JP2709511B2 - Tin, lead, tin-lead alloy electroplating bath and electroplating method - Google Patents
Tin, lead, tin-lead alloy electroplating bath and electroplating methodInfo
- Publication number
- JP2709511B2 JP2709511B2 JP1121345A JP12134589A JP2709511B2 JP 2709511 B2 JP2709511 B2 JP 2709511B2 JP 1121345 A JP1121345 A JP 1121345A JP 12134589 A JP12134589 A JP 12134589A JP 2709511 B2 JP2709511 B2 JP 2709511B2
- Authority
- JP
- Japan
- Prior art keywords
- tin
- lead
- plating
- bath
- electroplating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229910001174 tin-lead alloy Inorganic materials 0.000 title claims description 20
- 238000009713 electroplating Methods 0.000 title claims description 17
- 238000000034 method Methods 0.000 title claims description 5
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 title description 16
- 238000007747 plating Methods 0.000 claims description 62
- 150000002500 ions Chemical class 0.000 claims description 7
- 229910001432 tin ion Inorganic materials 0.000 claims description 7
- 125000000217 alkyl group Chemical group 0.000 claims description 6
- 125000004432 carbon atom Chemical group C* 0.000 claims description 6
- 239000008139 complexing agent Substances 0.000 claims description 6
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 6
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 4
- 229910052783 alkali metal Inorganic materials 0.000 claims description 3
- 150000001340 alkali metals Chemical group 0.000 claims description 3
- 125000002768 hydroxyalkyl group Chemical group 0.000 claims description 3
- -1 sodium 1,2-dihydroxy-4,5-naphthalene disulfonate Chemical compound 0.000 description 8
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 6
- 239000002253 acid Substances 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- 239000000919 ceramic Substances 0.000 description 6
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 6
- 150000003839 salts Chemical class 0.000 description 6
- 239000011734 sodium Substances 0.000 description 6
- 229910052708 sodium Inorganic materials 0.000 description 6
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 5
- 239000005355 lead glass Substances 0.000 description 5
- 239000004094 surface-active agent Substances 0.000 description 5
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonia chloride Chemical compound [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 description 4
- RGHNJXZEOKUKBD-SQOUGZDYSA-N D-gluconic acid Chemical compound OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C(O)=O RGHNJXZEOKUKBD-SQOUGZDYSA-N 0.000 description 4
- 229910021626 Tin(II) chloride Inorganic materials 0.000 description 4
- 150000007513 acids Chemical class 0.000 description 4
- 239000003945 anionic surfactant Substances 0.000 description 4
- 125000003118 aryl group Chemical group 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- AFVFQIVMOAPDHO-UHFFFAOYSA-N Methanesulfonic acid Chemical compound CS(O)(=O)=O AFVFQIVMOAPDHO-UHFFFAOYSA-N 0.000 description 3
- 238000013019 agitation Methods 0.000 description 3
- 235000011114 ammonium hydroxide Nutrition 0.000 description 3
- BFNBIHQBYMNNAN-UHFFFAOYSA-N ammonium sulfate Chemical compound N.N.OS(O)(=O)=O BFNBIHQBYMNNAN-UHFFFAOYSA-N 0.000 description 3
- 229910052921 ammonium sulfate Inorganic materials 0.000 description 3
- 235000011130 ammonium sulphate Nutrition 0.000 description 3
- 239000004327 boric acid Substances 0.000 description 3
- 235000010338 boric acid Nutrition 0.000 description 3
- 239000002131 composite material Substances 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- LLABTCPIBSAMGS-UHFFFAOYSA-L lead(2+);methanesulfonate Chemical compound [Pb+2].CS([O-])(=O)=O.CS([O-])(=O)=O LLABTCPIBSAMGS-UHFFFAOYSA-L 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 239000002736 nonionic surfactant Substances 0.000 description 3
- SMQUZDBALVYZAC-UHFFFAOYSA-N ortho-hydroxybenzaldehyde Natural products OC1=CC=CC=C1C=O SMQUZDBALVYZAC-UHFFFAOYSA-N 0.000 description 3
- HSJKGGMUJITCBW-UHFFFAOYSA-N 3-hydroxybutanal Chemical compound CC(O)CC=O HSJKGGMUJITCBW-UHFFFAOYSA-N 0.000 description 2
- USFZMSVCRYTOJT-UHFFFAOYSA-N Ammonium acetate Chemical compound N.CC(O)=O USFZMSVCRYTOJT-UHFFFAOYSA-N 0.000 description 2
- 239000005695 Ammonium acetate Substances 0.000 description 2
- RGHNJXZEOKUKBD-UHFFFAOYSA-N D-gluconic acid Natural products OCC(O)C(O)C(O)C(O)C(O)=O RGHNJXZEOKUKBD-UHFFFAOYSA-N 0.000 description 2
- 229910000978 Pb alloy Inorganic materials 0.000 description 2
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 2
- WCUXLLCKKVVCTQ-UHFFFAOYSA-M Potassium chloride Chemical compound [Cl-].[K+] WCUXLLCKKVVCTQ-UHFFFAOYSA-M 0.000 description 2
- NBBJYMSMWIIQGU-UHFFFAOYSA-N Propionic aldehyde Chemical compound CCC=O NBBJYMSMWIIQGU-UHFFFAOYSA-N 0.000 description 2
- 229910001128 Sn alloy Inorganic materials 0.000 description 2
- PMZURENOXWZQFD-UHFFFAOYSA-L Sodium Sulfate Chemical compound [Na+].[Na+].[O-]S([O-])(=O)=O PMZURENOXWZQFD-UHFFFAOYSA-L 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 230000002378 acidificating effect Effects 0.000 description 2
- 235000019257 ammonium acetate Nutrition 0.000 description 2
- 229940043376 ammonium acetate Drugs 0.000 description 2
- 235000019270 ammonium chloride Nutrition 0.000 description 2
- HUMNYLRZRPPJDN-UHFFFAOYSA-N benzaldehyde Chemical compound O=CC1=CC=CC=C1 HUMNYLRZRPPJDN-UHFFFAOYSA-N 0.000 description 2
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 2
- YCIMNLLNPGFGHC-UHFFFAOYSA-N catechol Chemical compound OC1=CC=CC=C1O YCIMNLLNPGFGHC-UHFFFAOYSA-N 0.000 description 2
- 125000002091 cationic group Chemical group 0.000 description 2
- 239000003093 cationic surfactant Substances 0.000 description 2
- XPPKVPWEQAFLFU-UHFFFAOYSA-N diphosphoric acid Chemical compound OP(O)(=O)OP(O)(O)=O XPPKVPWEQAFLFU-UHFFFAOYSA-N 0.000 description 2
- 230000003628 erosive effect Effects 0.000 description 2
- 239000000174 gluconic acid Substances 0.000 description 2
