JP2760150B2 - Dry thin film processing equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a dry process of an ECR method used in a super LSI film forming process which requires low temperature film forming especially in a semiconductor manufacturing device represented by an LSI manufacturing device. According to the thin film processing apparatus, as a configuration of the apparatus, a microwave oscillator, a microwave waveguide,
A microwave three-dimensional circuit comprising a pass-type resonator having a microwave inlet on one side and an opening for dissipating microwaves on the other side facing the inlet is provided. A dry thin film in which the gas introduced into the through-type resonator is turned into plasma by the interaction between the magnetic field and the alternating electric field of the microwave inside the chamber, and this plasma is used to perform thin film processing such as film formation or etching on the substrate. It relates to a processing device.

[Conventional technology]

In order to improve the film quality in low-temperature film formation, a CVD and etching apparatus using ECR (Electron Cyclotron Resonance) plasma using a resonance effect of a microwave and a magnetic field has been studied. The apparatus shown in FIG. 9 is an example of such an apparatus, in which a microwave inlet 3A and an opening facing the microwave inlet 3A are provided.
Pass-through resonator with 3B (hereinafter simply referred to as resonator)
The plasma generation chamber 3 and the processing chamber 5 communicating with the plasma generation chamber through the opening 3B are evacuated and the carrier gas such as N ₂ , O ₂ , Ar, etc. is supplied to the plasma generation chamber 3 according to the purpose. The microwave is sent from the microwave oscillator 10 through the waveguide 1 and the microwave introduction window 2 to the place where the plasma raw material gas has flowed. An excitation solenoid 6 is provided outside the plasma generation chamber 3.
Is disposed, and a magnetic field that satisfies the ECR condition is generated inside the plasma generation chamber 3, an ECR plasma is generated. When this plasma is extruded into the processing chamber 5 and a silane gas is sent into a space toward the substrate table 7 and the gas is activated by the plasma, the substrate 8 is activated by the generated active species.
A silicon-based thin film is formed on the surface of the substrate.

In such ECR type dry thin film processing equipment,
In general, the plasma generation chamber itself constitutes a microwave resonator, and the microwave inlet 3A of the resonator is used as a means for injecting microwaves into the resonator and for evacuating the resonator. A microwave introduction window (hereinafter also referred to as a window material) 2 is hermetically closed using an O-ring 9, and a housing 4 for holding the microwave window material 2.
Is screwed and fixed to the resonator, whereby the window material 2 is press-fitted to the O-ring 9, and the inside of the resonator 3 is hermetically sealed from the atmosphere. A microwave waveguide 1 for introducing microwaves into the resonator 3 includes a waveguide portion 1C formed integrally with the microwave window material fixing housing 4 and also serving as a support portion of the flange 4a, and a microwave waveguide portion 1C. Flange 10a on the side of the wave oscillator 10
Waveguide part 1A, which also serves as a support part, and these waveguide parts
It has a configuration in which a waveguide portion 1B located in the middle of 1C and 1A is connected to each other via a flange, while the resonator 3 is fixed by screwing to a processing chamber 5 on the opposite side of the microwave waveguide. Such a configuration is generally used.

A microwave three-dimensional circuit having the configuration shown in FIG. 10 is generally used. The microwave oscillator 10, an isolator 50 that passes microwaves in only one direction and absorbs reflected waves from a load, and a microwave A bidirectional coupling unit 51 that sends a traveling wave and a reflected wave toward respective loads, and an EH that receives a traveling wave from the microwave oscillator 10 and creates a reflected wave of an arbitrary amplitude and phase and superimposes the reflected wave from the load.
A device such as a tuner 52, a waveguide 1D called a corner, which bends the path of microwaves, a waveguide 1, and a pass-type resonator 3 are provided. In order to prevent microwaves from leaking from the joints, the flanges 55 formed at the ends of the circuit elements in the microwave traveling direction are all fastened using a plurality of bolts to prevent microwave leakage from the joints between the equipment and the waveguide. This is done by a rigid connection.

[Problems to be solved by the invention]

