JP2802126B2 - Displacement meter and method of adjusting position of light receiving unit - Google Patents
Displacement meter and method of adjusting position of light receiving unitInfo
- Publication number
- JP2802126B2 JP2802126B2 JP32016689A JP32016689A JP2802126B2 JP 2802126 B2 JP2802126 B2 JP 2802126B2 JP 32016689 A JP32016689 A JP 32016689A JP 32016689 A JP32016689 A JP 32016689A JP 2802126 B2 JP2802126 B2 JP 2802126B2
- Authority
- JP
- Japan
- Prior art keywords
- holding member
- light receiving
- main body
- displacement meter
- fixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 238000006073 displacement reaction Methods 0.000 title claims description 37
- 238000000034 method Methods 0.000 title description 6
- 238000003825 pressing Methods 0.000 description 13
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 101001080808 Homo sapiens PH and SEC7 domain-containing protein 2 Proteins 0.000 description 3
- 102100027455 PH and SEC7 domain-containing protein 2 Human genes 0.000 description 3
- 101000736367 Homo sapiens PH and SEC7 domain-containing protein 3 Proteins 0.000 description 1
- 102100036231 PH and SEC7 domain-containing protein 3 Human genes 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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- Details Of Measuring And Other Instruments (AREA)
- Measurement Of Optical Distance (AREA)
Description
【発明の詳細な説明】 [産業上の利用分野] 本発明は変位計の受光部に関し、特にその位置調整に
関するものである。Description: TECHNICAL FIELD The present invention relates to a light receiving section of a displacement meter, and more particularly to position adjustment thereof.
[従来の技術] 変位計は内蔵する受光素子から発光を行い、照射光を
被測定物体に照射する。そして、被測定物体からの拡散
反射光を集光レンズにより集光し、変位計に内蔵する受
光素子としての位置検出素子(以下「PSD」という)の
受光面上に照射させ、受光点を形成させる。被測定物体
が所定の基準距離から移動したとき、この受光点の位置
も被測定物体の変位に比例して移動する(三角測距の原
理)。変位計はこの移動したPSD上の受光点の照射位置
を検出することにより、被測定物体の変位を演算し測定
する測定器である。[Prior Art] A displacement meter emits light from a built-in light receiving element, and irradiates irradiation light to a measured object. Then, the diffuse reflection light from the object to be measured is condensed by a condenser lens, and radiated on the light receiving surface of a position detecting element (hereinafter, referred to as "PSD") as a light receiving element built in the displacement meter to form a light receiving point. Let it. When the measured object moves from a predetermined reference distance, the position of the light receiving point also moves in proportion to the displacement of the measured object (principle of triangulation). The displacement meter is a measuring device that calculates and measures the displacement of the measured object by detecting the irradiation position of the light receiving point on the moved PSD.
被測定物体の変位を演算する演算回路は、被測定物体
が基準距離におかれているとき、PSD上の受光点はPSDの
中心点に位置するものとして構成されている。従って、
被測定物体が基準距離にあるときの受光点が、PSDの中
心点からずれて位置する場合は正確な測定を行うことが
できない。PSD上の受光点の位置の調整はPSDを移動させ
ることによって行われる。このPSDの位置には微小な調
整が要求される。The arithmetic circuit that calculates the displacement of the measured object is configured such that the light receiving point on the PSD is located at the center point of the PSD when the measured object is at the reference distance. Therefore,
If the light receiving point when the measured object is at the reference distance is shifted from the center point of the PSD, accurate measurement cannot be performed. Adjustment of the position of the light receiving point on the PSD is performed by moving the PSD. Fine adjustment is required for the position of this PSD.
しかし、変位計の量産工程において全ての変位計のPS
Dの装着位置を正確なものとすることは極めて困難であ
る。この為、PSDの装着位置の微調整は個々の変位計に
ついて手作業で行われる。However, in the mass production process of displacement meters, PS
It is extremely difficult to make the mounting position of D accurate. For this reason, fine adjustment of the mounting position of the PSD is performed manually for each displacement meter.
従来のPSDの位置調整を第4図A、第4図B及び第4
図Cに基づいて説明する。変位計は、一般に回路部が収
納される筐体と、筐体の前面に位置するセンサーヘッド
から構成される。第4図A及び第4図Bはセンサーヘッ
ド部のみを示している。センサーヘッド本体4の側面に
は、基板6が固定されている。そして、この基板6とPS
D2とは電線2bで接続されており、PSD2は保持部材3に収
納されている。FIG. 4A, FIG. 4B and FIG.
