JP2853340B2 - Non-magnetic ceramic material for magnetic head and method of manufacturing the same - Google Patents
Non-magnetic ceramic material for magnetic head and method of manufacturing the sameInfo
- Publication number
- JP2853340B2 JP2853340B2 JP2406493A JP40649390A JP2853340B2 JP 2853340 B2 JP2853340 B2 JP 2853340B2 JP 2406493 A JP2406493 A JP 2406493A JP 40649390 A JP40649390 A JP 40649390A JP 2853340 B2 JP2853340 B2 JP 2853340B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- ceramic material
- mol
- magnetic head
- magnetic ceramic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
- Magnetic Heads (AREA)
Description
【0001】[0001]
【産業上の利用分野】本発明は、フロッピーディスクヘ
ッド,ハードディスクヘッド等の各種磁気ヘッドの構成
に欠くことの出来ないスライダーまたはスペーサとして
使用される磁気ヘッド用非磁性セラミックス材料および
その製造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a non-magnetic ceramic material for a magnetic head used as a slider or a spacer which is indispensable for various magnetic heads such as a floppy disk head and a hard disk head, and a method of manufacturing the same.
【0002】[0002]
【従来の技術】近年、特に進歩が著しい磁気記録の高密
度化・高信頼性化に伴いスライダー材料としての非磁性
セラミックス材料に対しては、高緻密化が要請されてい
る。2. Description of the Related Art In recent years, non-magnetic ceramic materials as slider materials have been required to have higher densities in accordance with the remarkable progress of high density and high reliability of magnetic recording.
【0003】ところで従来磁気ヘッドを製作する場合、
Mn−Znフェライトコアとスライダーをガラスで接着
する方法が一般的であり、スイラダーとの熱膨張係数の
違いに起因する接着時にコアクラック・コア歪みによる
磁気特性劣化防止のため、25〜350℃での熱膨張係
数110〜128(×10-7/℃)を有するCaTiO
3・SrTiO3を主成分とするチタニアを用いていた。
なお、このCaTiO 3とSrTiO3固溶体の組成と熱
膨張係数の関係については、特開昭52−30162号
公報において詳述されている。By the way, when a conventional magnetic head is manufactured,
Bonding Mn-Zn ferrite core and slider with glass
Is generally used, and the coefficient of thermal expansion of the
Due to core crack and core distortion during bonding due to differences
Thermal expansion at 25-350 ° C to prevent deterioration of magnetic properties
Number 110-128 (× 10-7/ ° C)
Three・ SrTiOThreeWas used as a main component.
In addition, this CaTiO ThreeAnd SrTiOThreeSolid solution composition and heat
Regarding the relationship between the expansion coefficients, see JP-A-52-30162.
It is detailed in the gazette.
【0004】しかしながらこのチタニアの常圧焼成にお
ける緻密化は不十分であり、高緻密化達成を優先させる
HIP焼成法を基本とする製法が用いられていた。However, densification of this titania in normal-pressure sintering is insufficient, and a production method based on the HIP sintering method which gives priority to achieving high densification has been used.
【0005】[0005]
【発明が解決しようとする課題】このような従来の非磁
性セラミックス材料では、HIP焼成法による場合、1
000Kg/cm2以上にも及ぶ高圧ガス下による焼成法で
あり、高圧ガスは加熱初期に充填されたAr等の還元性
ガスの加熱による高圧化によってえられる。すなわちH
IP焼成による緻密な焼結体は、まず一次焼成と呼ばれ
る常圧焼成によって作製されたある程度の緻密さを持つ
焼結体を準備し、次にこれをHIP焼成した後、さらに
酸化雰囲気で熱処理することで得られる。このようにH
IP焼成は、常圧焼成と比較し工程数が増し、また設備
は高温・高圧用となるため高価であり、高緻密化には有
利であるが、コスト高という課題があった。In such a conventional non-magnetic ceramic material, when the HIP sintering method is used, 1
This is a firing method using a high-pressure gas of 000 kg / cm 2 or more. The high-pressure gas is obtained by increasing the pressure of a reducing gas such as Ar filled in the initial stage of heating by heating. That is, H
The dense sintered body by IP firing is prepared by first preparing a sintered body having a certain degree of denseness produced by normal-pressure firing called primary firing, then performing HIP firing, and then heat-treating in an oxidizing atmosphere. Obtained by: Thus H
IP calcination requires more steps than normal pressure calcination, and is expensive because the equipment is used for high temperature and high pressure. This is advantageous for high densification, but has a problem of high cost.
