JP2779583B2 - Liquid crystal display element alignment treatment method - Google Patents
Liquid crystal display element alignment treatment methodInfo
- Publication number
- JP2779583B2 JP2779583B2 JP5159300A JP15930093A JP2779583B2 JP 2779583 B2 JP2779583 B2 JP 2779583B2 JP 5159300 A JP5159300 A JP 5159300A JP 15930093 A JP15930093 A JP 15930093A JP 2779583 B2 JP2779583 B2 JP 2779583B2
- Authority
- JP
- Japan
- Prior art keywords
- frozen
- liquid crystal
- crystal display
- display element
- substrate surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000004973 liquid crystal related substance Substances 0.000 title claims description 20
- 238000000034 method Methods 0.000 title claims description 9
- 239000002245 particle Substances 0.000 claims description 47
- 239000002994 raw material Substances 0.000 claims description 19
- 239000000758 substrate Substances 0.000 claims description 18
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 14
- 229920001721 polyimide Polymers 0.000 claims description 10
- 239000009719 polyimide resin Substances 0.000 claims description 10
- 229910021642 ultra pure water Inorganic materials 0.000 claims description 10
- 239000012498 ultrapure water Substances 0.000 claims description 10
- 238000001816 cooling Methods 0.000 claims description 9
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 7
- 239000001569 carbon dioxide Substances 0.000 claims description 7
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 3
- 238000010348 incorporation Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 20
- 238000012545 processing Methods 0.000 description 12
- 239000007921 spray Substances 0.000 description 8
- 230000005611 electricity Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 230000003068 static effect Effects 0.000 description 6
- 238000007796 conventional method Methods 0.000 description 5
- 238000002347 injection Methods 0.000 description 5
- 239000007924 injection Substances 0.000 description 5
- 229920000642 polymer Polymers 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 239000000428 dust Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 229920000106 Liquid crystal polymer Polymers 0.000 description 2
- 239000004977 Liquid-crystal polymers (LCPs) Substances 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 238000007710 freezing Methods 0.000 description 2
- 230000008014 freezing Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000003507 refrigerant Substances 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 150000001298 alcohols Chemical class 0.000 description 1
- 230000005587 bubbling Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000002657 fibrous material Substances 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000007792 gaseous phase Substances 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000010257 thawing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Liquid Crystal (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、ポリイミド樹脂で構成
される液晶表示素子の基板面に凍結粒を衝突させること
により、これを配向処理させる方法に関するものであ
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention comprises a polyimide resin
Of frozen particles on the substrate surface of the liquid crystal display device
The present invention relates to a method for subjecting this to an orientation treatment.
【０００２】[0002]
【従来の技術】従来の液晶表示素子の配向処理方法とし
ては、一般に、液晶表示素子の基板面をガーゼ等の繊維
体で擦するようにするラビング法（以下「従来法」とい
う）がよく知られている。2. Description of the Related Art A conventional rubbing method (hereinafter, referred to as "conventional method") in which a substrate surface of a liquid crystal display element is rubbed with a fibrous material such as gauze is well known as a conventional alignment treatment method for a liquid crystal display element. Have been.
【０００３】[0003]
【発明が解決しようとする課題】しかし、かかる従来法
では、配向処理時に繊維屑が配向面に付着して、爾後、
その付着物を除去する必要がある。しかも、擦ることに
より静電気が帯電し、配向面下にあるダイオード等の微
細回路が破壊される虞れがある。また、帯電により、ハ
ンドリング時等において、周辺雰囲気中の微塵を吸着す
る虞れがあり、パーティクル汚染が甚だしい。However, in such a conventional method, fiber debris adheres to the oriented surface during the orientation treatment, and thereafter,
It is necessary to remove the deposit. In addition, the rubbing may cause static electricity to be charged, which may destroy a fine circuit such as a diode below the alignment surface. In addition, there is a possibility that fine dust in the surrounding atmosphere may be adsorbed at the time of handling or the like due to charging, and particle contamination is severe.
