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JP2739596B2 - Distributed reflection semiconductor laser - Google Patents
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JP2739596B2 - Distributed reflection semiconductor laser - Google Patents

Distributed reflection semiconductor laser

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Publication number
JP2739596B2
JP2739596B2 JP17805889A JP17805889A JP2739596B2 JP 2739596 B2 JP2739596 B2 JP 2739596B2 JP 17805889 A JP17805889 A JP 17805889A JP 17805889 A JP17805889 A JP 17805889A JP 2739596 B2 JP2739596 B2 JP 2739596B2
Authority
JP
Japan
Prior art keywords
semiconductor laser
light
layer
guide layer
distributed reflection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP17805889A
Other languages
Japanese (ja)
Other versions
JPH0344084A (en
Inventor
邦重 尾江
文良 狩野
裕一 東盛
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP17805889A priority Critical patent/JP2739596B2/en
Publication of JPH0344084A publication Critical patent/JPH0344084A/en
Application granted granted Critical
Publication of JP2739596B2 publication Critical patent/JP2739596B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は光伝送方式において光源として用いる半導体
レーザに関し、特に、その発振波長を変えることができ
る波長可変の分布反射型半導体レーザに関するものであ
る。
Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor laser used as a light source in an optical transmission system, and more particularly, to a tunable distributed reflection type semiconductor laser capable of changing its oscillation wavelength. .

〔従来の技術〕[Conventional technology]

発振波長を可変とできる波長可変半導体レーザは光伝
送方式においてコヒーレントヘテロダイン検波のための
重要な部品である局発用光源として活発に研究が進めら
れてきている。このうち分布反射型半導体レーザ(Dist
ributed Bragg Reflector,以下「DBRレーザ」と略称す
る)は、回折格子を持つ導波路部よりなる光反射領域に
電流を流すことにより波長を可変とできるので、最も多
く研究がなされてきている。このレーザの従来からの問
題点は、発光部と光反射領域の光結合が、エバネッセン
ト結合を用いていたために大きくなく、光出力が小さい
点にあった。この問題点を解決するため、第3図に示す
つき合わせ結合(バット・ジョイント(butt−joint)
結合)により発光部LEと光反射領域LDを集積化する方法
が、例えば文献(トーモリ(Y.Tohmori)らによる電子
工学論文(Electronics Letters)24巻24号,1481〜1482
頁,1988年)に既に開示されており、その手法により高
光出力が得られるようになっている。これを製作するに
は、第3図におけるn型InP基板1上にGaInAsP活性層2
を全面に成長し、その一部を選択エッチングにより除去
し、その除去した部分にGaInAsPガイド層3を選択再成
長する必要がある。なお、第3図において、4は回折格
子、5はp型InP層、6はp型GaInAsPキャップ層、7,8
はp型電極、9はn型電極である。
A wavelength tunable semiconductor laser capable of tunable oscillation wavelength has been actively studied as a local light source, which is an important component for coherent heterodyne detection in an optical transmission system. Among them, a distributed reflection type semiconductor laser (Dist
A ributed Bragg Reflector (hereinafter abbreviated as “DBR laser”) has been most studied since it can change the wavelength by passing an electric current through a light reflection region formed of a waveguide portion having a diffraction grating. The conventional problem of this laser is that the light coupling between the light emitting portion and the light reflection region is not large due to the use of evanescent coupling, and the light output is small. To solve this problem, a butt-joint shown in FIG.
A method of integrating the light emitting portion LE and the light reflection region LD by coupling is described in, for example, a literature (Electronics Letters, Vol. 24, No. 24, 1481-1482 by Y. Tohmori et al.).
(1988, p. 1988), and a high light output can be obtained by the technique. To manufacture this, a GaInAsP active layer 2 was formed on an n-type InP substrate 1 in FIG.
Must be grown on the entire surface, a part of the GaInAsP guide layer 3 needs to be selectively regrown on the removed portion. In FIG. 3, reference numeral 4 denotes a diffraction grating; 5, a p-type InP layer; 6, a p-type GaInAsP cap layer;
Is a p-type electrode, and 9 is an n-type electrode.

