JP2824820B2 - Adjustment device for optical members - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for adjusting an optical member or the like for adjusting the position, posture, or the like of a member to be adjusted, for example, an optical member, by utilizing the characteristics of a shape memory alloy.

[0002]

2. Description of the Related Art For example, in a color scanner for printing and plate making, an operation of adjusting an optical axis of an optical member such as a lens or a mirror or adjusting a focus is required as an adjustment operation after assembly. This adjustment operation must be performed by moving the optical member precisely by a very small amount.
As shown in FIG. 7, the measurement is performed using two micrometers 101 and 102. 103 is a field lens, for example, as an optical component, and 104 is a holding member for holding one end of the lens 103. A micrometer 101 is provided on two adjacent side surfaces 104a and 104b of the holding member 104.
The tip of 102 is in contact. In performing the adjustment, the screws 105 for fixing the holding member 104 to the base are loosened, and the micrometers 101 and 102 are operated. When the adjustment is completed, the screws 105 are tightened and fixed.

[0003]

However, in recent years, there has been a high demand for downsizing in color scanners.
Therefore, the optical path from the light source to the recording medium is often bent several times using a mirror. When the optical path is bent in a narrow space in this manner, the optical members therein are replaced with micrometers 101, 1 as shown in FIG.
The following problem arises when an attempt is made to apply a configuration for adjustment using 02.

First, the space for installing the micrometer is insufficient, and there is no space for operating the micrometer. Next, even if the adjustment is barely possible, there is a possibility that a finger or the like may obstruct the optical path during the adjustment because the space is small. Furthermore, even if the optical member is once adjusted to a desired position, if the optical member is tightened with a screw or the like in order to lock the position, the optical member moves in the rotation direction of the screw due to the tightening force, and the adjustment state again goes out of order. Inconveniences such as accidents also occur.

[0005] In addition, a device incorporating such an optical member is usually shielded from the outside with a cover.
If the cover member is attached to the adjusted optical member, readjustment from the outside becomes impossible, and it is not negligible to involve complicated work such as removing the cover member when necessary. The present invention is proposed in view of the above-mentioned problems, and its purpose is to be able to be incorporated in a small space, the adjusted state is automatically locked, and furthermore, it can be easily externally shielded by a cover body. It is another object of the present invention to provide an adjusting device such as an optical member capable of adjusting a member to be adjusted, for example, an optical member.

[0006]

In order to achieve the above-mentioned object, a first aspect of the present invention provides a first movable body made of a shape memory alloy whose length in a first direction can be changed; First temperature changing means for changing the temperature of the body, a pair of heat insulators disposed at both ends in the first direction of the first movable body, and a second direction intersecting with the first direction. A second movable body made of a shape memory alloy whose length can be changed, the second movable body being arranged at an outer end of one of the pair of heat insulators in the first direction, and a second movable body for changing a temperature of the second movable body. Temperature changing means, and a shape memory alloy whose length in the second direction can be changed, and which is disposed at an outer end of the pair of heat insulators in the other first direction, and is provided with the first movable member. The member to be adjusted so as to affect the member to be adjusted such as an optical member as the amount of change in the length of the body as the amount of position change A third movable member that is associated with each other,
Third temperature changing means for changing the temperature of the third movable body;
Having a guide surface along said first direction,
When the third movable body has a predetermined length in the second direction, the movable body includes a movable body guide member that abuts the movable body surface and the guide surface to stop the movement of the movable body.

According to a second aspect of the present invention, the movable body guide member has a hole for accommodating the first, second, and third movable bodies and a heat insulator, and the inner surface of the hole is a guide surface. . Claim 3
In the invention, the movable body guide member has a groove for accommodating the first, second, and third movable bodies and a heat insulator, and both side walls of the groove are guide surfaces. According to a fourth aspect of the present invention, the movable body guide member is a rod that penetrates the first, second, and third movable bodies and the heat insulator in the first direction, and the outer peripheral surface of the rod is a guide. Plane.

According to a fifth aspect of the present invention, the temperature changing means includes:
It is a heater.

[0009]

The operation of the first aspect will be described. Now, the second,
When the temperature of the third movable body is not changed by the second and third temperature changing means, it is assumed that the third movable body is in contact with the guide surface of the movable body guide member. At this time, when the temperature of one of the second and third movable bodies is changed, the movable body changes its length in the second direction to release the lock with the movable body guide member. When the temperature of the first movable body is changed in this state, the movable body changes its length in the first direction, and moves the unlocked movable body in the first direction by that length.

