JP2834638B2 - Automatic thickness gauge - Google Patents
Automatic thickness gaugeInfo
- Publication number
- JP2834638B2 JP2834638B2 JP7109293A JP7109293A JP2834638B2 JP 2834638 B2 JP2834638 B2 JP 2834638B2 JP 7109293 A JP7109293 A JP 7109293A JP 7109293 A JP7109293 A JP 7109293A JP 2834638 B2 JP2834638 B2 JP 2834638B2
- Authority
- JP
- Japan
- Prior art keywords
- plate
- measurement
- distance
- calibration
- reference distance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Description
【0001】[0001]
【産業上の利用分野】本発明は、搬送ライン上を搬送さ
れる板状被測定体の板厚を光学的に計測する自動板厚測
定装置に係り、特に基準距離の校正方式に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an automatic thickness measuring apparatus for optically measuring the thickness of a plate-like object to be conveyed on a conveying line, and more particularly to a method for calibrating a reference distance.
【0002】[0002]
【従来の技術】周知のように、自動板厚測定装置は、レ
ーザ測距方式の距離検出器を用いて板厚を測定する装置
であるが、これには、距離検出器を配置する架台がコ字
状(C型架台)のものとリング状(O型架台)のものと
がある。C型架台のものは、1点計測の装置で主に板状
被測定体の片側のみの板厚を測定するのに用いられ、O
型架台のものは、多点計測の装置で主に板状被測定体の
左右両側及び中央部の板厚を連続して測定するのに用い
られる。2. Description of the Related Art As is well known, an automatic plate thickness measuring device is a device for measuring a plate thickness by using a laser distance measuring type distance detector. There are a U-shaped (C-shaped gantry) and a ring-shaped (O-shaped gantry). The C-type mount is used to measure the thickness of only one side of the plate-shaped object to be measured by a one-point measuring device.
The type mount is mainly used in a multi-point measuring device for continuously measuring the thickness of the plate-shaped object to be measured on both the left and right sides and the central portion.
【0003】次に、図5を参照して従来の自動板厚測定
装置の動作概要を説明する。図5はC型架台を用いた1
点計測の装置の動作原理を示す。図5において、板状被
測定体10(10−1、10−2)がローラ13により
矢印方向に搬送される搬送ライン12の片側にコ字状の
架台14が、その対向端部14aと同14bが搬送ライ
ン12の上方と下方に位置するように配置され、この対
向端部14aと同14bにレーザ測距方式の距離検出器
(レーザ変位計)18aと同18bがその光学ヘッドを
板状被測定体10に向けてそれぞれ取り付けられる。Next, an outline of the operation of a conventional automatic thickness measuring apparatus will be described with reference to FIG. FIG. 5 shows a C-type base 1
The operating principle of the device for point measurement is shown. In FIG. 5, a U-shaped pedestal 14 is provided on one side of a transport line 12 on which a plate-shaped measuring object 10 (10-1 and 10-2) is transported in the direction of an arrow by a roller 13 as the opposite end portion 14a. 14b are disposed above and below the transport line 12, and a distance detector (laser displacement meter) 18a and a laser detector 18b of a laser ranging type are provided on the opposite ends 14a and 14b. Each is attached toward the measured object 10.
【0004】レーザ変位計18aと同18bは、それぞ
れその光学ヘッドから搬送ライン12上を移動する板状
被測定体10の側端に向けてレーザ光を発射しその反射
光を受けて板状被測定体10までの距離(L1 、L2 )
を計測する。11は板厚計測の軌跡であって、板状被測
定体10の側縁に平行して形成される。また、両光学ヘ
ッド間の距離L0 は既値の一定値(基準距離)である。
従って、板状被測定体10の板厚Lは、数式1により求
められる。The laser displacement gauges 18a and 18b emit laser light from their optical heads toward the side ends of the plate-like measurement object 10 moving on the transport line 12, receive the reflected light, and receive the plate-like measurement light. distance to the measurement object 10 (L 1, L 2)
Is measured. Reference numeral 11 denotes a trajectory of the plate thickness measurement, which is formed in parallel with a side edge of the plate-shaped measured object 10. Further, the distance L 0 between the two optical heads is a predetermined value (reference distance).
Therefore, the plate thickness L of the plate-shaped measurement object 10 is obtained by Expression 1.
【0005】[0005]
【数1】L=L0 −(L1 +L2)L = L 0 − (L 1 + L 2 )
【0006】ここに、基準距離L0 は架台14の対向端
部間の距離に依存するが、当該装置の設置環境から容易
に理解できるように、架台14の対向端部は環境温度の
変化や板状被測定体10からの輻射熱等による影響を直
接的に受けて熱変形を生じ易いという本質的な問題があ
る。Here, the reference distance L 0 depends on the distance between the opposing ends of the gantry 14. However, as can be easily understood from the installation environment of the apparatus, the opposing end of the gantry 14 has a change in the environmental temperature or the like. There is an essential problem that it is directly affected by radiant heat or the like from the plate-like measurement object 10 and easily undergoes thermal deformation.
【0007】つまり、架台14の対向端部が熱変形を受
け、基準距離L0 がL0 ′に変化したとすると、板状被
測定体10の板厚L′は数式2となるので、数式3に示
す測定誤差δを生ずる。That is, assuming that the opposite end of the gantry 14 undergoes thermal deformation and the reference distance L 0 changes to L 0 ′, the plate thickness L ′ of the plate-like measured object 10 becomes A measurement error δ shown in FIG.