A description will be given based on FIG. The displacement meter generally includes a housing in which a circuit unit is housed, and a sensor head located on a front surface of the housing. 4A and 4B show only the sensor head. A substrate 6 is fixed to a side surface of the sensor head body 4. And this board 6 and PS
D2 is connected by an electric wire 2b, and PSD2 is stored in the holding member 3.
まず、PSD2が収納されている保持部材3をセンサーヘ
ッド本体4に装着する。センサーヘッド本体4には第4
図Bに示すように貫通穴4aが設けられており、PSD2の受
光面2cを貫通穴4aに向けて装着する。尚、レンズ11は集
光レンズである。このレンズ11は被測定物体からの拡散
反射光を集光し、その集光された光をPSD2の受光面2c上
に照射して受光点を形成させるものである。First, the holding member 3 containing the PSD 2 is mounted on the sensor head body 4. The sensor head body 4 has a fourth
As shown in FIG. B, a through hole 4a is provided, and the light receiving surface 2c of the PSD 2 is attached to the through hole 4a. The lens 11 is a condenser lens. The lens 11 condenses diffusely reflected light from the object to be measured, and irradiates the condensed light on the light receiving surface 2c of the PSD 2 to form a light receiving point.
次に、ねじ8(第4図A参照)により保持部材3をセ
ンサーヘッド本体4に仮固定する。第4図Cに、保持部
材3の背面図を示す。保持部材3には両側面に突出部3b
が設けられている。そしてこの突出部3bはとめ穴3hを有
しておりねじ8はとめ穴3hを貫通してセンサーヘッド本
体4に設けられているねじ穴(図示せず)に螺入され
る。第4図Cに示すようにとめ穴3hは矢印100の示す方
向に長い長穴として設けられている。従って、ねじ8を
センサーヘッド本体4に設けられているねじ穴(図示せ
ず)に仮固定した状態では、保持部材3は矢印100の示
す方向に移動することができる。Next, the holding member 3 is temporarily fixed to the sensor head main body 4 with screws 8 (see FIG. 4A). FIG. 4C shows a rear view of the holding member 3. The holding member 3 has protrusions 3b on both sides.
Is provided. The protrusion 3b has a stop hole 3h, and the screw 8 penetrates the stop hole 3h and is screwed into a screw hole (not shown) provided in the sensor head body 4. As shown in FIG. 4C, the stop hole 3h is provided as a long hole elongated in the direction indicated by the arrow 100. Therefore, when the screw 8 is temporarily fixed to a screw hole (not shown) provided in the sensor head main body 4, the holding member 3 can move in the direction indicated by the arrow 100.
そして、矢印100の示す方向に保持部材3を手作業で
移動させ、受光点をPSD3の中心に位置させる。電線2bは
保持部材3の移動調整が可能な長さを備えているので、
保持部材3の位置調整の障害となることはない。Then, the holding member 3 is manually moved in the direction indicated by the arrow 100, and the light receiving point is positioned at the center of the PSD3. Since the wire 2b has a length that allows the movement of the holding member 3 to be adjusted,
It does not hinder the position adjustment of the holding member 3.
保持部材3を所望の位置、すなわち受光点がPSD2の中
心にくる位置に装着した後、保持部材3の位置を手作業
で保持する。そして、ねじ8をセンサーヘッド本体4に
設けられているねじ穴(図示せず)に完全に螺入して、
保持部材3が移動しないように固定する。こうして変位
計の保持部材の位置調整、すなわち受光部の位置調整を
行う。After attaching the holding member 3 to a desired position, that is, a position where the light receiving point is located at the center of the PSD 2, the position of the holding member 3 is manually held. Then, the screw 8 is completely screwed into a screw hole (not shown) provided in the sensor head body 4,
The holding member 3 is fixed so as not to move. Thus, the position adjustment of the holding member of the displacement meter, that is, the position adjustment of the light receiving unit is performed.
[発明が解決しようとする課題] ところが上記従来の受光部の位置調整には次の様な問
題があった。[Problems to be Solved by the Invention] However, the above-described conventional position adjustment of the light receiving unit has the following problems.
