JP2802295B2 - X-ray imaging apparatus and processing apparatus using the same - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an X-ray imaging apparatus used for determining a processing position when processing a work such as a printed circuit board, and a processing apparatus using the same.

[0002]

2. Description of the Related Art Conventionally, when an identification mark for a perforated position is not exposed on the surface such as a multilayer substrate, an X-ray irradiating means and an imaging means are provided to recognize an image of a transmitted X-ray image. There is an apparatus that detects the position of an identification mark of a workpiece and performs perforation. Since X-rays are used in this way, there is a possibility that X-rays leak when a work enters or leaves the imaging position or moves for alignment, thereby causing a danger to the human body. As means for preventing this, for example, in FIG. 2 of Japanese Utility Model Publication No. 3-9932, X
A shielding member formed of a lead-containing synthetic resin sheet piece or the like is wound around the outer periphery of the X-ray receiving portion of the line light emitter to keep the inside closed. This shielding member uses a lead-containing synthetic resin sheet, and makes a vertical cut at an appropriate interval in the skirt portion of the sheet, overlaps this inside and outside double, and touches the lower side to the surface of the base. (See column 5, lines 20-30 of the Official Gazette).

[0003]

In the above prior art, the distance between the lower end of the protective tube, which is the exit of the X-ray, and the work is set large, so that the amount of X-ray leakage therefrom is large. However, even if a shielding member as described above is used to prevent this from leaking to the outside, there is a step on the surface of the work such as a circuit board, or only a part of the work is present because there is a perforation position at a corner of the work. When the other part is located inside the shielding member and the other part is located outside the shielding member, if the boundary is exactly in the middle part of the width of the cut, the shielding member rolls up and forms a gap there . If the width of the cut is too small, the rolled-up state is hard to return to its original state, and a gap is formed between the rolled portion and the base. In addition, even when there is a cut in the corner of the shielding member, when the work is moved to the left or right, the gap in the hem of the shielding member widens and gaps are created, and X-rays leak from these gaps, and the safety of workers is reduced. There is a problem that damage may occur.

[0004] It is therefore an object of the present invention to prevent the leakage of X-rays to the outside as much as possible and to improve the safety and work efficiency of workers.

[0005]

In order to achieve the above object, an X-ray imaging apparatus according to the present invention is an X-ray generating apparatus provided so that a work placed on a table can be irradiated with X-rays. When the first as well as constituting a passage of the X-ray
A protective tube provided to be close and away from the said workpiece by driving means includes imaging means for imaging a transmission image of the workpiece by the X-ray, the on the protecting cylinder
Moved forward and backward by the second driving means fixed to the protection cylinder.
The contact member is provided so as to face the work
When the second drive means is extended, the lower end of the protection cylinder
Part protrudes from the part by a predetermined amount.
The protection tube is retracted from the lower end of the protection tube.
The brake which can stop the protection cylinder at any position
The feature is that the means is provided .

A processing apparatus using the X-ray imaging apparatus includes: an image processing unit that performs image processing on an image signal from the imaging unit; and an image processing unit that performs image processing on a transmission image of the workpiece by the image processing unit. A processing means for processing the work, wherein the protective cylinder also serves as a clamper for fixing the work on the table, and the distance between the tip of the protective cylinder and the work during the image processing is the predetermined distance. The above work can be moved arbitrarily while maintaining the interval
, And the at the time of the machining tip of the protecting cylinder is the work is in contact with the workpiece is characterized in that so as to be immovably fixed.

[0007]

In order to determine the processing position by the above-mentioned X-ray imaging apparatus, when the protective cylinder is lowered to approach the work, the stop member fixed to the protective cylinder is driven by the second driving hand.
Extends by a step and projects by a predetermined amount from the lower end of the protective cylinder
In this state, the contact member comes into contact with the work and the approach of the protection cylinder to the work is restricted. As a result, a predetermined distance is maintained between the work and the protection cylinder. The amount of leakage of X-rays applied to the work from the path of the rays is equal to or less than a reference value.
The transmitted image transmitted through the work is captured by the imaging unit,
The image is subjected to image processing by the image processing means to determine a processing position.