【0008】[0008]
【数2】L′=L0 ′−(L1 +L2)[Number 2] L '= L 0' - ( L 1 + L 2)
【0009】[0009]
【数3】δ=L′−LΔ = L′−L
【0010】従って、信頼性を維持し正確な板厚測定を
期するためには、定期的に基準距離L0 を校正し精度を
維持する必要があり、従来では、例えば特開平1−22
1605号公報や実開昭59−41711号公報に示さ
れるような校正方式が提案されている。Therefore, in order to maintain the reliability and to measure the thickness accurately, it is necessary to periodically calibrate the reference distance L 0 to maintain the accuracy.
Calibration methods such as those disclosed in Japanese Patent Application Laid-Open No. 1605 and Japanese Utility Model Application Laid-Open No. 59-41711 have been proposed.
【0011】この従来提案されている校正方式は、例え
ば図5(c)(d)に示すように予め板厚を精密測定し
た校正板28をC型の架台14の内奥側であって板状被
測定体10とほぼ同一の高さ位置に設定すると共に、図
中矢印で移動方向を示してあるように架台14の対向端
部14aと同14bが搬送ライン12に対し出入り自在
なように架台14をスライド可能に構成し、測定時には
レーザ変位計18aと同18bの光学ヘッドが板状被測
定体10の側端部に対向できる位置まで架台14を搬送
ライン12側に移動させ(図5(c))、校正時にはレ
ーザ変位計18aと同18bの光学ヘッドが校正板28
に対向できる位置まで架台14を搬送ライン12から外
れる方向に移動(図5(d))させるようにしたもので
ある。The calibration method proposed in the prior art is, for example, as shown in FIGS. 5 (c) and 5 (d), a calibration plate 28 whose plate thickness has been precisely measured in advance, The height is set to be substantially the same as that of the object to be measured 10, and the opposite ends 14 a and 14 b of the gantry 14 are allowed to enter and exit the transport line 12 as indicated by arrows in the drawing. The gantry 14 is configured to be slidable, and at the time of measurement, the gantry 14 is moved toward the transport line 12 to a position where the optical heads of the laser displacement gauges 18a and 18b can be opposed to the side ends of the plate-like measurement object 10 (FIG. 5). (C)) During calibration, the optical heads of the laser displacement gauges 18a and 18b are
The gantry 14 is moved in a direction away from the transfer line 12 (FIG. 5D) to a position where the gantry 14 can be opposed.
【0012】この方式では、校正板の厚みLS は、数式
1から求められるが(数式4)、この厚みLS は既値で
あるので、校正した基準距離L0 は、数式4から数式5
のように求められる。In this method, the thickness L S of the calibration plate can be obtained from Equation 1 (Equation 4). Since this thickness L S is a known value, the calibrated reference distance L 0 is calculated from Equation 4 to Equation 5
Is required.
【0013】[0013]
【数4】LS =L0 −(L1 +L2)L S = L 0 − (L 1 + L 2 )
【0014】[0014]
【数5】L0 =LS +L1 +L2 L 0 = L S + L 1 + L 2
【0015】[0015]
【発明が解決しようとする課題】しかし、従来提案され
ている校正方式は、架台を移動操作して測定と校正とを
一方を中断して他方の作業を行う方式であるので、校正
作業の開始から測定作業の開始までに相当の時間を要
し、簡便な校正方式とは言えない。また測定対象は高温
で長大な厚板であり、測定途中で連続して高熱にさらさ
れるが、測定作業を中断して校正作業を行う方式ではか
かる測定途中での影響を排除できない。更に、O型架台
を用いた多点計測の装置では、適用が困難である、等の
種々の問題がある。However, the calibration method proposed in the prior art is a method in which measurement and calibration are interrupted by moving the gantry to perform one of the other operations. It takes a considerable amount of time from the start to the start of the measurement work, and it cannot be said that this is a simple calibration method. The measurement target is a long plate at high temperature and is continuously exposed to high heat during the measurement. However, a method in which the measurement operation is interrupted and the calibration operation is performed cannot eliminate the influence during the measurement. In addition, there are various problems such as difficulty in application to a multi-point measurement device using an O-type gantry.
【0016】本発明は、このような従来の問題に鑑みな
されたもので、その目的は、測定作業を中断せずに、且
つ、短時間で校正しそれを直ちに測定に反映させ得る手
段を備えた自動板厚測定装置を提供することにある。The present invention has been made in view of such a conventional problem, and has as its object to provide a means capable of calibrating in a short time without interrupting the measurement work and immediately reflecting the result in the measurement. Another object of the present invention is to provide an automatic thickness measuring apparatus.
