JP2773526B2 - Manufacturing method of thin film thermistor - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to relates easy thin film thermistor manufacturing method of implementation of the thin film thermistor element.

[0002]

2. Description of the Related Art Conventionally, a thin film thermistor of this type has been disclosed in FIG.
As shown in FIG. 2, a pair of electrode films 1 of an element comprising a pair of electrode films 12a and 12b and a temperature-sensitive resistor film 13 such as silicon carbide (SiC) on one surface of a plate-like alumina substrate 11.
A pair of lead wires 4a, 4b such as a thin platinum (Pt) wire (about 0.1 mm in diameter) is connected to 2a, 12b to form a thin-film thermistor element 1. A fired glass coating layer 5 is formed on the thin-film thermistor element 1. Formed and configured [eg, Nagai, etc.
National Technical Report (National T
technical Report) Vol. 29, (1
983)].

[0003] SiC thin film thermistors have excellent heat resistance and resistance-temperature characteristics suitable for detecting a wide temperature range, so that they are practically used in ovens and the like as temperature sensors used in a temperature range of 0 to 500 ° C. Have been. Further, as a pair of lead wires 2a and 2b, P having excellent heat resistance is used.
A t-line and a nickel (Ni) line are used, and a pair of lead wires 4a and 4b are connected to a pair of electrode films 12a and 12b by welding.
Were connected to each other. The connection by the welding method has excellent heat resistance.

[0004]

However, the welding strength is as low as 10 g or less, and the element is small (1.8 mm ×
(6.5 mm x 0.5 mm), so careful attention is required for welding work and subsequent handling. For this reason, there has been a problem that much work time is required and the price is high.

[0005] The fired glass coating layer 5 comprises a pair of electrode films 1.
2a and 12b and the temperature-sensitive resistor film 13 as well as the welded portions of the pair of lead wires 4a and 4b. However, the calcined glass coating layer 5 has a flat alumina substrate 11
If the dew condensation adheres to the surface of the element and the surrounding components when the ends of the electrodes are not completely covered, the pair of electrode films 12a and 12a
There is a problem that insulation between the b and the ground is deteriorated and a malfunction easily occurs.

[0006] The present invention is intended to solve the above problems, easy to handle, and an object thereof is to provide a method for manufacturing a thin-film thermistor which does not malfunction.

[0007]

In order to achieve the above object, a method of manufacturing a thin film thermistor according to the present invention comprises an opening at both ends.
The insulating support provided with one or more recesses formed therein has
Apply glass paste or an organic adhesive, and
Place the element on a glass or organic adhesive, and
The paste or organic adhesive is dried, and one
The thin film thermistor element is connected by connecting the lead wires of
A glass paste is applied around the membrane thermistor element, dried,
It is manufactured through a firing process.

[0008]

According to the present invention, an insulating support having a larger area than a thin-film thermistor element is handled by the manufacturing method described above, and a fired glass coating layer covers the thin-film thermistor element and further covers the surface of the insulating support. Will spread out.

[0009]

Embodiments of the present invention will be described below with reference to the accompanying drawings.

FIG. 1 (a) shows a structure manufactured by the manufacturing method of the present invention.
FIG. 1B is an exploded perspective view of the formed thin film thermistor.
Is a sectional view taken along a line AA ′. The thin-film thermistor element 1 is housed in a recess 3 above an insulating support 2. At this time, the recess 3 extends to the end of the insulating support 2, and both ends are open. In FIG. 1, 1
Although the pair of electrode films 12a and 12b and the temperature-sensitive resistor film 13 are omitted, the thin-film thermistor element 1 has the configuration shown in FIG. Then, as shown in FIG. 1B, a fired glass coating layer 5 is formed.

The insulating support 2 is made of alumina ceramic and has a disk shape of 8 to 10 mm. Also,
The depth of the recess 3 is preferably about the thickness of the thin film thermistor element 1. In this case, the insulating support 2 has an area that is 4 to 6 times as large as the area of the thin film thermistor element 1.
It is clear that handling is easy. Further, during this handling, work such as grasping the thin film thermistor element 1 with tweezers or the like is eliminated, so that it is possible to prevent the surface of the thin film thermistor element 1 from being damaged due to a work mistake. As shown in FIG. 1B, the fired glass coating layer 5 covers the thin film thermistor element 1 and forms an insulating support 2.
It is clear that the thin film thermistor element 1 is completely covered with the fired glass coating layer 5.