【０００４】本発明は、このような点に鑑みて、静電気
が発生，帯電することなく、良好な配向処理を行ないう
る液晶表示素子の配向処理方法を提供することを目的と
するものである。SUMMARY OF THE INVENTION In view of the foregoing, it is an object of the present invention to provide an alignment processing method for a liquid crystal display element capable of performing a good alignment processing without generating or charging static electricity.
【０００５】[0005]
【課題を解決するための手段】本発明の液晶表示素子の
配向処理方法にあっては、上記の目的を達成すべく、ポ
リイミド樹脂で構成される液晶表示素子の基板面を１５
０〜２００℃の範囲で一定温度に加熱保持させた状態
で、炭酸ガス又はアルコール類の混入により比抵抗値が
１００ＫΩ・ｃｍ以下となるように調整された超純水を
原料として得られた微細な凍結粒を、当該基板面に所定
の入射角で衝突させることにより、凍結粒の衝突による
基板面の冷却ないし冷却硬化を防止しつつ配向処理する
ようにすることを提案するものである。In order to achieve the above object, the present invention provides a method for aligning a liquid crystal display element.
The substrate surface of the liquid crystal display element composed of
State of heating and holding at a constant temperature in the range of 0 to 200 ° C
In collision ultrapure water resistivity by the incorporation of carbon dioxide or alcohol is adjusted to be equal to or less than 100 K.OMEGA · cm fine frozen particles obtained as the raw material, at a predetermined incident angle to the substrate surface By the impact of frozen particles
Alignment treatment while preventing cooling or hardening of the substrate surface
It is suggested to do so.
【０００６】[0006]
【作用】凍結粒を所定の入射角で基板面に衝突させる
と、その衝突により配向膜面におけるポリマの鎖が再配
列されて溝状に変形して、配向処理される。このとき、
凍結粒は異物を含まない超純水からなるものであるか
ら、繊維等の異物が付着せず、清浄に保たれる。When the frozen particles collide with the substrate surface at a predetermined angle of incidence, the collision causes the polymer chains on the alignment film surface to be rearranged, deformed into a groove shape, and subjected to alignment treatment. At this time,
Since the frozen particles are made of ultrapure water containing no foreign substances, foreign substances such as fibers do not adhere and are kept clean.
【０００７】ところで、超純水の比抵抗値は極めて高い
（１８ＭΩ・ｃｍ程度）ため、超純水からなる凍結粒を
衝突させると、その衝突による摩擦によって静電気が発
生し、従来法による場合と同様の不都合（帯電による塵
埃の吸着，ダイオード等の破壊）を生じる虞れがある。Since the resistivity of ultrapure water is extremely high (about 18 MΩ · cm), when frozen particles made of ultrapure water collide, static electricity is generated due to the friction caused by the collision. A similar inconvenience (dust adsorption due to charging, destruction of diodes, etc.) may occur.
【０００８】しかし、本発明では、凍結粒が炭酸ガス，
アルコール類の混入により比抵抗値を極めて低く（１０
０ＫΩ・ｃｍ以下）調整した超純水を原料としてなるか
ら、凍結粒の衝突により静電気が発生，帯電するような
ことがなく、上記した虞れはない。However, in the present invention, the frozen particles are carbon dioxide,
The specific resistance value is extremely low (10
(0 KΩ · cm or less) Since the adjusted ultrapure water is used as a raw material, static electricity is not generated or charged due to collision of frozen particles, and there is no fear of the above.