In the ECR type dry thin film processing apparatus configured as described above (hereinafter simply referred to as an apparatus), a source gas activated by plasma generated in a resonator / plasma generation chamber when forming a thin film on a substrate surface (described above). In this example, silane gas adheres to the substrate stage, the inner wall of the processing chamber, the inner wall of the resonator, and the microwave introduction window to form a thin film. When the adhered thin film is peeled off, debris that contaminates the thin film formed on the substrate is generated. Since the transmission state changes and problems such as a large variation in the film thickness distribution occur, the apparatus needs to be periodically cleaned. In mass production equipment, it is extremely important to improve the productivity by minimizing the downtime of the equipment by minimizing the time required for disassembling and reassembling the equipment for cleaning. is there. In addition, the device may be caused by forgetting to tighten the screws that may occur at the time of reassembly, misalignment of each waveguide portion, misalignment of the waveguide portion with the microwave introduction port, misalignment of the axis between the resonator and the excitation solenoid, etc. It is also important to prevent performance degradation and ensure reproducibility of device performance. However, in the device configuration according to the prior art, the microwave waveguide that is first required when cleaning the device is required for disassembly.
It is necessary to remove the bolts fastening the flanges at both ends of each waveguide part one by one while supporting the removed waveguide part so as not to fall down. It is necessary to move the device to a position that does not interfere with the subsequent dismantling work. Further, in order to remove the resonator, it is necessary to lower the excitation solenoid after the above-described waveguide removing operation and remove the fixing bolts with the processing chamber one by one. However, the weight of the resonator was 10 kg or more, and removing it so as not to drop it required two-person work or another removal jig, which required labor and time. In addition, degradation of device performance due to forgetting to tighten screws during reassembly, misalignment between waveguide parts, misalignment between waveguide part and microwave inlet, misalignment between resonator and excitation solenoid, etc. However, there is a problem that the fear is not removed.

Also, if all the joints of the microwave three-dimensional circuit straight line from the microwave oscillator to the corner are rigidly connected, the straight part is short and compact, but only the target equipment will be removed during maintenance work However, the target device cannot be removed unless at least the corner and one or a plurality of devices on the corner side are removed, which requires labor and time for removal and reassembly. . In addition, there is a possibility that the performance of the apparatus may be deteriorated due to a positional deviation between the apparatuses and a corner between the apparatuses during reassembly.

An object of the present invention is to separate and move a microwave waveguide from a resonator for microwave introduction windows and resonator cleaning, and to separate a resonator from a processing chamber, and to perform recombination after cleaning. It does not require much labor and time, and it is easy to inspect the circuit elements such as the equipment constituting the linear range of the microwave three-dimensional circuit from the microwave oscillator to the corner, and to check the performance of the equipment. An object of the present invention is to provide a configuration of a microwave three-dimensional circuit having no problem in ensuring reproducibility.

[Means for solving the problem]

In order to solve the above problems, in the present invention, the linear range of the microwave waveguide extending in the axial direction of the introduction port from the microwave introduction port of the through resonator to the outside of the through resonator extends in the longitudinal direction. The microwave waveguide is provided with a pass-through resonator-side waveguide and a microwave oscillator-side waveguide having different diameters that can be extended and retracted in an appropriate position within the linear range in the longitudinal direction so as to be expandable and contractible. And the microwave-oscillator-side waveguide is divided into two in the longitudinal direction.
The pass-through resonator side of the divided microwave oscillator-side waveguide shall be pivotally supported by the microwave oscillator side around the division point, and a more preferable configuration of the microwave waveguide according to this configuration will be described. A pass-type resonator side end of the pass-type resonator-side waveguide is provided with a housing for holding a microwave introduction window made of a dielectric, which hermetically closes a microwave introduction port of the pass-type resonator. It is assumed that the housing is formed as a vacuum chuck that is adsorbed on the wall around the microwave introduction port of the through-type resonator.

In addition, the dry thin film processing apparatus in which the waveguide is configured as described above has an apparatus configuration in which a magnetic field inside the through-type resonator is formed by surrounding the through-type resonator with an exciting coil, and A base plate having a screw rod for moving the coil in the axial direction and supporting the pass-type resonator and the exciting coil so that their axes coincide with each other; and a vertical moving means for moving the base plate in the vertical direction. It is assumed that the resonator and the exciting coil are formed as a device which is guided by a rail on which the vertical moving means is mounted and can be pulled out in the horizontal direction.

In addition, a device in which the linear range of the microwave resonator on the side of the pass-through resonator can be expanded and contracted is used in a three-dimensional microwave circuit extending from the dividing point of the waveguide on the microwave oscillator side to the microwave oscillator. A device in which a stretchable waveguide configured to be insertable and retractable using waveguides having different diameters so as to be able to expand and contract in the longitudinal direction is interposed in series with a microwave three-dimensional circuit portion extending linearly from the oscillator. This is more preferable. In this case, the linear range of the microwave waveguide on the side of the pass-type resonator and the linear range of the three-dimensional circuit on the side of the microwave oscillator are included.
In the waveguides having different diameters, the insertion / removal portion of the large-diameter waveguide surrounds the waveguide at the end of the waveguide along the peripheral wall of the waveguide and is perpendicular to the longitudinal direction of the waveguide. It is preferable to use a choke structure in which a rectangular groove having a depth in the plane direction of 1/4 wavelength of the microwave and open to the inside of the waveguide and having a rectangular cross section is formed.

