JP2740586B2 - Thin film magnetic head - Google Patents
Thin film magnetic headInfo
- Publication number
- JP2740586B2 JP2740586B2 JP3201831A JP20183191A JP2740586B2 JP 2740586 B2 JP2740586 B2 JP 2740586B2 JP 3201831 A JP3201831 A JP 3201831A JP 20183191 A JP20183191 A JP 20183191A JP 2740586 B2 JP2740586 B2 JP 2740586B2
- Authority
- JP
- Japan
- Prior art keywords
- lower core
- core
- thin
- magnetic head
- film magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000010409 thin film Substances 0.000 title claims description 38
- 239000000463 material Substances 0.000 claims description 33
- 230000035699 permeability Effects 0.000 claims description 18
- 238000004804 winding Methods 0.000 claims description 15
- 239000000758 substrate Substances 0.000 claims description 14
- 229910000889 permalloy Inorganic materials 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 4
- 229910045601 alloy Inorganic materials 0.000 claims description 2
- 239000000956 alloy Substances 0.000 claims description 2
- 230000005389 magnetism Effects 0.000 claims 1
- 239000011162 core material Substances 0.000 description 79
- 230000000694 effects Effects 0.000 description 11
- 230000004907 flux Effects 0.000 description 11
- 238000010586 diagram Methods 0.000 description 10
- 239000011241 protective layer Substances 0.000 description 5
- 230000005415 magnetization Effects 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
Landscapes
- Magnetic Heads (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、磁気記録媒体に対して
高密度の情報の記録・再生を行なう薄膜磁気ヘッドに関
する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thin-film magnetic head for recording and reproducing high-density information on a magnetic recording medium.
【０００２】[0002]
【従来の技術】一般に、薄膜磁気ヘッドは、図１２に示
すように、セラミックス製の平面形状がほぼ矩形のスラ
イダ１のトレーリング側端部に、薄膜ヘッド素子２をそ
のギャップ３をＡＢＳ面４に開口させるようにして設け
て形成されている。2. Description of the Related Art In general, as shown in FIG. 12, a thin-film magnetic head has a thin-film head element 2 having a gap 3 and an ABS surface 4 at the trailing end of a slider 1 made of ceramics having a substantially rectangular planar shape. It is formed so as to be opened at the opening.
【０００３】この薄膜ヘッド素子２は、図１３に示すよ
うに、Ａｌ−Ｔｉ−Ｃ系のセラミックス製の基板５の上
に、スパッタリング法等の薄膜形成法により、保護層
６、下部コア７、巻線８、上部コア９、保護層６を順に
積層して形成される。下部コア７および上部コア９の素
材はともにパーマロイであり、巻線８の素材は銅であ
り、この巻線８が配設されている両コア７、９の対向部
分には樹脂等の絶縁材１０が充填されている。両コア
７、９は一部が連結されているとともに、先端部がギャ
プ３を介して対向しており、巻線８は前記両コア７、９
の連結部を周回するようにして形成されている。また、
保護層６はアルミナ等によって形成されている。As shown in FIG. 13, a thin film head element 2 has a protective layer 6, a lower core 7, and a thin film formed on an Al—Ti—C ceramic substrate 5 by a thin film forming method such as a sputtering method. The winding 8, the upper core 9, and the protective layer 6 are sequentially laminated. The material of the lower core 7 and the material of the upper core 9 are both permalloy, the material of the winding 8 is copper, and the opposing portions of the cores 7 and 9 where the winding 8 is provided are made of insulating material such as resin. 10 are filled. The two cores 7 and 9 are partially connected, and the front ends thereof face each other via the gap 3.
Is formed so as to go around the connecting portion. Also,
The protective layer 6 is formed of alumina or the like.
【０００４】このように形成されている薄膜磁気ヘッド
においては、記録時には、巻線８に通電することによ
り、前記ギャップ３部分に磁束を発生させて磁気記録媒
体に対して情報の記録を行ない、再生時には、磁気記録
媒体の磁束を巻線８に鎖交させることにより情報の再生
を行なう。In the thin-film magnetic head thus formed, at the time of recording, a current is applied to the winding 8 to generate a magnetic flux in the gap 3 and record information on the magnetic recording medium. At the time of reproduction, information is reproduced by linking the magnetic flux of the magnetic recording medium to the winding 8.
