JP2733604B2 - Piezoelectric vibrator - Google Patents
Piezoelectric vibratorInfo
- Publication number
- JP2733604B2 JP2733604B2 JP63149459A JP14945988A JP2733604B2 JP 2733604 B2 JP2733604 B2 JP 2733604B2 JP 63149459 A JP63149459 A JP 63149459A JP 14945988 A JP14945988 A JP 14945988A JP 2733604 B2 JP2733604 B2 JP 2733604B2
- Authority
- JP
- Japan
- Prior art keywords
- width
- vibration
- extraction electrode
- auxiliary path
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明は圧電振動子を利用分野とし、特に導波路を用
いて副振動を小さくするとともに共振領域部の等価定数
の変化を防止した圧電振動子に関する。DETAILED DESCRIPTION OF THE INVENTION (Industrial application field) The present invention relates to a field of application of a piezoelectric vibrator. In particular, the present invention relates to a piezoelectric vibrator in which a sub-vibration is reduced using a waveguide and a change in an equivalent constant of a resonance region portion is prevented. About the child.
（発明の背景） 圧電振動子は特に厚みすべり振動姿態の水晶振動子は
共振先鋭度に優れることから例えば通信機器用の発振器
あるいはフイルタ素子等として有用される、近年では、
通信量の増大等により雑音等の少なく高品位の情報を得
ることのできる圧電振動子が望まれている。本出願人は
このような事情に基づき、「特願昭62−119249号、圧電
振動子」及び「特願昭63−64115号、多重モード型圧電
振動子」にて副振動の振動レベルを低減する新規な技術
思想を提案した。すなわち、厚みすべり振動の主振動に
対して相対的に発生する副振動を導波路により共振領域
外に伝播させて振動吸収材により吸収減衰し、その振動
レベルを相対的に小さくする技術思想である。(Background of the Invention) A piezoelectric vibrator is particularly useful as an oscillator or a filter element for communication equipment, for example, because a quartz vibrator in a thickness shear vibration mode is excellent in resonance sharpness.
There is a demand for a piezoelectric vibrator that can obtain high-quality information with little noise or the like due to an increase in the amount of communication or the like. Based on such circumstances, the present applicant has reduced the vibration level of the sub-vibration with “Japanese Patent Application No. 62-119249, piezoelectric vibrator” and “Japanese Patent Application No. 63-64115, multi-mode piezoelectric vibrator”. To propose a new technical idea. In other words, it is a technical idea that a sub-vibration generated relatively to the main vibration of the thickness shear vibration is propagated outside the resonance region by the waveguide and is absorbed and attenuated by the vibration absorbing material, thereby relatively reducing the vibration level. .
（従来技術） 第６図は厚みすべり振動及び上記技術思想の基本を説
明する水晶振動子の平面図である。(Prior Art) FIG. 6 is a plan view of a crystal resonator for explaining the thickness-shear vibration and the basics of the above technical idea.
水晶振動子は例えばATカットで切断された円板状の水
晶片１からなる。水晶片１には両主面間で対向する幅ｗ
の励振電極対２（ａ、ｂ）を形成する。励振電極対２か
らはｚ′軸方向の両端外周部に幅ｄの引き出し電極３
（ａ、ｂ）を形成する。The crystal unit is composed of a disk-shaped crystal piece 1 cut by, for example, an AT cut. The quartz piece 1 has a width w opposed between both main surfaces.
Is formed as the excitation electrode pair 2 (a, b). From the pair of excitation electrodes 2, a lead-out electrode 3 having a width d
(A, b) are formed.
このようなものでは、対向する励振電極対２間部分を
特に共振領域部４として厚みすべり振動が励起される。
厚みすべり振動には種々の振動モードが存在し、例えば
モード記号（ｙ、ｘ、ｚ）で示される。モード記号
（ｙ、ｘ、ｚ）中、ｙは厚み（ｙ′軸）方向の半波長の
数（即ち、オーバトーンの次数）を、ｘ、ｚは共振領域
内におけるｘ、ｚ′軸方向の振動の腹（山及び谷）の数
を示す。In such a case, the thickness shear vibration is excited by setting the portion between the opposed excitation electrode pairs 2 as the resonance region 4 in particular.
There are various vibration modes in the thickness shear vibration, for example, indicated by mode symbols (y, x, z). In the mode symbols (y, x, z), y represents the number of half-wavelengths in the thickness (y'-axis) direction (ie, the order of the overtone), and x and z represent x- and z-axis directions in the resonance region. The number of antinodes (peaks and valleys) of vibration is shown.