Further, in the device provided with the extendable microwave waveguide, the waveguide constituting the microwave three-dimensional circuit, EH
The coupling between the components such as the tuner and the circuit elements such as the microwave oscillator is determined by the insertion / removal part of the waveguide, the division point of the waveguide on the microwave oscillator side, and the coupling between the through resonator and the housing at the end of the waveguide. Except for the flange, the peripheral edge of the circuit element body is formed in a disc shape with the surface direction perpendicular to the microwave traveling direction at the end of the microwave traveling direction of the circuit element body, and the peripheral edge of the circuit element body side of the disc is formed in a conical shape. Two arms formed in an arc shape and formed on the inner peripheral side of the arc with a triangular groove or a trapezoidal groove which is open on both sides and which is in full contact with the conical surface of the flange on the side wall with the entire length of the arc; A quick coupling comprising a connecting piece for pivotally supporting the two arms at the same ends with the inner peripheral side of the arc facing each other, and a fastening member for fastening the other ends of the two arms to each other; It is preferable that the processing be performed using

[Action]

The present invention is directed to a micro-decomposition system in which the ratio of the time taken to disassemble and move the microwave waveguide to the time required for disassembly and reassembly for cleaning or replacement of parts regularly or occasionally is not negligible. Wave waveguides are constructed by connecting partial waveguides with flanges at both ends to each other with bolts.
It focuses on points that were overlooked without being subject to dismantling or moving time reduction. However, if the microwave waveguide is configured as described above, the pass-through resonator side of the microwave oscillator-side waveguide divided into two is pivotally supported around a division point in a horizontal plane, so Even in the case where the housing holding the wave introduction window is fixed to the resonator with bolts in the same manner as in the conventional case, the side of the microwave-oscillator-side waveguide divided into two, on the side of the heavier pass-type resonator, The bolt can be removed without supporting it, and after the bolt is removed, the waveguide on the side of the pass-type resonator provided with the housing at the end is slid into the waveguide on the microwave oscillator side. The length of the resonator-side linear range can be shortened so that the resonator side of the two-divided microwave oscillator-side waveguide can be swung in a horizontal plane so as not to come into contact with the excitation solenoid. Disassembly and movement of waveguide Re move the work corresponding to the re-assembling operation can be carried out very easily and in a short time in workers alone. Furthermore, by configuring the housing holding the microwave introduction window as a vacuum chuck, the separation of the housing from the resonator is
After the inside of the resonator is returned to the atmospheric pressure, it becomes possible only by stopping the evacuation of the front surface side of the suction surface of the vacuum chuck, and the time required for separation is further reduced. Also, when re-attaching the detached housing to the resonator, the air on the front side of the suction surface of the vacuum chuck is sucked out like a vacuum cleaner, and the housing is supported by hand and brought close to the microwave inlet of the resonator, It is performed only by bringing the wave introduction window into contact with the sealing material around the microwave introduction port, and the mounting operation is completed in a short time.

On the other hand, since the resonator is supported by a common base plate together with the exciting coil, the resonator is removed by operating the vertical moving means, and then the rail on which the vertical moving means is placed is mounted. This is performed by moving the upper part in the horizontal direction together with the vertical moving means. Reassembly of the resonator and the processing chamber is performed by moving the removed resonator on the rail together with the vertical moving means to bring it directly below the processing chamber, and operating the vertical moving means to raise the base plate. Will be Since the resonator is supported by the base plate, the joining surface of the resonator is brought into contact with the joining surface of the processing chamber in a pressed state while deforming the sealing material to the joining surface of the processing chamber through the base plate by means of the up and down moving means, thereby fastening bolts and the like. The assembly state can be maintained in an airtight manner without using any members, and the time required for removing and reassembling the resonator is greatly reduced. Also, the amount of lowering of the base plate when the resonator is removed should be small enough to avoid the height of the positioning pin implanted on the joint surface of the processing chamber and for aligning the axis of the processing chamber and the resonator. The vertical moving means does not require much height in the axial direction of the device, and can easily remove and reassemble the resonator without increasing the size of the device. Further, since the base plate supports the resonator and the exciting coil so that their axes are aligned with each other, there is no possibility that the axes of both will be shifted after reassembly.

In addition, a device in which the linear range of the pass-through resonator resonator-side microwave waveguide is formed to be expandable and contractible is used in a microwave three-dimensional circuit extending from the division point of the microwave oscillator-side waveguide to the microwave oscillator. In the microwave three-dimensional circuit portion extending linearly from the microwave oscillator, a stretchable waveguide configured to be insertable and removable using waveguides having different diameters so as to be able to expand and contract in the longitudinal direction is interposed in series. In the case of the device, by sliding the waveguides having different diameters relative to each other in the longitudinal direction, of the circuit elements constituting the linear microwave three-dimensional circuit, only the circuit element of interest,
Other circuit elements can be easily removed without removing them from the microwave three-dimensional circuit, and re-attachment becomes easy.

