JP2853556B2 - Gas laser device - Google Patents
Gas laser deviceInfo
- Publication number
- JP2853556B2 JP2853556B2 JP6045825A JP4582594A JP2853556B2 JP 2853556 B2 JP2853556 B2 JP 2853556B2 JP 6045825 A JP6045825 A JP 6045825A JP 4582594 A JP4582594 A JP 4582594A JP 2853556 B2 JP2853556 B2 JP 2853556B2
- Authority
- JP
- Japan
- Prior art keywords
- laser
- optical window
- gas
- optical
- window
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003287 optical effect Effects 0.000 claims description 47
- 230000005540 biological transmission Effects 0.000 description 5
- 238000007796 conventional method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
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- Lasers (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、外部ミラー配置型ガス
レーザ装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an external mirror arrangement type gas laser device.
【０００２】[0002]
【従来の技術】従来の外部ミラー配置型ガスレーザ装置
については、例えば、特開昭５６−１６５３８３号公報
に記述されている。ここに記載されている従来のガスレ
ーザ装置を図３に示す。2. Description of the Related Art A conventional external mirror arrangement type gas laser apparatus is described in, for example, Japanese Patent Application Laid-Open No. 56-165383. The conventional gas laser device described here is shown in FIG.
【０００３】このガスレーザ装置は、レーザ光が励起さ
れるレーザ媒質ガス２２を封入したレーザ管１１、レー
ザ管１１から光を取り出すための平板光学窓２０、２
１、レーザ光を発振させるための出射鏡１８と全反射鏡
１９からなる共振器を有しており、図示の如く配置して
いる。This gas laser device comprises a laser tube 11 in which a laser medium gas 22 for exciting a laser beam is sealed, a flat optical window 20 for extracting light from the laser tube 11,
1. It has a resonator composed of an emission mirror 18 for oscillating laser light and a total reflection mirror 19, and is arranged as shown in the figure.
【０００４】このガスレーザにおいては、レーザ媒質ガ
ス２２中で励起されたレーザ光が、光学窓２１を通過
し、全反射鏡１９により折り返され、再び光学窓２１、
レーザ媒質ガス２２、光学窓２０を通過し、出射鏡１８
より出射する。ここで出射鏡１８は部分反射鏡であるた
め、出射しないレーザ光成分は、再び光学窓２０を通過
し、レーザ媒質ガス２２内に入射し、レーザ共振作用を
繰り返す。In this gas laser, a laser beam excited in a laser medium gas 22 passes through an optical window 21, is turned back by a total reflection mirror 19, and is returned to the optical window 21 again.
The laser medium gas 22 passes through the optical window 20 and exits from the exit mirror 18.
It emits more. Here, since the emission mirror 18 is a partial reflection mirror, the laser light component that does not emit light passes through the optical window 20 again, enters the laser medium gas 22, and repeats the laser resonance operation.
【０００５】[0005]
【発明が解決しようとする課題】ところで、従来の外部
ミラー配置型ガスレーザ装置では、レーザ共振器内に配
置した光学窓形状が１枚の平板であるため、レーザ管内
のガス圧が高くなるほど、機械的強度を保つために光学
窓を厚くする必要があり、その結果、レーザ光の光学窓
透過距離が長くなり、吸収損失等による共振器内損失が
大きくなって、出力の低下および光学窓の劣化が生じる
という問題があった。In the conventional external mirror-arranged gas laser apparatus, the optical window disposed in the laser resonator is a single flat plate. Therefore, as the gas pressure in the laser tube increases, the mechanical pressure increases. The optical window needs to be thickened to maintain the optical intensity, and as a result, the transmission distance of the laser beam to the optical window becomes longer, the loss in the cavity due to absorption loss and the like increases, and the output decreases and the optical window deteriorates. There was a problem that occurs.