【0006】本発明は上記課題を解決するもので、コス
ト的に有利な常圧焼成法による製造が可能な磁気ヘッド
用非磁性セラミックス材料およびその製造方法を提供す
ることを目的としている。An object of the present invention is to provide a non-magnetic ceramic material for a magnetic head which can be manufactured by a normal pressure firing method, which is advantageous in cost, and a method of manufacturing the same.
【0007】[0007]
【課題を解決するための手段】本発明は上記目的を達成
するために、添加物として五酸化燐(P2O5)と二酸化
シリコン(SiO2)を含有する組成物で、かつ前記P2
O5のモル%をXとし、前記SiO2のmol%をYとし
たとき下記の割合 1.5≦X≦4 0<Y≦3 Y≦−2X+8 を満たして焼成形成された構成による。Means for Solving the Problems The present invention to achieve the above object, a composition containing a phosphorus pentoxide (P 2 O 5) and silicon dioxide (SiO 2) as an additive, and the P 2
When the mole% of O 5 is X and the mole% of SiO 2 is Y, the following ratios 1.5 ≦ X ≦ 40 <Y ≦ 3 Y ≦ −2X + 8 are satisfied and firing is performed.
【0008】[0008]
【作用】本発明は上記構成により(αCaTiO3−β
SrTiO3)−γTiO2 (α+β+γ=1、0.1
7≦α≦0.60、0.38≦β≦0.81、0≦γ≦
0.02)相当の、CaTiO3とSrTiO3の固溶体
とTiO2の混合相からなる主組成物の緻密化を、Si
O2とP2O5の割合を適度な値に設定することによって
生じる焼成時の液相によって高めることが出来る。According to the present invention, (αCaTiO 3 -β
SrTiO 3 ) −γTiO 2 (α + β + γ = 1, 0.1
7 ≦ α ≦ 0.60, 0.38 ≦ β ≦ 0.81, 0 ≦ γ ≦
0.02), the densification of the main composition consisting of a mixed solution of CaTiO 3 and SrTiO 3 and TiO 2
By setting the ratio of O 2 and P 2 O 5 to an appropriate value, it can be increased by the liquid phase at the time of firing generated.
【0009】[0009]
【実施例】以下、本発明の一実施例を(表1)〜(表
3)および図1を参照しながら説明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to (Table 1) to (Table 3) and FIG.
【0010】まずCaCO3・SrCO3・TiO2は市
販されている平均粒径0.5μm以下、純度99%以上
の粉末を用いた。SiO2は市販されている平均粒径
0.02μm以下、純度99.9%以上の粉末を用い
た。P(燐)化合物はH3PO4の1級試薬を用いた。試
料は(表1),(表2)に示す組成に秤量し、ボールミ
ルで水による湿式混合を6時間行った。First, commercially available powder having an average particle diameter of 0.5 μm or less and a purity of 99% or more was used for CaCO 3 .SrCO 3 .TiO 2 . As SiO 2, a commercially available powder having an average particle size of 0.02 μm or less and a purity of 99.9% or more was used. As the P (phosphorus) compound, a primary reagent of H 3 PO 4 was used. The samples were weighed to the compositions shown in (Table 1) and (Table 2), and wet-mixed with water in a ball mill for 6 hours.
【0011】[0011]
【表1】 [Table 1]
【0012】[0012]
【表2】 [Table 2]
【0013】乾燥後不透明石英の角曹と電気炉を用い
て、(表1)に示す1050℃または1140℃の温度
および大気雰囲気中での6時間の仮焼を行った。なお
(表1)に示す試料NO1,NO21,NO22,NO
42,NO43,NO63の仮焼粉の組成が、次の(化
1)の反応式1),2),3)により磁気ヘッド用非磁
性セラミックス材料の主組成物組成となるのは、公知の
事実である。After drying, calcination was performed at a temperature of 1050.degree. C. or 1140.degree. C. and in an air atmosphere for 6 hours as shown in Table 1 using opaque quartz baking soda and an electric furnace. Samples NO1, NO21, NO22, NO shown in Table 1
It is known that the composition of the calcined powder of 42, NO43 and NO63 becomes the main composition of the non-magnetic ceramic material for a magnetic head according to the following reaction formulas (1), (2) and (3). It is a fact.
