JP2791971B2 - Wafer basket in wafer storage container - Google Patents
Wafer basket in wafer storage containerInfo
- Publication number
- JP2791971B2 JP2791971B2 JP6158228A JP15822894A JP2791971B2 JP 2791971 B2 JP2791971 B2 JP 2791971B2 JP 6158228 A JP6158228 A JP 6158228A JP 15822894 A JP15822894 A JP 15822894A JP 2791971 B2 JP2791971 B2 JP 2791971B2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- basket
- pair
- housing groove
- parallel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
- H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
- H10P72/1911—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by materials, roughness, coatings or the like
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
- H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
- H10P72/1922—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by the construction of the closed carrier
Landscapes
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、半導体関連のウェー
ハ，マスク原板，フォトマスクなどの精密基板を安全に
輸送，保管，取り扱えるウェーハ収納容器におけるウェ
ーハバスケットに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wafer basket in a wafer container capable of safely transporting, storing, and handling precision substrates such as semiconductor-related wafers, mask original plates, and photomasks.
【０００２】[0002]
【従来の技術】一般に、半導体単結晶柱体をスライスし
て薄板状としたウェーハなどの精密基板は、各種電子機
器類での集積回路を作るためにユーザーに向けて大量に
輸送，保管する場合が多く、高価で薄くて脆く、しかも
汚染を極端に嫌う半導体ウェーハを損傷，汚染から守る
ために取扱上、運搬用の密閉容器内に多数枚を安全に配
列保持収容する配慮が必要である。従来、この輸送用容
器内では、複数枚の各ウェーハを互いに接触，衝突しな
いように一定間隔をおいて個別に整然と配列されて収容
するのに、ウェーハ収納溝を備えたウェーハバスケット
を用いて弾性的に保持して、輸送中の振動を緩衝してウ
ェーハの破損やウェーハの支持部材とのガタつき摩擦接
触によって生ずる微粉の発生を防止していて、このウェ
ーハを弾性的に保持する容器として実開平１−１２９８
３６号公報などが知られている。このウェーハバスケッ
トは図６に示すように対向する一対の側壁ａ，ａと、該
側壁ａ，ａを結合する一対の端壁ｂ，ｂとで矩形枠状に
形成され、一方の端壁ｂには水平なバー部材ｃが設けら
れ、該バー部材ｃの表面には、断面半円形のインデック
ス用突起ｄがバー部材ｃの長さ方向（水平方向）に突設
されている。そして、ウェーハバスケット１を移送装置
や検査装置等の自動機に装着する場合、バー部材ｃのあ
る端壁ｂを下面としてセットされる事が多く（図７参
照）、この時にウェーハ収納溝ｅは自動機のセット面と
平行になっている。2. Description of the Related Art Generally, precision substrates such as thin wafers obtained by slicing semiconductor single crystal columns are transported and stored in large quantities to users in order to produce integrated circuits in various electronic devices. In order to protect semiconductor wafers, which are expensive, thin, brittle, and extremely contaminated by contamination, from damage and contamination, it is necessary to take care to safely arrange and accommodate a large number of semiconductor wafers in a closed container for transportation. Conventionally, in this transport container, a plurality of wafers are arranged in orderly and individually at regular intervals so as not to come into contact with and collide with each other. To prevent vibration during transportation to prevent breakage of the wafer and the generation of fine powder caused by rattling frictional contact with the wafer support member. Kaihei 1-1298
No. 36 is known. As shown in FIG. 6, the wafer basket is formed in a rectangular frame shape by a pair of side walls a, a facing each other, and a pair of end walls b, b connecting the side walls a, a. Is provided with a horizontal bar member c, and an index protrusion d having a semicircular cross section is provided on the surface of the bar member c in a length direction (horizontal direction) of the bar member c. When the wafer basket 1 is mounted on an automatic machine such as a transfer device or an inspection device, the end wall b having the bar member c is often set as a lower surface (see FIG. 7). It is parallel to the set surface of the automatic machine.