ここで、水晶片１、共振領域部４、引き出し電極部分
５の遮断周波数をf1、f2、f3とすると、共振領域部４の
閉じ込め領域ΔF1は遮断周波数f1からf2までの間とな
る。したがって、共振領域部４には閉じ込め領域ΔF1内
にある振動モードが主振動f0及び副振動fpとして励起さ
れる。なお、主振動f0は遮断周波数f2に略一致して励起
される。そして、一般には主振動f0を（ｙ、１、１）モ
ードとし、副振動fpをモード記号のｘ、ｚを複数とした
例えば（ｙ、１、３）、（ｙ、３、１）モードとして励
起される。Here, the crystal piece 1, the resonance region portion 4 and the cutoff frequency of the lead electrode portion 5 and f 1, f 2, f 3, the region [Delta] F 1 confinement of the resonance region portion 4 from the cut-off frequencies f 1 to f 2 Between. Therefore, the vibration mode in the region [Delta] F 1 confined in the resonance region 4 is excited as the primary vibration f 0 and auxiliary vibration f p. The main vibration f 0 is substantially coincident with the excitation to the cutoff frequency f 2. Then, generally the primary vibration f 0 is the (y, 1, 1) mode and then, x of secondary vibration f p mode symbols to, for example, a plurality of z (y, 1,3), ( y, 3,1) Excited as a mode.
一方、引き出し電極部分５の閉じ込め領域ΔF2を想定
すると、その閉じ込め領域ΔＦ2は遮断周波数f1からf3
までの間となる。したがって閉じ込め領域ΔF2にある振
動モード（副振動fp）であって、伝播方向を引き出し電
極と同一方向とする振動モードの振動エネルギーは、共
振領域部からその方向に伝播する。この場合には、ｚ′
軸方向に伝播する例えば（ｙ、３、１）モードが相当す
る（第７図の周波数配列参照）。On the other hand, assuming a confinement region ΔF 2 of the extraction electrode portion 5, the confinement region ΔF 2 is between the cut-off frequencies f 1 and f 3
Until. Accordingly, the vibration energy of the vibration mode (sub-vibration f p ) in the confinement region ΔF 2 and the propagation direction of which is the same as that of the extraction electrode propagates from the resonance region to that direction. In this case, z '
For example, the (y, 3, 1) mode propagating in the axial direction corresponds to the mode (see the frequency arrangement in FIG. 7).
このようなことから、引き出し電極部分５を副振動fp
の導波路として共振領域部４外に導くことができ、更に
引き出し電極部分５の例えば延出端端部に図示しない導
電性接着剤等を施すことにより、これを振動吸収材とし
て副振動はfpの振動エネルギーを吸収減衰できる。そし
て、引き出し電極３（引き出し電極部分５）の幅ｄお励
振電極対２（共振領域部４）の中心と一致させて0.5w以
上とすると、振動エネルギーの最大変位部分を伝播する
ことになるので導波路としての機能を充分に発揮でき
る。For this reason, the extraction electrode portion 5 is moved to the secondary vibration f p
By applying a conductive adhesive (not shown) to the extension end of the extraction electrode portion 5, for example, as a vibration absorbing material, the sub-vibration is f Absorb and attenuate the vibration energy of p . If the width d of the extraction electrode 3 (extraction electrode portion 5) is set to 0.5 w or more so as to coincide with the center of the excitation electrode pair 2 (resonance region portion 4), the maximum displacement portion of the vibration energy is propagated. The function as a waveguide can be sufficiently exhibited.
（従来技術の問題点） しかしながら、上記における副振動fpの抑圧手段で
は、引き出し電極３の幅ｄを励振電極２の幅ｗに対し0.
5w以上とする。したがって、励振電極対２の対向面積で
決定される等価定数例えば電極間容量やインダクタンス
に与える影響が大きい。なお、通常では、引き出し電極
３の幅は0.3w以下とするので、励振電極対２の対向面積
に起因する等価定数への影響は少ない。このようなこと
から引き出し電極３の幅ｄを0.5w以上とした場合には、
その幅ｄを考慮した設計が求められる。しかし、実際に
はこれらを考慮した設計は困難であり、このような場合
生産性を低下させる。(Problems in the conventional technology), however, the suppression means of the secondary vibration f p in the above, the width d of the extraction electrode 3 with respect to the width w of the excitation electrodes 2 0.
5w or more. Therefore, the effect on the equivalent constant determined by the facing area of the excitation electrode pair 2, for example, the capacitance between electrodes and the inductance is large. Normally, the width of the extraction electrode 3 is set to 0.3 w or less, so that the influence on the equivalent constant caused by the facing area of the excitation electrode pair 2 is small. Therefore, when the width d of the extraction electrode 3 is set to 0.5 w or more,
A design considering the width d is required. However, it is actually difficult to design in consideration of these, and in such a case, the productivity is reduced.
