JP2718563B2 - Pressure detector - Google Patents
Pressure detectorInfo
- Publication number
- JP2718563B2 JP2718563B2 JP2224187A JP22418790A JP2718563B2 JP 2718563 B2 JP2718563 B2 JP 2718563B2 JP 2224187 A JP2224187 A JP 2224187A JP 22418790 A JP22418790 A JP 22418790A JP 2718563 B2 JP2718563 B2 JP 2718563B2
- Authority
- JP
- Japan
- Prior art keywords
- thick film
- film body
- pressure detector
- fixing base
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
- G01F23/14—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measurement of pressure
- G01F23/18—Indicating, recording or alarm devices actuated electrically
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
- G01L9/0044—Constructional details of non-semiconductive diaphragms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
- G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measuring Fluid Pressure (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、たとえば自動車エンジンの制御に用いる、
セラミツクス製圧力、加速度、液レベル等の検知器に関
する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention is used for controlling an automobile engine, for example.
The present invention relates to a ceramics pressure, acceleration, liquid level, etc. detector.
SAEレポート860474には、セラミツクス製ダイヤフラ
ムと同じくセラミックス製固定台とをガラスによつて装
着した検出器が開示されている。しかしながら、ガラス
とセラミツクスとの熱膨脹差による、接合部の強度低下
の問題、高温での無圧力下における膨脹差による変形の
問題等があつた。SAE Report 860474 discloses a detector in which a ceramic diaphragm and a ceramic base are mounted by glass as well. However, there are problems such as a decrease in strength of the joint due to a difference in thermal expansion between the glass and the ceramics, and a problem of deformation due to a difference in expansion under no pressure at a high temperature.
これらの解決法として特開昭57-4531号公報、特開昭6
3-292032号公報等には、ダイヤフラムとセラミツクスと
を生の状態、すなわち未焼成状態のいわゆるグリーンシ
ートの状態で積層、一体化させ、一緒に焼成することに
より強固な検出器を製造する方法が提案されている。As a solution to these problems, JP-A-57-4531, JP-A-57-4531,
No. 3-292032 discloses a method of manufacturing a robust detector by laminating and integrating a diaphragm and ceramics in a raw state, that is, a so-called green sheet in an unfired state, and firing together. Proposed.
この方法によればガラスを使用しないことにより上記
の問題点は一応解決されるが、ダイヤフラムと固定台の
セラミツクスをほゞ同じ材料とし、かつ焼成時の収縮差
を同一にすることが必要となり、製造時におけるこれら
の管理が非常に面倒な作業となつた。According to this method, the above problem is temporarily solved by not using glass.However, it is necessary to make the ceramics of the diaphragm and the fixing base almost the same material, and make the difference in shrinkage during firing the same, These controls during manufacturing have become very cumbersome.
グリーンシートを積層して焼成する場合、積層された
２層のシートの焼成時の収縮を充分に一致させないと焼
成体にソリや曲がりが発生する。ソリが発生した焼成体
を自動車用排ガスの圧力センサとして組付すると、排ガ
スのリークを生じたり振動を伴う排ガスが加わつた場
合、その余波により共振を発生し、圧力検出値に誤差が
避けられない。When green sheets are stacked and fired, warping or bending occurs in the fired body unless the shrinkage during firing of the stacked two-layer sheet is sufficiently matched. If the fired body with warpage is assembled as an exhaust gas pressure sensor for automobiles, if exhaust gas leaks or vibrated exhaust gas is added, resonance will occur due to the aftermath, and errors in the pressure detection value are inevitable .
そのため、この装置に使用するダイヤフラムおよび固
定台を極力ソリが少ないものとする必要がある。しかし
ながら、積層体はたとえば同じグリーンシートを使用し
た場合でも、シートを製造する上での工程のバラツキ等
により、また仮焼成等を加えた場合にはその温度差等に
より、製造ロツトごとに焼成収縮が異なりどうしても±
0.4％程度の収縮差が発生する。Therefore, it is necessary to minimize the warp of the diaphragm and the fixing base used in this device. However, even when the same green sheet is used, for example, the same green sheet is used. But it is absolutely ±
A contraction difference of about 0.4% occurs.
また、印刷等による厚膜法を採用した場合には、シー
トと印刷体との焼成収縮差が大きいだけでなく電極およ
びリード用の金属部分を印刷によつて形成することによ
る影響のためソリが避けられない。In addition, when the thick film method by printing or the like is employed, not only is there a large difference in firing shrinkage between the sheet and the printed body, but also because the metal part for the electrodes and leads is formed by printing, the warpage is reduced. Inevitable.