- 235000012208 gluconic acid Nutrition 0.000 description 2
- LEQAOMBKQFMDFZ-UHFFFAOYSA-N glyoxal Chemical compound O=CC=O LEQAOMBKQFMDFZ-UHFFFAOYSA-N 0.000 description 2
- JARKCYVAAOWBJS-UHFFFAOYSA-N hexanal Chemical compound CCCCCC=O JARKCYVAAOWBJS-UHFFFAOYSA-N 0.000 description 2
- 229940046892 lead acetate Drugs 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- ZRSNZINYAWTAHE-UHFFFAOYSA-N p-methoxybenzaldehyde Chemical compound COC1=CC=C(C=O)C=C1 ZRSNZINYAWTAHE-UHFFFAOYSA-N 0.000 description 2
- 239000006174 pH buffer Substances 0.000 description 2
- SATCULPHIDQDRE-UHFFFAOYSA-N piperonal Chemical compound O=CC1=CC=C2OCOC2=C1 SATCULPHIDQDRE-UHFFFAOYSA-N 0.000 description 2
- 229920001223 polyethylene glycol Polymers 0.000 description 2
- 229940005657 pyrophosphoric acid Drugs 0.000 description 2
- 229910052938 sodium sulfate Inorganic materials 0.000 description 2
- 235000011152 sodium sulphate Nutrition 0.000 description 2
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 description 2
- 239000003760 tallow Substances 0.000 description 2
- YWYZEGXAUVWDED-UHFFFAOYSA-N triammonium citrate Chemical compound [NH4+].[NH4+].[NH4+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O YWYZEGXAUVWDED-UHFFFAOYSA-N 0.000 description 2
- LWIHDJKSTIGBAC-UHFFFAOYSA-K tripotassium phosphate Chemical compound [K+].[K+].[K+].[O-]P([O-])([O-])=O LWIHDJKSTIGBAC-UHFFFAOYSA-K 0.000 description 2
- WJUFSDZVCOTFON-UHFFFAOYSA-N veratraldehyde Chemical compound COC1=CC=C(C=O)C=C1OC WJUFSDZVCOTFON-UHFFFAOYSA-N 0.000 description 2
- 239000002888 zwitterionic surfactant Substances 0.000 description 2
- SQAINHDHICKHLX-UHFFFAOYSA-N 1-naphthaldehyde Chemical compound C1=CC=C2C(C=O)=CC=CC2=C1 SQAINHDHICKHLX-UHFFFAOYSA-N 0.000 description 1
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- VCNCOKVOWKMRGJ-UHFFFAOYSA-N 3,4,5-trihydroxybenzenesulfonic acid Chemical compound OC1=CC(S(O)(=O)=O)=CC(O)=C1O VCNCOKVOWKMRGJ-UHFFFAOYSA-N 0.000 description 1
- CJAZCKUGLFWINJ-UHFFFAOYSA-N 3,4-dihydroxybenzene-1,2-disulfonic acid Chemical compound OC1=CC=C(S(O)(=O)=O)C(S(O)(=O)=O)=C1O CJAZCKUGLFWINJ-UHFFFAOYSA-N 0.000 description 1
- WQPMYSHJKXVTME-UHFFFAOYSA-N 3-hydroxypropane-1-sulfonic acid Chemical compound OCCCS(O)(=O)=O WQPMYSHJKXVTME-UHFFFAOYSA-N 0.000 description 1
- HVBSAKJJOYLTQU-UHFFFAOYSA-N 4-aminobenzenesulfonic acid Chemical class NC1=CC=C(S(O)(=O)=O)C=C1 HVBSAKJJOYLTQU-UHFFFAOYSA-N 0.000 description 1
- BWHOZHOGCMHOBV-UHFFFAOYSA-N Benzalacetone Natural products CC(=O)C=CC1=CC=CC=C1 BWHOZHOGCMHOBV-UHFFFAOYSA-N 0.000 description 1
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 1
- IGFHQQFPSIBGKE-UHFFFAOYSA-N Nonylphenol Natural products CCCCCCCCCC1=CC=C(O)C=C1 IGFHQQFPSIBGKE-UHFFFAOYSA-N 0.000 description 1
- ABLZXFCXXLZCGV-UHFFFAOYSA-N Phosphorous acid Chemical compound OP(O)=O ABLZXFCXXLZCGV-UHFFFAOYSA-N 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- 239000004280 Sodium formate Substances 0.000 description 1
- DBMJMQXJHONAFJ-UHFFFAOYSA-M Sodium laurylsulphate Chemical compound [Na+].CCCCCCCCCCCCOS([O-])(=O)=O DBMJMQXJHONAFJ-UHFFFAOYSA-M 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- PCSMJKASWLYICJ-UHFFFAOYSA-N Succinic aldehyde Chemical compound O=CCCC=O PCSMJKASWLYICJ-UHFFFAOYSA-N 0.000 description 1
- ISWQCIVKKSOKNN-UHFFFAOYSA-L Tiron Chemical compound [Na+].[Na+].OC1=CC(S([O-])(=O)=O)=CC(S([O-])(=O)=O)=C1O ISWQCIVKKSOKNN-UHFFFAOYSA-L 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical group [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- IKHGUXGNUITLKF-XPULMUKRSA-N acetaldehyde Chemical compound [14CH]([14CH3])=O IKHGUXGNUITLKF-XPULMUKRSA-N 0.000 description 1
- 150000003973 alkyl amines Chemical class 0.000 description 1
- 150000004996 alkyl benzenes Chemical class 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-N ammonia Natural products N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 1
- 239000002280 amphoteric surfactant Substances 0.000 description 1
- 150000003934 aromatic aldehydes Chemical class 0.000 description 1
- QKWNIOMGXBERHJ-RXSVEWSESA-N azane;(2r)-2-[(1s)-1,2-dihydroxyethyl]-3,4-dihydroxy-2h-furan-5-one Chemical compound N.OC[C@H](O)[C@H]1OC(=O)C(O)=C1O QKWNIOMGXBERHJ-RXSVEWSESA-N 0.000 description 1
- JWAZRIHNYRIHIV-UHFFFAOYSA-N beta-hydroxynaphthyl Natural products C1=CC=CC2=CC(O)=CC=C21 JWAZRIHNYRIHIV-UHFFFAOYSA-N 0.000 description 1
- JALQQBGHJJURDQ-UHFFFAOYSA-L bis(methylsulfonyloxy)tin Chemical compound [Sn+2].CS([O-])(=O)=O.CS([O-])(=O)=O JALQQBGHJJURDQ-UHFFFAOYSA-L 0.000 description 1
- 229910021538 borax Inorganic materials 0.000 description 1
- ZTQSAGDEMFDKMZ-UHFFFAOYSA-N butyric aldehyde Natural products CCCC=O ZTQSAGDEMFDKMZ-UHFFFAOYSA-N 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 150000001735 carboxylic acids Chemical class 0.000 description 1
- 239000003518 caustics Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- LDHQCZJRKDOVOX-NSCUHMNNSA-N crotonic acid Chemical compound C\C=C\C(O)=O LDHQCZJRKDOVOX-NSCUHMNNSA-N 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- JRBPAEWTRLWTQC-UHFFFAOYSA-N dodecylamine Chemical compound CCCCCCCCCCCCN JRBPAEWTRLWTQC-UHFFFAOYSA-N 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229940015043 glyoxal Drugs 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 150000004679 hydroxides Chemical class 0.000 description 1
- MTNDZQHUAFNZQY-UHFFFAOYSA-N imidazoline Chemical compound C1CN=CN1 MTNDZQHUAFNZQY-UHFFFAOYSA-N 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- RLJMLMKIBZAXJO-UHFFFAOYSA-N lead nitrate Chemical compound [O-][N+](=O)O[Pb]O[N+]([O-])=O RLJMLMKIBZAXJO-UHFFFAOYSA-N 0.000 description 1
- 229910000464 lead oxide Inorganic materials 0.000 description 1
- PIJPYDMVFNTHIP-UHFFFAOYSA-L lead sulfate Chemical compound [PbH4+2].[O-]S([O-])(=O)=O PIJPYDMVFNTHIP-UHFFFAOYSA-L 0.000 description 1