本発明者等は、この点につき、次の手段を提案してい
る「前述の特願昭63−64115号参照」。すなわち、第８
図に示したように、励振電極対２からの引き出し電極３
の延出始端部にギャップＧのスリット６を設けて括れを
形成し、引き出し電極３の励振電極対間面積による等価
定数への影響を少なくする方法である。しかし、このよ
うな方法では、ギャップＧが大きいと導波路としの機能
を防げ、又小さいと励振電極対間面積に影響を及ぼすの
で、その調整を困難にする欠点があった。Regarding this point, the present inventors have proposed the following means (see the aforementioned Japanese Patent Application No. 63-64115). That is, the eighth
As shown in the figure, the extraction electrode 3 from the excitation electrode pair 2
In this method, the slit 6 of the gap G is provided at the extension start end to form a constriction to reduce the influence on the equivalent constant due to the area between the pair of excitation electrodes of the extraction electrode 3. However, such a method has a drawback that when the gap G is large, the function as a waveguide can be prevented, and when the gap G is small, the area between the pair of excitation electrodes is affected.
（発明の目的） 本発明は、導波路により副振動の振動レベルを低減し
て、しかも励振電極対による回路定数の変化を防止した
圧電振動子を提供することを目的とする。(Object of the Invention) It is an object of the present invention to provide a piezoelectric vibrator in which a vibration level of a sub-vibration is reduced by a waveguide, and a change in a circuit constant by a pair of excitation electrodes is prevented.
（解決手段） 本発明は、共振領域部から副振動を伝播する方向に励
振電極とは電気的に独立した補助路を形成し、前記共振
領域部の幅をｗ、前記励振電極と接続する引き出し電極
の幅をａ、前記補助路の幅をｂとしたとき、前記引き出
し電極の幅ａと0.5w以下にするとともに、前記共振領域
部の幅内にある引き出し電極と補助路との幅の和ａ＋ｂ
を0.5wより大きくしたことを解決手段とする。(Solution) The present invention forms an auxiliary path that is electrically independent of an excitation electrode in a direction in which sub-vibration propagates from a resonance region, and has a width w of the resonance region and a drawer connected to the excitation electrode. When the width of the electrode is a and the width of the auxiliary path is b, the width a of the extraction electrode is set to 0.5 w or less and the sum of the width of the extraction electrode and the width of the auxiliary path within the width of the resonance region portion. a + b
Is set to be larger than 0.5 w.
（発明の作用） 本発明は励振電極の幅ｗに対して引き出し電極の幅ａ
を0.5w以下としたので、励振電極対の対向面積に与える
電気的影響を少なくする。(Effect of the Invention) The present invention relates to the width a of the extraction electrode with respect to the width w of the excitation electrode.
Is set to 0.5 w or less, the electric influence on the facing area of the excitation electrode pair is reduced.
また、引き出し電極に電気的に独立した補助路を並設
して、かつ引き出し電極と補助路との幅ａ、ｂの和ａ＋
ｂを0.5w以上として導波路を形成したので、共振領域部
内に励起して伝播方向を導波路の延出方向と同じにする
副振動の最大変位部分を伝播する。以下、本発明の実施
例を説明する。In addition, auxiliary paths electrically independent of each other are arranged in parallel with the extraction electrode, and the sum of the widths a and b of the extraction electrode and the auxiliary path is a +
Since the waveguide is formed with b being equal to or greater than 0.5 w, it is excited in the resonance region and propagates the maximum displacement portion of the sub-vibration that makes the propagation direction the same as the extension direction of the waveguide. Hereinafter, embodiments of the present invention will be described.
（実施例） 第１図は本発明の一実施例を説明する水晶振動子の平
面図である。なお、前実施例と同一部分については同番
号を付与して説明する。水晶振動子は前述したように例
えばATカットで円板状の水晶片に、共振領域部４を形成
する直径ｗの励振電極対２（ａ、ｂ）を設ける。励振電
極対２からはｚ′軸方向の両端外周部に引き出し電極３
（ａ、）を形成する。このとき、引き出し電極３と励振
電極対２の中心は一致し、引き出し電極３の幅ａは0.5w
以下に設定する。引き出し電極３の両側にはその延出方
向に沿って等しい幅ｂの補助路７が形成される。補助路
７の幅ｂは引き出し電極３の幅ａとの和ａ＋2bが0.5wよ
り大きく設定される。そして、励振電極対２及び引き出
し電極３とは間隙をもって両者とは電気的に独立する。
そして、補助路７自信もその延出方向に電気的に独立し
た例えば二つに分断される（それぞれを分割補助路7a、
7bとする）。なお、補助路７は例えば引き出し電極３と
同一金属からなり蒸着等により形成される。(Embodiment) FIG. 1 is a plan view of a crystal unit for explaining an embodiment of the present invention. The same parts as those in the previous embodiment will be described with the same reference numerals. As described above, the quartz resonator is provided with a pair of excitation electrodes 2 (a, b) having a diameter w and forming the resonance region 4 on a disk-shaped quartz piece, for example, by AT cutting. From the excitation electrode pair 2, extraction electrodes 3 are provided at the outer peripheral portions at both ends in the z′-axis direction.