【０００３】[0003]
【発明が解決しようとする課題】ウェーハ移送装置や検
査装置等の自動機は、装着されたウェーハバスケット内
のウェーハが基準面（セット面）に対して平行に保持さ
れているものとして作動するが、実際には、ウェーハバ
スケット内のウェーハは平行に保持されていないため、
自動機の作動ミスを誘発することがある。即ち、ウェー
ハが平行に保持されていない原因は、ウェーハ収納溝の
形状とガタ寸法にあって、バスケット中央部におけるウ
ェーハと収納溝の関係は図８（ａ）の様になり、ウェー
ハは収納溝の傾斜面で保持されている。また、バスケッ
ト底部付近では、図８（ｂ）の様にウェーハは収納溝の
谷部まで挿入された状態で保持される。この様にバスケ
ット内におけるウェーハ保持位置の差によって、ウェー
ハはバスケットの上部のウェーハ挿入口側で低く、底部
側で高いという傾いた状態で保持される。ウェーハ収納
溝の中でウェーハを平行に保持する方法として、収納溝
形状を図８（ｃ）の様な斜面の無い形状にする事も考え
られる。しかし、この様な溝形状ではウェーハが溝表面
と面接触をおこし、ウェーハが接触汚染を受けたり、こ
すれによってウェーハの表面平滑性が失われたりしてウ
ェーハ品質を損なう恐れがある。また別の方法として図
８（ａ）におけるガタ寸法を全く無くする事によって
も、ウェーハは平行に保持される。しかし、ガタ寸法無
しではウェーハ出し入れが円滑に行われず作業性が低下
するほか、こすれによるウェーハ損傷も考えられ、現実
には不可能である。本発明は、従来のウェーハ収納溝を
持つバスケットにおいて、自動機装着時にウェーハを水
平に保持しようとするもので、ウェーハの安定確実な担
持ができ、容器内でのウェーハの出し入れを容易にし、
自動機の作動ミスもなく、取扱処理を簡便化させること
を目的としたものである。An automatic machine such as a wafer transfer device or an inspection device operates assuming that a wafer in a mounted wafer basket is held parallel to a reference surface (set surface). In practice, the wafers in the wafer basket are not held in parallel,
This may cause an operation error of the automatic machine. That is, the reason why the wafer is not held in parallel is due to the shape and play size of the wafer storage groove, and the relationship between the wafer and the storage groove at the center of the basket is as shown in FIG. It is held on the inclined surface. Also, near the bottom of the basket, the wafer is held in a state of being inserted to the valley of the storage groove as shown in FIG. 8B. As described above, due to the difference in the wafer holding position in the basket, the wafer is held in an inclined state in which the wafer is low at the wafer insertion port side at the top of the basket and high at the bottom side. As a method of holding the wafers in parallel in the wafer storage groove, it is conceivable to make the storage groove shape without a slope as shown in FIG. 8C. However, in such a groove shape, the wafer comes into surface contact with the groove surface, and the wafer may be subjected to contact contamination, or the surface smoothness of the wafer may be lost due to the rubbing, thereby deteriorating the wafer quality. As another method, the wafer is held in parallel by eliminating the backlash dimension in FIG. 8A at all. However, if there is no backlash, the wafer cannot be smoothly taken in and out, and the workability is reduced. In addition, the wafer may be damaged due to rubbing, which is actually impossible. The present invention, in a basket having a conventional wafer storage groove, in an attempt to hold the wafer horizontally at the time of automatic machine mounting, the wafer can be stably and reliably supported, facilitate the loading and unloading of the wafer in the container,
The purpose of the present invention is to simplify the handling process without an operation error of the automatic machine.