【０００５】[0005]
【発明が解決しようとする課題】前記従来の薄膜磁気ヘ
ッドにおいては、スパッタリング法による薄膜形成を容
易に行なうために、構成各部をできるかぎり平面的に構
成するようにしている。そのために、基板５に対して保
護層６および下部コア７を平面的に形成するとともに、
下層に巻線８および絶縁材１０が形成されている上部コ
ア９の先端を下部コア７側に近付けるように下方に傾斜
させてギャップ３を形成するようにしている。特に、ギ
ャップ３の有効深さ部分より内側のＡ部分においては、
下部コア７の上面を若干削り、上部コア９を下部コア７
に近接させている。In the above-mentioned conventional thin-film magnetic head, in order to easily form a thin film by a sputtering method, each component is made as planar as possible. For this purpose, the protective layer 6 and the lower core 7 are formed on the substrate 5 in a planar manner,
The gap 3 is formed by inclining the tip of the upper core 9 in which the winding 8 and the insulating material 10 are formed in the lower layer so as to approach the lower core 7 side. In particular, in the portion A inside the effective depth portion of the gap 3,
The upper surface of the lower core 7 is slightly cut, and the upper core 9 is
Close to.
【０００６】ところが、この下部コア７と上部コア９と
の距離が前記Ａ部分において近いために、巻線８部分に
おける両コア７、９の間に漏れ磁界が多く形成されてし
まい、磁気記録媒体に対する記録・再生効率が低下され
てしまうという不都合があった。また、再生波形につい
てみると、ギャップ３部分を外れた両コア７、９のＡＢ
Ｓ面４部分に大きな負パルスが発生してしまい、磁極長
効果（コンター効果）が悪いという不都合があった。However, since the distance between the lower core 7 and the upper core 9 is short in the portion A, a large leakage magnetic field is formed between the two cores 7 and 9 in the winding 8 so that a magnetic recording medium is not formed. However, there is a disadvantage that the recording / reproducing efficiency is reduced. As for the reproduced waveforms, AB of both cores 7 and 9 deviated from the gap 3 portion.
A large negative pulse is generated on the S surface 4 portion, and there is an inconvenience that the magnetic pole length effect (contour effect) is poor.
【０００７】本発明はこれらの点に鑑みてなされたもの
であり、磁気記録媒体に対する記録・再生効率が高く、
磁極長効果も優れており、しかも、構造が簡単である薄
膜磁気ヘッドを提供することを目的とする。The present invention has been made in view of these points, and has a high recording / reproducing efficiency with respect to a magnetic recording medium.
It is an object of the present invention to provide a thin-film magnetic head which has an excellent magnetic pole length effect and has a simple structure.
【０００８】[0008]
【課題を解決するための手段】前記目的を達成するため
に、請求項１に記載の本発明の薄膜磁気ヘッドは、薄膜
形成法により、基板上に形成された下部コアと、この下
部コアと一部が連結されているとともに先端部において
先細りのギャップを介して対向している上部コアと、前
記下部コアと上部コアとの対向部分に配設されている巻
線とを有する薄膜磁気ヘッドにおいて、前記上部コアと
ギャップを介して対向している前記下部コアの先端部と
前記基板との間に、前記下部コアの透磁率と前記基板の
透磁率との間の透磁率を有する磁性材料からなる底上げ
材を介在させて前記ギャップを所定の先細りに形成した
ことを特徴とする。According to a first aspect of the present invention, there is provided a thin film magnetic head according to the present invention, comprising: a lower core formed on a substrate by a thin film forming method; In a thin-film magnetic head having an upper core partially connected and opposed at a distal end via a tapered gap, and a winding disposed at a portion where the lower core and the upper core are opposed to each other. Between the tip of the lower core facing the upper core via a gap and the substrate, the permeability of the lower core and the substrate.
The gap is formed to have a predetermined taper by interposing a bottom-up member made of a magnetic material having a magnetic permeability between the predetermined value and the magnetic permeability .
【０００９】請求項２に記載の本発明の薄膜磁気ヘッド
は、底上げ材をＭｏを１２〜１８原子％を含み、Ｆｅと
Ｎｉからなるパーマロイ合金としたことを特徴とする。
また、請求項３に記載の本発明の薄膜磁気ヘッドは、前
記底上げ材による前記下部コアの底上げ量ｈを、前記下
部コアの上面から前記上部コアの下面までの間の巻線部
分の内のりＨの２５〜７５％としたことを特徴とする。 According to a second aspect of the present invention, there is provided a thin-film magnetic head according to the present invention, wherein the raising material contains 12 to 18 atomic% of Mo,
It is a permalloy alloy made of Ni.
