effector and the end effector.
A first module having a moving mechanism;
And a second module for positioning the object in one direction.
And driving both the moving mechanism and the object.
In the working robot performing the work by moving,
So as to straddle the second module,
A support mechanism for supporting both sides of the first module;
Provided between the end effector and the moving mechanism,
Force detecting means for detecting the force applied to the end effector
A step, a movement command for moving to the object, and the force
By combining with the force control output from the detecting means, the first
And control means for driving and controlling the module.
Features. [Action]   In the present invention, both the article DE and the working means CH move.
3D positioning is performed by
When their own inertia decreases and high-speed work becomes possible
In both cases, the work means that comes into contact with the article DE by the force detection means BS
High-speed operation is performed because control is performed while detecting the force applied to CH.
Even if it works, it damages the article DE and the work is not performed smoothly.
Prevents accidents, so precise work can be performed
it can. 〔Example〕 (A) Description of the overall configuration of the robot body   FIG. 2 is a structural view of a robot body according to one embodiment of the present invention.
You.   In the figure, 1a and 1b are X-axis modules, respectively.
As described later with reference to FIG.
2a and 2b are covers, respectively, and are X-axis modules 1a and 1 respectively.
b to cover grease, metal powder, etc. from inside the X-axis modules 1a and 1b.
26 is an exhaust tube to prevent scattering to the outside.
Connected to a vacuum exhaust device (not shown)
Exhaust and create an airflow that flows from outside into the cover 2a
It prevents grease and metal powder from scattering to the outside.
The same exhaust tube is provided for the cover 2b.
ing. 3a and 3b are pallets, respectively.
Parts and the like are mounted as described later with reference to FIGS.
Positioned in the X direction by the axis modules 1a and 1b
, 3c is a pin stand, which supports the hole search jig 3d
, 4a and 4b are support parts, respectively, and a Y-axis
And support the feet 40, 41 and
Fixed L-shaped support frames 42, 43 and support frame
And a connector box provided on the
Around the Y-axis module provided between the frames 42 and 43
Cover the bellows cover 45 and exhaust the inside of the bellows cover 45
A pair of exhaust tubes 46 and 47,
It is provided in the bellows cover 45.
As will be described later with reference to FIG.
6 is driven and positioned in the Y direction by the
This is a module that performs drive positioning in the Z-axis direction.
Yes, the motor cover 60 that covers the Z-axis motor and the cover that covers the Z-axis
What is covered by the bar 66, 7a is a suction hand part,
Driven in the Z direction by the Z-axis module 6, the γ-axis mode
Motor cover 71 that covers the motor
With vacuum suction hand 73, 7b is an electric screwdriver
And is driven in the Z direction by the Z-axis module 6, and
It has a cover 77 and an electric screwdriver 78 covering the force sensor.
Things.   For the assembly of the magnetic disk device, the pallet 3a
Day skew closure 80 spins on pallet 3b
Dollar motor 81, magnetic disk 82, spacer 83, etc.
Have been.   In this embodiment, the support portions 4a and 4b are connected to the Y-axis module 5 and the Y-axis module 5, respectively.
And a Z-axis module 6 to form a portal structure, and Y
A pair of X-axis modules 1a and 1b are provided below the axis module 5.
It is installed side by side, basically, X-axis, Y-Z, 3-axis portal robot.
Is composed. The Z-axis module 6 has working means
As a suction hand unit 7a for taking out and attaching articles
And an electric driver section 7b for screw fastening
These are driven in the Y and Z directions, while the pallets 3a and 3b
Is driven in the X direction to perform three-dimensional positioning,
Performs assembly work such as taking out, mounting, and screwing
Like that.   In addition, each module 1a, 1b, 5, 6 covers 2a, 2b,
Covered by cover 45 and covers 60 and 66 and exhaust
Since the inside is evacuated by the valves 26, 46, 47, these
Grease and metal powder accompanying the operation of the gauges 1a, 1b, 5, 6
Spattering to the outside is prevented, and assembly work in a clean room
A robot suitable for the industry is constructed.
The motor is covered by the cover 71 and the electric driver 7b
However, the one-degree-of-freedom force sensor is covered by the cover 77 and
Inside of the receiving hand 7a and vacuum suction hand 73, electric driver 78
Is also exhausted by an exhaust tube (not shown).
The effect of layer dust is enhanced. (B) Description of X-axis module and palette   FIG. 3 is an external perspective view of the X-axis modules 1a and 1b.
FIG. 4 is an internal configuration diagram of the configuration of FIG.   In the figure, reference numeral 10 denotes an X-axis movable portion, which supports a pallet described later.
11 is a ball screw that moves in the X-axis direction
Engage with the X-axis movable part 10 and rotate the X-axis movable part 10
12 and 13 are a pair of guides,
The one that guides the movable axis part 10 in the X-axis direction,
That rotates the ball screw 11, and 15a is a motor
Support solder to which X-axis motor 14 is attached, 15b, 15c
Is a bearing housing.
What is supported by bearings, 16 is a bearing cover
To cover the bearing of the bearing housing 15c,
Reference numeral 17 denotes a coupling, which comprises a motor 14 shaft and a ball screw 11.
18 is a flat cable, movable
For electrically connecting the unit 10 to a control circuit (not shown).
20 and 21 are side plates, and 23 and 24 are side covers.
Which are L-shaped and can be attached to the side plates 20 and 21
Is a center cover and has a U-shape.
Mounted on the housings 15b, 15c, 21a, 21b, 21c, 21d,
21e, 21f, and 21g are tube joints each having a predetermined interval.
Placed on the side plate 21 to communicate with the inside of the cover, 26
a, 26b, 26c, 26d, 26e, 26f, 26g are the branch channels of the exhaust tube 26.
Ubes with one end connected to tube joints 21a-21g
The other end of which is connected to a vacuum pump (not shown)
It is.   BLT is a transport belt, which is described later in the article loading table (pallet).
With a tooth groove for conveying the same), RL
1 and RL2 are rails that are conveyed by the conveyor belt BLT.
This is a rail for pallets.   As shown in FIG. 4, the ball screw 11 is a pair of bearings.
Provided between housings 15b and 15c supported by bearings
Connected to the shaft of the motor 14 via the coupling 17
ing. Accordingly, the ball screw 11 is driven by the motor 14.
Rotates, and the movable part 10 is carded on the guides 12 and 13,
It moves between the pair of bearing housings 15b and 15c.   The ball screw 11 and the movable part 10 are provided on the side plates 20 and 21.
Between the side covers 23, 24 and the housings 15b, 15c
Center cover 25, both ends of which are bare
Closed by the housings 15b and 15c.   Therefore, these covers 23, 24, 25, side plates 20, 21, bearings
Ball screw 11 and movable part 1 by the housings 15b and 15c.