【０００４】[0004]
【課題を解決するための手段】本発明は、複数のウェー
ハＷを整列保持し、開閉自在の蓋体５を有する容器本体
４に着脱自在に嵌装されるウェーハバスケット３におい
て、内面に平行に延在する複数のウェーハ収納溝２がウ
ェーハＷの周縁部を保持可能に形成された一対の側壁３
１と、該一対の側壁３１の前記ウェーハ収納溝２延在方
向と直交する方向の両辺側にそれぞれ連続する一対の端
壁３２とを備え、前記ウェーハ収納溝２延在方向の一面
にウェーハＷを挿入、取出可能な開口を有する矩形枠状
に一体成形され、前記端壁３２の一方には、表面にイン
デックス用突起３０を備えたバー部材３１が前記ウェー
ハ収納溝２と平行に設けられ、該バー部材３１を設けら
れた端壁３２端面が前記ウェーハ収納溝２延在方向に前
記開口に向かうに従い順次突出量が大きくなる傾斜面を
なすものである。SUMMARY OF THE INVENTION According to the present invention, a plurality of wafers W are aligned and held, and a wafer basket 3 detachably fitted to a container body 4 having a lid 5 which can be opened and closed is provided in parallel with an inner surface. A pair of side walls 3 formed so that a plurality of extending wafer accommodating grooves 2 can hold the peripheral portion of the wafer W
1, a pair of end walls 3 2 consecutive respective sides side in the direction perpendicular to the wafer housing groove 2 extending direction of the pair of side walls 3 1, on one side of the wafer housing groove 2 extending direction inserting the wafer W, is formed integrally in a rectangular frame shape having a retrievable opening, one of said end walls 3 2, parallel to bars 31 with index projection 30 on the surface of said wafer housing groove 2 provided, in which form an inclined surface sequentially projecting amount in accordance wall 3 second end surface provided with the bar member 31 toward the opening in the wafer housing groove 2 extending direction is large.
【０００５】[0005]
【作用】容器本体内に挿入されたウェーハバスケット
は、蓋体をかぶせると、ウェーハ収納溝上に嵌挿される
ウェーハ緩衝材支持枠体が緩衝材としてウェーハを押
え、ウェーハは安定的に保持される。しかも、ウェーハ
は収納溝の隙間をおいてそれぞれ個別に支持されるた
め、輸送中における振動に充分に対応し、緩衝的保持で
安全性が大巾に高められ、ウェーハが他の部品と接触し
微粉を発生したり、損傷を受ける恐れがなく用いられる
し、ウェーハの出し入れや閉蓋などの取扱も簡便安全で
収納，保管，運搬の各作業に良好に用いられるものであ
る。また、容器本体から取り出したウェーハバスケット
をバー部材のある端壁側を下にして、バスケットを自動
機に装着した場合に、バスケットのウェーハ収納溝はウ
ェーハ挿入口側を上にして傾斜する。一方、ウェーハ収
納溝内のウェーハは前述の様に、ウェーハ挿入口側を下
にして溝内で傾斜するため、それぞれの傾斜が相殺され
た形になり、ウェーハは自動機の装着基準面に対して平
行な状態で保持されている事になり、自動機の作動ミス
がなく安全に取り扱えるものである。When the lid is put on the wafer basket inserted into the container body, the wafer buffer support frame fitted into the wafer storage groove holds the wafer as a buffer, and the wafer is stably held. In addition, since the wafers are individually supported with gaps in the storage grooves, they sufficiently respond to vibrations during transportation, greatly enhance safety by buffering, and allow the wafers to come into contact with other parts. It can be used without generating fine powder or being damaged, and can be easily and safely handled such as taking in and out of a wafer and closing a lid. When the basket is mounted on an automatic machine with the wafer basket taken out of the container body facing the end wall having the bar member facing downward, the wafer storage groove of the basket is inclined with the wafer insertion opening side facing upward. On the other hand, as described above, the wafer in the wafer storage groove is inclined in the groove with the wafer insertion port side down, so that the respective inclinations are offset, and the wafer is placed on the mounting reference plane of the automatic machine. It is held in a parallel state, and can be handled safely without any operational errors of the automatic machine.