【0014】[0014]
【化1】 Embedded image
【0015】また試料NO21,NO42,NO63の
仮焼粉をジェットミル粉砕機によって平均粒度0.5μ
m以下にまで粉砕し、この粉砕粉と添加物を用いて(表
2)に示す組成に秤量し、同様にボールミルで水による
湿式混合を6時間行い、乾燥後1140℃での同様な仮
焼を行った。The calcined powders of Samples NO21, NO42 and NO63 were crushed by a jet mill pulverizer to an average particle size of 0.5 μm.
m, weighed to the composition shown in (Table 2) using the crushed powder and additives, similarly wet-mixed with water in a ball mill for 6 hours, dried, and similarly calcined at 1140 ° C. Was done.
【0016】次にこの仮焼粉を、ボールミルでアニオン
分散剤とPVAバインダーと水により8時間粉砕し、遠
心噴霧タイプの造粒機にて乾燥・造粒を行った。さらに
この造粒粉を圧力1ton/cm2で成形し、温度134
0℃と1315℃で、酸素雰囲気・大気雰囲気中にて焼
成した。焼成は、管状炉中に大気・酸素ガスを循環させ
た雰囲気にて、昇温速度150℃/Hrで最高温度まで加
熱した後3時間保持し、降温速度200℃/Hr以下で1
00℃以下まで冷却するという方式をとった。Next, this calcined powder was pulverized with a ball mill for 8 hours using an anionic dispersant, a PVA binder and water, and dried and granulated by a centrifugal spray type granulator. Further, this granulated powder was molded at a pressure of 1 ton / cm 2 ,
The sintering was performed at 0 ° C. and 1315 ° C. in an oxygen atmosphere or an air atmosphere. The firing is performed by heating to the maximum temperature at a heating rate of 150 ° C./Hr in an atmosphere in which air / oxygen gas is circulated in a tubular furnace, and then maintaining the temperature for 3 hours.
The system was cooled to 00 ° C. or less.
【0017】得られた試料の緻密化は、切り出した試料
の3μmダイヤモンド粉を用いた湿式ラップ仕上げの研
磨面における気孔の分布量より求めた気孔率により評価
した。試料の熱膨張係数は、示差膨張方式にて25〜3
50℃における平均線熱膨張係数より求めた。The densification of the obtained sample was evaluated based on the porosity obtained from the distribution of pores on the polished surface of the cut sample which had been wet lap finished using 3 μm diamond powder. The coefficient of thermal expansion of the sample is 25 to 3 by the differential expansion method.
It was determined from the average coefficient of linear thermal expansion at 50 ° C.
【0018】得られた試料の、気孔率と熱膨張係数を
(表3)に示す。The porosity and coefficient of thermal expansion of the obtained sample are shown in Table 3.
【0019】[0019]
【表3】 [Table 3]
【0020】同一組成の主組成物についての添加物の添
加割合例として、試料1〜20についての添加物の添加
割合を示す。(表1),(表2),(表3)および図1
の結果によれば、添加物SiO2,H3PO4と主組成物
CaCO3,SrCO3,TiO2を用いて酸素雰囲気,
大気雰囲気を用いれば、常圧焼成によっても非常に緻密
でかつ必要な熱膨張係数を有する焼結体をうることがで
きることは明らかである。また試料NO2〜NO6,N
O22〜NO27,NO44〜NO48においては液相
が少なく、NO18,NO20,NO39,NO41,
NO60,NO62においては過度の液相が存在した。
従って以上の結果より、本発明内の試料NO7〜NO1
7,NO19とNO28〜NO38とNO40およびN
O49とNO59とNO61においては適度な液相が生
成し酸素雰囲気常圧焼成により、必要な熱膨張係数を有
する緻密な焼結体をうることが出来ることがわかった。
また前記特開昭52−30162号公報より、CaTi
O3とSrTiO3の固溶体の熱膨張係数が、30mol
%のCaTiO3と70mol%のSrTiO3という組
成において最大となることも分かっている。As an example of the additive ratio of the additive in the main composition having the same composition, the additive ratio of the additive in Samples 1 to 20 is shown. (Table 1), (Table 2), (Table 3) and FIG.
According to the results of the above, an oxygen atmosphere was prepared by using additives SiO 2 and H 3 PO 4 and main components CaCO 3 , SrCO 3 and TiO 2 ,
It is clear that a sintered body having a very dense and necessary thermal expansion coefficient can be obtained by atmospheric pressure sintering if an air atmosphere is used. Samples NO2 to NO6, N
In O22 to NO27 and NO44 to NO48, the liquid phase is small, and NO18, NO20, NO39, NO41,
In NO60 and NO62, an excessive liquid phase was present.