保持部材3の位置調整を行った後、保持部材3をセン
サーヘッド本体4に固定する際、保持部材3はねじ止め
の回転力を受けて矢印100の示す方向にずれが生じる。
この為、再度位置調整を行う必要があり、完全な調整を
行うには調整作業に時間を要し作業効率が悪くなるとい
う問題があった。After the position adjustment of the holding member 3 is performed, when the holding member 3 is fixed to the sensor head main body 4, the holding member 3 receives a rotational force of screwing and shifts in a direction indicated by an arrow 100.
For this reason, it is necessary to perform the position adjustment again, and there is a problem that it takes time for the adjustment work to perform the complete adjustment, and the work efficiency is deteriorated.
又、保持部材3の移動調整を想定して電線2bは長く設
けられているので、ノイズの影響が大きくなり、測定精
度の信頼性を損うという問題もあった。In addition, since the wire 2b is provided long in consideration of the movement adjustment of the holding member 3, there is a problem that the influence of noise increases and the reliability of measurement accuracy is impaired.
そこで、本発明は上記問題点を解決し、変位計の受光
部の位置調整を容易かつ確実に行うことができる変位計
及びその位置調整方法を提供することを目的とし、あわ
せて信頼性のある測定精度を備えた変位計を提供するこ
とを目的とする。Therefore, an object of the present invention is to solve the above-mentioned problems, and to provide a displacement meter and a position adjusting method capable of easily and surely adjusting the position of a light receiving section of the displacement meter, and at the same time, have a high reliability. An object of the present invention is to provide a displacement meter having measurement accuracy.
[課題を解決するための手段] 請求項1に係る変位計は、貫通穴を有する本体、本体
に固定される保持部材であって、前記貫通穴を貫通して
照射される光を受光し、その受光面上に受光点が形成さ
れる受光素子を備える保持部材、を備えた変位計におい
て、本体及び保持部材は、互に嵌合しスライド可能な嵌
合手段を備え、保持部材は、嵌合手段の嵌合により本体
に装着されており、保持部材は固定部材により本体に固
定されていることを特徴としている。[Means for Solving the Problems] A displacement meter according to claim 1, which is a main body having a through hole, a holding member fixed to the main body, and receives light irradiated through the through hole, In a displacement meter including a holding member including a light receiving element having a light receiving point formed on the light receiving surface, the main body and the holding member include fitting means that can be fitted and slidable with each other. It is attached to the main body by fitting of the combining means, and the holding member is fixed to the main body by a fixing member.
請求項2に係る変位計は、請求項1の変位計におい
て、保持部材には、受光素子と電気的に接続された配線
基板が固定されていることを特徴としている。According to a second aspect of the present invention, there is provided the displacement meter according to the first aspect, wherein a wiring board electrically connected to the light receiving element is fixed to the holding member.
請求項3に係る変位計の受光部の位置調整方法は、貫
通穴を有する本体に、該貫通穴を貫通して照射される光
を受光し、その受光面上に受光点が形成される受光素子
を備える保持部材を装着する工程であって、本体及び保
持部材の備えるスライド可能な嵌合手段を互に嵌合する
ことにより本体に保持部材を装着する工程、本体及び保
持部材の備える嵌合手段をスライドし、保持部材の装着
位置を移動することによって受光点の位置を所望の位置
に調整する工程、保持部材を所望の位置に保持した状態
で、固定部材により保持部材を本体に固定する工程を備
えたことを特徴としている。A method of adjusting the position of a light receiving section of a displacement meter according to claim 3, wherein the light having a through hole is received by a body having a through hole, and a light receiving point is formed on the light receiving surface. A step of mounting a holding member provided with an element, wherein the step of mounting the holding member on the main body by fitting the slidable fitting means provided on the main body and the holding member to each other, the fitting provided by the main body and the holding member A step of adjusting the position of the light receiving point to a desired position by sliding the means and moving the mounting position of the holding member, and fixing the holding member to the main body by the fixing member while holding the holding member at the desired position. It is characterized by having a process.
[作用] 請求項1に係る変位計及び請求項3に係る変位計の受
光部の位置調整方法は、嵌合手段をスライドさせること
によって保持部材を移動させ、受光素子の受光面上に形
成される受光点の位置を所望の位置に調整して保持部材
を本体に固定する。[Operation] In the displacement meter according to the first aspect and the position adjusting method of the light receiving unit of the displacement meter according to the third aspect, the holding member is moved by sliding the fitting means to be formed on the light receiving surface of the light receiving element. The position of the light receiving point is adjusted to a desired position, and the holding member is fixed to the main body.