【０００６】[0006]
【実施例】本発明の実施例を図１乃至図３の例で説明す
ると、ウェーハＷの多数枚をそれぞれ一定間隔をおいて
配列担持しうる弾性リブ１を複数並列突設して各弾性リ
ブ１，１間にＶ溝状のウェーハ収納溝２を形成したウェ
ーハバスケット３を、容器本体４に嵌脱自在に設け、該
容器本体４に蓋体５が開閉自在に設けられ、該蓋体５の
内面に嵌装されるウェーハ緩衝材支持枠体８にウェーハ
Ｗの上端縁に当接する押え片６を支持部７で対設してあ
る。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to FIGS. 1 to 3. A plurality of elastic ribs 1 capable of arranging and carrying a large number of wafers W at regular intervals are provided in parallel. A wafer basket 3 in which a V-shaped wafer storage groove 2 is formed between 1, 1 is provided in a container main body 4 so as to be freely detachable, and a lid 5 is provided in the container main body 4 so as to be openable and closable. A holding piece 6 that is in contact with the upper edge of the wafer W is opposed to a wafer buffer supporting frame 8 fitted on the inner surface of the wafer W by a support portion 7.
【０００７】前記ウェーハバスケット３が対向する一対
の側壁３1 ，３1 と、該側壁を結合する一対の端壁
３2 ，３2 とで矩形枠状に一体成形され、各側壁３1 の
内面にウェーハＷの多数枚をそれぞれ一定間隔をおいて
配列担持しうる弾性リブ１を複数並列突設して各弾性リ
ブ１，１間にウェーハ収納溝２を配備し、また前記端壁
の一方には、表面にインデックス用突起３０を備えたバ
ー部材３１が水平に設けられていて、該バー部材３１を
有する側の端壁端面が下方から上方に向い順次突出量の
大きな傾斜面を持つ突起部３3 を設けたことで、バスケ
ット３をバー部材３１のある端壁側を下にして自動機１
０に装着した場合に、バスケット３のウェーハ収納溝２
はウェーハ挿入口側を上にして傾斜するので、ウェーハ
は自動機の装着基準面に対して平行な状態で保持されて
いる事になり、自動機の作動ミスがなく安全に取り扱え
る。[0007] and the wafer basket 3 pair of side walls 3 1 are opposed, 3 1, is integrally molded in a rectangular frame shape and a pair of end walls 3 2, 3 2 for coupling the side walls, each side wall 3 1 of the inner surface A plurality of elastic ribs 1 capable of arranging and carrying a large number of wafers W at regular intervals are provided in parallel to each other, and a wafer accommodating groove 2 is provided between the elastic ribs 1 and 1, and one of the end walls is provided. A bar member 31 provided on the surface thereof with an indexing projection 30 is provided horizontally, and the end wall end face on the side having the bar member 31 has an inclined surface having a large amount of projection sequentially from bottom to top. With the provision of 33, the basket 3 is placed on the side of the end wall where the bar member 31 is located, and the automatic machine 1
0, the wafer storage groove 2 of the basket 3
Since the wafer is inclined with the side of the wafer insertion port facing upward, the wafer is held in a state parallel to the mounting reference plane of the automatic machine, so that the automatic machine can be handled safely without operation errors.
【０００８】前記容器本体４と蓋体５との嵌合周縁部に
はリング状のシール部材１２を介在配備して密閉性を良
好にしてある。なお、前記ウェーハバスケット３は、合
成樹脂系の弾性材で成形され、容器本体４との間に隙間
をあけて嵌装保持できるように容器本体４，底面の凸壁
１４に嵌め込まれ、上方外周縁には対向してフランジ１
３を設けて容器本体４への出入れ取扱い操作がしやすい
内箱状に構成して、ウェーハ収納溝２を容器本体４の内
部に備えられるようにしてある。また、この容器本体４
及び蓋体５は、内外圧の変化に対応できるように適所に
リブを備えた強靱な構造体とし、その製作には内容物が
透視可能なポリカーボネート，ポリプロピレン，ポリエ
チレン，ＰＢＴ樹脂などのプラスチックからなる剛性の
高い合成樹脂材質を用いるのが好ましい。[0008] A ring-shaped seal member 12 is interposed at the peripheral portion of the fitting between the container body 4 and the lid 5 to improve the sealing performance. The wafer basket 3 is formed of a synthetic resin-based elastic material, and is fitted into the container body 4 so that the wafer basket 3 can be fitted and held with a gap between the wafer basket 3 and the convex wall 14 on the bottom surface. Flange 1 facing the periphery
3 is provided to form an inner box that facilitates handling operations to and from the container body 4 so that the wafer storage groove 2 can be provided inside the container body 4. The container body 4
The lid 5 is a tough structure having ribs in place so as to be able to cope with changes in internal and external pressures, and is made of a plastic such as polycarbonate, polypropylene, polyethylene or PBT resin whose contents can be seen through. It is preferable to use a synthetic resin material having high rigidity.
