JP2835848B2 - Operation control method of pressure fluctuation adsorption separation device - Google Patents
Operation control method of pressure fluctuation adsorption separation deviceInfo
- Publication number
- JP2835848B2 JP2835848B2 JP1145685A JP14568589A JP2835848B2 JP 2835848 B2 JP2835848 B2 JP 2835848B2 JP 1145685 A JP1145685 A JP 1145685A JP 14568589 A JP14568589 A JP 14568589A JP 2835848 B2 JP2835848 B2 JP 2835848B2
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- Prior art keywords
- gas
- amount
- cleaning
- adsorption
- recovered
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- Separation Of Gases By Adsorption (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、圧力変動吸着分離装置の運転制御方法に関
し、詳しくは、混合ガス中の特定成分を吸着剤に吸着さ
せた吸着工程の後に、特定成分と同種の洗浄ガスを導入
して吸着塔内の特定成分以外のガスを排出する洗浄工程
を有する圧力変動吸着分離装置を効率よく安定して運転
する方法に関する。The present invention relates to a method for controlling the operation of a pressure fluctuation adsorption / separation apparatus, and more specifically, to an operation control method in which a specific component in a mixed gas is adsorbed to an adsorbent. The present invention relates to a method for efficiently and stably operating a pressure fluctuation adsorption / separation apparatus having a cleaning step of introducing a cleaning gas of the same type as a specific component and discharging a gas other than the specific component in an adsorption tower.
従来から、混合ガス中の特定成分を分離してガスの精
製を行う一手段として圧力変動吸着分離装置が知られて
いる。一般にこの圧力変動吸着分離装置は、混合ガス中
の特定成分を吸着する吸着剤を充填した吸着塔を用いて
行われるもので、複数の吸着塔を並列に接続し、例えば
そのそれぞれを吸着,洗浄,脱着の各工程に順次切替え
て混合ガス中の強吸着性の特定成分を吸着分離して回収
している。2. Description of the Related Art Conventionally, a pressure fluctuation adsorption separation apparatus has been known as a means for purifying a gas by separating a specific component in a mixed gas. Generally, this pressure fluctuation adsorption separation apparatus is performed using an adsorption tower filled with an adsorbent for adsorbing a specific component in a mixed gas. A plurality of adsorption towers are connected in parallel, and for example, each of them is adsorbed and washed. By switching to the respective steps of desorption and desorption sequentially, the strongly adsorbable specific components in the mixed gas are adsorbed and separated and recovered.
第3図は、このような吸着塔を3基並列に用いて混合
ガスの吸着分離を行う3塔式の強吸着性成分を回収する
圧力変動吸着分離装置の一例を示すものである。FIG. 3 shows an example of a three-column type pressure fluctuation adsorption / separation apparatus for recovering strongly adsorptive components by adsorbing and separating a mixed gas using three such adsorption towers in parallel.
この圧力変動吸着分離装置10で、例えば、空気を原料
の混合ガスとして高純度窒素を製品として得る場合に
は、吸着剤として合成ゼオライトを各吸着塔11a,11b,11
cに充填し、各吸着塔11a,11b,11cについて上記吸着,洗
浄,脱着の各工程を順次切替えて空気中の窒素を分離す
る。第1塔11aが吸着工程,第2塔11bが洗浄工程,第3
塔11cが脱着工程にある場合について説明すると、まず
吸着工程にある第1塔11aは、水分や炭酸ガスを除去す
る前処理工程(図示せず)から原料空気弁12を介して供
給される所定圧力の原料空気Aが、該第1塔11aに附随
する吸着塔入口側の導入弁13aから導入され、原料空気
中の強吸着成分である窒素を塔内の合成ゼオライトに吸
着させ、他の酸素等の弱吸着成分を出口側に濃縮する。In the pressure fluctuation adsorption separation apparatus 10, for example, when high-purity nitrogen is obtained as a product by using air as a raw material mixed gas, a synthetic zeolite is used as an adsorbent in each of the adsorption columns 11a, 11b, 11b.
Then, the above adsorption, washing and desorption steps are sequentially switched for each of the adsorption towers 11a, 11b and 11c to separate nitrogen in the air. The first column 11a is an adsorption step, the second column 11b is a washing step,
The case where the column 11c is in the desorption step will be described. First, the first column 11a in the adsorption step is a predetermined column supplied through the raw air valve 12 from a pretreatment step (not shown) for removing moisture and carbon dioxide. Raw material air A at a pressure is introduced from an inlet valve 13a on the inlet side of the adsorption tower associated with the first column 11a, and nitrogen, which is a strongly adsorbed component in the raw air, is adsorbed by the synthetic zeolite in the column and other oxygen Concentrate weakly adsorbed components such as at the outlet.