(A,) is formed. At this time, the center of the extraction electrode 3 and the center of the excitation electrode pair 2 coincide, and the width a of the extraction electrode 3 is 0.5 w
Set as follows. On both sides of the extraction electrode 3, auxiliary paths 7 having the same width b are formed along the extension direction. The width a of the auxiliary path 7 and the sum a + 2b of the width a of the extraction electrode 3 are set to be larger than 0.5 w. The excitation electrode pair 2 and the extraction electrode 3 are electrically independent from each other with a gap.
Then, the auxiliary path 7 itself is also divided into, for example, two electrically independent in the extending direction (each divided into auxiliary auxiliary paths 7a,
7b). The auxiliary path 7 is made of, for example, the same metal as the extraction electrode 3 and is formed by vapor deposition or the like.
そして、引き出し電極３と補助路７を形成した水晶片
の遮断周波数を、ｚ軸方向に伝播する副振動（ｙ、３、
１）モードの周波数より低くて主振動（ｙ、１、１）モ
ードより高い領域に設定する。引き出し電極３及び補助
路７の延出した外周両端部には図示しない導電性接着剤
が施される。そして、図示しない保持具と引き出し電極
３とを電気的・機械的に接続する構成とする。Then, the cut-off frequency of the crystal piece on which the extraction electrode 3 and the auxiliary path 7 are formed is set to a sub-vibration (y, 3,.
1) Set to a region lower than the mode frequency and higher than the main vibration (y, 1, 1) mode. A conductive adhesive (not shown) is applied to both ends of the extended outer periphery of the extraction electrode 3 and the auxiliary path 7. Then, a configuration is adopted in which a holder (not shown) and the extraction electrode 3 are electrically and mechanically connected.
したがって、このようなものでは、引き出し電極３と
補助路７とにより導波路が形成される。そして導波路の
幅（ａ＋2b）を0.5w以上とするので、前述したように導
波路としての機能を充分に発揮する。すなわち、副振動
fpここでは例えば（ｙ、３、１）モードを外周へ伝播
し、導電性接着剤を振動吸収材として減衰吸収する。Therefore, in such a structure, a waveguide is formed by the extraction electrode 3 and the auxiliary path 7. Since the width (a + 2b) of the waveguide is set to 0.5 w or more, the function as the waveguide is sufficiently exhibited as described above. That is, the secondary vibration
f p Here, for example (y, 3, 1) mode propagation to the outer periphery, attenuated absorbed as vibration absorbers conductive adhesive.
そして、補助路７を分割して電気的に独立して形成し
たので、両端外周部に導電性接着剤を施して引き出し電
極３と外周側の分割補助路7bとが電気的に短絡しても、
励振電極対２側の分割補助路7aは励振電極対２に対して
電気的な独立を維持する。したがって、励振電極対間の
対向面積による等価定数に影響を及ぼすのは特に引き出
し電極３のみとなる。そして、本実施例では引き出し電
極３の幅ａを励振電極対２に対して0.5w以下としたの
で、励振電極対２間の対向面積による等価定数への影響
を少なくして設計時の回路定数の変化を防止できる。ま
た、このようなことから、補助路7aを励振電極対２に充
分に近接させることができ、導波路としての機能を損な
うことがない。Since the auxiliary path 7 is divided and formed independently electrically, a conductive adhesive is applied to the outer peripheral portions of both ends, so that even if the extraction electrode 3 and the divided auxiliary path 7b on the outer peripheral side are electrically short-circuited. ,
The split auxiliary path 7a on the side of the excitation electrode pair 2 maintains electrical independence from the excitation electrode pair 2. Therefore, only the extraction electrode 3 affects the equivalent constant due to the facing area between the pair of excitation electrodes. In this embodiment, since the width a of the extraction electrode 3 is set to 0.5 w or less with respect to the excitation electrode pair 2, the influence of the facing area between the excitation electrode pair 2 on the equivalent constant is reduced to reduce the circuit constant at the time of design. Changes can be prevented. In addition, because of this, the auxiliary path 7a can be brought sufficiently close to the excitation electrode pair 2 without impairing the function as a waveguide.