The thin-film magnetic head according to the present invention described in claim 3 has a
The lowering amount h of the lower core by the raising material is
Winding part between the upper surface of the outer core and the lower surface of the upper core
It is characterized in that it is 25-75% of the minute weight H.
【００１０】[0010]
【作用】請求項１に記載の本発明によれば、前記下部コ
アの透磁率と前記基板の透磁率との間の透磁率を有する
磁性材料からなる底上げ材により下部コアの先端部を上
部コア側に上げるように傾斜させ、下部コアと上部コア
とのギャップ近傍における距離を大きく形成しているた
めに、両コアの巻線部分における間隔が広くなり、漏れ
磁界の発生が少なくなり、情報の記録・再生効率が大き
く向上するとともに、再生波形における負パルスを極め
て小さく抑えることができ、磁極長効果が優れたものと
なる。According to the present invention as set forth in claim 1, the lower core
A having a magnetic permeability between the magnetic permeability of the substrate and the magnetic permeability of the substrate.
Since the tip of the lower core is inclined so as to be raised toward the upper core by a bottom raising material made of a magnetic material, and the distance in the vicinity of the gap between the lower core and the upper core is increased, the winding portion of both cores The interval is widened, the generation of the leakage magnetic field is reduced, the recording / reproducing efficiency of the information is greatly improved, and the negative pulse in the reproduced waveform can be extremely small, so that the magnetic pole length effect is excellent.
【００１１】請求項２に記載の本発明によれば、底上げ
材がＭｏを１２〜１８原子％を含み、ＦｅとＮｉからな
るパーマロイ合金とされているために、コアの材料の特
性が劣化することがなく、より一層情報の記録・再生効
率を大きく向上させ、磁極長効果を大きく改善させる。
また、請求項３に記載の本発明によれば、底上げ材によ
る下部コアの底上げ量ｈを、前記下部コアの上面から上
部コアの下面までの間の巻線部分の内のりＨの２５〜７
５％としているために、より一層情報の記録・再生効率
を大きく向上させ、磁極長効果を大きく改善させる。 According to the second aspect of the present invention, the bottom raising material contains 12 to 18 atomic% of Mo and is made of Fe and Ni.
Since the core is made of a permalloy, the properties of the core material are not degraded, and the recording / reproducing efficiency of information is further greatly improved, and the magnetic pole length effect is greatly improved.
According to the third aspect of the present invention, the bottom raising material is used.
The height h of the lower core to be raised from the upper surface of the lower core.
25 to 7 of the inner diameter H of the winding portion up to the lower surface of the core
Since it is 5%, recording and reproducing efficiency of information is further improved
And the magnetic pole length effect is greatly improved.
【００１２】[0012]
【実施例】以下、本発明の実施例を図１から図１１につ
いて説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS.
【００１３】図１は本発明の薄膜磁気ヘッドの１実施例
を示し、従来と同一部分には同一符号を付してある。FIG. 1 shows an embodiment of a thin-film magnetic head according to the present invention, and the same parts as those of the prior art are denoted by the same reference numerals.
【００１４】本実施例においては、下部コア７のギャッ
プ３を形成する先端部分の基板５側に、下部コア７を上
部コア９側に持上げる底上げ材１１を介在させて形成さ
れており、その他の構成は従来と同一である。In the present embodiment, the lower core 7 is formed on the substrate 5 side of the tip portion forming the gap 3 with a bottom-up material 11 for lifting the lower core 7 toward the upper core 9 interposed therebetween. Is the same as the conventional one.