従って、保持部材を所望の位置に保持することが容易
であり、保持部材の固定位置がずれない。Therefore, it is easy to hold the holding member at a desired position, and the fixing position of the holding member does not shift.
請求項2に係る変位計は、保持部材に配線基板が固定
されている。In the displacement meter according to the second aspect, the wiring board is fixed to the holding member.
従って、保持部材と配線基板とを接続する電線等の接
続手段が不要となり、ノイズによる影響を少なくするこ
とが可能となる。Therefore, a connecting means such as an electric wire for connecting the holding member to the wiring board becomes unnecessary, and the influence of noise can be reduced.
[実施例] 本発明の一実施例を図面に基づき説明する。第1図に
示す本体としてのセンサーヘッド本体4は、変位計の前
面部に取り付けられるものである。センサーヘッド本体
4には貫通穴4aが形成されており、メイン基板64はセン
サーヘッド本体4に固定されている。まず、PSD2を保持
部材3に装着して、シールド板22でPSD2を固定する。こ
の保持部材3はPSD2とセンサーヘッド本体4との絶縁性
を保つ為の部材である。次に、保持部材3のPSD2が固定
されている背面の側に、初段アンプ62を接着する。この
初段アンプ62は電線2bによってメイン基板64と電気的に
接続されており、PSD2と初段アンプ62とは端子リード24
により電気的に接続されている。こうしてまず、保持部
材3、PSD2及び初段アンプ62を一体として形成する。Example An example of the present invention will be described with reference to the drawings. The sensor head main body 4 as the main body shown in FIG. 1 is attached to the front surface of the displacement meter. A through hole 4a is formed in the sensor head main body 4, and the main board 64 is fixed to the sensor head main body 4. First, the PSD 2 is mounted on the holding member 3 and the PSD 2 is fixed by the shield plate 22. The holding member 3 is a member for keeping the insulation between the PSD 2 and the sensor head body 4. Next, the first-stage amplifier 62 is bonded to the back surface of the holding member 3 to which the PSD 2 is fixed. The first-stage amplifier 62 is electrically connected to the main board 64 by the electric wire 2b, and the PSD 2 and the first-stage amplifier 62 are connected to the terminal lead 24.
Are electrically connected to each other. Thus, first, the holding member 3, the PSD 2, and the first-stage amplifier 62 are integrally formed.
尚、この実施例では特に初段アンプ62のみを保持部材
3に固定している。これはPSD2と初段アンプ62との間は
特に信号が微小であるので、この間のノイズを極力排除
するためである。電線2bで接続された初段アンプ62とメ
イン基板64との間は、比較的信号が安定しておりノイズ
の影響は少ない。他の実施例として、メイン基板64も保
持部材に直接固定してノイズの影響をより少なくするこ
ともできる。In this embodiment, particularly, only the first-stage amplifier 62 is fixed to the holding member 3. This is because the signal between the PSD 2 and the first-stage amplifier 62 is particularly small, and noise during this period is eliminated as much as possible. Between the first-stage amplifier 62 and the main board 64 connected by the electric wire 2b, the signal is relatively stable and the influence of noise is small. As another embodiment, the main board 64 can also be directly fixed to the holding member to reduce the influence of noise.
保持部材3は凸部32を備えており、一方センサーヘッ
ド本体4は凹部34を備えている。そして、凸部32と凹部
34とは嵌合手段として互に嵌合し合うように形成されて
いる。この凸部32を凹部34に嵌入して、保持部材3をセ
ンサーヘッド本体4に装着する。凹部34は図に示す矢印
200の方向に長く設けられているので、装着した保持部
材3はこの矢印200の示す方向にスライドすることがで
きる。初段アンプ62とメイン基板64とを接続する電線2b
は、保持部材3がスライド可能な長さを備えているの
で、保持部材3の移動の障害となることはない。The holding member 3 has a convex portion 32, while the sensor head body 4 has a concave portion 34. And the convex part 32 and the concave part
34 is formed as fitting means so as to fit each other. The convex portion 32 is fitted into the concave portion 34, and the holding member 3 is mounted on the sensor head main body 4. The recess 34 is the arrow shown in the figure.
Since the holding member 3 is long in the direction of 200, the mounted holding member 3 can slide in the direction indicated by the arrow 200. Wire 2b connecting first stage amplifier 62 and main board 64
Since the holding member 3 has a slidable length, it does not hinder the movement of the holding member 3.