In this case, the linear range of the pass-through-type resonator-side microwave waveguide and the linear range of the microwave-oscillator-side three-dimensional circuit are included. The insertion / removal part of the waveguide, at the end of the waveguide, surrounding the waveguide along the peripheral wall of the waveguide, the depth in the plane direction perpendicular to the longitudinal direction of the waveguide is 1/4 wavelength of microwave However, if the choke structure is formed with a rectangular cross-section groove open to the inside of the waveguide, the microwave that enters the gap between the fitting portions of both waveguides has a width that is smaller than the size of the gap. An amount that is approximately proportional to the ratio of the gap to the groove width enters the remarkably large groove, is reflected by the bottom of the groove at a depth of 1/4 wavelength of microwave, and is shifted by 1/2 wavelength to the entrance of the groove. The phase of the arrival and arrival is superimposed on the microwave having the opposite phase to the reflected wave,
A ring-shaped conductor provided to close the gap between the two waveguides at the end face of the insertion / removal part of the large-diameter side waveguide by canceling out most of the microwaves entering the gap between the two waveguides. The temperature rise of the shield material is suppressed only by increasing the temperature of the conductive shield material, and therefore, by suppressing the gap between the two waveguides to a range that can be easily manufactured in the waveguide, the temperature rise of the shield material is suppressed,
The shield material can maintain the function of preventing microwave leakage without reducing its elasticity, and can prevent a decrease in microwave transmission efficiency despite the relatively movable coupling structure due to insertion and removal. In addition, the coupling between circuit elements such as waveguides, EH tuners, etc., which constitute a microwave three-dimensional circuit, microwave oscillators, etc., is connected to the insertion / removal part of the waveguide, the split point of the waveguide on the microwave oscillator side, and the passage. Except for the joint between the resonator and the housing at the end of the waveguide,
By using the flange coupling using the quick coupling, the release and reconnection of the flange connection are performed by attaching and detaching one fastening member, and the detachment and reattachment of the circuit element from the microwave three-dimensional circuit can be quickly performed. It can be carried out. In addition, the misalignment of the two flanges at the time of reattachment is corrected together with the fastening process of the fastening member by the self-aligning action caused by the contact between the conical surfaces of the two flanges and the triangular groove or the trapezoidal groove side wall of the arc-shaped arm. A decrease in device performance due to the coupling is prevented.

As described above, according to the present invention, the time required for the operations corresponding to the disassembly, movement, re-movement, and re-assembly operations of the conventional microwave waveguide and resonator is greatly reduced, and the linear movement from the microwave oscillator is reduced. The circuit elements constituting the microwave three-dimensional circuit part extending in the shape can be easily attached and detached, and the effect of improving the productivity based on shortening the downtime of the mass production apparatus is remarkable. In addition, since these operations are performed without dismantling the waveguide, there is no forgetting to tighten bolts or misalignment between the waveguides, and the quick coupling is not used in the flange coupling portion using the quick coupling. The self-aligning action of the ring corrects the misalignment of both flanges. In addition, there is no displacement between the resonator and the excitation coil because the resonator and the excitation coil are supported on a common base plate so that their axes coincide with each other. Can be secured at the same time.

〔Example〕

FIG. 1 shows a first embodiment of the configuration of a dry thin film processing apparatus according to the present invention. FIG. 2 is a detailed view of a portion A in FIG. 1,
FIG. 3 shows a cross section along the line BB of FIG. In these figures, the same members corresponding to FIG. 9 are denoted by the same reference numerals.

As shown in FIG. 1, the microwave waveguide according to the present invention has a waveguide portion 11C provided with a housing 14 at the joint end with the resonator 3, and can be inserted into and removed from the waveguide portion 11C. It is composed of a waveguide portion 11B formed to have a larger diameter than the waveguide portion 11C, and a waveguide portion 11A on the microwave oscillator side, which is hinged to the waveguide portion 11B.
The housing 14 is formed as a vacuum chuck, and has a ring-shaped groove on the suction surface of the resonator 3 on which the air is evacuated, as shown in FIG. 14a and a ring-shaped groove 14 into which a sealing material such as an O-ring is fitted inside and outside the groove 14a.
b, 14c are formed. The groove 14a and the vacuum source 15 having a vacuum pump are connected by a flexible tube.

In the insertion and removal part of the waveguide part 11C and the waveguide part 11B,
In this embodiment, a shield material 10 (FIG. 2) is embedded in a ring-shaped groove formed inside a large-diameter waveguide portion 11B to prevent microwaves from leaking outside the waveguide. ing. For the shield material 10, a braided conductor made by softly knitting a thin metal wire is used, and even if the waveguide portions 11C and 11B are eccentric to each other, they are electrically connected all around via the shield material. I have.

On the other hand, the constant connection between the waveguide portion 11B and the waveguide portion 11A is achieved by fixing the opposing surfaces of the hinged flanges 17, 16 using members 19, 20, 21 as shown in FIG. This is performed by making contact with the screw 18. At the time of cleaning the device, the fixing screw 18 is removed, and the waveguide portion 11B is turned around the pin 21 in a horizontal plane as indicated by a chain line. Where the flange
In the state where the opposing surfaces 17 and 16 are abutted by the fixing screw 18, a gap is generated on the pin 21 side that is inevitable in terms of machining accuracy, and microwaves leak from the gap, so in order to prevent this leakage, A ring-shaped groove having a depth about several times the maximum gap of the facing surface is formed in each facing surface.