【０００９】なお、前記突起部３3 としては、バー部材
３１を有する側を下面として載置した際に、ウェーハ収
納溝２の挿入側が若干上方になる方向にバスケットを傾
斜して載置できる傾斜壁としたものであって、端壁３2
の上方から下方にわたる全長に突設されているが、図４
及び図５の如く、端壁３2 の上方一部に突設したもので
もよい。この場合でも、ウェーハバスケット３を自動機
１０に装着した状態ではウェーハ収納溝２は挿入口側を
上にして傾斜するが、そこに収納されたウェーハは装着
基準面に対して略々平行に保持されている。いずれの場
合でも、一般に使用されているバスケットのウェーハ収
納溝形状（規格準拠）では、角度は０°１５’〜１°０
０’位であり、突起部３3 の高さはバスケットサイズや
突起位置によっても異なるが約０．３ｍｍ〜３ｍｍとす
るのがよい。[0009] Incidentally, Examples protrusions 3 3, when placing the side having the bar member 31 as the lower surface, can be placed inclined basket in the direction of the insertion side of the wafer housing groove 2 is slightly upwardly inclined The end wall 3 2
Is projected from the upper part to the lower part of FIG.
And as shown in FIG. 5, it may be obtained by projecting upward portion of the end wall 3 2. Even in this case, in a state where the wafer basket 3 is mounted on the automatic machine 10, the wafer storage groove 2 is inclined with the insertion opening side upward, but the wafer stored therein is held substantially parallel to the mounting reference plane. Have been. In any case, the angle is 0 ° 15 'to 1 ° 0 in the commonly used basket wafer storing groove shape (conforming to the standard).
0 'is of a height of the protrusions 3 3 preferably set to differ about 0.3mm~3mm by the basket size and projection position.
【００１０】[0010]
【発明の効果】本発明は、開閉自在の蓋体を有する容器
本体に嵌装されるウェーハバスケットが対向する一対の
側壁と、該側壁を結合する一対の端壁とで矩形枠状に一
体成形され、各側壁の内面にウェーハの多数枚をそれぞ
れ一定間隔をおいて配列担持しうる弾性リブを複数並列
突設して各弾性リブ間にウェーハ収納溝を配備し、また
前記端壁の一方には、表面にインデックス用突起を備え
たバー部材が水平に設けられているウェーハバスケット
において、該バー部材を有する側の端壁端面が下方から
上方に向かうに従い順次突出量の大きな傾斜面に形成し
たことにより、ウェーハバスケットを自動機に装着した
状態では収納されたウェーハが装着基準面に対して略々
平行に保持され、自動機の作動ミスによるトラブルを解
消することができるし、ウェーハ容器本体へ挿入が迅速
かつ容易で単純作業での多量処理を安全に行うことが可
能となり、輸送中または保管中において、ウェーハが容
器内の収納溝から外れたりすることなく、かつガタつか
ないで振動に耐え、他の部品との接触による微粉発生や
損傷を受けるおそれがなく、振れ止めで容器内における
安定した担持が可能で、担持させる取扱操作も簡便であ
る。According to the present invention, a pair of side walls facing a wafer basket fitted in a container body having a lid that can be opened and closed, and a pair of end walls connecting the side walls are integrally formed in a rectangular frame shape. A plurality of elastic ribs capable of arranging and carrying a large number of wafers arranged at regular intervals on the inner surface of each side wall are respectively provided in parallel, and a wafer accommodating groove is provided between the elastic ribs, and one of the end walls is provided. In a wafer basket in which a bar member provided with indexing projections is provided horizontally on the surface, the end wall end surface on the side having the bar member is formed on an inclined surface having a larger projecting amount as it goes upward from below. In this way, when the wafer basket is mounted on the automatic machine, the stored wafers are held substantially parallel to the mounting reference plane, and troubles caused by the operation error of the automatic machine can be eliminated. In addition, it is possible to quickly and easily insert the wafer into the wafer container body and safely perform a large amount of processing with simple work.While transporting or storing, the wafer does not fall out of the storage groove in the container, and It can withstand vibration without being pinched, does not suffer from generation of fine powder or damage due to contact with other parts, and can be stably held in the container by the steady rest, and the handling operation for holding is simple.