Therefore, from the above results, the samples NO7 to NO1 in the present invention
7, NO19 and NO28 to NO38 and NO40 and N
In O49, NO59, and NO61, an appropriate liquid phase was formed, and it was found that a dense sintered body having a necessary coefficient of thermal expansion could be obtained by baking at normal pressure in an oxygen atmosphere.
Also, according to Japanese Patent Application Laid-Open No. 52-30162, CaTi
The thermal expansion coefficient of the solid solution of O 3 and SrTiO 3 is 30 mol
% CaTiO 3 and 70 mol% SrTiO 3 have also been found to be maximal.
【0021】従って、添加物P2O5の割合Xmol%と
SiO2の割合Ymol%について、X,Yを主組成物
組成100モル%に対する割合として、図1の斜線部を
表わす下記の式 1.5≦X≦4 0≦Y≦3 Y≦−2X+8 が満たされるとき、CaTiO3とSrTiO3の固溶体
およびTiO2の混合相から構成される主組成物におい
て、必要な熱膨張係数を有する緻密体を製造できること
は明らかである。Therefore, with respect to the ratio X mol% of the additive P 2 O 5 and the ratio Y mol% of the SiO 2 , X and Y are the ratios to 100 mol% of the main composition, and the following formula 1 representing the shaded portion in FIG. When 0.5 ≦ X ≦ 40 ≦ Y ≦ 3 Y ≦ −2X + 8 is satisfied, the main composition composed of a solid solution of CaTiO 3 and SrTiO 3 and a mixed phase of TiO 2 has a dense thermal expansion coefficient required. Obviously the body can be made.
【0022】[0022]
【発明の効果】以上の実施例から明らかなように本発明
によれば、主組成物に対し、添加物として五酸化燐(P
2O5)と二酸化シリコン(SiO2)を含有する組成物
で、かつ前記P2O5のモル%をXとし、前記SiO2の
mol%をYとしたとき下記の割合 1.5≦X≦4 0<Y≦3 Y≦−2X+8 を満たして焼成形成された構成によるので、コスト的に
有利な常圧焼成法で、必要な熱膨張係数を有する緻密な
磁気ヘッド用非磁性セラミックス材料およびその製造方
法を提供できる。As is apparent from the above examples, according to the present invention, phosphorus pentoxide (P) is added to the main composition as an additive.
When the composition contains 2 O 5 ) and silicon dioxide (SiO 2 ), and the mole percent of P 2 O 5 is X and the mole percent of SiO 2 is Y, the following ratio 1.5 ≦ X ≦ 40 <Y ≦ 3 Y ≦ −2X + 8, so that a dense non-magnetic ceramic material for a magnetic head having a necessary coefficient of thermal expansion by a normal pressure firing method, which is advantageous in terms of cost, The manufacturing method can be provided.
【図1】本発明の一実施例の磁気ヘッド用非磁性セラミ
ックス材料の添加物SiO2とP2O5割合の関係を、組
成0.6CaTiO3−0.38SrTiO3−0.02
TiO2の主組成物を例にとって示した図FIG. 1 shows the relationship between the ratio of additive SiO 2 and P 2 O 5 in the nonmagnetic ceramic material for a magnetic head according to one embodiment of the present invention, with the composition 0.6CaTiO 3 −0.38SrTiO 3 −0.02.
Diagram showing the main composition of TiO 2 as an example
Claims (3)
7〜60mol%、チタン酸ストロンチウム(SrTi
O3)38〜81mol%、酸化チタン(TiO2)0〜
2mol%でかつ前記三成分の合計が100mol%か
らなる主組成物に対し、添加物として五酸化燐(P
2O5)と二酸化シリコン(SiO2)を含有する組成物
で、かつ前記P2O5のモル%をXとし、前記SiO2の
mol%をYとしたとき下記の割合 1.5≦X≦4 0<Y≦3 Y≦−2X+8 を満たして焼成形成されたことを特徴とする磁気ヘッド
用非磁性セラミックス材料。1. Calcium titanate (CaTiO 3 ) 1
7 to 60 mol%, strontium titanate (SrTi
O 3 ) 38-81 mol%, titanium oxide (TiO 2 ) 0
2 mol% and the total of the three components was 100 mol%, and phosphorus pentoxide (P
When the composition contains 2 O 5 ) and silicon dioxide (SiO 2 ), and the mole percent of P 2 O 5 is X and the mole percent of SiO 2 is Y, the following ratio 1.5 ≦ X A non-magnetic ceramic material for a magnetic head, characterized by being formed by sintering so as to satisfy ≦ 40 <Y ≦ 3 Y ≦ −2X + 8.
