JP2811599B2 - Manufacturing method of magnetic head slider - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Summary] The present invention relates to a method of manufacturing a contact start / stop type magnetic head slider used for a magnetic disk device which is an external storage device of a computer system, for example, and relates to a magnetic disk and CSS. Age contact hardening (aging) is performed before rough polishing of the air bearing surface before final polishing of the air bearing surface (Contact Start Stop), so that the flatness of the air bearing surface changes over time after the final polishing of the air bearing surface. Without change
In order to obtain the flatness of the flying surface of the head slider with high precision, in a method of manufacturing a magnetic head slider used in a magnetic disk drive, the head slider is processed before the polishing step of the flying surface of the head slider. After the age hardening step of releasing the distortion by heating the adhesive bonded to the jig to the softening point, the floating surface of the head slider is polished.

[Industrial applications]

The present invention relates to a method of manufacturing a contact start / stop type magnetic head slider used for a magnetic disk device which is an external storage device of a computer system, for example.

[Conventional technology]

The manufacture of a head slider for a conventional magnetic head has been
A description will be given with reference to the manufacturing steps shown in FIGS.

FIG. 5A shows a step (1) for cutting the patterning surface of the wafer.

In this step, as shown in FIG.
For example, on the surface of a wafer 1 having a diameter of 3 inches (about 7.62 cm) and a thickness of 4.0 to 4.6 mm, a large number of about 400 electromagnetic transducer elements 2 (see FIG. 6 (c)) are provided by photolithography technology. It is formed by combining thin film forming techniques such as an electroplating technique and a vacuum deposition technique, and these electromagnetic transducer elements 2 are cut into, for example, approximately 10 rectangular blocks 3 arranged side by side. As shown in the enlarged side view of FIG. 5 (c), the cutout is left to such an extent that it does not fall apart.

FIG. 6A shows a step (2) of cutting out a rectangular block having a plurality of magnetic head elements by grinding the back surface of the wafer.

In this step, as shown in FIG.
With the patterning surface of the wafer 1 facing down, the jig 4
Then, the back surface of the wafer 1 is ground with a diamond grindstone (not shown), and cut into rectangular blocks 3 each having a plurality of electromagnetic transducer elements 2 as shown in FIG. 6C.

FIG. 7A shows a step (3) of attaching a rectangular block to a processing jig.

In this step, as shown in FIG.
The back surface of the rectangular block 3 is adhered to the processing jig 5 having the cutting guide groove 5a for each size of the magnetic head element with an adhesive wax.

FIG. 8A shows a magnetic gap grinding step which is the fourth step.

In this step, as shown in FIG.
Magnetic gap surface 6 important for electromagnetic conversion characteristics of magnetic head
Is ground with the rotating grindstone 7 while measuring the reference pattern.

FIG. 9A shows a step (5) of forming the flying surface of the head slider.

In this step, as shown in FIG.
The floating surface 8a of the head slider 8 is formed by grinding using a diamond grindstone (not shown), and narrow grooves 9 are formed on both sides of the floating surface 8a by grinding.

FIG. 10A shows a step (6) of forming a groove between the air bearing surfaces.

In this step, as shown in FIG.
Between the floating surface 8a of the head slider 8, a wide groove 10 including the narrow groove 9 is formed by a diamond grindstone.

FIG. 11A shows a step (7) of separating and cutting individual magnetic head elements from a rectangular block having a plurality of magnetic head elements.

In this step, as shown in FIG.
The gap between the air bearing surfaces 8a adjacent to the head sliders 8 of the individual magnetic head elements, which faces the cutting guide grooves 5a of the processing jig 5, reaches the cutting guide grooves 5a of the processing jig 5 with a diamond grindstone. Disconnect until Thus, the processing jig 5
Above is separated and cut into individual magnetic head elements,
These magnetic head elements continue the subsequent processing while being stuck on the processing jig 5.

FIG. 12 (a) is a rough polishing and polishing finishing step of the flying surface of the head slider which is the (8) th step.

In this step, as shown in FIG.
The polishing platen 11 is rotated by a motor, and while the diamond slurry is being supplied, the floating surface 8a of the head slider 8 is roughly polished, and then the polishing finish is performed. The difference between the rough polishing and the polishing finish is that the diamond particles in the diamond slurry are different. The processing jig 5 is swung and rotated on the polishing platen 11.

FIG. 13 (a) shows a (9) process of polishing the air inflow end of the air bearing surface of the head slider.

In this step, as shown in FIG.
Grinding machine 12 arm with air inlet end angle (20-30 ')
A processing jig 5 to which a number of the magnetic head elements are adhered is attached to the end of 12a, and an air inflow end 8b of a floating surface 8a of a head slider 8 of the magnetic head element attached to the processing jig 5 is fixed on a platen. Polish on 13 FIG. 13C is a view showing the air inflow end 8b of the head slider 8 which has been polished.

FIG. 14A shows the step (10), which is a step of polishing the ridge of the head slider.

In this step, as shown in FIG.
A rubber plate 15 is laid on the surface plate 14a of the ridge polishing machine 14, a diamond tape 16 is stuck thereon, and a magnetic head element adhered and attached to the processing jig 5 is moved thereon.
After the ridge 8c of the head slider 8 is polished, the adhesion of the individual magnetic head elements to the processing jig 5 is removed.
As shown in FIG. 14C, the head slider 8 having the ridge 8c of the flying surface 8a polished is formed on the magnetic head element H.

[Problems to be solved by the invention]

However, in the conventional method of manufacturing a magnetic head slider, the air bearing surface 8a of the head slider 8 is polished while the magnetic head element H is adhered to the processing jig 5,
Although the air bearing surface 8a has a flatness, if the adhesion to the processing jig 5 is removed and the individual magnetic head elements H are removed, the magnetic head element H which has been held down by the adhesion to the processing jig 5 until now can be obtained. There is a problem that the processing strain of H is released and the flatness of the floating surface 8a changes.

The present invention has been made to solve such a conventional problem, and is an adhesive for bonding the head slider to a processing jig before a polishing process of a flying surface of a head slider for performing CSS with a magnetic disk. After the age hardening step of heating the agent to the softening point to release the strain, by polishing the floating surface of the head slider, after the final polishing of the floating surface, the flatness of the floating surface does not change with time. The purpose of the present invention is to provide a high-precision flatness of the flying surface of the head slider.

[Means for solving the problem]

The present invention is directed to a method of manufacturing a contact start / stop type magnetic head as shown in FIG. 1 for use in a magnetic disk device in order to solve the above problems. As shown in the drawing, before the polishing step of the floating surface 8a of the head slider 8, after the age hardening step of releasing the distortion by heating the adhesive for bonding the head slider 8 to the processing jig to the softening point, And a method of manufacturing a magnetic head slider, characterized in that the flying surface 8a of the head slider 8 is polished.

[Action]

According to the present invention, that is, before final polishing of the floating surface 8a, before rough polishing of the floating surface 8a, by performing age hardening treatment, after the final polishing of the floating surface 8a, from the processing jig Even when the magnetic head element H is removed, the flatness of the flying surface 8a of the head slider 8 formed on the magnetic head element H does not change.

〔Example〕

Hereinafter, an embodiment of a method of manufacturing a magnetic head slider according to the present invention will be described in detail with reference to FIGS.

FIG. 1 is a perspective view of a magnetic head element H in which a head slider is formed by the method of the present invention. The shape and configuration thereof are the same as those of the conventional example. Detailed description is omitted.

FIG. 2 is a view showing a forming process of a first embodiment of the method of manufacturing a magnetic head slider according to the present invention.

That is, a (1) process of cutting a patterning surface of a wafer, a (2) process of cutting a rectangular block having a plurality of magnetic head elements by grinding the back surface of the wafer, and a (2) process. Step 3) of attaching a rectangular block to a jig, Step 4 of cutting a magnetic gap portion, and Step 5 of forming a flying surface of a head slider. And (6) a step of forming a groove between the air bearing surfaces, and (7) a step of separating and cutting each magnetic head element from a rectangular block having a plurality of magnetic head elements. This is the same as the conventional example.

(8) is an age hardening step which is the eighth step.

The purpose of this age hardening treatment is to check that the shape of the magnetic head element and the distortion due to the processing are such that the magnetic head element is fixed to the processing jig 5 by the adhesive wax and is held down by the softening point (melting point). ), And release the processing distortion and the distortion due to the change of the processing shape to the support for polishing the flying surface of the head slider.

As this heating means, as shown in FIG.
A rectangular block 3 having a plurality of magnetic head elements is placed on a hot plate 17, and the rectangular block 3 is heated to the softening point of an adhesive wax in which a plurality of magnetic head elements are bonded to the rectangular block 3. The rectangular block 3 is cut on a hot plate 17 and gradually lowered to room temperature. Alternatively, as shown in FIG. 3B, the heated rectangular block 3 is placed on the heat insulating table 18 from the hot plate 17 and gradually lowered to room temperature.

Further, as a heating means for the rectangular block 3 having the plurality of magnetic head elements, a heating furnace 19 having an appropriate heat capacity is used.
After the container 20 containing the rectangular block 3 is placed therein, the container 20 is heated in the heating furnace 19 to the softening point of the adhesive wax that has bonded the plurality of magnetic head elements to the rectangular block 3. Is taken out of the heating furnace 19 and gradually lowered to room temperature, or the heating furnace 19
Is turned off, and the rectangular block 3 is gradually lowered in the heating furnace 19 to room temperature.

(9) is a rough polishing and polishing finishing step of the flying surface of the head slider, which is the (9) step.

In the step (9), the polishing platen 11 is rotated by a motor to supply the diamond slurry and the rough surface of the floating surface 8a of the head slider 8 in the same manner as the conventional example shown in FIG. Polishing is performed, and then polishing is performed. The difference between the rough polishing and the polishing finish is that the diamond particles in the diamond slurry are different. The processing jig 5 is swung and rotated on the polishing platen 11.

(10) is a polishing process of the air inflow end of the air bearing surface of the head slider, which is the (10) process. In this step, similarly to the conventional example shown in FIG. A processing jig 5 to which a large number of the magnetic head elements are bonded is attached to the tip of an arm 12a of the polishing machine 12 with (20 to 30 ').
And the air inflow end of the air bearing surface 8a of the head slider 8 of the magnetic head element attached to the processing jig 5
Polish on 13

(11) is a step of polishing the ridge of the head slider, which is the (11) th step.
As shown in FIG. 14, a rubber plate 15 is laid on the surface plate 14a of the ridge polishing machine 14, a diamond tape 16 is attached thereon, and the diamond plate 16 is adhered to the processing jig 5 thereon. The mounted magnetic head element is moved, and the ridge of the head slider 8 is polished.

(12) is a cleaning step of the individual magnetic head elements, which is the (12) step, in which the individual magnetic head elements are removed from the processing jig and cleaned by a cleaning means (not shown).

(13) is an inspection step of each magnetic head element, which is the (13) th step, and the performance of this magnetic head element is inspected by an inspection device (not shown).

FIG. 4 is a view showing a forming process of a second embodiment of the method of forming a head slider of a magnetic head according to the present invention. This second embodiment is different from the first embodiment in that the same age hardening step as described above is interposed before and after the step (9) of the rough polishing step of the flying surface of the head slider. By heating the adhesive wax, which has bonded the magnetic head element to the processing jig, to the softening point, the processing distortion, the distortion due to the change in the processing shape, before rough polishing of the floating surface of the head slider and before finish polishing. It is intended to be released.

As described above, by performing the age hardening process, even after the flying surface 8a of the head slider 8 is finally polished, the magnetic head element H formed on the magnetic head element H can be removed from the processing jig. The flatness of the floating surface 8a does not change.

〔The invention's effect〕

As described above, the present invention relates to a method of manufacturing a contact start / stop type magnetic head used in a magnetic disk drive, wherein the head slider is processed and repaired before the step of polishing the flying surface of the head slider. After the age hardening step of heating the adhesive to be bonded to the tool to the softening point to release the distortion, the air bearing surface of the head slider is polished. After the final polishing, even if the magnetic head element is removed from the processing jig, the flatness of the air bearing surface of the head slider formed on this magnetic head element does not change, and the flatness of the air bearing surface changes with time. Therefore, it is possible to provide a magnetic head in which the flying surface of the head slider has a high degree of flatness.

[Brief description of the drawings]

FIG. 1 is a perspective view of a magnetic head element manufactured by the method of the present invention, FIG. 2 is a view showing manufacturing steps of a first embodiment of a method of manufacturing a head slider of a magnetic head of the present invention, and FIG. Is a diagram showing an embodiment of an age hardening treatment step, FIG.
FIG. 5 is a view showing a manufacturing process according to a second embodiment of the present invention.
FIG. 14 to FIG. 14 show steps of a conventional method for manufacturing a head slider of a magnetic head and drawings related to the steps. DESCRIPTION OF SYMBOLS 1 ... Wafer 2 ... Electromagnetic conversion element 3 ... Rectangular block 4 ... Jig 5 ... Processing jig 5a ... Cutting guide groove 6 ... Magnetic gap surface 7 ... Rotating grindstone 8 ... Head slider 8a ... … Floating surface 8b… Air inflow end 8c… Ridge 9… Narrow groove 10… Wide groove 11… Polishing platen 12… Polisher 12a… Arm 13… Platen 14… Ridge Polishing machine 14a… Surface plate 15… Rubber plate 16… Diamond tape 17… Hot plate 18… Heat insulation table 19… Heating furnace 20… Container

Claims (1)

(57) [Claims] In a method of manufacturing a magnetic head slider used for a magnetic disk drive, an adhesive for bonding the head slider to a processing jig is heated to a softening point before a polishing step of a flying surface of the head slider. A method of manufacturing a magnetic head slider, comprising: after the age hardening step of releasing strain by polishing, polishing the air bearing surface of the head slider.