【図１】本考案の実施例を示す斜視図である。FIG. 1 is a perspective view showing an embodiment of the present invention.
【図２】図１の例の使用状態の分離状態の斜視図であ
る。FIG. 2 is a perspective view of a separated state in a use state of the example of FIG.
【図３】図１の例のウェーハバスケットを自動機に装着
した状態の縦断面図である。FIG. 3 is a longitudinal sectional view showing a state where the wafer basket of the example of FIG. 1 is mounted on an automatic machine.
【図４】本考案の他の実施例の斜視図である。FIG. 4 is a perspective view of another embodiment of the present invention.
【図５】図４の例のウェーハバスケットを自動機に装着
した状態の縦断面図である。FIG. 5 is a longitudinal sectional view showing a state where the wafer basket of the example of FIG. 4 is mounted on an automatic machine.
【図６】従来例の斜視図である。FIG. 6 is a perspective view of a conventional example.
【図７】図６の例のウェーハバスケットを自動機に装着
した状態の縦断面図である。7 is a vertical sectional view showing a state where the wafer basket of the example of FIG. 6 is mounted on an automatic machine.
【図８】図７の例のウェーハ収納溝でのウェーハの状態
を示す一部拡大縦断面図で、（ａ）はバスケット中央部
状態図、（ｂ）はバスケット底部状態図、（ｃ）は想定
状態図である。8 is a partially enlarged longitudinal sectional view showing a state of a wafer in a wafer accommodating groove in the example of FIG. 7, (a) is a state diagram of a basket central portion, (b) is a state diagram of a basket bottom portion, and (c) is a state diagram of FIG. It is an assumption state diagram.
Ｗ ウェーハ １ 弾性リブ ２ ウェーハ収納溝 ３ ウェーハバスケット ３1 側壁 ３2 端壁 ３3 突起部 ４ 容器本体 ５ 蓋体 ６ ウェーハ押え片 ７ 支持部 ８ ウェーハ緩衝材支持枠体 １０ 自動機 １２ シール部材 １３ フランジ １４ 底部 ３０ インデックス用突起 ３１ バー部材W Wafer 1 Elastic rib 2 Wafer storage groove 3 Wafer basket 3 1 Side wall 3 2 End wall 3 3 Protrusion 4 Container body 5 Lid 6 Wafer holding piece 7 Support 8 Wafer buffer support frame 10 Automatic machine 12 Seal member 13 Flange 14 Bottom 30 Index protrusion 31 Bar member
Claims (2)
在の蓋体５を有する容器本体４に着脱自在に嵌装される
ウェーハバスケット３において、 内面に平行に延在する複数のウェーハ収納溝２がウェー
ハＷの周縁部を保持可能に形成された一対の側壁３
１と、該一対の側壁３１の前記ウェーハ収納溝２延在方
向と直交する方向の両辺側にそれぞれ連続する一対の端
壁３２とを備え、前記ウェーハ収納溝２延在方向の一面
にウェーハＷを挿入、取出可能な開口を有する矩形枠状
に一体成形され、前記端壁３２の一方には、表面にイン
デックス用突起３０を備えたバー部材３１が前記ウェー
ハ収納溝２と平行に設けられ、該バー部材３１を設けら
れた端壁３２端面が前記ウェーハ収納溝２延在方向に前
記開口に向かうに従い順次突出量が大きくなる傾斜面を
なすことを特徴とするウェーハバスケット。1. A plurality of wafer storage grooves extending in parallel with an inner surface of a wafer basket 3 removably fitted to a container body 4 having a lid 5 which can be opened and closed, which holds a plurality of wafers W in alignment. 2 is a pair of side walls 3 formed so as to be able to hold the peripheral portion of the wafer W.
1, a pair of end walls 3 2 consecutive respective sides side in the direction perpendicular to the wafer housing groove 2 extending direction of the pair of side walls 3 1, on one side of the wafer housing groove 2 extending direction inserting the wafer W, is formed integrally in a rectangular frame shape having a retrievable opening, one of said end walls 3 2, parallel to bars 31 with index projection 30 on the surface of said wafer housing groove 2 provided, wafer baskets, characterized in that forming the inclined surfaces sequentially projecting amount in accordance wall 3 second end surface provided with the bar member 31 toward the opening in the wafer housing groove 2 extending direction is large.
上方部に設けられた突起部３３で形成された請求項１記
載のウェーハバスケット。2. The device according to claim 2, wherein the inclined surface is a lower portion of the end surface of the end wall,
Wafer basket as claimed in claim 1, wherein formed in the protruding portion 3 3 provided in the upper part.
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6158228A JP2791971B2 (en) | 1994-06-17 | 1994-06-17 | Wafer basket in wafer storage container |
| TW084105930A TW299485B (en) | 1994-06-17 | 1995-06-10 | |
| FR9506920A FR2725185B1 (en) | 1994-06-17 | 1995-06-12 | BASKET FOR WAFERS, ESPECIALLY OF SEMICONDUCTOR SILICON |
| GB9512022A GB2290414B (en) | 1994-06-17 | 1995-06-14 | Wafer basket in wafer-holder box |
| DE19521575A DE19521575C2 (en) | 1994-06-17 | 1995-06-14 | Wafer basket in a wafer holder box |
| KR1019950016073A KR100332719B1 (en) | 1994-06-17 | 1995-06-16 | Wafer basket in wafer storage box |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6158228A JP2791971B2 (en) | 1994-06-17 | 1994-06-17 | Wafer basket in wafer storage container |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH088332A JPH088332A (en) | 1996-01-12 |
| JP2791971B2 true JP2791971B2 (en) | 1998-08-27 |
Family
ID=15667084
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6158228A Expired - Lifetime JP2791971B2 (en) | 1994-06-17 | 1994-06-17 | Wafer basket in wafer storage container |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JP2791971B2 (en) |
| KR (1) | KR100332719B1 (en) |
| DE (1) | DE19521575C2 (en) |
| FR (1) | FR2725185B1 (en) |
| GB (1) | GB2290414B (en) |
| TW (1) | TW299485B (en) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW296361B (en) * | 1995-06-26 | 1997-01-21 | Kakizaki Seisakusho Kk | |
| US5788082A (en) * | 1996-07-12 | 1998-08-04 | Fluoroware, Inc. | Wafer carrier |
| GB2350604A (en) * | 1999-06-03 | 2000-12-06 | Horizon Biscuit Company Ltd Th | Container |
| DE10046942A1 (en) * | 2000-09-21 | 2002-04-25 | Infineon Technologies Ag | Process for transporting wafers |
| DE10104313C1 (en) * | 2001-01-22 | 2002-08-08 | Hunke & Jochheim | Storage boxes for cassettes |
| TW511649U (en) * | 2001-09-12 | 2002-11-21 | Ind Tech Res Inst | Wafer retainer |
| TWI239931B (en) * | 2003-05-19 | 2005-09-21 | Miraial Co Ltd | Lid unit for thin plate supporting container and thin plate supporting container |