【０００６】本発明の目的は、レーザ管内のあるガス圧
力状態に対して、光学窓の厚さを機械的強度を保ったま
ま従来装置より薄くすることで、レーザ光の光学窓透過
距離を短くし、共振器内損失を低減して、レーザ出力の
増加および光学窓の劣化の抑制を図り、より高出力で長
寿命光学窓を有する外部ミラー配置型ガスレーザ装置を
提供することにある。An object of the present invention is to reduce the transmission distance of laser light through the optical window by making the thickness of the optical window smaller than that of the conventional device while maintaining the mechanical strength under a certain gas pressure state in the laser tube. It is another object of the present invention to provide a gas laser device having an external mirror arrangement having a higher output and a longer life optical window by reducing the loss in the resonator and increasing the laser output and suppressing the deterioration of the optical window.
【０００７】[0007]
【課題を解決するための手段】本発明によるガスレーザ
装置は、レーザ光を発振させるための共振器、前記共振
器内にあってレーザ光が励起されるレーザ媒質ガス、前
記レーザ媒質ガスを封入したレーザ管、前記レーザ光を
前記レーザ管から取り出すための光学窓を有し、前記光
学窓の表面および裏面の双方が、多面体を用いた耐圧力
形状となっていることを特徴とする。A gas laser device according to the present invention includes a resonator for oscillating laser light, a laser medium gas in the resonator in which laser light is excited, and the laser medium gas sealed therein. It is characterized in that it has a laser tube and an optical window for extracting the laser light from the laser tube, and both the front surface and the rear surface of the optical window have a pressure-resistant shape using a polyhedron.
【０００８】[0008]
【作用】本発明によるガスレーザ装置においては、窓を
曲面体あるいは多面体を組み合わせた耐圧力構造として
いるため、一定のレーザ媒質ガス圧力状態に対して、光
学窓の厚さを機械的強度を保ったまま従来装置より薄く
することができる。この結果、レーザ光の光学窓透過距
離を短くし、共振器内損失および光学窓の劣化を抑え
て、レーザ出力の増加および光学窓の長寿命化を図るこ
とができる。In the gas laser device according to the present invention, since the window has a pressure-resistant structure formed by combining a curved surface or a polyhedron, the thickness of the optical window is kept mechanically strong under a constant laser medium gas pressure state. It can be thinner than the conventional device as it is. As a result, the laser light transmission distance of the optical window can be shortened, loss in the resonator and deterioration of the optical window can be suppressed, and the laser output can be increased and the life of the optical window can be extended.
【０００９】[0009]
【実施例】本発明の実施例を図面を用いて説明する。Embodiments of the present invention will be described with reference to the drawings.
【００１０】図１および図２は、本発明のガスレーザ装
置の一実施例を説明するための図である。FIG. 1 and FIG. 2 are views for explaining an embodiment of the gas laser device of the present invention.
【００１１】図１に示した本発明を用いたガスレーザ装
置は、レーザ光が励起されるレーザ媒質ガスを封入した
レーザ管１１、レーザ光をレーザ管から取り出すための
光学窓１２、１３、レーザ光を発振させるための出射鏡
１４と全反射鏡１５からなる共振器から構成される。配
置は図示の如くである。A gas laser apparatus using the present invention shown in FIG. 1 has a laser tube 11 in which a laser medium gas in which laser light is excited is sealed, optical windows 12 and 13 for extracting laser light from the laser tube, and a laser light. And a total reflection mirror 15 for oscillating the light. The arrangement is as shown.
【００１２】この発明によるガスレーザにおいては、光
学窓１２および１３が半球面形状をしている。このた
め、レーザ媒質ガス圧力ｐ、窓圧ｔ、曲率半径Ｒ、応力
σのとき、 ｔ＝ＰＲＷ／（１６０σ×η） である（規格ＪＩＳ Ｂ ８２０１）。ここで、窓形状
が半球面なので形状の係数Ｗ＝１、効率η＝１、また、
安全係数ｘ＝１／４である。In the gas laser according to the present invention, the optical windows 12 and 13 have a hemispherical shape. Therefore, when the laser medium gas pressure p, the window pressure t, the radius of curvature R, and the stress σ, t = PRW / (160σ × η) is satisfied (standard JIS B8201). Here, since the window shape is a hemispherical surface, the shape coefficient W = 1, the efficiency η = 1, and
The safety factor x = 1/4.