[0008] A processing apparatus using this X-ray imaging apparatus moves the processing means based on the result of image processing by the image processing means to process the work. When processing, raise the contact member and then lower the protective cylinder, contact it with the work, and fix the work immovably on the table.
Processing Te is Ru decorated.

[0009]

An embodiment of the present invention will be described below with reference to the drawings.

FIGS. 1 and 2 show the overall structure . An image pickup means 2 is provided below a table 1 for imaging an image of a work to be irradiated with X-rays, and a processing device is provided at a position to be drilled. A punching means 3 is provided, and a printed circuit board 4 serving as a work is placed on the table 1 and can be transported. A support member 5 is provided at a predetermined interval above the table 1, an X-ray generator 6 is supported on the support member 5, and a protective cover 7 is fixed to a lower surface of the support member 5. .

Inside the protective cover 7 (see FIG. 2), there are provided X-ray passages and X-ray leakage prevention means for preventing X-ray leakage. That is, as shown in FIGS. 1 and 2, a protective tube 8 forming a passage 8 a of the X-rays emitted from the X-ray generator 6.
Are connected to the X-ray generator 6. The protection tube 8 is provided with a shutter 9 across the X-ray passage 8a. The shutter 9 is driven forward and backward by a shutter cylinder 10 to open and close the passage 8a. A vertical guide groove 8b is formed on the outer periphery of the protection tube 8. Further, in order to enhance the effect of preventing X-ray leakage, a metal piece 8c made of lead or the like is embedded.

Below the protection tube 8, a protection tube 11 having an X-ray passage 11a communicating with the passage 8a is provided so as to be able to approach and separate from the work 4. This protection tube 11
Also serves as a clamper for pressing the work 4 against the table, and is fixed to the lower end of the cylindrical body 12 fitted to the outer periphery of the protective tube 8. A guide groove 8b is formed in a part of the cylindrical body 12.
Plate 1 having a guide 13a slidable inside thereof on its inner surface
3 are provided integrally. Protective cylinder 1 in parallel with cylinder 12
A cylinder 14 as means for lowering the cylinder 1 is provided, and the extension of the cylinder rod 14a is transmitted to the cylinder 12 via a connecting member 15 fixed to the cylinder to lower the protection cylinder 11. The protection cylinder 11 is provided with a brake unit (not shown), and can be stopped at an arbitrary position via the control unit. The protection cylinder 11 is lifted by a cylinder 14 serving as a first driving means, and a return spring 16 is hooked on a connecting member 15 so that the protection cylinder 11 does not fall under its own weight when air is down. I have.

A sensor support plate 17 is suspended from both sides of the protective tube 8, and the sensor 1 is provided inside the lower end of the sensor support plate 17.
8 is fixed. The sensor 18 detects whether the printed circuit board 4 as a work is located below the X-ray paths 8a and 11a. The work receiver 21 has a built-in mirror for reflecting the light of the sensor 18. The printed board 4 blocks the light to detect the presence or absence of the board, and the shutter 9 is opened and closed by the output of the detection signal of the sensor 18. .

In the vicinity of the lower end of the cylinder 12,Second driver
Is a stepThe lifting cylinder 20 is fixedCylinder
At the lower end of the pad 20aDegree contact member 19Are connected
You.ThereforeThe contact member 19 isSeparately from the protective cylinder 11
DrivenProtection via cylinder rod 20a
The side of the cylinder 11 can be moved in parallel with the protection cylinder.

The contact member 19 is provided with a lift cylinder 20.
At the time of extension, it protrudes from the lower end of the protective cylinder 11 by a predetermined amount.
State and retracted from the lower end of the protective cylinder 11 when contracted
The stroke is set so that
The lower end of the contact member 19 at the time of extension is set to be lower than the lower end of the protective cylinder 11 by 0.1 to 0.2 mm. For this reason, when the protection cylinder 11 is lowered in order to find the perforation position of the printed circuit board 4, the contact member 19 comes into contact with the upper surface of the printed circuit board 4 first, and the lower end of the protection cylinder 11 is positioned between the printed circuit board and the bottom. .
By stopping at a position where a gap G of 1 to 0.2 mm can be formed, it is possible to restrict the protection cylinder from approaching the work.

