JP2841188B2 - Stamper peeling method and apparatus - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for peeling a metal stamper such as nickel formed on a master in the manufacture of a disk such as an optical disk from the master.

[0002]

2. Description of the Related Art Discs are copied in large quantities by an injection molding machine or the like, and a nickel metal master, a so-called stamper, is mainly used as a die. The stamper is prepared by applying a photoresist to a glass master, exposing and recording a signal pattern with a laser beam, and forming a signal pattern on the glass master by a development process. Next, the surface is made conductive (metallizing), a metal nickel layer (stamper) is formed by nickel electroforming, the formed stamper is peeled off from the glass master, and the inner and outer diameter portions are punched out to form a donut-shaped stamper. Get. In addition, a so-called family process is also performed in which a stamper peeled from a glass master is used as a master, a nickel layer is formed on the surface of the stamper by electroforming, and the nickel layer is peeled off to form a stamper.

[0003] Such a peeling of the stamper from the glass master or nickel master is generally performed by making a cut in the outer periphery of the stamper with an edge separating jig such as a cutter blade, and from the cut into the gap between the stamper and the master. This has been done by making the tip of the edge separate jig enter and gradually increasing the gap between the stamper and the master. In some cases, a step of shaving the outer peripheral portion of the stamper with a file before using the edge separating jig to make the portion thinner is also necessary so as to make it easy to make a cut. All such operations are performed manually and require skill.

[0004] Japanese Patent Application Laid-Open No. 7-14219 discloses a method and an apparatus for peeling off a stamper which can be performed by an automatic device. This involves irradiating a laser beam around the outer periphery of the stamper generated on the surface of the glass master disk, dissolving and evaporating the relevant portion in a circular shape along the outer periphery, cutting it, and then adsorbing the stamper by vacuum suction and peeling it off. is there.

[0005]

In the former stripping method, all the operations have to be performed manually, and also require skill, which is inefficient and the production efficiency is low. In addition, since the sharp edge of the edge separation jig is used, there is a possibility that injuries may occur and the stamper may be damaged. Although the latter can be automated, the use of a laser beam makes the device large and expensive, and the running cost is high due to power consumption and maintenance. In addition, only a glass master can be used as the master, and if a metal master is used, there is a problem that the stamper and the master are welded and cannot be separated.

The present invention solves such a problem and provides an inexpensive and safe method and apparatus for removing a stamper that can be automated, can be applied to a metal master, and does not use a laser beam. Is what you do.

[0007]

According to the present invention, there is provided a method for generating an initial peeling between an outer peripheral portion of a stamper and a master by bringing an oscillating portion of an ultrasonic oscillator into contact with an outer peripheral portion of the stamper formed on the surface of the master. And completely removing the stamper after the initial peeling has occurred. When the ultrasonic wave is applied to the outer peripheral portion of the stamper, the portion vibrates and the outer peripheral portion of the stamper rises due to a curl phenomenon due to a rise in temperature, and initial peeling occurs with the master. At this time, if the outer peripheral portion of the stamper is formed thinner than the central portion as shown in FIG. 1, the curl phenomenon becomes large and large initial peeling occurs. A stamper having a thin outer peripheral portion can be produced by selecting an appropriate one from known electroforming jigs. What is necessary is just to use the thing similar to what is called an ultrasonic welder used for the processing of resin or metal as an ultrasonic oscillator. After the initial peeling has occurred, complete peeling can be easily performed by various methods. Further, if necessary, after performing the initial peeling, a step of expanding the peeling state by inserting a peeling expanding jig into the gap between the stamper and the master that have been initially peeled can be inserted. In this way, the complete peeling step can be performed more easily.

The complete removal of the stamper can be performed by various methods. A typical method is, first, to fix the master by magnetic suction, vacuum suction or a mechanical chuck (known mechanical fixing means). The stamper is fixed to the stamper fixing means by magnetic adsorption or vacuum adsorption, and the stamper fixing means and the master disk fixing means are relatively separated from each other. Second, the master is fixed to the master fixing means by magnetic attraction, vacuum attraction or mechanical chuck, and has a plurality of wedge-shaped or tapered bolt-shaped tips in the gap between the outer periphery of the stamper and the master. This is performed by causing the tip of the peeling jig to enter and relatively separating the tip of the peeling jig from the master disk fixing means. In either case, when the master is made of glass, the master is fixed by vacuum suction or mechanical chuck only.

