JP2830876B2 - EPMA measurement data display method - Google Patents

Description

The present invention relates to a measurement data display method for displaying an image of a profile of an X-ray intensity of a specific element measured by an EPMA (Electron Beam Microanalyzer). (B) Conventional technology and its problems In general, surface analysis and line analysis are performed to measure the distribution of elements contained in a sample using EPMA. For example, to perform a line analysis, a characteristic X-ray from a sample is detected while scanning an electron beam linearly as shown in FIG. 6 (a), and as shown in FIG. 6 (b), With the X-ray intensity on the vertical axis,
By drawing a profile with the analysis position on the horizontal axis, the distribution state of the elements located on one straight line is measured. If a profile over the entire surface of the sample is drawn while shifting the irradiation position of the electron beam line by line, a so-called aeroview display is obtained. As described above, conventionally, when a profile of a specific element is obtained, only linear scanning of an electron beam is performed. Therefore, the obtained information is either the distribution state of the elements existing on one straight line or the distribution state of the entire surface, and only fixed information regarding the element distribution on the sample was obtained. The present invention has been made in view of such circumstances, and an object of the present invention is to make it possible to grasp the distribution state of elements in an arbitrary position and direction on a sample surface. (C) Means for Solving the Problems In order to achieve the above object, the present invention measures the intensity of characteristic X-rays emitted from the sample while scanning the electron beam two-dimensionally on the surface of the sample. After storing all the obtained X-ray intensity data in the memory, an input device such as a mouse or a trackball is applied to designate an analysis position along a desired curve on the sample, and the designated analysis position The X-ray intensity data stored at the address of the memory corresponding to the information is read, and the specified analysis position is used as a baseline on a display screen of a CRT display, and the X-ray intensity is displayed as a distance from the baseline. Like that. (D) Function According to the measurement data display method of the present invention, an X-ray intensity profile of a specific element can be displayed as an image with respect to an arbitrary position and direction on the sample surface. For this reason, the distribution state of the specific element in a desired direction and position on the sample surface can be grasped. (E) Embodiment FIG. 1 is a configuration diagram showing an apparatus to which the present invention is applied. In the figure, reference numeral 1 denotes an EPMA main body, 2 denotes a sample,
Is an electron gun, 6 is a focusing lens, 8 is a scanning coil for scanning an electron beam, 10 is an X-ray detector for detecting characteristic X-rays generated from elements contained in the sample 2, and 12 is a scanning for the scanning coil 8. A sweep power supply for supplying current, and 14 is a CRT display. 16 is an A / D converter for digitizing a detection signal corresponding to the X-ray intensity detected by the X-ray detector 10, and 18 is an A / D
An image memory for storing the detection signal digitized by the converter 16 as image data, and a D / A converter 20 for converting the data stored in the image memory 18 into analog data. Reference numeral 22 denotes a mouse as an input device for designating an analysis position along a desired curve on the sample 2 and inputting a command signal for switching a display mode. Reference numeral 24 denotes a RAM for storing information on an analysis position designated by the mouse 22, and reference numeral 26 reads data at a corresponding address from the image memory 18 based on the information on the analysis position stored in the RAM 24, and controls the sweep power supply 12. Controller 28, controller 26
Is a ROM in which information for operation control is stored. Next, a measurement data display method of the present invention to which the apparatus having the above configuration is applied will be described with reference to a flowchart shown in FIG. In order to draw the X-ray intensity profile of the specific element at the analysis position along the desired curve, first, the sweep power supply 12 is controlled by the controller 26 to control the scanning coil 8.
The characteristic X emitted from the sample 2 while the electron beam is two-dimensionally scanned on the surface of the sample 2 by changing the current supplied to the sample 2
The intensity of the line is detected by the X-ray detector 10 (step). Then, the detection output of the X-ray detector 10 is stored in the image memory 18 via the A / D converter 16 (step). When all the X-ray intensity data thus obtained is stored in the image memory 18, the data in the image memory 18 is read out in synchronization with the TV scanning, and the CRT display 14 is read through the D / A converter 20. Is output as a luminance modulation signal. This allows the CRT
A gray image representing the surface analysis result is displayed on the display screen of the display 14 (step). If necessary, an SEM image (secondary electron image) may be displayed. Next, in order to display the X-ray intensity profile at the desired analysis position on the sample 2, the mouse 22 is operated to input a display mode switching signal to the controller 26, and the SEM
The mode is switched from the image display mode to the X-ray intensity profile display mode (step). As a result, a cursor for specifying an analysis position is displayed on the CRT display 14. Subsequently, a desired analysis position on the sample 2 is specified while operating the mouse 22 to move the cursor (step). For example, as shown in FIGS. 3 (a) to 5 (a), a curved analysis position is designated. Then, the information on the designated analysis position is temporarily stored in the RAM 24 (step). Next, display of a profile is designated from the mouse 22 to the controller 26. Then, the controller 26
Reads the X-ray intensity data stored at the address corresponding to each analysis position from the image memory 18 based on the analysis position information already stored in the RAM 24 (step), and indicates this data as the analysis position. After the data is superimposed on the data, raster scanning of the CRT display 14 is controlled by the superimposed data. In addition, the controller 26 allows the CRT display 14 to display only the analysis position data at regular intervals.
Control the raster scan of. Thus, as shown in FIGS. 3 (b) to 5 (b), an X-ray intensity profile with the designated analysis position as a baseline is displayed on the screen of the CRT display 14 (step). In this manner, the analysis position is designated along the desired curve on the sample by the mouse 18, and the X-ray intensity profile with the analysis position as the baseline is displayed on the screen of the CRT display according to the information on the designated analysis position. By displaying, it is possible to grasp the distribution state of the specific element with respect to any position and direction on the sample surface. (F) Effect As described above, according to the present invention, excellent effects such as the ability to grasp the concentration distribution state of a specific element with respect to an arbitrary position and direction on a sample surface are exhibited.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a block diagram showing an apparatus for applying the present invention, FIG. 2 is a flowchart showing an operation procedure of a method of the present invention,
3 to 5 are explanatory diagrams showing the designation of the analysis position and the profile of the characteristic X-ray intensity obtained from the designated position.
FIG. 2 is an explanatory diagram showing a conventional electron beam scanning for a sample and an X-ray intensity profile based on the scanning. 1. EPMA body, 14 CRT display, 18 image memory, 22 mouse, 24 RAM, 26 controller.

Claims (1)

(57) [Claims] Measure the intensity of characteristic X-rays emitted from the sample while scanning the electron beam two-dimensionally on the surface of the sample, store all the obtained X-ray intensity data in the memory, and then input the mouse, trackball, etc. Applying the device, specify the analysis position along the desired curve on the sample, read out the X-ray intensity data stored in the memory address corresponding to the information of the specified analysis position, and display on the CRT display A method for displaying EPMA measurement data, wherein the specified analysis position is used as a baseline on a screen, and X-ray intensity is displayed as a distance from the baseline.