- HWSZZLVAJGOAAY-UHFFFAOYSA-L lead(II) chloride Chemical compound Cl[Pb]Cl HWSZZLVAJGOAAY-UHFFFAOYSA-L 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- AICMYQIGFPHNCY-UHFFFAOYSA-J methanesulfonate;tin(4+) Chemical compound [Sn+4].CS([O-])(=O)=O.CS([O-])(=O)=O.CS([O-])(=O)=O.CS([O-])(=O)=O AICMYQIGFPHNCY-UHFFFAOYSA-J 0.000 description 1
- 229940098779 methanesulfonic acid Drugs 0.000 description 1
- WSFSSNUMVMOOMR-NJFSPNSNSA-N methanone Chemical compound O=[14CH2] WSFSSNUMVMOOMR-NJFSPNSNSA-N 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- SNQQPOLDUKLAAF-UHFFFAOYSA-N nonylphenol Chemical compound CCCCCCCCCC1=CC=CC=C1O SNQQPOLDUKLAAF-UHFFFAOYSA-N 0.000 description 1
- YEXPOXQUZXUXJW-UHFFFAOYSA-N oxolead Chemical compound [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 description 1
- FXLOVSHXALFLKQ-UHFFFAOYSA-N p-tolualdehyde Chemical compound CC1=CC=C(C=O)C=C1 FXLOVSHXALFLKQ-UHFFFAOYSA-N 0.000 description 1
- QNGNSVIICDLXHT-UHFFFAOYSA-N para-ethylbenzaldehyde Natural products CCC1=CC=C(C=O)C=C1 QNGNSVIICDLXHT-UHFFFAOYSA-N 0.000 description 1
- HXTSPGYEPSIZKP-UHFFFAOYSA-N phenol;tin Chemical compound [Sn].OC1=CC=CC=C1 HXTSPGYEPSIZKP-UHFFFAOYSA-N 0.000 description 1
- 229940044652 phenolsulfonate Drugs 0.000 description 1
- 229940081310 piperonal Drugs 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000001103 potassium chloride Substances 0.000 description 1
- 235000011164 potassium chloride Nutrition 0.000 description 1
- WFIZEGIEIOHZCP-UHFFFAOYSA-M potassium formate Chemical compound [K+].[O-]C=O WFIZEGIEIOHZCP-UHFFFAOYSA-M 0.000 description 1
- 229910000160 potassium phosphate Inorganic materials 0.000 description 1
- 235000011009 potassium phosphates Nutrition 0.000 description 1
- VMNZSPZHEZLXCQ-UHFFFAOYSA-M potassium;4-hydroxybenzenesulfonate Chemical compound [K+].OC1=CC=C(S([O-])(=O)=O)C=C1 VMNZSPZHEZLXCQ-UHFFFAOYSA-M 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 239000001509 sodium citrate Substances 0.000 description 1
- NLJMYIDDQXHKNR-UHFFFAOYSA-K sodium citrate Chemical compound O.O.[Na+].[Na+].[Na+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O NLJMYIDDQXHKNR-UHFFFAOYSA-K 0.000 description 1
- HLBBKKJFGFRGMU-UHFFFAOYSA-M sodium formate Chemical compound [Na+].[O-]C=O HLBBKKJFGFRGMU-UHFFFAOYSA-M 0.000 description 1
- 235000019254 sodium formate Nutrition 0.000 description 1
- 235000019333 sodium laurylsulphate Nutrition 0.000 description 1
- 229940087596 sodium phenolsulfonate Drugs 0.000 description 1
- 239000001488 sodium phosphate Substances 0.000 description 1
- 229910000162 sodium phosphate Inorganic materials 0.000 description 1
- 235000011008 sodium phosphates Nutrition 0.000 description 1
- 235000010339 sodium tetraborate Nutrition 0.000 description 1
- BLXAGSNYHSQSRC-UHFFFAOYSA-M sodium;2-hydroxybenzenesulfonate Chemical compound [Na+].OC1=CC=CC=C1S([O-])(=O)=O BLXAGSNYHSQSRC-UHFFFAOYSA-M 0.000 description 1
- RCIVOBGSMSSVTR-UHFFFAOYSA-L stannous sulfate Chemical compound [SnH2+2].[O-]S([O-])(=O)=O RCIVOBGSMSSVTR-UHFFFAOYSA-L 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000004781 supercooling Methods 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- FAKFSJNVVCGEEI-UHFFFAOYSA-J tin(4+);disulfate Chemical compound [Sn+4].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O FAKFSJNVVCGEEI-UHFFFAOYSA-J 0.000 description 1
- 229910000375 tin(II) sulfate Inorganic materials 0.000 description 1
- HPGGPRDJHPYFRM-UHFFFAOYSA-J tin(iv) chloride Chemical compound Cl[Sn](Cl)(Cl)Cl HPGGPRDJHPYFRM-UHFFFAOYSA-J 0.000 description 1
- BWHOZHOGCMHOBV-BQYQJAHWSA-N trans-benzylideneacetone Chemical compound CC(=O)\C=C\C1=CC=CC=C1 BWHOZHOGCMHOBV-BQYQJAHWSA-N 0.000 description 1
- LDHQCZJRKDOVOX-UHFFFAOYSA-N trans-crotonic acid Natural products CC=CC(O)=O LDHQCZJRKDOVOX-UHFFFAOYSA-N 0.000 description 1
- YJGJRYWNNHUESM-UHFFFAOYSA-J triacetyloxystannyl acetate Chemical compound [Sn+4].CC([O-])=O.CC([O-])=O.CC([O-])=O.CC([O-])=O YJGJRYWNNHUESM-UHFFFAOYSA-J 0.000 description 1
- 239000001393 triammonium citrate Substances 0.000 description 1
- 235000011046 triammonium citrate Nutrition 0.000 description 1
- 150000003918 triazines Chemical class 0.000 description 1
- YQMWDQQWGKVOSQ-UHFFFAOYSA-N trinitrooxystannyl nitrate Chemical compound [Sn+4].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O YQMWDQQWGKVOSQ-UHFFFAOYSA-N 0.000 description 1
- WUUHFRRPHJEEKV-UHFFFAOYSA-N tripotassium borate Chemical compound [K+].[K+].[K+].[O-]B([O-])[O-] WUUHFRRPHJEEKV-UHFFFAOYSA-N 0.000 description 1
- BSVBQGMMJUBVOD-UHFFFAOYSA-N trisodium borate Chemical compound [Na+].[Na+].[Na+].[O-]B([O-])[O-] BSVBQGMMJUBVOD-UHFFFAOYSA-N 0.000 description 1
- RYFMWSXOAZQYPI-UHFFFAOYSA-K trisodium phosphate Chemical compound [Na+].[Na+].[Na+].[O-]P([O-])([O-])=O RYFMWSXOAZQYPI-UHFFFAOYSA-K 0.000 description 1
- MWOOGOJBHIARFG-UHFFFAOYSA-N vanillin Chemical compound COC1=CC(C=O)=CC=C1O MWOOGOJBHIARFG-UHFFFAOYSA-N 0.000 description 1
- FGQOOHJZONJGDT-UHFFFAOYSA-N vanillin Natural products COC1=CC(O)=CC(C=O)=C1 FGQOOHJZONJGDT-UHFFFAOYSA-N 0.000 description 1
- 235000012141 vanillin Nutrition 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/56—Electroplating: Baths therefor from solutions of alloys
- C25D3/60—Electroplating: Baths therefor from solutions of alloys containing more than 50% by weight of tin
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/30—Electroplating: Baths therefor from solutions of tin
- C25D3/32—Electroplating: Baths therefor from solutions of tin characterised by the organic bath constituents used
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/34—Electroplating: Baths therefor from solutions of lead
- C25D3/36—Electroplating: Baths therefor from solutions of lead characterised by the organic bath constituents used
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating And Plating Baths Therefor (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、新規な錫−鉛合金電気めっき浴及び該浴を
用いた電気めっき方法に関する。The present invention relates to a novel tin-lead alloy electroplating bath and an electroplating method using the bath.