なお、本実施例では引き出し電極３の両側に設けた補
助路７の幅ｂは等しいとしたが、必ずしも同一である必
要はない。また、引き出し電極３と外周側の分割電極7b
とは電気的に接続してもよいことは勿論である。In the present embodiment, the widths b of the auxiliary paths 7 provided on both sides of the extraction electrode 3 are assumed to be equal, but need not necessarily be the same. Also, the extraction electrode 3 and the outer peripheral side divided electrode 7b
It is needless to say that may be electrically connected.
（他の実施例） 第２図は本発明の他の実施例を説明する水晶振動子の
平面図である。なお、前実施例と同一部分には同番号を
付与してその説明を省略する。この実施例では、幅ｗの
励振電極対２のそれぞれ反対側の一端側から、幅ａを0.
5w以下とした引き出し電極３を延出する。補助路８は分
割補助路8a、8bからなり、引き出し電極３に沿ったｚ′
軸方向にその幅をｂとして延出する。そして、励振電極
対２の幅ｗ内にある、引き出し電極３と補助路８との幅
の和ａ＋ｂを0.5w以上とし、この部分の遮断周波数をｚ
軸方向に伝播する副振動の周波数より低くて主振動より
高い領域に設定する。(Other Embodiment) FIG. 2 is a plan view of a crystal unit for explaining another embodiment of the present invention. The same parts as those in the previous embodiment are denoted by the same reference numerals and description thereof will be omitted. In this embodiment, the width a is set to 0.1 from the one end on the opposite side of the excitation electrode pair 2 having the width w.
The extraction electrode 3 of 5 w or less is extended. The auxiliary path 8 includes divided auxiliary paths 8a and 8b, and z 'along the extraction electrode 3.
It extends in the axial direction with its width being b. The sum a + b of the width between the extraction electrode 3 and the auxiliary path 8 within the width w of the excitation electrode pair 2 is set to 0.5 w or more, and the cutoff frequency of this part is set to z.
The frequency is set to be lower than the frequency of the sub-vibration propagating in the axial direction and higher than the main vibration.
したがって、この実施例においても、前実施例と同様
に、分割補助路8aを励振電極対２に充分に近接させて両
端外周部に保持及び振動吸収材としての導電性接着剤を
施し、分割補助路8bと引き出し電極３とが電気的に短絡
したとしても、励振電極間の対向面積に及ぼす影響を少
なくして等価定数の変化を防止する。そして、引き出し
電極３と補助路８の部分を導波路としてその機能を充分
に発揮する。Therefore, also in this embodiment, similarly to the previous embodiment, the auxiliary dividing path 8a is sufficiently brought close to the excitation electrode pair 2 and the outer peripheral portions at both ends are held and a conductive adhesive as a vibration absorbing material is applied to the auxiliary auxiliary path 8a. Even if the path 8b and the extraction electrode 3 are electrically short-circuited, the effect on the opposing area between the excitation electrodes is reduced to prevent a change in the equivalent constant. Then, the portion of the extraction electrode 3 and the auxiliary path 8 is used as a waveguide to sufficiently exhibit its function.
なお、この実施例においては、補助路８の部分の遮断
周波数のみを副振動の周波数より低くて主振動より高い
領域に設定し、励振電極対の幅ｗ内における補助路８の
幅ｂを0.5w以上として引き出し電極に拘らず導波路とし
てもよいことは勿論である。In this embodiment, only the cutoff frequency of the auxiliary path 8 is set to a region lower than the frequency of the auxiliary vibration and higher than the main vibration, and the width b of the auxiliary path 8 within the width w of the excitation electrode pair is set to 0.5. It goes without saying that a waveguide may be used regardless of the extraction electrode as w or more.
（他の実施例） 第３図は本発明の他の実施例を説明する水晶振動子の
平面図である。(Other Embodiment) FIG. 3 is a plan view of a crystal unit for explaining another embodiment of the present invention.
この実施例では、幅ｗの励振電極対２からｚ′軸方向
に0.5w以上の分割補助路9a、9bからなる補助路９を延出
する。そして、その部分の遮断周波数を副振動より低く
て、主振動より高い領域に設定する。補助路９（9b）の
延出端部には振動吸収材としての図示しない導電性接着
材を施す、引き出し電極３はその幅を0.5w以下として、
補助路９とは異なる方向の、ｚ′軸から応力感度特性の
良好な例えば30度傾いた方向に延出する。そして、引き
出し電極の延出端部に図示しない導電性接着剤を施して
保持具と電気的・機械的に接続する。In this embodiment, an auxiliary path 9 composed of divided auxiliary paths 9a and 9b of 0.5 w or more extends from the excitation electrode pair 2 having a width w in the z'-axis direction. Then, the cutoff frequency of that portion is set lower than the sub vibration and higher than the main vibration. A conductive adhesive (not shown) as a vibration absorbing material is applied to the extension end of the auxiliary path 9 (9b).