Maintenance work for cleaning or replacing the microwave introduction window 2 and the resonator 3 with a new one in the ECR type dry thin film processing apparatus having the microwave waveguide configured as described above is performed as follows. First, the internal space between the processing chamber 5 and the resonator 3 is returned to the atmospheric state. Next, the groove 14a of the housing 14 (the second
(Fig. 1) is communicated with the atmosphere, the operation of the vacuum source 15 is stopped, and the housing 14 and the window material 2 are joined together to form the waveguide section 11B.
Is lowered as a guide. After the descent, the waveguide portion 11B,
When the fixing screw 18 holding the flange of 11A (FIG. 3) in a contact state is removed, the waveguide portion 11B is horizontally turned around the pin 21 to the outside of the excitation solenoid 6 together with the waveguide portion 11C. The window member 2 can be easily taken out.

FIG. 4 shows a second embodiment of the present invention. This embodiment shows an embodiment of the present invention which is directed to an apparatus provided with the microwave waveguide having the configuration according to the embodiment of the present invention shown in FIG. In the figure, the same members as those in FIG.

Base plate supporting resonator 3 and exciting coil 6
A hole having an inner diameter substantially equal to the outer diameter of the body of the resonator 3 is formed in the center of the hole 25, and a plurality of positioning pins 27B are implanted on a pitch circle surrounding the hole. On the other hand, on the lower surface of the flange extending radially outward from the outer peripheral edge of the upper end surface of the resonator 3, a pitch circle centered on the axial position of the resonator 3 and having the same diameter as the pitch circle of the positioning pins 27B is provided. A counterbore hole into which the positioning pin 27B is fitted in a substantially static state is formed, and the resonator 3 is supported by the base plate 25 via the positioning pin 27B. In the base plate 25, a plurality of holes having a center on a pitch circle concentric with the pitch circle outside the pitch circle of the positioning pins 25B are further formed,
A bearing 30 that supports a screw rod 29 in this hole so that it can rotate around its axis.
Is press-fitted. The screw rod 29 is formed on the boss 32a of the flange 32 to which the exciting coil 6 is attached, and is screwed into the screw. When one of the plurality of screw rods 29 is rotated, the rotation is performed by the belt 31. Are transmitted to the other screw rods via the shaft, and the simultaneous rotation of these screw rods causes the exciting coil 6 to move in the axial direction to reach the optimum relative position with respect to the resonator 3. The exciting coil 6 is attached to the flange 32 such that its axis coincides with the axis of the pitch circle of the positioning pin 27B.

The base plate 25 supporting the resonator 3 and the exciting coil 6 in this manner is driven by a drive mechanism 26A including an electric motor and a speed reduction mechanism to move up and down by the rotation of a screw rod 34 that is rotationally driven via a belt 33. It is driven up and down via a column 36 erected on a plate 35. The vertical movement means 26 including the drive mechanism 26A, the belt 33, the screw rod 34, and the drive plate 35 is provided with a slide piece 38 on the lower surface of the substrate 37.
, And can be moved in the horizontal direction by being guided by the linear slide rail 28.

When removing the resonator 3 from the processing chamber 5 fixed to the pedestal above the apparatus, the waveguide composed of the waveguide portions 11A, 11B, and 11C is separated from the resonator 3, and then the drive of the vertical moving means is performed. The screw rod 34 is rotationally driven by the mechanism 26A to lower the drive plate 35, and the resonator 3 is lowered together with the exciting coil 6 via the support 36 and the base plate 25. The upper surface of the resonator 3
When the positioning pin 27A implanted on the lower surface of the processing chamber 5 has been lowered by an amount that allows the projecting height to be changed, the power of the driving mechanism 26A is turned off and the lowering drive is stopped. The slider is slid in a horizontal direction on the linear slide rail 28 in a mounted state.

Reassembly of the resonator 3 is performed in the reverse order. During reassembly, the resonator 3 and the exciting coil 6 share a common base plate.
Since they are supported coaxially with 25, they do not shift during reassembly. Since the resonator 3 is supported by the base plate 25, the base plate 25 is raised by a vertical movement mechanism to compress and deform the O-ring 9 on the upper surface of the resonator 3 while pressing the upper surface to a lower surface of the processing chamber 5. , The reassembly is completed in a short time without the need for a fastening operation using bolts or the like. Then, by coupling the waveguide 11 (FIG. 1) to the resonator 3, the reassembly below the processing chamber 5 can be completed by one operator in a short time.