Next, when the temperature of the unlocked movable body is returned to the original temperature, the one movable body is restored to its original length, and is again locked to the movable body guide member. Then, by changing the temperature of the other movable body, the length of the movable body in the second direction is changed, and the locked state with the movable body guide member is released. At the same time, the temperature of the first movable body is returned to the original temperature,
The length of the first movable body in the first direction is restored. Thus, the movable body unlocked from the movable body guide member moves following the operation of the first movable body.

Finally, by returning the temperature of the movable body unlocked from the movable body guide member to the original temperature, the movable body is restored and locked by the movable body guide member. By the above operation, or by repeating the same operation as described above a required number of times, the position of the member to be adjusted such as the optical member associated with the third movable body can be adjusted. In the above description, when the temperature of the second and third movable bodies is not changed, it is assumed that the movable body is in contact with the movable body guide member and locked, but when the temperature is changed, these movable bodies are moved. Even in the form of being locked by the guide member, it is possible to adjust the position of the member to be adjusted only by changing the order of the temperature changing operation.

[0012]

【Example】

(First Embodiment) An adjusting device according to the present invention will be described based on an embodiment of the drawings. FIG. 1 is a schematic configuration diagram showing an output device A in a color scanner for printing and plate making as a first embodiment to which the present invention is applied.

The output device A includes a semiconductor laser A1, a first cylinder lens A2, and a reflection mirror A3 for turning on / off a laser beam by a halftone signal generated based on an image signal by a halftone signal generation circuit (not shown). A collimating lens A5 having a slit A4 on the incident side, a polygon mirror A6 which is rotated at a constant speed by a DC motor (not shown) and scans the laser beam in the main scanning direction, and a recording medium (film) for reflecting light from the polygon mirror A6. It is composed of a group A7 before the fθ lens for forming an image on A12, a plurality of folding mirrors A8 and A9 for bending the optical path thereafter, a field lens A10 as a group after the fθ lens, and a second cylinder lens A11. A13 is a feed roller, A1
4 is a nip roller.

In the output device A having the above configuration, for example, the collimating lens A5 is held by the lens holder 1 shown in FIG. 3 and 4 are a front sectional view and a side sectional view showing the internal structure of FIG. The lens holder 1 is formed of a block having a substantially rectangular parallelepiped shape, and a circular space 2 is formed substantially at the center thereof. In the space 2, a collimating lens A5 is provided with an adjusting device B (for details, see FIG. 5 described later),
It is housed in a state where the position in the optical axis direction and the direction orthogonal to the optical axis is regulated by the ring 4 and the coil spring 5.

(Explanation of Adjustment Device B) Each of the adjustment devices B has the same structure.
It is configured as shown in FIG. That is, a circular through hole 1a is formed as a guide surface in the lens holder 1, and a first movable body B1 made of a short columnar shape memory alloy formed with a smaller diameter than its inner diameter is provided in the guide surface 1a. Movable body B1
In addition, a heating element (heater) B2 made of, for example, a silicon rubber heater is provided as a first temperature changing means, and a heat insulating element B3 is adhered to both end faces of the first movable element B1 with an elastic adhesive, and further adhered. The second outer end faces of the heat insulator B3
The movable body B4 and the third movable body B5 are bonded and fixed to each other.

Each of the movable bodies B1, B4, B5 uses a two-way shape memory alloy. As the two-way shape memory alloy, NiTi-based and Cu-based alloys are known in Japanese Patent Publication No. 220393/1990 and Japanese Patent Application Laid-Open No. Hei 3-72046. The first movable body B1 has a displacement direction that is the axis X direction (first direction) and has a length that is increased by heating. The second and third movable bodies B4 and B5 have displacement directions that are the same as the X direction. In the radial direction Y (second direction) orthogonal to the above, a diameter is reduced by heating. The outer diameter of the second and third movable bodies B4 and B5 when not heated is the guide surface 1a.
Is slightly larger than the inner diameter of the guide surface 1a, and therefore comes into contact with the guide surface 1a at the time of non-heating to be in a locked state. On the outer side surfaces of the second and third movable members B4 and B5, a heating member B6 made of, for example, a silicon rubber heater is attached as second and third temperature changing means.