| DE10337570A1 (en) * | 2003-08-14 | 2005-03-17 | Infineon Technologies Ag | Wafer-handling device for laying in and transporting fragile objects like thin wafers has a transporting container and a supporting plate |
| JP4716928B2 (en) * | 2006-06-07 | 2011-07-06 | 信越ポリマー株式会社 | Wafer storage container |
| CN102339777B (en) * | 2010-07-15 | 2013-09-11 | 家登精密工业股份有限公司 | Wafer limiting piece of wafer box |
| DE102010040918B4 (en) * | 2010-09-16 | 2013-10-31 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Container for stacking and transporting discs of brittle material |
| JP5679042B2 (en) | 2011-02-28 | 2015-03-04 | 株式会社タンガロイ | Guide pad, cutting tool body and cutting tool |
| JP5652540B2 (en) | 2011-02-28 | 2015-01-14 | 株式会社タンガロイ | Guide pad, cutting tool body and cutting tool |
| KR101658631B1 (en) | 2014-04-03 | 2016-09-22 | 형제기계공업 주식회사 | Snow removal equipment using the partition |
| CN106784145B (en) * | 2016-12-23 | 2018-03-06 | 中赣新能源股份有限公司 | A kind of silicon chip inserted sheet method |
| CN116936432B (en) * | 2023-09-14 | 2024-01-02 | 常州银河世纪微电子股份有限公司 | Wafer storage box, taking and placing device using same and taking and placing method |
| CN119364745B (en) * | 2024-12-26 | 2025-04-01 | 深圳市奔强电路有限公司 | A stacked circuit board conveying device for circuit board processing |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5648126A (en) * | 1979-09-26 | 1981-05-01 | Nec Kyushu Ltd | Auxiliary carrier for replacing wafers |
| JPS60160539U (en) * | 1984-04-02 | 1985-10-25 | ソニー株式会社 | Container for storing semiconductor wafers, etc. |
| US4687097A (en) * | 1984-12-11 | 1987-08-18 | Empak, Inc. | Wafer processing cassette |
| US4724963A (en) * | 1985-02-20 | 1988-02-16 | Empak, Inc. | Wafer processing cassette |
| US4684021A (en) * | 1986-06-23 | 1987-08-04 | Fluoroware, Inc. | Bottom loading wafer carrier box |
| JPH0284319U (en) * | 1988-12-20 | 1990-06-29 | ||
| US5154301A (en) * | 1991-09-12 | 1992-10-13 | Fluoroware, Inc. | Wafer carrier |
| ATE147045T1 (en) * | 1992-07-08 | 1997-01-15 | Daifuku Kk | CONTAINERS FOR DISC-LIKE ITEMS |
-
1994
- 1994-06-17 JP JP6158228A patent/JP2791971B2/en not_active Expired - Lifetime
-
1995
- 1995-06-10 TW TW084105930A patent/TW299485B/zh not_active IP Right Cessation
- 1995-06-12 FR FR9506920A patent/FR2725185B1/en not_active Expired - Fee Related
- 1995-06-14 GB GB9512022A patent/GB2290414B/en not_active Expired - Fee Related
- 1995-06-14 DE DE19521575A patent/DE19521575C2/en not_active Expired - Fee Related
- 1995-06-16 KR KR1019950016073A patent/KR100332719B1/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| GB9512022D0 (en) | 1995-08-09 |
| JPH088332A (en) | 1996-01-12 |
| FR2725185B1 (en) | 1997-10-17 |
| TW299485B (en) | 1997-03-01 |
| KR100332719B1 (en) | 2002-10-31 |
| DE19521575C2 (en) | 2002-04-18 |
| DE19521575A1 (en) | 1995-12-21 |
| KR960002468A (en) | 1996-01-26 |
| GB2290414B (en) | 1998-07-29 |
| FR2725185A1 (en) | 1996-04-05 |
| GB2290414A (en) | 1995-12-20 |
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