JP2815144B2 - Liquid crystal display inspection equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to a liquid crystal display inspection apparatus.

(Prior Art) In order to inspect the color characteristics and the like of a plurality of pixels formed on an LCD, the above-mentioned liquid crystal display body prober is brought into contact with a probe terminal electrode which is energized to the above-mentioned LCD electrode, and operates an operation line and a signal. There is known an apparatus for inspecting a display such as a disconnection of a line and an excited state of a pixel.

The inspection unit includes a support for supporting the LCD and a probe terminal electrode connected to the LCD electrode on the support.

The support is formed to illuminate the back of the LCD,
Further, a probe terminal electrode is provided so as to be connected to the LCD electrode on the support base.

Then, a current is supplied to the probe terminal electrode facing the surface of the LCD that is attracted to the support table. The surface of the energized LCD is inspected by a general liquid crystal display inspection prober.

(Problems to be Solved by the Invention) However, in a liquid crystal display prober provided with a support for supporting the LCD, the surface of the support has a surface area larger than the bottom area of the LCD.
When there is an electrode on the back surface, there is a disadvantage that the probe terminal electrode cannot be brought into contact with the electrode.

It is an object of the present invention to hold a peripheral portion of a carried-in liquid crystal display horizontally by holding it by a holding mechanism even when there is an electrode on the back surface of the liquid crystal display, and to hold a film electrode at the time of inspection. Can be pressed against the electrode surface of the liquid crystal display, and even if the electrode surface of the liquid crystal display has unevenness in flatness or the film electrode has a wave, the electrode surface and the film electrode are reliably electrically connected. An object of the present invention is to provide a liquid crystal display body inspection apparatus which can be brought into contact with a conductive state, can prevent interference with a holding mechanism at the time of carrying in and carrying out the liquid crystal display body, and can carry out and carry out the liquid crystal display body smoothly.

[Configuration of the invention]

(Means for Solving the Problems) Claim 1 supports a liquid crystal display, and a film electrode is brought into contact with an electrode provided on a peripheral portion of the liquid crystal display,
In a liquid crystal display inspecting apparatus for inspecting characteristics of a liquid crystal display, a guide axis arranged in a direction orthogonal to an electrode surface of the liquid crystal display, and an electrode surface of the liquid crystal display guided by the guide axis. The liquid crystal display has a pair of clamping pieces which move relative to each other while maintaining the parallelism, and which are opposed to the electrode surface of the peripheral portion of the liquid crystal display body and a surface opposite to the electrode surface, and an elastic body is provided on the clamping surface side of the clamping piece. And a film electrode interposed between one of the holding pieces of the holding mechanism and the electrode surface of the liquid crystal display and pressed against the electrode surface of the liquid crystal display by the elastic force of the elastic body at the time of inspection. A horizontal movement mechanism for supporting the holding mechanism and moving the holding mechanism in parallel with the surface of the liquid crystal display, moving the holding mechanism forward with respect to the liquid crystal display at the time of inspection, and retracting when loading / unloading the liquid crystal display. And having And it features.

(Operation) By providing an elastic body on the pair of holding pieces of the holding mechanism, the film electrode can be pressed against the electrode surface of the liquid crystal display body by the elastic force of the elastic body at the time of inspection, and the electrode surface of the liquid crystal display body is flat. The electrode surface and the film electrode can be reliably brought into electrical conduction even if there is a degree of variation or even if the film electrode has a wave. In addition, since the holding mechanism is supported by the horizontal movement mechanism, interference with the holding mechanism when loading / unloading the liquid crystal display body can be prevented, and loading / unloading can be performed smoothly.

(Embodiment) An embodiment in which the liquid crystal display inspection apparatus of the present invention is applied to a liquid crystal prober will be specifically described below with reference to the drawings. First, the external structure of the liquid crystal display body prober of this embodiment will be described. As shown in FIG. 7, the liquid crystal display body prober (1) is roughly divided into a loader section (2) for transporting an LCD.
And an inspection unit (3) for inspecting the transported LCD.

The liquid crystal display prober (1) is related to the operation surface (4), a keyboard (5) for inputting information necessary for operation, a microscope (6) for observing the LCD, and an alignment state of the LCD. And a display section (7) for grasping the above condition are arranged on the housing of the liquid crystal display body prober (1).

