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JP2849703B2 - Metal oxide-based third-order nonlinear optical materials - Google Patents
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JP2849703B2 - Metal oxide-based third-order nonlinear optical materials - Google Patents

Metal oxide-based third-order nonlinear optical materials

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Publication number
JP2849703B2
JP2849703B2 JP26240695A JP26240695A JP2849703B2 JP 2849703 B2 JP2849703 B2 JP 2849703B2 JP 26240695 A JP26240695 A JP 26240695A JP 26240695 A JP26240695 A JP 26240695A JP 2849703 B2 JP2849703 B2 JP 2849703B2
Authority
JP
Japan
Prior art keywords
nonlinear optical
order nonlinear
thin film
metal oxide
optical material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP26240695A
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Japanese (ja)
Other versions
JPH0980495A (en
Inventor
昌儀 安藤
広平 角野
正毅 春田
享 阪口
勝 見矢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は非線形光学効果を利
用した光デバイスの基礎をなす非線形光学材料、さらに
詳細には金属酸化物にアルカリ金属を添加・化合して得
られる非線形光学効果の大きな物質の薄膜に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a non-linear optical material which forms the basis of an optical device utilizing a non-linear optical effect, and more specifically, a substance having a large non-linear optical effect obtained by adding / combining an alkali metal to a metal oxide. A thin film of

【0002】[0002]

【従来の技術およびその問題点】従来見いだされてきた
比較的大きな非線形光学効果を有する物質として、CdS
等の半導体微粒子を分散析出したガラスやAu等の貴金属
微粒子を分散析出したガラス等が知られている。これに
対して、最近、本発明者らは、ある種の遷移金属酸化
物、例えばV2O5, Cr2O3, Mn3O4, Fe2O3, Co3O4, CuO等
が従来有望とされてきた材料に匹敵する大きな非線形光
学効果を発現することを見いだした(特願平6−678
41号)。このような遷移金属酸化物は、大きな非線形
光学効果を発現するという長所のみならず、従来検討さ
れてきた他の非線形光学材料との比較において特に、光
デバイスでの使用時に重要な強レーザー照射に対する安
定性に優れ、安価な原料から容易に合成でき、長期にわ
たり化学変化を起こしにくく人体に対しても毒性がほと
んどない等の点について優れた特徴を有している。3次
非線形光学材料は、3次の非線形光学効果によって物質
が発現する、非線形屈折率変化及び非線形吸光係数変化
を利用することにより様々な光デバイスへの応用が考え
られているが、その中でも、全光型の光コンピューター
への応用には最も大きな期待が寄せられている。この全
光型光コンピューターの実用化を達成するには、3次非
線形光学材料の性能の一層の向上が必要である。すなわ
ち、より大きな3次非線形感受率(χ(3))、より速い
応答速度ならびにより小さな光吸収(吸光係数:α)を
持つ材料の開発が求められている。特に、しばしば評価
の基準として用いられる、性能指数χ(3)/αの値が大
きな材料を開発することが重要な課題となっている。し
かし、一般的に、χ(3)の大きな材料はαも大きいの
で、性能指数χ(3)/αを大幅に向上させることは困難
であるという問題点があった。
2. Description of the Related Art As a substance having a relatively large nonlinear optical effect which has been conventionally found, CdS
Glass and the like in which semiconductor fine particles such as Au are dispersed and deposited and noble metal fine particles such as Au and the like are dispersed and precipitated are known. In contrast, recently, we have discovered that certain transition metal oxides, such as V 2 O 5 , Cr 2 O 3 , Mn 3 O 4 , Fe 2 O 3 , Co 3 O 4 , CuO, etc. It has been found that a large nonlinear optical effect comparable to that of a conventionally promising material is exhibited (Japanese Patent Application No. Hei 6-678).
No. 41). Such transition metal oxides have not only the advantage of exhibiting a large nonlinear optical effect, but also intense laser irradiation, which is important when used in optical devices, especially in comparison with other nonlinear optical materials that have been studied conventionally. It has excellent characteristics in that it has excellent stability, can be easily synthesized from inexpensive raw materials, hardly causes chemical changes over a long period of time, and has almost no toxicity to the human body. The third-order nonlinear optical material is considered to be applied to various optical devices by utilizing a nonlinear refractive index change and a nonlinear extinction coefficient change, which are manifested by a third-order nonlinear optical effect. The most promising is the application to all-optical computers. To achieve practical use of this all-optical computer, it is necessary to further improve the performance of the third-order nonlinear optical material. That is, the development of a material having a higher third-order nonlinear susceptibility (χ (3) ), a faster response speed, and a smaller light absorption (extinction coefficient: α) is required. In particular, it is important to develop a material having a large figure of merit χ (3) / α, which is often used as a criterion for evaluation. However, in general, since a material having a large χ (3) has a large α, there is a problem that it is difficult to greatly improve the figure of merit χ (3) / α.

