JP2733780B2 - Rod seal in sealing processing equipment - Google Patents
Rod seal in sealing processing equipmentInfo
- Publication number
- JP2733780B2 JP2733780B2 JP1028928A JP2892889A JP2733780B2 JP 2733780 B2 JP2733780 B2 JP 2733780B2 JP 1028928 A JP1028928 A JP 1028928A JP 2892889 A JP2892889 A JP 2892889A JP 2733780 B2 JP2733780 B2 JP 2733780B2
- Authority
- JP
- Japan
- Prior art keywords
- bellows
- pressure
- space
- rod
- rod seal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000007789 sealing Methods 0.000 title claims description 7
- 238000004108 freeze drying Methods 0.000 claims 1
- 238000001035 drying Methods 0.000 description 16
- 238000001291 vacuum drying Methods 0.000 description 9
- 241000894006 Bacteria Species 0.000 description 5
- 238000011109 contamination Methods 0.000 description 3
- 230000009545 invasion Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 244000052616 bacterial pathogen Species 0.000 description 2
- 239000003814 drug Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 239000012472 biological sample Substances 0.000 description 1
- 238000000748 compression moulding Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000009474 immediate action Effects 0.000 description 1
- 230000033001 locomotion Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000001954 sterilising effect Effects 0.000 description 1
- 238000004659 sterilization and disinfection Methods 0.000 description 1
Landscapes
- Sealing With Elastic Sealing Lips (AREA)
- Sealing Devices (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は気密室内の雰囲気の汚染防止を完全に行える
構造のロッドシールに関する。Description: TECHNICAL FIELD The present invention relates to a rod seal having a structure capable of completely preventing contamination of an atmosphere in an airtight room.
近年、気密室内で行う処理、例えば凍結真空乾燥など
が種々の分野で使われるようになり、各々の分野によっ
て要求される条件も多様化している。特に凍結真空乾燥
の対象が食品や医薬品、生体試料などである場合には、
雑菌や異物などの侵入を防ぎ、無菌化を完全に行う必要
がある。In recent years, processing performed in an airtight room, for example, freeze vacuum drying and the like, has been used in various fields, and conditions required in each field have been diversified. Especially when the subject of freeze vacuum drying is food, medicine, biological sample, etc.
It is necessary to prevent invasion of various bacteria and foreign substances and to completely sterilize the bacteria.
しかし、従来の凍結真空乾燥装置では第3図に示すよ
うに、乾燥庫(21)内の棚板(24)を昇降させるための
シリンダロッド(22)が外部のシリンダ(23)から真空
シール(29)を経由して直接乾燥庫(21)内部に導入さ
れている。そして、このシリンダロッド(22)は特に除
菌されている訳ではないので、その表面に付着した雑菌
等が乾燥庫(21)内に侵入する可能性があり、そのよう
な場合には、いくら乾燥庫(21)内を予め滅菌したり、
導入ガスを除菌フィルタに通したりしても、乾燥庫(2
1)内を完全に無菌化することはできなかった。However, in the conventional freeze vacuum drying apparatus, as shown in FIG. 3, a cylinder rod (22) for raising and lowering a shelf (24) in a drying cabinet (21) is vacuum-sealed from an external cylinder (23). It is introduced directly into the drying cabinet (21) via 29). Since the cylinder rod (22) is not particularly sterilized, various bacteria and the like attached to the surface of the cylinder rod (22) may enter the drying cabinet (21). The interior of the drying cabinet (21) can be sterilized in advance,
Even if the introduced gas is passed through a sterilization filter, the drying chamber (2
1) The inside could not be completely sterilized.
本発明は以上のような問題に鑑みてなされ、気密室の
無菌操作を完全に行える構造のロッドシールに関する。The present invention has been made in view of the above problems, and relates to a rod seal having a structure capable of completely performing aseptic operation in an airtight room.