錫,錫−鉛合金電気めっきは、従来より主としてはん
だ付け性を目的として弱電及び電子工業分野に広く用い
られている。2. Description of the Related Art Tin, tin-lead alloy electroplating has been widely used in the fields of light current and electronics for mainly solderability.
従来、かかる錫,錫−鉛合金電気めっきに使用される
電気めっき浴は、主に硫酸浴、有機スルホン酸浴或いは
ホウフッ酸浴であり、pH1以下の強酸性浴であった。Conventionally, an electroplating bath used for such tin, tin-lead alloy electroplating is mainly a sulfuric acid bath, an organic sulfonic acid bath or a borofluoric acid bath, and is a strongly acidic bath having a pH of 1 or less.
これら強酸性浴は、被めっき物が銅やスチール等であ
れば使用上特に問題は生じない。しかし、最近は被めっ
き物として金属とセラミック,ガラス,プラスチック等
とを素材とした複合材料からなる電子部品が多くなって
おり、例えば、鉛ガラスを用いて封着したサーディップ
型のICパッケージやチップコンデンサーが使用されるよ
うになっている。更には、セラミック上へアルミニウム
蒸着を行ない、エッチングして回路形成を行なった電子
部品も多くなっている。これらの部品に上記強酸性浴か
ら錫,錫−鉛合金めっきを行なうと、部品中のセラミッ
ク,ガラス或いは蒸着アルミニウム等が侵食され、更に
は絶縁体上にめっきが付くというブリッジの問題が生じ
る欠点があった。There is no particular problem in using these strongly acidic baths when the object to be plated is copper, steel, or the like. Recently, however, there have been many electronic components made of composite materials using metals and ceramics, glass, plastics, and the like as materials to be plated. For example, cerdip type IC packages sealed with lead glass, Chip capacitors are being used. Further, an increasing number of electronic components have been formed by depositing aluminum on ceramic and etching to form a circuit. If these parts are plated with tin or tin-lead alloy from the above-mentioned strong acid bath, the ceramic, glass or vapor-deposited aluminum and the like in the parts are eroded, and furthermore, the problem of bridging that plating is applied on the insulator occurs. was there.
かかる問題点は、めっき浴のpHを2〜9にすることに
より解消され得る。しかし、単にめっき浴のpHを2〜9
にすると、錫イオン、鉛イオンが水酸化物となって沈殿
し、めっきが実施不可能になる。Such a problem can be solved by adjusting the pH of the plating bath to 2 to 9. However, simply increasing the pH of the plating bath to 2-9
In this case, tin ions and lead ions precipitate as hydroxides, making plating impossible.
一方、従来より錫,錫−鉛合金電気めっき浴として、
クエン酸,グルコン酸,ピロリン酸,有機ホスホン酸や
これらの塩等を使用した上記pH範囲で使用可能な浴も種
々提案されている(特開昭49−93236号,同53−5034
号,同54−60230号,同54−69533号,同54−69534号,
同57−63689号,同61−194194号公報等)が、更にpH2〜
9の領域で良好に錫−鉛合金めっきを行なうことができ
るめっき浴が望まれている。On the other hand, conventionally, as a tin, tin-lead alloy electroplating bath,
Various baths using citric acid, gluconic acid, pyrophosphoric acid, organic phosphonic acid, salts thereof and the like which can be used in the above pH range have been proposed (JP-A-49-93236, JP-A-53-5034).
Nos. 54-60230, 54-69533, 54-69534,
Nos. 57-63689, 61-194194, etc.), and a pH of 2 to
A plating bath capable of favorably performing tin-lead alloy plating in the region of No. 9 is desired.
本発明は上記事情に鑑みなされたもので、pH2〜9の
領域で安定であり、電流効率が高く、広い電流密度範囲
で使用可能な錫−鉛合金めっき浴及び該めっき浴を用い
る電気めっき方法を提供することを目的とする。The present invention has been made in view of the above circumstances, and is a tin-lead alloy plating bath that is stable in a pH range of 2 to 9, has high current efficiency, and can be used in a wide current density range, and an electroplating method using the plating bath. The purpose is to provide.
本発明者は、上記目的を達成するため鋭意検討を行な
った結果、錫イオン及び鉛イオンを含むめっき浴の錯化
剤として下記式(1)及び(2) (但し、Rは水素原子、炭素数1〜4のアルキル基又は
ヒドロキシアルキル基、Mは水素原子、アルカリ金属原
子又はNH4基を示し、nは2〜7、mは1〜6の整数で
ある) で示され、少なくとも2個のOH基が互いにオルト位にあ
る芳香族ポリヒドロキシスルホン酸類の1種又は2種以
上を使用することにより、pH2〜9の領域で安定であ
り、錫や鉛の水酸化物が生じることがなく、セラミッ
ク,鉛ガラス,蒸着アルミ等を用いた金属との複合素材
からなる電子部品の侵食等もなくめっきし得、しかもこ
れら錯化剤を含むpHが2〜9の浴は電流効率が高く、広
い電流密度範囲で使用できる上、良好なめっき皮膜を得
ることができることを知見し、本発明をなすに至った。The present inventors have conducted intensive studies to achieve the above object, and as a result, the following formulas (1) and (2) were used as complexing agents for a plating bath containing tin ions and lead ions. (However, R represents a hydrogen atom, an alkyl group or a hydroxyalkyl group having 1 to 4 carbon atoms, M represents a hydrogen atom, an alkali metal atom or an NH 4 group, n is an integer of 2 to 7, and m is an integer of 1 to 6. By using one or more aromatic polyhydroxysulfonic acids in which at least two OH groups are at ortho positions to each other, the compound is stable in the pH range of 2 to 9, and can be tin or lead. Can be plated without erosion of electronic parts made of a composite material with a metal using ceramic, lead glass, vapor-deposited aluminum, and the like. The present inventors have found that the bath No. 9 has a high current efficiency, can be used in a wide range of current density, and can obtain a good plating film, and has accomplished the present invention.