The energizing line B from each of the heating elements B2 and B6
Reference numerals 7 and B8 are collectively connected to the control unit E via the slot 1b. An adjusting pin B10 protrudes from either one of the second and third movable bodies B4 and B5. (Operation of Adjustment Device) Next, the operation of the adjustment device B configured as described above will be described with reference to FIGS. FIG. 6 shows an initial state, in which the second and third movable bodies B4 and B5 are tightly fitted to the guide surface 1a and locked immovably.

When the third movable body B5 is heated to a temperature higher than the transformation temperature as shown in FIG. 7, the movable body B5 is reduced in diameter in the second direction Y, and is tightly fitted to the guide surface 1a. The loose fit is a loose fit fit, the locked state is released, and movement in the axial direction (first direction) X is enabled. In this state, when the first movable body B1 is heated to the transformation temperature or higher as shown in FIG. 8, the movable body B1 expands and deforms in the axial direction X, and the third movable body B5 is drawn through the heat insulator B3. Push to the left.

Thereafter, as shown in FIG. 9, when the heating of the third movable body B5 is stopped, the movable body B5 dissipates heat and recovers and expands its diameter, and is again tightly fitted to the guide surface 1a. , Locked immovable. At this time, when the second movable body B4 is heated to the transformation temperature or higher as shown in FIG. 10, the movable body B4 is reduced in diameter in the second direction Y, and the fitting of the second movable body B4 to the guide surface 1a is locked. Release state, X axis
It becomes possible to move to.

Further, when the heating of the first movable body B1 is stopped in this state as shown in FIG. 11, the movable body B1 is extinguished and restored, and contracts in the axial direction (first direction) X. The second movable body B4 moves to the left in the figure together with the first movable body B1 and the heat insulator B3 following the reduction operation of the first movable body B1. Finally, when the heating of the second movable body B4 is stopped, the movable body B4 is restored in the second direction Y by the heat recovery.
Then, the diameter is increased, and the fitting is tightly fitted to the guide surface 1a and locked immovably in a state of moving to the left in the drawing (see FIG. 12).

In this case, each movable body B1, B4, B5
Is configured not to conduct to the adjacent movable body due to the action of the heat insulator B3. The position and orientation of the member to be adjusted is adjusted by advancing or retracting the adjustment pin B10 (see FIG. 5) in accordance with the repetition of the above operation or the reverse of the heating order. That is, in FIGS. 3 and 4, for example, when the adjusting pin B10 of the adjusting device Ba is moved in or out, the collimating lens A5 moves rightward or leftward, and the adjusting pin B10 of the adjusting device Bb is moved in and out. Then, the collimator lens A5 moves upward or downward to adjust the optical axis. On the other hand, when the adjustment pin B10 of the adjustment device Bc or Bd is moved in and out,
The inclination of the collimator lens A5 with respect to the optical axis can be adjusted.

(Second Embodiment) FIGS. 13 to 15 show an example in which the device of the present invention is applied to the adjustment of the tilt angle of the mirror A3 in FIG. 1 as a second embodiment of the present invention. That is, in this embodiment, a space 12 in which the mirror A3 can be tilted is formed in the mirror holder 11, and a plurality of springs are provided between the front and back surfaces of the mirror A3 housed in the space 12 and the inner wall surface opposed thereto. C1 to C4 are provided, and adjusting devices Be and Bf having the same configuration as that of the first embodiment are arranged on the inner wall surface facing the springs C1 and C3 via the mirror A3.

In this configuration, when the adjusting device Be is operated, the tilt angle of the mirror A3 in the x direction in FIG. 13 is adjusted with the inner wall step 11a of the holder 11 as a fulcrum. On the other hand, when the adjusting device Bf is operated, the mirror A3 is pushed outward through the adjusting pin B10 against the bias of the spring C3, and the tilt angle is adjusted in the y direction in FIG. You.

(Third Embodiment) FIG. 16 shows a third embodiment of the present invention. In this embodiment, 21 is a U-shaped groove 2
2 is a movable body guide member having An adjusting device D is accommodated in the groove 22. This adjusting device D is
Movable body D transforming in a direction P (first direction) along
1 and heat insulators D2, D3 arranged and bonded on both sides thereof
The second heat-insulating members D2, D3,
It comprises third movable bodies D4 and D5 and a heater (not shown) for heating each movable body.