0 is covered on all sides and the top, and the bottom is the floor
From the grease on the ball screw 11 and guides 12 and 13
Dust of the part does not scatter to the outside.
All tangential extensions to cover 23, 24, 25 and side plates 20, 2
Ending at 1 and direct scattering of flying objects by rotation
Can be prevented.   On the other hand, the inside is a tube joint 21 provided on the side plate 21.
(not shown) by exhaust tubes 26a to 26g via a to 21g
It is inserted into the empty exhaust device and always
Internal exhaust is performed and air from the outside to the inside of the X-axis module is
Creates a stream to generate dust, grease, metal powder, etc.
To prevent spills. That is, the internal pressure is reduced by the exhaust,
Outflow of garbage, grease and the like can be prevented.   Also, by providing a plurality of exhaust tubes 26a to 26g,
The fluctuation of the internal pressure distribution due to the high speed movement of the movable part 10.
Therefore, the distribution of grease and the like generated from the movable part 10 is severe.
Change, even when the pressure is momentarily high, multiple dispersed
Exhaust at a location to prevent airflow to the outside
In.   The bearings are also covered with the cover 16, and the motor 14 is also covered.
These are not exposed to the outside by covering with
Increases the prevention of scattering of grease and the like.   As described later, the movable portion 10 of the X-axis module 1a (1b)
Supports the pallet, sends the pallet,
What is positioned at the desired position for work on the load
And the pallets are rails RL1, R
After being transported along the L2 to the X-axis module 1a (1b),
It is supported by the movable part 10 and the desired position is
Is positioned.   FIG. 5 is a detailed configuration diagram of the X-axis module having the configuration of FIG.
FIG. 5 (A) is a perspective view thereof, and FIG.
It is AA 'sectional drawing of figure (A).   In the figure, the same components as those shown in FIG.
The reference numeral 100 denotes a movable frame.
101, 102, 103, 104 are pin guys.
And is composed of open linear bearings,
Provided at the four corners on the frame 100, 105, 106, 107, 108
Is a linear bearing, and four
The role of a moving guide provided at a corner and engaging with the guides 12 and 13
A nut that plays an eye, 109 is a nut, which is associated with the ball screw 11
To be fitted to the frame 100, 111, 1112, 1
13,114 are pins, respectively, and pin guides 101,102,103,
Fits up and down to 104, 115 and 116 are pins
It is a supporting beam and has nuts 115a and 116a in the center.
Pins 111 and 113, 112 and 114 connected at both ends and supported,
117 and 118 are running rails, both of which are pin guides 101 to 104.
For traveling the pallet described later, 1
20, 121 are pin-driven ball screws, and pin support beams 115,
Engage with nuts 115a, 116a of 116 and support pins by rotation
The burrs 115 and 116 are moved up and down.
4 moves up and down. 122 is a pin drive motor.
Fixed to the lower portion of the frame 100 by the fixing portions 126a and 126b.
Connected to the pin drive ball screw 120 by the joint 124.
To rotate the pin drive ball screw 120, 128
Is a flat cable connector.
This is for connection of the level 18. In addition, pin drive ball screw
The motor fixing parts 127a, 1
Joint to pin drive motor 123 fixed by 27b
Linked by 125.   Therefore, the nut 10 of the frame 100 is
Screw 11 and go straight by the rotation of ball screw 11.
And the linear bearings 105,1 at the bottom of the frame 100
06 engages guides 12 and 13 to guide straight-line movement smoothly
I do. Also, the pin drive motors 122, 123
The pin support beams 115 and 116 move up and down due to the rotation.
Accordingly, the pins 111 to 114 move up and down. As a result, the transport
Capture the pallets being transported by the BLT
Touch), release from belt BLT, and return to belt BLT
To do.   FIG. 6 is a detailed configuration diagram of the pallet 3a (3b).
You.   In the figure, the same components as those shown in FIG.
Reference numeral 30 denotes a pallet frame, which will be described later.
For supporting the pallet plate, 31a to 31d are tapered
Holes are provided at the four corners of the pallet frame 30 and
Composed of holes with a taper engaged with 111-114, 3
2a to 32d are pallet fixing angles.
Pallets 3a (3b) are provided at the four corners of the frame 30, and the movable parts
When captured at 10, the running rails 117 and 118 of the movable part 10
To engage and fix the pallet 3a (3b) on the movable part 10
, The wheels 33a to 33d are wheels of the pallet frame 30
Pallet fixing angles 32a to 32d are provided at the four corners.
And the pallet frame 30 runs on the rails RL1 and RL2.
34a to 34d are spacing tubes,
Space between the system 30 and the pallet fixing angles 32a to 32d.
That is, to guarantee rotation of the wheels 33a to 33d, 35a to 35
d is a bolt, and the pallet fixing angles 32a to 32d
For mounting to the pallet frame 30 via the spacing tubes 34a to 34d
And 36a to 36d are screw holes for fixing the pallet plate.
For mounting the pallet plate on the pallet frame 30
37 is a pallet plate on which articles are mounted, and 38 is
It is a belt connection bracket, provided on the side of the pallet plate 37.
And is engaged with the tooth groove of the conveyor belt BLT,
Pallet 3a (3b) is conveyed by feed belt BLT.
Things.   Therefore, the pallet 3a (3b) is a belt of the pallet plate 37.
It is connected to the conveyor belt BLT by the connecting bracket 38 and
Transfer belt BLT on rails RL1 and RL2 by wheels 33a to 33d
And the tapered hole 31a of the pallet frame 30
The pins 111 to 114 are engaged with the pallet frame 30 to 31d.
Lifted and the pallet 3a (3b) is caught on the movable part 10.
And the engagement between the conveyor belt BLT and the belt coupling bracket 38 is released.
This enables ball screw feed. (C) Description of the operation of the X-axis module   FIG. 7 is an explanatory diagram of the operation of the configuration of FIGS. 3 to 6, and FIG.
Is an explanatory view of a feeding operation of the ball screw feeding mechanism in FIG.
It is.   As described in FIGS. 3 and 4, the transport belt BLT is
It always moves to the left in the figure, and palette 3a (3b) is
The belt connection fitting 38 is engaged with the tooth groove of the conveyor belt BLT.
Therefore, the pallet 3a (3b) is connected to the rails RL1 and RL
2 and the transport is performed as shown in FIG. 7 (A).   On the other hand, the movable part 10 is on the motor 14 side as shown in FIG.
Waiting for the arrival of palette 3a (3b).   Furthermore, the pallets 3a (3b) are transported by the transport belt BLT.