【0017】[0017]
【課題を解決するための手段】前記目的を達成するため
に、本発明の自動板厚測定装置は、次の如き構成を有す
る。即ち、第1発明の自動板厚測定装置は、板状被測定
体が搬送される搬送ラインの上方と下方に所定の基準距
離を隔てて距離検出器をそれぞれ配置し、基準距離及び
距離検出器と板状被測定体との間の距離に基づき板状被
測定体の板厚を計測する自動板厚測定装置において;
搬送ラインの上方と下方の双方または何れか一方に設け
られ光学的に板状被測定体の前後端部を検出する端部セ
ンサと; 前記2つの距離検出器の一方の支持体に設け
られる校正機構であって、一端が前記支持体に回動可能
に支持される支柱と、この支柱の他端に固定される校正
板とを備える校正機構と; 前記端部センサが板状被測
定体の後端部を検出したことに応答して前記校正板が板
状被測定体の搬送位置であって前記2つの距離検出器の
間に介在するように前記支柱を回動駆動し、端部センサ
が次の板状被測定体の前端部を検出したことに応答して
校正板が搬送ラインから外れた位置に退避するように支
柱を回動駆動する手段と; 前記校正板が板状被測定体
の搬送位置に存している期間内において当該校正板の板
厚及び当該校正板と距離検出器との間の距離を用いて前
記基準距離を校正する手段と; 前記端部センサが次の
板状被測定体の前端部を検出したことに応答してその板
状被測定体についての測定に用いる基準距離を前記校正
した基準距離で更新する手段と; を備えたことを特徴
とするものである。To achieve the above object, an automatic thickness measuring apparatus according to the present invention has the following configuration. That is, the automatic thickness measuring apparatus according to the first aspect of the present invention has a configuration in which distance detectors are arranged at predetermined reference distances above and below a transport line on which a plate-like measurement object is transported, respectively. An automatic thickness measuring device for measuring the thickness of the plate-shaped object based on the distance between the plate-shaped object and the plate-shaped object;
An end sensor that is provided above and / or below the transport line and optically detects the front and rear ends of the plate-like measurement object; and a calibration that is provided on one of the two distance detectors. A calibration mechanism comprising: a support having one end rotatably supported by the support; and a calibration plate fixed to the other end of the support; and the end sensor is a plate-like measurement object. In response to the detection of the rear end, the support plate is rotationally driven so that the calibration plate is located at the transport position of the plate-like measurement object and is interposed between the two distance detectors, and an end sensor is provided. Means for rotating the column so that the calibration plate is retracted to a position off the transport line in response to detecting the front end of the next plate-shaped measurement object; and The thickness of the calibration plate and the distance between the calibration plate and the Means for calibrating the reference distance using a distance to a detector; and responding to the end sensor detecting a front end of the next plate-like measured object. Means for updating a reference distance used for measurement with the calibrated reference distance.
【0018】第2発明の自動板厚測定装置は、第1発明
の自動板厚測定装置において; 当該板状被測定体の計
測で用いた基準距離とその計測後の校正動作で得られた
基準距離との差値が所定値以上のとき、その差値を板状
被測定体の長さ方向の測定位置に応じて按分しその測定
位置に対応した基準距離をそれぞれ求め、それにより当
該板状被測定体の板厚測定値を補正する手段; を備え
たことを特徴とするものである。An automatic thickness measuring apparatus according to a second aspect of the present invention is the automatic thickness measuring apparatus according to the first aspect of the present invention; a reference distance used in measurement of the plate-like measurement object and a reference obtained by a calibration operation after the measurement. When the difference value from the distance is equal to or more than a predetermined value, the difference value is proportionally distributed according to the measurement position in the longitudinal direction of the plate-like measurement object, and the reference distance corresponding to the measurement position is obtained, thereby obtaining the plate-like shape. Means for correcting the measured value of the thickness of the object to be measured.
【0019】また、第3発明の自動板厚測定装置は、第
1発明または第2発明の自動板厚測定装置において;
前記距離検出器は、前記校正機構と共に板状被測定体の
搬送方向と直角方向に移動可能である; と共に、単位
移動距離毎に基準距離が設定されてなり; 当該板状被
測定体の計測終了直後の校正動作で得られる基準距離と
計測終了時の距離検出器の位置における前記設定基準距
離との差値が所定値以上のとき、その差値を板状被測定
体の長さ方向の測定位置に応じて按分し、その長さ方向
の按分値と距離検出器が当該板状被測定体の計測開始時
から計測終了時までに移動した各位置の設定基準距離と
を用いて各測定位置に対応した基準距離をそれぞれ求
め、それにより当該板状被測定体の板厚測定値を補正す
る手段;を備えたことを特徴とするものである。The automatic thickness measuring apparatus according to the third invention is the automatic thickness measuring apparatus according to the first or second invention;
The distance detector is movable together with the calibration mechanism in a direction perpendicular to the transport direction of the plate-like measured object; and a reference distance is set for each unit movement distance; When the difference value between the reference distance obtained by the calibration operation immediately after the end and the set reference distance at the position of the distance detector at the end of the measurement is equal to or greater than a predetermined value, the difference value is determined in the length direction of the plate-shaped measuring object. Apportioned in accordance with the measurement position, each measurement using the apportioned value in the length direction and the set reference distance of each position where the distance detector moved from the start of measurement to the end of measurement of the plate-like measurement object Means for determining a reference distance corresponding to the position and correcting a measured value of the thickness of the plate-like measured object based on the reference distance.
【0020】[0020]
【作用】次に、前記の如く構成される本発明の自動板厚
測定装置の作用を説明する。本発明では、搬送される板
状被測定体同士の間に間隙があることに着目し、その間
隙において校正動作を行い計測動作と校正動作とを交互
に実施できるようにしてある。Next, the operation of the thus-configured automatic thickness measuring apparatus of the present invention will be described. The present invention focuses on the fact that there is a gap between the plate-shaped objects to be conveyed, and performs a calibration operation in the gap so that the measurement operation and the calibration operation can be performed alternately.
