JP2801462B2 - Superconducting magnetic sensor and method of manufacturing the same - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a superconducting magnetic sensor and a method of manufacturing the same, and more particularly, to a superconducting magnetic sensor formed of an oxide superconducting film having a crystal grain boundary and exhibiting a magnetoresistance effect, and a method of manufacturing the same. .

[0002]

2. Description of the Related Art As a superconducting magnetic sensor of this type, as previously proposed by the present applicant, an oxide superconducting film (Y ₁ Ba ₂
Cu ₃ O _7-x ) is formed on one side of the substrate in a meander pattern (a zigzag linear pattern).
Priority Application based on No. 264682 (Japanese Patent Application No. 3-2)
52509)). This superconducting magnetic sensor is a SQUID
The output level is higher than that of the (superconducting quantum interference device), and the magnetism can be measured with a signal processing system having a simple configuration. Its magnetic detection sensitivity (minimum magnetic flux resolution) is 10 ^-5
(More precisely, gauss / (Hz) ^1/2 and the unit.) ^10-6 gauss was.

[0003]

By the way, biomagnetism,
In particular, detecting the magnetism from the heart is a very important application of the magnetic sensor, but when detecting biomagnetism, a magnetic detection sensitivity of 10 ⁻⁷ gauss is required. Therefore, it is required to increase the magnetic detection sensitivity of the superconducting magnetic sensor.

An object of the present invention is to provide a superconducting magnetic sensor capable of obtaining high magnetic detection sensitivity and a method for manufacturing the same.

[0005]

In order to achieve the above object, a superconducting magnetic sensor according to the present invention is provided on a plurality of substrate surfaces parallel to each other in a linear manner and has a first oxide superconducting effect exhibiting a magnetoresistance effect. A film, a cylindrical member penetrating through the respective substrate surfaces, and a second member which covers the surface of the cylindrical member and electrically connects the first oxide superconducting films provided on the respective substrate surfaces in series. Characterized by having an oxide superconducting film of

In addition, the first oxide superconducting film is provided on each of the plurality of substrates in the same direction, and the cylindrical member has a lateral hole penetrating the peripheral surface between the substrates. It is desirable that the end surface of the lateral hole be covered with the second oxide superconducting film.

It is preferable that the first oxide superconducting film is provided on the surface of the two substrates facing each other or on the surface facing each other.

It is desirable that the first oxide superconducting film is provided on both surfaces of one substrate.

Further, the first oxide superconducting film is provided on both surfaces of a plurality of substrates, respectively, and the cylindrical member is formed of two substrates.
A first cylindrical member penetrating through the opposing surfaces of the one substrate; and a second cylindrical member penetrating through both surfaces of the one substrate, wherein the second oxide superconducting film includes the first oxide member. It is desirable to cover the surfaces of the cylindrical member and the second cylindrical member, respectively.

Further, it is desirable that the first cylindrical member penetrates each of the substrates and is continuous.

Further, according to a method of manufacturing a superconducting magnetic sensor of the present invention, a step of providing a metal film having a predetermined linear pattern on one surface of each of a plurality of substrates, and a step corresponding to an end of the metal film of each substrate A step of penetrating the cylindrical member and connecting the respective substrates integrally via a metal cylindrical member, and showing a magnetoresistive effect on the surfaces of the metal film and the cylindrical member by electrophoresis. A first oxide superconducting film,
A second oxide superconducting film is simultaneously deposited, followed by heat treatment in an atmosphere containing oxygen to sinter the first oxide superconducting film and the second oxide superconducting film, and The method is characterized by including a step of changing the surfaces of the metal film and the cylindrical member into an insulating film.

Further, a method of manufacturing a superconducting magnetic sensor according to the present invention includes the steps of providing a metal film of a predetermined linear pattern symmetrically on both surfaces of one substrate, and corresponding to an end of the metal film of each substrate. A step of penetrating a metal cylindrical member at a position to be integrated with the substrate and the cylindrical member, and a first method of forming a magnetoresistive effect on the surfaces of the metal film and the cylindrical member by electrophoresis. The oxide superconducting film and the second oxide superconducting film are simultaneously deposited, and then heat treatment is performed in an atmosphere containing oxygen to form the first oxide superconducting film and the second oxide superconducting film. The method is characterized by including a step of sintering and changing the surface of each of the metal films and the cylindrical member into an insulating film.