【０００９】一方、凍結粒を衝突させた場合には、従来
方法では考えられないような問題が生じ、これを解決し
ない限り、良好な配向処理を行い得ない。すなわち、凍
結粒の衝突による摩擦熱が発生したとしてもこれは凍結
粒による冷熱に相殺されることから、配向膜における高
分子ポリマの鎖が一種の凍結状態となる虞れがあった。
その結果、配向膜の液晶高分子に対する配向規制力が室
温下で行われる従来法に比して弱くなるといった問題が
あった。さらに、凍結粒により配向膜が冷却硬化され
て、凍結粒の衝突による配向処理が効果的に行われない
虞れがあった。 そこで、本発明者は、幾多の実験を繰り
返すことにより、基板面を５０〜２５０℃に加熱保持さ
せた状態で凍結粒を衝突させるようにすれば、上記した
問題を解決できることを究明した。その上で、更に実験
を重ねることにより、配向膜を構成するポリイミド樹脂
の特性（配向性，耐熱性等）を考慮した場合に、凍結粒
を衝突させる場合における基板面の最適温度が１５０〜
２００℃であることを見い出した。 したがって、基板面
を１５０〜２００℃の範囲で一定温度に加熱保持させた
状態で、凍結粒の基板面への衝突を行なうことにより、
上記した問題を生じることなく、凍結粒の衝突による基
板面の冷却ないし冷却硬化を効果的に防止し得て、配向
効果を更に高めることができ、極めて高品質の配向膜を
得ることができるのである。 On the other hand, when frozen particles collide,
There are problems that cannot be considered by
Unless there is a good orientation treatment, it cannot be performed. That is, freezing
Even if frictional heat is generated by the impact of aggregates, it is frozen
The high temperature in the alignment film
There was a risk that the molecular polymer chains would be in a frozen state.
As a result, the alignment regulating force of the alignment film against the liquid crystal polymer is
The problem that it becomes weaker than the conventional method performed under temperature
there were. Furthermore, the alignment film is cooled and hardened by frozen particles.
And the orientation treatment due to the collision of frozen particles is not effectively performed
There was a fear. Therefore, the inventor carried out a number of experiments.
By returning, the substrate surface is heated and held at 50 to 250 ° C.
If the frozen particles are made to collide with
I determined that the problem could be solved. And then experiment
Polyimide resin that forms the alignment film by stacking
Considering the characteristics (orientation, heat resistance, etc.) of frozen particles
The optimal temperature of the substrate surface when colliding
It was found to be 200 ° C. Therefore, the substrate surface
Was kept at a constant temperature in the range of 150 to 200 ° C.
In this state, the frozen particles collide with the substrate surface,
Without the problems described above, the cooling or cooling and hardening of the substrate surface due to the impact of frozen particles can be effectively prevented, the alignment effect can be further enhanced , and an extremely high quality alignment film can be formed.
You can get it.
【００１０】[0010]
【実施例】以下、本発明の構成を図１及び図２に示す実
施例に基づいて具体的に説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The construction of the present invention will be specifically described below with reference to the embodiments shown in FIGS.
【００１１】まず、本発明の方法を実施するための装置
について説明する。すなわち、この装置は、図１に示す
如く、凍結粒製造手段１と被凍結原料供給手段２と凍結
粒噴射手段３とからなる。First, an apparatus for carrying out the method of the present invention will be described. That is, as shown in FIG. 1, the apparatus comprises a frozen grain production means 1, a frozen raw material supply means 2, and a frozen grain injection means 3.
【００１２】凍結粒製造手段１は、密閉断熱容器である
凍結粒製造容器４の周壁上部にノズル５を設けると共
に、その上壁中央部に噴霧器６を設けてなり、ノズル５
から液体窒素等の冷媒７を噴出させて、容器４内を冷気
相雰囲気に保持させた上、噴霧器６から被凍結原料８を
微粒状に噴霧させて、その噴霧粒子８ａを冷媒７との熱
交換により凍結させるものである。そして、凍結粒８ｂ
は、容器４内を逆錐状の底壁へと沈降して、その底壁中
央部から取出管９へと排出されるようになっている。The frozen grain production means 1 is provided with a nozzle 5 at the upper part of the peripheral wall of a frozen grain production vessel 4 which is a closed heat insulating vessel, and a sprayer 6 at the center of the upper wall.