【００１３】これに対し、従来法では窓厚ｔ0 は、 ｔ0 2 ＝３（１＋ν）ｐＲ2 ／（８００σ） である。ここでνはポアソン比である。On the other hand, in the conventional method, the window thickness t 0 is t 0 2 = 3 (1 + ν) pR 2 / (800σ). Where ν is Poisson's ratio.
【００１４】従って、ν＝１／３、Ｒ＝２５mmのとき、
従来法における窓厚ｔ0 に対し、同じガス圧力におい
て、本発明の窓厚ｔは ｔ＝０．２×ｔ0 2 で与えられる。このため、本発明ではｔ0 が５mmより薄
い場合、 ｔ＜ｔ0 と従来法の窓厚よりも薄くなる。例えばｔ0 ＝４mmのと
きｔ＝３．２mmとなる。この結果、光学窓１２、１３に
おけるレーザ光の透過距離が従来装置より短くなり、共
振器内損失が低減し、高出力化および光学窓の長寿命化
が実現できる。Therefore, when ν = 1/3 and R = 25 mm,
To MadoAtsu t 0 in the conventional method, the same gas pressure, the window thickness t of the present invention is given by t = 0.2 × t 0 2. Therefore, in the present invention, when t 0 is smaller than 5 mm, t <t 0, which is smaller than the window thickness of the conventional method. For example, when t 0 = 4 mm, t = 3.2 mm. As a result, the transmission distance of the laser light in the optical windows 12 and 13 is shorter than that of the conventional device, the loss in the cavity is reduced, and high output and long life of the optical windows can be realized.
【００１５】ただし、本構成では、光学窓１２、１３に
おいてレーザ光の拡散が生じる場合があるため、出力鏡
１４および全反射鏡１５を凹面鏡にして共振器内光路を
補正する必要がある。However, in this configuration, since laser light may be diffused in the optical windows 12 and 13, it is necessary to correct the optical path in the resonator by using the output mirror 14 and the total reflection mirror 15 as concave mirrors.
【００１６】図２に示した本発明を用いたガスレーザ装
置は、レーザ光が励起されるレーザ媒質ガスを封入した
レーザ管１１、レーザ光をレーザ管から取り出すための
光学窓１６、１７、レーザ光を発振させるための出射鏡
１８と全反射鏡１９からなる共振器から構成される。配
置は図示の如くである。The gas laser apparatus using the present invention shown in FIG. 2 has a laser tube 11 in which a laser medium gas for exciting a laser beam is sealed, optical windows 16 and 17 for extracting the laser beam from the laser tube, and a laser beam. And a resonator composed of an exit mirror 18 and a total reflection mirror 19 for oscillating light. The arrangement is as shown.
【００１７】この発明によるガスレーザにおいては、光
学窓１６および１７が、図１の光学窓１２、１３の曲面
を平面に置き換えた多面体構造となっている。ここで窓
厚さｔ2 は、 ｔ≦ｔ2 ＜ｔ0 とする。この結果、光学窓１６、１７における耐圧強度
は光学窓１２、１３と同等かそれ以上となり、また、レ
ーザ光の透過距離が従来装置より短くなる。このため、
共振器内損失が低減し、高出力化および光学窓の長寿命
化が実現できる。In the gas laser according to the present invention, the optical windows 16 and 17 have a polyhedral structure in which the curved surfaces of the optical windows 12 and 13 in FIG. Here, the window thickness t 2 is set to t ≦ t 2 <t 0 . As a result, the pressure resistance of the optical windows 16 and 17 is equal to or higher than that of the optical windows 12 and 13, and the transmission distance of the laser beam is shorter than that of the conventional device. For this reason,
The loss in the cavity is reduced, and higher output and longer life of the optical window can be realized.