Further, the present invention comprises a master fixing means for fixing a master, a stamper fixing means for fixing a stamper, and an ultrasonic oscillator, wherein the master fixing means and the stamper fixing means can be relatively approached or separated from each other. In this manner, at least one of the means is movable, and at least one of the oscillating section and the master fixing means is movable so that the oscillating section of the ultrasonic oscillator can contact and be separated from the outer periphery of the stamper. To cause initial separation between the stamper outer periphery and the master, and then separate the oscillator from the stamper and separate the master fixing means and the stamper fixing means to completely separate the stamper from the master This is a stamper peeling device. Various methods are available for the master fixing means and the stamper fixing means, but the master fixing means is a rotatable table for fixing the master by magnetic attraction, vacuum suction or a mechanical chuck, and the stamper fixing means is magnetic attraction or vacuum. If a suction plate is used to fix the stamper by suction, the master and the stamper can be easily fixed, and the initial peeling can easily occur around the stamper by applying ultrasonic waves while rotating the master. it can. When the master is made of glass, it cannot be magnetically attracted.

[0010] The present invention further comprises a master fixing means for fixing the master, an ultrasonic oscillator, and a peeling jig having a plurality of tips formed in a wedge or tapered bolt shape. At least one of the oscillating portion and the master fixing means is movable so that the oscillating portion can contact and be separated from the outer peripheral portion of the stamper, and the leading end of the peeling jig is disposed near the outer peripheral portion of the stamper and approaches or approaches the stamper. It is possible to move in the radial direction of the stamper as far as it is separated, and further movable as at least one of the tip portion or the master fixing means is relatively approached or separated, and the oscillating portion of the ultrasonic oscillator is brought into contact with the outer periphery of the stamper. After the initial separation occurs between the stamper outer periphery and the master, the oscillation part is separated from the stamper, and the tip of the separation jig is moved in the direction of the stamper so that the outer periphery of the stamper and the master are separated. It is advanced to the gap formed between the a peeling apparatus of the stamper, characterized in that to completely peel off the peeling jig tip a stamper by separating from the master fixing means from the master. The means for fixing the master is the same as described above. The stamper can be easily and completely peeled even by using this peeling jig.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to the drawings showing embodiments. FIG. 1 is an explanatory view of the step of generating initial peeling and the step of enlarging the peeling state of the present invention, FIG. 2 is an explanatory view of a stamper peeling apparatus 10 of the embodiment, and FIG. 3 is an explanatory view of a stamper peeling apparatus 20 of the embodiment. It is.

The stamper peeling device 10 shown in FIG. 2 includes a master fixing table 11 as a master fixing means, a stamper suction disk 15 as a stamper fixing means, an ultrasonic oscillator 3, a peeling enlargement jig 5, and the like. The master disk fixing base 11 has a disk shape, and has a main shaft 12 formed on a lower surface. The main shaft 12 is connected to a rotation drive source (not shown) such as a motor and can rotate. A concave portion 14 is formed on the upper surface and communicates with a shaft hole 13 of the main shaft 12. The shaft hole 13 is connected to a vacuum source (not shown), and the glass master placed on the master fixing base 11. 1 is fixed by vacuum suction. The stamper suction disk 15 has a disk shape, and has a shaft 16 connected to a driving source (not shown) such as a driving cylinder formed on the upper surface, and can be moved in the vertical direction in FIG. A concave portion 18 is formed on the lower surface, and communicates with a shaft hole 17 of the shaft 16. The shaft hole 17 is connected to a vacuum source (not shown), and the lower surface sucks the stamper 2 by vacuum. The ultrasonic oscillator 3 is equivalent to a so-called ultrasonic welder used for processing a resin or a metal. The ultrasonic energy generated in the main body is converged by a horn, and the oscillating portion 4 at the tip comes into contact. It transfers the energy to the material. The oscillating unit 4 is located near the outer periphery of the stamper, and is movable up and down in FIG. The peeling expansion jig 5 has a thin plate shape at its tip, is located near the outer periphery of the boundary between the stamper and the master, and is movable in the left-right direction in FIG.