A refrigerant 7 such as liquid nitrogen is blown out of the container 4 to keep the inside of the container 4 in a cold gaseous phase atmosphere, and then the raw material 8 to be frozen is sprayed into fine particles from a sprayer 6. It is frozen by replacement. And the frozen grains 8b
Is settled into the inverted pyramid-shaped bottom wall in the container 4, and is discharged from the central portion of the bottom wall to the extraction pipe 9.
【００１３】被凍結原料供給手段２は、密閉状の原料槽
１０の液相部から導いた原料供給管１１を前記噴霧器６
に接続させると共に、ガスタンク１２から原料槽１０の
気相部にガス供給管１３を導いてなり、ガス供給管１３
から窒素ガス等の加圧ガス１４を供給させることによ
り、原料槽１０内を加圧して、被凍結原料８を原料供給
管１１から噴霧器６に供給させるものである。被凍結原
料８は、炭酸ガス８´を溶解混入させることによって比
抵抗値が１００ＫΩ・ｃｍ以下となるように調整された
超純水であり、原料槽１０内の超純水に槽下部から炭酸
ガス８´をバブリングさせることによって得られる。原
料供給管１１には圧力・流量調整器１５が介設されてい
て、噴霧器６からの噴霧圧力を調整しうるようになって
いる。この噴霧圧力及び噴霧器６の噴霧孔径によって、
噴霧粒子８ａつまり凍結粒８ｂの径が決定されるが、こ
の実施例では、かかる噴霧圧力等の噴霧条件を、均一粒
径の微細な（粒径２０μｍ〜５ｍｍ）な凍結粒８ｂが得
られるように設定してある。The raw material supply means 2 for freezing feeds a raw material supply pipe 11 led from the liquid phase portion of a closed raw material tank 10 to the sprayer 6.
To the gas supply pipe 13 from the gas tank 12 to the gas phase of the raw material tank 10.
A pressurized gas 14 such as a nitrogen gas is supplied from above to pressurize the inside of the raw material tank 10, and the raw material 8 to be frozen is supplied from the raw material supply pipe 11 to the atomizer 6. The raw material to be frozen 8 is ultrapure water adjusted to have a specific resistance of 100 KΩ · cm or less by dissolving and mixing carbon dioxide gas 8 ′. Obtained by bubbling gas 8 '. A pressure / flow rate regulator 15 is interposed in the raw material supply pipe 11 so that the spray pressure from the sprayer 6 can be adjusted. According to the spray pressure and the spray hole diameter of the sprayer 6,
The diameter of the spray particles 8a, that is, the diameter of the frozen particles 8b is determined. In this embodiment, the spray conditions such as the spray pressure are adjusted so that the fine (grain size: 20 μm to 5 mm) frozen particles 8b having a uniform particle diameter can be obtained. Is set to
【００１４】凍結粒噴射手段３は、処理容器１６内に噴
射ガン１７及び処理台１８を配置してなる。噴射ガン１
７は一定位置に固定されたもので、凍結粒製造容器４か
ら導かれた取出管９及びガスタンク１９から導かれたガ
ス供給管２０が接続されていて、凍結粒８ｂを処理台１
８に向けて噴射しうるように構成されている。すなわ
ち、噴射ガン１７は、ガスタンク１９から窒素ガス等の
加圧ガスつまりドライブガス２１を供給させると、この
ドライブガス２１の作用によるエゼクタ効果によって、
凍結粒８ｂを取出管９から吸引して処理台１８上の液晶
表示素子２２に向けて噴射させるものである。この場
合、液晶表示素子２２の配向膜２２ａがポリイミド樹脂
で構成されていることから、ドライブガス２１の供給圧
力は、凍結粒８ｂのポリイミド樹脂膜２２ａへの衝突に
よりこれが破損しないように設定しておく必要があり、
通常、３〜４Ｋｇ／ｃｍ2 Ｇとされる。The frozen particle spraying means 3 comprises a processing vessel 16 in which a spray gun 17 and a processing table 18 are arranged. Injection gun 1
Numeral 7 is fixed at a fixed position, to which an extraction pipe 9 led from the frozen grain production container 4 and a gas supply pipe 20 led from the gas tank 19 are connected.
8. That is, when the injection gun 17 supplies a pressurized gas such as nitrogen gas, that is, the drive gas 21 from the gas tank 19, the ejector effect by the action of the drive gas 21 causes
The frozen particles 8b are sucked from the outlet tube 9 and ejected toward the liquid crystal display element 22 on the processing table 18. This place
If, because the alignment film 22a of the liquid crystal display device 22 is composed of polyimide resin, the supply pressure of the drive gas 21, is set so that it is not damaged by collision with the polyimide resin film 22a frozen particle 8b Need
Usually, it is 3-4 kg / cm 2 G.
【００１５】処理台１８は液晶表示素子２２を載置する
もので、適宜の駆動機構２３により噴射ガン１７に対し
て水平方向に移動されるように構成されていて、かかる
移動により、噴射ガン１７を液晶表示素子２２に対して
相対的にスキャニングせしめて、配向膜２２ａの全面に
亘って凍結粒８ｂを均一に噴射させるように工夫されて
いる。また、処理台１８は角度調整自在に構成されてい
て、図２に示す如く、ガン１７から噴射された凍結粒８
ｂの配向膜２２ａへの入射角θを適宜に設定できるよう
になっている。この入射角θは配向溝の深さ，形状を決
定する要因となるものであり、通常、５〜８０°（より
好ましくは１０〜４５°）に設定される。さらに、処理
台１８には、図２に示す如く、ヒータ２４が内蔵されて
いて、液晶表示素子２２を一定温度に加熱保持するよう
になっている。これは、冒頭で述べた如く、凍結粒８ｂ
の衝突によるポリイミド樹脂膜２２ａの冷却ないし冷却
硬化を防止して、配向効果をより高めるためであり、ポ
リイミド樹脂の特性を考慮して、１５０〜２００℃の範
囲で適宜に設定しておく。The processing table 18 has a liquid crystal display element 22 mounted thereon, and is configured to be moved in a horizontal direction with respect to the ejection gun 17 by an appropriate driving mechanism 23. Is relatively scanned with respect to the liquid crystal display element 22, and the frozen particles 8b are uniformly sprayed over the entire surface of the alignment film 22a. The processing table 18 is configured to be adjustable in angle. As shown in FIG.
The incident angle θ of b into the alignment film 22a can be set appropriately. Is a factor that determines the depth and shape of the alignment groove, and is usually set to 5 to 80 ° (more preferably 10 to 45 °). Further, as shown in FIG. 2, the processing table 18 has a built-in heater 24 for heating and holding the liquid crystal display element 22 at a constant temperature. This is because, as described at the beginning,
Collision to prevent cooling or chill of the polyimide resin film 22a by the state, and are for greater orientation effect, Po
In consideration of the characteristics of the polyimide resin, the temperature is appropriately set in the range of 150 to 200 ° C.
【００１６】而して、本発明の方法は上記装置を使用し
て次のように実施される。Thus, the method of the present invention is implemented as follows using the above apparatus.
【００１７】まず、被凍結原料８を噴霧器６から凍結粒
製造容器４内に噴霧させて、ノズル５から噴出された冷
媒７との熱交換により凍結させ、均一粒径の微凍結粒８
ｂを得る。また、ヒータ２４により、液晶表示素子２２
を１５０〜２００℃の範囲における一定温度に加熱保持
させておく。First, the raw material to be frozen 8 is sprayed from the sprayer 6 into the frozen particle production container 4 and frozen by heat exchange with the refrigerant 7 jetted out of the nozzle 5 to obtain fine frozen particles 8 having a uniform particle size.
Obtain b. Further, the liquid crystal display element 22 is heated by the heater 24.
Is kept at a constant temperature in the range of 150 to 200 ° C.
【００１８】そして、ドライブガス２１を噴射ガン１７
に供給させて、凍結粒８ｂを液晶表示素子２２の配向膜
２２ａに向けて噴射させると共に、処理台１８を移動さ
せて、凍結粒８ｂの衝突箇所を移動方向にスキャニング
させることによって、液晶表示素子２２に配向処理を施
す。すなわち、凍結粒８ｂを所定の入射角θで配向膜２
２ａに衝突させると、その衝突により配向膜面における
ポリマの鎖が再配列されて溝状に変形し、凍結粒８ｂが
均一粒径の微細なもの（２０μｍ〜５ｍｍ）であること
とも相俟って、配向膜２２ａには均一且つ密な配向溝が
形成されるのである。なお、配向処理後は、適宜の乾燥
処理が行なわれる。また、配向膜２２ａに衝突後の凍結
粒８ｂ及びその氷解液並びにドライブガス２１（及び凍
結粒８ｂに含まれている炭酸ガス８´）は、処理容器１
６の下部に設けられた排出口１６ａ並びに排気口１６ｂ
から容器１６外に排出される。Then, the drive gas 21 is supplied to the injection gun 17.
To cause the frozen particles 8b to be sprayed toward the alignment film 22a of the liquid crystal display element 22 and to move the processing table 18 to scan the collision point of the frozen particles 8b in the moving direction. 22 is subjected to an alignment treatment. That is, the frozen particles 8b are oriented at the predetermined incident angle θ and the orientation film 2
2a, the collision causes the polymer chains on the alignment film surface to be rearranged and deformed into a groove shape, which is combined with the fact that the frozen particles 8b are fine (20 μm to 5 mm) having a uniform particle size. Thus, uniform and dense alignment grooves are formed in the alignment film 22a. After the orientation treatment, an appropriate drying treatment is performed. Further, the frozen particles 8b and their thawing liquid and the drive gas 21 (and the carbon dioxide gas 8 ′ contained in the frozen particles 8b) after the collision with the alignment film 22a are processed by the processing vessel 1.
Outlet 16a and exhaust outlet 16b provided in the lower part of
From the container 16.
【００１９】このとき、配向膜２２ａは、これに異物を
含まない超純水製の凍結粒８ｂをドライブガス２１と共
に衝突させるのみであるから、冒頭で述べた従来法によ
る場合と異なって、繊維等の異物が付着せず、清浄に保
たれる。At this time, since the alignment film 22a only impinges the frozen particles 8b made of ultrapure water containing no foreign matter on the alignment film 22a together with the drive gas 21, the orientation film 22a differs from the conventional method described above at the beginning. No foreign matter such as adheres and is kept clean.
【００２０】しかも、凍結粒８ｂの原料８が、炭酸ガス
８´を溶解混入させることによって比抵抗値を１００Ｋ
Ω・ｃｍ以下に調整された超純水であるから、凍結粒８
ｂの衝突によって静電気が発生，帯電するようなことが
ない。したがって、配向膜面下のダイオード等が破損す
ることがなく、ハンドリング時等において周辺雰囲気中
の塵埃を吸着するようなこともない。すなわち、完全に
パーティクルフリーで良品質の配向処理物を得ることが
できる。Further, the raw material 8 of the frozen granules 8b has a specific resistance value of 100K by dissolving and mixing carbon dioxide gas 8 '.
Because it is ultrapure water adjusted to Ω · cm or less,
No static electricity is generated and charged by the collision of b. Therefore, the diode and the like below the alignment film surface are not damaged, and there is no adsorption of dust in the surrounding atmosphere at the time of handling or the like. In other words, it is possible to obtain a completely particle-free and high-quality alignment-treated product.
【００２１】ところで、凍結粒８ｂを衝突させた場合、
冒頭で述べた如き問題（配向膜２２ａにおける高分子ポ
リマの鎖が一種の凍結状態となる虞れがあり、配向膜２
２ａの液晶高分子に対する配向規制力が室温下で行われ
る従来法に比して弱くなる可能性があること、及び凍結
粒８ｂにより配向膜たるポリイミド樹脂膜２２ａが冷却
硬化されて、凍結粒８ｂの衝突による配向処理が効果的
に行われない可能性があること）が生じるが、液晶表示
素子２２を上記した如く加熱保持させておくと、凍結粒
８ｂの衝突によるポリイミド樹脂膜２２ａの冷却ないし
冷却硬化が確実に防止されることから、凍結粒８ｂの衝
突による配向処理を極めて効果的に行うことができる。By the way, when the frozen particles 8b collide,
Osoregaa the chains of the polymer polymer is a kind frozen state of the were such problems (alignment layer 22a mentioned in the introduction is, the alignment layer 2
The alignment regulating force of the liquid crystal polymer 2a may be weaker than the conventional method performed at room temperature , and the polyimide resin film 22a as the alignment film is cooled and hardened by the frozen particles 8b to form the frozen particles 8b. Although there is a possibility that the alignment treatment by the collision is not effectively performed) occurs when the liquid crystal display device 22 allowed to as heating and holding the above, to no cooling of the polyimide resin film 22a due to the collision of the frozen particle 8b Since the cooling and hardening are reliably prevented, the orientation treatment by the collision of the frozen particles 8b can be performed very effectively.
【００２２】なお、本発明は上記実施例に限定されるも
のではなく、本発明の基本原理を逸脱しない範囲におい
て適宜に改良・変更することができる。例えば、被凍結
原料８を超純水にアルコール類を溶解混入させたものと
してもよい。混入させるアルコール類としては、蒸気
圧，表面張力が小さく且つ水と任意の割合で混合し、し
かも不純物の少ないものが工業的に製造可能である点か
ら、イソプロピルアルコールが最適である。また、各手
段１，２，３の構成も任意である。It should be noted that the present invention is not limited to the above-described embodiment, and can be appropriately improved and changed without departing from the basic principle of the present invention. For example, the raw material to be frozen 8 may be obtained by dissolving and mixing alcohols in ultrapure water. As the alcohol to be mixed, isopropyl alcohol is most suitable because it has a low vapor pressure and surface tension, is mixed with water at an arbitrary ratio, and can be industrially produced with little impurities. The configuration of each of the means 1, 2, 3 is also optional.
【００２３】[0023]
【発明の効果】以上の説明から明らかなように、本発明
によれば、配向処理時における静電気の発生，帯電を効
果的に防止することができ、基板面下回路の破壊やパー
ティクル汚染を生じることなく、液晶表示素子の配向処
理を極めて良好に行なうことができる。しかも、配向処
理された液晶表示素子が、周辺雰囲気中の塵埃を吸着し
ない完全なパーティクルフリーとなり、爾後の処理工程
においても好結果を与えることになる。さらに、基板面
を一定温度に加熱保持して、凍結粒の衝突による基板面
の冷却，冷却硬化を防止しておくことにより、配向効果
を更に高めることができる。したがって、本発明によれ
ば、極めて高品質のポリイミド樹脂配向膜を得ることが
できる。 As is apparent from the above description, according to the present invention, the generation and electrification of static electricity at the time of alignment treatment can be effectively prevented, and the circuit below the substrate surface is broken and particle contamination occurs. Without this, the alignment treatment of the liquid crystal display element can be performed extremely well. In addition, the liquid crystal display element that has been subjected to the alignment treatment is completely particle-free without adsorbing dust in the surrounding atmosphere, and gives good results in the subsequent processing steps. Furthermore, the orientation effect can be further enhanced by heating and holding the substrate surface at a constant temperature to prevent cooling and cooling and hardening of the substrate surface due to collision of frozen particles. Therefore, according to the present invention
It is possible to obtain an extremely high quality polyimide resin alignment film
it can.
【図１】本発明の方法を実施するための装置の一例を示
す断面図である。FIG. 1 is a cross-sectional view showing an example of an apparatus for performing a method of the present invention.
【図２】その要部を示す拡大図である。FIG. 2 is an enlarged view showing a main part thereof.