【0003】本発明者らは、上記のような3次非線形光
学材料の現状と問題に鑑み鋭意研究を行った結果、前出
願(特願平6−67841号)で見いだした遷移金属酸
化物系材料にアルカリ金属を添加することにより、χ
(3)のみならずχ(3)/αをも大幅に向上させることがで
き、3次非線形光学材料としての有用性が高まることを
見いだした。
The present inventors have conducted intensive studies in view of the current situation and problems of the above-described third-order nonlinear optical materials, and as a result, have found a transition metal oxide-based material found in the prior application (Japanese Patent Application No. 6-67841). By adding an alkali metal to the material,
It has been found that not only (3) but also χ (3) / α can be greatly improved, and the utility as a third-order nonlinear optical material is enhanced.

【0004】[0004]

【発明が解決しようとする課題】本発明の目的は、非線
形光学材料の現状に鑑み、高い3次非線形光学効果(大
きなχ(3)およびχ(3)/α)を安定に発現し、かつ、か
つ、安価で安全性にも優れた新たな非線形光学材料及び
その製造方法を提供することにある。
SUMMARY OF THE INVENTION An object of the present invention is to stably express high third-order nonlinear optical effects (large 発 現(3) and χ (3) / α) in view of the current state of nonlinear optical materials, and Another object of the present invention is to provide a new non-linear optical material which is inexpensive and excellent in safety and a method for manufacturing the same.

【0005】[0005]

【課題を解決するための手段】本発明は、上記目的を達
成するためになされたものであり、本発明の3次非線形
光学材料は、V2O5, Cr2O3, Mn3O4, Fe2O3, Co3O4, CuO
及びNiOからなる群から選ばれる少なくとも1種の金属
酸化物に、Li, Na, K, Rb及びCsからなる群から選ばれ
る少なくとも1種のアルカリ金属を添加・化合して得ら
れる物質の薄膜を透明基板上に形成してなるものであ
る。
Means for Solving the Problems The present invention has been made to achieve the above object, and the third-order nonlinear optical material of the present invention comprises V 2 O 5 , Cr 2 O 3 , Mn 3 O 4 , Fe 2 O 3 , Co 3 O 4 , CuO
And a thin film of a material obtained by adding and combining at least one alkali metal selected from the group consisting of Li, Na, K, Rb and Cs to at least one metal oxide selected from the group consisting of NiO and NiO. It is formed on a transparent substrate.

【0006】[0006]

【発明の実施の形態】本発明において使用する「金属酸
化物」は、V2O5, Cr2O3, Mn3O4, Fe2O3, Co3O4, CuO及
びNiOが例示され、特に好ましくはV2O5及びNiOが例示さ
れる。
BEST MODE FOR CARRYING OUT THE INVENTION The "metal oxide" used in the present invention is exemplified by V 2 O 5 , Cr 2 O 3 , Mn 3 O 4 , Fe 2 O 3 , Co 3 O 4 , CuO and NiO. Particularly preferred are V 2 O 5 and NiO.

【0007】本発明において、金属酸化物に添加・化合
する金属としては、Li, Na, K, Rb及びCsからなる群か
ら選ばれる少なくとも1種のアルカリ金属が挙げられ、
より好ましくはLiが挙げられる。
In the present invention, the metal added to and combined with the metal oxide includes at least one alkali metal selected from the group consisting of Li, Na, K, Rb and Cs.
More preferably, Li is used.

【0008】金属酸化物中の金属原子数と、添加成分中
のアルカリ金属原子数の比率は、特に限定されないが、
好ましくは(1:0.01)〜(1:0.5)程度、よ
り好ましくは(1:0.02)〜(1:0.2)程度で
ある。
The ratio of the number of metal atoms in the metal oxide to the number of alkali metal atoms in the additional component is not particularly limited.
It is preferably about (1: 0.01) to (1: 0.5), more preferably about (1: 0.02) to (1: 0.2).