上記目的は、気密室の外部から出入するロッドに、該
ロッドを包囲するようなベローズを取り付け、該ベロー
ズで包囲した内部を排気する排気装置を取り付け、前記
ベローズの内部空間と前記気密室内の空間、及び前記ベ
ローズの前記内部空間と前記気密室の外部空間とを各々
遮断し、前記ベローズの前記内部空間の圧力を前記気密
室の圧力より低くしたことを特徴とする凍結真空乾燥装
置によって達成される。The object is to attach a bellows surrounding the rod to a rod coming in and out from the outside of the airtight chamber, and to install an exhaust device for exhausting the inside surrounded by the bellows, and to provide an inner space of the bellows and a space in the airtight chamber. And a freezing vacuum drying apparatus characterized in that the internal space of the bellows and the external space of the hermetic chamber are each shut off, and the pressure of the internal space of the bellows is made lower than the pressure of the hermetic chamber. You.
以上のように構成される密封処理装置におけるロッド
シールによれば、気密室内の空間、ベローズの内部空間
および気密室の外部空間とがそれぞれ完全に遮断される
ため、予め滅菌した気密室に雑菌等が侵入するのを完全
に防止することができるとともに、ベローズ内外の差圧
を小さくすることにより、ベローズの寿命を延ばすこと
もできる。また、ベローズの内部空間の圧力を気密室内
の空間の圧力より低圧とすれば、万一、ベローズが破損
し、ベローズの内部空間と気密室とが連通したとして
も、気密室内への雑菌等の侵入による汚染を防ぐことが
できる。According to the rod seal in the sealing device configured as described above, the space inside the airtight chamber, the inner space of the bellows, and the outer space of the airtight chamber are completely shut off, respectively. Can be completely prevented from invading, and the life of the bellows can be extended by reducing the differential pressure between the inside and outside of the bellows. Also, if the pressure in the internal space of the bellows is lower than the pressure in the space in the airtight room, even if the bellows is damaged and the internal space of the bellows communicates with the airtight room, bacteria and the like in the airtight room may be reduced. Contamination due to intrusion can be prevented.
次に実施例について図面を参照して説明する。第1図
に示される装置は本発明に係るロッドシールを備えた密
封処理装置の1例としての凍結真空乾燥装置である。乾
燥庫(1)の内部に複数の棚板(4)が設けられ、該棚
板(4)を昇降させるためのシリンダロッド(2)が外
部のシリンダ(3)から乾燥庫(1)内部に導入されて
いる。シリンダロッド(2)の周りにこれを包囲するよ
うな形でベローズ(7)を取り付けた。ベローズ取り付
け部分を第2図に詳細に示すが、公知の方法によってベ
ローズ(7)と装置外壁(19)およびシリンダロッド
(2)、あるいは棚板(4)との接続部分を各々シール
リング(9a)、(9b)、(9c)でシールし、かつ要所を
気密に溶接して、ベローズ(7)内部の空間Bを、乾燥
庫(1)内部の空間A及び外部とから各々遮断した。す
なわち、ベローズ(7)の上端部はベローズ支持板(9
d)に気密に溶接され、ベローズ支持板(9d)はシール
リング(9a)、シールリング部材(9e)を介して、シー
ル基板(9f)に固定される。シール基板(9f)と装置の
外壁(19)とが接する所は気密に溶接されており、シリ
ンダ支持部材(20)がシール基板(9f)に溶接により固
設されている。同様にベローズ(7)の下端部は他方の
ベローズ支持板(9d)に溶接され、ベローズ支持板(9
d)はシールリング(9c)、シールリング部材(9e)を
介して棚板(4)に接続されている。又、シリンダロッ
ド(2)との間は、ベローズ上部のシールリング部材
(9e)と気密に接続するガイド部材(9g)と、シールリ
ング(9b)とによってシールされると同時に摺動自在と
なっている。Next, embodiments will be described with reference to the drawings. The apparatus shown in FIG. 1 is a freeze-vacuum drying apparatus as an example of a sealing apparatus provided with a rod seal according to the present invention. A plurality of shelves (4) are provided inside the drying cabinet (1), and a cylinder rod (2) for raising and lowering the shelves (4) is provided from an external cylinder (3) to the inside of the drying cabinet (1). Has been introduced. A bellows (7) was mounted around the cylinder rod (2) so as to surround it. FIG. 2 shows the bellows mounting portion in detail. The connecting portion between the bellows (7) and the outer wall (19) of the apparatus and the cylinder rod (2) or the shelf plate (4) is formed by a sealing ring (9a) by a known method. ), (9b), and (9c), and the space B inside the bellows (7) was shielded from the space A inside the drying cabinet (1) and the outside, respectively, by hermetically welding important points. That is, the upper end of the bellows (7) is located on the bellows support plate (9).