Each of the movable bodies D1, D4 and D5 is formed in a square shape, unlike the above embodiments. The second and third movable bodies D4 and D5 use a shape memory alloy that can be transformed only in the one-dimensional direction of the width direction (second direction) Q of the groove 22. The other configuration is the same as that of the adjusting device B of the first embodiment, and the operation of moving the adjusting device D in the P direction is not different from the procedure described in the first embodiment.

(Fourth Embodiment) FIG. 17 shows an adjusting device according to a fourth embodiment of the present invention. The adjusting device K includes first, second, and third movable bodies K1, K4, and K5 formed in an annular shape having a hole K11 in the center, and the movable bodies K1, K4, and K5.
5 and a heating element (not shown) for heating each movable element. When the second and third movable bodies K4 and K5 exceed the transformation temperature, they deform in the radially expanding direction (second direction) S, and when the first movable body K1 exceeds the transformation temperature, the first movable body K1 extends in the extension direction (the second direction). It is made of a shape memory alloy having a material property of deforming in the direction R). Further, the holes K1 of the second and third movable bodies K4 and K5 are provided.
In a non-heated state, the second and third movable bodies K4 and K5 are fitted to the outer peripheral surface of a shaft-like support (movable body guide member) K6 inserted into the hole K11 in a non-heated state. Is chosen as On the other hand, the diameters of the inner peripheral surfaces of the first movable body K1 and the heat insulators K2 and K3 are selected so as to always be in a loosely fitted state with respect to the outer peripheral surface of the support K6.

FIG. 18 shows, as an application example of the adjusting device K, an example used for adjusting the optical axis direction Z of the semiconductor laser A1 and the first cylinder lens A2 in FIG. That is, one adjusting device Ka is externally fitted on the outer peripheral surface of the holder 36 of the semiconductor laser A1, and another adjusting device Kb is externally fitted on the outer peripheral surface of the holder 37 of the first cylinder lens A2. Both adjusting devices Ka and Kb are loosely fitted in through holes 31a formed in the mounting base 31 to be attached to the scanner main body base. The through hole 31a has a step 31b with a large diameter on both sides in the axial direction.
, Two adjusting devices Ka and Kb are interpolated. Then, ring-shaped stoppers 32, 3 from the outer end of the through hole 31a.
3 is screwed. Stoppers 32, 33 and adjusting device Ka,
Springs 34 and 35 are interposed between Kb and the adjusting device K
a, Kb are urged toward the center of the through hole 31a.

The holder 36 holding the semiconductor laser A1 is provided in the inner hole K11 of the one adjusting device Ka, and the first cylinder lens A is provided in the inner hole K11 of the other adjusting device Kb.
2 and a holder 37 holding the aperture A15 are respectively fitted inside. Each of the holders 36 and 37 corresponds to the shaft-like support K6 shown in FIG. In the drawing, reference numeral B denotes an adjusting device shown in the first embodiment. When the adjusting device is operated, the first cylinder lens A2 and the diaphragm A15 can be individually finely moved in a direction orthogonal to the optical axis direction.

Next, the operation of the adjusting device K of this embodiment will be described with reference to FIG.
This will be described with reference to FIGS. For the sake of convenience, these figures show a holder for holding the lens A2 as the support K6, but any of the holders 36 and 37 shown in FIG. 18 can be applied. Further, in order to simplify the illustration, a heat insulator K
2, K3 was omitted. First, FIG.
1, K4, and K5 also show an initial state in which heating is not performed. In this state, the inner holes K of the second and third movable bodies K4, K5
Numeral 11 denotes a tight fit in the diameter reducing direction that cannot be moved with respect to the outer peripheral surface of the support K6.

In FIG. 20, the first and second movable bodies K
1, K4 is heated, the inner hole K1 of the second movable body K4
1 is deformed in the radially expanding direction, whereby the outer peripheral surface of the support body K6 is released and becomes movable, and the first movable body K1
The second movable body K4 moves to the left side in the drawing while compressing the spring T by this deformation operation.

Then, as shown in FIG. 21, the second movable body K4
When only the heating is stopped, the movable body K4 is restored at the moved position, reduced in diameter, and grips the support body K6 again. At this time, when the third movable body K5 is heated, the movable body K5 is deformed in the radially expanding direction so that the inner hole K11 releases the outer peripheral surface of the support K6 and the outer peripheral surface of the support K6. To a movable state.

Next, as shown in FIG. 22, when the heating of only the first movable body K1 is stopped, the movable body K1 is restored and reduced in the axial direction, and the urging force of the spring T is reduced by the reduced amount. Along with the second movable body K4, the support K6 gripped by the movable body K4 is pushed to the right in the drawing. afterwards,
When the heating of the third movable body K5 is stopped as shown in FIG. 23, the movable body K5 is restored and reduced in diameter, grips the support K6, returns to the initial state, and moves the support K6 rightward in the drawing. The locked state is established at the position where the lock is made.

(Explanation of Test Model) FIG. 24 shows a test model that can be used as an adjustment device of the present invention for adjusting the position of an optical member. The numerical values shown as the conditions of the model are in millimeters, and the material is the second movable body B4.
And the third movable body B5 can memorize the shape at the time of high temperature and low temperature, and have a copper-based material 2 having better heat conduction efficiency than the Ti-Ni-based material.
Directional shape memory alloy is used and its thermal conductivity is 120
w / mk.

The material of the first movable body B1 is also a copper-based two-way shape memory alloy as described above, and its thermal conductivity is 1
20 w / mk. On the other hand, the heat insulator B3 is made of a glass material, and has a thermal conductivity of 0.8 w / m · k.
It is. Each movable body B1, B in this test model
4 and B5 were sequentially heated based on the heating time table shown in FIG.
A simulation result as shown in FIG. 6 was obtained. If the transformation temperature of each movable body is set to 40 ° C., first, the third movable body B5 exceeds the transformation temperature (A), and then the first movable body B1 decreases the transformation temperature while it does not fall below the transformation temperature. It can be seen that (B) is exceeded. Next, the third movable body B5 falls below the transformation temperature (C), and thereafter, the second movable body B4 exceeds the transformation temperature (D). Eventually, the first movable body B1 falls below the transformation temperature (E), and finally, the second movable body B4 falls below the transformation temperature (F). This order is maintained because the transformation temperature is 3
It can also be seen from FIG. 1
The period per cycle is about 42 seconds. The movement amount per cycle was 10 μm.

The moving amount 10 μm / 42 sec is obtained as follows. That is, assuming that the deformation amount of the shape memory alloy is 1%, the deformation amount of the second and third movable bodies B4 and B5 at a high temperature is 0.03 mm in the diameter direction, and
The movable body B1 is 0.01 mm (10 μm) in the axial direction at high temperature.
Deform. In this case, the linear expansion coefficient of each of the movable bodies B1, B4, and B5 is 6.6 × 10 ⁻⁶ at room temperature (about 20 ° C.) and 11 × 10 ⁻⁶ at high temperature, and depends on the dimensions of the test model. (1.5 × 40 × 11 × 10 ⁻⁶ ≒ 0.7 μm), and the amount of deformation (elongation) is 1 μm or less, and can be practically ignored.

Therefore, the test model can reliably move 10 μm every cycle. It takes a long time (about 5 minutes) to cool all the movable bodies B4, B5, and B1 to room temperature in preparation for the next cycle.
By using an element capable of realizing both heat generation and cooling, such as a known Peltier element, for example, instead of the heating element, the cooling time can be greatly reduced, and a practically efficient effect can be obtained.

(Other Examples) In each of the above embodiments,
When the second and third movable bodies are not heated, these movable bodies are locked (or gripped) on the guide surface of the movable body guide member. On the contrary, the second and third movable bodies are locked. It can also be implemented with a configuration that locks (grips) on the guide surface when the body is heated.

[0038]

As described above, according to the present invention, since the adjusting device is configured by effectively utilizing the characteristics of the shape memory alloy, the adjusting device can be used as an output device in a color scanner for printing and plate making. When it is used for adjustment of optical members, etc., it can be easily incorporated in a small space, and the adjusted state is automatically locked, and it can be easily inserted inside from outside shielded by a cover body etc. Since the optical member can be adjusted, the complicated work conventionally required can be omitted, and efficient work can be performed.

[Brief description of the drawings]

FIG. 1 is a configuration perspective view of an output device in a color scanner to which an adjustment device of the present invention is applied.