【0009】上記薄膜が適用される透明基板としては、
SiO2を主成分とするガラス、石英、Al2O3からなるサフ
ァイアなどが挙げられる。
As the transparent substrate to which the above-mentioned thin film is applied,
Examples thereof include glass containing SiO 2 as a main component, quartz, and sapphire made of Al 2 O 3 .

【0010】本発明では、非線形光学材料の主成分とし
ては、V2O5, Cr2O3, Mn3O4, Fe2O3,Co3O4, CuO及びNiO
からなる群から選ばれる少なくとも1種の金属酸化物を
用いる。これらの酸化物は、レーザー光のような強い光
の照射下において高い3次非線形光学効果を発現する性
質を有するものである。このような現象の生じる理由は
明確ではないが、以下のような原理によるものであると
推測される。すなわち、これらの金属酸化物は、半導体
的な性質をもっており、そのため紫外−可視−近赤外に
およぶ広い波長範囲に連続的な吸収帯をもつ。したがっ
て、バンドギャップ近傍の周波数のレーザー光を金属酸
化物に照射したとき、励起状態のキャリア密度が顕著に
増大し、飽和吸収を起こして屈折率が変化する、いわゆ
るバンドフィリング効果によって高い3次非線形光学効
果が発現すると推測される。また、レーザー光の照射に
伴う温度上昇による屈折率の変化も3次非線形光学効果
の発現に寄与していると考えられる。
In the present invention, the main components of the nonlinear optical material are V 2 O 5 , Cr 2 O 3 , Mn 3 O 4 , Fe 2 O 3 , Co 3 O 4 , CuO and NiO
At least one metal oxide selected from the group consisting of These oxides have a property of exhibiting a high third-order nonlinear optical effect under irradiation of strong light such as laser light. The reason why such a phenomenon occurs is not clear, but is presumed to be due to the following principle. That is, these metal oxides have semiconductor properties, and thus have continuous absorption bands in a wide wavelength range from ultraviolet to visible to near infrared. Therefore, when a metal oxide is irradiated with a laser beam having a frequency in the vicinity of the band gap, the carrier density in the excited state is significantly increased, causing saturation absorption to change the refractive index. It is presumed that an optical effect appears. Further, it is considered that the change in the refractive index due to the temperature rise accompanying the irradiation of the laser beam also contributes to the expression of the third-order nonlinear optical effect.

【0011】このような現象は全ての金属酸化物で現れ
るのではなく、(イ)照射レーザー光の波長に吸収帯を
もつこと、(ロ)半導体的性質をもつこと、の2条件を
満足する金属酸化物でのみ達成されるものと考えられ
る。上記したV2O5, Cr2O3, Mn3O4, Fe2O3, Co3O4, CuO
及びNiOからなる群から選ばれる少なくとも1種の金属
酸化物の薄膜は、いずれも高い3次非線形光学効果を示
すものである。
Such a phenomenon does not appear in all metal oxides, but satisfies the two conditions of (a) having an absorption band at the wavelength of the irradiated laser beam and (b) having semiconductor properties. It is believed that this is achieved only with metal oxides. V 2 O 5 , Cr 2 O 3 , Mn 3 O 4 , Fe 2 O 3 , Co 3 O 4 , CuO
And at least one metal oxide thin film selected from the group consisting of NiO and NiO exhibits a high third-order nonlinear optical effect.