Further, according to the method of manufacturing a superconducting magnetic sensor of the present invention, a metal film having a predetermined linear pattern is provided on both surfaces of a plurality of substrates symmetrically on both surfaces of each substrate; Each of the substrates is integrally connected by penetrating one metal first cylindrical member at a position corresponding to one end of the substrate, and corresponds to the other end of the metal film of each substrate. A step of penetrating a second cylindrical member made of metal penetrating one substrate at a position, and applying a first oxide superconducting film exhibiting a magnetoresistance effect to the surface of the metal film by electrophoresis At the same time, a second oxide superconducting film exhibiting a magnetoresistive effect is deposited on the surfaces of the first and second cylindrical members, and subsequently, a heat treatment is performed in an atmosphere containing oxygen. The oxide superconducting film and the second oxide superconducting film are sintered and A step of changing the surfaces of the metal film and the first and second cylindrical members to an insulating film; and a step of removing the second oxide superconducting film covering the end surface of the first cylindrical member. It is characterized by:

[0014]

In the superconducting magnetic sensor according to the present invention, the first oxide superconducting films provided on the mutually parallel substrate surfaces are connected in series via the second oxide superconducting film. Therefore, the generated resistance to the magnetic field increases, the SN ratio (signal noise ratio) increases, and the magnetic detection sensitivity increases. Note that the first oxide superconducting film is stacked in a direction perpendicular to the substrate surface and does not spread in the direction along the substrate surface, so that the spatial resolution hardly decreases.

Further, the first oxide superconducting film is provided on each of the plurality of substrates in the same direction, and the cylindrical member has a lateral hole penetrating the peripheral surface between the substrates. When the second oxide superconducting film covers the end face of the first oxide superconducting film 1, as shown in FIG.
A connection path C1 for electrically connecting 1,... In series occurs. That is, the outer peripheral surface between the substrates 10 and 10 of the cylindrical member 12, the end surface of the lateral hole 12t, the inner peripheral surface of the cylindrical member 12, the end surface of the adjacent lateral hole 12t, and the adjacent substrates 10 and 10 Is a connection path C1 by the second oxide superconducting film 2. Therefore, the first oxide superconducting film 1,
Are easily connected in series.

In the case where the first oxide superconducting film is provided on the surfaces of two substrates facing each other, as shown in FIG. 2, the first oxide superconducting film 10
A connection path C2 that electrically connects 1,151 in series is generated. That is, the portion between the two substrates 110 and 110 on the outer peripheral surface of the cylindrical member 112 becomes the connection path C2 by the second oxide superconducting film 102. Therefore, the first
Oxide superconducting films 101 and 151 are easily connected.
In the case where the first oxide superconducting films 101, 101 are provided on opposite surfaces of the two substrates 110, 110, respectively, as illustrated in FIG. Substrates 110, 110 of the outer peripheral surface
, The end surface and the inner peripheral surface of the cylindrical member 112 form a connection path C3 by the second oxide superconducting film 102. Therefore, the first oxide superconducting films 101 and 151
Are easily connected in series.

When the first oxide superconducting film is provided on both surfaces of one substrate, the first oxide superconducting films 201 and 251 are electrically connected as shown in FIG. A connection path C4 connected in series is generated. That is, a portion of the outer peripheral surface of the cylindrical member 212 outside the substrate 210, the end surface of the cylindrical member 212, and the inner peripheral surface are the second.
Of the oxide superconducting film 202. Therefore, the first oxide superconducting films 201 and 251 are easily connected in series.