The bellows support plate (9d) is hermetically welded to the seal substrate (9f) via the seal ring (9a) and the seal ring member (9e). The place where the seal substrate (9f) and the outer wall (19) of the device are in contact with each other is hermetically welded, and the cylinder support member (20) is fixed to the seal substrate (9f) by welding. Similarly, the lower end of the bellows (7) is welded to the other bellows support plate (9d), and the bellows support plate (9
d) is connected to the shelf (4) via a seal ring (9c) and a seal ring member (9e). The seal between the cylinder rod (2) and the guide ring (9g), which is airtightly connected to the seal ring member (9e) at the top of the bellows, and the seal ring (9b) are slidable at the same time. ing.
ベローズ(7)の内部空間Bを排気するように、メカ
ニカルブースタ(8a)、油回転真空ポンプ(8b)とから
成る真空ポンプ(8)を設け、配管途中に圧力ゲージG2
(13)を取り付けた。別に乾燥庫(1)内部の圧力を測
定する圧力ゲージG1(12)を取り付け、両圧力ゲージの
検知量、すなわち表示を比較するように、配管を圧力比
較器(14)に接続した。乾燥庫(1)の内部を予め洗
浄、滅菌しておき、薬液(18)を入れたバイアル瓶
(5)にゴム栓(6)を半打栓した状態で棚板(4)の
上に並べた。冷却、加熱用媒体を媒体入口(16)から媒
体出口(17)へと通して薬液の温度を制御した。排気口
(15)に接続した真空ポンプ(図示せず)によって乾燥
庫(1)の内部を真空にすると同時に、真空ポンプ
(8)によってベローズ(7)の内部をも真空にした。
この時、圧力ゲージG2(13)の表示の方が圧力ゲージG1
(12)の表示よりも低くなるように、すなわち、ベロー
ズ(7)の内部空間Bの圧力の方が乾燥庫(1)内の空
間Aの圧力よりも低くなるようにした。凍結真空乾燥の
処理が終了した後、油圧ポンプ(10)の操作によって外
部のシリンダ(3)からシリンダロッド(2)を導入
し、棚板(4)を降下させてバイアル瓶(5)のゴム栓
(6)を打栓し完全に密封した。以後、公知の方法によ
ってバイアル瓶を取り出した。A vacuum pump (8) including a mechanical booster (8a) and an oil rotary vacuum pump (8b) is provided so as to exhaust the internal space B of the bellows (7), and a pressure gauge G 2
(13) was attached. Separately, a pressure gauge G 1 (12) for measuring the pressure inside the drying cabinet (1) was attached, and the piping was connected to the pressure comparator (14) so as to compare the detection amounts of both pressure gauges, that is, the indications. The interior of the drying cabinet (1) is washed and sterilized in advance, and a rubber stopper (6) is half-stopped in a vial (5) containing a drug solution (18) and arranged on a shelf plate (4). Was. A cooling and heating medium was passed from the medium inlet (16) to the medium outlet (17) to control the temperature of the chemical. The inside of the drying cabinet (1) was evacuated by a vacuum pump (not shown) connected to the exhaust port (15), and the inside of the bellows (7) was evacuated by the vacuum pump (8).