本発明の目的は、焼成時の収縮差が異なる場合でもほ
とんどソリ等のない安定した圧力検出器を提供すること
にある。SUMMARY OF THE INVENTION An object of the present invention is to provide a stable pressure detector having almost no warpage even when the difference in shrinkage during firing is different.
本発明の圧力検出器は、セラミツクス製厚膜体と該厚
膜体と向かい合いかつその周辺部を互いに固定されるセ
ラミツクス製固定台とを有する圧力検出器において、前
記固定台の両側に前記厚膜体を積層し、一体成形したこ
とを特徴としている。The pressure detector of the present invention is a pressure detector having a ceramics thick film body and a ceramics fixing base opposed to the thick film body and having a peripheral part fixed to each other, wherein the thick film is provided on both sides of the fixing base. It is characterized in that the bodies are laminated and integrally molded.
本発明によれば、固定台の両側に厚膜体を設けたた
め、焼成時に固定台と厚膜体との間に焼成収縮差がある
としても、その差は抑制され圧力検出器に変形を生じな
い。According to the present invention, since the thick film bodies are provided on both sides of the fixing base, even if there is a firing shrinkage difference between the fixing base and the thick film body during firing, the difference is suppressed and the pressure detector is deformed. Absent.
本発明は、セラミツクス製厚膜体とセラミツクス製固
定台とからなる圧力検出器において、固定台の両側に厚
膜体を設けたものである。According to the present invention, in a pressure detector comprising a ceramic thick film body and a ceramic fixed base, thick film bodies are provided on both sides of the fixed base.
ソリを防ぐため固定台の両側に設けられる厚膜体の層
は、たとえば95％程度同じ成分からなる層とする。固定
台を挟む外側の両厚膜体の厚みの比は1/10〜１、好まし
くは1/5〜１とされる。In order to prevent warping, the layers of the thick film provided on both sides of the fixing base are made of, for example, about 95% of the same component. The ratio of the thickness of the two thick film bodies on the outer side of the fixing base is 1/10 to 1, preferably 1/5 to 1.
固定台と厚膜体との収縮差が大きい場合には、固定台
を両側から挟むことによりその差はいくぶん減殺される
としても微かにソリが発生する。そのため、固定台が厚
膜体の収縮率をできるだけ抑制できるように、固定台に
対して厚膜体の厚みを1/2以下、好ましくは2/5以下にす
ることが望ましい。When the difference in shrinkage between the fixed base and the thick film body is large, even if the difference is somewhat reduced by sandwiching the fixed base from both sides, slight warpage occurs. Therefore, it is desirable that the thickness of the thick-film body with respect to the fixing base be 以下 or less, preferably / 5 or less, so that the fixing base can minimize the shrinkage of the thick-film body.
つぎに圧力センサとして圧力に応じて変形しうるダイ
ヤフラムを設けるために厚膜体と固定台との少くとも一
方の側間に空所を設ける場合、予め空間を生状態で形成
してもよいが、焼成時の厚膜体材の軟化、変形により所
定の間隔が維持できなくなる。そのため介装体は厚膜体
の軟化しうる温度−200℃〜100℃の範囲で焼成中に消失
する物質を使用することが好ましい。消失温度が高過ぎ
る場合、軟化焼結が進みカーボンとして残留することと
なる。逆に低過ぎる場合、軟化によつて変形する。また
その厚みは、厚膜体の厚み以下好ましくは2/3以下とす
る必要がある。その理由は積層される厚膜体の介装体境
界部にキレが発生したり、介装体の存在により厚膜体の
焼成時の収縮に悪影響を及ぼしソリが発生することにな
るからである。Next, when a space is provided between at least one side of the thick film body and the fixing base in order to provide a diaphragm which can be deformed according to pressure as a pressure sensor, the space may be formed in a raw state in advance. In addition, the predetermined interval cannot be maintained due to softening and deformation of the thick film material during firing. Therefore, it is preferable to use a substance which disappears during firing at a temperature in a range of −200 ° C. to 100 ° C. at which the thick film body can be softened. If the extinction temperature is too high, softening sintering proceeds and remains as carbon. Conversely, if it is too low, it will deform due to softening. In addition, the thickness of the thick film needs to be equal to or less than the thickness of the thick film body, preferably equal to or less than 2/3. The reason for this is that sharpness occurs at the boundary of the interposed body of the thick film body to be laminated, and the presence of the interposed body adversely affects shrinkage of the thick film body during firing, causing warpage. .
さらに、介装体を設け厚膜体を印刷により形成する場
合には、介装体境界部にキレが発生し易く、その対策と
してはグリーンシートとする方が良い。他方の厚膜体に
関してはダイヤフラムとして使用しない場合には介装体
を設ける必要がないため印刷等でも差し支えない。しか
しそのときに焼成時収縮差を印刷される表面に対し１％
以下にすることが必要となる。Further, in the case where an interposed body is provided and a thick film body is formed by printing, the boundary of the interposed body is likely to be broken, and a green sheet is better as a countermeasure. When the other thick film body is not used as a diaphragm, there is no need to provide an interposition body, so printing or the like may be performed. However, at that time, the difference in shrinkage during firing was 1% of the surface to be printed.
It is necessary to:
上述の関係を守つたとしてもどうしてもソリが発生す
る収縮差は４％が限度で、好ましくは収縮差は2.5％以
下にした方が良い。Even if the above relationship is maintained, the difference in shrinkage at which warpage always occurs is limited to 4%, and preferably, the difference in shrinkage is 2.5% or less.
これらの条件を満足すれば、固定台と厚膜体の材質を
別のもの、たとえば、固定台に対してAl2O3厚膜体（ダ
イヤフラム）に対してヤング率の小さいZrO2の等の組合
わせも可能となる。If these conditions are satisfied, the materials of the fixing base and the thick film body are different, for example, ZrO 2 having a small Young's modulus for the Al 2 O 3 thick film body (diaphragm) for the fixing base. Combinations are also possible.
本発明の圧力検出器は下記の工程によつて製造され
る。すなわち 1.市販のαAl2O3（純度99％）を粒度2.5μｍ以下のもの
が80％以上になるまで、ムライト製ボールミルによつて
湿式粉砕する。The pressure detector of the present invention is manufactured by the following steps. That is, 1. Commercially available αAl 2 O 3 (purity: 99%) is wet-pulverized by a mullite ball mill until the particle size of 2.5 μm or less becomes 80% or more.
2.乾燥後、前記粉末に有機バインダと溶剤とを加え、脱
脂後ドクターブレード法によりキヤステイングする。2. After drying, an organic binder and a solvent are added to the powder, and after degreasing, casting is performed by a doctor blade method.
3.焼成収縮を調節するため、粉砕時間を変更したもの、
または工程１の後仮焼成を施し、バインダ等を少なくし
たものも同様にキヤステイングする。Ptを主成分とし、
有機バインダと工程１で得られた粉末10％を含むペース
トによつて所定の形状の電極をスクリーン印刷によつて
20μの厚さに形成する。3.Pulverization time changed to adjust firing shrinkage,
Alternatively, after the step 1, pre-firing is performed, and the material with less binder or the like is cast similarly. Pt as the main component,
An electrode having a predetermined shape is formed by screen printing using an organic binder and a paste containing 10% of the powder obtained in step 1.
Formed to a thickness of 20μ.
4.一部カーボンブラツクに溶剤を加え、所定厚の印刷を
行い介装体とする。4. A solvent is added to a part of the carbon black, and printing is performed to a predetermined thickness to form an interposer.
5.積層し圧着法により一体化する。5. Laminate and integrate by crimping.
6.樹脂抜き後1520℃で２時間の焼成を行う。6. Bake at 1520 ° C for 2 hours after removing the resin.
以上の工程により第１図または第２図の検出器が得られ
る。Through the above steps, the detector shown in FIG. 1 or FIG. 2 is obtained.
第１図は本発明の一実施例で介装体がなくかつ未焼成
の状態を示す縦断面図である。固定台１はその上下から
厚膜体２、３により挟持されている。FIG. 1 is a longitudinal sectional view showing an unfired state without an interposed body in one embodiment of the present invention. The fixed base 1 is sandwiched by thick film bodies 2 and 3 from above and below.
第2A、Ｂ図は前記工程４によつて作られた介装体４を
固定台１の上面と厚膜体２との間に設け（Ａ図）、また
固定台１の上下面と厚膜体２、３との間に設け（Ｂ図）
た未焼成の状態を示す縦断面図である。介装体４は焼成
によつて消滅し、固定台と厚膜体２または２と３の間に
所定の空隙を形成するものである。FIGS. 2A and 2B show that the interposer 4 formed in the step 4 is provided between the upper surface of the fixing base 1 and the thick film body 2 (FIG. 2A). Provided between bodies 2 and 3 (Fig. B)
It is a longitudinal cross-sectional view which shows the unfired state. The interposition body 4 disappears by firing and forms a predetermined gap between the fixing base and the thick film body 2 or 2 and 3.
さらに、本発明の試験のため下記のように処理して32
個の試験片を得た。その中で試験結果１の成績のよいも
の10個につきさらに電極（第３図参照）を印刷して試験
し、試験結果２を得た。Further, for the test of the present invention,
Specimens were obtained. Among them, 10 electrodes having good results in Test Result 1 were further printed with electrodes (see FIG. 3) and tested, and Test Result 2 was obtained.
なお一部テスト用として （ｉ）印刷品（非検出側の厚膜体）の場合、工程２にお
ける溶剤を加えたインクによつて20μの厚みで印刷し
た。As a part of the test, (i) in the case of a printed product (thick film on the non-detection side), printing was carried out at a thickness of 20 μm with the ink added with the solvent in step 2.
（ii）市販のAl2O3に代え、市販のZrO2にY2O3を5mol％
を加え、1300℃（No.31）、1350℃（No.32）の熱処理
後、工程１のように粉砕した。(Ii) 5 mol% of Y 2 O 3 in commercial ZrO 2 instead of commercial Al 2 O 3
After heat treatment at 1300 ° C. (No. 31) and 1350 ° C. (No. 32), pulverization was performed as in Step 1.
第３（ａ）図および第３（ｂ）（ｃ）図はテスト用に
印刷される電極の形状である。第３（ａ）図中のABCDは
抵抗体で、一体化後、検出側厚膜体上に焼付等により設
け、さらに完成した圧力検出装置をブリツジ回路に接続
することにより、圧力値を求めることができるものであ
る。 FIGS. 3 (a) and 3 (b) (c) show the shapes of the electrodes printed for testing. ABCD in FIG. 3 (a) is a resistor. After integration, it is provided on the detection-side thick film body by baking or the like, and the completed pressure detection device is connected to a bridge circuit to obtain a pressure value. Can be done.
第４図は試験結果Ｉにおける焼成物に生ずるソリの発
生状態を示し、幅2cmの焼成物に対し、ソリの量が10μ
未満の場合は◎、10μ〜30μ未満の場合は○、30μ〜60
μ未満の場合は△、60μ以上の場合は×で示してある。FIG. 4 shows the state of warpage occurring in the fired product in Test Result I. The amount of warpage was 10 μm for a fired product having a width of 2 cm.
◎, less than 10μ ~ 30μ, ○, 30μ ~ 60
When the value is less than μ, the value is Δ, and when the value is 60 μ or more, the value is X.
試験結果１、２の表からも明らかなように、セラミツ
ク製固定台の非検出側裏面にも厚膜体を設け、その厚み
が検出用厚膜体に対して1/10〜１の範囲にあり、かつ検
出用厚膜体の厚みが固定台の厚みに対し1/2以下である
本発明品（No.1〜27およびNo.31,32）は、非検出用厚膜
体を設けない従来品（No.I,II）、非検出用厚膜体を設
けても、その厚みが検出用厚膜体に対し薄すぎる本発明
品（No.29）および検出側厚膜体の厚みが固定台の厚み
の1/2を越える本発明外品（No.30）に比しソリを小さく
することができる。As is clear from the tables of Test Results 1 and 2, a thick film body was also provided on the back side of the non-detection side of the ceramic fixing base, and the thickness was in the range of 1/10 to 1 with respect to the detection thick film body. The present invention product in which the thickness of the detection thick film body is 1/2 or less of the thickness of the fixed base (Nos. 1 to 27 and Nos. 31 and 32) does not have the non-detection thick film body Even if the conventional product (No. I, II) and the non-detection thick film were provided, the thickness of the present invention product (No. 29) and the detection-side thick film were too thin compared to the detection thick film. The warpage can be reduced as compared with the non-product of the present invention (No. 30) exceeding 1/2 of the thickness of the fixing base.
またさらに本発明品は介装体の厚みを検出側厚膜体よ
り小さくしているため、キレの発生を抑制することがで
きるが、介装体の厚みを厚くするとNo.28のようにキレ
を生ずることになる。Further, in the product of the present invention, since the thickness of the interposer is made smaller than that of the thick film on the detection side, occurrence of sharpness can be suppressed. Will occur.