【0021】具体的には図1に示すように、板状被測定
体(A1 ,A2 ,……)はある間隙を置いて搬送ライン
上を搬送されるので、端部センサにより板状被測定体A
1 の後端部を検出すると、次の板状被測定体A2 の前端
部を検出するまでの間、校正板を搬送ライン上に回動設
定し、例えば測定時と同様の時間間隔で基準距離を求め
る校正動作をする。次いで、板状被測定体A2 の前端部
を検出すると、板状被測定体A2 の後端部を検出するま
での間、校正板を搬送ラインから回動退避した状態で通
常の測定動作をする。そして、測定動作は、校正動作の
終了時点での基準距離を用いて行うのである。More specifically, as shown in FIG. 1, the plate-like measuring objects (A 1 , A 2 ,...) Are conveyed on a conveying line with a certain gap therebetween. DUT A
When the rear end of 1 is detected, the calibration plate is set to rotate on the transport line until the front end of the next plate-shaped measuring object A 2 is detected, and the reference plate is set at the same time interval as the measurement, for example. Perform the calibration operation to find the distance. Then, when detecting the front end portion of the plate-shaped object to be measured A 2, until detecting the rear end portion of the plate-shaped object to be measured A 2, normal measuring operation in a state of being rotated retracted calibration plate from the conveyor line do. The measurement operation is performed using the reference distance at the end of the calibration operation.
【0022】要するに、計測動作と校正動作とを交互に
実施し、校正値を直ちに計測動作に反映させ得るように
してあるので、設置環境の温度変化や板状被測定体から
の輻射熱の影響を最小化でき、測定精度の維持向上が図
れる。この本発明に係る校正方式は、C型架台は勿論の
こと、O型架台の装置にも支障なく容易に適用できるこ
とはその構成から明らかである。In short, the measurement operation and the calibration operation are performed alternately, and the calibration value can be immediately reflected in the measurement operation. Therefore, the influence of the temperature change of the installation environment and the radiant heat from the plate-shaped object to be measured are considered. It can be minimized and the measurement accuracy can be maintained and improved. It is clear from the configuration that the calibration system according to the present invention can be easily applied to the O-type gantry as well as the C-type gantry.
【0023】なお、第2発明は、板状被測定体が長大で
前端から後端までの計測が行われる期間内に熱変形を考
慮する必要のある場合に好適な構成であり、また第3発
明は板状被測定体が搬送ライン上に斜行して設置される
場合に好適な構成である。The second invention is suitable for the case where the plate-shaped object to be measured is long and it is necessary to take thermal deformation into consideration during the period from the front end to the rear end. The present invention is a configuration suitable for a case where a plate-like measurement object is installed obliquely on a transport line.
【0024】[0024]
【実施例】以下、本発明の実施例を図面を参照して説明
する。自動板厚測定装置の基本的な電気的構成は、周知
であるので、図示及び説明を省略し、本発明に係る部
分、即ち、本発明の校正方式を中心に説明する。これに
より、本発明により追加した部分の構成を明らかにす
る。Embodiments of the present invention will be described below with reference to the drawings. Since the basic electrical configuration of the automatic thickness measuring apparatus is well known, illustration and description thereof will be omitted, and the description will focus on the portion relating to the present invention, that is, the calibration method of the present invention. This clarifies the configuration of the part added according to the present invention.
【0025】図2乃至図4には、本発明の校正方式をO
型架台の装置に適用した場合の各種の態様を示してあ
る。なお、従来(図5)と同一構成部分には同一符号名
称を付してある。FIGS. 2 to 4 show the calibration method of the present invention.
Various aspects when applied to the apparatus of the mold stand are shown. Note that the same components as those in the related art (FIG. 5) are given the same reference numerals.
【0026】図2において、15はO型の架台であり、
この架台15の中央付近に搬送ライン12が水平に設定
され、板状被測定体(10−1、10−2)が従来と同
様に搬送される。In FIG. 2, reference numeral 15 denotes an O-type base,
The transport line 12 is set horizontally near the center of the gantry 15, and the plate-like measurement objects (10-1 and 10-2) are transported as in the related art.
【0027】この架台15の上枠部と下枠部において、
板状被測定体の両側端と中央付近とに対応した位置に距
離検出器(レーザ変位計)18(18a、18b)がそ
れぞれ設定される。即ち、3点計測の場合であり、以上
は、従来と同様である。In the upper frame portion and the lower frame portion of the gantry 15,
Distance detectors (laser displacement meters) 18 (18a, 18b) are respectively set at positions corresponding to both side ends and the vicinity of the center of the plate-like measurement object. That is, this is a case of three-point measurement, and the above is the same as the conventional case.
【0028】本発明では、図2(a)に示すように、3
個のレーザ変位計のうち中央のレーザ変位計の近傍の架
台15の枠部に端部センサ16を設けてある。この端部
センサ16は、光学的に板状被測定体の前後端部を検出
する。In the present invention, as shown in FIG.
An end sensor 16 is provided on the frame of the gantry 15 in the vicinity of the central laser displacement meter among the laser displacement meters. The end sensor 16 optically detects the front and rear ends of the plate-like measurement object.
【0029】本実施例では、図2(b)に示すように、
架台15の上枠部に投光器16aを下枠部に受光器16
bをそれぞれ設け、板状被測定体で光路が遮断されず受
光できたときを前後端部の検出ができたときとしてい
る。前端部か後端部かは、計測動作の開始時または終了
時の何れかで判断できる。In this embodiment, as shown in FIG.
The light emitter 16a is provided on the upper frame of the gantry 15 and the light receiver 16 is provided on the lower frame.
b is provided, and the time when the optical path is not blocked by the plate-like measured object and light can be received is defined as the time when the front and rear ends can be detected. Whether it is the front end portion or the rear end portion can be determined at either the start or end of the measurement operation.