At this time, the display of the pressure gauge G 2 (13) is the pressure gauge G 1
(12), that is, the pressure in the internal space B of the bellows (7) is lower than the pressure in the space A in the drying cabinet (1). After the freeze-vacuum drying process is completed, the cylinder rod (2) is introduced from the external cylinder (3) by operating the hydraulic pump (10), the shelf plate (4) is lowered, and the rubber of the vial bottle (5) is lowered. The stopper (6) was stoppered and completely sealed. Thereafter, the vial was taken out by a known method.
上記実施例においてベローズ(7)が、シリンダロッ
ド(2)の昇降、及び乾燥庫(1)内の真空に耐えるの
に充分な強度を有する場合には何も問題はないので、真
空ポンプ(8)の設置を省くことができる。しかし、ベ
ローズ(7)内が大気圧であれば、真空の乾燥庫(1)
内との差圧が大きいのでベローズは破損し易く、もし万
一ベローズ(7)が破損すると、折角、予め滅菌してお
いた乾燥庫(1)内に雑菌等が侵入してしまうことにな
る。従って実施例のように真空ポンプ(8)を設け、ベ
ローズ(7)の内部空間Bの方を乾燥庫(1)内の空間
Aよりも低圧に保ち、かつ両者の差圧を小さくすること
によって、予め内部空間B内を滅菌することができ、か
つベローズ(7)が破損する可能性を少なくし、しか
も、万一ベローズ(7)が破損しても内部空間B内に残
っている雑菌等が空間Aに侵入することが防がれる。こ
の際に、圧力ゲージG2(13)と圧力ゲージG1(12)とが
圧力比較器(14)に接続されているので、通常はG2の表
示<G1の表示であるのが、ベローズ(7)が破損すると
(G1−G2)が所定値以下となって圧力比較器(14)が警
告を発し、即刻、対処することができる。以上のように
して、万一の場合にも雑菌等の侵入が防がれる。In the above embodiment, there is no problem if the bellows (7) has sufficient strength to withstand the vertical movement of the cylinder rod (2) and the vacuum in the drying chamber (1). ) Can be omitted. However, if the inside of the bellows (7) is at atmospheric pressure, a vacuum drying cabinet (1)
The bellows are easily broken due to a large pressure difference between the inside and the bellows (7). . Therefore, the vacuum pump (8) is provided as in the embodiment, and the inner space B of the bellows (7) is used as the space in the drying cabinet (1).
By keeping the pressure lower than that of A and reducing the pressure difference between them, the interior space B can be sterilized in advance, and the possibility that the bellows (7) is damaged is reduced. Even if 7) is broken, bacteria and the like remaining in the internal space B are prevented from entering the space A. At this time, since the pressure gauge G 2 (13) and the pressure gauge G 1 (12) are connected to the pressure comparator (14), normally, the display of G 2 <the display of G 1 If the bellows (7) breaks, (G 1 -G 2 ) becomes less than a predetermined value and the pressure comparator (14) issues a warning and can take immediate action. As described above, invasion of germs and the like can be prevented even in the event of an emergency.
以上、本発明の実施例について説明したが、勿論、本
発明はこれに限定されることなく、本発明の技術的思想
に基づき、種々の変形が可能である。Although the embodiments of the present invention have been described above, the present invention is, of course, not limited thereto, and various modifications can be made based on the technical idea of the present invention.
例えば本実施例では棚板昇降用のシリンダロッド
(2)にベローズ及び真空ポンプが設けられたが、それ
だけでなく他の、外部から乾燥庫内に出入するロッド、
例えば棚板落下防止用ロッド等があれば全てに適用され
得る。この場合には複数のベローズの内部の排気を1つ
の真空ポンプで行うことができる。For example, in this embodiment, the bellows and the vacuum pump are provided on the cylinder rod (2) for lifting and lowering the shelf board.