【0012】本発明では、V2O5, Cr2O3, Mn3O4, Fe2O3,
Co3O4, CuO及びNiOからなる群から選ばれる少なくとも
1種の金属酸化物に、Li, Na, K, Rb及びCsからなる群
から選ばれる少なくとも1種のアルカリ金属を添加・化
合して化合物を生成し、このような化合物の薄膜を透明
基板上に形成して非線形光学材料としている。本発明の
化合物におけるアルカリ金属の添加の目的は、金属酸化
物薄膜の非線形光学効果を増強する、すなわちχ(3)
増大させるためである。アルカリ金属を添加しない状態
では半導体的性質が小さく、絶縁体に近い金属酸化物
が、アルカリ金属の添加により半導体的性質の大きな化
合物となり、このような半導体的性質の増大により非線
形光学効果が増強され、χ(3)が増大するものと推測さ
れる。金属酸化物の半導体的性質が大きくなると、χ
(3)が増大すると同時に紫外−可視−近赤外のは町域で
のαが大きくなる傾向があるが、アルカリ金属の添加量
の増大に伴うχ(3)およびαの増大割合は一様ではない
ので、アルカリ金属の添加量を適当に選ぶことにより、
αをほとんど増大させずにχ(3)を大幅に増大させるこ
とができる。すなわち、3次非線形感受率χ(3)と性能
指数χ(3)/αの両方を増大させ、非線形光学材料とし
ての有用性を高めることができる。
In the present invention, V 2 O 5 , Cr 2 O 3 , Mn 3 O 4 , Fe 2 O 3 ,
Co 3 O 4 , CuO and NiO, at least one metal oxide selected from the group consisting of Li, Na, K, Rb and at least one alkali metal selected from the group consisting of Cs, added and combined A compound is generated, and a thin film of such a compound is formed on a transparent substrate to obtain a nonlinear optical material. The purpose of adding the alkali metal in the compound of the present invention is to enhance the nonlinear optical effect of the metal oxide thin film, that is, to increase χ (3) . When no alkali metal is added, the semiconducting properties are small, and the metal oxide close to the insulator becomes a compound having a large semiconducting property by adding the alkali metal, and the nonlinear optical effect is enhanced by the increase in such semiconducting properties. , Χ (3) is estimated to increase. As the semiconductor properties of metal oxides increase,
In the ultraviolet-visible-near-infrared region, α in the town area tends to increase at the same time as (3) increases. Not so, by appropriately selecting the amount of alkali metal added,
χ (3) can be increased substantially without increasing α. That is, both the third-order nonlinear susceptibility χ (3) and the figure of merit χ (3) / α can be increased, and the usefulness as a nonlinear optical material can be enhanced.

【0013】薄膜は、通常ガラス、石英、サファイア等
の透明基板上に形成する。薄膜の形成方法は特に限定は
なく、スパッタ堆積法、真空蒸着法、CVD法等のいわ
ゆる気相法や、金属アルコキシド、金属硝酸塩、有機酸
金属塩等の溶液を基板上に塗布し、熱分解する方法等、
各種の公知法が適用できる。例えば、金属酸化物あるい
は添加する金属の前駆体となる金属アルコキシド、金属
硝酸塩、有機酸金属塩等の溶液を混合し、スピンコート
法等で基板上に成膜した後、空気のような酸素を含む雰
囲気下で焼成する方法等が適用できる。
The thin film is usually formed on a transparent substrate such as glass, quartz or sapphire. The method for forming the thin film is not particularly limited, and a so-called gas phase method such as a sputter deposition method, a vacuum deposition method, or a CVD method, or a solution such as a metal alkoxide, a metal nitrate, or a metal salt of an organic acid is applied on a substrate and thermally decomposed How to do
Various known methods can be applied. For example, a solution of a metal oxide or a metal alkoxide serving as a precursor of a metal to be added, a metal nitrate, a metal salt of an organic acid, or the like is mixed, and a film is formed on a substrate by a spin coating method or the like. For example, a method of baking under an atmosphere including the above can be applied.

【0014】本発明では、これらの金属酸化物を単独ま
たは混合して用いることができる。また、単成分の金属
元素の酸化物として用いるだけでなく、複合酸化物とし
て用いてもよい。
In the present invention, these metal oxides can be used alone or as a mixture. Further, it may be used not only as an oxide of a single component metal element but also as a composite oxide.