FIG. 2 is a perspective view of a lens holder 1 incorporating an adjusting device.

FIG. 3 is a sectional view taken along line FF of FIG. 2;

FIG. 4 is a sectional view taken along line GG of FIG. 2;

FIG. 5 is a side sectional view of the first embodiment of the adjusting device.

FIG. 6 is a schematic diagram showing the operation of the adjustment device in the first embodiment.

FIG. 7 is a schematic diagram showing the operation of the adjustment device in the first embodiment.

FIG. 8 is a schematic diagram showing the operation of the adjustment device in the first embodiment.

FIG. 9 is a schematic diagram illustrating the operation of the adjustment device according to the first embodiment.

FIG. 10 is a schematic diagram illustrating the operation of the adjustment device according to the first embodiment.

FIG. 11 is a schematic diagram illustrating the operation of the adjustment device according to the first embodiment.

FIG. 12 is a schematic diagram illustrating the operation of the adjustment device according to the first embodiment.

FIG. 13 is a perspective view of a mirror holder 11 according to a second embodiment incorporating an adjusting device.

FIG. 14 is a sectional view taken along line HH of FIG.

FIG. 15 is a sectional view taken along the line II of FIG. 13;

FIG. 16 is a perspective view showing a third embodiment.

FIG. 17 is a perspective view showing a fourth embodiment.

FIG. 18 is a sectional view showing an adjusting device according to a fourth embodiment.

FIG. 19 is a schematic diagram showing the operation of the adjustment device according to the fourth embodiment.

FIG. 20 is a schematic diagram illustrating the operation of the adjustment device according to the fourth embodiment.

FIG. 21 is a schematic view illustrating the operation of the adjustment device according to the fourth embodiment.

FIG. 22 is a schematic view showing the operation of the adjustment device according to the fourth embodiment.

FIG. 23 is a schematic view showing the operation of the adjustment device according to the fourth embodiment.

FIG. 24 is a side view of an adjustment device set to obtain research data.

FIG. 25 is a schematic view showing a heating table.

FIG. 26 is a graph showing a thermal simulation.

FIG. 27 is a view showing a conventional adjusting device.

[Explanation of symbols]

 B1 first movable body B4 second movable body B3 heat insulator B5 third movable body

──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-2-277012 (JP, A) JP-A-2-27701 (JP, A) JP-A-2-195310 (JP, A) JP-A 62-197310 215908 (JP, A) Japanese Utility Model 1987-96592 (JP, U) (58) Fields investigated (Int. Cl. ⁶ , DB name) G02B 7/00 G02B 7/18

Claims (5)

(57) [Claims] 1. A first movable body made of a shape memory alloy whose length in a first direction can be changed, first temperature changing means for changing a temperature of the first movable body, and a first movable body A pair of heat insulators disposed at both ends in a first direction of the body, and a shape memory alloy whose length in a second direction crossing the first direction can be changed; A second movable body disposed at an outer end in one of the first directions, a second temperature changing unit for changing a temperature of the second movable body, and a length of the second direction can be changed. An adjustable member such as an optical member, which is made of a shape memory alloy, is arranged at an outer end of the pair of heat insulators in the other first direction, and uses a length change amount of the first movable body as a position change amount. A third movable body associated with the member to be adjusted and the temperature of the third movable body A third temperature changing means, and a guide surface along the first direction;
When the third movable body has a predetermined length in the second direction, the movable body guide member stops the movement of the movable body by bringing the surface of the movable body into contact with the guide surface. Adjustment device such as an optical member. 2. The movable body guide member includes first, second, and third movable member guide members.
The adjusting device for an optical member or the like according to claim 1, further comprising a hole for accommodating the movable body and the heat insulator, wherein an inner surface of the hole is a guide surface. 3. The movable body guide member includes first, second, and third movable member guide members.
The adjusting device for an optical member or the like according to claim 1, further comprising a groove for accommodating the movable body and the heat insulating body, wherein both side walls of the groove are guide surfaces. 4. The movable body guide member includes first, second, and third movable member guide members.
The adjusting device for an optical member or the like according to claim 1, wherein the rod is a rod that penetrates the movable member and the heat insulator in the first direction, and the outer peripheral surface of the rod is a guide surface. 5. The adjusting device for an optical member according to claim 1, wherein said temperature changing means is a heater.