FIG. 5 is an enlarged view of part A of FIG. 1 and another enlarged view from FIG. 2, and FIG. 6 is an enlarged view of part D of FIG. As shown in the enlarged view of FIG. 6, the large-diameter waveguide, that is, the waveguide portion 11B
At the end of the waveguide section 1/4 wavelength of microwave
A bag flange 12 having a choke structure in which a ring-shaped groove 12a having a shape along the peripheral wall of 1B is formed is joined. On the upper surface of the bag flange 12, a ring-shaped shield 13a made of a braided conductor in which a fine metal wire is softly knitted is provided on the waveguide portion 1.
It is held down by the holding bracket 13 so as to hit the entire outer circumference of 1C. By configuring the large-diameter-side waveguide end portion in this way, the microwaves that have entered the gap between the fitting portions of the two waveguides enter a groove whose width is significantly larger than the size of the gap.
The amount of intrusion that is almost proportional to the ratio between the gap and the groove width, is reflected at the bottom of the groove at a depth of 1/4 wavelength of the microwave, and reaches the entrance of the groove after 1/2 wavelength, the instantaneous phase of arrival Is superimposed on the microwave having the opposite phase to the reflected wave, cancels out most of the microwaves that have entered the gap between the two waveguides, and the remaining small portion only increases the temperature of the ring-shaped shield 13a, and therefore As in the microwave leakage prevention structure shown in FIG. 2, the size of the gap at the fitting portion is adjusted by the size of both waveguide portions 11B and 11C.
The size of the shield material can be reduced as much as possible in the manufacture of the waveguide without reducing the accuracy to fit in a nearly mated state, and the shield material can reduce its elasticity. The contact with the waveguide portion 11C can be continued without reduction, and the function of preventing microwave leakage can be maintained.

FIG. 7 shows a third embodiment of the configuration of the dry thin film processing apparatus according to the present invention. This embodiment differs from the microwave solid-state circuit on the microwave oscillator side including the waveguide portion 11A in the dry thin film processing apparatus according to the embodiment of FIG.
It is intended for the configuration of a microwave three-dimensional circuit portion extending linearly from 10. Among the devices such as the isolator 50, the bidirectional coupler 51, and the EH tuner 52 that make up this linear microwave three-dimensional circuit part, a telescopic conductor that can expand and contract in the longitudinal direction is located next to the EH tuner 52 that has the highest maintenance frequency. Wave tubes 53 are interposed in series. This telescopic waveguide 53 is configured to be insertable and removable by using two waveguides having different diameters, as in the case of the waveguide portions 11B and 11C shown in FIG. The insertion / extraction portion of the waveguide is formed in a microwave leakage preventing structure as shown in FIG. In this way, by interposing the expandable waveguide in series with the linear microwave three-dimensional circuit portion, it is possible to easily remove only the target device among the devices constituting the microwave three-dimensional circuit portion, Also, re-attachment becomes easy.

FIG. 8 is a sectional view of the waveguide insertion / removal portion and the splitting point of the waveguide on the side of the microwave oscillator (the waveguide portions 11A and 11B in FIG. 3) in the dry thin film processing apparatus having the structure shown in FIG. An example of the coupling structure between circuit elements excluding the coupling between the pass-type resonator and the housing at the end of the waveguide is shown below. The figure shows the structure of the coupling portion E between the EH tuner 52 and the large-diameter side waveguide of the telescopic waveguide 53, that is, the waveguide portion 53B in FIG. 7, but the other coupling portions have the same coupling structure. It is.

As shown in FIG. 8 (a), a disc-shaped flange 52A having a surface direction perpendicular to the microwave traveling direction is joined to the end of the EH tuner 52 main body in the microwave traveling direction, and the disc is placed on the EH tuner main body side. The periphery is formed in a conical shape. Also, a disc-shaped flange 53A is joined to an end of the waveguide portion 53B in the microwave traveling direction, and the periphery of the waveguide portion 53B is formed in a conical shape. And, as a connecting member for rigidly connecting the flanges 52A, 53A, as shown in FIG. 3B, two arc-shaped arms 54C, a connecting piece 54B, and a wing nut 54A are constituted as main members. A quick coupling 54 is used. The arm 54C has a trapezoidal groove having a cross section as shown in FIG.
Two 54Cs are connected so that they can swing around the fulcrum of the connecting piece via the connecting piece 54B with the inner peripheral sides facing each other, and the flanges 52A, 53A are mounted on both sides by the two arms 54C. By pinching and tightening the wing nut 54, the flange 52A,
53A receives the pressing force by the wedge action via the peripheral conical surface, and is firmly connected. At this time, even if the two flanges are misaligned, the misalignment is automatically corrected as the wing nut is tightened. And the unbinding and reunion of this
It is possible by attaching and detaching one wing nut without requiring a plurality of bolts, nuts and the like as in the prior art.

〔The invention's effect〕

In the present invention, since the dry thin film processing apparatus is configured as described above, the following effects can be obtained.

In the apparatus according to the first aspect, the maintenance work of the microwave introduction window made of a dielectric and the passage type resonator for closing the microwave introduction port of the passage type resonator in an airtight manner can be performed in a short time without dismantling the waveguide. In addition to improving the productivity of the device, the device performance is prevented from being reduced due to forgetting to tighten bolts when the waveguide and the resonator are re-coupled after the maintenance work and misalignment between the waveguide portions. The reproducibility of the device performance has been secured.

In the device according to the second aspect, separation of the resonator from the waveguide for shortening the length of the resonator-side linear range of the waveguide and recombination after the maintenance work are easier and shorter. This makes it possible to complete the recovery operation of the apparatus in a short time even in the event of a sudden accident during operation of the apparatus (for example, breakage of the microwave introduction window).

In the apparatus according to the third aspect, the assembly state of the resonator and the processing chamber is maintained by abutting and holding the bonding surface of the resonator against the bonding surface of the processing chamber via the base plate in a pressed state. A fastening member such as a bolt for connecting the chamber and the resonator is not required, and the lower plate can be immediately driven to lower when the resonator is removed. In order to make the axes of the resonator and the processing chamber coincide with each other, it is only necessary to implant a positioning pin on one of the joining surfaces of the two. Therefore, the base plate is lowered by an amount that replaces the height of the positioning pin. Then, the vertical movement means can be moved horizontally. For this reason, the vertical moving means does not require a very high height, and the removal and reassembly of the resonator can be easily and quickly performed by one worker without increasing the size of the apparatus. Moreover, since the resonator and the excitation coil are supported coaxially on a common base plate,
During reassembly, there is no risk that the axes of the two will shift, and reproducibility of the device performance can be reliably achieved.

As described above, the non-disassembly-separable structure of the microwave waveguide, the vacuum chucking of the end of the resonator in this structure, and the support of the resonator and the excitation coil are shared, and the support is vertically By applying the structure of the vertical moving means for moving in the horizontal direction to a mass production device, the productivity of the device is further improved and the labor of the operator is further reduced. This effect can be obtained without significantly complicating the structure of the waveguide, and without increasing the size of the device including the vertical moving means.

In the device according to the fourth aspect, during maintenance of the linear microwave three-dimensional circuit portion, only the target circuit element can be removed from the circuit components constituting the circuit portion, and the operation rate of the device is further improved.

In the apparatus according to the fifth aspect, the size of the gap between the insertion / removal portion between the large-side waveguide and the small-side waveguide is suppressed to a range that is easily possible in the manufacture of the waveguide. The microwave leakage prevention function can be stably maintained without overheating the ring-shaped shield member provided for closing the antenna. In addition, due to the stable microwave leakage prevention function of this structure, it is possible to easily expand and contract the structure by inserting and removing the large-diameter waveguide and the small-diameter waveguide.

In the apparatus according to the sixth aspect, the release and reconnection of the flange connection are performed by attaching and detaching one fastening member, so that the circuit element can be quickly removed and reattached from the microwave three-dimensional circuit. In addition, the misalignment of the two flanges at the time of reattachment is corrected together with the fastening process of the fastening member by an automatic centering action caused by the contact between the conical surfaces of the two flanges and the triangular groove or the trapezoidal groove side wall of the arc-shaped arm,
A decrease in device performance due to the flange connection is prevented.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view of an ECR type dry thin film processing apparatus showing a configuration of a microwave waveguide according to a first embodiment of the present invention.
FIG. 3 is an enlarged view of a portion A in FIG. 1, and FIG. 3 is a view B in FIG.
FIG. 4 is a sectional view taken along the line B, FIG. 4 is a partial sectional longitudinal sectional view of an ECR dry thin film processing apparatus showing the structure of the vertical moving means of the through-type resonator according to the second embodiment of the present invention, and FIG. Fig. 1 is an enlarged view of part A in Fig. 2 different from Fig. 2, Fig. 6 is an enlarged view of part D in Fig. 5, and Fig. 7 is a dry thin film processing apparatus according to a third embodiment of the present invention. FIG. 8 is an overall configuration diagram of a microwave three-dimensional circuit showing a configuration of a microwave three-dimensional circuit portion linearly extending from a microwave oscillator in the microwave three-dimensional circuit, and FIG. 8 is a microwave three-dimensional circuit according to a fourth embodiment of the present invention. The coupling structure of the coupling between circuit elements excluding the insertion / removal part of the waveguide in the circuit, the hinge coupling part between the waveguides (FIG. 3), and the coupling part between the pass-through resonator and the waveguide end housing are shown. FIG. 2B is a front view of the connecting portion, and FIG.
FIG. 9 is a sectional view taken along the line FF in FIG. 10B, FIG. 9 is a longitudinal sectional view of an ECR type dry thin film processing apparatus showing a configuration example of a conventional microwave waveguide, and FIG. 10 is a dry thin film processing apparatus. 1 is an overall configuration diagram of a general microwave three-dimensional circuit in FIG. 1,11: microwave waveguide (circuit element), 1D, 11D: corner (waveguide, circuit element), 2: microwave introduction window, 3: pass-type resonator, 3A: microwave introduction port, 4,14 : Housing, 6: Excitation coil, 8: Substrate, 10: Microwave oscillator (circuit element), 12a: Groove, 25: Base plate, 26: Vertical moving means,
28: linear slide rail (rail), 29: screw rod, 50: isolator (circuit element), 51: bidirectional coupler (circuit element), 52: EH tuner (circuit element), 53: telescopic waveguide, Five
4: Quick coupling, 54A: Wing nut (fastening member),
54B: connecting piece, 54C: arm.

Claims (6)

(57) [Claims] 1. A pass-type resonator having a microwave oscillator, a microwave waveguide, and an opening for introducing microwaves on one side and an opening for dissipating microwaves on the other side facing the inlet. A microwave three-dimensional circuit comprising:
The gas introduced into the through-type resonator is turned into plasma by the interaction between the magnetic field and the alternating electric field of the microwave inside the through-type resonator, and the plasma is used to form a thin film on a substrate by forming a film or etching. In the dry thin film processing apparatus, the linear range of the microwave waveguide extending in the axial direction of the introduction port from the microwave introduction port of the through-type resonator to the outside of the through-type resonator can be extended and contracted in the longitudinal direction. In addition, the microwave waveguide comprises a pass-type resonator-side waveguide and a microwave oscillator-side waveguide having different diameters which can be inserted and removed in the longitudinal direction at an appropriate position within the linear range. The waveguide on the microwave oscillator side is divided into two in the longitudinal direction, and the waveguide part on the pass-type resonator side of the divided waveguide on the microwave oscillator side is the waveguide part on the microwave oscillator side. Dry film processing apparatus characterized by being pivotally supported pivotable about more division point. 2. A dry-type thin film processing apparatus according to claim 1, wherein a pass-type resonator side end of the pass-type resonator-side waveguide hermetically closes a microwave introduction port of the pass-type resonator. And a housing for holding a microwave introduction window made of a dielectric material, and the housing is formed as a vacuum chuck which is attracted to a wall around a microwave introduction port of the through-type resonator. 3. The dry thin film processing apparatus according to claim 1, wherein a magnetic field inside the pass-through resonator is formed by surrounding the pass-through resonator with an exciting coil. A base plate having a threaded rod for moving in the axial direction and supporting the pass-type resonator and the exciting coil so that their axes coincide with each other; and a vertical moving means for moving the base plate in the vertical direction. A dry-type thin film processing apparatus, wherein a vessel and an exciting coil are guided by a rail on which the vertical moving means is mounted and can be pulled out in a horizontal direction. 4. A dry thin film processing apparatus according to claim 1, wherein the microwave three-dimensional circuit extends from the microwave oscillator side waveguide to a microwave oscillator from a division point of the microwave oscillator side waveguide, and extends linearly from the microwave oscillator. A dry type wherein a stretchable waveguide configured to be insertable / removable using waveguides having different diameters so as to be able to expand and contract in the longitudinal direction is interposed in series in the microwave three-dimensional circuit portion. Thin film processing equipment. 5. A dry-type thin film processing apparatus according to claim 1, wherein the insertion portion of the large-diameter-side waveguide is inserted into waveguides having different diameters which can be inserted and removed in the longitudinal direction. At the end of the waveguide, surrounding the waveguide along the peripheral wall of the waveguide, the inside of the waveguide having a depth of 1/4 wavelength of microwave in the plane perpendicular to the longitudinal direction of the waveguide A dry thin film processing apparatus characterized in that it has a choke structure in which a groove having a rectangular cross section open to the side is formed. 6. The dry thin-film processing apparatus according to claim 1, wherein a waveguide, a device such as an EH tuner, a circuit element such as a microwave oscillator and the like constitute a microwave three-dimensional circuit. Except for the insertion / removal part of the waveguide, the division point of the waveguide on the side of the microwave oscillator, and the coupling part between the pass-type resonator and the housing at the end of the waveguide, the coupling between the microwaves in the circuit element body is At the end of the direction, a flange formed in a disc shape with the surface direction perpendicular to the microwave traveling direction and a peripheral edge of a circuit element body side of the disc formed in a conical shape, and an arc formed in an arc shape Two arms formed with triangular grooves or trapezoidal grooves which are open on both sides and which are in contact with the conical surface of the flange on the side wall substantially the entire length of the arc on the circumferential side, and the two arms are connected to the inner circumference of the arc. A connecting piece pivotally supported at the same side end with the two sides facing each other, and the two Dry film processing apparatus for causing performed using a quick coupling consisting of a coupling member to align tightening the other end comrades arm.