The master 1 having a stamper formed on its surface by the electroforming process is subjected to a stamper polishing process.
1 is fixed by vacuum suction. The stamper polishing step can be performed after peeling, but it is more efficient to perform it before peeling. After fixing the master, the oscillating portion 4 of the ultrasonic oscillator 3 is lowered to bring the oscillating portion 4 into contact with the outer peripheral portion of the stamper 2 as shown in FIG. Then, the master disk fixing base 11 is rotated at a low speed to generate initial peeling around the entire periphery of the stamper. By this initial peeling,
As shown in FIG. 1B, the outer periphery of the stamper curls upward, and a gap is created between the stamper 2 and the master 1. next,
The peeling expansion jig 5 is moved in the stamper direction, and FIG.
As shown in (2), when the leading end enters the gap between the stamper 2 and the master 1 and the master fixed base 11 is rotated at a low speed, the gap is enlarged over the entire circumference, and the initial peeling state is expanded. Next, the stamper suction disk 15 is lowered to vacuum-suction the stamper 2 on its lower surface. Finally, stamper suction plate 1
When the stamper 5 is raised, the stamper 2 is vacuum-adsorbed by the stamper 5 and rises together, and is completely separated from the master 1.

The timing of lowering the stamper suction disk 15 and sucking the stamper 2 to the stamper 2 can be set immediately after the stamper is set on the master disk fixing base 11, that is, before the ultrasonic wave is applied. In that case, since the master disk fixing base 11 is rotated to apply ultrasonic waves, the stamper suction disk 11 needs to be rotatable so as to rotate together with the rotation.

A stamper peeling device 20 shown in FIG. 3 is an embodiment in which a peeling jig 21 completely peels off. In FIG. 3, the configuration of the master disk fixing base 11 is exactly the same as that of the embodiment of FIG. 2, and a main shaft 12, a shaft hole 13, and a concave portion 14 are formed. The peeling enlargement jig 5 is exactly the same as the embodiment of FIG. The peeling jig 21 has four wedge-shaped tips 22. Each tip 22 is disposed at every 90 degrees near the outer periphery of the boundary between the stamper and the master, and moves in the radial direction of the stamper. It is possible. Further, the peeling jig 21 can be moved up and down in FIG. 3 by a driving device (not shown). The initial peeling by the ultrasonic oscillator 3 and the enlargement of the initial peeling state by the peeling expanding jig 5 are performed in the same manner as in the embodiment of FIG. Next, the leading end 22 of the peeling jig 21 moves inward, that is, in a direction approaching the stamper, and the leading end 22 enters the gap between the stamper 2 and the master 1. Then, the peeling jig 21 moves upward, and the stamper 2
Is supported by the distal end portion 22 of the peeling jig 21
Together with the master 1 and is completely separated from the master 1.

In each of the above embodiments, the peeling and expanding jig 5
Has a step of enlarging the initial peeling state using the above. However, if the initial peeling is sufficiently performed, this step can be omitted. The master may be fixed by a mechanical chuck, or may be magnetically attracted when a metal master such as nickel is used. The fixation of the stamper can also be changed to vacuum adsorption and magnetic adsorption.

The peeled stamper is transferred to a transfer device (not shown) and passed to the next step such as punching of the inner and outer diameters.
The master left on the master fixed table is taken out by a robot (not shown) and passed to a reproduction processing step.

[0018]

According to the present invention, the initial peeling is generated on the outer periphery of the stamper by the ultrasonic wave, and the stamper is peeled off from the master using the initial peeling. Therefore, the stamper can be peeled off efficiently and safely for a short time. it can. Further, according to the present invention, the master and the stamper can be easily held and fixed by the master fixing means, the stamper fixing means or the peeling jig, and the stamper peeling step which has been conventionally performed manually can be automated. It is also possible to make the stamper manufacturing fully automatic. Further, the stamper peeling apparatus of the present invention is inexpensive and small in size as compared with a conventional peeling apparatus using laser light, consumes little power, is easy to maintain, and is safe.

[Brief description of the drawings]

FIG. 1 is an explanatory view of a step of generating initial peeling and a step of enlarging a peeling state according to the present invention.

FIG. 2 is an explanatory view of a stamper peeling device 10 according to the embodiment.