また電極を有する構造体としても充分ソリ、キレ等の
ないものを提供することができる。In addition, a structure having no warp or sharpness can be provided as a structure having electrodes.
なお、本発明の圧力検出器は外圧力をうけてダイヤフ
ラムが変形し、その変形に応じて圧力を検出するものに
ついて対象として例示してきたが、振動や加速度の応力
によりダイヤフラムを変形してこれらの振動や加速度の
大きさを検出するもの、さらには、液と接触したときそ
の液圧によつてダイヤフラムに歪みを生じる液面レベル
用としても利用することができる。The pressure detector of the present invention has been described as an example in which the diaphragm is deformed by receiving external pressure, and the pressure is detected in accordance with the deformation. It can also be used for detecting the magnitude of vibration or acceleration, and also for liquid surface levels where the diaphragm is distorted by the liquid pressure when it comes into contact with liquid.
本発明は固定台の両側に厚膜体を積層し、一体成形し
たことによりソリを抑制することができ、従来の欠点を
ほとんど解消することができた。According to the present invention, warpage can be suppressed by laminating the thick film bodies on both sides of the fixing base and integrally forming, and the conventional disadvantages can be almost eliminated.
第１図および第２（ａ）（ｂ）図は、それぞれ介装体の
ないおよび備えた場合の、本発明による圧力検出装置の
未焼成状態における縦断面図であり、第３（ａ）図およ
び第３（ｂ）（ｃ）図はテスト用に印刷される電極の構
造を示し、第４図はそりの発生した状態を示す焼成品の
縦断面図である。 １……固定台、２……検出側厚膜体、３……非検出側厚
膜体、４……介装体1 and 2 (a) and 2 (b) are longitudinal sectional views of the pressure detecting device according to the present invention in an unfired state without and with an interposition body, respectively, and FIG. 3 (a). FIGS. 3 (b) and 3 (c) show the structure of an electrode printed for testing, and FIG. 4 is a longitudinal sectional view of a fired product showing a state where warpage has occurred. DESCRIPTION OF SYMBOLS 1 ... Fixed base, 2 ... Thick film on detection side, 3 ... Thick film on non-detection side, 4 ... Interposed body
───────────────────────────────────────────────────── フロントページの続き (72)発明者 橘川 兼久 愛知県名古屋市瑞穂区高辻町14番18号 日本特殊陶業株式会社内 (56)参考文献 特開 昭61−215266（ＪＰ，Ａ) 特開 昭60−135756（ＪＰ，Ａ) 特開 昭57−4531（ＪＰ，Ａ) ────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Kanehisa Tachibana 14-18, Takatsuji-cho, Mizuho-ku, Nagoya-shi, Aichi Japan Special Ceramics Co., Ltd. (56) References JP-A-61-215266 (JP, A) Sho 60-135756 (JP, A) JP-A Sho 57-4531, JP (A, JP)
Claims (7)
合いかつその周辺部を互いに固定されるセラミツクス製
固定台とを有する圧力検出器において、前記固定台の両
側に前記厚膜体を積層し、一体成形したことを特徴とす
る圧力検出器。1. A pressure detector having a ceramic thick film body and a ceramic fixing base opposed to said thick film body and having its peripheral part fixed to each other, said thick film bodies being laminated on both sides of said fixing base. And a pressure detector characterized by being integrally molded.
1/10〜１であることを特徴とする請求項１に記載の圧力
検出器。2. The thickness ratio of said thick film body on both sides of said fixed base is
The pressure detector according to claim 1, wherein the ratio is 1/10 to 1.
下であることを特徴とする請求項１に記載の圧力検出
器。3. The pressure detector according to claim 1, wherein the ratio of the thickness of the thick film body to the fixed base is 1/2 or less.
一方の側に空所を形成し、一体成形後、該厚膜体が圧力
により変形し得るダイヤフラムとした請求項１〜３に記
載の圧力検出器。4. A diaphragm which is formed at least on one side between the thick film body and the fixing base, and which is capable of being deformed by pressure after being integrally molded. 4. The pressure detector according to 3.
一方の側に空所を形成するため両者の間に介装体が積層
され、前記介装体は加熱により消失する物質であり、前
記介装体の厚みを厚膜体の厚み以下としたことを特徴と
する請求項１ないし３のいずれか一項に記載の圧力検出
器。5. An interposer is laminated between the thick film body and the fixing base to form a space on at least one side thereof, and the interposer is a substance which disappears by heating. The pressure detector according to any one of claims 1 to 3, wherein the thickness of the interposition body is equal to or less than the thickness of the thick film body.
