JP2839663B2 - Substrate supply and storage device - Google Patents

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate supply and storage device for supplying and storing a substrate used in an electronic device.

[Conventional technology]

Conventionally, as a substrate supply apparatus using a substrate storage box, as shown in FIG. 4 (a), when an elevator 5 loaded with a substrate storage box 4 rises by one substrate and stops, the air cylinder 7 is contacted. There is a method in which the substrate 3 is scraped out by the hook 8.

Also, as shown in FIG. 4 (b), there is a method in which the air cylinder 7 extends and pushes out the substrate 3 after the lift 5 has stopped rising in the same manner as described above.

A related device of this type is described in, for example, JP-A-63-209200.

[Problems to be solved by the invention]

In the above conventional technique, first, in the former scraping method, the hook 9 connected to the tip of the air cylinder 8 is used.
In order to take out the substrate 3, the upper part of the substrate storage box 4 needs to be kept at the height of the hook 9 in order to reciprocate in the substrate storage box 4, and the substrate storage capacity is reduced.

In the latter pushing method, since the air cylinder 8 for pushing the substrate 3 protrudes from the supply device main body, the installation area becomes larger than that of the pushing method.

Further, both of the above two methods have a problem that a separate apparatus is required for accommodating the substrate, and the installation area is large.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a substrate supply / storage device which supplies and stores substrates by one apparatus and further reduces the installation area by increasing the number of substrates stored in the substrate storage box.

[Means for solving the problem]

An object of the present invention includes a substrate storage box capable of storing a plurality of substrates, an elevator for vertically moving the substrate storage box, a clamp for holding a front end surface of the substrate, and a driving device for moving the clamp back and forth. This is achieved by:

[Action]

A substrate storage box on which a plurality of substrates are mounted is loaded on an elevator. At the same time as the elevator stops moving up and down according to the storage interval of the substrate, the clamp advances. When the clamp micro-switch (substrate detector) detects the clamp, it stops and grips the substrate. When the substrate is gripped, the clamp retracts and supplies the substrate to a predetermined position.

Further, as the clamp advances, the substrate at a predetermined position is stored in the substrate storage box.

Thus, it is possible to provide a small-sized substrate supply / storage device capable of storing and supplying a substrate with one device.

〔Example〕

Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings.

FIG. 1 is a configuration diagram showing the configuration of the substrate supply and storage device of the present invention.

In FIG. 1, 1 is a rodless cylinder, 2 is a clamp having a function of moving back and forth by the rodless cylinder 1 and holding a substrate, 3 is a substrate, 4 is a substrate storage box for storing the substrate 3, and 5 is a substrate storage box. An elevator for moving the box up and down, and 6 is a control device for controlling the rodless cylinder 1, the clamp 2, and the elevator 5. Reference numeral 3 'denotes a working board (work board).

FIG. 2 (a) is a side view of the clamp 2 and shows a state in which the work board 3 'is gripped.

FIG. 2B is a plan view of the clamp 2 and shows a state in which the work board 3 'is gripped.

In FIG. 2B, reference numeral 7 denotes a microswitch provided in the clamp 2;
The substrate is detected by.

FIG. 3 is a flowchart showing the operation of the control device 6.

Hereinafter, the operation will be described based on FIG. 1, FIG. 2 (a), (b) and FIG.

First, an operator stores a plurality of substrates 3 in the substrate storage box 4 and loads them on the elevator 5. Thereafter, a command to start work is issued to the control device 6 by a command device (not shown). Upon receiving the command, the control device 6 controls the elevator 5 to raise the elevator 5 to a height at which the first work board 3 'is stored (FIG. 3, 301), and stops the elevator 5 (FIG. 3). 3, FIG. 302). Next, the rodless cylinder is controlled, and the clamp 2 is advanced (FIG. 3, 303). Thereafter, when the micro switch 7 detects the work board 3 'and the control device 6 recognizes the detected information (FIG. 3, 304),
The clamp 2 is stopped, and the work board 3 'is gripped as shown in FIG. 2A (FIG. 3, 305). Next, the rodless cylinder 1 is controlled to retract the clamp 2 (FIG. 3,
306), and supply the work board 3 'to the work area (clamp 2).
Is released) (FIG. 3, 307), and it is monitored whether or not the processing is completed (FIG. 3, 308). Upon recognizing that the processing has been completed, the substrate 3 'is again gripped by the clamp 2, and then the rodless cylinder 1 is controlled to advance the clamp 2 (FIG. 3, 309). 4 (FIG. 3, 310). Thereafter, the clamp 2 is slightly retracted, and it is recognized from the information from the microswitch 7 that the detection of the board has disappeared, and the storage of the work board 3 'is confirmed (FIG. 3, 311). Next, it is determined whether or not all work has been completed (FIG. 3, 312). If there is a next work board, the elevator is raised (FIG. 3, 30).
1) Similarly, this operation (FIGS. 3, 301 to 312) is repeated in the order of the second work board and the third work board.

Upon recognizing that all the operations have been completed in step 312 in FIG. 3, the rodless cylinder 1 is controlled, the clamp 2 is advanced, and the clamp 2 is opened and the clamp 2 is stored (FIG. 3, 313). , End all the steps.

In addition, after the working of the working board 3 'is completed, the operation has been described with an example in which the working board 3' is gripped again by the clamp 2 and the board is stored. The work board 3 ′ can be stored in the board storage box 4 by simply moving the clamp 2 forward so as to simply push the work board 3 ′.

〔The invention's effect〕

ADVANTAGE OF THE INVENTION According to this invention, supply and storage of a board | substrate are possible with one apparatus, Furthermore, the number of storage of a board | substrate storage box can be aimed at.

In addition, it is possible to provide an inexpensive substrate supply and storage device having a small installation area.

[Brief description of the drawings]

FIG. 1 is a side view showing one embodiment of the present invention, FIG. 2 (a) is a side view showing details of substrate holding, and FIG. 2 (b)
FIG. 3 is a plan view showing details of substrate holding, FIG. 3 is a flowchart illustrating the operation of the present invention, and FIGS. 4 (a) and 4 (b) are side views showing a conventional substrate supply device. It is. DESCRIPTION OF SYMBOLS 1 ... Rodless air cylinder 2 ... Clamp 3 ... Substrate 3 '... Substrate in operation (work substrate) 4 ... Substrate storage box 5 ... Elevator 6 ... Control device 7 ... Micro switch substrate detector 8 Air cylinder 9 Hook

Claims (1)

(57) [Claims] 1. A clamp for holding a substrate front end face, comprising: a substrate storage box capable of storing a plurality of substrates in a vertical direction; an elevator for vertically moving the substrate storage box; and detecting means for detecting the substrate. And a driving device for moving the clamp back and forth, and after operating the substrate storage box at a predetermined position by the elevator, the clamp is operated forward by the driving device, and the detecting unit detects the substrate. A control device that causes the clamp to operate to hold the substrate with the clamp, and then causes the drive device to retreat the clamp to supply the substrate gripped by the clamp to a work area. Substrate supply and storage device.