FIG. 3 is an explanatory diagram of a stamper peeling device 20 according to the embodiment.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Master 2 Stamper 3 Ultrasonic oscillator 4 Oscillator 5 Exfoliation expansion jig 10 Stamper exfoliation device 11 Master fixing stand 12 Main shaft 13 Shaft hole 14 Depression 15 Stamper suction disk 16 Shaft 17 Shaft hole 18 Depression 20 Stamper exfoliation device 21 Separation jig 22 Tip

Claims (10)

(57) [Claims] A step of causing an oscillating portion of an ultrasonic oscillator to contact an outer peripheral portion of the stamper formed on the surface of the master to cause initial separation between the outer peripheral portion of the stamper and the master; Removing the stamper completely. 2. The method for separating a stamper according to claim 1, wherein between the step of generating the initial separation and the step of completely separating the stamper, the separation expanding jig is caused to enter a gap between the stamper and the master that have been initially separated. A method of removing a stamper, comprising a step of enlarging a state. 3. The method according to claim 1, wherein the stamper is formed on the surface of the master.
Forming an outer peripheral portion of the stamper thinner than a central portion by using the method. 4. The method for separating a stamper according to claim 1, wherein the step of completely separating the stamper includes fixing the master to a master fixing means by magnetic attraction, vacuum attraction or mechanical chuck, and magnetically adsorbing the stamper. A stamper fixing method, wherein the stamper fixing means is fixed to the stamper fixing means by vacuum suction, and the stamper fixing means and the master disc fixing means are relatively separated from each other. 5. The stamper separating method according to claim 1, wherein the step of completely separating the stamper is performed by fixing the master to a master fixing means by magnetic attraction, vacuum attraction, or a mechanical chuck. The leading end of a peeling jig having a plurality of leading ends formed in a wedge-like or tapered bolt shape into a gap between the peeling jig and the master-plate fixing means in a relative manner. Stamper peeling method characterized by performing 6. A master fixing means for fixing a master, a stamper fixing means for fixing a stamper, and an ultrasonic oscillator, wherein at least the master fixing means and the stamper fixing means can be relatively approached or separated from each other. One of the means is movable, and at least one of the oscillating part or the master fixing means is movable so that the oscillating part of the ultrasonic oscillator contacts the outer peripheral part of the stamper and can be separated therefrom. After the initial separation between the stamper outer periphery and the master, the oscillation part is separated from the stamper and the master fixing means and the stamper fixing means are relatively separated from each other to completely separate the stamper from the master. Stamper peeling device 7. The stamper peeling device according to claim 6,
The original plate fixing means is a rotatable base for fixing the original plate by magnetic attraction, vacuum attraction or a mechanical chuck, and the stamper fixing means is an adsorption plate at which the stamper is fixed by magnetic attraction or vacuum attraction. apparatus 8. A master fixing means for fixing a master, an ultrasonic oscillator, and a peeling jig having a plurality of tips formed in a wedge-like or tapered bolt-like form. At least one of the oscillating portion and the master disk fixing means is movable so as to be able to contact and separate from the outer peripheral portion of the stamper, and the tip of the peeling jig is arranged near the outer peripheral portion of the stamper so as to approach or separate in the direction of the stamper. Is movable in the radial direction of the stamper, and furthermore, at least one of the leading end portion and the master fixing means is movable so as to approach or separate relatively. After the initial delamination occurs, the oscillation part is separated from the stamper, the tip of the delamination jig is moved in the direction of the stamper, and the gap formed between the outer periphery of the stamper and the master A stamper separating device, wherein the stamper is completely separated from the master by causing the leading end of the separation jig to separate from the master fixing means. 9. The stamper peeling device according to claim 8,
A stamper peeling device, wherein the master fixing means is a rotatable base for fixing the master by magnetic attraction, vacuum attraction or mechanical chuck. 10. The stamper peeling device according to claim 6, 7, 8 or 9, further comprising a peeling expanding jig having a tip portion formed in a thin plate shape or a needle shape, wherein the tip portion approaches or separates from the stamper. It is movable in the radial direction of the stamper, and after the initial peeling is generated on the outer periphery of the stamper by the ultrasonic oscillator, the tip moves in the direction approaching the stamper and is generated between the outer periphery of the stamper and the master. Device for removing a stamper, which penetrates into a gap that has occurred and enlarges a peeling state generated in the initial peeling.