【００１５】更に説明すると、底上げ材１１は下部コア
７の形成前に保護層６の上にスパッタリング法により形
成され、その後に下部コア７等が従来と同様にして形成
される。この底上げ材１１により下部コア７の先端部
が、基板５の上面に対して傾斜角θをもって先端部を徐
々に上げるように傾斜させられ、かつ、両コア７、９の
巻線８部分の内のりＨに対して下部コア７の上面より底
上げ量ｈをもって底上げされている。また、上部コア９
の先端部の下方への傾斜角は、下部コア７の前記傾斜角
θとほぼ同一とされている。また、底上げ材１１は透磁
率μの低い材料を用いている。例えば、Ｎｉ82Ｆｅ18程
度のパーマロイにＭｏを１２〜１８原子％添加した素材
であって、下部コア７のパーマロイの組成に似た素材を
用いるとよい。More specifically, the bottom raising member 11 is formed on the protective layer 6 by a sputtering method before the formation of the lower core 7, and thereafter the lower core 7 and the like are formed in the same manner as in the prior art. The tip of the lower core 7 is inclined by the bottom raising member 11 so as to gradually raise the tip with an inclination angle θ with respect to the upper surface of the substrate 5, and the inner part of the winding 8 of both cores 7 and 9 is formed. H is raised from the upper surface of the lower core 7 by a height h. Also, the upper core 9
Of the lower core 7 is substantially the same as the inclination angle θ of the lower core 7. Further, the bottom raising material 11 is made of a material having a low magnetic permeability μ. For example, a material obtained by adding 12 to 18 atomic% of Mo to permalloy of about Ni 82 Fe 18, and a material similar to the permalloy composition of the lower core 7 may be used.
【００１６】このようにして形成されている本実施例の
薄膜磁気ヘッドの各種の特性を図２から図１１について
説明する。Various characteristics of the thin film magnetic head of the present embodiment thus formed will be described with reference to FIGS.
【００１７】図２は底上げ量ｈと再生効率との関係を示
し、図中実線、破線および鎖線はそれぞれ上下コア９、
７のテーパ部の透磁率μを２０００、１０００および５
００とした場合を示す。この再生効率は磁気記録媒体の
小磁石が発生する磁束のコアを通過する磁束量により求
めた。また、下部コア７の傾斜角θおよび上部コア９の
傾斜角をそれぞれ４５度とし、両コア７、９の内のりＨ
を１０μｍとして底上げ量ｈを変化させて求めた。ま
た、図中、底上げ量ｈ＝０の部分が従来例を示してい
る。FIG. 2 shows the relationship between the raised amount h and the regeneration efficiency. The solid line, broken line and chain line in FIG.
7 are 2000, 1000 and 5
00 is shown. The reproduction efficiency was obtained from the amount of magnetic flux generated by the small magnet of the magnetic recording medium passing through the core. Also, the inclination angle θ of the lower core 7 and the inclination angle of the upper core 9 are each set to 45 degrees, and the inner H
Was set to 10 μm and the amount h raised was changed. In the drawing, the portion where the bottom raising amount h = 0 indicates a conventional example.
【００１８】この図２より、下部コア７の先端部の底上
げにより再生効率が向上することがわかり、特に、上下
コア９、７のテーパ部の透磁率μが低い程その効果が顕
著である。From FIG. 2, it can be seen that the reproducing efficiency is improved by raising the tip of the lower core 7, and the effect becomes more remarkable as the magnetic permeability μ of the tapered portions of the upper and lower cores 9 and 7 decreases.
【００１９】これは上部コア９の下方への傾斜角が等し
いならば、下部コア７が平面的な従来例に比べて、下部
コア７が底上げ材１１によって上方へ傾斜している本実
施例の方が、下部コア７と上部コア９との間隔が広くな
り、両者間に発生する磁束数が本実施例の方が少なくな
るからである。図３はこの磁束数の比較例を示してお
り、ａは図２のａ点の本発明の実施例のギャップ近傍の
磁束分布を示し、ｂは図２のｂ点の従来例のギャップ近
傍の磁束分布を示しており、従来例のギャップ近傍の磁
束分布に比べて、本実施例のギャップ近傍の磁束分布の
方が、下部コア７と上部コア９との間に発生する磁束数
が少ないことがわかる。This is because, if the downward inclination angle of the upper core 9 is equal, the lower core 7 is inclined upward by the bottom raising material 11 in the present embodiment as compared with the conventional example in which the lower core 7 is flat. This is because the distance between the lower core 7 and the upper core 9 becomes wider, and the number of magnetic fluxes generated between them becomes smaller in the present embodiment. FIG. 3 shows a comparative example of the number of magnetic fluxes, where a shows the magnetic flux distribution near the gap of the embodiment of the present invention at point a in FIG. 2, and b shows the magnetic flux distribution near the gap at point b in FIG. The magnetic flux distribution is shown, and the number of magnetic fluxes generated between the lower core 7 and the upper core 9 is smaller in the magnetic flux distribution in the vicinity of the gap in the present embodiment than in the conventional example. I understand.