The movable part 10 is sent to the standby position
On the cars 117 and 118.   The pallet 3a (3b) is transported to the predetermined position of the movable unit 10.
This is detected by a sensor (not shown) provided in the movable part 10.
Then, the pin drive motors 122 and 123 are driven, and the pin drive
Rotate the ball screws 120 and 121 to remove the pin support beams 115 and 116
Let it rise. As a result, both the pin support beams 115 and 116
The pins 111 to 114 provided on the side rise.   For this reason, as shown in FIGS.
1 to 114 are the tables of the palette frame 30 of the palette 3a (3b).
Insert the pallet frame 30 into the holes 31a to 31d.
Lift the belt connecting bracket 38 of the pallet plate 37 to the conveyor belt BL.
Release contact from T to release contact. Along with this, a palette
As shown in FIG. 8, the fixing angles 32a to 32d
Contact the lower surfaces of the wheels 117 and 118, and the wheels 33a to 33d
Leave from above 7,118.   As a result, the pallet 3a (3b) is fixedly supported on the movable part 10.
Is determined. At this time, the tips of pins 111 to 114 are formed in a tapered shape.
Of the pins 111-114 to the tapered holes 31a-31d
Even if a positioning error occurs due to a time difference in insertion,
Can be absorbed. Also, the tapered holes 31a to 31d of the pallet 3a (3b)
By providing the same taper shape on the pins 111-114
Pallet 3a (3b) held horizontally stable between
it can.   Thus, the palette 3a (3b) is held on the movable part 10.
After that, the positioning motor 14 rotates as shown in FIG.
Then, the ball screw 11 is rotated to move the movable part 10 to the guides 12,1.
Position it at the desired position along 3. This allows
Let 3a (3b) be positioned in the X-axis direction.
For example, a magnetic disk fixed to a jig on the pallet 3b shown in FIG.
The removal of the disk 82 by the suction hand unit 7a is performed.   When the work is completed in this way, the positioning motor 14
Of the movable part 10 by the rotation of the bearing housing 15c
To the left end.   Next, the pin drive motors 122 and 123 are rotated in reverse,
Lower the supporting beams 115 and 116, and lower the pins 111 to 114.
Let As a result, the palette 3a (3b) is lowered, and the palette 3a (3b) is lowered.
Between the tapered holes 31a to 31d of the frame 30 and the pins 111 to 114.
Is released and wheels 33a-33d return to rails 117 and 118
And rails 117 and 118 of pallet fixing angles 32a to 32d
The contact with the lower surface is released, and the palette 3a (3b) is
It becomes free state on 10. Therefore, in palette 3a (3b)
The belt connecting bracket 38 engages with the tooth groove of the conveyor belt BLT,
The pallet 3a (3b) is again moved to the rail R by the conveyor belt BLT.
It is transported to the left of the figure on L1 and RL2.   Thereafter, the movable part 10 is driven by the motor 14 as shown in FIG.
Return to the right end position and wait for the next pallet to arrive.   In this way, the ball screw feed mechanism 1 is provided with the conveyor belt.
The pallet 4 sent by BLT is catched and transported by a bell.
Release from the BLT, perform positioning to the specified position, and
To the conveyor belt BLT.
Return the pallet 4 and release the pallet 4.   Do not stop the belt conveyor line in the above embodiment
Then, the pallets flow one after another and the ball screw feed mechanism
By making decisions, robots can be easily installed on production lines.
Can be incorporated.   In addition to this embodiment, the conveyor belt BLT and the rails RL1 and RL2
Without using the X-axis modules 1a and 1b,
Set the pallet 3a (3b) on the movable part 10 and feed the ball screw
Positioning may be performed by using
Palette 3a (3b) may be fixed to
In this case, it is not necessary to provide a pin vertical movement mechanism. (D) Explanation of Y-axis and Z-axis modules and working means   FIG. 9 shows the Y-axis module and the Z-axis module of FIG.
FIG. 3 is a detailed configuration diagram of a tool, a suction hand unit, and an electric driver unit.
You.   In the figure, 5 indicates the Y-axis module described above, and 51 and 52 indicate its supports.
53 and 54 are guides for supporting frames.
Provided between the arms 51 and 52, 55 is the ball screw
Provided between the support frames 51 and 52,
For moving the Z axis module 6 straight in the Y direction, 56
The above-described Y-axis motor is provided on the support frame 51,
Connected to ball screw 55 via coupling
The screw 55 is rotated.   6 is the aforementioned Z-axis module, and 61 is its Z-axis support.
This is a holding frame that engages with the ball screw 55 and drives in the Y direction.
The reference numeral 62 denotes a Z-axis motor,
It is covered and attached to the Z-axis support frame 61.
That rotate the screw, 63 and 64 are a pair of guides, Z
Provided on the shaft support frame 61 along the Z-axis direction, 6
5 is a ball screw which is rotated by a Z-axis motor 62,
For driving a Z-axis movable block described later in the Z-axis direction, 6
Reference numeral 7 denotes a Z-axis movable block, which is rotated by rotation of a ball screw 65.
Moving straight along guides 63 and 64 in the Z-axis direction
It is.   7a is the suction hand unit described above, and 70 is its supporting frame.
Which is fixed to a movable block 67, 72 is a γ-axis
Motor, covered with the cover 71
Rotate the arm 73 around the γ-axis.
It is a receiving hand that has a suction surface 73a and an intake
Is connected to a vacuum pump by a vacuum
74 is a four-degree-of-freedom force sensor,
External force in the X-axis, Y-axis, Z-axis, and γ-axis directions
This will be described later with reference to FIG.
You.   7b is the above-mentioned electric driver part, and 75 is its supporting frame.
Is fixed to the movable block 67, and 76 is 1
It is a degree of freedom force sensor.
It detects the external force applied to the bar 78 in the Z-axis direction.
Reference numeral 78 denotes an electric screwdriver, which will be described later with reference to FIG.
To perform screw tightening operation by attracting screws.
This will be described later with reference to FIG.   Therefore, the ball screw 55 is driven by the Y-axis motor 56 to
Rotates, and the Z-axis module 6 follows the guides 53 and 54 in the Y direction.
To slide, and the ball is driven by the Z-axis motor 62.
The screw 65 rotates, and the movable block 67 moves the guides 63 and 6 in the Z direction.
4 and slide it along the vacuum suction hand 73 and
The dynamic driver 78 is positioned at a desired position on the YZ plane, and
The vacuum suction hand 73 is centered on the γ axis by the γ axis motor 72.
Is rotated.   FIG. 10 shows the structure of the electric driver 78 and the one-degree-of-freedom force sensor 76.
FIG.   In the figure, reference numeral 76 denotes the one-degree-of-freedom force sensor described above, which is a pair of flat sensors.
Row leaf springs 76a, 76b and on the inner surface of each leaf spring 76a, 76b respectively
It consists of strain gauges 760, 761, 762, 763
Pages 760 to 763 are bridge-connected as shown in FIG. 10 (B).
The output voltage Vout relative to the input voltage Vin
Therefore, the moment applied to the strain gauges 760 to 763,
It detects the external force that has deformed the row leaf springs 76a and 76b.
You.   Reference numeral 78 denotes an electric driver.
This provides a rotating driver,
Tip 782 is connected to a suction tube connected to a vacuum pump.
The tip of the electric screwdriver 782
When the screw comes into contact with the screw, the screw is vacuum-adsorbed and
The tip 782 of the electric screwdriver 78 is covered to form a closed space
To hold the screw at the tip of the driver.
It is. That is, the electric screwdriver 78
It is held by vacuum suction.   FIG. 11 is a configuration diagram of the four-degree-of-freedom force sensor 74 having the configuration of FIG.
FIG. 11 (A) is a perspective view, and FIG. 11 (B) is
It is an exploded perspective view.   In the figure, 740 is a force detector that detects forces in the X, Y, and Z axis directions.
Square rods 741,742 that are modular and extend in two directions, X and Y.
Square holes a, a ', b, b', c, c '
By drilling holes (using electric discharge machining etc.)
And parallel leaf spring bodies a1, a1 ', b1, b1', c1, c1 ', respectively.
To achieve.   The force detection module 740, as evident from FIG.
Each parallel leaf spring body is provided so that the displacement directions are orthogonal to each other
So that the parallel leaf springs a1 and a1 '
Deflection, deflection in the Y-axis direction with parallel leaf springs b1, b1 ', parallel
Three springs that share the deflection in the Z direction with the leaf springs c1 and c1 '
Has freedom.   743 and 744 are supports that support the force detection module 740, respectively
The support 743 is connected to the square bar 742 by screws 745.
The support 744 is connected to the square rod 741 by screws 746.
You. Only one of the screws 745 and 746 is shown.
The screw hole 743a into which 45 is screwed and the other hole are the center of the center hole 740a
The position is set to the same distance from the position, and
The screw holes 744a and 744b into which are screwed are the center positions of the center hole 250a
(L9 = L10).   747 is an output rod connected to the support 743 by screws 748
Through the hole 740a provided in the force detection module 740.
It is configured to pass through.   In this case, the support 744 is fixed to the vacuum suction hand 73.
You.   The output rod 747 is a hole provided in the force detection module 740.
740a, but through support 744
Through the support 744.
To the base on the other side (square bars 741,742 side)
Need to be   749a, 749b, 749c, 749d, 749e, 749f are strain gauges.
To detect the displacement of each parallel leaf spring body a1 ', b1, c1'.
You. Here, this strain gauge converts the axial force into the influence of torque.
Centered around the center hole 740a to detect without receiving
Attached so as to be point objects, and configure each bridge circuit
Close.   Therefore, although not shown, the parallel leaf spring bodies a1, c1, b
The strain gauge also becomes the target position of the center point of the center hole 740a in 1 '
As shown in FIG.   With the configuration described above, for example,
747 has strain gauges 749a and 749b when a force in the X-axis direction is applied.
Detects the displacement of the parallel leaf spring a'1 and applies the force only in the X-axis direction.
Can be detected, and when a force in the Y-axis direction is applied
749e and 749f detect the displacement of the parallel leaf spring b1 and apply a force in the Z-axis direction.
Is applied, the strain gauges 749c and 749d become parallel leaf springs c'1.
And the force components of each axis are detected.   Furthermore, even when the resultant force in multiple directions is applied, the square rod 741,
The position of the force applied to 742 is equal from the center position of the center hole 740a.
743 and 744 at the same distance,
The row leaf spring independently detects each component force Fx, Fy
Can be.   750 is a γ force detection module, which is a force detection module.
Center mounted on the output rod 747 of LE 740 via screw 751
With the member 752, the leaf springs 750a, 750b, 750c, 750d
Includes an outer ring 753 connected via 754a, 754b, 754c, 754d
Is a strain gauge attached to leaf springs 750a and 750c (center
At the center point target position of the material 752)
Construct a ridge circuit.   Attachment of γ-force detection module 750 to output rod 747
Is the center position of the output rod 747 with only the screw 751,
In this configuration, when torque is applied to the outer ring 753,
Actually, it may come out of the center member 752 because
Engage output pin with output shaft 757 to prevent rotation
At the same time, when it deviates from the center,
Need to be specified.   This also indicates that the connection between the output shaft 757 and the support
The same applies to the case.   With this configuration, the center member 752 is fixed and
When torque around the central axis (γ axis) is applied to the wheel 753,
750a, 750b, 750c, 750d bend. Distortion this distortion
754a, 754b, 754c, 754d, and via the bridge circuit
Output to obtain the torque about the Z axis (γ).
T_γOnly can be detected. (E) Description of jig   FIG. 12 shows a pallet (assembled pallet) 3a provided on the pallet 3a.
It is a block diagram of a jig.   In the figure, reference numerals 370a to 370c denote base footrests.
80 feet of quench closure (hereinafter referred to as base)
370d is a stop block, and the base 80
The foot is placed and struck, forming a T-shape
, 371 is a cylindrical member, and the spindle model of the base 80
372 is an L-shaped hooking member
, Composed of an L-shaped spring, engaged with a part of the base 80
And pushes the base 80 against the block 370d.
373 is an elastic block made of, for example, hard rubber.
And a spindle motor set on the base 80 described later
Equipped inside cylindrical part 371 to fix 81 motors
And SC are mounting screws.   The pallet for assembly having such a configuration is provided with the engagement holes of the pallet plate 37.
The cylindrical member 371 is engaged with the
It is fixed to the palette plate 37. Also, L-shaped base footrest 370a ~
370c and abutment block 370d at the four corners of the palette 37
Fix it with the mounting screw SC, and likewise
Is mounted on the left side surface of the pallet plate 37 with the mounting screw SC.
Further, an elastic block is attached to the bottom of the cylindrical member 371 with an adhesive.
And fixed. Completed the assembly pallet shown in Fig. 12 (A).
I do.   To attach the base 80 to this pallet,
Fit the spindle motor mounting hole 800 to the cylindrical member 371
The feet 802, 803, 804, 805 and base feet 370a-370c
Position it on the contact block 370d and pull it on the protrusion 801.
By pulling the crank part of the hook member 372,
Push the foot 805 of the base 80 around the mounting hole 800 and block 37
Position it against 0d.   In this way, the base 80 can be easily mounted and removed.
It is easy to remove the hook member and remove the base 80.
You.   FIG. 13 shows the structure of the jig provided on the component palette 3b.
FIG. 14 is a component mounting diagram in FIG.   In the figure, 374a to 374c are mounting jigs, each having a cylindrical shape.
The jig 374a is for mounting the disk 82, and the jig 374b is
For mounting spacer 83, jig 374c is disc 82
The disk set provided between the disks 82 when mounted on the jig 374a
For holding the delivery spacer 86 (Fig. 14)
375a to 375c are elastic members, which are ring-shaped
It is made of rubber and has jigs 374a, 374b,
It is inserted in 374c. 376 is a motor set
Jig, and the upper edge 37 of the jig as shown in FIG. 14 (C).
6a is equipped with a spindle motor 81 and a positioning pin
376b engages with the screw hole of spindle motor 81 and
377 is a clamp jig.
Provided on the bottom 376c of the motor set jig 376.
This is for mounting the ramper 84.
With a flexible member 378, 379 is a screw stand,
79a with mounting screw 85a mounted, 376d with bullet
376c and the bottom 376c of the motor set jig 376
Provided between product palette plates 37, 86 is for disk storage
It is a spacer and is mounted on the jig 374a of the disk 82.
It is inserted into the jig 374a to maintain an interval between 82.
You.   In the component pallet plate 37 configured as above,
Is the required number of jigs as shown in Fig. 14 (A).
The disk 82 is provided with a disk storage spacer 86 between them.
Fig. 14 shows the jig 374b
As shown in (B), the necessary number of spacers 83 are
Set on 5b. Also, as shown in FIG.
The jig 377 has a clamper 84 set on an elastic member 378.
To the top edge 376a of the motor set jig 376.
Handle 81 inserts its screw hole into positioning pin 376b
It is set. The clamper 84 set in this way
And spindle motor 81 have the same central axis
The space required for installation is small, and the robot is the same.
The spindle motor 81 and the clamper 84 are taught by one position teaching.
Can be conveniently taken out.   Further, mounting screws 85a are set on the screw stand 379,
The setting is completed.   Also, by providing the elastic members 375a to 375c and 378,
(Disc 82, spacer 83, clamper 8
4) has the freedom of rolling and pitching.
The degree of freedom of the robot hand can be supplemented.   FIG. 15 is a configuration diagram of the hole search jig 3d in FIG.
You.   In the figure, reference numeral 390 is a pin for searching for a hole described later.
Pin 390a is thinner than root 390b
391 is a cylindrical part, which is
The pin 390 moves radially.
The one with a moving slot 391a, 392 is a suction surface,
Attached by vacuum suction hand 73, 393 mounted
A metal fitting that holds the pin 390 and attaches it to the cylindrical part 391
394 is a screw for adjusting the pin.
Insert pin 390 between 3 and hold pin 390
395 is a pin adjusting screw, and the mounting bracket 393 is cylindrical.
It is for attaching to the part 391.   In the jig 3d having such a configuration, the center of the jig 3d of the pin 390 is
Loosen adjustment screw 395 and move along slot 391a.
To adjust the height of the pins 390
Loosen the screw 394 and attach the pin 390 to the mounting bracket 393.
It can be adjusted by changing the position. (F) Description of the configuration of the robot control device   FIG. 16 is a block diagram of the robot control device.   In the figure, the same components as those shown in FIGS.
9 is the same symbol, 9 is a robot controller, and 9
0 is a micro computer unit,
(Hereinafter referred to as MPU) 90a and memory 90b.
Read teaching data from memory 90b, analyze command,
Executes the command and switches to the normal control mode as described later.
Run the motor for each axis in the force feedback control mode.
For control, 91a-91e each axis (γ-X2 axis)
Servo circuit, and the current position from the position detection
Place P_γ~ P_X2And command position C from MPU90a_X, C_Y, C_Z, C_γWith
Position control based on the difference, and command speed V from MPU90a_γ
~ V_X2Speed control based on difference from actual speed, 92a-92
e is a power amplifier, each of which is an output of a servo circuit 92a to 92e.
Drive current I to motors 72,62,56,14 of each axis based on force_γ~ I
_X293 is an encoder position detection circuit.
And encoders provided for each axis motor 72,62,56,14
(E in the figure) is counted, and the current position P of each axis is calculated._γ~ P_X2
Is a limit detection circuit, and 94 is a limit detection circuit.
Detects the output of limit sensors (LS in the figure) at both left and right ends
And the detection signal L_Sγ~ L_SX2, 95 are control
Command position C from the MPU 90a._γ~ C_X2, Command speed V
_γ~ V_X2To the corresponding axis servo circuits 91a to 91e
And the current position P of each axis from the encoder position detection circuit 93.
_γ~ P_X2And the detection signal L of the limit detection circuit 94._Sγ~ L
_SX2To the MPU 90a, 96a is an amplifier, 1 free
Z-axis force measurement value F of degree force sensor 76_ZAnd four-degree-of-freedom force sensor 74
X, Y, Z, γ-axis force measurement F_X, F_Y, F_Z, F_γAmplifying, 96b
Is a filter, which filters the high frequency component of the output of the amplifier 96a.
What you need to know is that 96c is an analog / digital converter
Lower A / D converter), and via a filter 96b.
Force measurement value F in each axial direction given_X, F_Y, F_Z, F_γThe digital
97a is a pressure sensor,
The suction tube 781 of the valve 78 and the suction tube of the vacuum suction hand 73
Ube pressure P_D, P_HIs detected, and suction and release of screws are detected.
What is output, 97b is a solenoid valve, the intake of the electric driver 78
Inlet tube and back of tube 781 and vacuum suction hand 73
Turns on / off the connection with the vacuum pump described
97c is a solenoid valve drive circuit that cancels
A device that turns on / off by driving a solenoid valve 97b,
97d is an input / output (I / O) interface
On / off of solenoid valve from MPU90a
Command to the solenoid valve drive circuit 97c,
A detection signal is sent to the MPU 90a, and 98 is an operation unit.
Operator inputs operation start, operation mode, data, etc.
99, a bus, MPU 90a, controller 95, A / D
Connects converter 96c, interface 97d, and operation unit 98
And exchange data and commands between them
It is for.   Reference numeral 29a denotes an evacuation device, and the evacuation tubes 26, 4
6, 47 and vacuum suction hand 7a and electric driver 7b
Continue with each module 1a, 1b, 5, 6
The pumps 7a and 7b are evacuated. 29b is a vacuum pump.
The suction tube 781 of the dynamic driver 78 and the vacuum suction hand 73
Connected via an electromagnetic valve 97b to
The suction operation is performed. (G) Description of basic control operation of robot control device   FIG. 17 is an explanatory diagram of the processing of the MPU 90a, and FIG.
FIG. 4 is an explanatory diagram of a feedback control mode.   The MPU90a executes the teaching data frame in the main routine.
Command is analyzed and executed to execute position commands and speed
Command and force command, and output to the controller 95 via the bus 99.
And the current position P from the controller 95._γ~ P_X2By
The position of each axis and the force measurement value F of the force sensors 76 and 74_γ~ F_X
Is monitored, and the solenoid valve is turned on for the bus interface 97d.
/ Off command. And in normal mode
Gives the command position and command speed directly to the controller 95.
Position each axis to the command position via the servo circuit.
You. On the other hand, in the force feedback mode,
Executes the feedback routine for force feedback control in the period
I do. That is, the force measurement value F of the force sensor_γ~ F_XThe offset
Correction, dead band processing, multiplication by feedback gain, and control output
Force and subtracted from command speed or command force
Command speed V '_γ-V '_X2As a control via bus 99
To 95.   In this dead zone processing, the dead zone width W_γ~ W_XFree
When the set dead zone width is W, the force
If the measurement value F is positive, (FW) is output, and if it is negative, (F +
W).   The following control is achieved by this force feedback control.
Wear.   Command speed V on a certain axis (for example, Z axis)_ZGives
While approaching, as shown in Fig. 18 (A), the command speed V_ZMove with
You. On the other hand, the point P₁When contact is made as shown in Fig. 18 (B)
The force sensor is bent and deformed, and the force measurement value according to the amount of deformation
F_ZOccurs in the range of the dead zone width W._ZIs zero
Therefore, the speed is V_ZAnd F_Z> W, control output G
_ZOccurs and the command speed V_Z, So the Z axis
The moving speed also decreases, and G_Z= V_Z, The Z axis stops.
F in FIG. 18 (B) is the X, Y, Z, γ axis direction.
Force measurement `` F_Z・ F_Y・ F_Z・ F_γIs a generalized version of
Is). Then G_ZIs applied to the article
Therefore, the command speed V_ZHas become a command force. to this
Therefore, approaching, contacting, and pressing on the article are performed continuously.
It is. And regardless of the position of the article in the Z-axis direction,
Is performed, the teaching of the position of the article in the Z-axis direction is
It becomes unnecessary.   Utilizing this, the suction, insertion, and screw suction of articles described later
Wearing, screw tightening, etc. can be performed smoothly.   Also, as shown in FIG. 18 (C), the position command and speed command
When an external force is applied in the axis
Is controlled by the force measurement value F due to the deflection of the force sensor.
Control output is generated, which becomes the commanded speed and the force measurement value F
The axis is driven in the direction of zero. Take advantage of this
When the hand and the article are fitted together,
Even if the fitting becomes difficult, the output of the force sensor will be zero.
Automatically driven in the direction of
As a result, the suction and insertion of the article becomes smoother. (H) Description of work operation   FIG. 19 is an article by the robot of FIG. 2 to FIG.
It is a flowchart of an adsorption | suction operation.   This operation moves to the position indicated by the teaching data.
Later, the force feedback control is turned on and the vacuum suction valve is turned on.
, Open the Z-axis and go down to adsorb the goods, vacuum sensor
Returns to the position indicated by the teaching data if
You.   The MPU90a operates in X, Y, and Z axes according to the teaching data in normal mode.
Command position C_X, C_Y, C_Z, Command speed V_X, V_Y, V_ZAnd emits vacuum
Move the receiving hand 73 to the position indicated by the teaching data with the teaching data.
Move and position at the indicated speed.   Stop for 0.5 seconds until vibration stops.   Next, the MPU90a turns on the force feedback control, and
Set the dead zone width of the shaft to W_X, W_Y, W_ZSet to.   Next, the MPU 90a connects the solenoid valve 97b via the interface 97d.
The solenoid valve 97b is turned on by the drive circuit 97c, and the vacuum suction hand 73 is turned on.
Open the valve.   Next, set the MPU90a to the command speed V_Z1Is output and the force feedback
The Z-axis is lowered by the torque control.   When it comes into contact with the article, force is applied as shown in Figs. 18 (A) and (B).
If the motion stops due to the idle-back control, the MPU 90
For a, it is checked whether or not the pressure is absorbed by the pressure sensor 97a.   The pressing force in the Z direction at this time is F_ZIs set.   If not, adjust the dead zone width of the force in the x and y directions.
Set to 0 to increase sensitivity in x and y directions, and push in Z axis direction
△ F_ZInvestigate whether it is absorbed by increasing it.   In other words, the MPU 90a sets the dead zone width in the X and Y directions to zero, and
To increase the sensitivity of the force feedback,
Order V_ZIs the pressing force F_ZTherefore, V_Z+ △ F_ZEmits.   Pressing force F_ZmaxTry while changing to 10 steps
You. If no attempt is made after 10 attempts, give up and give an error message.
Output a sage.   Turn off the force feedback control and return to normal mode as described above.
Speed indicated by the teaching data to the position indicated by the teaching data
Return in degrees.   FIG. 20 is an explanatory diagram of the article suction operation.   The X and Y directions as shown in FIG.
The hand 73 moves the jig 374a of the disc 82 due to the
The sensitivity in the X and Y directions is increased even if the
As shown in (C), the hand 73 moves in the X and Y directions along the jig 374a.
It is driven and fitting is possible. Also, in FIG.
Even if it fits diagonally as shown above, it is difficult to suck, but the hand 73 is still
Force is controlled and the disk 82 is
Touching and adsorption become possible. Moreover, teaching in the Z-axis direction
Since there is no need to perform this operation, such multi-layered disks 82
Can be sequentially adsorbed and taken out without teaching.   FIG. 21 is a flowchart of the article insertion operation.   This operation teaches the suction hand 73 that has gripped the article.
After moving to the position indicated by the data, force feedback control
Turn ON, lower the Z-axis, arrive at the bottom, stop moving
After closing the valve of the vacuum suction hand,
To return to the position indicated by the teaching data.
You.   The MPU90a operates in normal mode according to the teaching data, and
Command position C_X, C_Y, C_Z, Command speed V_X, V_Y, V_ZOutput and vacuum
Move the suction hand 73 to the position indicated by the teaching data.
Move and position at the speed indicated by.   Wait 0.5 seconds for the vibration to stop.   The MPU90a turns on the force feedback control and disables each axis.
Sensitivity width (hardness) is W_X, W_Y, W_ZAnd V_Z= V_Z1And   As a result, the Z axis, that is, the vacuum suction hand 73 is lowered.