PSD2は貫通穴4aを貫通して照射される光を受光して、
その受光面上に受光点を形成するものである。保持部材
3を矢印200の示す方向にスライドさせて、この受光点
がPSD2の中心に位置するよう調整する。受光点の位置調
整は次のようにして行う。PSD2 receives the light irradiated through the through hole 4a,
A light receiving point is formed on the light receiving surface. The holding member 3 is slid in the direction shown by the arrow 200 to adjust the light receiving point to be located at the center of the PSD2. The position adjustment of the light receiving point is performed as follows.
保持部材3が装着されたセンサーヘッド本体4を、第
2図に示す治具に固定する。第2図は治具に固定したセ
ンサーヘッド本体4の背面図である。尚、図において初
段アンプ62、電線2b及びメイン基板64は省略されてい
る。The sensor head main body 4 to which the holding member 3 is attached is fixed to a jig shown in FIG. FIG. 2 is a rear view of the sensor head main body 4 fixed to a jig. Note that, in the figure, the first-stage amplifier 62, the electric wire 2b, and the main board 64 are omitted.
第2図に示す治具は固定壁81,82を備えており、固定
壁82に設けられているねじ穴に押圧ボルト72が螺入、貫
通している。押圧ボルト72の先端にはボルト押圧部74が
設けられている。一方、固定壁81は押圧ボルト72に対向
する位置にリターンスプリング75を有しており、リター
ンスプリング75の先端にはスプリング押圧部77が設けら
れている。The jig shown in FIG. 2 has fixed walls 81 and 82, and a pressing bolt 72 is screwed into a screw hole provided in the fixed wall 82 and penetrates. A bolt pressing portion 74 is provided at the tip of the pressing bolt 72. On the other hand, the fixed wall 81 has a return spring 75 at a position facing the pressing bolt 72, and a spring pressing portion 77 is provided at the tip of the return spring 75.
センサーヘッド本体4は、第2図に示すように保持部
材3の両端がボルト押圧部74及びスプリング押圧部77に
より挟み込まれ、押圧されることによって治具に固定さ
れる。As shown in FIG. 2, the sensor head body 4 has both ends of the holding member 3 sandwiched between the bolt pressing portion 74 and the spring pressing portion 77, and is fixed to the jig by being pressed.
押圧ボルト72を捩じ込めば、捩じ込みに伴いリターン
スプリング75は圧縮されて保持部材3は矢印300方向に
移動する。又、押圧ボルト72をゆるめれば、リターンス
プリング74は伸張して保持部材3は矢印400方向に移動
する。こうしてPSD2が固定されている保持部材3を所望
の位置に移動させ保持し、PSD2の受光点が受光面の中央
に位置するよう調整する。If the pressing bolt 72 is screwed in, the return spring 75 is compressed with the screwing, and the holding member 3 moves in the arrow 300 direction. If the pressing bolt 72 is loosened, the return spring 74 is extended, and the holding member 3 moves in the direction of arrow 400. In this way, the holding member 3 to which the PSD 2 is fixed is moved to and held at a desired position, and is adjusted so that the light receiving point of the PSD 2 is located at the center of the light receiving surface.
そして、保持部材3を第2図に示す治具で所望の位置
に保持した状態で、固定部材により保持部材3をセンサ
ーヘッド本体4に固定する。固定部材としては接着剤等
を用いる(図示せず)。接着剤は、例えば第1図に示す
保持部材3の端部39周辺に付けて、保持部材3をセンサ
ーヘッド本体4に固定する。接着剤により固定を行うと
ねじ止めによる回転力という問題はなく、位置ずれ防止
が完全となる。Then, in a state where the holding member 3 is held at a desired position by the jig shown in FIG. 2, the holding member 3 is fixed to the sensor head main body 4 by a fixing member. An adhesive or the like is used as the fixing member (not shown). An adhesive is applied around the end 39 of the holding member 3 shown in FIG. 1, for example, to fix the holding member 3 to the sensor head body 4. When fixing with an adhesive, there is no problem of rotational force due to screwing, and the displacement can be completely prevented.
固定部材として、ねじ等を用いることもできる(図示
せず)。ねじは、例えば第1図に示す保持部材3の側面
38を貫通してセンサーヘッド本体4に螺入することによ
り、保持部材3を押圧してセンサーヘッド本体4に固定
する。ねじを用いた場合でも保持部材3は凸部32、凹部
34及び治具によりその位置が保持、固定されているの
で、ねじ止めの際の回転力によって調整した位置がずれ
ることはない。A screw or the like may be used as the fixing member (not shown). The screw is, for example, a side surface of the holding member 3 shown in FIG.