少くとも圧力検出側の厚膜体はセラミツクスのグリーン
シートであることを特徴とする請求項１ないし４のいず
れか一項に記載の圧力検出器。6. A thick film body laminated on both sides of the fixing base, wherein at least the thick film body on the pressure detection side is a green sheet of ceramics. A pressure detector according to item 1.
成時の収縮差が４％以下であることを特徴とする請求項
１ないし３のいずれか一項に記載の圧力検出器。7. The pressure detector according to claim 1, wherein a difference in shrinkage between the thick film body on the pressure detection side and the fixed base during firing is 4% or less. .
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2224187A JP2718563B2 (en) | 1990-08-28 | 1990-08-28 | Pressure detector |
| US07/744,409 US5214961A (en) | 1990-08-28 | 1991-08-13 | Pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2224187A JP2718563B2 (en) | 1990-08-28 | 1990-08-28 | Pressure detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04106438A JPH04106438A (en) | 1992-04-08 |
| JP2718563B2 true JP2718563B2 (en) | 1998-02-25 |
Family
ID=16809888
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2224187A Expired - Fee Related JP2718563B2 (en) | 1990-08-28 | 1990-08-28 | Pressure detector |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US5214961A (en) |
| JP (1) | JP2718563B2 (en) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5483834A (en) * | 1993-09-20 | 1996-01-16 | Rosemount Inc. | Suspended diaphragm pressure sensor |
| SG41962A1 (en) * | 1993-09-24 | 1997-08-15 | Rosemount Inc | Pressure transmitter isolation diaphragm |
| US5499158A (en) * | 1994-11-14 | 1996-03-12 | Texas Instruments Incorporated | Pressure transducer apparatus with monolithic body of ceramic material |
| US5485345A (en) * | 1994-11-14 | 1996-01-16 | Texas Instruments Incorporated | Pressure transducer apparatus |
| US5486976A (en) * | 1994-11-14 | 1996-01-23 | Texas Instruments Incorporated | Pressure transducer apparatus having a rigid member extending between diaphragms |
| US6484585B1 (en) | 1995-02-28 | 2002-11-26 | Rosemount Inc. | Pressure sensor for a pressure transmitter |
| US5731522A (en) * | 1997-03-14 | 1998-03-24 | Rosemount Inc. | Transmitter with isolation assembly for pressure sensor |
| US5637802A (en) | 1995-02-28 | 1997-06-10 | Rosemount Inc. | Capacitive pressure sensor for a pressure transmitted where electric field emanates substantially from back sides of plates |
| US6505516B1 (en) | 2000-01-06 | 2003-01-14 | Rosemount Inc. | Capacitive pressure sensing with moving dielectric |
| AU2629901A (en) | 2000-01-06 | 2001-07-16 | Rosemount Inc. | Grain growth of electrical interconnection for microelectromechanical systems (mems) |
| US6508129B1 (en) | 2000-01-06 | 2003-01-21 | Rosemount Inc. | Pressure sensor capsule with improved isolation |
| US6561038B2 (en) | 2000-01-06 | 2003-05-13 | Rosemount Inc. | Sensor with fluid isolation barrier |
| US6520020B1 (en) | 2000-01-06 | 2003-02-18 | Rosemount Inc. | Method and apparatus for a direct bonded isolated pressure sensor |
| US7007553B2 (en) * | 2000-11-06 | 2006-03-07 | Toyoda Koki Kabushiki Kaisha | Mechanical quantity sensor element, load sensor element, acceleration sensor element, and pressure sensor element |
| US6848316B2 (en) * | 2002-05-08 | 2005-02-01 | Rosemount Inc. | Pressure sensor assembly |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS574531A (en) * | 1980-06-10 | 1982-01-11 | Matsushita Electric Ind Co Ltd | Manufacture of electrostatic capacity type pressure sensor |
| JPS63292032A (en) * | 1987-05-26 | 1988-11-29 | Ngk Insulators Ltd | Pressure detector |
| JPH0731091B2 (en) * | 1987-05-27 | 1995-04-10 | 日本碍子株式会社 | Distortion detector |
-
1990
- 1990-08-28 JP JP2224187A patent/JP2718563B2/en not_active Expired - Fee Related
-
1991
- 1991-08-13 US US07/744,409 patent/US5214961A/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| US5214961A (en) | 1993-06-01 |
| JPH04106438A (en) | 1992-04-08 |
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