JP2729627B2 - Ion source - Google Patents
Ion sourceInfo
- Publication number
- JP2729627B2 JP2729627B2 JP63075720A JP7572088A JP2729627B2 JP 2729627 B2 JP2729627 B2 JP 2729627B2 JP 63075720 A JP63075720 A JP 63075720A JP 7572088 A JP7572088 A JP 7572088A JP 2729627 B2 JP2729627 B2 JP 2729627B2
- Authority
- JP
- Japan
- Prior art keywords
- ion
- container
- temperature
- substance
- heater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Electron Sources, Ion Sources (AREA)
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明はイオン注入装置、表面処理装置等に使用され
るイオン源に関する。Description: TECHNICAL FIELD The present invention relates to an ion source used for an ion implantation apparatus, a surface treatment apparatus, and the like.
（従来の技術） 従来、イオン注入装置のイオン源として、例えば第１
図示のように、真空のイオン発生部ａに、前方にスリッ
ト状のイオン引出口ｂを備えた中空のイオン発生室ｃを
設け、該イオン発生室ｃにこれを挿通するフィラメント
からなるイオン化手段ｄを設けるようにし、該イオン発
生室ｃのイオン引出口ｂと対向する側にＰ、As等の固体
のイオン化物質ｅを収めた容器ｆを接続するようにした
ものが知られており、該容器ｆ内のイオン化物質ｅをヒ
ータｇで加熱蒸発させてその蒸気ｊをイオン発生室ｃへ
と導き、イオン化手段ｄからの熱電子との衝突によりイ
オン化してイオン引出口ｂからイオンビームｈとして引
き出す。ｉは該容器ｆの温度を測定する熱電対温度計
で、その検出値をもとにヒータｇの出力を制御し、該容
器ｆの温度即ちイオン化物質ｅの温度を一定になるよう
に制御する。(Prior Art) Conventionally, as an ion source of an ion implantation apparatus, for example,
As shown in the drawing, a hollow ion generating chamber c provided with a slit-shaped ion extraction port b in the front is provided in a vacuum ion generating section a, and ionizing means d composed of a filament inserted through the ion generating chamber c is provided. And a container f containing a solid ionized substance e such as P or As is connected to the side of the ion generation chamber c opposite to the ion extraction port b. The ionized substance e in f is heated and evaporated by the heater g, the vapor j is led to the ion generation chamber c, ionized by collision with the thermoelectrons from the ionization means d, and extracted as an ion beam h from the ion extraction port b. . i is a thermocouple thermometer that measures the temperature of the container f, controls the output of the heater g based on the detected value, and controls the temperature of the container f, that is, the temperature of the ionized substance e to be constant. .
（発明が解決しようとする課題） 前記第１図示のようなイオン源では、容器ｆが比較的
高温になるイオン発生室ｃの近傍に取付けられているの
で、該容器ｆはイオン発生室ｃからの輻射熱によって加
熱され、該容器ｆの温度を約300℃以下に下げることが
困難であった。そのため例えば最適蒸発温度が72℃±５
℃のAlCl3や該温度が35℃±５℃のSiI4、225℃±５℃の
LiBF4を該容器ｆに収めると急激に蒸発し、蒸発量のコ
ントロールが出来なくなり、制御されたイオンビームを
得ることが出来ない欠点があった。(Problem to be Solved by the Invention) In the ion source as shown in the first illustration, since the container f is mounted near the ion generating chamber c where the temperature is relatively high, the container f is separated from the ion generating chamber c. And it was difficult to lower the temperature of the container f to about 300 ° C. or less. Therefore, for example, the optimal evaporation temperature is 72 ° C ± 5
℃ of AlCl 3 or SiI 4 of 35 ℃ ± 5 ℃, 225 ℃ ± 5 ℃
When LiBF 4 is placed in the container f, it evaporates rapidly, and it is impossible to control the amount of evaporation, so that a controlled ion beam cannot be obtained.
本発明はこうした困難、欠点を解決し、比較的低温で
蒸発する物質のイオンを得るに適したイオン源を提供す
ることを目的とするものである。An object of the present invention is to solve these difficulties and drawbacks and to provide an ion source suitable for obtaining ions of a substance that evaporates at a relatively low temperature.
（課題を解決するための手段） 本発明では、イオン化手段を備えた中空のイオン発生
室に、固体イオン化物質を収めた容器を接続し、該物質
をヒータにより加熱蒸発させてその蒸気のみをイオン発
生室へと導くようにしたものに於て、該容器をイオン発
生室の外部でイオン発生室からの輻射熱を受けない遠隔
位置に設け、該容器を冷却する冷却手段を設けることに
より、前記目的を達成するようにした。(Means for Solving the Problems) In the present invention, a container containing a solid ionized substance is connected to a hollow ion generating chamber provided with ionizing means, and the substance is heated and evaporated by a heater, and only the vapor is ionized. In the apparatus configured to be guided to the generation chamber, the container is provided outside the ion generation chamber at a remote position not receiving radiant heat from the ion generation chamber, and cooling means for cooling the container is provided, thereby achieving the above object. To achieve.
（作 用） 該容器内に固体イオン化物質を収め、ヒータを作動さ
せると該物質は蒸発し、その蒸気はイオン発生室へ導か
れそこでイオン化手段によりイオン化され、イオンビー
ムとして該容器から引出されることは従来のものと同様
であるが、該容器はイオン化室の輻射熱が及ぼない遠隔
位置に設けられており、冷却手段を備えるので、例えば
室温程度の蒸発温度のSiI4を温度制御し乍ら蒸発させ
得、正確な蒸発量に制御出来る。(Operation) When a solid ionized substance is placed in the container and the heater is operated, the substance evaporates, the vapor is led to the ion generation chamber, where it is ionized by the ionizing means, and is withdrawn from the container as an ion beam. This is the same as the conventional one, except that the container is provided at a remote location where the radiant heat of the ionization chamber does not reach and is provided with cooling means, so that, for example, while controlling the temperature of SiI 4 having an evaporation temperature of about room temperature, It can be evaporated and can be controlled to the exact amount of evaporation.
（実施例） 本発明の実施例を図面第２図に基づき説明するに、同
図に於て、符号（１）は真空のイオン発生部、（２）は
該イオン発生部（１）に設けられた中空のイオン発生室
を示し、該イオン発生室（２）の前方にはスリット状の
イオン引出口（３）が設けられ、該イオン発生室（２）
内を挿通してイオン引出口（３）に沿ったフィラメント
からなるイオン化手段（４）を設けるようにした。
（５）は該イオン発生室（２）の輻射熱が作用しない該
イオン発生室（２）の外部の遠隔位置に設けた固体イオ
ン化物質（６）を収容する容器を示し、図示の例では該
容器（５）をイオン発生部（１）を区画形成する壁板
（７）の外部である大気側に設けてこれより配管（８）
を介してイオン発生室（２）内へ連通するようにした。Embodiment An embodiment of the present invention will be described with reference to FIG. 2. In FIG. 2, reference numeral (1) denotes a vacuum ion generator, and (2) denotes an ion generator provided in the ion generator (1). And a slit-shaped ion extraction port (3) is provided in front of the ion generation chamber (2).
An ionization means (4) composed of a filament extending through the inside and along the ion extraction outlet (3) was provided.
(5) shows a container for containing a solid ionized substance (6) provided at a remote position outside the ion generation chamber (2) to which the radiant heat of the ion generation chamber (2) does not act, and in the illustrated example, the container is used. (5) is provided on the atmosphere side outside the wall plate (7) defining and forming the ion generating section (1), and the pipe (8) is provided therefrom.
Through the ion generating chamber (2).
（９）は該容器（５）内の固体イオン化物質（６）を
加熱蒸発させるヒータ、（10）は該容器（５）の温度を
測定する熱電対温度計で、その測定結果をもとにしてヒ
ータ（９）の出力を制御し、該容器（５）の温度を一定
に制御する。該ヒータ（９）及び温度計（10）は該容器
（５）の周囲を囲む筒形のケース（11）に設けるように
し、該ケース（11）に純水などの冷媒が流通され該容器
（５）を冷却する冷却パイプからなる冷却手段（12）を
取付けした。該冷却手段（12）によって室温程度で蒸発
する固体イオン化物質（６）の蒸発制御や高温化した容
器（５）を短時間で冷却することが可能になる。(9) is a heater for heating and evaporating the solid ionized substance (6) in the container (5), and (10) is a thermocouple thermometer for measuring the temperature of the container (5) based on the measurement result. Thus, the output of the heater (9) is controlled to keep the temperature of the container (5) constant. The heater (9) and the thermometer (10) are provided in a cylindrical case (11) surrounding the periphery of the container (5). A coolant such as pure water flows through the case (11) and the container (5) A cooling means (12) consisting of a cooling pipe for cooling 5) was attached. The cooling means (12) makes it possible to control the evaporation of the solid ionized substance (6) that evaporates at about room temperature and to cool the container (5) at a high temperature in a short time.
その作動を説明するに、容器（５）内に収めた固体イ
オン化物質（６）をヒータ（９）を作動させて蒸発さ
せ、その蒸気が配管（８）を介してイオン発生室（２）
に導かれるとイオン化手段（４）のフィラメントから供
給される熱電子によってイオン化され、イオン引出口
（３）からイオン注入、表面処理等のためにイオンビー
ムとして引出される。該イオン発生室（２）はイオン化
のために比較的高温になりその輻射熱の発散で周囲の器
物の温度が上昇するが、固体イオン化物質（６）を収め
た容器（５）は該イオン発生室（２）から離れた外部の
輻射熱を受けない位置に設けられているので比較的低温
となし得、ヒータ（９）によりイオン発生室（２）の熱
の影響を受けずに低い温度に制御し乍ら該物質（６）を
蒸発させることが出来、例えばAlCl3、LiBF4のイオン化
に好都合であり、室温程度で蒸発するSiI4の場合には冷
却手段（12）に冷媒を流し乍らヒータ（９）を作動させ
蒸発温度を一定に制御することが出来る。In order to explain the operation, the solid ionized substance (6) contained in the container (5) is evaporated by operating the heater (9), and the vapor is transmitted through the pipe (8) to the ion generating chamber (2).
Is ionized by thermionic electrons supplied from the filament of the ionization means (4), and is extracted from the ion outlet (3) as an ion beam for ion implantation, surface treatment and the like. The ion generating chamber (2) is relatively high in temperature due to ionization, and the temperature of surrounding objects rises due to the radiation of the radiant heat. However, the container (5) containing the solid ionized substance (6) is the ion generating chamber. Since it is provided at a position away from (2) and not receiving external radiant heat, the temperature can be relatively low, and the heater (9) controls the temperature to a low temperature without being affected by the heat of the ion generation chamber (2). can evaporate notwithstanding et al substance (6), for example, favors the ionization of AlCl 3, LiBF 4, notwithstanding et heaters in the case of SiI 4 to evaporate at about room temperature to flow a coolant in the cooling means (12) By operating (9), the evaporation temperature can be controlled to be constant.
尚、イオン化手段（４）としてマイクロ波を用いるこ
とも可能である。Incidentally, it is also possible to use a microwave as the ionization means (4).
（発明の効果） 以上のように本発明によるときは、固体イオン化物質
を収めた容器をイオン発生室の外部の輻射熱を受けない
遠隔位置に設けると共に該容器に冷却手段を取付けるよ
うにしたので、比較的低温に制御し乍ら固体イオン化物
質の蒸発を行なえ、従来のもののような急激な蒸発を防
げて制御されたイオンビームが得られ、該容器が高温化
したとき冷却手段により短時間で冷却出来るので、該物
質を容器に補充する時間を短縮し得て運転効率を高める
ことが出来る等の効果がある。(Effect of the Invention) As described above, according to the present invention, a container containing a solid ionized substance is provided at a remote position outside the ion generating chamber that does not receive radiant heat, and a cooling means is attached to the container. The solid ionized substance can be evaporated while controlling it at a relatively low temperature, and a rapid ionization can be prevented as in the prior art, so that a controlled ion beam can be obtained. Therefore, there is an effect that the time for refilling the substance into the container can be shortened, and the operation efficiency can be improved.
第１図は従来例の截断側面図、第２図は本発明の実施例
の截断側面図である。 （２）……イオン発生室 （４）……イオン化手段 （５）……容器 （６）……固体イオン化物質 （９）……ヒータ （12）……冷却手段FIG. 1 is a sectional side view of a conventional example, and FIG. 2 is a sectional side view of an embodiment of the present invention. (2) ... Ion generation chamber (4) ... Ionizing means (5) ... Container (6) ... Solid ionized substance (9) ... Heater (12) ... Cooling means
Claims (1)
に、固体イオン化物質を収めた容器を接続し、該物質を
ヒータにより加熱蒸発させてその蒸気のみをイオン発生
室へと導くようにしたものに於て、該容器をイオン発生
室の外部でイオン発生室からの輻射熱を受けない遠隔位
置に設け、該容器を冷却する冷却手段を設けたことを特
徴とするイオン源。1. A container containing a solid ionized substance is connected to a hollow ion generating chamber provided with ionizing means, and the substance is heated and evaporated by a heater so that only the vapor is led to the ion generating chamber. An ion source, wherein the container is provided outside the ion generation chamber at a remote position not receiving radiant heat from the ion generation chamber, and cooling means for cooling the container is provided.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63075720A JP2729627B2 (en) | 1988-03-29 | 1988-03-29 | Ion source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63075720A JP2729627B2 (en) | 1988-03-29 | 1988-03-29 | Ion source |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01246747A JPH01246747A (en) | 1989-10-02 |
| JP2729627B2 true JP2729627B2 (en) | 1998-03-18 |
Family
ID=13584382
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63075720A Expired - Fee Related JP2729627B2 (en) | 1988-03-29 | 1988-03-29 | Ion source |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2729627B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03134161A (en) * | 1989-10-17 | 1991-06-07 | Japan Steel Works Ltd:The | Method and apparatus for producing compound |
| JPH03134160A (en) * | 1989-10-17 | 1991-06-07 | Japan Steel Works Ltd:The | Method and apparatus for producing compound |
| US7791047B2 (en) * | 2003-12-12 | 2010-09-07 | Semequip, Inc. | Method and apparatus for extracting ions from an ion source for use in ion implantation |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6370649U (en) * | 1986-10-27 | 1988-05-12 | ||
| JPS6410946U (en) * | 1987-07-09 | 1989-01-20 |
-
1988
- 1988-03-29 JP JP63075720A patent/JP2729627B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01246747A (en) | 1989-10-02 |
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