Next, the internal configuration of the liquid crystal display prober (1) of this embodiment will be described. As shown in FIG. 6, the liquid crystal display prober (1) stores information to be operated in a storage unit of the CPU (8). A keyboard (5) for inputting operations, a CPU (8) for controlling the driving of each mechanism, a loader unit (2) for transporting the LCD to the inspection unit (3), and an inspection center position of the inspection unit (3) ( A holding portion (10) for detachably fixing the LCD conveyed to 9), a contact portion (11 in FIG. 2) for bringing a probe terminal electrode into contact with an electrode of the LCD, and a backlight for illuminating the back surface of the LCD. (12).

Here, A / A required to drive the holding portion (10)
The D converter (10a) and the driver circuit (10b) are arranged.

As shown in FIG. 5, the loader section (2) includes a loading mechanism (15) for transferring the LCD (14) from the cassette (13) to the inspection section (3), and a cassette (13) from the inspection center position (9).
And an unload mechanism (16) for returning the LCD (14) to the LCD. The loading mechanism (15) is, for example, an LCD (1) from a cassette (13) containing an LCD (14) having a 5-inch square outer shape.
4) It is configured to be taken out by the take-out arm (17). The taken out LCD (14) is transported by the moving means to the pre-alignment position (18). At the pre-alignment position (18), there is provided a transfer member having a top surface capable of vertical movement and rotation, which is called a sub chuck (19). Above take-out arm (17)
The driving means is a timing belt (21) between the pulleys (20).
Is controlled by the CPU (8).
Is controlled by After the sub-chuck (19) is raised and pre-aligned, it is transferred to the top surface of the alignment chuck (22) arranged in the inspection section (3).

In the configuration in which the sub chuck (19) is conveyed from the sub chuck (19) to the top surface of the alignment chuck (22), for example, the moving plate (23) that sucks the surface of the LCD (14) holds the LCD (14) and It is transported to the top surface of 22).

The drive mechanism of the moving plate (23) is driven by being stretched between pulleys (24) by a timing belt (25) and controlled by the CPU (8).

Therefore, the alignment chuck (26) is placed so that the LCD center (27) overlaps.

Here, the moving body (2) moves in a direction different from the direction in which the take-out arm (17) moves to the pre-alignment position (18).
When 3) is conveyed, the entire movable body (23) can be tilted by the angle adjusting motor (28).

When the observation inspection of the LCD (14) having a 5-inch square outer shape is completed, for example, the unload mechanism (16) is moved in parallel with the back surface of the LCD (14).
There is provided a mechanism for 9) to enter the inspection center position (9). The LCD (14) delivered from the inspection unit (3) is moved to the retreat position (3) by the retreat of the dedicated moving plate (29).
2) will be moved.

Further, the sheet is transported from the retreat position (32) to the storage position (33) on the line of the pre-alignment position (18). Then, the transfer plate (29) dedicated to delivery is transferred to the extended top surface of the sub chuck (19). When the sub chuck (19) descends, the take-out arm (17)
Passed to. And it is comprised so that it may be accommodated in a cassette (13).

The moving plate (29) and the movable mechanism (34) dedicated to the transfer are driven by a timing belt (3) between the pulleys (30).
The pulley (30) is provided so as to be stretched in (1) and driven. This control is performed by the CPU (8).

Therefore, when the unload mechanism (16) is transported, the rear surface of the LCD (14) is vacuum-sucked on the upper surface of the dedicated moving plate (29) and pulled out from the inspection unit (3). Then, it is placed on the top surface of the above-described sub chuck (19) and is transported into the cassette (13).

Here, when transporting the LCD (14) to the inspection center position (9), the loading mechanism (15) transports the LCD (14) to the alignment chuck (22), and the alignment chuck (22) is moved to the inspection center position. By moving to (9), the LCD (14) is transported. On the other hand, the unload mechanism (1
In (6), the LCD (14) is pulled out from the inspection center position (9) and is conveyed at once to the top surface of the sub chuck (19).

The alignment chuck (22) is configured to transfer the LCD (14) via the movable plate (23), and then to carry out alignment and transport to the inspection center position (9).

The top area of the alignment chuck (22) is LCD (1
4) It is smaller than the surface area. A hole is formed in the top surface so that the LCD (14) is vacuum-sucked.

Further, it is provided so as to be drive-controllable in the X-axis, Y-axis, Z-axis and θ rotation directions.

 This concludes the description of the configuration of the loader unit.

 Next, the configuration of the inspection unit (3) will be described.

The configuration of the holding section (10) of the inspection section (3) is configured to hold and fix the LCD (14) that has reached the inspection center position (9).

For example, the holding portion (10) is provided on a base plate (not shown) of the liquid crystal display prober (1) and a head plate (35) provided in parallel with three portions in the horizontal direction around the inspection center position (9). It is provided so as to surround the LCD (14).