【００１８】さらに、光学窓１６、１７は多面体である
ため、レーザ光の拡散は生じないので、出力鏡１８およ
び全反射鏡１９の形状を補正する必要が無い。Further, since the optical windows 16 and 17 are polyhedral, laser light does not diffuse, so that it is not necessary to correct the shapes of the output mirror 18 and the total reflection mirror 19.
【００１９】[0019]
【発明の効果】以上述べたように、本発明によれば、レ
ーザ管内のあるガス圧力状態に対して、光学窓の厚さを
機械的強度を保ったまま従来装置より薄くすることがで
きるため、レーザ光の光学窓距離を短くし、共振器内損
失を低減して、レーザ出力の増加および光学窓の劣化を
図り、より高出力で長寿命光学窓を有する外部ミラー配
置型ガスレーザ装置を提供できる。As described above, according to the present invention, the thickness of the optical window can be made smaller than that of the conventional apparatus while maintaining the mechanical strength under a certain gas pressure state in the laser tube. Providing an external mirror arrangement type gas laser device which has a shorter optical window length of laser light, reduces the loss in the cavity, increases the laser output and deteriorates the optical window, and has a higher output and a longer life optical window. it can.
【図１】本発明のガスレーザ装置の一実施例を示す図。FIG. 1 is a diagram showing one embodiment of a gas laser device of the present invention.
【図２】本発明のガスレーザ装置の一実施例を示す図。FIG. 2 is a diagram showing one embodiment of the gas laser device of the present invention.
【図３】従来のガスレーザ装置を示す図。FIG. 3 is a diagram showing a conventional gas laser device.
１１ レーザ管 １２ 半球面光学窓 １３ 半球面光学窓 １４ 半球面光学窓用出力鏡 １５ 半球面光学窓用出力鏡 １６ 多面体光学窓 １７ 多面体光学窓 １８ 出力鏡 １９ 全反射鏡 ２０ 平板光学窓 ２１ 平板光学窓 ２２ レーザ媒質ガス Reference Signs List 11 laser tube 12 hemispherical optical window 13 hemispherical optical window 14 output mirror for hemispherical optical window 15 output mirror for hemispherical optical window 16 polyhedral optical window 17 polyhedral optical window 18 output mirror 19 total reflection mirror 20 flat optical window 21 flat plate Optical window 22 Laser medium gas
Claims (1)
記共振器内にあってレーザ光が励起されるレーザ媒質の
封入し、前記レーザ光を取り出すための光学窓を備えた
レーザ管を有するガスレーザ装置において、前記光学窓
の表面および裏面の双方が、多面体を用いた耐圧力形状
となっていることを特徴とするガスレーザ装置。A laser tube having a resonator for oscillating laser light, a laser medium in the resonator for enclosing a laser medium for exciting laser light, and an optical window for extracting the laser light. The gas laser device according to claim 1, wherein both the front surface and the back surface of the optical window have a pressure-resistant shape using a polyhedron.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6045825A JP2853556B2 (en) | 1994-03-16 | 1994-03-16 | Gas laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6045825A JP2853556B2 (en) | 1994-03-16 | 1994-03-16 | Gas laser device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07254739A JPH07254739A (en) | 1995-10-03 |
| JP2853556B2 true JP2853556B2 (en) | 1999-02-03 |
Family
ID=12730028
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6045825A Expired - Fee Related JP2853556B2 (en) | 1994-03-16 | 1994-03-16 | Gas laser device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2853556B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4899161B2 (en) * | 2007-06-04 | 2012-03-21 | ギガフォトン株式会社 | Excimer laser equipment |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56165383A (en) * | 1980-05-26 | 1981-12-18 | Nec Corp | Gas laser tube |
| JPS57159076A (en) * | 1981-02-25 | 1982-10-01 | Rekuseru Corp | Laser device |
| JPH04245685A (en) * | 1991-01-31 | 1992-09-02 | Toshiba Corp | Gas laser |
-
1994
- 1994-03-16 JP JP6045825A patent/JP2853556B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07254739A (en) | 1995-10-03 |
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