To go.   When it comes into contact with the article, force is applied as shown in Fig. 18 (A) and (B).
The motion of all axes stops by the feedback control. MPU90a is true
Close the solenoid valve 97b of the empty suction hand 73, and remove
Let go. MPU90a checks this by the output of pressure sensor 97a.
You.   Turn off the force feedback and set the teaching data in the normal mode.
To the position indicated by the data at the speed indicated by the teaching data.
You.   FIG. 22 is a flowchart of the screw suction operation.   This operation is almost the same as the article suction operation in FIG.
The electric driver 78 to the position indicated by the teaching data
Turn on the feedback box, lower the Z-axis, and absorb the screw
When it senses that
It is.   The MPU90a operates in normal mode according to the teaching data, and
Command position C_X, C_Y, C_Z, Command speed V_X, V_Y, V_ZEmits an electric
Indicate driver 78 to the position indicated by teaching data with teaching data
Move and position at the speed indicated.   Stop for 0.5 seconds until vibration stops.   Next, the MPU 90a turns on the force feedback control.   Next, the MPU 90a connects the solenoid valve 97b through the interface 97d.
The solenoid valve 97b is turned on by the drive circuit 97c and the valve of the electric driver 78 is turned on.
Open Lube.   Next, set the MPU90a to the command speed V_Z= V_SZ1And output the force feed
The Z-axis is lowered by the back control.   When it comes into contact with the screw, force is applied as shown in Fig. 18 (A) and (B).
If the motion stops due to feedback control, the MPU
90a checks whether or not the pressure is absorbed by the pressure sensor 97a.   The pressing force in the Z direction at this time is F_ZIs set.   Turn off the force feedback control and return to normal mode as described above.
Speed indicated by the teaching data to the position indicated by the teaching data
Return in degrees.   FIG. 23 is a flowchart of the screw tightening operation.   This operation indicates the electric driver 78 by the teaching data.
After moving to the position, turn on the force feedback control and
And the force sensor 76 of the electric driver 7b
After detecting the above, move down the Z axis for the specified time
Return to the position indicated by the teaching data
It is.   The MPU90a operates in normal mode according to the teaching data, and
Command position C_X, C_Y, C_Z, Command speed V_X, V_Y, V_ZOutput
Move the driver 78 to the position indicated by the teaching data with the teaching data.
Move at the indicated speed and position.   Wait 0.5 seconds for the vibration to stop.   Turn on the force feedback control, and_Z= V_SZ1Set to
You.   As a result, the Z axis is lowered.   In the case of temporary tightening, it is necessary to
The feedback control shown in FIGS.   In the case of final tightening, the screw is similarly stopped by hitting the head of the screw.
Is controlled.   On the other hand, the MPU 90a is a force meter of the force sensor 76 of the electric driver 78.
Measurement F_ZMonitoring, for example, a force of 1/4 of the dead zone width was detected.
The lowering speed of the Z axis is V '_SZ1(V '_SZ1<V '_SZ1)When
And make it suitable for screw tightening.   The electric screwdriver 78 is turned off when it receives a specific axial load.
To rotate the driver and operate at less than the specified torque.
Screw the screw into the screw hole and tighten the load torque.
When it increases, rotation stops.   Lowering speed V 'during temporary tightening_SZ1Temporary descent time at
Set to minutes, go to step, and at the time of final fastening, decrease speed
V '_SZ1Set the descent time at
You.   Next, the MPU90a turns off force feedback control and teaches
To the position specified by the data at the speed indicated by the teaching data
return.   FIG. 24 is an explanatory diagram of the hole alignment operation, and FIG.
FIG. 26 is an explanatory diagram of the operation of the search pin.
You.   As shown in FIGS. 24 and 26, the spindle motor
Screw holes H10 to H12 on the hub 81a of 81 and provided on it
Fig. 15 shows the alignment of the clamper 84 with the fool holes H20-H22.
What is done with the hole search jig 3d
You.   First, the hand 73 descends in the Z direction as shown
The jig 3d on the jig stand 3c is sucked. Cylindrical part of jig 3d
The 391 is in a mating relationship with the hand 73, and is attached to the suction surfaces 73a and 73b.
Accordingly, the suction surface 392 is sucked and held by suction. This dynamic
The operation is the same as the suction operation in FIG.   Next, the hand 73 is moved up in the Z direction as shown in FIG.
And is positioned on the clamper 84.   Next, the hand 73 descends in the Z-axis direction as shown in FIG.
The pin 390 that has been sucked and gripped contacts the surface of the clamper 84.   Here, the hole H20 of the clamper 84 as shown in FIG.
Assume that the screw holes H10 to H12 of the hub 81a are different from the screw holes H10 to H12 of the hub 81a.
It is assumed that the contact 390 contacts the clamper 44 as shown in the figure.   The hand 73 rotates around the γ-axis and searches for holes in the clamper 84
Perform The jig 3d is rotated by the rotation of the hand 73,
The tip of the 390 moves on the surface of the clamper 84 as shown in Fig. 26 (A).
Move. At this time, the pressing force is given in the Z-axis direction.
When it reaches the position of the hole H21 of the clamper 84, FIG.
As shown in (B), the pin 10 falls into the hole H21 and contacts the hub 41b.
I do.   Further, a pressing force was applied to the Z axis as shown in FIG.
When the hand 73 is rotated around the γ-axis,
The end follows the surface of the hub 81a through the hole H21, and the clamper 84 is
Rotated by engagement with H21. And the hub 81a
When the screw hole H11 is reached, the tip of the pin 390 becomes the screw hole H1.
As shown in Fig. 26 (D), pin 390 goes through hole H21.
Then, it is inserted into the screw hole H11. At this time, the tip 390a of the pin 390
Only the part falls into the screw hole H11, and the root 390b is the screw hole H11
Because it is thicker, it cannot be entered at the entrance of screw hole H11.
Prevents inadequate entry.   When the hole alignment is completed in this way, the hand
73 is moved in the order of
Return to step 3c and end. (I) Explanation of magnetic disk assembly work   FIG. 27 is an explanatory view of the assembly of the magnetic disk device, and FIG.
It is a flowchart for such an assembly.   In this assembling operation, the parts shown in FIGS.
As described above, the base (disc quenching)
Rosier), and the parts pallet 3b
The aforementioned magnetic disk 82, spacer 83, and spin
The dollar motor 81, the clamper 84, and the mounting screw 85a
Mounted on jigs 374a, 374b, 376, 377, screw stand 379
deep.   The parts palette 3b is moved by the X-axis module 1b.
The suction hand 73 is positioned in the X-axis direction and
It is positioned and driven in the Z-axis direction to
The product is adsorbed and taken out, and moved in the X-axis direction by the X-axis module 1a.