【0015】薄膜の厚さは特に限定されないが、薄膜に
レーザー光を透過して非線形光学材料として使用する場
合には、薄膜が厚くなりすぎると、光の透過割合が少な
くなり、出力光が薄膜に再吸収されて弱まるので非線形
光学材料としての有用性が低下する。通常、スパッタ堆
積法で形成される薄膜のように緻密な薄膜の場合には、
通常2〜50nm程度、好ましくは5〜20nmの膜厚が適当であ
り、溶液を塗布し、熱分解する方法では、形成される薄
膜が比較的緻密でないので、より厚い膜厚でも非線形光
学材料として用いることができる。一方、光導波路表面
に非線形光学材料の薄膜を形成し、光導波路からしみ出
すエバネッセント波を用いる場合には、薄膜が厚過ぎて
も使用上問題はないが、薄膜が薄過ぎると非線形光学効
果に優れた材料とならないため、薄膜の厚さは2nm以上
であることが好ましく、より好ましくは2〜100nm、さら
に好ましくは5〜50nm程度である。
The thickness of the thin film is not particularly limited. However, in the case where the thin film is used as a nonlinear optical material by transmitting laser light, if the thin film is too thick, the light transmission ratio is reduced, and the output light is reduced. And is weakened by being re-absorbed, thereby deteriorating its usefulness as a nonlinear optical material. Usually, in the case of a dense thin film such as a thin film formed by a sputter deposition method,
Usually, a film thickness of about 2 to 50 nm, preferably 5 to 20 nm is appropriate.In the method of applying a solution and thermally decomposing, the formed thin film is not relatively dense, so even a thicker film can be used as a nonlinear optical material. Can be used. On the other hand, when a thin film of a non-linear optical material is formed on the surface of an optical waveguide and an evanescent wave oozing out of the optical waveguide is used, there is no problem in using the film even if the thin film is too thick. In order not to become an excellent material, the thickness of the thin film is preferably 2 nm or more, more preferably 2 to 100 nm, and further preferably about 5 to 50 nm.

【0016】[0016]

【発明の効果】本発明によれば、高い非線形光学効果を
安定に発現し、かつ、安価で安全性にも優れた新たな非
線形光学材料およびその製造方法を提供できる。
According to the present invention, it is possible to provide a new non-linear optical material which stably exhibits a high non-linear optical effect, is inexpensive and has excellent safety, and a method of manufacturing the same.

【0017】[0017]

【実施例】以下、本発明を実施例を用いてより詳細に説
明するが、本発明はこれら実施例に限定されるものでは
ない。
EXAMPLES Hereinafter, the present invention will be described in more detail with reference to examples, but the present invention is not limited to these examples.

【0018】実施例1 ガラス基板上(片面)にオクチル酸ニッケルとナフテン
酸リチウムの混合物(ニッケル:リチウム=100:5
(原子比))をスピンコート法で形成し、380℃で2時
間焼成し、厚み約80nmの淡褐色透明を呈するリチウム添
加酸化ニッケル薄膜を調製した。このリチウム添加酸化
ニッケル薄膜の3次非線形感受率(χ(3))は波長532nm
で、パルス幅7nsのレーザー光を用いて縮退4光波混
合法(DFWM)によって測定した結果1.4x10-9esuであり、
リチウムを添加しない酸化ニッケル薄膜のχ(3)の少な
くとも20倍に達した。また、リチウム添加酸化ニッケ
ル薄膜およびリチウムを添加しない酸化ニッケル薄膜の
波長532nmでの吸光係数(α)はそれぞれ6.5×103cm-1
および7.7×103cm-1であり、リチウムを添加しても好ま
しくないαの増大は認められず、逆に僅かに減少した。
その結果、リチウム添加酸化ニッケル薄膜では、リチウ
ムを添加しない酸化ニッケル薄膜に比べてχ(3)のみな
らず性能指数(χ(3)/α)も少なくとも20倍向上し
た。
EXAMPLE 1 A mixture of nickel octylate and lithium naphthenate (nickel: lithium = 100: 5) was placed on a glass substrate (one side).
(Atomic ratio) was formed by spin coating, and baked at 380 ° C. for 2 hours to prepare a light brown transparent lithium-added nickel oxide thin film having a thickness of about 80 nm. The third-order nonlinear susceptibility (χ (3) ) of this lithium-doped nickel oxide thin film is 532 nm.
The result was 1.4 × 10 −9 esu as measured by degenerate four-wave mixing (DFWM) using a laser beam with a pulse width of 7 ns.
The value reached at least 20 times the value of χ (3) of the nickel oxide thin film to which lithium was not added. The extinction coefficient (α) at a wavelength of 532 nm of the lithium-added nickel oxide thin film and the nickel oxide thin film without lithium addition was 6.5 × 10 3 cm −1, respectively.
And 7.7 × 10 3 cm −1 , and an undesired increase in α was not observed even with the addition of lithium, but slightly decreased.
As a result, in the lithium-doped nickel oxide thin film, not only χ (3) but also the figure of merit (χ (3) / α) was improved by at least 20 times as compared with the nickel oxide thin film to which lithium was not added.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 阪口 享 大阪府池田市緑丘1丁目8番31号 工業 技術院大阪工業技術研究所内 (72)発明者 見矢 勝 大阪府池田市緑丘1丁目8番31号 工業 技術院大阪工業技術研究所内 (58)調査した分野(Int.Cl.6,DB名) G02F 1/35 505 JICSTファイル(JOIS)──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Sakaguchi 1-8-31 Midorigaoka, Ikeda-shi, Osaka Prefecture Inside the Industrial Technology Research Institute Osaka Institute of Technology (72) Inventor Masaru Miya 1--8th Midorioka, Ikeda-shi, Osaka No. 31 Osaka Institute of Technology (58) Investigated field (Int. Cl. 6 , DB name) G02F 1/35 505 JICST file (JOIS)

Claims (6)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】V、Cr、Mn、Fe
、Co、CuOおよびNiOからなる群か
ら選ばれる少なくとも1種の金属酸化物に、Li、N
a、K、RbおよびCsからなる群から選ばれる少なく
とも1種のアルカリ金属を添加・化合して得られる物質
の薄膜を透明基板上に形成してなる3次非線形光学材
料。
1. A method according to claim 1, wherein V 2 O 5 , Cr 2 O 3 , Mn 3 O 4 , Fe
At least one metal oxide selected from the group consisting of 2 O 3 , Co 3 O 4 , CuO, and NiO includes Li, N
A third-order nonlinear optical material obtained by forming a thin film of a substance obtained by adding and combining at least one kind of alkali metal selected from the group consisting of a, K, Rb and Cs on a transparent substrate.
【請求項2】金属酸化物がNiOである請求項1に記載
の3次非線形光学材料。
2. The third-order nonlinear optical material according to claim 1, wherein the metal oxide is NiO.
【請求項3】金属酸化物がVである請求項1に記
載の3次非線形光学材料。
3. The third-order nonlinear optical material according to claim 1, wherein the metal oxide is V 2 O 5 .
【請求項4】アルカリ金属がLiである請求項1〜3の
いずれかに記載の3次非線形光学材料。
4. The third-order nonlinear optical material according to claim 1, wherein the alkali metal is Li.
【請求項5】前記薄膜が、リチウム添加酸化ニッケル薄
膜である請求項1に記載の3次非線形光学材料。
5. The third-order nonlinear optical material according to claim 1, wherein the thin film is a lithium-doped nickel oxide thin film.
【請求項6】V、Cr、Mn、Fe
、Co、CuOおよびNiOからなる群か
ら選ばれる少なくとも1種の金属酸化物、あるいはV、
Cr、Mn、Fe、Co、CuおよびNiからなる群か
ら選ばれる少なくとも1種の金属のアルコキシド、硝酸
塩または有機酸塩の溶液に、Li、Na、Fe、Co、
CuおよびNiからなる群から選ばれる少なくとも1種
のアルカリ金属のアルコキシド、硝酸塩または有機酸塩
の溶液を塗布あるいは混合し、スピンコート法により基
板上に成膜した後、酸素を含む雰囲気下で焼成すること
を特徴とする3次非線形光学材料の製造方法。
6. V 2 O 5 , Cr 2 O 3 , Mn 3 O 4 , Fe
At least one metal oxide selected from the group consisting of 2 O 3 , Co 3 O 4 , CuO and NiO, or V,
Li, Na, Fe, Co, a solution of at least one metal alkoxide, nitrate or organic acid salt selected from the group consisting of Cr, Mn, Fe, Co, Cu and Ni;
A solution of at least one alkali metal alkoxide, nitrate or organic acid salt selected from the group consisting of Cu and Ni is applied or mixed, formed into a film on a substrate by a spin coating method, and then fired in an atmosphere containing oxygen. A method of manufacturing a third-order nonlinear optical material.
JP26240695A 1995-09-14 1995-09-14 Metal oxide-based third-order nonlinear optical materials Expired - Lifetime JP2849703B2 (en)

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JP2849703B2 true JP2849703B2 (en) 1999-01-27

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