〔発明が解決しようとする課題〕[Problems to be solved by the invention]

しかしながら、第3図において、再成長されたGaInAs
Pガイド層3は一般的にいって質があまり良くなく、非
発光中心を多く含んでいるために、キャリアの寿命時間
が短かい。その結果、電極8,9間に電流を流してGaInAsP
ガイド層3の屈折率を変化させ、発振波長を変化させよ
うとしても屈折率変化が小さかった。従って、第3図の
従来のDBRレーザでは高出力が得られるものの、可変波
長範囲が狭いという欠点があった。
However, in FIG. 3, the regrown GaInAs
The quality of the P guide layer 3 is generally not so good, and since the P guide layer 3 contains many non-light emitting centers, the carrier lifetime is short. As a result, a current flows between the electrodes 8 and 9 and the GaInAsP
Even when the refractive index of the guide layer 3 was changed to change the oscillation wavelength, the change in the refractive index was small. Therefore, although the conventional DBR laser shown in FIG. 3 can provide high output, it has a disadvantage that the variable wavelength range is narrow.

本発明はこのような点に鑑みてなされたものであり、
その目的とするところは、DBRレーザのガイド層を高品
質化し、高光出力で可変波長範囲の広いレーザを提供す
ることにある。
The present invention has been made in view of such a point,
It is an object of the present invention to provide a DBR laser with a high quality guide layer and to provide a laser with a high optical output and a wide variable wavelength range.

〔課題を解決するための手段〕[Means for solving the problem]

このような目的を達成するために本発明は、発光部と
光反射領域がつき合わせ結合により集積化されている波
長可変な分布反射型半導体レーザにおいて、光反射領域
を構成するガイド層の下にバンドギャップがガイド層よ
り大きいバッファ層を設けるようにしたものである。
In order to achieve such an object, the present invention provides a wavelength-variable distributed-reflection semiconductor laser in which a light-emitting portion and a light-reflecting region are integrated by butt-coupling. A buffer layer having a band gap larger than that of the guide layer is provided.

〔作用〕[Action]

本発明によるDBRレーザにおいては、ガイド層の質が
良くなり、キャリアの長寿命化、屈折率変化量の増加を
図ることができる。
In the DBR laser according to the present invention, the quality of the guide layer is improved, and the life of the carrier can be extended and the amount of change in the refractive index can be increased.

〔実施例〕〔Example〕

第1図は本発明によるDBRレーザの一実施例を説明す
る構成図であって、1はn型InP基板、2は波長1.55μ
mのGaInAsP活性層、3は波長1.3μmのGaInAsPガイド
層、4は回折格子、5はp型InP層、6はp型GaInAsPキ
ャップ層、7,8はp型電極、9はn型電極、10は波長1.1
5μmのGaInAsPバッファ層、LEは発光部、LDは光反射領
域である。
FIG. 1 is a configuration diagram illustrating an embodiment of a DBR laser according to the present invention, wherein 1 is an n-type InP substrate, and 2 is a wavelength of 1.55 μm.
m GaInAsP active layer, 3 a 1.3 μm wavelength GaInAsP guide layer, 4 a diffraction grating, 5 a p-type InP layer, 6 a p-type GaInAsP cap layer, 7, 8 a p-type electrode, 9 an n-type electrode, 10 is wavelength 1.1
A 5 μm GaInAsP buffer layer, LE is a light emitting portion, and LD is a light reflection region.

第1図のDBRレーザ製作の概略について説明すると、D
BRレーザの光反射領域LDのガイド層3を成長するとき、
まず、ガイド層3よりもバンドギャップの大きなバッフ
ァ層10を成長し、その上にガイド層3を続けて成長す
る。
The outline of the fabrication of the DBR laser shown in FIG.
When growing the guide layer 3 in the light reflection region LD of the BR laser,
First, a buffer layer 10 having a larger band gap than the guide layer 3 is grown, and the guide layer 3 is grown thereon.

このように構成されたDBRレーザは、電極7と9の間
で電流IIを流すことによって発振し、その発振波長は電
極8と9の間に電流I2を流すことによって可変とでき
る。発振波長の電流I2に対する変化の様子を第3図の従
来のDBRレーザと第1図の本発明によるDBRレーザとにつ
いて第2図に示す。第2図において、点線S1は従来のDB
Rレーザの特性を示し、実線S2は本発明によるDBRレーザ
の特性を示す。第2図から分かるように、本発明による
DBRレーザのほうが従来のDBRレーザよりも大きく発振波
長が変化している。これは、ガイド層3の質が良くな
り、キャリアの寿命が長くなって、屈折率変化量が大き
くなったためである。
The DBR laser thus configured oscillates by passing a current II between the electrodes 7 and 9, and the oscillation wavelength can be made variable by passing a current I2 between the electrodes 8 and 9. FIG. 2 shows how the oscillation wavelength changes with respect to the current I2 for the conventional DBR laser shown in FIG. 3 and the DBR laser according to the present invention shown in FIG. In FIG. 2, a dotted line S1 indicates a conventional DB.
The characteristics of the R laser are shown, and the solid line S2 shows the characteristics of the DBR laser according to the present invention. As can be seen from FIG.
The oscillation wavelength of the DBR laser changes more greatly than the conventional DBR laser. This is because the quality of the guide layer 3 is improved, the lifetime of the carrier is increased, and the amount of change in the refractive index is increased.

