JP2721602B2 - Method and apparatus for evacuating hydrogen using hydrogen storage alloy - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for evacuating hydrogen by using a hydrogen storage alloy when an ultra-high vacuum or an ultra-high vacuum is achieved by a turbo-molecular pump or the like, and an exhaust apparatus therefor.

[0002]

2. Description of the Related Art Conventionally, as a method for obtaining an ultra-high vacuum or an ultra-high vacuum, a hydrogen storage alloy has been used in combination with a vacuum pump such as a turbo molecular pump. This utilizes the property that the hydrogen storage alloy reversibly stores and releases hydrogen.

FIG. 7 is a configuration diagram of an example of a conventional hydrogen exhaust device using a hydrogen storage alloy. In this example, a hydrogen storage alloy element 2 having a heating mechanism 3 is directly fixed in a chamber 1 to be evacuated, and an ultrahigh vacuum pump 5 is provided via a gate valve 4 as an evacuation apparatus. When the hydrogen storage alloy element 2 stores hydrogen up to the permissible hydrogen storage amount, the heating mechanism 3 reduces the hydrogen exhaust performance after that. Therefore, the heating mechanism 3 heats the hydrogen by the heating mechanism 3 to release the stored hydrogen, thereby improving the hydrogen exhaust performance. It is for recovery.

FIG. 8 is a configuration diagram of another example of a conventional hydrogen exhaust device using a hydrogen storage alloy. In this example, a storage chamber 13 isolated by a gate valve 12 is provided on a side surface of a chamber 11 to be evacuated, and a hydrogen storage alloy element 2 having a heating mechanism 3 is fixed in the storage chamber 13.

[0005]

In the example shown in FIG. 7, since the hydrogen storage alloy element 2 is directly introduced and fixed in the exhaust chamber 1, the hydrogen storage alloy element 2 and the hydrogen in the exhaust chamber 1 are connected. There is nothing that hinders the contact, and the hydrogen exhaust performance of the hydrogen storage alloy element 2 can be sufficiently utilized.

However, when the hydrogen storage alloy element 2 stores hydrogen up to an inherent allowable hydrogen storage amount, the hydrogen storage alloy element 2
In order to regenerate hydrogen, the hydrogen storage alloy element 2 must be heated by the heating mechanism 3 to release the hydrogen stored in the hydrogen storage alloy element 2, and continuous exhaust cannot be performed.

When the exhaust chamber 1 is opened and the atmosphere is introduced, the hydrogen storage alloy element 2 adsorbs gases other than hydrogen,
By repeatedly opening the exhaust chamber 1 to the atmosphere, gases other than hydrogen are accumulated in the hydrogen storage alloy element 2, which causes the hydrogen exhaust performance of the hydrogen storage alloy element 2 to deteriorate.

In the example shown in FIG. 8, since the hydrogen storage alloy element 2 is fixed in the storage chamber 13 connected to the chamber to be evacuated 11 via the gate valve 12, the gate valve 12 is opened when exhausting hydrogen. The hydrogen in the exhaust chamber 11 reaches the hydrogen storage alloy element 2 through the opening of the gate valve 12.

For this reason, when the exhausted chamber 11 is opened to allow the atmosphere to flow as described above, the hydrogen storage alloy element 2 is not exposed to the atmosphere by closing the gate valve 12. The hydrogen exhaust performance of the alloy element 2 can be prevented from lowering.

However, the number of hydrogen molecules reaching the hydrogen storage alloy element 2 through the opening of the gate valve 12 is limited by the probability of gas passage through the opening of the gate valve 12, and the hydrogen of the hydrogen storage alloy element 2 is limited. Exhaust performance is not fully available.

It is an object of the present invention to solve the above-mentioned problems and to provide a hydrogen exhaust method and apparatus capable of continuously exhausting and fully utilizing the hydrogen exhausting performance of the hydrogen storage alloy element 2.

[0012]

In order to solve the above-mentioned problems, in a method for exhausting hydrogen by using a hydrogen storage alloy, a straight-moving introduction mechanism provided in a storage chamber 22 separated from an exhaust chamber 21 and a gate valve 23. 24, the exhausted chamber 21
The hydrogen storage alloy element 2, which is configured to be able to be transferred between the inside and the storage chamber 22, stores hydrogen in the exhaust chamber 21 and regenerates heat in the storage chamber 22.

As a device for this purpose, an exhausted chamber 21 is provided.
And a storage chamber 22 isolated by a gate valve 23, a rectilinear introduction mechanism 24 provided on the bottom surface of the storage chamber 22 so that the tip protrudes into the exhaust chamber 21, and a distal end of the rectilinear introduction mechanism 24. The hydrogen storage alloy element 2 provided is provided.

The rectilinear introduction mechanism includes the storage chamber 2 described above.
2 is constituted by a bellows 22b, and the hydrogen storage alloy element 2 is fixedly provided on the bottom surface of the storage chamber 22 in some cases.

[0015]

FIG. 1 is a block diagram of an embodiment of a hydrogen exhaust device using a hydrogen storage alloy according to the present invention. Two storage chambers 22 and 22 ′ are provided on the side surface of the exhaust chamber 21 respectively with the gate valve 2.
3, 23 'are provided. This storage room 22,
In the bottom 22a, straight-introduction mechanisms 24, 24 'are provided on the bottom surfaces 22a, 22a' through the bottom surfaces 22a, 22a '.

The hydrogen-absorbing alloy elements 2 and 2 'are fixed at the tips of the straight-moving introduction mechanisms 24 and 24'. When the linear-movement introducing mechanisms 24 and 24 'are fully advanced, the hydrogen-absorbing alloy elements 2 and 24' at the tip are advanced. , 2 ′ are configured to be completely located in the exhaust chamber 21, and in a fully retracted position, the hydrogen storage alloy elements 2, 2 ′ are configured to be completely located in the storage chambers 22, 22 ′. ing.

The hydrogen storage alloy elements 2, 2 'are heated by externally supplying electric power as heating mechanisms 3, 3',
It is configured to release the stored hydrogen.
Further, a common vacuum pump 6 is provided for exhausting the hydrogen released from the hydrogen storage alloy elements 2, 2 ', which can individually exhaust the storage chambers 22, 22'.

It is to be noted that an exhaust device including the gate valve 4 and the ultrahigh vacuum pump 5 is also provided in the exhaust chamber 21 as in the above-described conventional examples.

FIG. 2 shows an example of a method of fixing the rectilinear introduction mechanism 24 to the bottom surface 22a of the storage chamber 22. A bellows 22b is provided inside the bottom surface 22a, and the rectilinear introduction mechanism 24 is fixed to the bellows 22b. , And a guide bush 22c is provided at a portion where the rectilinear introduction mechanism 24 penetrates the bottom surface 22a.

Note that the movable length of the bellows 22b is such that the hydrogen storage alloy element 2 can be completely moved in the exhaust chamber 21 and the storage chamber 22.

The lead wires of the heating mechanism 3 penetrate the bottom surface 22a as shown in FIG.

FIG. 3 shows the bellows 22b of FIG.
Are provided outside the bottom surface 22a. The other points are the same as those in FIG.

FIG. 4 shows the same as FIG. 2 except that the lead wire of the heating mechanism 3 is connected from the inside to the outside along the center line of the rectilinear introduction mechanism 24, and
a does not penetrate directly.

FIG. 6 is a view showing the configuration in which the movable storage chamber 32 is used. In this example, the movable storage room 32
Is constituted by a bellows 32 b, and the hydrogen storage alloy element 2 is fixed to the bottom surface 32 a of the movable storage chamber 32.

Further, the bottom surface 32a is
c regulates the vehicle to move straight.

The movable range of the bellows 32b is such that the hydrogen storage alloy element 2 fixed to the bottom surface 32a is completely located in the exhaust chamber 21 when contracted, and the hydrogen storage alloy element 2 is completely positioned when extended. It is necessary to be configured to be located inside the movable storage chamber 32.

Next, the operation of the hydrogen exhaust system shown in FIG. 1 will be described.

First, the rectilinear introduction mechanisms 24, 24 'are retracted to close the gate valves 23, 23', and the hydrogen storage alloy elements 2, 2 'are placed in the storage chambers 22, 22' which have been evacuated by the vacuum pump 6 in advance. 'Wait.

Next, the gate valve 4 is opened, and the inside of the evacuated chamber 21 is evacuated to an operable pressure of the ultra-high vacuum pump 5 via the ultra-high vacuum pump 5 by a roughing vacuum pump (not shown).

Subsequently, the ultrahigh vacuum pump 5 is operated to evacuate the interior of the evacuated chamber 21 to a pressure at which the hydrogen storage alloy elements 2, 2 'can efficiently exhaust hydrogen.

Thereafter, the gate valve 23 is opened, and the hydrogen storage alloy element 2 in the storage chamber 22 is inserted by the straight-moving introduction mechanism 24 into the exhaust chamber 21 until it completely projects.

In this state, the hydrogen storage alloy element 2 stores hydrogen efficiently and exhausts sufficient hydrogen.

However, when the hydrogen storage alloy element 2 stores hydrogen up to the allowable hydrogen storage amount, the hydrogen exhaust performance is reduced thereafter. For this reason, in order to continuously operate while maintaining sufficient hydrogen exhaust performance, two hydrogen storage alloy elements 2,
Occlusion and release may be performed alternately using 2 '.

For this reason, two sets of hydrogen storage mechanisms are provided, and the gate valve 23 of one of the hydrogen storage mechanisms is opened,
The hydrogen storage alloy element 2 is protruded into the exhaust chamber 21 to perform hydrogen exhaust. During this time, the hydrogen storage alloy element 2 'of the other hydrogen storage mechanism is stored in the storage chamber 22' and the gate valve 2
By closing the 3 'and supplying power to the heating mechanism 3' to heat the hydrogen storage alloy element 2 ', the stored hydrogen is released, so that the vacuum pump 6 releases the stored hydrogen in the storage chamber 22'. The exhausted hydrogen is exhausted.

By alternately performing this operation, it is possible to continuously discharge hydrogen while maintaining sufficient hydrogen discharging performance. In this embodiment, two sets of hydrogen storage mechanisms are provided, but it is also possible to provide two or more sets of hydrogen storage mechanisms.

In the case of the hydrogen exhaust system shown in FIG.
Since the movable storage chamber 32 itself can be expanded and contracted by the bellows 32b instead of the rectilinear introduction mechanism 24 in the inside, the hydrogen storage alloy element 2 is moved in and out of the chamber to be evacuated 21 by this expansion and contraction operation. Therefore, detailed description is omitted.

[0037]

As described above, since a plurality of hydrogen storage alloy elements can alternately perform the storage operation and the release operation, the hydrogen in the exhaust chamber 21 can be continuously discharged while maintaining sufficient hydrogen exhaust performance. It is possible to exhaust.

[Brief description of the drawings]

FIG. 1 is a configuration diagram of one embodiment of a hydrogen exhaust device using a hydrogen storage alloy according to the present invention.

FIG. 2 is a configuration diagram of a first method for fixing a rectilinear introduction mechanism to a storage room.

FIG. 3 is a configuration diagram of a second method for fixing the rectilinear introduction mechanism to the storage chamber.

FIG. 4 is a configuration diagram of a third method for fixing the rectilinear introduction mechanism to the storage chamber.

FIG. 5 is a configuration diagram of a fourth method for fixing the rectilinear introduction mechanism to the storage room.

FIG. 6 is a configuration diagram of another embodiment of the hydrogen storage alloy hydrogen exhaust device according to the present invention, in which a movable storage chamber is used.

FIG. 7 is a configuration diagram of an example of a conventional hydrogen exhaust device using a hydrogen storage alloy.

FIG. 8 is a configuration diagram of another example of a conventional hydrogen exhaust device using a hydrogen storage alloy.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Exhaust chamber 2, 2 'Hydrogen storage alloy element 3, 3' Heating mechanism 4 Gate valve 5 Ultra high vacuum pump 6 Vacuum pump 11 Exhaust chamber 12 Gate valve 13 Storage chamber 21 Exhaust chamber 22, 22 'Storage chamber 22a , 22a 'bottom surface 22b bellows 22c guide bush 23, 23' gate valve 24, 24 'rectilinear introduction mechanism 32 movable storage chamber 32a bottom surface 32b bellows 32c guide rail

Claims (3)

(57) [Claims] 1. A method for evacuating hydrogen using a hydrogen storage alloy, wherein a straight-line introduction mechanism provided in a storage chamber separated from an exhausted side by an opening / closing means is configured to be transferable between the exhausted side and the storage chamber. Hydrogen absorbing the hydrogen storage alloy element on the side to be evacuated and causing the hydrogen storage alloy element to heat and regenerate in the storage chamber. 2. A hydrogen exhaust device using a hydrogen storage alloy, wherein a storage chamber is isolated from a side to be evacuated by an opening / closing means, and a rectilinear introduction provided on a bottom surface of the storage chamber so that a tip projects toward the side to be evacuated. A hydrogen exhaust device using a hydrogen storage alloy, comprising a mechanism and a hydrogen storage alloy element provided at a tip of the straight-moving introduction mechanism. 3. The hydrogen storage device according to claim 2, wherein a side surface of the storage chamber is formed of a bellows as the straight-moving introduction mechanism, and the hydrogen storage alloy element is fixed to a bottom surface of the storage chamber. Hydrogen exhaust system by alloy.