It extends in a direction different from the auxiliary path 9 and in a direction inclined from the z ′ axis at a good stress sensitivity characteristic, for example, 30 degrees. Then, a conductive adhesive (not shown) is applied to the extension end of the extraction electrode, and the extension is electrically and mechanically connected to the holder.
したがって、この実施例でも同様に、分割補助路9aを
励振電極対２に充分に近接させても、仮に分割補助路8b
と引き出し電極３とが電気的に短絡したとしても、励振
電極間の対向面積に及ぼす影響を少なくして等価定数の
変化を防止し、補助路９の部分を導波路としてその機能
を充分に発揮する。そして、引き出し電極を応力感度特
性の良好な方向に延出して保持したので、衝撃特性等を
良好にする。Therefore, in this embodiment, similarly, even if the auxiliary division path 9a is brought sufficiently close to the excitation electrode pair 2, the auxiliary division path 8b
Even if the extraction electrode 3 is electrically short-circuited, the effect on the opposing area between the excitation electrodes is reduced to prevent a change in the equivalent constant, and the auxiliary path 9 is used as a waveguide to fully exhibit its function. I do. Since the extraction electrode is extended and held in the direction in which the stress sensitivity characteristics are good, the impact characteristics and the like are improved.
なお、この実施例においては、例えば第４図に示した
ように、引き出し電極３と外周側の分割補助路とは電気
的に接続してもよい。但し、引き出し電極３の励振電極
対２からの延出始端部は充分な間隔をとる必要がある。
また、このときの引き出し電極部分の遮断周波数は特に
問題とする必要はない。In this embodiment, for example, as shown in FIG. 4, the extraction electrode 3 may be electrically connected to the auxiliary divisional path on the outer peripheral side. However, it is necessary that the leading end of the extraction electrode 3 extending from the excitation electrode pair 2 be sufficiently spaced.
At this time, the cut-off frequency of the extraction electrode portion does not need to be a particular problem.
（他の事項） なお、上記の各実施例では補助路を分割補助路として
説明したが、本発明では例えば引き出し電極の延出分に
は導電性接着剤を用いて保持具と接続し、補助路には絶
縁性の振動吸収材を設けても同様な効果をもたらすの
で、必ずしも分割補助路とする必要はない。また、補助
路は二つに分割したが、三つ以上の複数に分割されてい
てもよいことは勿論である。また、補助路は例えば引き
出し電極と同じ金属としたが、絶縁材から形成して電気
的にのみ独立させてもよい。副振動はｚ′軸方向に伝播
する例えば（ｙ、３、１）モードとしたが、ｘ軸方向に
伝播する副振動例えば（ｙ、１、３）を抑圧する場合
に、ｘ軸方向へも本発明による導波路を形成して振動吸
収材を設ければよい。(Other Matters) In each of the above-described embodiments, the auxiliary path is described as a divided auxiliary path. However, in the present invention, for example, the extension of the extraction electrode is connected to the holder using a conductive adhesive to form the auxiliary path. A similar effect can be obtained even if an insulating vibration absorbing material is provided on the road, so that it is not always necessary to use the split auxiliary road. Further, although the auxiliary path is divided into two, it is needless to say that the auxiliary path may be divided into a plurality of three or more. Further, the auxiliary path is made of the same metal as the lead electrode, for example, but may be formed of an insulating material and made electrically independent only. The sub-vibration is, for example, (y, 3, 1) mode propagating in the z'-axis direction. However, when suppressing the sub-vibration propagating in the x-axis direction, for example, (y, 1, 3), the sub-vibration is also applied in the x-axis direction. What is necessary is just to form the waveguide by this invention and to provide a vibration absorber.
また、圧電振動子は一組の対向する励振電極の設けら
れた水晶振動子としたが、例えば第５図に示したよう
に、水晶片１の一方の主面に分割電極10（ａ、ｂ）を、
他方の主面に共通電極11を設けた所謂MCF（Monolithie
Crystal Filter）にも適用できる。例えば、一方の主面
の分割電極10からそれぞれｚ′軸方向に引き出し電極12
（ａ、ｂ）を、共通電極11からｘ軸方向の両端外周部に
引き出し電極14（ａ、ｂ）を延出する。そして、各引き
出し電極12、14の両側に分割補助路13（ａ、ｂ）、15
（ａ、ｂ）からなる補助路13、15を設ける。そして、各
引き出し電極12、14の幅a1、a2を共通電極11のｘ、ｚ′
軸方向の各幅w1，w2に対して0.5w1、0.5w2以下にする。
共通電極の各幅w1，w2内にある各補助路13、15の共通電
極幅b1内にあるb1、b2を、a1＋2b1＞0.5w1、a2＋2b2＞
0.5w2となるようにする。そして、引き出し電極12（1
4）と補助路13（15）との部分の遮断周波数を振動より
低くて主振動より高い領域に設定すればよい。なお、こ
の場合においても、他の実施例で説明したような種々の
態用にを取り得ることはいうまでもなく、その他複数の
電極対とした多電極対型にも適用でき、場合に応じて自
在に変更可能である。Although the piezoelectric vibrator is a crystal vibrator provided with a pair of opposed excitation electrodes, for example, as shown in FIG. 5, a divided electrode 10 (a, b) is formed on one main surface of the crystal blank 1. ),
A so-called MCF (Monolithie) in which a common electrode 11 is provided on the other main surface.
Crystal Filter). For example, a lead electrode 12 is arranged in the z′-axis direction from the split electrode 10 on one main surface.
The electrodes (a, b) are extended from the common electrode 11 to the outer peripheral portions at both ends in the x-axis direction. Then, divided auxiliary paths 13 (a, b), 15 are provided on both sides of each of the extraction electrodes 12, 14.
Auxiliary paths 13 and 15 composed of (a, b) are provided. The widths a 1 and a 2 of the extraction electrodes 12 and 14 are defined as x and z ′ of the common electrode 11.
The width is set to 0.5 w 1 , 0.5 w 2 or less for each width w 1 , w 2 in the axial direction.
The b 1, b 2 in the common electrode width b 1 of each auxiliary channel 13 and 15 in the widths w 1, w 2 of the common electrode, a 1 + 2b 1> 0.5w 1, a 2 + 2b 2>
Made to be 0.5w 2. Then, the extraction electrode 12 (1
The cutoff frequency of the portion between 4) and the auxiliary path 13 (15) may be set to a region lower than the vibration and higher than the main vibration. In this case, it is needless to say that various modes as described in the other embodiments can be adopted, and the present invention can be applied to a multi-electrode pair type having a plurality of other electrode pairs. Can be changed freely.
（発明の効果） 本発明は、共振領域部から副振動を伝播する方向に励
振電極とは電気的に独立した補助路を形成し、前記共振
領域部の幅をｗ、前記励振電極と接続する引き出し電極
の幅をａ、前記補助路の幅をｂとしたとき、前記引き出
し電極の幅ａを0.5w以下にするとともに、前記共振領域
部の幅内にある引き出し電極と補助路との幅の和ａ＋ｂ
を0.5wより大きくしたので、導波路により副振動の振動
レベルを低減して、しかも励振電極対による回路定数の
変化を防止した圧電振動子を提供できる。(Effects of the Invention) The present invention forms an auxiliary path that is electrically independent of the excitation electrode in the direction in which the sub-vibration propagates from the resonance region, and connects the resonance region to the excitation electrode by setting the width of the resonance region to w. When the width of the extraction electrode is a and the width of the auxiliary path is b, the width a of the extraction electrode is set to 0.5 w or less, and the width of the extraction electrode and the auxiliary path within the width of the resonance region portion. Sum a + b
Is set larger than 0.5 w, it is possible to provide a piezoelectric vibrator in which the vibration level of the sub-vibration is reduced by the waveguide and the change of the circuit constant by the excitation electrode pair is prevented.
第１図は本発明の一実施例を説明する水晶振動子の平面
図である。第２図乃至第５図は本発明の他の実施例を説
明する水晶振動子の平面図である。 第６図及び第８図は本出願人がすでに提案した技術思想
を説明する水晶振動子の平面図、第７図は第６図の水晶
振動子を説明する周波数配列図である。 １…水晶片、２…励振電極対、３…引き出し電極、４…
共振領域部、５、12、14…引き出し電極部、６…スリッ
ト、７、８、９、13、15…補助路、10…分割電極、11…
共通電極．FIG. 1 is a plan view of a crystal unit for explaining an embodiment of the present invention. 2 to 5 are plan views of a crystal unit for explaining another embodiment of the present invention. 6 and 8 are plan views of a quartz oscillator for explaining the technical idea proposed by the present applicant, and FIG. 7 is a frequency arrangement diagram for explaining the quartz oscillator of FIG. Reference numeral 1 denotes a crystal blank, 2 denotes a pair of excitation electrodes, 3 denotes a lead electrode, 4 ...
Resonance region part, 5, 12, 14 ... extraction electrode part, 6 ... slit, 7, 8, 9, 13, 15 ... auxiliary path, 10 ... divided electrode, 11 ...
Common electrode.
Claims (4)
の励振電極対を形成して厚みすべり振動の励起される共
振領域部と、該共振領域部から副振動を伝播する導波路
を延出した圧電振動子において、前記導波路は副振動の
伝播する方向に形成される前記励振電極の引き出し電極
と該引き出し電極の延出方向に沿って並設されて電気的
に独立した補助路とからなり、前記共振領域部の幅を
ｗ、引き出し電極の幅をａ、補助路の幅をｂとしたと
き、前記引き出し電極の幅ａを0.5w以下にするととも
に、前記共振領域部の幅内にある引き出し電極と補助路
との幅の和ａ＋ｂを0.5wより大きくしたことを特徴とす
る圧電振動子。An at least one pair of excitation electrodes facing both main surfaces of a piezoelectric piece are formed to form a resonance region where thickness shear vibration is excited, and a waveguide that propagates sub-vibration from the resonance region. In the extended piezoelectric vibrator, the waveguide is formed in the direction in which the sub-vibration propagates, and the extraction electrode of the excitation electrode and the auxiliary path which is juxtaposed along the extension direction of the extraction electrode to be electrically independent. When the width of the resonance region is w, the width of the extraction electrode is a, and the width of the auxiliary path is b, the width a of the extraction electrode is 0.5w or less and the width of the resonance region is A piezoelectric vibrator characterized in that the sum a + b of the widths of the extraction electrode and the auxiliary path inside is larger than 0.5 w.
の励振電極対を形成して厚みすべり振動の励起される共
振領域部とし、該共振領域部から副振動を伝播する導波
路を延出した圧電振動子において、前記導波路は副振動
の伝播する方向に形成されて前記励振電極と電気的に独
立した補助路からなり、前記共振領域部の幅をｗ、前記
励振電極から前記補助路とは異なる方向へ延出した引き
出し電極の幅をａ、前記補助路の幅をｂとしたとき、前
記引き出し電極の幅ａを0.5w以下とし、前記補助路の幅
ｂを0.5wより大きくしたことを特徴とする圧電振動子。2. A resonance region where thickness shear vibration is excited by forming at least one pair of excitation electrodes facing both main surfaces of a piezoelectric piece, and a waveguide that propagates sub-vibration from the resonance region. In the extended piezoelectric vibrator, the waveguide is formed in an auxiliary path that is formed in a direction in which the sub-vibration propagates and is electrically independent from the excitation electrode. When the width of the extraction electrode extending in a direction different from the auxiliary path is a and the width of the auxiliary path is b, the width a of the extraction electrode is 0.5 w or less, and the width b of the auxiliary path is 0.5 w or more. A piezoelectric vibrator characterized by being enlarged.
囲第１項又は第２項記載の圧電振動子。3. The piezoelectric vibrator according to claim 1, wherein said auxiliary path is made of a metal film.
求の範囲第１項又は第２項記載の圧電振動子。4. The piezoelectric vibrator according to claim 1, wherein said metal film is divided in an extending direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63149459A JP2733604B2 (en) | 1988-06-17 | 1988-06-17 | Piezoelectric vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63149459A JP2733604B2 (en) | 1988-06-17 | 1988-06-17 | Piezoelectric vibrator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01317013A JPH01317013A (en) | 1989-12-21 |
| JP2733604B2 true JP2733604B2 (en) | 1998-03-30 |
Family
ID=15475585
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63149459A Expired - Fee Related JP2733604B2 (en) | 1988-06-17 | 1988-06-17 | Piezoelectric vibrator |
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| Country | Link |
|---|---|
| JP (1) | JP2733604B2 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4806929B2 (en) * | 2004-12-15 | 2011-11-02 | Ｔｄｋ株式会社 | Manufacturing method of multilayer piezoelectric element |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4481488A (en) * | 1982-11-08 | 1984-11-06 | Motorola, Inc. | Trapped energy resonator for oscillator and multiple resonator applications |
| JPS62142410A (en) * | 1985-12-17 | 1987-06-25 | Toyo Commun Equip Co Ltd | Electrode structure of spurious suppressing type piezoelectric vibrator and monolithic piezoelectric element filter |
| JPS62159015U (en) * | 1986-03-31 | 1987-10-08 |
-
1988
- 1988-06-17 JP JP63149459A patent/JP2733604B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01317013A (en) | 1989-12-21 |
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