〔発明の効果〕〔The invention's effect〕

以上説明したように本発明は、つき合わせ結合を用い
た分布反射型半導体レーザにおいて、ガイド層の下にバ
ンドギャップがガイド層よりも大きいバッファ層を設け
たことにより、ガイド層の質を良くすることができ、キ
ャリアの長寿命化、屈折率変化量の増加を図ることがで
きるので、光出力が大きく可変波長範囲の広い分布反射
型半導体レーザを得ることができる効果がある。
As described above, the present invention improves the quality of a guide layer in a distributed reflection type semiconductor laser using butt-coupling by providing a buffer layer having a band gap larger than the guide layer below the guide layer. As a result, the life of the carrier can be extended and the amount of change in the refractive index can be increased, so that a distributed reflection semiconductor laser having a large optical output and a wide variable wavelength range can be obtained.

【図面の簡単な説明】[Brief description of the drawings]

第1図は本発明による分布反射型半導体レーザの一実施
例を示す構成図、第2図は第1図の分布反射型半導体レ
ーザと従来の分布反射型半導体レーザの発振波長の変化
量を比較して示すグラフ、第3図は従来の分布反射型半
導体レーザを示す構成図である。 1……n型InP基板、2……GaInAsP活性層、3……GaIn
AsPガイド層、4……回折格子、5……p型InP層、6…
…p型GaInAsPキャップ層、7,8……p型電極、9……n
型電極、10……GaInAsPバッファ層、LE……発光部、LD
……光反射領域。
FIG. 1 is a block diagram showing an embodiment of a distributed reflection semiconductor laser according to the present invention, and FIG. 2 compares the variation of the oscillation wavelength between the distributed reflection semiconductor laser of FIG. 1 and a conventional distributed reflection semiconductor laser. FIG. 3 is a configuration diagram showing a conventional distributed reflection type semiconductor laser. 1 ... n-type InP substrate, 2 ... GaInAsP active layer, 3 ... GaIn
AsP guide layer, 4 ... Diffraction grating, 5 ... P-type InP layer, 6 ...
... p-type GaInAsP cap layer, 7,8 ... p-type electrode, 9 ... n
Type electrode, 10: GaInAsP buffer layer, LE: Light emitting unit, LD
... Light reflection area.

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】発光部と光反射領域がつき合わせ結合によ
り集積化されている波長可変な分布反射型半導体レーザ
において、前記光反射領域を構成するガイド層の下にバ
ンドギャップがガイド層より大きいバッファ層を備えた
ことを特徴とする分布反射型半導体レーザ。
1. A wavelength-variable distributed-reflection-type semiconductor laser in which a light-emitting portion and a light-reflecting region are integrated by butt-coupling. A distributed reflection type semiconductor laser comprising a buffer layer.
JP17805889A 1989-07-12 1989-07-12 Distributed reflection semiconductor laser Expired - Fee Related JP2739596B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17805889A JP2739596B2 (en) 1989-07-12 1989-07-12 Distributed reflection semiconductor laser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17805889A JP2739596B2 (en) 1989-07-12 1989-07-12 Distributed reflection semiconductor laser

Publications (2)

Publication Number Publication Date
JPH0344084A JPH0344084A (en) 1991-02-25
JP2739596B2 true JP2739596B2 (en) 1998-04-15

Family

ID=16041873

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17805889A Expired - Fee Related JP2739596B2 (en) 1989-07-12 1989-07-12 Distributed reflection semiconductor laser

Country Status (1)

Country Link
JP (1) JP2739596B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1774845B (en) * 2004-03-23 2010-10-06 日本电信电话株式会社 DBR type wavelength variable light source

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
電子情報通信学会春季全国大会 (1989年) C−393 P.4−182

Also Published As

Publication number Publication date
JPH0344084A (en) 1991-02-25

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