Attach to the base 80 on the positioned pallet 3a. one
The electric screwdriver 78 is the same as the mounting screw for the parts pallet 3b.
Take out 85a by suction and screw it to the base 82 etc. of the pallet 3a.
Perform   Hereinafter, the assembly of the magnetic disk device will be described. (I) The suction hand 73 first moves the spindle model of the pallet 3b.
Removes the data 81 and attaches it to the base 80 of the pallet 3a
You. (Ii) Next, the suction hand 73 picks up the hole search pin 3d.
Hold the base 80 and the hole of the spindle motor 81 on the base 80
Make sure that they match by inserting pin 390.
Then, return the hole search pin 3d to the stand 3c. (Iii) Next, the electric screwdriver 78 attaches the pallet 3b.
The spindle 85a is removed by suction on the palette 3a.
Screw 81 to the base 80. At this time, screw 85a
After temporary tightening, fully tighten. (Iv) Next, the suction hand 73 is moved from the pallet 3b to the magnetic disk.
Take out the spindle motor 81 on the pallet 3a.
Inserted into the pindle (hub) 81a
Find out. (V) If the required number of sheets have not been inserted, the suction hand 73
Removes the spacer 83 from the pallet 3b and removes it from the pallet 3a.
Insert into the spindle 81a of the spindle motor 81,
73 is a disk storage space between the magnetic disks 82 of the jig 374a.
Suction 86 (see Fig. 14)
Insert the jig 374c, and return to step (iv). (Vi) The required number of magnetic disks 82 are
After the insertion into the spindle 81a of the suction 81, the suction hand 73 is
The clamper 84 of the pallet 3b is sucked and taken out, and the
The spindle motor 81 is fitted on the spindle 81a. (Vii) Next, the suction hand 73 is the same as in step (ii).
Hold the pin 3d for hole search by suction, and
Align the hole of pindle 81b, and pin 3d for hole search
To the stand 3c. (Viii) Next, the electric screwdriver 78 attaches the pallet 3b.
Take out the screw 85a by suction and temporarily tighten and then fully tighten as described above.
And spin the clamper 84 with the mounting screw 85a.
The screw 81 is fixed to the dollar 81a to complete the assembly.   In the above-described embodiment, the assembly operation of the magnetic disk device is performed.
However, the present invention is not limited to this, and the assembly work of other devices
The work means may be electric screwdriver, suction
Not limited to   The present invention has been described with reference to one embodiment.
Various modifications are possible in accordance with the gist of the invention.
These are not excluded. 〔The invention's effect〕   As described above, according to the present invention, the following effects can be obtained.
I do. When moving in the desired space and moving to the target,
While not receiving the binding force, perform rigid high-speed movement control,
Automatically shifts to external force adaptive control when receiving a binding force from the object
The object can be
And autonomous adaptive control according to the state of. Control is performed by combining the movement command to the target and the force command.
Can be moved at high speed to the target by the movement command.
When touching, can move to force control and work on the object at high speed
It can be performed. By driving both the object and the end effector to each other,
By performing the work, high-speed work becomes possible. A second module supporting both ends of the first module;
So that the first module is supported
Supporting and strengthening synthesis, such high-speed driving and external force adaptation
Control can be executed with high accuracy.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a view for explaining the principle of the present invention, FIG. 2 is an overall structural view of an assembled robot main body according to one embodiment of the present invention, and FIG. Perspective view, FIG. 4 is an internal configuration diagram of the X-axis module of FIG. 3, FIG. 5 is a detailed configuration diagram of the X-axis module of FIG. 4, and FIG. 6 is a pallet used in the configuration of FIG. 7 and 8 are explanatory diagrams of the operation of the X-axis module of FIGS. 4 to 6, and FIG. 9 is a configuration diagram of the Y- and Z-axis modules and the working means of FIG. 10 is a configuration diagram of the electric driver and the one-degree-of-freedom force sensor in the configuration of FIG. 9, FIG. 11 is a configuration diagram of a four-degree-of-freedom force sensor in the configuration of FIG. 9, and FIG. FIG. 13 is a diagram showing the structure of a pallet jig, and FIG. 13 is a diagram showing the structure of a pallet jig for the component shown in FIG. 13 is a component mounting diagram of the component pallet, FIG. 15 is a block diagram of a hole searching jig in the configuration of FIG. 2, FIG. 16 is a block diagram of a robot control device in the configuration of FIG. 2, and FIG. FIG. 16 is an explanatory diagram of the processing in the processor having the configuration of FIG. 16, FIG. 18 is an explanatory diagram of the force feedback control mode in FIG. 17, FIG. 19 is a flow chart of the article suction operation by the configuration of FIG. 2 and FIG. FIG. 9 is an explanatory diagram of the article suction operation, FIG. 21 is a flow chart of the article insertion operation according to the configuration of FIGS. 2 and 16, FIG. 22 is a flow chart of the screw suction operation according to the configuration of FIG. 2 and FIG. The figure is a flow chart of the screw tightening operation according to the configuration of FIGS. 2 and 16, FIG. 24 is an explanatory view of the hole alignment operation according to the configuration of FIGS. 2 and 16, and FIG. 25 is the configuration of FIG. 2 and FIG. 26 is a flowchart of the operation of the search pin shown in FIG. 24, and FIG. An illustration of an example of assembly work by Botsuto, Figure 28 is an assembly work flow diagram of the magnetic disk apparatus of Figure 27. In the figure, A1,5,6 ... first module, A2,1a, 1b ... second module, DE, 7a, 7b ... working means, DE, 80-85a ... article, CT, 9 ... ... Control means.

Continuation of front page    (72) Inventor Tadashi Akita               Fujitsu, 1015 Ueodanaka, Nakahara-ku, Kawasaki-shi               Inside the corporation (72) Inventor Toru Kamada               Fujitsu, 1015 Ueodanaka, Nakahara-ku, Kawasaki-shi               Inside the corporation                (56) References JP-A-58-160044 (JP, A)                 Tokiko Sho 53-18787 (JP, B2)                 Japanese Patent Publication 54-33389 (JP, B2)

Claims (1)

(57) [Claims] A first module having an end effector that performs an operation on an object and a moving mechanism for moving the end effector; a second module that mounts the object and positions the object in one direction A working robot that drives both the moving mechanism and the target object to perform a work, wherein the first module extends over the second module so as to straddle the second module. A support mechanism for supporting both sides; a force detection means provided between the end effector and the movement mechanism for detecting a force applied to the end effector; a movement command for moving to the object and the force A control means for driving and controlling the first module by synthesizing with a force control output from the detection means.