Therefore, the alignment chuck (22) is held at a low and lowered height by a clamping mechanism (also called a contact unit (39)).
When the Z-up (the alignment tick rises in the Z-axis direction), which reaches the contact position at the inspection center position (9), passes through the lower part and is set at a predetermined position (X, Y, Z, θ), the above-described clamping mechanism is used. The holding mechanism (39) for moving the (39) and holding the LCD (14) receives the LCD (14). Then, the alignment chuck (22) receives the next LCD (14) and performs alignment. Since the LCD (14) is held by the holding mechanism, the alignment chuck (2)
In 2), the alignment of the next LCD (14) can be completed during the inspection of the previous LCD (14). Therefore, the throughput can be improved.

The holding section (10) is provided with a horizontal moving mechanism (3) that moves back and forth in parallel with the surface of the LCD (14) around the inspection center position (9).
6), a vertically moving mechanism (38) provided on a horizontally moving sliding piece (37), and a holding mechanism (39) provided on the bottom end of the vertically moving member.

The horizontal moving mechanism (36) has, for example, a rectangular parallelepiped (41) projecting from a mounting table (40) fixed to a head plate (35) in parallel with the surface of the LCD (14).

A guide rod (42) is provided at the tip of the rectangular parallelepiped (41) so as to face the center of the inspection.

A sliding piece (37) is inserted into this guide rod (42),
The cylinder (43) linked to the sliding piece (37) is configured to be movable forward and backward with respect to the inspection center position (9) by driving.

The vertical movement mechanism (38) is, for example, the sliding piece (37)
However, a hole is formed between the guide rods (42) in a direction perpendicular to the surface of the LCD (14), and the guide shaft and the 12 guide members (4
4) is inserted.

A stopper (45) is provided on the top surface of the inserted guide member (44) so that the guide member (44) does not drop by its own weight.

At the end opposite to the top surface of the guide member (44), the holding mechanism (39) is provided so as to be fixedly supported.

The clamping mechanism (39) has reached the inspection center position (9).
The LCD (14) is configured so as to sandwich and fix both peripheral edges.

For example, a holding member (46) as a holding piece of a holding mechanism (39) that supports the back surface of the LCD (14) so as to be orthogonal to the vertical movement direction of the guide member (44) is provided at the opposite end of the guide member (44). The holding member (46) supports the LCD (14), and at the same time, includes a pressing piece (47) as a holding piece of a holding mechanism (39) for applying pressure from above to below.

That is, there is an electrode at the tip of the holding member (46), and rubber is affixed so that this electrode contacts the electrode of the LCD (14). Further, a cylinder (37 in FIG. 2) provided on the sliding piece (37 in FIG. 2) is provided at an end opposite to the tip.
The tip (49a) of the piston of 49) is fixed.

Therefore, by supplying air to the cylinder (49), the holding member (46) provided in parallel with the LCD (14) lifts the LCD (14) while keeping the LCD (14) parallel. It will move up and down.

Here, the drive control for driving the upper and lower cylinders (FIG. 49) with air is performed by the CPU (8). This pinching force is also the adhesive pressure between the electrode of the LCD (14) and the electrode of the contact (also called the probe terminal electrode), and this pressure is delicate, and the contact between the electrodes is delicate. It is necessary to adjust by the material, area, and applied power (voltage, current). These adjustments are performed by the CPU (8).

As shown in FIG. 2, the holding portion (10) includes a horizontal movement mechanism (36) that moves in parallel with the surface of the LCD (14) around the inspection center position (9), and a sliding frame that moves horizontally. (37)
And a holding mechanism (39) provided at the bottom end of the vertically moving member.

At the tip of the pressing piece (47), a rubber member (47a) is provided in parallel with the side of the LCD so as to press the surface of the LCD (14). For example, the tip is 2.5 mm wide x 2.5 mm high x 50 mm long. The round hard rubber and a film electrode (4
A slot (47b) through which 8) passes is provided.

In addition, as shown in FIG.
A control member (50) for controlling the amount of vertical movement provided on the sliding piece (37) is provided.

A compression coil spring (52) is provided on the shaft (51) of the control member (50) so as to keep a constant distance from the holding member (46). Further, the holding member (46)
A compression coil spring (53) is also provided to pressurize the surface of the LCD (14) in response to the rise of the pressure.

Therefore, the holding member (4
6) When raised, the fixing member (4) is attached to the surface of the LCD (14).
7) comes into contact and pressurizes, and both sides of the LCD (14) can be sandwiched.

 This is the end of the description of the holding portion (10).

Next, the contact portion (11) of the film electrode serving as the probe terminal electrode will be specifically described with reference to FIGS.