Next, an XY table mechanism (moving means) 22 for moving the imaging means 2 and the perforating means 3 located below the table 1 to the working position will be described. A support plate 23 provided on an apparatus main body (not shown) is fixed, and a pair of rails 24 and 25 are provided on the upper surface of the support plate 23 in the horizontal direction (X direction) in FIG. This rail 24, 2
5 includes sliders 26a, 26b, 2 slidable in the X direction.
6c and 26d are attached.
On the upper surfaces of 6a, 26b, 26c, 26d, sliders 27a, 27b, which are guided in the vertical direction (Y direction) in FIG.
27c and 27d are fixed with the surface to be fitted to the rail facing upward. The sliders 26a to 26d and the sliders 27a to 27d are disposed so as to face in a direction substantially orthogonal to the slider. A pair of rails 28 and 29 extending in the Y direction are slidably fitted on the sliders 27a to 27d. A motor 30 is fixed on the support plate 23, and a lead screw 31 connected to a drive shaft of the motor 30 is rotatably disposed. A nut 32 is screwed into the lead screw 31, and the nut 3
2 are sliders 26a and 2 via a nut holder 33.
7a. Therefore, when the lead screw 31 rotates by driving the motor 30, the nut 32, the nut holder 33, and the sliders 26a and 27a move in the X direction. At this time, since they are connected by the rail 28, the sliders 26b and 27b also move integrally.

A moving table 34 is fixed on the rails 28 and 29 from the structure shown in FIG. 3 as shown in FIGS. A motor 35 is fixed on the moving table 34, and a lead screw 36 connected to a drive shaft of the motor 35 is rotatably disposed. A nut 37 is screwed into the lead screw 36,
The nut 37 is fixed to a nut holder 38. The nut holder 38 is fixed to the sliders 26b and 27b, and is not fixed to the moving table 34. In this configuration, when the lead screw 36 is rotated by the drive of the motor 35, the nut 37 attempts to move in the Y direction.
Since the slider 26b is fixed to the rails 25b and 27b, it cannot be moved in the Y direction. Therefore, when the lead screw 36 rotates by driving the motor 35, the nut 37 does not move, and the motor 35 and the moving table 34 move in the Y direction. Since the XY table mechanism 22 has the above configuration, the moving table 3
4 is movable in the X and Y directions by driving the motors 30 and 35.

Next, referring to FIGS.
And the perforation means 3 will be described. Moving table 34
A support plate 39 is provided upright, and the support plate 39 holds the X-ray camera 2 as an imaging unit via a connecting plate 40 and a cylindrical member 41. The X-ray camera 2 is connected to an image processing means, a central processing circuit, and the like.
The operation of the table mechanism 22 and the like is controlled.

A pair of rails 42 and 43 are mounted on the opposite surface of the support plate 39. A rail guide 44a is provided on a holding frame 44 for holding the punching means 3 as a processing means, and the rail guide 44a is slidably fitted to the rails 42 and 43. The piercing means 3
It comprises a spindle motor 3a, a collet chuck 3b fixed to the upper end thereof, and a drilling member such as a drill 3c held by the collet chuck 3b. The drill 3c is rotated by the driving of the spindle motor 3a to punch the printed circuit board 4. A chip cover 45 is attached to the upper end of the perforating means 3.

A driving mechanism 46 for driving the perforating means 3 in the vertical direction (Z direction) will be described below with reference to FIG. FIG. 6 shows FIG. 4 for easy understanding of the configuration.
B - is a view taken on line B. A lead screw 48 extending in the Z direction is rotatably mounted on the support plate 39 via a mounting member 47. A nut 49 is screwed into the lead screw 48, and the nut 49 is fixed to the above-described holding frame 44 via a nut holder 50. The upper end of the lead screw 48 is a belt wheel 51
It is connected to. The motor 52 is attached to the mounting member 47.
Are held, and the drive shaft of the motor 52 is
It is connected to. A belt 54 is provided for the belt wheels 51 and 53.
Is being wrapped around. Therefore, when the pulley 53 by the motor 52 rotates, the rotation is transmitted to the pulley 51 via the belt 5 4, whereby the lead screw 48 is rotated. Then, the nut holder 50 and the holding frame 44 move together with the nut 49 in the Z direction, and the perforating means 3 held by the holding frame 44 moves up and down.

Next, regarding a series of operations in the present invention,
A procedure for using a printed circuit board as the work 4 and drilling holes at predetermined positions on the printed circuit board using the punching means 3 will be described.

First, prior to the perforation work, the position of the identification mark provided on the printed circuit board 4 is detected by image recognition to determine the perforation position. Then, the moving table 34 is moved by driving the motors 30 and 35 of the moving means 22,
The X-ray camera 2 is moved to the X-ray passages 8 a and 11 of the X-ray generator 6 through the hole 1 a of the table 1 and the printed circuit board 4.
Move to the work position facing a.

At this time, the protection cylinder 11 is in the raised position, and the stop member 19 has the cylinder rod 20a extended so that the lower end is 0.1 to 0.2 mm lower than the lower end of the protection cylinder.
mm (see FIG. 7).

Next, the cylinder rod 14a of the cylinder 14 for elevating and lowering the protection cylinder is extended, and the protection cylinder 11 is lowered. At this time, since the hitting member 19 also descends integrally with the protection cylinder 11, the lowering of the protection cylinder stops when the hitting member contacts the upper surface of the printed circuit board 4. Then, when the protection cylinder 11 is fixed at that position by operating a brake mechanism (not shown), the gap G between the lower end of the protection cylinder 11 and the printed circuit board 4 is fixed at a state where the distance G is 0.1 to 0.2 mm. (See FIG. 8). The lifting cylinder 2 0 here
When the member 19 is driven to move up, the printed circuit board 4 is separated from the protective tube 11 by a distance G of 0.1 to 0.2 mm.
(See FIG. 9).

Here, after confirming the presence of the printed circuit board 4 by the sensor 18 and the sensor built in the work receiver 21, when the shutter 9 is opened by driving the shutter cylinder 10, the X-ray passages 8a and 11a are protected by the protective tubes. 8 (see FIG. 2), the X-rays emitted from the X-ray generator 6 can pass through the printed circuit board 4. This transmitted image is picked up by the X-ray camera 2 provided below the printed board 4 and sent to image processing means (not shown).

At this time, since the distance between the lower end of the protective cylinder 11 and the printed circuit board 4 is set to an extremely small value of 0.1 to 0.2 mm (see FIG. 8), the printed circuit board 4 passes through the X-ray path. The leakage amount of the irradiated X-rays is equal to or less than the value (0.1 μsv / h) determined by the safety standard. Since the amount of this leakage is extremely small, there is no danger of danger to the human body.

Next, the position of the identification mark is adjusted to the punching position while adjusting the position of the printed circuit board 4 by image recognition. At this time, the movement of the printed circuit board 4 is completely free.
Operability is good and quick adjustment is possible.
You. When the alignment of the position of the identification mark with the position of the perforation is completed, the shutter 9 is closed to block X-rays.

Next, the cylinder 14 is driven to extend the cylinder rod 14a, and the protective cylinder 11 is lowered via the connecting member 15 to come into contact with the upper surface of the printed circuit board, thereby holding the printed circuit board 4 on the table 1. And fixedly held immovably at the fitted position.

Next, the motor 3 of the XY table mechanism 22
By driving 0 and 35, the drilling means 3 is moved in the X direction and the Y direction, and the tip of the drill 3c of the drilling means 3 is adjusted so as to coincide with the position to be drilled. Then, the motor 52 and the spindle motor 3a are driven to raise the drill 3c while rotating, and the printed circuit board 4 is perforated. Chips generated by the perforation are discharged from the chip cover 45 .

After the drilling operation, the protective cylinder 11 is returned to the original position by the cylinder 14 (see FIG. 7).

Although not shown, in consideration of the danger to the human body due to X-ray leakage, the X-ray passages 8a, 8
A shield member as X-ray leakage prevention means can be provided around 1a. As the shielding member, a lead-containing synthetic resin sheet similar to that of the prior art is used, and two sheets having vertical cuts at appropriate intervals in a skirt portion are used. When irradiating X-rays, the skirt hits the table and the inside is sealed to prevent the X-rays from leaking to the surroundings.

In this embodiment, a drilling means is used as a processing means. However, the present invention is not limited to this and can be widely applied to general processing. The work is not limited to the printed circuit board, but can be applied to a general plate material that can transmit X-rays.

[0033]

According to the present invention, the protection cylinder is moved by the first driving means.
And a second member for driving the hitting member to the protection cylinder.
By fixing the driving means, the contact member can be protected
Can be driven separately, and when the second driving means is extended,
The contact member protrudes from the lower end of the protective cylinder by a predetermined amount.
Position , it is easy to set the distance between the protective cylinder and the workpiece very small during image processing for positioning.
Come, there is no Rukoto cause a danger to the human body because the leakage amount of X-rays for this purpose is a small amount, it is possible to maintain the safety of the worker. In addition, since the setting of the gap between the protective cylinder and the work is performed via the stop member, even if the thickness of the work is different, no special operation is required to cope with the difference, and the gap between the protective cylinder and the work is always maintained. It is easy to set the interval to a predetermined interval,
Work efficiency is improved.

Further , the protective cylinder and the work are set at a predetermined interval.
After that, the workpiece can be moved by raising the contact member
Image processing can be performed quickly and easily.
The work cannot be moved by lowering the protective cylinder during construction.
Since it is fixed to the surface, stable and accurate machining is possible.

[Brief description of the drawings]

FIG. 1 is a right side sectional view showing one embodiment of the present invention.

FIG. 2 is a sectional view taken along the line AA of FIG. 1;

FIG. 3 is a plan view showing a configuration below a moving table of a driving unit.

FIG. 4 is a plan view of a moving unit.

FIG. 5 is a left side view of the moving means.

FIG. 6 is a sectional view taken along the line BB in FIG. 4;

FIG. 7 is an enlarged sectional view of a main part showing a state in which the protection cylinder is at a raised position.

FIG. 8 is an enlarged sectional view of a main part showing a state in which the protection cylinder is lowered and the contact member is in contact with the work.

FIG. 9 is an essential part enlarged cross-sectional view showing a state in which the protection cylinder is stopped and a contact member rises.

[Explanation of symbols]

Reference Signs List 1 Table 2 Imaging means (X-ray camera) 3 Processing means (perforation means) 4 Work 6 X-ray generator 11 Protective cylinder (clamper) 11a Passage 14 First drive means (cylinder) 19 Second rotation of member 20 per degree Means (elevating cylinder) G interval

Claims (2)

(57) [Claims] 1. A work placed on a table has an X
An X-ray generation device provided so as to be able to irradiate the X-ray, a protection tube which constitutes the X-ray passage and is provided so as to be able to approach and separate from the work by the first driving means ;
Includes an imaging unit for imaging the transmitted image of the workpiece by the X-ray, the said protecting cylinder second drive which is fixed to the protection tube
The contact member faces the above work each time it is moved back and forth by the means
When the second drive means is extended.
Is projected from the lower end of the protective cylinder by a predetermined amount.
When retracted, retracted from the lower end of the protective cylinder
Next, Der be stopped at an arbitrary position the protective tube in the protecting cylinder
X-ray imaging apparatus characterized by brake means is provided that. 2. An image processing means for performing image processing on an image signal from the imaging means, and a processing means for processing the work based on an image processing result of a transmission image of the work by the image processing means. The protection cylinder also serves as a clamper for fixing the work on the table. During the image processing, the distance between the tip of the protection cylinder and the work is maintained at the predetermined distance, and the work moves arbitrarily.
A ready, during the working tip of the protecting cylinder is the work is in contact with the workpiece is immovably fixed
Processing apparatus using the X-ray imaging apparatus according to claim 1, characterized in that that.