The holding member 3 is pressed and fixed to the sensor head main body 4 by screwing into the sensor head main body 4 through the sensor head main body 4. Even when a screw is used, the holding member 3 has a convex portion 32 and a concave portion.
Since the position is held and fixed by the jig and the jig, the adjusted position is not shifted by the rotational force at the time of screwing.
又、他の実施例として位置調整の際、第3図に示すよ
うな治具を用いることもできる。図に示す治具はアーム
154を備えており、アーム154の先端にはアーム押圧部15
6及び158が設けられている。そして、保持部材3の側面
がアーム押圧部156及び158に接するようにセンサーヘッ
ド本体4を治具に装着する。アーム154は固定壁152を螺
入、貫通する押圧ボルト150と接続している。押圧ボル
ト150の捩じ込み又はゆるめに伴い、アーム154は矢印60
0の方向に移動する。こうして保持部材3の位置を移動
させ、PSD2上の受光点が中央に位置するよう調整する。In another embodiment, a jig as shown in FIG. 3 can be used for position adjustment. The jig shown is an arm
The arm 154 has an arm pressing portion 15
6 and 158 are provided. Then, the sensor head main body 4 is mounted on the jig such that the side surface of the holding member 3 contacts the arm pressing portions 156 and 158. The arm 154 is screwed into the fixed wall 152 and connected to a pressing bolt 150 penetrating therethrough. As the pressing bolt 150 is screwed in or loosened, the arm 154 moves to the arrow 60.
Move in the direction of 0. In this way, the position of the holding member 3 is moved and adjusted so that the light receiving point on the PSD 2 is located at the center.
位置調整に治具を用いずに、手作業で保持部材3の位
置を調整、保持しセンサーヘッド本体4に固定すること
もできる。手作業により保持部材3を保持した場合で
も、保持部材3は凸部32が凹部34に嵌入して装着されて
いるので調整した位置がずれることはない。この場合、
固定部材として接着剤を用いれば、ねじ止めの回転力が
加わらず位置ずれ防止がより完全となる。Instead of using a jig for position adjustment, the position of the holding member 3 can be adjusted and held manually and fixed to the sensor head body 4. Even when the holding member 3 is manually held, the adjusted position of the holding member 3 does not shift since the protrusion 32 is fitted into the recess 34. in this case,
If an adhesive is used as the fixing member, the rotational force of screwing is not applied, and the displacement can be more completely prevented.
[発明の効果] 請求項1に係る変位計及び請求項3に係る変位計の受
光部の位置調整方法は、保持部材を所望の位置に保持す
ることが容易であり、保持部材の固定位置がずれない。[Effects of the Invention] According to the displacement meter according to the first aspect and the position adjusting method of the light receiving unit of the displacement meter according to the third aspect, the holding member can be easily held at a desired position, and the fixing position of the holding member is It does not slip.
従って、変位計の受光部の位置調整を容易かつ確実に
行うことができ、作業効率の向上を図ることができる。Therefore, the position of the light receiving section of the displacement meter can be easily and reliably adjusted, and the working efficiency can be improved.
請求項2に係る変位計は、保持部材と配線基板とを接
続する電線等の接続手段が不要となり、ノイズによる影
響を少なくすることが可能となる。In the displacement meter according to the second aspect, connection means such as an electric wire for connecting the holding member and the wiring board is not required, and the influence of noise can be reduced.
従って、信頼性のある測定精度を備えた変位計を提供
することができる。Therefore, it is possible to provide a displacement meter having reliable measurement accuracy.