Further, the first oxide superconducting film is provided on both surfaces of a plurality of substrates, respectively, and the cylindrical member is formed of two or more substrates.
A first cylindrical member penetrating through the opposing surfaces of the one substrate; and a second cylindrical member penetrating through both surfaces of the one substrate, wherein the second oxide superconducting film includes the first oxide member. When the surfaces of the cylindrical member and the second cylindrical member are respectively coated, as shown in FIG. 5, the first oxide superconducting films 301, 351, 301, 351,. A connection path C5 that connects to is generated. That is, the second oxide superconducting film 302 covering the first cylindrical member 312 has a thickness of 2
The first oxide superconducting films 351 and 301 provided on the surfaces of the substrates 310 and 310 facing each other are electrically connected in series, while the second oxide covering the second cylindrical member 392. The superconducting film 382 electrically connects the first oxide superconducting films 311 and 351 provided on both surfaces of one substrate 310 in series. Therefore, the plurality of substrates 310,
, The first oxide superconducting film 3 provided on both surfaces of
Are all connected in series, and as a result, the magnetic detection sensitivity is significantly increased. In this case, a path passing through the inner peripheral surface of the first cylindrical member is not used (blocked).

Further, when the first cylindrical member penetrates each of the substrates and is continuous, each substrate can be connected at a time, thereby simplifying the manufacturing process. Moreover, the mechanical strength after connection is increased.

[0020]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The superconducting magnetic sensor according to the present invention and a method for manufacturing the same will be described in detail below with reference to embodiments.

FIG. 6A shows the superconducting magnetic sensor of the first embodiment viewed obliquely from above, and FIG. 6B shows the superconducting magnetic sensor viewed from right beside. This superconducting magnetic sensor
It comprises four YSZ (yttrium-stabilized zirconium) substrates 10 arranged in parallel with each other, and three cylindrical members 12 penetrating these substrates 10 by two and integrally connecting them. A first oxide superconducting film (Y ₁ Ba ₂ Cu ₃ O _{7 -x} film) 1 having a meandering pattern (square folding) is provided on a surface (one surface) in the same direction of each substrate 10. Each first
The end portions 1a and 1b of the oxide superconducting film 1 are rectangular in a predetermined size, and the cylindrical member 12 is provided with the end portions 1a and 1b of the first oxide superconducting film 1 for every two substrates. Are alternately penetrated. The cylindrical member 12 is provided with a lateral hole 12 t penetrating the peripheral surface between the substrates 10. The surface of the cylindrical member 12, that is, the outer peripheral surface, the end surface, the inner peripheral surface, and the end surface of the lateral hole 12t are formed on the second oxide superconducting film (Y ₁ Ba).
₂ Cu ₃ O _7-x film) 2. Therefore, as described with reference to FIG. 1, the first oxide superconducting film 1 on each substrate surface is electrically connected in series by the second oxide superconducting film 2.

This superconducting magnetic sensor is manufactured as follows. First, a copper film is vacuum-deposited on one surface of each YSZ substrate 10 and subjected to photolithography to form a meander-patterned copper electrode having a line width of 500 μm and a line length of 251 mm (the first oxide superconducting film is deposited). Electrode 11) and the copper electrode 1
1. Opposite electrodes with a line width of 100 μm that are spaced apart in the substrate plane
(Shown in FIG. 10). The copper electrode 11,
The ends 11a, 11b, 31a of the counter electrode 31 are formed in a rectangular shape. Next, as shown in FIG. 1, a copper electrode 1 was placed on each of the two substrates.
The cylindrical member 12 is provided at a position corresponding to the end portions 11a and 11b of the
Are alternately penetrated to integrally connect the substrates 10 via the cylindrical member 12. Next, the first oxide superconducting film 1 and the second oxide superconducting film 1 were respectively formed on the surfaces of the copper electrode 11 and the cylindrical member 12 by electrophoresis.
Of the oxide superconducting film 2 is simultaneously applied to four substrates. At this time, as shown in FIG.
Is a negative potential, and the counter electrode 31 is a positive potential. Subsequently, heat treatment is performed at 900 ° C. for 3 hours in an atmosphere containing oxygen,
The first oxide superconducting film 1 and the second oxide superconducting film 2
While sintering each copper electrode 11 and cylindrical member 12
Is turned into an insulating film. Finally, as shown in FIG. 6, current terminals 3i and voltage terminals 3v are attached to the ends 1a and 1b of the first oxide superconducting film of the substrate 10 at both ends.

In this superconducting magnetic sensor, since the first oxide superconducting films 1 of a plurality of (four) substrates are electrically connected in series, the generated resistance to a magnetic field increases.
The SN ratio (signal noise ratio) increases. Therefore, the magnetic detection sensitivity can be increased as compared with the related art. In addition,
Since the first oxide superconducting film 1 is stacked in a direction perpendicular to the substrate surface and does not spread in the direction along the substrate surface, the spatial resolution hardly decreases.

When the measurement was actually performed, the superconducting magnetic sensor had a magnetoelectric conversion rate of 500 mV / gauss, a noise level of 164 nV / (Hz) ^1/2 and a magnetic detection sensitivity (minimum magnetic flux resolution) of 3. It was 3 × 10 ⁻⁷ gauss / (Hz) ^1/2 . On the other hand, the conventional one (having a Y ₁ Ba ₂ Cu ₃ O _7-x film on only one side of one substrate) has a magnetoelectric conversion rate of 125 mV / gauss and a noise level of 82.0 nV / (Hz)
^1/2 and the magnetic detection sensitivity is 6.6 × 10 ^-7 gauss / (Hz)
It was ^1/2 . Therefore, the magnetic detection sensitivity could be increased about 0.50 times.

FIG. 7 shows a superconducting magnetic sensor according to a second embodiment. In this example, as shown in FIG.
First oxide superconducting film (Y ₁ Ba ₂ Cu ₃ O _{7 -x} film) 1 in a meander pattern is formed on surfaces of substrates 110 and 150 facing each other.
01 and 151 are provided in mirror symmetry. The surface of the cylindrical member 112 connecting these substrates 110 and 150 together is formed of a second oxide superconducting film (Y ₁ Ba ₂ Cu ₃ O _{7 -x} film) 10.
2 coated. Therefore, as described with reference to FIG. 2, the first oxide superconducting film 101, 1
Reference numeral 51 is electrically connected in series by the second oxide superconducting film 102.

This superconducting magnetic sensor is manufactured as follows. First, as shown in FIG.
0, copper electrodes 111 and 16 on one side as in the first embodiment.
Form one. In addition, each counter electrode (end 131a,
181a only) is formed at the same time. Next, the substrates 110 and 150 are opposed to each other in parallel,
The cylindrical members 112 are penetrated at locations corresponding to the end portions 111a, 161a of the copper electrodes 111, 161 to form the substrates 110, 161.
0 are connected together. Next, as shown in FIG. 2B, the first oxide superconducting films 101 and 151 and the second oxide superconducting film were respectively formed on the surfaces of the copper electrodes 111 and 161 and the cylindrical member 112 by electrophoresis. The film 102 is simultaneously applied. Subsequently, a heat treatment at 900 ° C. for 3 hours is performed in an atmosphere containing oxygen to sinter the first oxide superconducting films 101 and 151 and the second oxide superconducting film 102 and to form each copper electrode 111, 161
Then, the surface of the cylindrical member 112 is changed to an insulating film. Finally, current terminals 103i and voltage terminals 103v are attached to the ends 101b and 151b of the first oxide superconducting films 101 and 151, respectively.

As in the first embodiment, this superconducting magnetic sensor can also increase the magnetic detection sensitivity as compared with the related art (one substrate). When the measurement was actually performed, the magnetoelectric conversion rate was 250 mV / gauss, and the noise level was 116 nV.
/ (Hz) ^1/2 , and the magnetic detection sensitivity (minimum magnetic flux resolution) could be increased to 0.71 times the conventional value.

In this example, the YSZ substrates 110, 1
A first oxide superconducting film (Y ₁ B)
Although the a ₂ Cu ₃ O _7-x films) 101 and 151 are provided, the first oxide superconducting films may be provided on the surfaces of the YSZ substrates 110 and 150 opposite to each other. Also in this case, as described with reference to FIG. 3, each first oxide superconducting film can be connected in series, and therefore, the same magnetic detection sensitivity can be obtained.

FIG. 8 shows a superconducting magnetic sensor according to the third embodiment (FIG. 8 (a) is an oblique view from above, and FIG.
(c) shows both surfaces of the substrate. ). In this example, meander-patterned first oxide superconducting films (Y ₁ Ba ₂ Cu ₃ O _{7 -x} films) 201 and 25 are formed on both surfaces of a YSZ substrate 210.
1 are provided symmetrically. The surface of the cylindrical member 212 that penetrates the substrate 210 has a second oxide superconducting film (Y ₁ B
a ₂ Cu ₃ O _{7 -x} film) 202. Therefore, as described with reference to FIG. 4, the first oxide superconducting films 201 and 251 on both surfaces are
2 electrically connected in series.

This superconducting magnetic sensor is manufactured as follows. First, copper electrodes 211 and 261 in a meander pattern are formed on both surfaces of the YSZ substrate 210. Note that counter electrodes (only the end portions 231a and 281a are shown) are formed at the same time. Next, the cylindrical member 212 is penetrated at a position corresponding to the end portions 211a and 261a of the copper electrodes 211 and 261 of the substrate 210. Next, the copper electrodes 211 and 261 were formed by electrophoresis.
Then, the first oxide superconducting films 201 and 251 and the second oxide superconducting film 202 are simultaneously deposited on the surface of the cylindrical member 212, respectively. At this time, as shown in FIG.
11 is a negative potential, and the counter electrode 231 is a positive potential. Subsequently, a heat treatment is performed at 900 ° C. for 3 hours in an atmosphere containing oxygen, so that the first oxide superconducting films 201 and 251 and the second
Sintering of the oxide superconducting film 202 of each
11, 261 and the surface of the cylindrical member 212 are changed into insulating films. Finally, as shown in FIG. 8A, the current terminals 20 are connected to the ends 201b and 251b of the first oxide superconducting films 201 and 251.
3i and the voltage terminal 203v are attached.

This superconducting magnetic sensor can also increase the magnetic detection sensitivity as compared with the related art (one substrate), similarly to the above embodiments. When the measurement was actually performed, the magnetoelectric conversion rate was 250 mV / gauss, and the noise level was 116 n.
V / (Hz) ^1/2 , and as in the second embodiment, the magnetic detection sensitivity (minimum magnetic flux resolution) could be increased to 0.71 times the conventional value.

FIG. 9 shows a superconducting magnetic sensor according to the fourth embodiment (FIG. 9 (a) is an oblique view from above, and FIG. 9 (b)
Indicates the position viewed from the side. ). This superconducting magnetic sensor is composed of four Y
An SZ substrate 310, one first cylindrical member 312 penetrating the four substrates 310 and integrally connected thereto;
It is provided with four second cylindrical members 392 that penetrate through the two substrates. A first oxide superconducting film (Y ₁ Ba ₂ Cu ₃ O _{7 -x} film) 3 having a meander pattern on both surfaces of each substrate 310.
01,351 are provided symmetrically. As shown in FIG. 3A, the end portions 301a, 301 of each first oxide superconducting film 301 are formed.
No. 01b has a rectangular shape with a predetermined dimension (the end portions 351a and 351b of the back-side first oxide superconducting film 351 also have a rectangular shape). The first cylindrical member 312 penetrates a portion corresponding to one end 301a of the first oxide superconducting film 301, while the second cylindrical member 39
2 is the other end 301b of the first oxide superconducting film 301
Penetrates a portion corresponding to. The surfaces of the first cylindrical member 312 and the second cylindrical member 392 are both formed of the second oxide superconducting film (Y ₁ Ba ₂ Cu ₃ O _{7 -x} film) 302,3.
82. Therefore, as described with reference to FIG. 5, the first oxide superconducting films 301 and 351 on both surfaces of each substrate 310 are replaced with the second oxide superconducting films 302 and 351.
382 are electrically connected in series.

This superconducting magnetic sensor is manufactured as follows. First, copper electrodes 311 and 361 in a meander pattern are formed on both surfaces of each YSZ substrate 310. Note that counter electrodes (only the end portion 331a is shown) are formed at the same time. Next, the copper electrodes 311 (and 36)
1) penetrates one first cylindrical member 312 at a position corresponding to one end 311a and four second cylindrical members at a position corresponding to the other end 311b of the copper electrode 311. It penetrates the member 392. Next, the copper electrodes 311 and 361 were formed by electrophoresis.
And the first oxide superconducting films 301, 351 and 351 on the surfaces of the first cylindrical member 312 and the second cylindrical member 392, respectively.
The second oxide superconducting films 302 and 382 are simultaneously deposited. Subsequently, a heat treatment is performed at 900 ° C. for 3 hours in an atmosphere containing oxygen to form the first oxide superconducting films 301 and 3.
51, sintering the second oxide superconducting films 302 and 382, and changing the surfaces of the copper electrodes 311 and 361 and the first cylindrical member 312 and the second cylindrical member 392 into insulating films. Next, both ends of the first cylindrical member 312 are cut into a ring shape. Thereby, the connection path that passes through the inner peripheral surface of the first cylindrical member in the vertical direction is blocked. Finally, as shown in FIG. 3A, an end 301a of the first oxide superconducting film 301 of the upper substrate 310 and an end 351a of the first oxide superconducting film 351 of the lower substrate 310.
Then, a current terminal 203i and a voltage terminal 203v are respectively attached.

This superconducting magnetic sensor can also improve the magnetic detection sensitivity as compared with the conventional one (one substrate), as in the above embodiments. When the measurement was actually performed, the magnetoelectric conversion rate was 1000 mV / gauss, and the noise level was 232.
nV / (Hz) ^1/2 , magnetic detection sensitivity (minimum magnetic flux resolution)
Was increased to 0.35 times the conventional value.

[0035]

As is apparent from the above description, the superconducting magnetic sensor of the present invention is characterized in that the first oxide superconducting film existing on the mutually parallel substrate surfaces is replaced by the second oxide superconducting film covering the surface of the cylindrical member. Since the films are connected in series, the resistance to a magnetic field can be increased. Therefore, the magnetic detection sensitivity can be increased.

Further, according to the method for manufacturing a superconducting magnetic sensor of the present invention, a superconducting magnetic sensor having high magnetic detection sensitivity can be manufactured by simple steps.

[Brief description of the drawings]

FIG. 1 shows a first embodiment of a superconducting magnetic sensor according to the present invention.
FIG. 4 is a diagram illustrating a connection path of the oxide superconducting film of FIG.

FIG. 2 shows a first embodiment of the superconducting magnetic sensor according to the present invention.
FIG. 4 is a diagram illustrating a connection path of the oxide superconducting film of FIG.

FIG. 3 shows a first embodiment of the superconducting magnetic sensor according to the present invention.
FIG. 4 is a diagram illustrating a connection path of the oxide superconducting film of FIG.

FIG. 4 shows a first embodiment of the superconducting magnetic sensor according to the present invention.
FIG. 4 is a diagram illustrating a connection path of the oxide superconducting film of FIG.

FIG. 5 shows a first embodiment of the superconducting magnetic sensor according to the present invention.
FIG. 4 is a diagram illustrating a connection path of the oxide superconducting film of FIG.

FIG. 6 is a diagram showing a superconducting magnetic sensor according to a first embodiment of the present invention.

FIG. 7 is a diagram showing a superconducting magnetic sensor according to a second embodiment of the present invention.

FIG. 8 is a diagram showing a superconducting magnetic sensor according to a third embodiment of the present invention.

FIG. 9 is a diagram showing a superconducting magnetic sensor according to a fourth embodiment of the present invention.

FIG. 10 illustrates a step of depositing an oxide superconducting film by an electrophoresis method.

FIG. 11 illustrates a step of depositing an oxide superconducting film by an electrophoresis method.

[Explanation of symbols]

1,101,151,201,251,301,351 1st
Oxide superconducting film of 2,102,202,302,382 Second oxide superconducting film 10,110,210,310 YSZ substrate 11,111,161,211,261,311,361 Copper electrode 12,112,212 Cylindrical member 312 First cylindrical member 392 Second cylindrical member

──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Masaya Nagata 22-22 Nagaikecho, Abeno-ku, Osaka-shi, Osaka Inside Sharp Corporation (72) Inventor Masayoshi Kiba 22-22 Nagaikecho, Abeno-ku, Osaka-shi, Osaka Sharp Corporation (56) References JP-A-3-248070 (JP, A) JP-A-2-114575 (JP, A) JP-A-5-196714 (JP, A) (58) Fields investigated (Int. Cl. ⁶ , DB name) G01R 33/035 ZAA G01R 33/09 ZAA H01L 39/22 ZAA H01L 43/08 ZAA

Claims (9)

(57) [Claims] A first oxide superconducting film linearly provided on a plurality of substrate surfaces parallel to each other and exhibiting a magnetoresistance effect; a cylindrical member penetrating the respective substrate surfaces; And a second oxide superconducting film for electrically connecting the first oxide superconducting films provided on the respective substrate surfaces in series with each other. 2. The superconducting magnetic sensor according to claim 1, wherein the first oxide superconducting films are respectively provided on surfaces of a plurality of substrates in the same direction, and the cylindrical member penetrates a peripheral surface. A superconducting magnetic sensor, wherein a lateral hole is provided between the substrates, and an end face of the lateral hole is covered with the second oxide superconducting film. 3. The superconducting magnetic sensor according to claim 1, wherein the first oxide superconducting film is provided on surfaces of the two substrates facing each other or surfaces facing each other. Superconducting magnetic sensor. 4. The superconducting magnetic sensor according to claim 1, wherein the first oxide superconducting film is provided on both surfaces of one substrate. 5. The superconducting magnetic sensor according to claim 1, wherein the first oxide superconducting film is provided on both surfaces of a plurality of substrates, respectively, and the cylindrical member is a surface of the two substrates facing each other. And a second cylindrical member that penetrates both surfaces of one substrate, wherein the second oxide superconducting film includes the first cylindrical member and the second cylindrical member. A superconducting magnetic sensor characterized by covering the surfaces of cylindrical members. 6. The superconducting magnetic sensor according to claim 5, wherein the first cylindrical member penetrates each of the substrates and is continuous. 7. A step of providing a metal film having a predetermined linear pattern on one surface of each of a plurality of substrates, and a process of penetrating a metal cylindrical member at a position corresponding to an end of the metal film on each of the substrates. A step of integrally connecting the respective substrates via the cylindrical member; and a first oxide superconducting film, which exhibits a magnetoresistive effect on the surfaces of the metal film and the cylindrical member, respectively, by electrophoresis.
Oxide superconducting films are simultaneously deposited, and then heat-treated in an atmosphere containing oxygen to sinter the first oxide superconducting film and the second oxide superconducting film, And a step of changing the surface of the cylindrical member into an insulating film. 8. A step of providing a metal film of a predetermined linear pattern symmetrically on both surfaces of one substrate, and penetrating a metal cylindrical member at a position corresponding to an end of the metal film on each of the substrates. Integrating the substrate and the cylindrical member by electrophoresis. The first oxide superconducting film and the second oxide superconductive film exhibiting a magnetoresistive effect on the surfaces of the metal film and the cylindrical member, respectively.
Oxide superconducting films are simultaneously deposited, and then heat-treated in an atmosphere containing oxygen to sinter the first oxide superconducting film and the second oxide superconducting film, And a step of changing the surface of the cylindrical member into an insulating film. 9. A step of providing a metal film having a predetermined linear pattern symmetrically on both surfaces of a plurality of substrates on both surfaces of each substrate; and forming one metal film on each of the substrates at a position corresponding to one end of the metal film. The first metal-made cylindrical member of the present invention penetrates one substrate at a position corresponding to the other end of the metal film of each substrate while connecting the substrates integrally with each other. A first oxide superconducting film exhibiting a magnetoresistive effect on the surface of the metal film by electrophoresis,
And applying a second oxide superconducting film exhibiting a magnetoresistive effect to the surface of the second cylindrical member, and subsequently performing a heat treatment in an atmosphere containing oxygen to form the first oxide superconducting film, Sintering the second oxide superconducting film and changing the surface of each of the metal films and the first and second cylindrical members into an insulating film; and covering the end surface of the first cylindrical member. A method for manufacturing a superconducting magnetic sensor, comprising: removing a second oxide superconducting film.