この時、洗浄工程にある第2塔11bにおいては、吸着
塔入口側の洗浄弁14bを開いて回収タンク15に回収され
ている高純度窒素を洗浄ガスFとしてブロワー16により
所定の圧力で原料空気と同方向に導入するとともに、吸
着塔出口側の導出弁17bから排気弁18を介して前記弱吸
着成分を排ガスWとして排出する。At this time, in the second column 11b in the cleaning step, the cleaning valve 14b on the inlet side of the adsorption tower is opened, and the high-purity nitrogen recovered in the recovery tank 15 is used as the cleaning gas F by the blower 16 at a predetermined pressure. And the weakly adsorbed component is discharged as exhaust gas W from an outlet valve 17b on the outlet side of the adsorption tower via an exhaust valve 18.
そして脱着工程にある第3塔11cは、吸着塔出口側の
回収弁19cを開き、真空ポンプ20により吸着塔11c内を吸
引排気して合成ゼオライトに吸着されている窒素を回収
ガスGとして回収タンク15に回収する。Then, the third column 11c in the desorption step opens the recovery valve 19c on the outlet side of the adsorption tower, sucks and exhausts the interior of the adsorption tower 11c by the vacuum pump 20, and uses the nitrogen adsorbed on the synthetic zeolite as the recovery gas G as a recovery tank G Collect at 15.
このようにして回収タンク15に回収された窒素は、そ
の一部が製品高純度窒素PNとして弁21から導出され、残
部が前記洗浄工程に用いる洗浄ガスFとして使用され
る。Part of the nitrogen recovered in the recovery tank 15 in this way is led out of the valve 21 as product high-purity nitrogen PN, and the remainder is used as the cleaning gas F used in the cleaning step.
以下、順次それぞれの弁を所定の順序で開閉すること
により、各吸着塔11a,11b,11cを上記吸着,洗浄,脱着
の各工程に切替えて製品高純度窒素を採取する。上記工
程中、上記説明で挙げた以外の各弁は閉じ状態である。
尚、上記説明で挙げた以外の各弁については、対応する
吸着塔に付した符号a,b,cをそれぞれの弁の符号に付し
て図示し、その詳細な説明を省略する。Hereinafter, by sequentially opening and closing the respective valves in a predetermined order, each of the adsorption towers 11a, 11b, and 11c is switched to the above-described adsorption, washing, and desorption steps, and the high-purity nitrogen product is collected. During the above process, each valve other than those described above is in a closed state.
In addition, about each valve other than the above-mentioned description, the code | symbol a, b, and c attached to the corresponding adsorption tower is attached | subjected to the code | symbol of each valve, and the detailed description is abbreviate | omitted.
上述のごとき構成の圧力変動吸着分離装置では、所定
純度の製品ガスを安定して、しかも効率よく得るために
は、弱吸着成分を排出洗浄するための洗浄用のガスとし
て必要十分な量の製品ガスを用いる必要があるが、洗浄
ガス量が少なければ所定純度の製品ガスが得られないた
めに、通常はある程度の余裕をもって洗浄ガスを導入し
ていた。また、逆に洗浄ガスを必要以上に多くすると製
品の純度は向上するものの製品ガスの採取量が低下し、
原単位が悪化してしまう。さらに外気温の変動による吸
着温度の変動に伴い、必要な洗浄ガス量が変化するが、
従来は、これを見越した余裕をとって洗浄ガスの量を設
定していた。従って、外気温によっては、かなりの量の
製品ガスが洗浄用のガスとして無駄に使われているのが
実情である。In the pressure fluctuation adsorption / separation apparatus configured as described above, in order to stably and efficiently obtain a product gas of a predetermined purity, a sufficient and sufficient amount of product gas is required as a cleaning gas for discharging and cleaning weakly adsorbed components. It is necessary to use a gas, but if the amount of the cleaning gas is small, a product gas having a predetermined purity cannot be obtained. Therefore, the cleaning gas is usually introduced with a certain margin. Conversely, if the cleaning gas is increased more than necessary, the purity of the product will improve, but the amount of product gas collected will decrease,
The basic unit deteriorates. Furthermore, with the fluctuation of the adsorption temperature due to the fluctuation of the outside temperature, the required amount of cleaning gas changes,
Conventionally, the amount of the cleaning gas has been set with allowance for this. Therefore, depending on the outside air temperature, a considerable amount of product gas is actually wasted as cleaning gas.
そのため、例えば特開昭59-73029号公報に記載の方法
では、洗浄工程中に吸着塔から導出されるガスの組成を
検出して洗浄工程の終了のタイミングを制御し、洗浄ガ
スの低減を図っていた。For this reason, for example, in the method described in JP-A-59-73029, the composition of the gas derived from the adsorption tower is detected during the cleaning step to control the timing of terminating the cleaning step, thereby reducing the cleaning gas. I was
ところが、この方法では、高価なガス分析器や弁制御
インターフェース等を必要とし、設備コストが増大する
不都合があり、特に小型の装置ではコストアップ率が高
くなり、大きな問題となる。また分析の時間的遅れを最
小限とするためには、ガス分析器の設置位置を可能な限
り吸着塔に近付ける必要があるが、3塔以上の吸着塔を
備えた装置の場合には、吸着塔の配置や分析器の配置に
十分な配慮が必要であり、実装置に適用することが困難
であった。However, this method requires an expensive gas analyzer, a valve control interface, and the like, and has a disadvantage of increasing equipment costs. In particular, a small apparatus has a high cost increase rate, which is a serious problem. In addition, in order to minimize the time delay of analysis, it is necessary to place the gas analyzer as close to the adsorption tower as possible. Sufficient consideration was needed for the arrangement of the tower and the arrangement of the analyzer, and it was difficult to apply it to actual equipment.
また、特開昭62-97622号公報では、特定成分の濃度を
検出する分析計を設けて、洗浄ガス及び洗浄廃ガス中の
特定成分の濃度を分析し、両者の差又は比が一定許容値
内になった時、洗浄工程を終了する方法を提案している
が、この場合も上記と同じ不都合がある上、二流体をサ
ンプリングする繁雑な装置が必要となる。In Japanese Patent Application Laid-Open No. 62-97622, an analyzer for detecting the concentration of a specific component is provided to analyze the concentration of the specific component in the cleaning gas and the cleaning waste gas. A method for terminating the cleaning step when it is within the range is proposed. However, this method also has the same disadvantages as described above, and requires a complicated apparatus for sampling two fluids.
そこで、本発明は、簡単な構成で洗浄ガスの使用量を
制御して洗浄用に用いる製品ガスの量を低減し、製品採
取効率を向上させるとともに、所定純度の製品を安定し
て得ることのできる圧力変動吸着分離装置の運転制御方
法を提供することを目的としている。Therefore, the present invention is to control the amount of cleaning gas used with a simple configuration to reduce the amount of product gas used for cleaning, improve product collection efficiency, and stably obtain a product of a predetermined purity. It is an object of the present invention to provide a method for controlling the operation of a pressure fluctuation adsorption / separation apparatus which can be performed.
上記した目的を達成するために、本発明の圧力変動吸
着分離装置の運転制御方法は、混合ガス中の特定成分を
吸着する吸着剤を充填した吸着塔に混合ガスを導入して
前記特定成分を吸着剤に吸着させる吸着工程と,該吸着
塔内に前記特定成分と同種のガスを洗浄用のガスとして
導入し、塔内の特定成分以外のガスを塔外に排出する洗
浄工程と,該吸着塔内を排気して吸着剤に吸着されてい
る特定成分を回収する脱着工程の各工程を順次切替えて
混合ガス中の特定成分の吸着分離を行うとともに、前記
脱着工程で得られた特定成分のガスを回収タンクに回収
してその一部を前記洗浄工程に使用するガスとして用
い、残部を製品ガスとして採取する圧力変動吸着分離装
置の運転を制御するにあたり、前記脱着工程にある吸着
塔から回収タンクへの回収ガス量を常時検出し、該回収
ガス量が多いと検知している期間は洗浄ガス量を増加し
た回収ガス量に応じて増加するよう制御し、回収ガス量
が少ないと検知している期間は洗浄ガス量を減少した回
収ガス量に応じて減少するよう制御し、回収ガス量の増
減に応じて前記洗浄工程に使用する洗浄ガスの量を増減
することを特徴とするものである。In order to achieve the above object, the operation control method of the pressure fluctuation adsorption / separation apparatus of the present invention includes introducing a mixed gas into an adsorption tower filled with an adsorbent that adsorbs a specific component in the mixed gas, thereby converting the specific component. An adsorption step of adsorbing to the adsorbent, a cleaning step of introducing a gas of the same type as the specific component into the adsorption tower as a gas for cleaning, and discharging a gas other than the specific component in the tower to the outside of the tower; Each step of the desorption step of exhausting the column and recovering the specific component adsorbed on the adsorbent is sequentially switched to perform the adsorption separation of the specific component in the mixed gas and the specific component obtained in the desorption step. In controlling the operation of the pressure fluctuation adsorption / separation device that collects the gas in the recovery tank and uses a part of the gas as the gas used in the cleaning process, and collects the remaining product gas, the gas is recovered from the adsorption tower in the desorption process. To the tank The amount of collected gas is constantly detected, and during the period in which the amount of collected gas is detected to be large, the amount of cleaning gas is controlled to increase in accordance with the amount of collected gas, and the period in which the amount of collected gas is detected to be small Is characterized in that the amount of the cleaning gas is controlled to decrease in accordance with the reduced amount of the recovered gas, and the amount of the cleaning gas used in the cleaning step is increased or decreased in accordance with the increase or decrease in the amount of the recovered gas.
上記のごとく、脱着工程にある吸着塔から回収タンク
に回収されるガスの量を常時検出することにより、外気
温の変化による原料の混合ガスの導入量や回収ガスの量
の変化を常に読取ることができ、これをもとにして回収
ガス量の増減に応じて洗浄ガスの量を増減するよう制御
して必要十分な洗浄ガスを供給することができる。As described above, by constantly detecting the amount of gas recovered from the adsorption tower in the desorption step to the recovery tank, it is possible to constantly read the change in the amount of mixed gas introduced into the raw material and the change in the amount of recovered gas due to changes in the outside air temperature. Based on this, it is possible to supply the necessary and sufficient cleaning gas by controlling the amount of the cleaning gas to increase or decrease according to the increase or decrease of the amount of the recovered gas.
以下、前記第3図に示した高純度窒素を採取する圧力
変動吸着分離装置に本発明を適用した一実施例に基づい
て、本発明をさらに詳細に説明する。尚、以下の説明に
おいて、前記第3図のものと同一要素のものには同一符
号を付して詳細な説明を省略する。Hereinafter, the present invention will be described in more detail based on one embodiment in which the present invention is applied to the pressure fluctuation adsorption separation apparatus for collecting high-purity nitrogen shown in FIG. In the following description, the same elements as those in FIG. 3 are denoted by the same reference numerals, and detailed description thereof will be omitted.
本発明は、第1図に示すように、回収タンク15に、回
収ガスGの量を検出するための検出器30を設けるととも
に、洗浄ガスFを圧送するブロワー16の部分に、還流路
31と流量調節弁32からなる流量制御機構33を設け、前記
検出器30の検出値により流量制御機構33を作動させて洗
浄ガスFの流量を制御するものである。According to the present invention, as shown in FIG. 1, a detector 30 for detecting the amount of the recovered gas G is provided in the recovery tank 15 and a return path is provided to the blower 16 for pumping the cleaning gas F.
A flow control mechanism 33 including a flow control valve 31 and a flow control valve 32 is provided, and the flow control mechanism 33 is operated based on the detection value of the detector 30 to control the flow rate of the cleaning gas F.
前述のごとく、脱着工程にある第3の吸着塔11c内の
吸着剤に吸着されている窒素ガスは、回収弁19cから真
空ポンプ20を介して回収タンク15に回収されるが、この
回収ガスGの量は、外気温の変化による吸着塔内の温度
の変化に伴い変動する。前記操作により高純度窒素を採
取する場合には、外気温が高くなるに従い原料ガスの供
給量や脱着ガス(回収ガス)の量が減少し、逆に外気温
が低くなるとこれらの量が増加する。As described above, the nitrogen gas adsorbed by the adsorbent in the third adsorption tower 11c in the desorption step is recovered from the recovery valve 19c to the recovery tank 15 via the vacuum pump 20, and this recovered gas G Varies with the change in the temperature inside the adsorption tower due to the change in the outside air temperature. In the case where high-purity nitrogen is collected by the above operation, the supply amount of the raw material gas and the amount of the desorbed gas (recovered gas) decrease as the outside temperature increases, and these amounts increase when the outside temperature decreases. .
第2図は、上記外気温の変化に伴う回収ガスGの量の
変化を一定容積の回収タンク15内の圧力変化で示したも
のである。外気温がある温度t1の場合の回収タンク15
内の圧力は、脱着工程の開始とともに上昇し、あるピー
ク圧力P1となった後に次第に減少して元の圧力に戻
る。そして外気温が下がり、前記温度t1より低い温度
t2になると回収ガス量が増加するために回収タンク15
内の圧力も、前記ピーク圧力P1よりも高いピーク圧力
P2まで上昇する。FIG. 2 shows a change in the amount of the collected gas G due to the change in the outside air temperature by a change in the pressure in the collection tank 15 having a constant volume. Recovery tank 15 when the temperature t 1 which is the outside air temperature
The pressure of the inner rises with the start of the desorption step, returns to the original pressure gradually decreases after reaching a certain peak pressure P 1. The lower the outside temperature, the recovery tank 15 to the the recovery gas amount becomes lower temperatures t 2 than the temperature t 1 is increased
The pressure of the inner well, rises to high peak pressure P 2 than the peak pressure P 1.
従って、回収タンク15として容積一定のものを用いた
場合には、前記検出器30として圧力センサーを該回収タ
ンク15に設けることにより、回収ガス量の変化を検出す
ることができる。また、回収タンク15としてガスホルダ
ー,ガスバルーン等の内容積可変型容器を用いた場合に
は、検出器30として位置センサーを設けて該容器の槽高
の変化等を検出することにより、回収ガス量の変化を検
出することができる。Therefore, when a collection tank 15 having a constant volume is used, a change in the amount of collected gas can be detected by providing a pressure sensor as the detector 30 in the collection tank 15. When a variable-capacity container such as a gas holder or a gas balloon is used as the collection tank 15, a position sensor is provided as the detector 30 to detect a change in the tank height of the container, and the like. Changes in volume can be detected.
そして、上記検出器30が回収ガスGの量が少ないこと
を示した場合、例えば検出値が上記ピーク圧力P1の時
には、前記流量調節弁32の開度を大きくして洗浄工程に
ある吸着塔11bに供給する洗浄ガスFの量を減少させる
ように制御し、検出値が上記ピーク圧力P2の時には流
量調節弁32の開度を小さくして洗浄ガス量を多くするよ
うに制御する。Then, when the detector 30 is indicated that a small amount of stripping gas G, for example, when the detection value of the peak pressure P 1 is the adsorption tower in the washing step by increasing the opening of the flow regulating valve 32 controlled so as to reduce the amount of cleaning gas F supplied to 11b, the detection value is controlled so as to increase the cleaning gas quantity by reducing the opening degree of the flow control valve 32 at the time of the peak pressure P 2.
これにより、外気温が変動して所定の製品純度を得る
のに必要な洗浄ガスFの量が変化しても、適切な量の洗
浄ガスFを供給することができ、製品純度の低下や、製
品ガス量の低下を防止することができる。Thereby, even if the outside air temperature fluctuates and the amount of the cleaning gas F necessary to obtain a predetermined product purity changes, an appropriate amount of the cleaning gas F can be supplied, and the product purity is reduced, It is possible to prevent a reduction in the product gas amount.
ここで、前記3塔式の圧力変動吸着分離装置10で高純
度窒素を採取する実験を行った結果を説明する。Here, the results of an experiment in which high-purity nitrogen is sampled by the three-column pressure fluctuation adsorption / separation apparatus 10 will be described.
各吸着塔にはゼオライト5A(東ソー(株)製)を充填
し、前記吸着,洗浄,脱着の各工程の切換え時間は3分
とした。そして純度99.995%以上の窒素を得られるよう
に、常法に従い洗浄ガスFの量を調整した。Each adsorption tower was filled with zeolite 5A (manufactured by Tosoh Corporation), and the switching time of each of the adsorption, washing and desorption steps was 3 minutes. Then, the amount of the cleaning gas F was adjusted according to a conventional method so as to obtain nitrogen having a purity of 99.995% or more.
その結果、外気温が30℃の時の1工程あたりの回収ガ
スGの量は4Nm3であり、この内3Nm3を洗浄ガスFとして
使用し、1Nm3を製品高純度窒素PNとして採取することが
できた。そして外気温が低下して23℃になると、回収ガ
スGの量が4.5Nm3に増加するとともに、製品の純度が9
9.99%に低下した。It is found, the amount of stripping gas G per step when the ambient temperature is 30 ° C. is 4 Nm 3, which uses this inner 3 Nm 3 as a cleaning gas F, collecting 1 Nm 3 as a product high purity nitrogen PN Was completed. Then, when the outside temperature decreases to 23 ° C., the amount of the recovered gas G increases to 4.5 Nm 3 and the purity of the product becomes 9 Nm 3.
It dropped to 9.99%.
この時、純度99.995%の窒素を得るために必要な洗浄
ガスFの量を測定した結果、1工程あたり3.4Nm3であっ
た。At this time, the amount of the cleaning gas F required to obtain nitrogen having a purity of 99.995% was measured. As a result, it was 3.4 Nm 3 per process.
従って、外気温が30℃から23℃に変動する場合に、従
来の装置で純度99.995%以上の製品高純度窒素PNを安定
して得るためには、夜間等の外気温低下時の純度低下を
防止するために、洗浄ガスの量を常時3.4Nm3に設定して
おく必要があった。その結果、日中等の外気温上昇時に
回収ガス量が4Nm3/hに低下し、洗浄ガス必要量が3Nm3に
減少した場合でも、3.4Nm3が洗浄用のガスとして使用さ
れるために、製品の純度は向上するが、0.6Nm3しか製品
として取出すことができなかった。Therefore, when the outside temperature fluctuates from 30 ° C. to 23 ° C., in order to stably obtain a high-purity nitrogen PN having a purity of 99.995% or more with the conventional apparatus, it is necessary to reduce the purity when the outside temperature decreases at night or the like. To prevent this, it was necessary to always set the amount of cleaning gas to 3.4 Nm 3 . As a result, the day decreased to recover gas amount 4 Nm 3 / h to ambient temperature ascent of secondary, even when the cleaning gas required amount is reduced to 3 Nm 3, to 3.4 nm 3 is used as a gas for cleaning, Although the purity of the product was improved, only 0.6 Nm 3 could be taken out as a product.
この時、回収タンク15として内容積可変型のガスバル
ーン(3m3)を使用して外気温による回収ガス量の変動
に伴うバルーンの槽高の変化を観察したところ、外気温
30℃の時の回収ガス量におけるバルーンの最大槽高は12
00mmであり、外気温23℃の時の回収ガス量におけるバル
ーンの最大槽高は1400mmであった。At this time, using a variable-volume gas balloon (3 m 3 ) as the collection tank 15 and observing the change in the tank height of the balloon due to the change in the amount of collected gas due to the outside air temperature,
The maximum tank height of the balloon at the recovered gas volume at 30 ° C is 12
It was 00 mm, and the maximum tank height of the balloon at the outside gas temperature of 23 ° C. was 1400 mm at the recovered gas volume.
そこで、バルーンの槽高を検出するための検出器30と
して光電式位置センサーを設置するとともに、この光電
式位置センサーの検出値をもとにして前記のごとく形成
した流量制御機構33の流量調節弁32の開度を調節するよ
うに構成した。Therefore, a photoelectric position sensor is installed as the detector 30 for detecting the tank height of the balloon, and the flow control valve of the flow control mechanism 33 formed as described above based on the detection value of the photoelectric position sensor. It was configured to adjust the opening of 32.
即ち、槽高1200mmの位置に前記光電式位置センサーを
設置し、槽高が1200mmを超えた時には、上記流量調節弁
32を絞って洗浄ガスFの量を3.4Nm3とし、槽高が1200mm
以下の時には、流量調節弁32を開いて洗浄ガスFの量を
3.0Nm3とした。That is, the photoelectric position sensor is installed at a position with a tank height of 1200 mm, and when the tank height exceeds 1200 mm, the flow rate control valve is used.
Reduce the amount of cleaning gas F to 3.4 Nm 3 by squeezing 32, and the tank height is 1200 mm
In the following cases, the flow control valve 32 is opened to adjust the amount of the cleaning gas F.
3.0 Nm 3 .
その結果、外気温が高く、回収ガスGの量が少ない時
でも1工程あたり1Nm3の製品高純度窒素PNを得ることが
でき、外気温が下がった時にも純度99.995%の高純度窒
素PNを1Nm3得ることができた。即ち、外気温が変動して
回収ガスの量が変化しても所定純度の製品を安定して得
ることが可能となった。As a result, even when the outside air temperature is high and the amount of the recovered gas G is small, it is possible to obtain 1 Nm 3 of product high-purity nitrogen PN per process, and even when the outside air temperature falls, 99.995% high-purity nitrogen PN can be obtained. 1Nm 3 could be obtained. That is, even when the outside air temperature fluctuates and the amount of the collected gas changes, it is possible to stably obtain a product having a predetermined purity.
尚、本発明は、上記高純度窒素の製造以外にも適用す
ることが可能であり、原料となる混合ガスの組成や分離
する成分の種類等により適宜最適な吸着分離装置の構成
及び運転操作を選択することができる。また、回収ガス
量の検出手段や洗浄ガスの流量制御手段も、装置構成や
ガスの量等により適宜なものを用いることができる。さ
らに、上記実験では、洗浄ガスの変化量を2段階とした
が、多段あるいは連続的に変化させることも可能であ
る。The present invention can be applied to other than the production of high-purity nitrogen, and the configuration and operation of the optimal adsorption / separation apparatus are appropriately adjusted according to the composition of the mixed gas as the raw material, the type of the component to be separated, and the like. You can choose. Further, as the means for detecting the amount of the recovered gas and the means for controlling the flow rate of the cleaning gas, appropriate means can be used depending on the device configuration, the amount of gas, and the like. Further, in the above experiment, the amount of change of the cleaning gas is set to two stages, but it is also possible to change the amount in multiple stages or continuously.
以上説明したように、本発明の圧力変動吸着分離装置
の運転制御方法は、脱着工程にある吸着塔から回収タン
クへの回収ガス量を常時検出し、該回収ガス量が多いと
検知している期間は洗浄ガス量を増加した回収ガス量に
応じて増加するよう制御し、回収ガス量が少ないと検知
している期間は洗浄ガス量を減少した回収ガス量に応じ
て減少するよう制御し、回収ガス量の増減に応じて前記
洗浄工程に使用する洗浄ガスの量を増減するから、1回
のサイクル中でのトータルの洗浄ガス量を見れば、常に
最適な洗浄ガス量が得られ、外気温の変化による原料の
混合ガスの導入量や回収ガスの量の変化に基づいて洗浄
ガスの量を的確に制御することができる。したがって、
所定純度の製品ガスを安定して得られるとともに、洗浄
用に用いるガスの量を低減して製品の収量を向上させる
ことができる。As described above, the operation control method of the pressure fluctuation adsorption / separation apparatus of the present invention constantly detects the amount of gas recovered from the adsorption tower in the desorption step to the recovery tank, and detects that the amount of recovered gas is large. During the period, control the cleaning gas amount to increase according to the increased recovered gas amount, and control the cleaning gas amount to decrease according to the reduced recovered gas amount during the period when it is detected that the recovered gas amount is small, Since the amount of the cleaning gas used in the cleaning step is increased or decreased in accordance with the increase or decrease in the amount of the collected gas, the optimum amount of the cleaning gas is always obtained by looking at the total amount of the cleaning gas in one cycle. The amount of the cleaning gas can be accurately controlled based on the amount of the mixed gas introduced into the raw material and the amount of the collected gas due to the change in the temperature. Therefore,
A product gas having a predetermined purity can be stably obtained, and the amount of gas used for cleaning can be reduced to improve the product yield.
第1図は本発明を適用した圧力変動吸着分離装置の一実
施例を示す要部の系統図、第2図は外気温変動による回
収ガス量の変化を説明する図、第3図は圧力変動吸着分
離装置の系統図である。 10……圧力変動吸着分離装置、11a,11b,11c……吸着
塔、15……回収タンク、30……検出器、32……流量調節
弁、33……流量制御機構、F……洗浄ガス、G……回収
ガスFIG. 1 is a system diagram of a main part showing an embodiment of a pressure fluctuation adsorption / separation apparatus to which the present invention is applied, FIG. 2 is a diagram for explaining a change in the amount of recovered gas due to a change in outside air temperature, and FIG. It is a system diagram of an adsorption separation device. 10: Pressure fluctuation adsorption / separation device, 11a, 11b, 11c: Adsorption tower, 15: Recovery tank, 30: Detector, 32: Flow control valve, 33: Flow control mechanism, F: Cleaning gas , G ... Collected gas
フロントページの続き (58)調査した分野(Int.Cl.6,DB名) B01D 53/02 - 53/12Continuation of front page (58) Field surveyed (Int. Cl. 6 , DB name) B01D 53/02-53/12
Claims (2)
充填した吸着塔に混合ガスを導入して前記特定成分を吸
着剤に吸着させる吸着工程と、該吸着塔内に前記特定成
分と同種のガスを洗浄ガスとして導入し、塔内の特定成
分以外のガスを塔外に排出する洗浄工程と、該吸着塔内
を排気して吸着剤に吸着されている特定成分を回収する
脱着工程の各工程を順次切替えて混合ガス中の特定成分
の吸着分離を行うとともに、前記脱着工程で得られた特
定成分のガスを回収タンクに回収してその一部を前記洗
浄工程に使用するガスとして用い、残部を製品ガスとし
て採取する圧力変動吸着分離装置の運転を制御するにあ
たり、前記脱着工程にある吸着塔から回収タンクへの回
収ガス量を常時検出し、該回収ガス量が多いと検知して
いる期間は洗浄ガス量を増加した回収ガス量に応じて増
加するよう制御し、回収ガス量が少ないと検知している
期間は洗浄ガス量を減少した回収ガス量に応じて減少す
るよう制御し、回収ガス量の増減に応じて前記洗浄工程
に使用する洗浄ガスの量を増減することを特徴とする圧
力変動吸着分離装置の運転制御方法。1. An adsorption step in which a mixed gas is introduced into an adsorption tower filled with an adsorbent for adsorbing a specific component in the mixed gas to adsorb the specific component on the adsorbent; A washing step of introducing a gas of the same type as a washing gas and discharging gases other than the specific components in the tower to the outside of the tower, and a desorption step of exhausting the inside of the adsorption tower and collecting the specific components adsorbed by the adsorbent While sequentially performing the adsorption and separation of the specific component in the mixed gas by sequentially switching the respective steps, the gas of the specific component obtained in the desorption step is collected in a recovery tank, and a part of the gas is used as the gas used in the cleaning step. In controlling the operation of the pressure fluctuation adsorption / separation apparatus that uses the remaining part as product gas, the amount of gas recovered from the adsorption tower in the desorption step to the recovery tank is constantly detected, and the amount of the recovered gas is detected as being large. Cleaning period The amount of recovered gas is controlled to increase according to the increased amount of recovered gas, and during the period when the amount of recovered gas is detected to be small, the amount of cleaning gas is controlled to decrease according to the reduced amount of recovered gas. An operation control method for a pressure fluctuation adsorption / separation apparatus, wherein the amount of a cleaning gas used in the cleaning step is increased or decreased according to the increase or decrease.
出器を設けるとともに、洗浄用ガス圧送用のブロワーの
部分に還流路と流量調節弁からなる流量制御機構を設
け、前記検出器の検出値により該流量制御機構を作動さ
せて洗浄ガスの流量を制御することを特徴とする請求項
1記載の圧力変動吸着分離装置の運転制御方法。2. A recovery tank is provided with a detector for detecting the amount of recovered gas, and a flow control mechanism comprising a recirculation path and a flow control valve is provided at a blower for cleaning gas pressure feeding. 2. The method according to claim 1, wherein the flow control mechanism is operated based on the detected value to control the flow rate of the cleaning gas.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1145685A JP2835848B2 (en) | 1989-06-08 | 1989-06-08 | Operation control method of pressure fluctuation adsorption separation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1145685A JP2835848B2 (en) | 1989-06-08 | 1989-06-08 | Operation control method of pressure fluctuation adsorption separation device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0312212A JPH0312212A (en) | 1991-01-21 |
| JP2835848B2 true JP2835848B2 (en) | 1998-12-14 |
Family
ID=15390723
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1145685A Expired - Fee Related JP2835848B2 (en) | 1989-06-08 | 1989-06-08 | Operation control method of pressure fluctuation adsorption separation device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2835848B2 (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20040021138A (en) * | 2002-09-02 | 2004-03-10 | 삼성전자주식회사 | Oxygen generator |
| JP5518503B2 (en) * | 2010-01-25 | 2014-06-11 | 大陽日酸株式会社 | High pressure and high purity nitrogen gas supply device and supply method |
| JP6091682B1 (en) * | 2016-03-31 | 2017-03-08 | 大阪瓦斯株式会社 | Pressure fluctuation adsorption gas production equipment |
| JP6091683B1 (en) * | 2016-03-31 | 2017-03-08 | 大阪瓦斯株式会社 | Pressure fluctuation adsorption gas production equipment |
| JP6091681B1 (en) | 2016-03-31 | 2017-03-08 | 大阪瓦斯株式会社 | Pressure fluctuation adsorption gas production equipment |
| KR102133248B1 (en) * | 2020-01-13 | 2020-07-13 | 주식회사 한울엔지니어링 | System and Method for Detecting Malfunction of Pressure Swing Adsorption Apparatus |
-
1989
- 1989-06-08 JP JP1145685A patent/JP2835848B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0312212A (en) | 1991-01-21 |
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