(CaCO3)と、炭酸ストロンチウム(SrCO3)
と、酸化チタン(TiO2)と、二酸化シリコン(Si
O2)と、燐(P)と酸素の化合物または燐(P)と酸
素および水素の化合物との混合物を仮焼して得た組成物
を用いることを特徴とする請求項1記載の磁気ヘッド用
非磁性セラミックス材料の製造方法。2. The composition raw materials are calcium carbonate (CaCO 3 ) and strontium carbonate (SrCO 3 ).
, Titanium oxide (TiO 2 ) and silicon dioxide (Si
2. A magnetic head according to claim 1, wherein a composition obtained by calcining a mixture of O 2 ), phosphorus (P) and oxygen, or a mixture of phosphorus (P), oxygen and hydrogen is used. For manufacturing non-magnetic ceramic materials.
形成することを特徴とする請求項2記載の磁気ヘッド用
非磁性セラミックス材料の製造方法。3. The method for producing a non-magnetic ceramic material for a magnetic head according to claim 2, wherein the non-magnetic ceramic material is formed by firing in a normal pressure firing atmosphere and an oxygen atmosphere.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2406493A JP2853340B2 (en) | 1990-12-26 | 1990-12-26 | Non-magnetic ceramic material for magnetic head and method of manufacturing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2406493A JP2853340B2 (en) | 1990-12-26 | 1990-12-26 | Non-magnetic ceramic material for magnetic head and method of manufacturing the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04224166A JPH04224166A (en) | 1992-08-13 |
| JP2853340B2 true JP2853340B2 (en) | 1999-02-03 |
Family
ID=18516114
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2406493A Expired - Fee Related JP2853340B2 (en) | 1990-12-26 | 1990-12-26 | Non-magnetic ceramic material for magnetic head and method of manufacturing the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2853340B2 (en) |
-
1990
- 1990-12-26 JP JP2406493A patent/JP2853340B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04224166A (en) | 1992-08-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2853340B2 (en) | Non-magnetic ceramic material for magnetic head and method of manufacturing the same | |
| JP2917527B2 (en) | Non-magnetic ceramic material and method of manufacturing the same | |
| JP2001097768A (en) | YAG-based ceramic raw material and method for producing the same | |
| JPH054867A (en) | Non-magnetic ceramic material for magnetic head and manufacturing method thereof | |
| JPS6224380B2 (en) | ||
| JPH06162428A (en) | Nonmagnetic ceramic material for magnetic head and its production | |
| KR970004614B1 (en) | Non-magnetic ceramic substrate material of magnetic head | |
| JP3103165B2 (en) | Method of manufacturing piezoelectric body | |
| JP2957228B2 (en) | Magnetic head slider | |
| JPH0388767A (en) | Nonmagnetic ceramic material for magnetic head and its production | |
| JP3322228B2 (en) | Tools for firing | |
| JP2622078B2 (en) | Manufacturing method of non-magnetic ceramics for magnetic head | |
| JP3127820B2 (en) | Sputtering target for forming ferroelectric film and method for manufacturing the same | |
| JPH0822912A (en) | Method for producing high magnetic permeability MnZn ferrite | |
| JPS62143857A (en) | Non-magnetic material for magnetic head | |
| JP2859016B2 (en) | Porcelain for slider of magnetic head | |
| JP2949297B2 (en) | Porcelain composition for magnetic head | |
| JPH05319896A (en) | Nonmagnetic ceramics | |
| JPS62105986A (en) | Process for blackening zirconia ceramics | |
| JPS6177304A (en) | Manufacture of mn-zn ferrite | |
| JP3441300B2 (en) | Non-magnetic black ceramics | |
| JPS63134559A (en) | Non-magnetic ceramics for magnetic head | |
| JPS6251224B2 (en) | ||
| JPH0633168B2 (en) | Porcelain composition for magnetic head | |
| JPH01253210A (en) | Polycrystalline ferrite material and manufacture thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |