JP2755857B2 - Moving table equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a moving table apparatus (also referred to as a sample moving table or a sample stage) used for, for example, electronic drawing in a semiconductor manufacturing process, and more particularly, to a roller guide mechanism for guiding the moving table. The present invention relates to a mechanism for preventing and correcting misalignment of the roller holding retainer beyond an allowable range.

[0002]

2. Description of the Related Art Conventionally, a moving table device (XY stage) for precision machining used for electronic drawing or the like has a linear guide provided on the lower surface of an intermediate table (for example, X table) in order to improve the moving accuracy of the moving table. A linear guide (first linear guide) provided on the lower surface of a top table (for example, a Y table) between the (first linear guide) and the linear guide (second linear guide) on the upper surface of the fixed base on which it is mounted. And a linear guide (a second linear guide) on the intermediate table on which the intermediate table and the top table are mounted. A retainer for holding a number of rollers in a row is interposed between the intermediate table and the top table in the X and Y directions. Moved ones are widely known.

In this type of roller guide mechanism, the amount of movement of the retainer is generally に 対 し て of the amount of movement of the table. However, by repeating the movement of the table, the time between the table and the retainer becomes longer. If the positional deviation is left as it is, the positional deviation gradually increases, and the table (first linear guide) eventually comes off from the retainer. Therefore, conventionally, various mechanisms for preventing and correcting this displacement have been proposed.

FIGS. 7 to 9 show a conventional example of this kind of moving table apparatus.

First, the conventional apparatus shown in FIG. 7 will be described (FIG. 7 is a plan view of a conventional moving table apparatus).

In FIG. 7, an X table (intermediate table) 2 is mounted on a fixed base 3 via a roller guide mechanism 11, and a Y table (top table) 1 is mounted on the X table 2 via a roller guide mechanism 12. Will be installed. The details of the roller guide mechanism in this conventional example will be described with reference to FIG. 8 in addition to FIG. 7 (note that the roller guide mechanisms 11 and 12 are the same mechanism, so only the roller guide mechanism 12 will be described here. ). FIG. 8 shows an enlarged plan view of a portion A in FIG. 7 and a side view thereof.

The roller guide mechanism 12 includes two linear guides (first linear guides) 12B disposed on the lower surface of the Y table 1 in the Y direction, and the first linear guides 12B.
Two linear guides (second linear guides) 12A disposed on the X table 2 in the Y direction corresponding to B, and a retainer 12C with rollers 12D interposed between the linear guides 12A and 12B; It consists of.

The roller guide mechanism 12 is of a cross roller type. As shown in FIG.
The rollers 12D are alternately cross-arranged in 2C, and these rollers 12D are linear guides respectively provided in grooves 13 and 14 having a V-shaped cross section provided on opposing surfaces of the linear guides 12A and 12B while being held by a retainer 12C. It is installed so that it can roll while moving along.

According to the roller guide mechanism 12 having the above structure, the retainer 12C moves in the same direction as the Y table 1 moves, but the ratio of the movement amount is the movement amount of the Y table 1: the movement of the retainer 12C. Amount = 2: 1.
In addition, the roller guide mechanism 12 causes a relative displacement with time between the Y table 1 (the linear guide 12B) and the retainer 12C due to the driving thereof. In order to prevent the displacement from becoming unacceptable, As a countermeasure for correcting the displacement, stoppers 20 are provided at both ends on the side of the second linear guide 12A.

Here, the specifications of the roller guide mechanism and the table will be described with reference to FIG.

When only the Y direction is considered, the length of the Y table 1 in the moving direction (same as the length of the moving side linear guide 12B) is set to Ly, and the Y table 1 moves within the range of Sy + Sy '. It is known that the retainer 12C moves by a half of the moving distance of the table 1 as described above. In the case of the present embodiment, the retainer 12C has no displacement with respect to the table 1 ( Note that FIG. 7 shows a state in which there is a displacement of δ).
Positions of both ends of the retainer 12C with respect to Sy '(table 1
And the distance between each end of the retainer 12C) Cy and Cy ′, respectively.

[0012]

## EQU00001 ## When Cy = (Sy / 2) Cy '= (Sy' / 2), the retainer 12C is positioned at the proper position (deviation δ).
= 0), the Y table 1 is the moving range Sy,
When moved by Sy ′, one end surface of the Y table 1 and one end of the retainer 12 are simultaneously aligned with one stopper 20.

On the other hand, when the retainer 12C is shifted to the Sy side by + δ with respect to the Y table 1 as shown in FIG. 7, when the Y table 1 is moved to the Sy side by Sy, first, one end of the retainer 12C is The retainer 12C abuts against the stopper 20, the further movement of the retainer 12C is stopped, and one end of the first linear guide 12B on the Y table 1 side contacts the stopper 20 so that one end of the retainer 12C and one end of the Y table 1 are aligned. The displacement of the 12C relative to the Y table 1 is corrected.

A conventional example shown in FIG. 9 (this conventional example is disclosed in, for example, Japanese Patent Application Laid-Open No. 55-51119. In the figure, the same symbols as those in the conventional example in FIG. 8 indicate the same or common elements. ) Discloses a technique in which both ends of the retainers 11C and 12C are pulled by a spring 21 and tension is applied to the retainers 11C and 12C.

A more reliable method is disclosed in Japanese Patent Application Laid-Open No. 55-6 / 55.
As disclosed in Japanese Patent Application Laid-Open No. 0718, a technique of using a mechanism combining links, pulleys, gears, and the like to constrain the movement of the retainer so that the movement of the retainer is always approximately 1/2 linearly with respect to the table. It has been disclosed.

[0016]

In the prior art described above, in the case of a method in which a stopper is provided on the second linear guide side as shown in FIGS. Because the retainer collides with the stopper at, a large compressive load is applied to the retainer,
Deformation is likely to occur in the retainer during repeated collisions. Deformation of the retainer not only causes damage to the retainer, but also adversely affects the accuracy of the moving table device.

In particular, the retainer in this type of roller guide mechanism has a plate thickness of 1 to 2 due to restrictions on mounting space and the like.
mm, and in the case of a moving table device of an electron beam lithography system, magnetic materials such as iron and stainless steel cannot be used, and relatively weak materials such as titanium, aluminum, phosphor bronze, and resin are used. The above-described problems are likely to occur.

When a mechanism such as a spring, a link, a pulley, or a gear is added to the automatic correction of the retainer as in the conventional example shown in FIG. Wear tends to cause dust and mechanical failures, which further increases costs.

SUMMARY OF THE INVENTION The present invention has been made in view of the above points, and has as its object to simplify the structure, reduce the impact applied to the retainer, enable a highly durable displacement, and prevent and correct the displacement of the retainer. It is an object of the present invention to provide a highly reliable moving table device capable of reliably performing both functions.

[0020]

In order to achieve the above object, the present invention basically proposes the following problem solving means.

That is, as described above, a straight line is provided between the first linear guide provided on the table capable of controlling the linear movement and the second linear guide provided on the other table or base on which the table is mounted. In a moving table apparatus including a retainer for holding a roller movable along a guide, the retainer has an end face of the first linear guide or a table on a first linear guide side at both ends in the moving direction. When a relative displacement occurs between the table on the first linear guide side and the retainer, the actual table movement range is determined according to the amount of displacement. The first linear guide end face or the first linear guide inside or outside (the specified range in which the table can move during use)
The retainer automatic misalignment correction mechanism was configured so as to be in contact with the table end surface on the side of the linear guide.

[0022]

The operation of the present invention will now be described with reference to FIG. 3 used in the embodiment to facilitate understanding of the contents. In FIG. 3, 1 is a table on the moving side, 2 is a table on which it is placed, 12B is a first linear guide provided on the moving table 1 side, 12A is a second linear guide provided on the table 2 side,
Reference numeral 12C denotes a retainer, and 12C 'denotes a locking piece. The retainer 12C follows the moving amount of the table 1 by half the moving amount.

During normal work, the table 1 is controlled to move linearly within the actual table movement range Sy + Sy '.
When the retainer 12C is at an appropriate position where no displacement occurs with respect to the table 1 (δ = 0), the end surface of the first linear guide (moving-side linear guide) 12B or the first linear guide 12B within the actual table moving range Sy + Sy ′. Of the table 1 on the side of the linear guide does not contact the locking piece 12C '.

On the other hand, (b) the retainer 12C
Occurs, if the amount of deviation is equal to or more than a predetermined value according to the degree of the amount of deviation, for example, if the positional deviation of the retainer 12C with respect to the table 1 is equal to or more than the predetermined value + δ on the Sy side. When the table 1 is moved to the Sy ′ side, the end face of the first linear guide 12B or the end face of the table 1 on the first linear guide side is locked within the actual table moving range.
2C ', and this contact causes the retainer 12
C is pulled by the table 1 as it is by the amount of the displacement, thereby preventing further displacement and performing automatic displacement correction.

According to the present invention, (c) the retainer 1
If the position shift δ of 2C is equal to or less than the predetermined value, the table 1
If the stroke end is outside the actual table movement range in advance and the table 1 is moved (for example, periodically) to the outside of the actual table movement range, the end surface of the first linear guide 12B or the first linear guide side If the end face of the table 1 contacts one of the locking pieces 12C 'and the table 1 is moved to the stroke end as it is, the retainer 12C is pulled by the displacement amount, and the positional displacement is automatically corrected.

The automatic correction of the positional deviation of the retainer as described above involves one end of the linear guide 12B or one end of the table 1 on the moving table 1 side contacting the locking piece 12C 'moving in the same traveling direction. As compared with the case where the retainer collides with the stopper at rest, the collision force is remarkably reduced, and the deformation of the retainer, the locking piece and the like can be prevented.

Also, as shown in (c), the stroke end is set outside the range of the actual table where the accuracy of the table is required, for example, several mm outside, and the locking piece 12C 'is out of the range of the actual table movement. If the movable side linear guide 12B is in contact with one end of the linear guide 12B or one end of the table 1, the above-described positional deviation correction can be periodically performed at a time other than the time of use by a command from the control system. By avoiding the contact between the locking piece 12C 'of the retainer 12C and the end of the linear guide 12B on the moving side or the end of the table 1 at all times, the fluctuation of the table moving load is eliminated, and the table moving is always stable within the normal use range. Becomes possible.

[0028]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to FIGS.

FIG. 1 is a plan view of a main part according to a first embodiment of the present invention, and FIG. 2 is a plan view and a side view showing a portion A thereof.

First, prior to the description of the above embodiment, an overall outline of a table moving apparatus to which this embodiment is applied is shown in FIG.
And FIG.

FIG. 4 is an overall configuration diagram of an electron beam lithography apparatus used in a semiconductor manufacturing process, and FIG. 5 is a perspective view of the table apparatus.

The moving table apparatus has a fixed base 3, an X table 2 and a Y table 1 as a main body, and a Y table 1
Is mounted on the X table 2 via the roller guide mechanism 12 so as to be movable in the Y direction by driving the motor 6A and the ball screw 8A, and the X table 2 is placed on the base 3 by the motor 6B and the ball screw 8B. And is movably mounted in the X direction via a roller guide mechanism 11.

Two reflecting mirrors 4 are mounted on the Y table 1 in the X and Y directions, and their positions are accurately measured by a laser interferometer 5. The moving speed of each table 1 and 2 is
Tachogenerators 7A, 7 attached to motors 6A, 6B
The speed is measured by B, and the speed is controlled by the speed signal. The control of the entire table mechanism is performed by the control system 9.

Here, the roller guide mechanism of this embodiment will be described with reference to FIGS. Note that the roller guide mechanism 1
Since reference numerals 1 and 12 are similar mechanisms, only the roller guide mechanism 12 will be described here.

The roller guide mechanism 12 of this embodiment is similar to that of FIG.
The first linear guide 12B and the second linear guide 12A have the same structure as the conventional one using a cross roller type as in the conventional example. Here, the differences will be described.

As described above, a relative displacement δ occurs with time between the Y table 1 (the linear guide 12B) and the retainer 12C due to the driving thereof. In order to prevent the positional deviation from becoming more than allowable and to correct the deviation, in the present embodiment, a locking piece 12C 'is provided in which both ends in the moving direction of the retainer 12C are bent inward. The stopper 12C 'is connected to the first linear guide 12 on the Y table 1 side.
B and the end face. In accordance with the degree of the displacement δ, the locking piece 12C ′ is set so as to contact one end of the first linear guide 12B inside and outside the actual table moving range of the table 1.

Here, specific specifications of the roller guide mechanism and the table will be described with reference to FIG.

Considering only the Y direction, the length of the Y table 1 in the moving direction (same as the length of the moving side linear guide 12B) is set to Ly, and the Y table 1 moves within the range of Sy + Sy '. It is known that the retainer 12C moves by a half of the moving distance of the table 1 as described above. In the case of the present embodiment, the retainer 12C is provided on the retainer 12C for Sy and Sy '. Position of piece 12C '(distance between one end of table 1 and each end of retainer 12C) C
y and Cy ', respectively

[0039]

## EQU2 ## If Cy = (Sy / 2) + △ y Cy ′ = (Sy ′ / 2) + △ y ′ (△ y and △ y ′ are extra than the conventional example of FIG. 7). , If the retainer 12C is at the proper position (the displacement amount is zero), the Y table 1 is in the moving range Sy, S
Since the linear guide 12B on the Y table 1 side comes into contact with the locking piece 12C 'at a position deviated from y' by 2 @ y and 2 @ y ', respectively, in other words, at a position outside the actual table movement range, The Y table 1 moves smoothly within the movement range Sy + Sy ′.

On the other hand, when the retainer 12C is displaced with respect to the Y table 1, for example, as shown in FIG. 3, when the displacement of the retainer 12C is + δ (δ> △ y) on the Sy side, the Y table 1 Moves toward the Sy ′ side, one end of the linear guide 12B on the table 1 side contacts the locking piece 12C ′ on the Sy ′ side of the retainer 12C within the table movement range Sy ′, and the retainer 12C is displaced by the Y table 1 as it is. Only to be pulled, and the misalignment is automatically corrected.
Similarly, the amount of deviation of the retainer 12C is + δ (δ
> △ y ′) (not shown), the Y table 1
Moves to the Sy side, one end of the linear guide 12B on the table 1 side moves to the S of the retainer 12C within the table movement range Sy.
The retainer 12 contacts the y-side engaging piece 12C '
C is pulled to the Y table 1 and the misalignment is automatically corrected.

The correction of the shift amount as described above is performed in the case of the movement in the X direction in exactly the same manner as in the case of the movement in the Y direction. That is, of the roller guide mechanism 11,
11A is a linear guide provided on the base 3, 11C is a retainer, and 11D is a roller. By the way, as described above, Y
Even in the case where the deviation of the retainer in the X direction and the X direction is corrected, in any case, when the correction is performed in the actual movement range of the table, the load on the table increases, and the deviation δ of the retainers 12C and 11C is as small as possible. y, △ y 'and △
Before reaching x, △ x ′, the control system voluntarily moves the Y table 1 and the X table 2 from the actual movement range Sy + Sy ′,
From Sx + Sy ', 2 @ Y, 2 @ y' and 2 @ respectively
It is desirable to restore the retainer to its original position by moving outward by a distance of x, 2 △ x ′. By performing this correction work periodically, for example, once a month, the table apparatus of the present embodiment can always move with stability and accuracy within the necessary movement range.

According to this embodiment, the displacement of the retainer can be automatically corrected by moving the table, and the correction can be made by contacting the retaining piece of the retainer moving following the table and after the contact. Since the retainer is pulled by the table, the impact at the time of contact can be reduced, the slippage can be corrected without applying an excessive force to the locking piece or the retainer, and the deformation of the retainer can be prevented. In addition, the displacement correcting mechanism merely provides inward locking pieces at both ends of the retainer, so that the structure is simple, and the locking pieces are formed by bending the both ends of the retainer inward or by using a fixing means such as welding. Can be easily manufactured.

FIG. 6 is a plan view and a side view of a main part showing a second embodiment of the present invention.

In this embodiment, as in the first embodiment, in addition to providing the locking pieces 12C 'at both ends of the retainer 12C, a buffer spring is provided at both ends of the linear guide 12B on the table 1 side in opposition to the locking pieces 12C'. 15 were provided. According to this embodiment, the first
In the case of performing the automatic displacement correction similar to the embodiment, the locking piece 12C 'is connected to the first linear guide 1 via the buffer spring 15.
2B, the linear guide 12B
Can further relieve the shock when it comes into contact with the locking piece 12 ', and can surely prevent the deformation of the locking piece and the retainer, so that the displacement correcting force is always constant.

In the above-described embodiment, the locking piece and the first linear guide end face are brought into contact when correcting the retainer misalignment, but the locking piece and the table end face on the first linear guide side are contacted. The same effect can be obtained even when a part is brought into contact.

[0046]

As described above, according to the present invention, the retainer automatic displacement correcting mechanism is constituted by the locking piece provided on the retainer side of the roller guide mechanism, thereby simplifying the structure and reducing the impact given to the retainer. It is possible to provide a highly reliable moving table device which enables smooth and smooth displacement and excellent functions of both prevention and correction of the displacement of the retainer.

[Brief description of the drawings]

FIG. 1 is a plan view of a moving table device according to a first embodiment of the present invention.

FIG. 2 is an enlarged plan view of a portion A in FIG. 1 and a side view thereof.

FIG. 3 is an explanatory diagram of an operation of correcting a retainer misalignment showing a part of the embodiment.

FIG. 4 is an explanatory view showing the overall configuration of the embodiment.

FIG. 5 is a perspective view of the embodiment.

FIG. 6 is a partial plan view and a side view showing a second embodiment of the present invention.

FIG. 7 is a plan view showing a conventional example of a moving table device.

8 is an enlarged plan view of part A in FIG. 7 and a plan view thereof.

FIG. 9 is a plan view showing another conventional example of the moving table device.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Top table, 2 ... Intermediate table, 3 ... Fixed base, 11, 12 ... Roller guide mechanism, 11A, 12A ...
2nd linear guide, 12B ... 1st linear guide, 11
C, 12C: retainer, 11D, 12D: roller, 11
C ', 12C' ... locking pieces.

──────────────────────────────────────────────────続 き Continued on front page (58) Field surveyed (Int.Cl. ⁶ , DB name) H01L 21/027 H01L 21/68

Claims (5)

(57) [Claims] 1. A linear guide between a first linear guide provided on a table capable of controlling linear movement and a second linear guide provided on another table or base on which the table is mounted. In a moving table device including a retainer holding a movable roller, the retainer is provided at both ends in the moving direction thereof with an end surface of the first linear guide or an end surface of a table on a first linear guide side. When there is a relative displacement between the table on the first linear guide side and the retainer, the actual moving range of the table (table) depends on the amount of the displacement. Range that can be moved during use)
A moving table device comprising a retainer automatic deviation correcting mechanism configured to be in contact with a first linear guide end surface or a table end surface on the first linear guide side inside and outside of the device. 2. The moving table device includes: a fixed base; an intermediate table mounted on the fixed base; a top table mounted on the intermediate table; A table drive mechanism for moving, a second surface provided on an upper surface of the intermediate table on a lower surface of the top table.
A first linear guide corresponding to the first linear guide is provided on the lower surface of the intermediate table on the upper surface of the fixed base.
請 the first linear guide linear guide in the corresponding are arranged respectively, the first of these, the second linear guide retainer provided with the locking piece between, characterized in that are interposed
The moving table device according to claim 1 . 3. A pre-Symbol retainer is used as a cross roller type, the ratio of the amount of movement between the said first straight line guide side of the table retainer 2: characterized in that it is a 1 請
The moving table device according to claim 1 or claim 2 . 4. A front Symbol by moving the first straight line guide side of the table to the actual table moving range claims, characterized in that it comprises means for automatic displacement correction of periodic retainer
The moving table device according to any one of claims 1 to 3 . 5. Before Symbol buffer spring provided at both ends or both ends of the first linear guide side table of the first linear guide, the locking piece of the first when the retainer deviation corrected through the buffer spring The linear guide is set so as to indirectly contact one end of the linear guide or one end of the first linear guide.
The moving table device according to any one of claims 1 to 4 .