従って、本発明は、錫イオンと鉛イオンとを含有する
錫−鉛合金めっき浴に錯化剤として上記式(1)及び
(2)で示され少なくとも2個のOH基が互いにオルト位
にある化合物の1種又は2種以上を配合してなると共
に、pHが2〜9であることを特徴とする錫,鉛又は錫−
鉛合金電気めっき浴、及び上記めっき浴を用いて被めっ
き物を電気めっきすることを特徴とする錫−鉛合金電気
めっき方法を提供する。Accordingly, the present invention provides a tin-lead alloy plating bath containing tin ions and lead ions as a complexing agent in which at least two OH groups represented by the above formulas (1) and (2) are at ortho positions to each other. A compound comprising one or more compounds, and having a pH of 2 to 9;
A lead alloy electroplating bath and a tin-lead alloy electroplating method characterized by electroplating an object to be plated using the plating bath.
以下、本発明につき更に詳しく説明する。 Hereinafter, the present invention will be described in more detail.
本発明のめっき浴において、錫イオン及び鉛イオンを
与える金属塩は特に制限されないが、錫塩としては、硫
酸錫,塩化錫,硝酸錫,メタンスルホン酸錫,アルカノ
ールスルホン酸錫,フェノールスルホン酸錫,ホウフッ
化錫,酢酸錫,酸化錫などが挙げられる。この場合、錫
塩は2価の錫塩でも4価の錫塩でもよい。一方、鉛塩と
しては、硝酸鉛,酢酸鉛,ホウフッ化鉛,メタンスルホ
ン酸鉛,塩化鉛,硫酸鉛,酸化鉛等が挙げられる。In the plating bath of the present invention, the metal salt that provides tin ions and lead ions is not particularly limited. Examples of the tin salt include tin sulfate, tin chloride, tin nitrate, tin methanesulfonate, tin alkanol sulfonate, and tin phenol sulfonate. , Tin borofluoride, tin acetate, tin oxide and the like. In this case, the tin salt may be a divalent tin salt or a tetravalent tin salt. On the other hand, examples of the lead salt include lead nitrate, lead acetate, lead borofluoride, lead methanesulfonate, lead chloride, lead sulfate, and lead oxide.
上記錫イオン,鉛イオンのめっき浴中の濃度は適宜選
定されるが、通常0.5〜200g/より好ましくは1〜100g
/である。The concentration of the above tin ions and lead ions in the plating bath is appropriately selected, but is usually 0.5 to 200 g / more preferably 1 to 100 g.
/.
本発明は、かかる錫イオン及び/又は鉛イオンを含む
めっき浴に錯化剤として下記式(1)及び(2) (但し、Rは水素原子、炭素数1〜4のアルキル基又は
ヒドロキシアルキル基、Mは水素原子、アルカリ金属原
子又はNH4基を示し、nは2〜7、mは1〜6の整数で
ある) で示され、少なくとも2個のOH基が互いにオルト位にあ
る芳香族ポリヒドロキシスルホン酸類の1種又は2種以
上を配合する。The present invention provides the following formulas (1) and (2) as a complexing agent in a plating bath containing tin ions and / or lead ions. (However, R represents a hydrogen atom, an alkyl group or a hydroxyalkyl group having 1 to 4 carbon atoms, M represents a hydrogen atom, an alkali metal atom or an NH 4 group, n is an integer of 2 to 7, and m is an integer of 1 to 6. Wherein at least two OH groups are ortho to each other, and one or more aromatic polyhydroxysulfonic acids are blended.
この場合、これら芳香族ポリヒドロキシスルホン酸類
としては、具体的にカテコールジスルホン酸ナトリウ
ム、1,2−ジヒドロキシ−4,5−ナフタリンジスルホン酸
ナトリウム、1,2,3−トリヒドロキシ−5−ベンゼンス
ルホン酸ナトリウム、1,2−ジヒドロキシ−3−メチル
−4,6−ベンゼンジスルホン酸ナトリウム、等が挙げら
れる。In this case, specific examples of these aromatic polyhydroxysulfonic acids include sodium catechol disulfonic acid, sodium 1,2-dihydroxy-4,5-naphthalene disulfonate, and 1,2,3-trihydroxy-5-benzenesulfonic acid. And sodium 1,2-dihydroxy-3-methyl-4,6-benzenedisulfonate.
これら芳香族ポリヒドロキシスルホン酸類の添加量も
種々選定されるが、通常1〜600g/であり、より好ま
しくは20〜200g/である。The amount of addition of these aromatic polyhydroxysulfonic acids is also variously selected, but is usually 1 to 600 g /, more preferably 20 to 200 g /.
なお、本発明のめっき浴には、上記錯化剤に加えて他
の錯化剤、例えばクエン酸,ピロリン酸,グルコン酸や
それらの塩等を添加することは差し支えない。In the plating bath of the present invention, other complexing agents such as citric acid, pyrophosphoric acid, gluconic acid and salts thereof may be added in addition to the above complexing agents.
本発明のめっき浴には必要により更に導電性塩,pH緩
衝剤,界面活性剤,光沢剤などを添加することができ
る。If necessary, a conductive salt, a pH buffer, a surfactant, a brightener and the like can be further added to the plating bath of the present invention.
ここで、導電性塩としては、メタンスルホン酸アンモ
ニウム,硫酸アンモニウム,塩化アンモニウム,硫酸ナ
トリウム,塩化カリウム,酢酸アンモニウム,アスコル
ビン酸アンモニウム,アルカノールスルホン酸ナトリウ
ム,フェノールスルホン酸ナトリウム等が使用でき、導
電性塩の添加によりめっき電圧を低下させることがで
き、均一電着性を向上させることができる。その配合量
は0〜800g/とすることができ、好ましくは10〜800g/
、より好ましくは50〜300g/である。Here, as the conductive salt, ammonium methanesulfonate, ammonium sulfate, ammonium chloride, sodium sulfate, potassium chloride, ammonium acetate, ammonium ascorbate, sodium alkanolsulfonate, sodium phenolsulfonate and the like can be used. The addition can lower the plating voltage and improve the throwing power. The blending amount can be 0 to 800 g /, preferably 10 to 800 g /
, More preferably 50 to 300 g /.
また、pH緩衝剤としては、ホウ酸,塩化アンモニウ
ム,硫酸アンモニウム,酢酸アンモニウム、リン酸ナト
リウム,リン酸カリウム,ホウ酸ナトリウム,ホウ酸カ
リウム,ギ酸ナトリウム,ギ酸カリウム,クエン酸アン
モニウム,クエン酸ナトリウム等が挙げられる。その添
加量は、0〜100g/、特に10〜50g/とすることが好
ましい。Examples of the pH buffer include boric acid, ammonium chloride, ammonium sulfate, ammonium acetate, sodium phosphate, potassium phosphate, sodium borate, potassium borate, sodium formate, potassium formate, ammonium citrate, sodium citrate and the like. No. The addition amount is preferably 0 to 100 g /, particularly preferably 10 to 50 g /.
更に、界面活性剤としてはノニオン系,カチオン系,
両性イオン系,アニオン系の界面活性剤が使用し得る。
この場合、これら界面活性剤としては、特に限定され
ず、種々選択されるが、塩析の点が曇点の高いもの或い
は曇点のないものが好ましい。Furthermore, nonionic, cationic, and
Zwitterionic or anionic surfactants can be used.
In this case, these surfactants are not particularly limited and variously selected, but those having a high clouding point or no clouding point are preferred.
より好適には、ノニオン系界面活性剤として、ノニル
フェノールにエチレンオキサイドを15モル付加したも
の、アルキルβ−ナフトール(アルキル基の炭素数1〜
25)にエチレンオキサイドを25モル付加したもの、多核
フェノールエトキシレート(例えば旭電化工業(株)製
アデカトールPC−10,PC−13)等が挙げられる。また、
カチオン系界面活性剤としては、ラウリルアミンにエチ
レンオキサイドを10モル付加したもの、牛脂アルキルア
ミンにエチレンオキサイドを15モル付加したもの等が好
適に用いられる。更に、両性イオン系界面活性剤として
は、イミダゾリン系のもの、特に下記式 (但し、R1は炭素数3〜25のアルキル基、R2は炭素数1
〜18のアルキル基を示す) で示されるもの(例えば第一工業製薬(株)製アモーゲ
ンNo.8)が好適である。More preferably, nonionic surfactants obtained by adding 15 mol of ethylene oxide to nonylphenol, alkyl β-naphthol (alkyl group having 1 to 1 carbon atoms)
25) to which 25 mol of ethylene oxide is added, and polynuclear phenol ethoxylates (for example, Adecitol PC-10 and PC-13 manufactured by Asahi Denka Kogyo KK) and the like. Also,
As the cationic surfactant, those obtained by adding 10 mol of ethylene oxide to laurylamine, those obtained by adding 15 mol of ethylene oxide to tallow alkylamine, and the like are suitably used. Further, as the zwitterionic surfactant, imidazoline-based surfactants, in particular, the following formula (However, R 1 is an alkyl group having 3 to 25 carbon atoms, and R 2 is an alkyl group having 1 carbon atom.
(For example, Amogen No. 8 manufactured by Daiichi Kogyo Seiyaku Co., Ltd.) is preferable.
上記ノニオン系,カチオン系,両性イオン系界面活性
剤の添加はめっき皮膜を平滑化し、緻密化するという効
果があるが、これら界面活性剤の添加量は0.01〜30g/
とすることができる。The addition of the above-mentioned nonionic, cationic and amphoteric surfactants has the effect of smoothing and densifying the plating film, but the addition amount of these surfactants is 0.01 to 30 g /
It can be.
なお、平滑化剤として、上記界面活性剤と共に或いは
その代りにカーボワックス1500のようなポリエチレング
リコールを添加することもできる。As a leveling agent, polyethylene glycol such as Carbowax 1500 can be added together with or instead of the above surfactant.
一方、アニオン系界面活性剤は、特にめっきのガスピ
ットをなくし、ノニオン系界面活性剤の曇点を上げると
いう効果があるが、アニオン系界面活性剤としては、ラ
ウリル硫酸ナトリウム,アルキルベンゼルスルホン酸ナ
トリウム,スルホコハク酸アルキルエステルなどが使用
し得る。なお、アニオン系界面活性剤の添加量は0.1〜5
0g/とすることができる。On the other hand, anionic surfactants have the effect of particularly eliminating gas pits in plating and increasing the cloud point of nonionic surfactants. Examples of anionic surfactants include sodium lauryl sulfate and sodium alkylbenzene sulfonate. , Sulfosuccinic acid alkyl esters and the like can be used. The amount of the anionic surfactant added is 0.1 to 5
It can be 0 g /.
光沢めっきを必要とする場合は、光沢剤を添加する
が、光沢剤としては、ホルムアルデヒド,アセトアルデ
ヒド,プロピオンアルデヒド,グリオキサール,スクシ
ンアルデヒド,カプロンアルデヒド,アルドール等の脂
肪族アルデヒド、ベンズアルデヒド,サリチルアルデヒ
ドアリールエーテル,p−トルアルデヒド,1−ナフトアル
デヒド,サリチルアルデヒド,ベラトルアルデヒド,ア
ニスアルデヒド,ピペロナール,バニリン等の芳香族ア
ルデヒドが使用できる。更に、スルファニル酸誘導体、
トリアジン誘導体やアクリル酸,メタアクリル酸,クロ
トン酸,その他のα−不飽和カルボン酸などを用いるこ
ともできる。これら光沢剤の添加量は、0.01〜30g/、
特には0.03〜5g/とすることができる。When bright plating is required, a brightener is added. As brighteners, aliphatic aldehydes such as formaldehyde, acetaldehyde, propionaldehyde, glyoxal, succinaldehyde, caproaldehyde, and aldol, benzaldehyde, salicylaldehyde aryl ether , p-Tolualdehyde, 1-naphthaldehyde, salicylaldehyde, veratraldehyde, anisaldehyde, piperonal, vanillin and other aromatic aldehydes can be used. Further, sulfanilic acid derivatives,
Triazine derivatives, acrylic acid, methacrylic acid, crotonic acid, and other α-unsaturated carboxylic acids can also be used. The addition amount of these brighteners is 0.01 to 30 g /,
In particular, it can be 0.03 to 5 g /.
本発明のめっき浴のpHは2〜9であるが、より好適に
は3〜8.5、更に好適には5〜8とすることが好まし
い。この場合、pHを調整するため、アンモニア水、苛性
アルカリなどを用いることができる。The pH of the plating bath of the present invention is 2 to 9, preferably 3 to 8.5, more preferably 5 to 8. In this case, ammonia water, caustic, or the like can be used to adjust the pH.
上記めっき浴を用いて電気めっきを行なう場合、その
電源としては、無光沢乃至半光沢めっき皮膜を得る際は
めっき皮膜の外観(めっき結晶が大きくなる部分が生
じ、その部分が黒くなる)点から完全直流や3相全波、
3相半波整流よりも単相全波、単相半波整流を用いるこ
とが推奨され、またパルス電源等も使用される。一方、
光沢めっき皮膜を得る際は逆に光沢の点から単相全波、
単相半波整流よりも完全直流、3相全波、3相半波整流
を用いることが推奨される。When performing electroplating using the above-mentioned plating bath, the power source is such that when a matte or semi-glossy plating film is obtained, the appearance of the plating film (parts where plating crystals become large and the parts become black) is considered. Full DC, three-phase full wave,
It is recommended to use single-phase full-wave or single-phase half-wave rectification rather than three-phase half-wave rectification, and a pulse power supply or the like is also used. on the other hand,
When obtaining a bright plating film, conversely, a single-phase full-wave
It is recommended to use full DC, three-phase full-wave, three-phase half-wave rectification rather than single-phase half-wave rectification.
本発明のめっき浴は、通常のラックめっきのほか、バ
レルめっきにも使用でき、また高速めっき、スルホール
めっきなどにも適用することができるが、めっき条件は
これらめっきの種類等に応じて選択することができ、本
発明のめっき浴によれば広範囲の電流密度において均質
で緻密なめっき皮膜を得ることができる。具体的には、
めっき温度は5〜90℃、より好ましくは10〜60℃とする
ことができ、陰極電流密度は0.001〜30A/dm2、より好ま
しくは0.1〜10A/dm2とすることができる。また、撹拌
は、バレルの回転、カソードロッキング、ポンプ流、
過機による液流、空気撹拌等によって行なうことがで
き、場合によっては無撹拌でもよい。陽極としては、め
っき浴の種類に応じ金属錫、金属鉛、或いは錫−鉛合金
めっきの場合はそのめっき皮膜の組成に応じて金属錫と
金属鉛とを併用したり錫−鉛合金を用いることができる
が、不溶性陽極を使用してもよい。The plating bath of the present invention can be used not only for ordinary rack plating, but also for barrel plating, and can also be applied to high-speed plating, through-hole plating, and the like. Plating conditions are selected according to the type of plating and the like. According to the plating bath of the present invention, a uniform and dense plating film can be obtained over a wide range of current densities. In particular,
The plating temperature can be 5 to 90 ° C., more preferably 10 to 60 ° C., and the cathode current density can be 0.001 to 30 A / dm 2 , more preferably 0.1 to 10 A / dm 2 . In addition, agitation, barrel rotation, cathode locking, pump flow,
It can be performed by liquid flow, air agitation or the like by supercooling, and in some cases, no agitation may be used. Depending on the type of plating bath, metallic tin, metallic lead, or, in the case of tin-lead alloy plating, a combination of metallic tin and metallic lead or a tin-lead alloy depending on the composition of the plating film However, an insoluble anode may be used.
本発明において、被めっき物は制限されず、電気めっ
き可能なものであればいずれのものでもよいが、特に本
発明では金属とセラミック、ガラス等との複合材料から
なる電子部品などのめっきに好適である。In the present invention, the object to be plated is not limited and may be any as long as it can be electroplated. In particular, the present invention is suitable for plating of electronic components made of a composite material of metal and ceramic, glass, and the like. It is.
以下、実施例を示し、本発明を具体的に説明するが、
本発明は下記の実施例に制限されるものではない。Hereinafter, the present invention will be described in detail with reference to Examples,
The present invention is not limited to the following examples.
〔実施例1〕 メタンスルホン酸第1錫(Snとして) 10g/ メタンスルホン酸鉛(Pbとして) 1 〃 1,2−ジヒドロキシ−3,5−ベンゼンジスルホン酸ナト
リウム 50 〃 ホウ酸 30 〃 牛脂アミンのエチレンオキサイド 15モル付加物 1 〃 メタンスルホン酸 100 〃 pH(アンモニア水で調整) 7 上記組成のめっき浴を用い、単相全波整流により銅板
上に40℃,DK1A/dm2の条件で10分間めっきした。[Example 1] Stannous methanesulfonate (as Sn) 10 g / lead methanesulfonate (as Pb) 1 ナ ト リ ウ ム sodium 1,2-dihydroxy-3,5-benzenedisulfonate 50 〃 boric acid 30 牛 tallow amine using a plating bath of ethylene oxide 15 mol adduct 1 〃 (adjusted with aqueous ammonia) methanesulfonic acid 100 〃 pH 7 the composition, 40 ° C. on a copper plate by single-phase full-wave rectification, the condition of D K 1A / dm 2 Plated for 10 minutes.
その結果、平滑緻密な白色半光沢の錫−鉛合金めっき
皮膜が得られた。皮膜中のPb含有量は10%であり、また
電流効率は99%であった。As a result, a smooth dense white semi-gloss tin-lead alloy plating film was obtained. The Pb content in the film was 10%, and the current efficiency was 99%.
なお。上記めっき浴により鉛ガラス付IC部品にDK1A/d
m2で約7μmのめっきを行なったが、鉛ガラスを侵すこ
となく、良好な白色半光沢の錫−鉛合金めっき皮膜が得
られた。In addition. D K 1A / d for IC parts with lead glass by the above plating bath
Although plating of about 7 μm was performed at m 2 , a tin-lead alloy plating film having a good white semi-gloss was obtained without attacking the lead glass.
また、アルミ蒸着膜を有するセラミック板に対し、常
法により亜鉛置換処理を行なった後、上記めっき浴を用
いて10μmの錫−鉛合金めっきを行なったが、蒸着アル
ミを溶解侵食することもなく、蒸着アルミ上に錫−鉛合
金めっき皮膜が密着性よく形成された。In addition, after performing a zinc substitution treatment on a ceramic plate having an aluminum vapor-deposited film by a conventional method, a 10 μm tin-lead alloy plating was performed using the above plating bath, but without dissolving and eroding the vapor-deposited aluminum. Then, a tin-lead alloy plating film was formed on the evaporated aluminum with good adhesion.
〔実施例2〕 硫酸第1錫(Snとして) 10g/ メタンスルホン酸鉛(Pbとして) 1 〃 1,2,3−トリヒドロキシ−5−ベンゼンジスルホン酸
ナトリウム 50 〃 ホウ酸 30 〃 牛脂アミンのエチレンオキサイド 15モル付加物 1 〃 硫酸アンモニウム 50 〃 pH(アンモニア水で調整) 7 上記組成のめっき浴を用いて実施例1と同様にめっき
を行なったところ、実施例1と同様の結果が得られた。[Example 2] Stannous sulfate (as Sn) 10 g / lead methanesulfonate (as Pb) 1 {sodium 1,2,3-trihydroxy-5-benzenedisulfonate 50} boric acid 30} ethylene in tallowamine 15 mol of oxide adduct 1 物 ammonium sulfate 50〃pH (adjusted with ammonia water) 7 Plating was carried out in the same manner as in Example 1 using the plating bath having the above composition, and the same results as in Example 1 were obtained.
〔実施例3〕 実施例1のめっき浴において、1,2−ジヒドロキシ−
3,5−ジスルホン酸ナトリウムの代りに1,2−ジヒドロキ
シ−4,5−ナフタリンジスルホン酸ナトリウムを用いて
めっきを行なったところ、実施例1と同様の結果が得ら
れた。Example 3 In the plating bath of Example 1, 1,2-dihydroxy-
When plating was performed using sodium 1,2-dihydroxy-4,5-naphthalene disulfonate instead of sodium 3,5-disulfonate, the same results as in Example 1 were obtained.
〔実施例4〕 3−ハイドロキシ−1−プロパンスルホン酸第1錫
(Snとして) 20g/ 1,2−ジヒドロキシ−3−メチル−4,6−ベンゼンジス
ルホン酸ナトリウム 100 〃 クエン酸3アンモニウム 30 〃 アデカトールPC−10 3 〃 硫酸ナトリウム 50 〃 ベンザルアセトン 0.1 〃 pH 6 上記めっき浴を用い、完全直流により銅板上に25℃,D
K2A/dm2の条件で5分間めっきを行なった。[Example 4] Stannous 3-hydroxy-1-propanesulfonate (as Sn) 20 g / sodium 1,2-dihydroxy-3-methyl-4,6-benzenedisulfonate 100 {triammonium citrate 30} adecitol PC-10 3 ナ ト リ ウ ム Sodium sulfate 50 ベ ン Benzalacetone 0.1 〃 pH 6 25 ° C, D
Plating was performed for 5 minutes under the conditions of K 2A / dm 2 .
その結果、平滑緻密な光沢錫めっき皮膜が得られた。
なお、電流効率は99%であった。As a result, a smooth and dense bright tin plating film was obtained.
The current efficiency was 99%.
また、上記めっき浴により鉛ガラス付IC部品にDK2A/d
m2で約8μmのめっきを行なったが、鉛ガラスを侵すこ
となく、良好な光沢錫めっき皮膜が得られた。In addition, D K 2A / d
Although plating of about 8 μm was performed at m 2 , a good bright tin plating film was obtained without attacking the lead glass.
〔実施例5〕 酢酸鉛(Pbとして) 10g/ フェノールスルホン酸カリウム 50 〃 カテコールジスルホン酸ナトリウム 70 〃 アモーゲンNo.8 3 〃 N−(3−ヒドロキシブチリデン)−p−スルファニ
ル酸 0.2 〃 pH 7.5 上記めっき浴を用い、単相半波整流により銅板上に50
℃,DK3A/dm2の条件で5分間めっきを行なった。[Example 5] Lead acetate (as Pb) 10 g / potassium phenolsulfonate 50 {sodium catechol disulfonate 70} Ammogen No. 83 {N- (3-hydroxybutylidene) -p-sulfanilic acid 0.2} pH 7.5 50% on a copper plate by single-phase half-wave rectification using a plating bath
° C., was performed 5 minutes plating under the condition of D K 3A / dm 2.
その結果、平滑緻密な半光沢鉛めっき皮膜が得られ
た。なお、電流効率は98%であった。As a result, a smooth and dense semi-bright lead plating film was obtained. The current efficiency was 98%.
本発明によれば、pH2〜9の領域で良好な錫,鉛,又
は錫−鉛合金めっき皮膜を与えると共に、電流効率が高
く、広い電流密度範囲で使用でき、このため電子部品の
めっき等に好適に用いられる。According to the present invention, a good tin, lead, or tin-lead alloy plating film is provided in the pH range of 2 to 9, and the current efficiency is high, and it can be used in a wide current density range. It is preferably used.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 仲村 太一 大阪府枚方市出口1丁目5番1号 上村 工業株式会社中央研究所内 (72)発明者 浅川 清 大阪府枚方市出口1丁目5番1号 上村 工業株式会社中央研究所内 (56)参考文献 特開 昭49−29240(JP,A) 特開 昭50−118934(JP,A) 特開 昭47−33732(JP,A) 特公 昭49−16176(JP,B2) 特公 昭55−29159(JP,B2) ──────────────────────────────────────────────────続 き Continuing on the front page (72) Taichi Nakamura, 1-5-1 Exit, Hirakata City, Osaka Prefecture Inside Central Research Laboratory, Uemura Industries Co., Ltd. (72) Inventor Kiyoshi Asakawa, 1-1-5-1 Exit, Hirakata City, Osaka Prefecture Uemura Industrial Co., Ltd. Central Research Laboratory (56) References JP-A-49-29240 (JP, A) JP-A-50-118934 (JP, A) JP-A-47-33732 (JP, A) 16176 (JP, B2) JP-B 55-29159 (JP, B2)
Claims (2)
金めっき浴に錯化剤として下記式(1)及び(2) (但し、Rは水素原子、炭素数1〜4のアルキル基又は
ヒドロキシアルキル基、Mは水素原子、アルカリ金属原
子又はNH4基を示し、nは2〜7、mは1〜6の整数で
ある) で示され、少なくとも2個のOH基が互いにオルト位にあ
る化合物の1種又は2種以上を配合してなると共に、pH
が2〜9である錫−鉛合金電気めっき浴。(1) The following formulas (1) and (2) are used as a complexing agent in a tin-lead alloy plating bath containing tin ions and lead ions. (However, R represents a hydrogen atom, an alkyl group or a hydroxyalkyl group having 1 to 4 carbon atoms, M represents a hydrogen atom, an alkali metal atom or an NH 4 group, n is an integer of 2 to 7, and m is an integer of 1 to 6. And at least two OH groups are in the ortho position with respect to each other.
Is a tin-lead alloy electroplating bath of 2 to 9.
っき物を電気めっきすることを特徴とする錫−鉛合金電
気めっき方法。2. A tin-lead alloy electroplating method, comprising electroplating an object to be plated using the electroplating bath according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1121345A JP2709511B2 (en) | 1989-05-17 | 1989-05-17 | Tin, lead, tin-lead alloy electroplating bath and electroplating method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1121345A JP2709511B2 (en) | 1989-05-17 | 1989-05-17 | Tin, lead, tin-lead alloy electroplating bath and electroplating method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02301589A JPH02301589A (en) | 1990-12-13 |
| JP2709511B2 true JP2709511B2 (en) | 1998-02-04 |
Family
ID=14808972
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1121345A Expired - Lifetime JP2709511B2 (en) | 1989-05-17 | 1989-05-17 | Tin, lead, tin-lead alloy electroplating bath and electroplating method |
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| Country | Link |
|---|---|
| JP (1) | JP2709511B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05125582A (en) * | 1991-10-31 | 1993-05-21 | Kawasaki Steel Corp | Electric tin plating method on steel plate |
| CN104388993B (en) * | 2009-07-31 | 2017-01-18 | 出分伸二 | Tin-containing alloy electroplating bath and electrolytic plating method using the same |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4916176A (en) * | 1972-06-07 | 1974-02-13 | ||
| JPS4929240A (en) * | 1972-07-18 | 1974-03-15 |
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1989
- 1989-05-17 JP JP1121345A patent/JP2709511B2/en not_active Expired - Lifetime
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| Publication number | Publication date |
|---|---|
| JPH02301589A (en) | 1990-12-13 |
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