【００２０】前記図２および図３より、下部コア７の底
上げ量ｈは前記内のりＨに対して２５〜７５％の範囲と
すると、磁気効率の良好な向上を図ることができる。2 and 3, when the amount h of raising the lower core 7 is in the range of 25 to 75% of the inner radius H, the magnetic efficiency can be improved satisfactorily.
【００２１】図４、図５および図６は、それぞれ下部コ
ア７の傾斜角θと下部コア７の膜厚、保磁力および透磁
率との関係を示す。FIGS. 4, 5 and 6 show the relationship between the inclination angle θ of the lower core 7 and the film thickness, coercive force and magnetic permeability of the lower core 7, respectively.
【００２２】薄膜磁気ヘッドとしての良好な特性を維持
するためには、膜厚は厚い程よく、保磁力は小さい程よ
く、透磁率は大きい程よいため、前記図４〜６より下部
コア７の傾斜角θは約４５度以下とするとよい。In order to maintain good characteristics as a thin-film magnetic head, the larger the film thickness, the better the coercive force, and the better the magnetic permeability, the better the inclination angle θ of the lower core 7 from FIGS. Is preferably about 45 degrees or less.
【００２３】また、本実施例においては、底上げ材１１
として透磁率μの小さい素材を用いているために、ギャ
ップ３から下部コア７と上部コア９側部分ににおける再
生波形の負パルスを極めて小さく抑えて、磁極長効果を
大きく改善させることができる。この磁極長効果の改善
度合いを図７から図９に示す再生波形により説明する。
各図は薄膜磁気ヘッドの磁気記録媒体からの浮上距離を
０．１μｍ，０．２μｍ，０．３μｍ，０．４μｍ，
０．５μｍとした場合の再生波形を示しているが、図７
に示すように、底上げ材を設けない従来の薄膜磁気ヘッ
ドにおいては、両コア７、９に対向する部分に相当する
ａ，ｂ部分に大きな負パルスが発生しているのに対し、
両コア間の内のりＨを１０μｍとして底上げ量ｈを４μ
ｍおよび６μｍとした本発明の薄膜磁気ヘッドにおいて
は、ａ，ｂ部分の負パルスが極めて小さく抑えられてい
る。Further, in this embodiment, the bottom raising material 11 is used.
Since a material having a small magnetic permeability μ is used, the negative pulse of the reproduced waveform from the gap 3 to the lower core 7 and the upper core 9 is extremely small, and the magnetic pole length effect can be greatly improved. The degree of improvement of the magnetic pole length effect will be described with reference to reproduced waveforms shown in FIGS.
In each figure, the flying distance of the thin film magnetic head from the magnetic recording medium is 0.1 μm, 0.2 μm, 0.3 μm, 0.4 μm,
FIG. 7 shows a reproduced waveform when the thickness is 0.5 μm.
As shown in the figure, in the conventional thin-film magnetic head having no raised material, a large negative pulse is generated in a and b portions corresponding to the portions facing both cores 7 and 9,
The inner height H between both cores is set to 10 μm, and the raised amount h is 4 μm.
In the thin film magnetic head of the present invention having m and 6 μm, the negative pulses in the portions a and b are extremely small.
【００２４】また、底上げ材１１自身の特性を、パーマ
ロイに対するＭｏの添加量を変化させて求めると、図１
０および図１１のようになった。一方の図１０は底上げ
材１１の飽和磁化と保磁力とを示しており、飽和磁化は
Ｍｏの添加量の増加に従ってほぼ直線的に減少してお
り、保磁力は５Ｏｅ以下である。他方の図１１は底上げ
材１１の透磁率μを示しており、Ｍｏの添加量が１２原
子％で１００を切り、１６原子％で１０を切っている。
このような結果より、底上げ材１１は、パーマロイに対
してＭｏを１２〜１８原子％添加することにより、透磁
率μが非常に小さくなり、しかも、低透磁率であるにも
かかわらず保磁力が小さく抑えられてソフトさを保持
し、底上げ材として有用であることがわかる。FIG. 1 shows the characteristics of the bottom raising material 11 itself obtained by changing the amount of Mo added to permalloy.
0 and FIG. On the other hand, FIG. 10 shows the saturation magnetization and the coercive force of the bottom raising material 11. The saturation magnetization decreases almost linearly with the increase in the amount of Mo added, and the coercive force is 5 Oe or less. FIG. 11 shows the magnetic permeability μ of the bottom raising material 11, where the addition amount of Mo is less than 100 at 12 atomic% and less than 10 at 16 atomic%.
From these results, by adding Mo to the permalloy in an amount of 12 to 18 atomic% with respect to the permalloy, the bottom raising material 11 has a very small magnetic permeability μ, and has a low coercive force despite the low magnetic permeability. It can be seen that the material is kept small and retains softness, and is useful as a material for raising the floor.
【００２５】このように底上げ材１１として、前述した
Ｎｉ82Ｆｅ18程度のパーマロイにＭｏを１２〜１８原子
％添加した素材であって、下部コア７のパーマロイの組
成に似た素材を用いると、底上げ材１１を下部コア７に
直接接触させて設けても、下部コア７の材料の特性が劣
化することがなく、前記した情報の記録・再生効率をよ
り一層大きく向上させ、磁極長効果もより一層大きく改
善させることができる。As described above, when the bottom raising material 11 is a material obtained by adding 12 to 18 atomic% of Mo to the above-mentioned permalloy of about Ni 82 Fe 18, and a material similar to the permalloy composition of the lower core 7 is used, Even if the bottom raising member 11 is provided in direct contact with the lower core 7, the characteristics of the material of the lower core 7 are not degraded, the recording / reproducing efficiency of the information is further greatly improved, and the magnetic pole length effect is further improved. It can be further improved.
【００２６】また、図８および図９より、下部コア７の
底上げ量ｈは前記内のりＨに対して２５〜７５％の範囲
とするとよいことがわかる。FIGS. 8 and 9 show that the amount h of raising the lower core 7 is preferably in the range of 25 to 75% of the inner radius H.
【００２７】なお、本発明は前記実施例に限定されるも
のではなく、必要に応じて変更することができる。It should be noted that the present invention is not limited to the above-described embodiment, but can be modified as needed.
【００２８】[0028]
【発明の効果】このように本発明の薄膜磁気ヘッドは構
成され作用するものであるから、磁気記録媒体に対する
記録・再生効率が高く、磁極長効果も優れており、しか
も、構造が簡単である等の効果を奏する。As described above, the thin-film magnetic head of the present invention is constructed and operates. Therefore, the recording / reproducing efficiency for the magnetic recording medium is high, the magnetic pole length effect is excellent, and the structure is simple. And so on.
【図１】本発明の薄膜磁気ヘッドの１実施例の要部を示
す断面図FIG. 1 is a sectional view showing a main part of an embodiment of a thin film magnetic head according to the present invention.
【図２】本発明の薄膜磁気ヘッドにおける下部コアの底
上げ量と再生効率との関係を示す特性図FIG. 2 is a characteristic diagram showing a relationship between a raised amount of a lower core and a reproduction efficiency in the thin-film magnetic head of the present invention.
【図３】ａおよびｂは本発明と従来例とにおけるギャッ
プ近傍の磁束の分布図3A and 3B are distribution diagrams of a magnetic flux near a gap between the present invention and a conventional example.
【図４】本発明の薄膜磁気ヘッドにおける下部コアの傾
斜角と下部コアの膜厚との関係を示す特性図FIG. 4 is a characteristic diagram showing the relationship between the inclination angle of the lower core and the thickness of the lower core in the thin-film magnetic head of the present invention.
【図５】本発明の薄膜磁気ヘッドにおける下部コアの傾
斜角と保磁力との関係を示す特性図FIG. 5 is a characteristic diagram showing the relationship between the inclination angle of the lower core and the coercive force in the thin-film magnetic head of the present invention.
【図６】本発明の薄膜磁気ヘッドにおける下部コアの傾
斜角と透磁率との関係を示す特性図FIG. 6 is a characteristic diagram showing the relationship between the inclination angle of the lower core and the magnetic permeability in the thin-film magnetic head of the present invention.
【図７】従来例における再生波形図FIG. 7 is a reproduction waveform diagram in a conventional example.
【図８】本発明の薄膜磁気ヘッドにおける底上げ量を４
μｍとした場合の再生波形図FIG. 8 shows that the amount of elevation in the thin-film magnetic head of the present invention is 4
Playback waveform diagram when μm
【図９】本発明の薄膜磁気ヘッドにおける底上げ量を６
μｍとした場合の再生波形図FIG. 9 shows that the amount of elevation of the thin film magnetic head of the present invention is 6
Playback waveform diagram when μm
【図１０】底上げ材のＭｏの添加量に応じた飽和磁化と
保磁力との関係を示す特性図FIG. 10 is a characteristic diagram showing a relationship between saturation magnetization and coercive force according to the amount of Mo added to the bottom raising material.
【図１１】底上げ材のＭｏの添加量に応じた透磁率との
関係を示す特性図FIG. 11 is a characteristic diagram showing a relationship with the magnetic permeability according to the amount of Mo added to the bottom raising material.
【図１２】従来の薄膜磁気ヘッドの１例を示す斜視図FIG. 12 is a perspective view showing an example of a conventional thin film magnetic head.
【図１３】従来の薄膜磁気ヘッドの要部を示す断面図FIG. 13 is a sectional view showing a main part of a conventional thin film magnetic head.
１ スライダ ３ ギャップ ４ ＡＢＳ面 ５ 基板 ７ 下部コア ８ 巻線 ９ 上部コア １１ 底上げ材 DESCRIPTION OF SYMBOLS 1 Slider 3 Gap 4 ABS side 5 Substrate 7 Lower core 8 Winding 9 Upper core 11 Bottom raising material
Claims (3)
下部コアと、この下部コアと一部が連結されているとと
もに先端部において先細りのギャップを介して対向して
いる上部コアと、前記下部コアと上部コアとの対向部分
に配設されている巻線とを有する薄膜磁気ヘッドにおい
て、前記上部コアとギャップを介して対向している前記
下部コアの先端部と前記基板との間に、前記下部コアの
透磁率と前記基板の透磁率との間の透磁率を有する磁性
材料からなる底上げ材を介在させて前記ギャップを所定
の先細りに形成したことを特徴とする薄膜磁気ヘッド。1. A lower core formed on a substrate by a thin film forming method, an upper core partially connected to the lower core and opposed at a tip end via a tapered gap, In a thin-film magnetic head having a winding disposed at a portion opposed to a lower core and an upper core, a thin-film magnetic head is provided between a tip of the lower core facing the upper core via a gap and the substrate. , Of the lower core
Magnetism having a permeability between that of the substrate and the permeability of the substrate
2. A thin-film magnetic head according to claim 1, wherein said gap is formed to have a predetermined taper with a bottom-up member made of a material interposed.
を含み、ＦｅとＮｉからなるパーマロイ合金であること
を特徴とする請求項１に記載の薄膜磁気ヘッド。2. A method according to claim 1, wherein said raising material contains Mo in an amount of 12 to 18 atomic%.
2. The thin-film magnetic head according to claim 1, wherein the head is a permalloy alloy comprising Fe and Ni .
げ量ｈが、前記下部コアの上面から前記上部コアの下面
までの間の巻線部分の内のりＨの２５〜７５％であるこ
とを特徴とする請求項１または請求項２に記載の薄膜磁
気ヘッド。 3. The bottom of the lower core formed by the raising material.
The height h is from the upper surface of the lower core to the lower surface of the upper core.
25% to 75% of the inner diameter H of the winding part between
3. The thin film magnetic device according to claim 1, wherein:
Damn head.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3201831A JP2740586B2 (en) | 1991-08-12 | 1991-08-12 | Thin film magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3201831A JP2740586B2 (en) | 1991-08-12 | 1991-08-12 | Thin film magnetic head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0546930A JPH0546930A (en) | 1993-02-26 |
| JP2740586B2 true JP2740586B2 (en) | 1998-04-15 |
Family
ID=16447619
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3201831A Expired - Fee Related JP2740586B2 (en) | 1991-08-12 | 1991-08-12 | Thin film magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2740586B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE1007775A3 (en) * | 1993-11-22 | 1995-10-17 | Philips Electronics Nv | MAGNETIC HEAD, PROVIDED WITH A HEAD SURFACE AND A THIN FILM STRUCTURE, AND METHOD FOR MANUFACTURING THE MAGNETIC HEAD. |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57189321A (en) * | 1981-05-18 | 1982-11-20 | Fujitsu Ltd | Manufacture of thin film magnetic head |
| JP2567221B2 (en) * | 1986-03-31 | 1996-12-25 | 株式会社日立製作所 | Thin film magnetic head and method of manufacturing the same |
| JPH04111211A (en) * | 1990-08-31 | 1992-04-13 | Nec Ibaraki Ltd | Thin-film magnetic head |
-
1991
- 1991-08-12 JP JP3201831A patent/JP2740586B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0546930A (en) | 1993-02-26 |
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