For example, if there is a shelf board drop prevention rod or the like, it can be applied to all. In this case, the exhaust inside the plurality of bellows can be performed by one vacuum pump.
又、本実施例では凍結真空乾燥装置に使用したロッド
シールについて説明したが、本発明は他の密封処理装置
にも適用し得る。Further, in this embodiment, the rod seal used in the freeze vacuum drying apparatus has been described, but the present invention can be applied to other sealing processing apparatuses.
例えば無菌操作が不可欠な錠剤製造器において、容器
に入った薬粉を圧縮成形するための杵を昇降させるシリ
ンダロッドに、ベローズ及び真空ポンプを取り付けて使
用しても良いし、気密室に接続される配管中のバルブの
ロッドに適用しても良い。For example, in a tablet manufacturing machine in which aseptic operation is indispensable, a bellows and a vacuum pump may be used by attaching a bellows and a vacuum pump to a cylinder rod for raising and lowering a punch for compression-molding a medicinal powder in a container, or connected to an airtight chamber. It may be applied to a rod of a valve in a pipe.
又、気密室内の減圧の程度は広い範囲で選択しうる。 Further, the degree of pressure reduction in the airtight chamber can be selected in a wide range.
本発明は以上のような構成になっているので、気密室
の外部から出入するロッドによる気密室の汚染、例えば
無菌操作が要求される気密室において雑菌等の侵入が、
完全に防止できる。Since the present invention is configured as described above, contamination of the airtight room by a rod that enters and exits from the outside of the airtight room, for example, invasion of germs and the like in an airtight room where aseptic operation is required,
Can be completely prevented.
第1図は凍結真空乾燥装置に本発明の実施例が取り付け
られた状態の部分断面模式図であり、第2図は、第1図
に示される装置のベローズ取り付け部分を詳細に示した
断面図であり、第3図は従来技術の真空シールを取り付
けた凍結真空乾燥装置の部分断面模式図である。 なお、図において、 (1)……乾燥庫 (2)……シリンダロッド (7)……ベローズ (8)……真空ポンプ (9a)(9b)(9c)……シールリング (9g)……ガイド部材 (12)……圧力ゲージG1 (13)……圧力ゲージG2 (14)……圧力比較器A ……乾燥庫内の空間B ……ベローズの内部空間FIG. 1 is a schematic partial cross-sectional view showing a state in which an embodiment of the present invention is mounted on a freeze vacuum dryer, and FIG. 2 is a cross-sectional view showing a bellows mounting portion of the apparatus shown in FIG. 1 in detail. FIG. 3 is a schematic partial cross-sectional view of a freeze vacuum drying apparatus equipped with a conventional vacuum seal. In the figures, (1)… drying chamber (2)… cylinder rod (7)… bellows (8)… vacuum pump (9a) (9b) (9c)… sealing ring (9g)… Guide member (12) Pressure gauge G 1 (13) Pressure gauge G 2 (14) Pressure comparator A Space B in the drying cabinet B Inner space of bellows
Claims (4)
ッドを包囲するようなベローズを取り付け、該ベローズ
で包囲した内部を排気する排気装置を取り付け、前記ベ
ローズの内部空間と前記気密室内の空間、及び前記ベロ
ーズの前記内部空間と前記気密室の外部空間とを各々遮
断し、前記ベローズの前記内部空間の圧力を前記気密室
の圧力より低くしたことを特徴とする密封処理装置にお
けるロッドシール。1. A bellows which surrounds the rod is attached to a rod which enters and exits from the outside of the airtight chamber, and an exhaust device which exhausts the inside surrounded by the bellows is installed, and an internal space of the bellows and the inside of the airtight chamber are installed. A rod seal in a sealing device, wherein the space and the inner space of the bellows are isolated from the outer space of the hermetic chamber, and the pressure of the inner space of the bellows is lower than the pressure of the hermetic chamber. .
第1の圧力測定器と、前記ベローズの前記内部空間の圧
力を測定する第2の圧力測定器とを備え、前記第1の圧
力測定器の圧力と前記第2の圧力測定器の圧力との比較
によって、前記ベローズが破損したことを知らせる手段
を備えたことを特徴とする第1項記載の密封処理装置に
おけるロッドシール。2. A pressure measuring device comprising: a first pressure measuring device for measuring a pressure in the space in the hermetic chamber; and a second pressure measuring device for measuring a pressure in the internal space of the bellows, wherein the first pressure measuring device is provided. 2. The rod seal according to claim 1, further comprising means for notifying that the bellows has been broken by comparing the pressure of the measuring device with the pressure of the second pressure measuring device.
する第1項又は第2項記載の密封処理装置におけるロッ
ドシール。3. The rod seal according to claim 1, wherein the airtight chamber is sterilized.
とを特徴とする第1項、第2項、又は第3項記載の密封
処理装置におけるロッドシール。4. The rod seal according to claim 1, wherein freeze-drying is performed in said airtight chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1028928A JP2733780B2 (en) | 1989-02-08 | 1989-02-08 | Rod seal in sealing processing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1028928A JP2733780B2 (en) | 1989-02-08 | 1989-02-08 | Rod seal in sealing processing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02209674A JPH02209674A (en) | 1990-08-21 |
| JP2733780B2 true JP2733780B2 (en) | 1998-03-30 |
Family
ID=12262063
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1028928A Expired - Fee Related JP2733780B2 (en) | 1989-02-08 | 1989-02-08 | Rod seal in sealing processing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2733780B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109751277B (en) * | 2019-02-27 | 2024-02-13 | 沈阳北碳密封有限公司 | Positive and negative pressure working condition mechanical seal for self-priming pump |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55113873A (en) * | 1979-02-23 | 1980-09-02 | Hitachi Ltd | Low pressure device |
| JPS62163369U (en) * | 1986-03-31 | 1987-10-17 |
-
1989
- 1989-02-08 JP JP1028928A patent/JP2733780B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02209674A (en) | 1990-08-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7334346B2 (en) | Device and method for controlling dehydration during freeze-drying | |
| JP2001508536A (en) | Inspection of sealing properties of packaging materials | |
| EP0834324B1 (en) | Method and apparatus for detecting water entrapment in a vacuum chamber | |
| JP2733780B2 (en) | Rod seal in sealing processing equipment | |
| US4587851A (en) | High vacuum capacitance manometer having Px side open housing | |
| JP2652185B2 (en) | Lyophilizer | |
| JP4783631B2 (en) | Sealed electrotechnical device with two sealing joints and method | |
| EP3096801B1 (en) | Apparatus and method for sealing zones or rooms | |
| US6651404B1 (en) | Packaging machine with a machine stand and an insulating housing sealingly connected to the machine stand | |
| US3620265A (en) | Method for sterilizing gas containers and filling same with a sterile gas | |
| US4993171A (en) | Covering for a hydraulic ram of a freeze dryer | |
| CA1245701A (en) | Processing cabinet with sub-door access | |
| CN101535690B (en) | Freeze dryer barrier system | |
| US2494541A (en) | Vacuum drier with automatic capping device | |
| US8557185B2 (en) | Pressure vessel arrangement comprising an external pressure vessel and at least one insert basket | |
| US5360593A (en) | Heat sterilization of labile antibiotics | |
| JP4369628B2 (en) | Helium leak detector | |
| CN120102058A (en) | A packaging vacuum sealing detection device | |
| JPH0641114Y2 (en) | Vacuum freeze dryer | |
| CN207275071U (en) | The packaging facilities of refining metallic powder | |
| CN113532768A (en) | Reaction kettle airtightness detection device | |
| US6332525B1 (en) | Vacuum chamber for flat substrates | |
| JPH0765855B2 (en) | Hot isostatic press | |
| US20110278997A1 (en) | Modular containment system | |
| CN211128367U (en) | Novel scanning box of electron accelerator |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |