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JP2836097B2 - Defect detection device and detection method - Google Patents
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JP2836097B2 - Defect detection device and detection method - Google Patents

Defect detection device and detection method

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Publication number
JP2836097B2
JP2836097B2 JP1115830A JP11583089A JP2836097B2 JP 2836097 B2 JP2836097 B2 JP 2836097B2 JP 1115830 A JP1115830 A JP 1115830A JP 11583089 A JP11583089 A JP 11583089A JP 2836097 B2 JP2836097 B2 JP 2836097B2
Authority
JP
Japan
Prior art keywords
corrosion
conductive
material layer
defect
conductive material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1115830A
Other languages
Japanese (ja)
Other versions
JPH02293657A (en
Inventor
武久 中村
峯幸 有川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Chemical Corp
Original Assignee
Mitsubishi Chemical Corp
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Filing date
Publication date
Application filed by Mitsubishi Chemical Corp filed Critical Mitsubishi Chemical Corp
Priority to JP1115830A priority Critical patent/JP2836097B2/en
Publication of JPH02293657A publication Critical patent/JPH02293657A/en
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Publication of JP2836097B2 publication Critical patent/JP2836097B2/en
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Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、耐食性材料をライニングした金属製機器の
欠陥検出装置及び検出方法に関する。詳しくはライニン
グ材を構成する非導電性耐食性材層が劣化して腐食性物
質が金属製機器に達する前に、迅速且つ正確に劣化状態
を検知できる欠陥検出装置及び方法に関するものであ
る。
Description: TECHNICAL FIELD The present invention relates to a defect detection device and a detection method for a metal device lined with a corrosion-resistant material. More particularly, the present invention relates to a defect detection apparatus and method capable of quickly and accurately detecting a state of deterioration of a non-conductive corrosion-resistant material layer constituting a lining material before a corrosive substance reaches a metal device by deterioration.

〔従来の技術〕[Conventional technology]

従来、金属材料の機器、例えば、塔、槽、容器等の耐
食性を増すために耐食性材料による被膜が用いられてき
たが、その膜のチッピングやクラック等の欠陥の有無や
損傷の度合いを判断するには開放検査や破壊検査が不可
欠であった。
Conventionally, a coating made of a corrosion-resistant material has been used to increase the corrosion resistance of a metal material device, for example, a tower, a tank, a container, and the like.However, the presence or absence of a defect such as chipping or cracking of the film and the degree of damage are determined. Open inspection and destructive inspection were indispensable.

ところが最近になり、ガラスライニングについてはそ
の欠陥を運転中に検出する装置が発明市販化されている
(例えば、神鋼ファウドラー(株)社製;商品名「メゾ
ンデーP」)。又、当出願人は、非導電性材料被膜の欠
陥・損傷を母材たる金属材料に欠陥・損傷が達する前に
それを検知する装置・システムを発明し、既に出願済み
である(特願昭63−237940、同63−289621)。これらの
装置は運転中もしくは停止中に機器を非開放・非破壊状
態にて欠陥を検出できるところに特徴があった。
Recently, however, a device for detecting a defect of the glass lining during operation has been commercialized (for example, manufactured by Shinko Faudler Co., Ltd .; trade name "Maison Day P"). In addition, the present applicant has invented a device / system for detecting defects / damages of a non-conductive material film before defects / damages reach a base metal material, and has already filed an application (Japanese Patent Application No. 63-237940, 63-289621). These devices were characterized in that a defect could be detected in an open or non-destructive state of the device during operation or stop.

〔発明が解決しようとする課題〕[Problems to be solved by the invention]

しかしながら上記装置においても実際に長期連続で使
用する際には以下のような問題点があった。第1に検知
できる欠陥として幅が1mm以上、長さ1cm以上のクラック
等の欠陥は検出が容易であるが、微小なピンホール、特
に1mmφ以下の径を持つピンホール等の微小面積を有す
る欠陥は検出し難い、もしくは検出不可能であること。
第2に欠陥を検出しながら長期にわたり測定を継続して
おけば、その欠陥の有無が再び検出できない状態になる
こと、特にこれは欠陥が小さいほど可能性が大きいとい
う問題点がある。
However, the above-mentioned apparatus has the following problems when actually used continuously for a long period of time. First, as defects that can be detected, defects such as cracks with a width of 1 mm or more and a length of 1 cm or more are easy to detect, but defects with minute areas such as minute pinholes, especially pinholes with a diameter of 1 mmφ or less. Is difficult to detect or cannot be detected.
Secondly, if the measurement is continued for a long time while detecting the defect, the presence or absence of the defect cannot be detected again. In particular, there is a problem that the smaller the defect, the greater the possibility.

尚、上記の装置は導電性の内容液体中に電極を入れ、
母材の金属又は被膜中の導電部間に電圧を印加し、欠陥
が発生すればその欠陥中に導電性液体が入り、上記の両
者間に電流が流れることを利用しているが、この印加電
圧としては直流電圧が用いられている。又、電源の使用
の容易さより一般交流周波数を用いることも考えられ
る。
In addition, the above device puts the electrode in the conductive content liquid,
A voltage is applied between the conductive portions of the base metal or the coating, and if a defect occurs, a conductive liquid enters the defect and a current flows between the two. DC voltage is used as the voltage. It is also conceivable to use a general AC frequency for ease of use of the power supply.

〔課題を解決するための手段〕[Means for solving the problem]

上記問題点を解決するために本発明者らは鋭意検討し
た結果、その原因を把握し、本発明を完成するに至っ
た。
The present inventors have conducted intensive studies in order to solve the above-mentioned problems, and as a result, ascertained the cause and completed the present invention.

即ち、欠陥の検出のため導電性の内容液中に電流を流
すために内を挿入した電極表面及び欠陥の導電性材料部
表面、例えば金属母材表面に電気分解によるガスが発生
し、特に欠陥内のガスは排出しにくく、測定を継続する
とガスが次第に欠陥に充満し、遂には液通がなくなり、
電気的に絶縁されて検出不能に陥いることがわかった。
この電気分解によるガス発生は、交流電圧印加でも生じ
るが特に直流電圧を印加した場合、顕著となる。又、ガ
ス発生により測定不能に至る迄の時間は、印加電圧が高
い程速いとともに欠陥が小さい程速いことがわかった。
That is, gas is generated by electrolysis on the surface of the electrode and the surface of the conductive material portion of the defect, for example, the surface of the metal base material, into which a current flows in the conductive content liquid for the detection of the defect. The gas inside is difficult to discharge, and if the measurement is continued, the gas gradually fills the defect, and finally the liquid stops flowing,
It turned out that it was electrically insulated and could not be detected.
The gas generation due to the electrolysis occurs even when an AC voltage is applied, but becomes remarkable particularly when a DC voltage is applied. In addition, it was found that the time until the measurement became impossible due to generation of gas was faster as the applied voltage was higher and shorter as the defect was smaller.

又、上記発生ガス及び欠陥内に機器使用開始以前より
内包していた空気等のガスの存在により、通電を可能と
する導電性の内容液の欠陥内での断面積が狭められ、電
流が流れにくくなっていること、又、このガス等の影響
により、この欠陥は等価電気回路は抵抗成分と並列に静
電容量成分が存在することがわかった。しかも上記の効
果は、欠陥が小さい程顕著となることもわかった。
In addition, due to the presence of gas such as air contained before the start of use of the device in the generated gas and the defect, the cross-sectional area of the conductive content liquid that enables current to flow is reduced, and current flows. It has been found that the equivalent electric circuit has a capacitance component in parallel with a resistance component in the equivalent electric circuit due to the influence of the gas and the like. In addition, it was also found that the above-mentioned effect becomes more remarkable as the defect becomes smaller.

以上のような状況に基づき本発明の検出装置について
図面を参照しながら説明する。第1図はその全体図であ
る。対象とする機器は金属等の導電性材料からなる缶体
1に対し、その接液する内面に非導電性材料からなる耐
食性層2を内張りしたものである。耐食性層2は非導電
性材料と導電性材料からなる3層以上の複層構造でもよ
い。これに対して電気的に機器と絶縁された状態で、か
つ後述の導電性内容液に接する状態で金属電極3を挿入
する。電極3は内容液に浸漬していれば耐食性非導電性
層表面にとりつけてもよい。金属電極3の材質は導電性
と耐食性を有する材料で白金、チタン等の金属が一般的
であるが、この条件を満たす材料であればよい。サイズ
は、機械的強度、機器のサイズによって決定されるが、
1mmφ以上好ましくは5mmφ以上の径を有する棒状電極が
好適に使用される。
The detection device of the present invention will be described based on the above situation with reference to the drawings. FIG. 1 is an overall view thereof. The target device has a can body 1 made of a conductive material such as a metal and a corrosion-resistant layer 2 made of a non-conductive material lined on the inner surface in contact with the can body. The corrosion-resistant layer 2 may have a multilayer structure of three or more layers made of a non-conductive material and a conductive material. On the other hand, the metal electrode 3 is inserted in a state of being electrically insulated from the device and in contact with a conductive content liquid described later. The electrode 3 may be attached to the surface of the corrosion-resistant non-conductive layer as long as it is immersed in the content liquid. The material of the metal electrode 3 is a material having conductivity and corrosion resistance, and is generally a metal such as platinum or titanium. The size is determined by the mechanical strength and the size of the equipment,
A rod-shaped electrode having a diameter of 1 mmφ or more, preferably 5 mmφ or more is suitably used.

この機器は運転中導電性を有する液体4として、硫
酸、塩酸等の酸、苛性ソーダ等のアルカリその他の導電
性液体もしくはその水溶液が入っている。内容液が導電
性を有しない液体の場合、運転中の検出は不可だが定期
的に停止して導電性の液体を入れることにより検出がで
きる。又、通常の運転に使用している内容液が導電性を
有する場合でも検出の確度を向上するために液抵抗の低
い液を定期的な停止中に投入して検出することができ
る。その際の液として液抵抗が低い30%硫酸水溶液が推
奨される。又、予想される欠陥が小さい場合は欠陥への
液の侵入が容易なアルコール系の液体が推奨される。
During operation, the apparatus contains, as the liquid 4 having conductivity, acids such as sulfuric acid and hydrochloric acid, alkalis such as caustic soda and other conductive liquids or aqueous solutions thereof. In the case where the content liquid is a liquid having no conductivity, detection during operation is impossible, but detection can be performed by periodically stopping and introducing a conductive liquid. Further, even when the content liquid used in the normal operation has conductivity, a liquid having a low liquid resistance can be supplied during a periodic stop to detect the liquid, in order to improve the accuracy of detection. In this case, a 30% sulfuric acid aqueous solution having a low liquid resistance is recommended. If the expected defect is small, an alcohol-based liquid that allows the liquid to easily penetrate the defect is recommended.

次に導電性液体4に挿入した電極3と、缶体1もしく
は耐食性層中の導電性層との間に導線11、12を通して電
圧を印加する。被膜2の非導電性耐食層にひび、われ等
の欠陥5が生じると、電極3→導電性液体4→欠陥5中
の導電性液体→缶体1もしくは耐食性層中の導電性層の
順で電流経路ができ、電流が流れる。これを電流検出用
抵抗7にて電圧に変換する等の電流検出回路により欠陥
検出するものである。
Next, a voltage is applied between the electrode 3 inserted in the conductive liquid 4 and the conductive layer 11 or 12 between the can 1 or the conductive layer in the corrosion resistant layer. When a defect 5 such as a crack or a crack occurs in the non-conductive corrosion-resistant layer of the coating 2, the electrode 3 → the conductive liquid 4 → the conductive liquid in the defect 5 → the conductive layer in the can 1 or the corrosion-resistant layer. A current path is created and current flows. The defect is detected by a current detection circuit such as converting the voltage into a voltage by the current detection resistor 7.

ここで印加する電圧は直流では前述のように電気分解
によるガス発生の影響が著しい。又、交流でも印加する
のは10kHz〜1000kHz、好ましくは10kHz〜100kHzを用い
る。この理由は1KHz以下の交流では上記の電気分解の進
行が著しくガス発生が激しく抵抗値の上昇が速いことが
実験等で確められている。又、欠陥内に存在するガス等
の静電容量分により、周波数が高い程、流れる電流は大
きくなり耐雑音性の良好な測定が可能となることが確認
されている。
As described above, the voltage applied here is significantly affected by gas generation due to electrolysis as described above. Also, for applying an alternating current, 10 kHz to 1000 kHz, preferably 10 kHz to 100 kHz is used. The reason is that it has been confirmed by experiments and the like that in the case of an alternating current of 1 KHz or less, the above-mentioned electrolysis progresses remarkably, gas is generated sharply, and the resistance value rises quickly. Also, it has been confirmed that the higher the frequency, the larger the flowing current and the better the noise resistance can be measured due to the capacitance of the gas or the like existing in the defect.

一方、1000KHz以上の周波数を用いると、欠陥でない
非導電性材料の誘電電流、表面波による漏れ電流が顕著
となり、非欠陥でも流れる電流が大きくなり、欠陥発生
で流れる電流に比して無視できなくなるので雑音性が大
きい。
On the other hand, when a frequency of 1000 KHz or more is used, the dielectric current of a non-conductive material that is not a defect, the leakage current due to a surface wave becomes remarkable, the current that flows even in a non-defect becomes large, and cannot be ignored compared to the current that flows when a defect occurs. Therefore, the noise is large.

欠陥として、10-1mmφ径のピンホール以上のものを考
えれば、その発生によって流れる電流から測定できる欠
陥の交流インピーダンスは500KΩ以下と実験より得られ
ているので、これより耐雑音性を考慮し、印加する周波
数の上限は1000KHz、好ましくは100KHzである。
Considering defects with a diameter of 10 -1 mmφ or more as a defect, the AC impedance of the defect, which can be measured from the current flowing due to its occurrence, has been obtained from experiments to be 500 KΩ or less. The upper limit of the frequency to be applied is 1000 KHz, preferably 100 KHz.

次に印加する電圧であるが、内容液4の電気分解の形
態によって変わるが、0.1V以下等の電気分解開始電圧以
下であれば電気分解が生じず前述の問題も解決される
が、低印加電圧では流れる電流が小さいため、耐雑音性
がかなり低下する。この点及び安全上の点より印加する
電圧は10V〜0.1V、好ましくは5〜1Vが望ましい。
The voltage to be applied next varies depending on the type of electrolysis of the content liquid 4. If the voltage is equal to or lower than the electrolysis start voltage of 0.1 V or less, the electrolysis does not occur and the above-mentioned problem is solved. Since the current flowing with the voltage is small, the noise resistance is considerably reduced. From this point and the point of safety, the voltage to be applied is desirably 10 V to 0.1 V, preferably 5 to 1 V.

印加の方法として、電気分解の影響を小さくするため
に連続的に印加せず定期に又は不定期に間欠測定とする
と好ましい。防食の速度により1日1回〜1週1回の頻
度で行ない、測定系の安定も考え、1回の印加時間は10
分以内とする。この頻度・印加時間は内容液、測定機器
の状況等によって選定される。
As a method of applying the voltage, it is preferable to perform the intermittent measurement periodically or irregularly without continuously applying the voltage in order to reduce the influence of the electrolysis. Depending on the anticorrosion speed, the frequency is from once a day to once a week.
Within minutes. The frequency and application time are selected according to the contents of the liquid, the condition of the measuring instrument, and the like.

次に印加した電圧及び流れる電流から測定・演算回路
8で交流インピーダンスを測定・計算する。これは電流
・電圧の振幅と位相差を測定する装置及びこれよりイン
ピーダンスを計算する回路の組合せ他がある。又、一般
の高抵抗用交流抵抗計、自動交流ブリッジでもよい。ま
た回路8で交流インピーダンスより静電容量を算出、液
浸透の影響検出、浮遊容量・リーク電流による誤差の補
正等を行ってもよい。回路8で算出された測定値は、判
断回路9に送られ長期蓄積されるとともに過去の値との
比較により、欠陥の発生/検出の判断をし、警報等によ
り運転員に告知する。比較の方法としては、差動アンプ
等から成るアナログ回路にて処理する方法も考えられる
が、コンピューター内でソフトウェア的に処理する方法
が簡便である。
Next, the measurement and calculation circuit 8 measures and calculates the AC impedance from the applied voltage and the flowing current. This includes a combination of a device for measuring the amplitude and phase difference of current and voltage and a circuit for calculating impedance from the device. Further, a general high-resistance AC resistance meter or an automatic AC bridge may be used. Further, the circuit 8 may calculate the capacitance from the AC impedance, detect the influence of liquid permeation, correct an error due to stray capacitance and leak current, and the like. The measured values calculated by the circuit 8 are sent to the judgment circuit 9 and accumulated for a long time, and the occurrence / detection of the defect is judged by comparing with the past value, and the operator is notified by an alarm or the like. As a comparison method, a method of processing by an analog circuit including a differential amplifier or the like can be considered, but a method of processing by software in a computer is simple.

〔作 用〕(Operation)

以下に第2図の装置に基づいて具体的に説明する。図
中1は容量約1の金属製管体、2はポリ塩化ビニルか
ら成る耐食性非導電性材層(厚さ0.5mm)、4は30%硫
酸、3はPt電極(1mmφ)、6はインピーダンスアナラ
イザーを各々示す。この耐食性非導電性材層2に5で示
されるような0.2mmφ以上のピンホールを4種、0.2mm×
1cm以上のクラックを4種をつけ周波数とアドミッタン
スの変化を測定した。0.4mmφのピンホールでの例を第
3図に示す。周波数103Hz以下の測定点で、下向きの矢
印はアドミッタンスは一時上がるが速やかに低下(抵抗
が上昇)することを表し、上下の矢印は振れが激しく、
アドミッタンスが速やかに低下することを表す。
The following is a specific description based on the apparatus shown in FIG. In the figure, 1 is a metal tube having a capacity of about 1, 2 is a corrosion-resistant non-conductive material layer made of polyvinyl chloride (thickness 0.5 mm), 4 is 30% sulfuric acid, 3 is a Pt electrode (1 mmφ), 6 is impedance Each of the analyzers is shown. Four kinds of pinholes having a diameter of 0.2 mmφ or more as indicated by 5 in this corrosion-resistant non-conductive material layer 2, 0.2 mm ×
Four types of cracks of 1 cm or more were made, and the changes in frequency and admittance were measured. FIG. 3 shows an example using a 0.4 mmφ pinhole. At measurement points with a frequency of 10 3 Hz or less, a downward arrow indicates that the admittance temporarily rises but rapidly decreases (resistance increases).
Indicates that the admittance drops quickly.

また、106Hz以上では無欠陥の機器(×印)で、アド
ミッタンスが急激に上昇することを表している。
At 10 6 Hz or higher, the admittance rises sharply for devices with no defect (marked by x).

これらの場合、いずれも欠陥を検出することは困難で
ある。
In each of these cases, it is difficult to detect a defect.

〔発明の効果〕〔The invention's effect〕

本発明装置によると10kHz〜1000kHzの高周波交流を間
欠的に挿入電極と缶体もしくは耐食性被膜中の導電層に
印加し、欠陥を通して流れる電流により、保護被膜の欠
陥を検出することにより、検出できる状態をより長期に
かつ安定にすることができ、又、より微小な欠陥も確度
高く検出することが可能になった。これにより検出装置
の信頼性が向上するとともに、缶体の損傷をより速く予
測でき、被膜交換の時期を開放・破壊することなく推定
することが可能になった。
According to the apparatus of the present invention, a high-frequency alternating current of 10 kHz to 1000 kHz is intermittently applied to the insertion electrode and the conductive layer in the can body or the corrosion-resistant coating, and the current flowing through the defect detects the defect in the protective coating, thereby detecting the state of the protective coating. Can be stabilized for a longer period of time, and a finer defect can be detected with high accuracy. As a result, the reliability of the detection device has been improved, and the damage to the can body can be predicted more quickly, and it is possible to estimate the time for replacing the coating without opening or destroying it.

【図面の簡単な説明】[Brief description of the drawings]

第1図は本発明方法を実施するための装置の1例を示す
模式図である。 1:金属製缶体、2:耐食性非導電性材層、3:電極、4:導電
性内容液、5:欠陥、6:高周波発振器、7:電流検出回路、
8:交流インピーダンス測定・演算回路、9:判断回路、1
1:導線、12:導線 また、第2図はテスト装置、第3図はテストデータの1
例を示す。
FIG. 1 is a schematic view showing one example of an apparatus for carrying out the method of the present invention. 1: Metal can body, 2: Corrosion resistant non-conductive material layer, 3: Electrode, 4: Conductive content liquid, 5: Defect, 6: High frequency oscillator, 7: Current detection circuit,
8: AC impedance measurement / calculation circuit, 9: Judgment circuit, 1
1: Conductor, 12: Conductor Fig. 2 shows test equipment, Fig. 3 shows test data 1
Here is an example.

───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.6,DB名) G01N 27/00 - 27/24──────────────────────────────────────────────────続 き Continued on front page (58) Field surveyed (Int.Cl. 6 , DB name) G01N 27/00-27/24

Claims (5)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】金属材料からなる機器の内側表面に耐食性
非導電性材層を積層した金属製機器の耐食性非導電性材
層の欠陥を電気伝導を利用して検出する装置であって、
金属材料に接続された導線(11)と金属製機器の内部の
導電性液体に浸漬された電極に接続された導線(12)と
を機器外部に導通させ、導線(11)と導線(12)とに印
加される電源が10〜1000kHzの高周波交流であることを
特徴とする欠陥検出装置。
An apparatus for detecting a defect of a corrosion-resistant non-conductive material layer of a metal device by using electrical conduction, wherein the corrosion-resistant non-conductive material layer is laminated on an inner surface of the device made of a metal material,
Conduction between the conductive wire (11) connected to the metal material and the conductive wire (12) connected to the electrode immersed in the conductive liquid inside the metal device is conducted to the outside of the device, and the conductive wire (11) and the conductive wire (12) And a power supply applied to the defect detection device is a high-frequency alternating current of 10 to 1000 kHz.
【請求項2】金属材料と耐食性非導電性材層との間に耐
食性導電性材層を有し、導線(11)が金属材料または耐
食性導電性材層に接続されたことを特徴とする特許請求
の範囲第1項記載の欠陥検出装置。
2. A patent comprising a corrosion-resistant conductive material layer between a metal material and a corrosion-resistant non-conductive material layer, wherein the conductive wire (11) is connected to the metal material or the corrosion-resistant conductive material layer. The defect detection device according to claim 1.
【請求項3】金属材料に耐食性非導電性材層、耐食性導
電性材層、耐食性非導電性材層の順に積層し導線(11)
が金属材料または耐食性導電性材層に接続されたことを
特徴とする特許請求の範囲第1項記載の欠陥検出装置。
3. A conductive wire formed by laminating a corrosion-resistant non-conductive material layer, a corrosion-resistant conductive material layer, and a corrosion-resistant non-conductive material layer on a metal material in this order.
2. The defect detection device according to claim 1, wherein the first electrode is connected to a metal material or a corrosion-resistant conductive material layer.
【請求項4】金属材料からなる機器の内側表面に耐食性
非導電性材層が積層され内部に導電性液体を収容した金
属製機器の耐食性非導電性材層の欠陥を電気伝導を利用
して検出するに際し、耐食性非導電性材層の両面に10〜
1000kHzの高周波交流電圧を間欠的に印加することを特
徴とする欠陥検出方法。
4. A defect of a corrosion-resistant non-conductive material layer of a metal device in which a corrosion-resistant non-conductive material layer is laminated on an inner surface of a device made of a metal material and contains a conductive liquid therein by utilizing electric conduction. When detecting, 10 ~ on both sides of the corrosion resistant non-conductive material layer
A defect detection method characterized by intermittently applying a 1000 kHz high frequency AC voltage.
【請求項5】金属材料からなる機器の内側表面に耐食性
非導電性材層を積層した金属製機器の耐食性非導電性材
層の欠陥を電気伝導を利用して検出するに際し、該金属
材料に接続された導線(11)と該金属製機器の内部の導
電性液体に浸漬された電極に接続された導線(12)とを
機器外部に導通させ、導線(11)と導線(12)とに10〜
1000kHzの高周波交流電圧を間欠的に印加することを特
徴とする欠陥検出方法。
5. When detecting a defect in a corrosion-resistant non-conductive material layer of a metal device in which a corrosion-resistant non-conductive material layer is laminated on an inner surface of a device made of a metal material by utilizing electric conduction, the metal material is subjected to The conducting wire (11) and the conducting wire (12) connected to the electrode immersed in the conductive liquid inside the metal device are electrically connected to the outside of the device, and the conducting wire (11) and the conducting wire (12) are connected to each other. Ten~
A defect detection method characterized by intermittently applying a 1000 kHz high frequency AC voltage.
JP1115830A 1989-05-09 1989-05-09 Defect detection device and detection method Expired - Lifetime JP2836097B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1115830A JP2836097B2 (en) 1989-05-09 1989-05-09 Defect detection device and detection method

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Application Number Priority Date Filing Date Title
JP1115830A JP2836097B2 (en) 1989-05-09 1989-05-09 Defect detection device and detection method

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JPH02293657A JPH02293657A (en) 1990-12-04
JP2836097B2 true JP2836097B2 (en) 1998-12-14

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Publication number Priority date Publication date Assignee Title
JP7500437B2 (en) * 2019-01-18 2024-06-17 ダイキンファインテック株式会社 Electrical resistance measuring device and electrical resistance measuring method using the same

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CH579272A5 (en) * 1974-03-29 1976-08-31 Pfaudler Werke Ag
JPS5477191A (en) * 1977-12-02 1979-06-20 Nippon Kokan Kk Coating film tester
JPS58127346U (en) * 1982-02-22 1983-08-29 大日本印刷株式会社 Inspection device for paper liquid containers
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