The LCD (14), which is the subject, is sucked and fixed to the tip of a holding member (46) having a vacuum suction mechanism, and is vertically movable by a vertical movement mechanism (38). In addition, this LCD (14)
Is an active LCD (14), for example, and has first, second and third electrode surfaces (54a, 54b, 54c) formed on three sides of a rectangular substrate as shown in FIG. This LCD (14)
The film electrode (48) that is in contact with the first, second, and third electrode surfaces (54a, 54b, 54c)
54c) are provided at three locations, and the holding members (4
With the rise of 6), the LCD (14) is arranged so as to come into contact with the fixing member (47) which presses the surface of the LCD (14).

At the tip of the film electrode (48), as shown in FIG. 4, a large number of electrode patterns (55) are formed at predetermined intervals, and a through hole (56) is provided between the electrode patterns (55).
Are formed.

 This is the end of the description of the contact portion (11).

Next, the backlight (1) that illuminates the back of the LCD (14)
2) will be specifically described with reference to FIG.

The backlight (12) is moved to the inspection center position (9) when inspecting the LCD (14). And LC
D (14) is configured to illuminate the back surface.

For example, the backlight (12) is provided so as to be movable to the inspection center position (9), and the surface of the backlight (12) is made of ground glass (12a).

A fluorescent lamp (12b) as a light source is provided inside the ground glass (12a) so as to uniformly emit light.

It should be noted that, after the backlight (12) completes the state in which the LCD (14) is clamped by the clamping section (10), the LCD (1)
4) By illuminating the lower side, the state of the pixels of the energized LCD (14) can be inspected by a microscope or visual inspection, a CCD camera, or the like disposed on the upper side.

 Next, the operation will be described.

One LCD (1) from the cassette (13) in the loader section (2)
4) Take out, pre-align and transfer it to the alignment chuck (22). In the alignment chuck (22), this LCD (14) is fixed by vacuum suction or the like, and the X-axis, Y-axis mechanism and rotation mechanism are used. LCD (1
In the state where the alignment of 4) is performed and the wafer is transported to the inspection center position (9). In this state, in the liquid crystal display prober (1) of the present embodiment, as shown in FIGS. 1 and 2, an operation input of a keyboard (8 in FIG. 6) is carried out according to a program stored in advance. The horizontal movement mechanism (36) of (10) moves horizontally according to the shape of the LCD (14) conveyed around the inspection center position (9). Due to this horizontal movement, the holding mechanism (39) is arranged in the vertical space on the peripheral surface of the LCD (14).

Since the holding member (46) of the holding mechanism (39) is connected to the piston rod (49a) of the cylinder (49) fixed to the sliding piece (37), the cylinder (49) can be driven. Can be raised by

This rise can be lifted in parallel with the alignment chuck (22) surface in contact with the back surface of the LCD (14), and the alignment chuck (22) surface can be transferred to and from the holding member (46).

A sliding piece (36) is provided on the surface of the LCD (14).
Since the fixing member (47) is provided so as to be contractable by the compression coil spring (52), it can be held by the pressing piece (47).

Further, since the film electrode (48) is vacuum-adsorbed to the tip of the holding member (46), the electrode of the LCD (14) can be brought into contact with the film electrode (48).

Therefore, the LCD (1) transported to the inspection center position (9)
In 4), the film electrode (48) comes into contact with the electrode of the LCD (14) at the same time when the LCD (14) is pinched and fixed.

By this contact, the LCD (1)
4) The electrode is energized.

Then, the energized LCD (14) is excited.

In this state, the illumination necessary for observing the excitation state of the LCD (14) can be visually observed by the backlight (12) moved to the lower side of the LCD (14).

In the liquid crystal display prober (1) of the present embodiment, the LCD (14)
LCD (1) instead of the conventional method of mounting
4) Since both sides of the peripheral edge are clamped and fixed so that they do not move, the weight and shape are reduced in weight and size, especially compared to a mechanically heavy support table (also called a stage). be able to.

By reducing the weight of the support, the number of bases and pedestals that support the support can be further reduced.

Moreover, the conventional method of contacting the probe terminal electrode with the LCD (14) electrode is a method in which the electrode surface of the LCD placed on the support base is pressed downward from above by pressing a probe needle called a probe card. Instead, the pressure pressing downward from above is applied to the base of the liquid crystal display inspection prober (1) because both sides of the periphery of the LCD (14) are held in contact with each other via the film electrode (48). No load is applied.
Therefore, it is possible to change the base and the mount of the liquid crystal display prober (1) to members that are further reduced.