１…凍結粒製造手段、２…被凍結原料供給手段、３…凍
結粒噴射手段、８…被凍結原料、８´…炭酸ガス、８ｂ
…凍結粒、１６…処理容器、１７…噴射ガン、１８…処
理台、２１…ドライブガス、２２…液晶表示素子、２２
ａ…配向膜（基板面）、２４…ヒータ、θ…入射角。DESCRIPTION OF SYMBOLS 1 ... frozen particle manufacturing means, 2 ... frozen raw material supply means, 3 ... frozen particle injection means, 8 ... frozen raw material, 8 '... carbon dioxide gas, 8b
... frozen particles, 16 ... processing container, 17 ... spray gun, 18 ... processing table, 21 ... drive gas, 22 ... liquid crystal display element, 22
a: alignment film (substrate surface), 24: heater, θ: incident angle.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 酒井 洋一 兵庫県尼崎市元浜町１丁目95番地 大陽 酸素株式会社 アイス・ブラストセンタ ー内 (56)参考文献 特開 平３−256023（ＪＰ，Ａ) 特開 平４−43324（ＪＰ，Ａ) 特開 平４−206724（ＪＰ，Ａ) 特開 昭63−96630（ＪＰ，Ａ) (58)調査した分野(Int.Cl.6，ＤＢ名) G02F 1/1337──────────────────────────────────────────────────続 き Continuation of the front page (72) Inventor Yoichi Sakai 1-95, Motohama-cho, Amagasaki-shi, Hyogo Taiyo Oxygen Co., Ltd. Ice Blast Center (56) References JP-A-3-256023 (JP, A JP-A-4-43324 (JP, A) JP-A-4-206724 (JP, A) JP-A-63-9630 (JP, A) (58) Fields investigated (Int. Cl. 6 , DB name) G02F 1/1337
Claims (1)
子の基板面を１５０〜２００℃の範囲で一定温度に加熱
保持させた状態で、炭酸ガス又はアルコール類の混入に
より比抵抗値が１００ＫΩ・ｃｍ以下となるように調整
された超純水を原料として得られた微細な凍結粒を、当
該基板面に所定の入射角で衝突させることにより、凍結
粒の衝突による基板面の冷却ないし冷却硬化を防止しつ
つ配向処理するようにしたことを特徴とする液晶表示素
子の配向処理方法。1. A liquid crystal display element comprising a polyimide resin.
Heat the substrate surface of the wafer to a constant temperature in the range of 150 to 200 ° C
In a state of being held, a fine frozen particles obtained as the raw material ultra pure water specific resistance by the incorporation of carbon dioxide or alcohol is adjusted to be equal to or less than 100 K.OMEGA · cm, those
By impinging with a predetermined incident angle to the substrate surface, frozen
Prevents cooling or hardening of the substrate surface due to particle collision
A method for treating the orientation of a liquid crystal display element, comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5159300A JP2779583B2 (en) | 1993-06-29 | 1993-06-29 | Liquid crystal display element alignment treatment method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5159300A JP2779583B2 (en) | 1993-06-29 | 1993-06-29 | Liquid crystal display element alignment treatment method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0713162A JPH0713162A (en) | 1995-01-17 |
| JP2779583B2 true JP2779583B2 (en) | 1998-07-23 |
Family
ID=15690790
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5159300A Expired - Fee Related JP2779583B2 (en) | 1993-06-29 | 1993-06-29 | Liquid crystal display element alignment treatment method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2779583B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105271805B (en) * | 2014-06-20 | 2018-01-16 | 麒麟电子（深圳）有限公司 | The particles spray appliance and its particles spray method of glass substrate |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03256023A (en) * | 1990-03-07 | 1991-11-14 | Matsushita Electric Ind Co Ltd | Manufacturing method of liquid crystal element |
| JP2850265B2 (en) * | 1990-06-11 | 1999-01-27 | 松下電器産業株式会社 | Orientation treatment method |
| JPH04206724A (en) * | 1990-11-30 | 1992-07-28 | Hitachi Cable Ltd | How to clean semiconductor wafers |
-
1993
- 1993-06-29 JP JP5159300A patent/JP2779583B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0713162A (en) | 1995-01-17 |
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