【0030】なお、反射光を利用し反射光がないときを
板状被測定体の前後端部の検出とするときは、投光器と
受光器の双方を架台15の上枠部と下枠部の何れか一方
に設定すれば良い。When the reflected light is used to detect the front and rear ends of the plate-like measured object when there is no reflected light, both the light projector and the light receiver are connected to the upper frame and the lower frame of the frame 15. It may be set to either one.
【0031】そして、本発明では、例えば図2(b)
(c)(d)に示すように、架台15の下枠部に取り付
けられる3個のレーザ変位計18bそれぞれの近傍に校
正機構(支柱26、校正板27)を設けてある。In the present invention, for example, FIG.
(C) As shown in (d), a calibration mechanism (support 26, calibration plate 27) is provided near each of the three laser displacement meters 18b attached to the lower frame of the gantry 15.
【0032】支柱26は、一端が架台15の下枠部に回
動可能に支持される。図示省略したが、この回動駆動は
モータにより行われる。校正板27は、この支柱26の
他端に固定される。予め板厚が精密測定された所定大き
さの板部材である。The support 26 has one end rotatably supported by the lower frame of the gantry 15. Although not shown, this rotation drive is performed by a motor. The calibration plate 27 is fixed to the other end of the column 26. It is a plate member of a predetermined size whose plate thickness has been precisely measured in advance.
【0033】この校正機構は、次のようにして作動され
る。即ち、端部センサ16が板状被測定体10−1の後
端部を検出したこと、つまり、図示例で言えば板状被測
定体10−1と同10−2との間の間隙を検出したこと
に応答して、校正板27が板状被測定体の搬送位置であ
って対応する2つの対向するレーザ変位計の間に介在す
るように支柱26を回動駆動する。要するに、支柱26
はそのような適宜長さのものである。かかる構成である
ので、多点計測の装置でも容易に取り付けることができ
る。This calibration mechanism is operated as follows. That is, the end sensor 16 has detected the rear end of the plate-shaped measured object 10-1, that is, the gap between the plate-shaped measured objects 10-1 and 10-2 in the illustrated example. In response to the detection, the column 26 is rotationally driven so that the calibration plate 27 is located at the transport position of the plate-like measured object and is interposed between two corresponding laser displacement gauges. In short, prop 26
Is of such a suitable length. With such a configuration, a multi-point measurement device can be easily attached.
【0034】これにより図2(d)に示すように、校正
板27が板状被測定体10−2と同一平面の高さ位置に
設定され、数式5で説明したように校正板27の板厚L
S を用いた基準距離L0 の校正動作が行われる。測定間
隔は測定動作時と同様であっても、異なる間隔であって
も良いが、この校正動作は端部センサ16が前端部検出
を行うまで繰り返される。As a result, as shown in FIG. 2D, the calibration plate 27 is set at the same height position as the plate-like measured object 10-2. Thick L
Calibration operation of the reference distance L 0 using S is performed. The measurement interval may be the same as that at the time of the measurement operation or a different interval, but this calibration operation is repeated until the end sensor 16 detects the front end.
【0035】次いで、板状被測定体10−2の前端部が
架台15の配置位置に到達し、端部センサ16がそれを
検出すると、その検出したことに応答して校正板27が
搬送ライン12から外れた位置に退避するように支柱2
6を回動駆動する。図2(b)(c)に示すようになる
のであり、板状被測定体10−2についての板厚測定動
作が行われる。Next, when the front end of the plate-shaped object to be measured 10-2 reaches the position where the gantry 15 is disposed, and the end sensor 16 detects it, the calibration plate 27 responds to the detection and the calibration plate 27 moves. Post 2 so that it can retreat to a position off of 12
6 is rotationally driven. As shown in FIGS. 2B and 2C, the plate thickness measurement operation is performed on the plate-shaped measurement object 10-2.
【0036】以上のように、校正機構は、板状被測定体
同士の間の間隙の通過期間内において搬送ラインに校正
板27を回動設定し、板状被測定体の通過期間内におい
て校正板27が回動退避され、図1に示したように校正
動作と測定動作とが交互的に繰り返される。As described above, the calibration mechanism rotates the calibration plate 27 on the transport line during the passage of the gap between the plate-shaped test objects, and performs calibration during the passage of the plate-like test object. The plate 27 is rotated and retracted, and the calibration operation and the measurement operation are alternately repeated as shown in FIG.
【0037】ここに、本発明では、端部センサ16が板
状被測定体10−2の前端部を検出し校正動作を終了す
るときに、板状被測定体10−2についての測定に用い
る基準距離を、その直前で行われた校正動作の終了時点
で得られた基準距離で更新するようにしてある。これに
より、基本的には、設置環境の温度変化や板状被測定体
からの輻射熱の影響を最小化でき、測定精度を維持向上
させることが可能となる。Here, in the present invention, when the end sensor 16 detects the front end of the plate-shaped measuring object 10-2 and ends the calibration operation, it is used for the measurement of the plate-shaped measuring object 10-2. The reference distance is updated with the reference distance obtained at the end of the calibration operation performed immediately before. As a result, basically, the influence of the temperature change of the installation environment and the radiation heat from the plate-like measurement object can be minimized, and the measurement accuracy can be maintained and improved.
【0038】しかし、例えば板状被測定体が長大のもの
で輻射熱等の影響の最小化が不十分となる場合には、図
3に示すような補正手段を備えると良い。即ち、板厚の
測定開始時に更新設定された基準距離L0 と板厚の測定
終了後に開始される校正動作の第1回目で得られた基準
距離L0 ′との差値を検出し、その差値σが所定値σ0
以上のときは、その差値を板状被測定体の長さ方向の測
定回数Nで按分し、長さ方向のn点での板厚測定で使用
する基準距離L0nを、L0n=L0 +(σ/N)・nとし
て求め、それにより当該板状被測定体の板厚測定値を補
正する。この補正動作は、校正動作の期間内に行えるの
で、次の板状被測定体の板厚測定に支障を来すことはな
い。However, for example, when the object to be measured is long and the minimization of the influence of radiant heat or the like is insufficient, a correction means as shown in FIG. 3 may be provided. That is, to detect the difference value between the thickness reference distance measurement starts when the updated set of L 0 and the reference distance L 0 obtained in the first round of the calibration operation is started after the plate thickness of the end of measurement ', the The difference value σ is a predetermined value σ 0
In the above case, the difference value is proportionally divided by the number of measurements N in the length direction of the plate-like measured object, and the reference distance L 0n used for the thickness measurement at n points in the length direction is expressed as L 0n = L 0+ (σ / N) · n, thereby correcting the measured thickness of the plate-shaped object. Since this correction operation can be performed during the period of the calibration operation, it does not hinder the measurement of the thickness of the next plate-shaped measurement object.
【0039】また、板状被測定体は、搬送ラインに沿っ
てほぼ平行して設定されるよう位置決めされるのが通例
であるが、そのような位置決め機構がない等の場合に、
例えば図4(a)に示すように、板状被測定体10が搬
送ライン12に対し斜行する形で設定される場合があ
る。このような場合には、図4(b)に示すような補正
手段を備えると良い。In general, the plate-shaped object to be measured is positioned so as to be set substantially in parallel along the transport line. However, when such a positioning mechanism is not provided,
For example, as shown in FIG. 4A, there is a case where the plate-shaped measured object 10 is set so as to be inclined with respect to the transport line 12. In such a case, it is preferable to provide a correction unit as shown in FIG.
【0040】即ち、図4(a)において、左方の架台1
5は計測前、右方の架台15は計測後の位置をそれぞれ
示すが、図示するように、レーザ変位計18とこれに対
応する校正機構を架台15の枠部に移動可能に取り付
け、板状被測定体の搬送方向(逆向きが計測方向X)と
直角方向Yに移動可能とし、単位移動距離毎に基準距離
(設計値)を設定して置く。That is, in FIG. 4A, the left base 1
5 shows the position before measurement and the right frame 15 shows the position after measurement, respectively. As shown in the figure, the laser displacement gauge 18 and the corresponding calibration mechanism are movably mounted on the frame of the frame 15, and The target object can be moved in the direction Y perpendicular to the transport direction (the reverse direction is the measurement direction X), and a reference distance (design value) is set and set for each unit movement distance.
【0041】周知のように、板厚の測定は、一般に図5
(a)の軌跡11で示すように板状被測定体の側縁に平
行するように行われる。これは、板状被測定体が斜行す
る場合でも同様であるが、図4(a)のような場合に測
定位置の軌跡が11となるようにレーザ変位計18を移
動させるいわゆる斜行追尾機構は既に知られているの
で、それを採用する。概略を言えば、斜行センサにより
板状被測定体の斜角を検出し、その斜角に応じてレーザ
変位計18を移動させるのである。As is well known, the measurement of the plate thickness is generally performed by using FIG.
The measurement is performed so as to be parallel to the side edge of the plate-like measured object as shown by a locus 11 in (a). The same applies to the case where the plate-like measurement object is skewed. However, in the case shown in FIG. 4A, the so-called skew tracking in which the laser displacement gauge 18 is moved so that the locus of the measurement position becomes 11. Adopt it because the mechanism is already known. Roughly speaking, the oblique angle sensor detects the oblique angle of the plate-like object to be measured, and moves the laser displacement gauge 18 according to the oblique angle.
【0042】さて、計測動作であるが、図4(b)に示
すように、計測動作は位置P00で開始されここからY方
向に適宜距離移動した位置P0Yで終了する。計測開始時
の基準距離は校正動作終了時に得られた値L00であり、
この校正された基準距離L00により測定動作を行う。し
かし、この校正された基準距離L00は測定開始時にのみ
有効に利用できるが、その後の測定では正しい基準距離
とはなっておらず板厚計測値は誤差を含むことになる。[0042] Now, a measurement operation, as shown in FIG. 4 (b), the measurement operation is terminated at the position P 0Y from here begins at position P 00 was appropriately distance in the Y direction. Reference distance at the start of measurement is a value L 00 obtained at the calibration operation is completed,
The measurement operation performed by the calibrated reference distance L 00. However, although the calibrated reference length L 00 can be effectively used only at the start of measurement, then the thickness measurements not become the correct reference distance measurement will include errors.
【0043】そこで、板厚の計測が終了する位置P0Yで
の設定基準距離はL0Yであるが、位置P0Y以後で開始さ
れる校正動作の第1回目で得られた基準距離がL0Y′で
あったとすると、両者の差値を検出し、その差値σが所
定値σ0 以上のときは、その差値を板状被測定体の長さ
方向Xの測定回数Nで按分し、Y方向のy点とX方向の
x点で定まる位置Pxyでの板厚測定で使用する基準距離
Lxyを、y点の設定基準距離L0yを用いて、Lxy=L0y
+(σ/N)・xとして求め、それにより当該板状被測
定体の板厚測定値を補正する。この補正動作は、図3の
場合と同様に校正動作の期間内に行えるので、次の板状
被測定体の板厚測定に支障を来すことはない。Therefore, the set reference distance at the position P 0Y where the thickness measurement ends is L 0Y , but the reference distance obtained in the first calibration operation starting from the position P 0Y is L 0Y. ′, The difference value between the two is detected, and when the difference value σ is equal to or greater than the predetermined value σ 0 , the difference value is proportionally divided by the number of measurements N in the length direction X of the plate-like measured object, The reference distance L xy used in the thickness measurement at the position P xy determined by the y point in the Y direction and the x point in the X direction is calculated as L xy = L 0y using the set reference distance L 0y of the y point.
+ (Σ / N) · x, thereby correcting the measured value of the thickness of the plate-like measured object. Since this correction operation can be performed within the period of the calibration operation as in the case of FIG. 3, there is no hindrance to the next measurement of the plate thickness of the plate-like measurement object.
【0044】なお、図4に示す補正手段は、図3の示し
た補正手段と併用しても良いことは勿論である。The correction means shown in FIG. 4 may be used together with the correction means shown in FIG.
【0045】[0045]
【発明の効果】以上説明したように、本発明の自動板厚
測定装置では、搬送される板状被測定体同士の間に間隙
があることに着目し、その間隙において校正動作を行い
計測動作と校正動作とを交互に実施できるようにし、校
正値を直ちに計測動作に反映させ得るようにしてあるの
で、設置環境の温度変化や板状被測定体からの輻射熱の
影響を最小化でき、測定精度の維持向上が図れる効果が
ある。また本発明の校正方式は、C型架台は勿論のこ
と、O型架台の装置にも支障なく容易に適用できる効果
もある。なお、板状被測定体が長大で前端から後端まで
の計測が行われる期間内に熱変形を考慮する必要のある
場合には第2発明のように構成し、また、板状被測定体
が搬送ライン上に斜行して設置される場合には第3発明
のように構成する等、測定対象の特性に応じて適切に構
成できる効果もある。As described above, the automatic thickness measuring apparatus of the present invention focuses on the fact that there is a gap between the conveyed plate-shaped measuring objects, performs a calibration operation in the gap, and performs a measuring operation. And the calibration operation can be performed alternately, and the calibration value can be immediately reflected in the measurement operation.This minimizes the effects of temperature changes in the installation environment and radiant heat from the plate-like measurement object. This has the effect of maintaining and improving accuracy. In addition, the calibration method of the present invention has an effect that it can be easily applied to O-type gantry as well as C-type gantry. In the case where the plate-like measured object is long and it is necessary to consider thermal deformation during a period in which measurement from the front end to the rear end is performed, the plate-like measured object is configured as in the second invention. In the case where is installed obliquely on the transport line, there is an effect that it can be appropriately configured according to the characteristics of the measurement object, such as the configuration of the third invention.
【図1】本発明の自動板厚測定装置の動作原理の説明図
である。FIG. 1 is an explanatory diagram of the operation principle of the automatic thickness measuring apparatus of the present invention.
【図2】本発明の自動板厚測定装置において行われる校
正動作と測定動作の交互実施を実現する具体的構成及び
動作の説明図である。FIG. 2 is an explanatory diagram of a specific configuration and operation for realizing alternate execution of a calibration operation and a measurement operation performed in the automatic thickness measuring apparatus of the present invention.
【図3】本発明の自動板厚測定装置の補正動作の説明図
である。FIG. 3 is an explanatory diagram of a correcting operation of the automatic thickness measuring apparatus of the present invention.
【図4】本発明の自動板厚測定装置の補正動作の説明図
である。FIG. 4 is an explanatory diagram of a correction operation of the automatic thickness measuring apparatus of the present invention.
【図5】従来の自動板厚測定装置の動作説明図である。FIG. 5 is an operation explanatory view of a conventional automatic thickness measuring apparatus.
10(10−1、10−2) 板状被測定体 11 板厚測定の軌跡 12 搬送ライン 15 架台 16 端部センサ 16a 投光器 16b 受光器 18(18a、18b) 距離検出器(レーザ変位計) 26 支柱 27 校正板 A1 ,A2 板状被測定体Reference Signs List 10 (10-1, 10-2) Plate-shaped object to be measured 11 Locus of plate thickness measurement 12 Conveyance line 15 Mount 16 End sensor 16a Projector 16b Receiver 18 (18a, 18b) Distance detector (laser displacement meter) 26 Prop 27 Calibration plate A 1 , A 2 Plate object
Claims (3)
上方と下方に所定の基準距離を隔てて距離検出器をそれ
ぞれ配置し、基準距離及び距離検出器と板状被測定体と
の間の距離に基づき板状被測定体の板厚を計測する自動
板厚測定装置において; 搬送ラインの上方と下方の双
方または何れか一方に設けられ光学的に板状被測定体の
前後端部を検出する端部センサと; 前記2つの距離検
出器の一方の支持体に設けられる校正機構であって、一
端が前記支持体に回動可能に支持される支柱と、この支
柱の他端に固定される校正板とを備える校正機構と;前
記端部センサが板状被測定体の後端部を検出したことに
応答して前記校正板が板状被測定体の搬送位置であって
前記2つの距離検出器の間に介在するように前記支柱を
回動駆動し、端部センサが次の板状被測定体の前端部を
検出したことに応答して校正板が搬送ラインから外れた
位置に退避するように支柱を回動駆動する手段と; 前
記校正板が板状被測定体の搬送位置に存している期間内
において当該校正板の板厚及び当該校正板と距離検出器
との間の距離を用いて前記基準距離を校正する手段と;
前記端部センサが次の板状被測定体の前端部を検出し
たことに応答してその板状被測定体についての測定に用
いる基準距離を前記校正した基準距離で更新する手段
と; を備えたことを特徴とする自動板厚測定装置。1. A distance detector is disposed above and below a transport line on which a plate-shaped measuring object is conveyed with a predetermined reference distance therebetween, and a distance between the reference distance and distance detector and the plate-shaped measuring object is set. In an automatic thickness measuring apparatus for measuring the thickness of a plate-shaped object to be measured based on the distance between them; optically provided front and rear ends of the plate-shaped object to be measured which are provided above and / or below a transport line; An end sensor for detecting a distance between the first and second distance detectors; a support mechanism rotatably supported by the support body at one end; A calibration mechanism having a calibration plate to be fixed; and wherein the calibration plate is at a transport position of the plate-like measurement object in response to the end sensor detecting a rear end of the plate-like measurement object. The column is driven to rotate between two distance detectors, and Means for rotating the column so that the calibration plate is retracted to a position off the transport line in response to detecting the front end of the next plate-shaped measurement object; and Means for calibrating the reference distance using the thickness of the calibration plate and the distance between the calibration plate and the distance detector during a period in which the body is at the transport position;
Means for updating a reference distance used for measurement on the plate-like measured object with the calibrated reference distance in response to the end sensor detecting the front end of the next plate-like measured object. An automatic thickness measuring apparatus.
いて; 当該板状被測定体の計測で用いた基準距離とそ
の計測後の校正動作で得られた基準距離との差値が所定
値以上のとき、その差値を板状被測定体の長さ方向の測
定位置に応じて按分しその測定位置に対応した基準距離
をそれぞれ求め、それにより当該板状被測定体の板厚測
定値を補正する手段; を備えたことを特徴とする自動
板厚測定装置。2. The automatic thickness measuring apparatus according to claim 1, wherein a difference value between a reference distance used in measurement of the plate-like measurement object and a reference distance obtained by a calibration operation after the measurement is predetermined. If the difference is greater than or equal to the value, the difference value is proportionally distributed according to the measurement position in the length direction of the plate-like measured object, and the reference distance corresponding to the measurement position is obtained, thereby measuring the plate thickness of the plate-like measured object. Means for correcting a value;
厚測定装置において; 前記距離検出器は、前記校正機
構と共に板状被測定体の搬送方向と直角方向に移動可能
である; と共に、単位移動距離毎に基準距離が設定さ
れてなり;当該板状被測定体の計測終了直後の校正動作
で得られる基準距離と計測終了時の距離検出器の位置に
おける前記設定基準距離との差値が所定値以上のとき、
その差値を板状被測定体の長さ方向の測定位置に応じて
按分し、その長さ方向の按分値と距離検出器が当該板状
被測定体の計測開始時から計測終了時までに移動した各
位置の設定基準距離とを用いて各測定位置に対応した基
準距離をそれぞれ求め、それにより当該板状被測定体の
板厚測定値を補正する手段; を備えたことを特徴とす
る自動板厚測定装置。3. The automatic thickness measuring apparatus according to claim 1, wherein the distance detector is movable together with the calibration mechanism in a direction perpendicular to a transport direction of the plate-like measurement object. A reference distance is set for each unit movement distance; the difference between the reference distance obtained by the calibration operation immediately after the end of the measurement of the plate-like measurement object and the set reference distance at the position of the distance detector at the end of the measurement. When the value is equal to or greater than the predetermined value,
The difference value is apportioned according to the measurement position in the length direction of the plate-like measured object, and the apportioned value in the length direction and the distance detector are measured from the start of the measurement of the plate-like measured object to the end of the measurement. Means for respectively determining a reference distance corresponding to each measurement position using the set reference distance of each moved position, and thereby correcting a plate thickness measurement value of the plate-like measured object. Automatic plate thickness measuring device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7109293A JP2834638B2 (en) | 1993-03-05 | 1993-03-05 | Automatic thickness gauge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7109293A JP2834638B2 (en) | 1993-03-05 | 1993-03-05 | Automatic thickness gauge |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06258032A JPH06258032A (en) | 1994-09-16 |
| JP2834638B2 true JP2834638B2 (en) | 1998-12-09 |
Family
ID=13450556
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7109293A Expired - Fee Related JP2834638B2 (en) | 1993-03-05 | 1993-03-05 | Automatic thickness gauge |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2834638B2 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005233928A (en) * | 2004-01-23 | 2005-09-02 | Horiba Ltd | Substrate inspecting apparatus |
| JP2007285867A (en) * | 2006-04-17 | 2007-11-01 | Yokogawa Electric Corp | Sheet edge detection device |
| JP2008058133A (en) * | 2006-08-31 | 2008-03-13 | Tohoku Univ | Measuring device for radius of curvature of long tool edge and measuring method of radius of curvature of long tool edge |
| JP5833831B2 (en) * | 2011-04-25 | 2015-12-16 | 株式会社東芝 | Thickness measuring device and thickness measuring method |
| JP6402272B1 (en) * | 2018-05-18 | 2018-10-10 | 大塚電子株式会社 | Thickness measuring device and thickness measuring method |
-
1993
- 1993-03-05 JP JP7109293A patent/JP2834638B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06258032A (en) | 1994-09-16 |
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