Further, instead of the above-described conventional method in which the backlight (12) is embedded in the support base, the backlight (12) is configured to move to the lower side of the LCD (14) only when visually observing the LCD (14). The replacement work of the illuminator of the backlight (12) is facilitated, and work efficiency is improved.

In addition, since the film electrode (48) is attracted and fixed to the holding member (46) of the holding mechanism (39) on the electrode of the LCD (14), replacement is facilitated.

〔The invention's effect〕

According to the present invention, the entire surface of the back surface of the liquid crystal display is supported, and the probe terminal electrode is not contacted from above, but is configured to sandwich both surfaces of the liquid crystal display. A pair of sandwiching pieces respectively facing the electrode surface of the portion and the opposite surface to the electrode surface are guided by a guide shaft arranged in a direction orthogonal to the electrode surface of the liquid crystal display, and the electrode surface of the liquid crystal display is Since the relative movement is performed while maintaining the parallelism, the parallelism of the holding surface is accurately maintained. Moreover, by providing the elastic body on the holding piece, the film electrode can be pressed against the electrode surface of the liquid crystal display body by the elastic force of the elastic body at the time of inspection, and the electrode surface of the liquid crystal display body has unevenness in flatness. Also, even if there is a wave on the film electrode, the electrode surface and the film electrode can be reliably brought into electrical conduction. Therefore, the reliability can be improved as an inspection device for inspecting the electrical characteristics of the liquid crystal display, and the type and size of the liquid crystal display can be changed simply by changing the film electrode only. There is an effect that is excellent.

In addition, since the holding mechanism is supported by the horizontal moving mechanism, interference with the holding mechanism when loading / unloading the liquid crystal display body can be prevented, so that loading / unloading can be smoothly performed.

[Brief description of the drawings]

FIG. 1 is an explanatory view illustrating a clamping mechanism using a liquid crystal display body inspection apparatus of the present invention in a liquid crystal display body prober according to one embodiment.
FIGS. 3A and 3B are explanatory views for explaining a state in which the holding portion of FIG. 1 holds the LCD, and FIGS. 3 and 4 are views for explaining the structure of a film electrode of a contact portion provided in the holding mechanism of FIG. 5 and FIG. 5 are explanatory views for explaining the flow of the LCD in the liquid crystal display prober of FIG. 1, FIG. 6 is a block diagram for explaining the whole of the liquid crystal display prober of FIG. 1, and FIG. It is an external appearance explanatory view explaining the external appearance of the liquid crystal display prober of the figure. DESCRIPTION OF SYMBOLS 1 ... Liquid crystal display prober 2 ... Loader part, 3 ... Inspection part 8 ... CPU, 9 ... Inspection center position 10 ... Nipping part, 11 ... Contact part 12 ... Backlight, 13 ... Cassette 14 LCD, 15 Load mechanism 16 Unload mechanism 17, Unload arm 18 Pre-alignment position 19 Sub chuck 22 Alignment chuck 23 Moving plate 26 Center of alignment chuck 27 …… Center of LCD, 29… Exclusive moving plate 32… Retreat position, 33… Storage position 34… Advancing and retracting mechanism, 36… Horizontal movement mechanism 37… Sliding core, 38… Vertical movement mechanism 39 … Nipping mechanism, 43… Cylinder (for horizontal) 44… Guide member, 46… Holding member 47… Pressing piece, 48… Film electrode 49… Cylinder (for vertical), 50… Control member 52 , 53… compression coil springs 54a, 54b, 54c …… electrode surface, 55 …… electrode pattern

Claims (1)

(57) [Claims] 1. A liquid crystal display inspecting apparatus for supporting a liquid crystal display and contacting a film electrode with an electrode provided on a peripheral portion of the liquid crystal display to inspect characteristics of the liquid crystal display. A guide axis arranged in a direction perpendicular to the electrode surface of the body, guided by the guide axis, relatively moving while maintaining parallelism with the electrode surface of the liquid crystal display, and forming a peripheral portion of the liquid crystal display; A clamping mechanism having an electrode surface and a pair of clamping pieces facing each other on a surface opposite to the electrode surface, and an elastic body provided on a clamping surface side of the clamping piece; one clamping piece of the clamping mechanism and the liquid crystal; A film electrode interposed between the electrode surface of the display body and pressed against the electrode surface of the liquid crystal display body by the elastic force of the elastic body at the time of inspection; and supporting the sandwiching mechanism and holding the holding mechanism with the surface of the liquid crystal display body. Move in parallel, A horizontal movement mechanism for moving a holding mechanism forward with respect to the liquid crystal display body and retracting the liquid crystal display body when loading / unloading the liquid crystal display body.