Further, as shown in FIG.
It is more preferable that two concave portions 3a and 3b are provided on the upper side and are arranged so as to cross each other. The reason is that when the thin-film thermistor element 1 is housed in the insulating support 2, the intersection of the two acts as a relief for a jig holding the thin-film thermistor element 1. Also, when the fired glass coating layer 5 is formed, the fired glass is formed by the thin film thermistor element 1 and the recess 3a.
Alternatively, it is easy to flow into the minute space between 3b.

When the above-mentioned thin film thermistor is mounted on an oven or the like, it is preferable to fix the thin film thermistor in a metal case 8 composed of a metal plate 6 and metal parts 7a and 7b, as shown in FIG. As shown in the figure, the fixing method may be mechanical caulking using metal parts 7a and 7b, but it is preferable to braze and fix the insulating support 2 and the metal plate 6. The reason is that when brazing is fixed, the thermal resistance between the thin-film thermistor and the metal plate 6 is smaller than that when mechanical fixing is used, so that the thermal response becomes faster.

Next, when manufacturing the above-mentioned thin film thermistor, after applying a glass paste to the concave portion 3 of the insulating support 2, the element is placed on the glass paste, and after drying, the element is dried.
It is preferable to connect the pair of lead wires 4a and 4b. This is because the element and the insulating support 2 are lightly and temporarily bonded by the dried glass paste, and the bonding force fixes the element when connecting the pair of lead wires 4a and 4b, thereby facilitating the operation. . If the element and the insulating support 2 are not adhered with the dry glass paste, the element is likely to fluctuate in the concave portion 3 and the connection work becomes difficult. After the connection of the pair of lead wires 4a and 4b, a glass paste is dropped around the thin film thermistor element 1, dried, and fired, whereby the thin film thermistor element 1 and the insulating support 2 are fixed with sufficient strength for practical use. The thin film thermistor of the present invention is completed. In the above description, a dry glass paste is used for bonding the element and the insulating support 2, but an organic adhesive that burns in air at 200 ° C. or lower may be used. As a result, the element and the insulating support 2 are temporarily bonded, and the pair of lead wires 4a, 4b
Connection work becomes easier. Thereafter, a glass paste is applied around the thin film thermistor 1, and the glass paste is fired at a high temperature of 700 ° C. or more. At this time, the organic adhesive burns and dissipates in the external space. As a result, as described above, the thin film thermistor element 1 and the insulating support 2 are fixed with practically sufficient strength.

[0015]

According to the present invention, the following effects can be obtained.

(1) Since the thin-film thermistor element is housed in the concave portion of the insulating support, subsequent handling becomes easy.

(2) Since the fired glass coating layer covers the thin-film thermistor element and further extends to the surface of the insulating support, malfunction due to deterioration of the insulating property is eliminated.

(3) The thin-film thermistor housed in the metal case is easily mounted. (4) By arranging the element and the insulating support on the glass paste or the organic adhesive, the work of connecting a pair of lead wires becomes easy.

[Brief description of the drawings]

FIG. 1A is an exploded perspective view of a thin film thermistor manufactured by the manufacturing method of the present invention. FIG.

FIG. 2 shows another thin film substrate formed by the manufacturing method of the present invention.
Perspective view of the insulating support of the mister

FIG. 3 is a sectional view of the thin film thermistor .

FIG. 4 is a cross-sectional view of a conventional thin film thermistor.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Thin-film thermistor element 2 Insulating support 3 Depression 5 Fired glass coating layer

────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Shuji Ito 1006 Ojidoma Kadoma, Osaka Prefecture Matsushita Electric Industrial Co., Ltd. (56) References JP-A-63-5002 (JP, A) JP-A-59- 195803 (JP, A) JP-A-63-120233 (JP, A) JP-A-62-113403 (JP, A) JP-A 32-894 (JP, Y1) (58) Fields investigated (Int. Cl. ⁶ , DB name) H01C 7/02-7/22

Claims (1)

(57) [Claims] 1. A glass paste or an organic adhesive is applied to the concave portion of an insulating support having at least one concave portion opened at both ends, and an element is arranged on the glass paste or the organic adhesive. A method of manufacturing a thin film thermistor, comprising drying a glass paste or an organic adhesive, connecting a pair of leads to the element to form a thin film thermistor element, applying a glass paste around the thin film thermistor element, drying and firing.