第1図は、本発明の一実施例に係る変位計のセンサーヘ
ッドの受光部位置調整機構を示す斜視図、 第2図は、本発明の一実施例に係る変位計のセンサーヘ
ッドを治具に固定した状態を示す背面図、 第3図は、本発明の一実施例に係る変位計のセンサーヘ
ッドを他の治具に固定した状態を示す背面図、 第4図Aは、従来の変位計のセンサーヘッドの受光部を
示す側面図、 第4図Bは、第4図Aの変位計のセンサーヘッドに受光
部が装着された状態を示す一部断面図、 第4図Cは、従来の変位計のセンサーヘッドの保持部材
の背面図である。 2……PSD 3……保持部材 4……センサーヘッド本体 32……凸部 34……凹部 62……初段アンプ 64……メイン基板FIG. 1 is a perspective view showing a light receiving portion position adjusting mechanism of a sensor head of a displacement meter according to one embodiment of the present invention. FIG. 2 is a jig for a sensor head of the displacement meter according to one embodiment of the present invention. FIG. 3 is a rear view showing a state in which the sensor head of the displacement meter according to one embodiment of the present invention is fixed to another jig, and FIG. FIG. 4B is a partial cross-sectional view showing a state in which the light receiving unit is mounted on the sensor head of the displacement meter shown in FIG. 4A, and FIG. It is a rear view of the holding member of the sensor head of the displacement meter of FIG. 2 ... PSD 3 ... Holding member 4 ... Sensor head body 32 ... Protrusion 34 ... Recess 62 ... First stage amplifier 64 ... Main board
フロントページの続き (56)参考文献 特開 昭63−249094(JP,A) 特開 昭50−107945(JP,A) 特開 昭59−73722(JP,A) 実開 昭63−111607(JP,U) (58)調査した分野(Int.Cl.6,DB名) G12B 5/00 G01C 3/00Continuation of the front page (56) References JP-A-63-249094 (JP, A) JP-A-50-107945 (JP, A) JP-A-59-73722 (JP, A) , U) (58) Fields investigated (Int. Cl. 6 , DB name) G12B 5/00 G01C 3/00
Claims (3)
して照射される光を受光し、その受光面上に受光点が形
成される受光素子を備える保持部材、 を備えた変位計において、 本体及び保持部材は、互に嵌合しスライド可能な嵌合手
段を備え、 保持部材は、嵌合手段の嵌合により本体に装着されてお
り、 保持部材は固定部材により本体に固定されている、 ことを特徴とする変位計。1. A main body having a through hole, a holding member fixed to the main body, the light receiving element receiving light irradiated through the through hole and forming a light receiving point on a light receiving surface thereof. Wherein the main body and the holding member are provided with fitting means that can be fitted and slidable with each other, and the holding member is attached to the main body by fitting of the fitting means; The displacement meter, wherein the holding member is fixed to the main body by a fixing member.
が固定されている、 ことを特徴とする変位計。2. The displacement meter according to claim 1, wherein a wiring board electrically connected to the light receiving element is fixed to the holding member.
て照射される光を受光し、その受光面上に受光点が形成
される受光素子を備える保持部材を装着する工程であっ
て、本体及び保持部材の備えるスライド可能な嵌合手段
を互に嵌合することにより本体に保持部材を装着する工
程、 本体及び保持部材の備える嵌合手段をスライドし、保持
部材の装着位置を移動することによって受光点の位置を
所望の位置に調整する工程、 保持部材を所望の位置に保持した状態で、固定部材によ
り保持部材を本体に固定する工程、 を備えたことを特徴とする変位計の受光部の位置調整方
法。3. A step of mounting, on a main body having a through hole, a holding member having a light receiving element for receiving light irradiated through the through hole and forming a light receiving point on a light receiving surface thereof. Attaching the holding member to the main body by fitting the slidable fitting means of the main body and the holding member to each other, and sliding the fitting means of the main body and the holding member to set the mounting position of the holding member. A step of adjusting the position of the light receiving point to a desired position by moving, and a step of fixing the holding member to the main body by a fixing member while holding the holding member at the desired position. How to adjust the position of the light receiving part of the meter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32016689A JP2802126B2 (en) | 1989-12-08 | 1989-12-08 | Displacement meter and method of adjusting position of light receiving unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32016689A JP2802126B2 (en) | 1989-12-08 | 1989-12-08 | Displacement meter and method of adjusting position of light receiving unit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03197896A JPH03197896A (en) | 1991-08-29 |
| JP2802126B2 true JP2802126B2 (en) | 1998-09-24 |
Family
ID=18118439
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32016689A Expired - Fee Related JP2802126B2 (en) | 1989-12-08 | 1989-12-08 | Displacement meter and method of adjusting position of light receiving unit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2802126B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006317368A (en) * | 2005-05-16 | 2006-11-24 | Kyokko Denki Kk | Fabry-perot type tunable filter using mems |
-
1989
- 1989-12-08 JP JP32016689A patent/JP2802126B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03197896A (en) | 1991-08-29 |
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