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JP2856147B2 - Piezoelectric ceramic composition - Google Patents
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JP2856147B2 - Piezoelectric ceramic composition - Google Patents

Piezoelectric ceramic composition

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Publication number
JP2856147B2
JP2856147B2 JP8137905A JP13790596A JP2856147B2 JP 2856147 B2 JP2856147 B2 JP 2856147B2 JP 8137905 A JP8137905 A JP 8137905A JP 13790596 A JP13790596 A JP 13790596A JP 2856147 B2 JP2856147 B2 JP 2856147B2
Authority
JP
Japan
Prior art keywords
composition
lead
mol
point
piezoelectric ceramic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP8137905A
Other languages
Japanese (ja)
Other versions
JPH09315856A (en
Inventor
英正 河合
康弘 佐々木
貞行 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
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Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP8137905A priority Critical patent/JP2856147B2/en
Publication of JPH09315856A publication Critical patent/JPH09315856A/en
Application granted granted Critical
Publication of JP2856147B2 publication Critical patent/JP2856147B2/en
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Expired - Fee Related legal-status Critical Current

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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は圧電磁器組成物に係
り、特に電気エネルギーを機械的振動エネルギーに変換
することができる圧電磁器組成物に関する。
The present invention relates to a piezoelectric ceramic composition, and more particularly to a piezoelectric ceramic composition capable of converting electric energy into mechanical vibration energy.

【0002】[0002]

【従来の技術】電気エネルギーを機械的振動エネルギー
に変換することができる圧電磁器組成物は、圧電トラン
ス、圧電アクチュエータ及び超音波モータなど、動力分
野の製品への応用がなされている。これらの応用に対し
て圧電磁器組成物は、その用途に応じて小さい機械的出
力から極めて大きな機械的出力まで広範囲にわたり高効
率で電気−機械エネルギー変換が行われることが求めら
れる。従って、これらの応用に対し、圧電磁器組成物に
は、電気エネルギーから機械的な振動エネルギーへの変
換の際のエネルギー損失が抑制されることが求められ
る。また、デバイスの製造の際、はんだリフローなどの
熱処理工程を必要とするため、高キュリー点材料が求め
られている。
2. Description of the Related Art Piezoelectric ceramic compositions capable of converting electric energy into mechanical vibration energy have been applied to products in the field of power, such as piezoelectric transformers, piezoelectric actuators and ultrasonic motors. For these applications, the piezoelectric ceramic composition is required to perform electro-mechanical energy conversion with high efficiency over a wide range from a small mechanical output to an extremely large mechanical output depending on the application. Therefore, for these applications, the piezoelectric ceramic composition is required to suppress the energy loss when converting electric energy to mechanical vibration energy. In addition, since a heat treatment step such as solder reflow is required when manufacturing a device, a high Curie point material is required.

【0003】従来、高キュリー点を有する圧電磁器組成
物として、イッテルビウム・ニオブ酸鉛[Pb(Yb
1/2Nb1/2)O3]及びチタン酸鉛[PbTiO3]の2
成分からなる組成物が知られている。しかし、この圧電
磁器組成物は大きな機械的出力を得るために、高電圧を
印加すると、強誘電体分域壁の運動に伴い発生する内部
摩擦のため、エネルギー損失が起こり、その振動レベル
限界はせいぜい0.1m/s程度であった。
Conventionally, as a piezoelectric ceramic composition having a high Curie point, lead ytterbium niobate [Pb (Yb
1/2 Nb 1/2 ) O 3 ] and lead titanate [PbTiO 3 ]
Compositions consisting of components are known. However, when a high voltage is applied to this piezoelectric ceramic composition to obtain a large mechanical output, energy loss occurs due to internal friction caused by the movement of the ferroelectric domain wall, and the vibration level limit is It was at most about 0.1 m / s.

【0004】なお、本明細書でいう「振動レベル」と
は、圧電振動子のハイパワー特性の自動測定(広瀬清
二、電子情報通信学会US92−3)で報告されている
ように、光学式変位測定器から得られる振動子の最大先
端振動振幅ξmと振動子の共振周波数f0の測定から算
出できる実効的振動速度v0とし、振動レベルの増加に
伴い振動子の内部エネルギー損失による発熱が室温+2
0℃となる振動速度を振動レベルの限界と定義してい
る。
[0004] The term "vibration level" as used herein means an optical displacement as reported in the automatic measurement of the high power characteristic of a piezoelectric vibrator (Seiji Hirose, Institute of Electronics, Information and Communication Engineers, US92-3). The effective vibration velocity v 0 can be calculated from the measurement of the maximum tip vibration amplitude ξm of the vibrator obtained from the measuring instrument and the resonance frequency f 0 of the vibrator. As the vibration level increases, the heat generated by the internal energy loss of the vibrator generates room temperature. +2
The vibration speed at which the temperature reaches 0 ° C. is defined as the limit of the vibration level.

【0005】[0005]

【発明が解決しようとする課題】上記の従来の圧電磁器
組成物は、0.1m/s程度を上限とした低振動レベル
(速度)での駆動となるため、大きな機械的出力が要求
される動力デバイスへの応用は困難であった。
The above-mentioned conventional piezoelectric ceramic composition is driven at a low vibration level (speed) with an upper limit of about 0.1 m / s, so that a large mechanical output is required. Application to power devices has been difficult.

【0006】本発明は以上の点に鑑みなされたもので、
イッテルビウム・ニオブ酸鉛[Pb(Yb1/2Nb1/2
3]とチタン酸鉛[PbTiO3]からなる2成分組成
物に、所定の組成物を加えた3成分組成とすることによ
り、振動レベルの限界v0maxを4倍以上向上させた
圧電磁器組成物を提供することを目的とする。
[0006] The present invention has been made in view of the above points,
Ytterbium lead niobate [Pb (Yb 1/2 Nb 1/2 )
Piezoelectric ceramic having a three-component composition obtained by adding a predetermined composition to a two-component composition consisting of O 3 ] and lead titanate [PbTiO 3 ], thereby improving the vibration level limit v 0 max four times or more. It is intended to provide a composition.

【0007】[0007]

【課題を解決するための手段】上記の目的を達成するた
め、請求項1記載の第1の発明は、マンガン・アンチモ
ン酸鉛[Pb(Mn1/3Sb2/3)O3]と、イッテルビ
ウム・ニオブ酸鉛[Pb(Yb1/2Nb1/2)O3]と、
チタン酸鉛[PbTiO3]からなり、組成式[Pb
(Mn1/3Sb2/3)O3]x[Pb(Yb1/2Nb1/2
3]y[PbTiO3]z(ただし、x+y+z=1)
で表される3成分組成物であって、組成式のx、y及び
zが3元組成図において、x=0.15、y=0.6
0、z=0.25の第1の点と、x=0.03、y=
0.72、z=0.25の第2の点と、x=0.03、
y=0.42、z=0.55の第3の点と、x=0.1
5、y=0.30、z=0.55の第4の点とを結ぶ線
上及びこれら第1乃至第4の点で囲まれた領域内で規定
される組成を有することを特徴とする。
In order to achieve the above object, a first aspect of the present invention is directed to a manganese lead antimonate [Pb (Mn 1/3 Sb 2/3 ) O 3 ], Ytterbium lead niobate [Pb (Yb 1/2 Nb 1/2 ) O 3 ];
It consists of lead titanate [PbTiO 3 ] and has a composition formula [Pb
(Mn 1/3 Sb 2/3 ) O 3 ] x [Pb (Yb 1/2 Nb 1/2 )
O 3 ] y [PbTiO 3 ] z (where x + y + z = 1)
Wherein x, y, and z in the composition formula are x = 0.15, y = 0.6 in the ternary composition diagram.
0, a first point at z = 0.25, x = 0.03, y =
A second point at 0.72, z = 0.25, and x = 0.03,
a third point where y = 0.42, z = 0.55, and x = 0.1
5, characterized by having a composition defined on a line connecting the fourth point of y = 0.30 and z = 0.55 and in a region surrounded by the first to fourth points.

【0008】図1はこの第1の発明の圧電磁器組成物の
3成分組成図を示す。同図において、a、b、c及びd
はそれぞれ上記の第1、第2、第3及び第4の点を示し
ており、これら各点a〜dを結ぶ線分で囲まれた領域
(線分上を含む)1内の組成により、第1の発明の圧電
磁器組成物が構成される。
FIG. 1 shows a three-component composition diagram of the piezoelectric ceramic composition of the first invention. In the figure, a, b, c and d
Indicates the first, second, third, and fourth points, respectively. According to the composition in a region 1 (including on the line segment) surrounded by a line connecting these points a to d, The piezoelectric ceramic composition of the first invention is constituted.

【0009】請求項2記載の第2の発明は、マンガン・
ニオブ酸鉛[Pb(Mn1/3Nb2/3)O3]と、[Pb
(Yb1/2Nb1/2)O3]及び[PbTiO3]からな
り、組成式[Pb(Mn1/3Nb2/3)O3]x[Pb
(Yb1/2Nb1/2)O3]y[PbTiO3]z(ただ
し、x+y+z=1)で表される3成分組成物であっ
て、組成式のx、y及びzが3元組成図において、x=
0.03、y=0.60、z=0.37の第1の点と、
x=0.005、y=0.625、z=0.37の第2
の点と、x=0.005、y=0.485、z=0.5
1の第3の点と、x=0.03、y=0.46、z=
0.51の第4の点とを結ぶ線上及びこれら第1乃至第
4の点で囲まれた領域内で規定される組成を有すること
を特徴とする。
[0009] The second invention according to claim 2 is a manganese compound.
Lead niobate [Pb (Mn 1/3 Nb 2/3 ) O 3 ] and [Pb
(Yb 1/2 Nb 1/2 ) O 3 ] and [PbTiO 3 ], and has the composition formula [Pb (Mn 1/3 Nb 2/3 ) O 3 ] x [Pb
A three-component composition represented by (Yb 1/2 Nb 1/2 ) O 3 ] y [PbTiO 3 ] z (where x + y + z = 1), wherein x, y and z in the composition formula are ternary compositions In the figure, x =
A first point of 0.03, y = 0.60, z = 0.37;
Second of x = 0.005, y = 0.625, z = 0.37
And x = 0.005, y = 0.485, z = 0.5
1 and x = 0.03, y = 0.46, z =
It has a composition defined on a line connecting the fourth point of 0.51 and an area surrounded by the first to fourth points.

【0010】図2はこの第2の発明の圧電磁器組成物の
3成分組成図を示す。同図において、a、b、c及びd
はそれぞれ上記の第1、第2、第3及び第4の点を示し
ており、これら各点a〜dを結ぶ線分で囲まれた領域
(線分上を含む)2内の組成により、第2の発明の圧電
磁器組成物が構成される。
FIG. 2 shows a three-component composition diagram of the piezoelectric ceramic composition of the second invention. In the figure, a, b, c and d
Indicates the first, second, third, and fourth points, respectively, and according to the composition in a region (including on the line segment) 2 surrounded by a line connecting these points a to d, The piezoelectric ceramic composition of the second invention is constituted.

【0011】また、請求項3記載の第3の発明は、マン
ガン・タングステン酸鉛[Pb(Mn1/21/2)O3
と、[Pb(Yb1/2Nb1/2)O3]及び[PbTi
3]からなり、組成式[Pb(Mn1/21/2)O3]x
[Pb(Yb1/2Nb1/2)O3]y[PbTiO3]z
(ただし、x+y+z=1)で表される3成分組成物で
あって、組成式のx、y及びzが3元組成図において、
x=0.03、y=0.60、z=0.37の第1の点
と、x=0.005、y=0.625、z=0.37の
第2の点と、x=0.005、y=0.485、z=
0.51の第3の点と、x=0.03、y=0.46、
z=0.51の第4の点とを結ぶ線上及びこれら第1乃
至第4の点で囲まれた領域内で規定される組成を有する
ことを特徴とする。
A third aspect of the present invention is directed to a manganese lead tungstate [Pb (Mn 1/2 W 1/2 ) O 3 ].
And [Pb (Yb 1/2 Nb 1/2 ) O 3 ] and [PbTi
O 3 ] and a composition formula [Pb (Mn 1/2 W 1/2 ) O 3 ] x
[Pb (Yb 1/2 Nb 1/2) O 3] y [PbTiO 3] z
(Where x + y + z = 1), wherein x, y and z in the composition formula are represented by a ternary composition diagram:
a first point at x = 0.03, y = 0.60, z = 0.37, a second point at x = 0.005, y = 0.625, z = 0.37, and x = 0.005, y = 0.485, z =
A third point of 0.51, x = 0.03, y = 0.46,
It has a composition defined on a line connecting the fourth point of z = 0.51 and in a region surrounded by the first to fourth points.

【0012】図3はこの第3の発明の圧電磁器組成物の
3成分組成図を示す。同図において、a、b、c及びd
はそれぞれ上記の第1、第2、第3及び第4の点を示し
ており、これら各点a〜dを結ぶ線分で囲まれた領域
(線分上を含む)3内の組成により、第3の発明の圧電
磁器組成物が構成される。
FIG. 3 shows a three-component composition diagram of the piezoelectric ceramic composition of the third invention. In the figure, a, b, c and d
Indicates the first, second, third, and fourth points, respectively, and according to the composition in a region 3 (including on the line segment) surrounded by a line connecting these points a to d, The piezoelectric ceramic composition of the third invention is constituted.

【0013】更に、請求項4記載の第4の発明は、マン
ガン・タンタル酸鉛[Pb(Mn1/3Ta2/3)O3
と、[Pb(Yb1/2Nb1/2)O3]及び[PbTi
3]からなり、組成式[Pb(Mn1/3Ta2/3)O3
x[Pb(Yb1/2Nb1/2)O3]y[PbTiO3]z
(ただし、x+y+z=1)で表される3成分組成物で
あって、組成式のx、y及びzが3元組成図において、
x=0.06、y=0.57、z=0.37の第1の点
と、x=0.005、y=0.625、z=0.37の
第2の点と、x=0.005、y=0.485、z=
0.51の第3の点と、x=0.06、y=0.43、
z=0.51の第4の点とを結ぶ線上及びこれら第1乃
至第4の点で囲まれた領域内で規定される組成を有する
ことを特徴とする。
A fourth aspect of the present invention is directed to a manganese-lead tantalate [Pb (Mn 1/3 Ta 2/3 ) O 3 ].
And [Pb (Yb 1/2 Nb 1/2 ) O 3 ] and [PbTi
O 3 ] and a composition formula [Pb (Mn 1/3 Ta 2/3 ) O 3 ]
x [Pb (Yb 1/2 Nb 1/2 ) O 3] y [PbTiO 3] z
(Where x + y + z = 1), wherein x, y and z in the composition formula are represented by a ternary composition diagram:
a first point at x = 0.06, y = 0.57, z = 0.37, a second point at x = 0.005, y = 0.625, z = 0.37, and x = 0.005, y = 0.485, z =
A third point of 0.51, x = 0.06, y = 0.43,
It has a composition defined on a line connecting the fourth point of z = 0.51 and in a region surrounded by the first to fourth points.

【0014】図4はこの第4の発明の圧電磁器組成物の
3成分組成図を示す。同図において、a、b、c及びd
はそれぞれ上記の第1、第2、第3及び第4の点を示し
ており、これら各点a〜dを結ぶ線分で囲まれた領域
(線分上を含む)4内の組成により、第4の発明の圧電
磁器組成物が構成される。
FIG. 4 shows a three-component composition diagram of the piezoelectric ceramic composition of the fourth invention. In the figure, a, b, c and d
Indicates the first, second, third, and fourth points, respectively. According to the composition in a region 4 (including on the line segment) surrounded by a line connecting these points a to d, The piezoelectric ceramic composition of the fourth invention is constituted.

【0015】更に、3成分組成物の組成式中のPbを、
カルシウム、ストロンチウム及びバリウムのうちのいず
れか一元素により15mol%以下の量で置換すること
を特徴とし、また、3成分組成物の組成式中のPbを、
0.1〜10mol%の範囲内で減じたことを特徴とす
る。
Further, Pb in the composition formula of the three-component composition is
It is characterized by being replaced by any one element of calcium, strontium and barium in an amount of 15 mol% or less, and Pb in the composition formula of the ternary composition is
It is characterized by being reduced within the range of 0.1 to 10 mol%.

【0016】本発明では、イッテルビウム・ニオブ酸鉛
[Pb(Yb1/2Nb1/2)O3]とチタン酸鉛[PbT
iO3]からなる2成分組成物に、マンガン・アンチモ
ン酸鉛[Pb(Mn1/3Sb2/3)O3]、マンガン・ニ
オブ酸鉛[Pb(Mn1/2Nb1/2)O3]、マンガン・
タングステン酸鉛[Pb(Mn1/21/2)O3]あるい
はマンガン・タンタル酸鉛[Pb(Mn1/3Ta2/3)O
3]のいずれか一つの組成物を所定の範囲内で加えた3
成分組成物の構成とすることにより、内部摩擦を低減で
きるため、0.4m/s以上の振動レベル限界の圧電磁
器組成物を得ることができる。また、上記の3成分組成
物の組成式中のPbを所定のあるいは減少させても、高
い比誘電率と0.4m/s以上の振動レベル限界の圧電
磁器組成物を得ることができる。
In the present invention, lead ytterbium niobate [Pb (Yb 1/2 Nb 1/2 ) O 3 ] and lead titanate [PbT
iO 3 ], a manganese lead antimonate [Pb (Mn 1/3 Sb 2/3 ) O 3 ] and a manganese lead niobate [Pb (Mn 1/2 Nb 1/2 ) O] 3 ], manganese
Lead tungstate [Pb (Mn 1/2 W 1/2 ) O 3 ] or manganese lead tantalate [Pb (Mn 1/3 Ta 2/3 ) O]
3 ] wherein any one of the above compositions is added within a predetermined range.
Since the internal friction can be reduced by the composition of the component composition, a piezoelectric ceramic composition having a vibration level limit of 0.4 m / s or more can be obtained. Further, even if Pb in the composition formula of the above three-component composition is predetermined or reduced, a piezoelectric ceramic composition having a high relative dielectric constant and a vibration level limit of 0.4 m / s or more can be obtained.

【0017】[0017]

【発明の実施の形態】次に、本発明の実施の形態につい
て図面と共に説明する。本発明の材料を得る出発原料と
して、酸化鉛(PbO)、酸化チタン(TiO2)、炭
酸マンガン(MnCO3)、酸化アンチモン(Sb
23)、酸化イッテルビウム(Yb23)、酸化ニオブ
(Nb25)、酸化タングステン(WO3)、酸化タン
タル(TaO)、炭酸カルシウム(CaCO3)、炭酸
ストロンチウム(SrCO3)及び炭酸バリウム(Ba
CO3)の各粉末を用いた。ここで、MnCO3、CaC
3、SrCO3及びBaCO3は、各々MnO、Ca
O、SrO及びBaOに換算して必要量得るようにし
た。
Next, embodiments of the present invention will be described with reference to the drawings. As a starting material to obtain a material of the present invention, lead oxide (PbO), titanium oxide (TiO 2), manganese carbonate (MnCO 3), antimony oxide (Sb
2 O 3 ), ytterbium oxide (Yb 2 O 3 ), niobium oxide (Nb 2 O 5 ), tungsten oxide (WO 3 ), tantalum oxide (TaO), calcium carbonate (CaCO 3 ), strontium carbonate (SrCO 3 ) and Barium carbonate (Ba
Each powder of CO 3 ) was used. Here, MnCO 3 , CaC
O 3 , SrCO 3 and BaCO 3 are respectively MnO, Ca
The required amounts were obtained in terms of O, SrO and BaO.

【0018】合成は2段階に分けた。第1段階としてま
ず、YbNbO合成のために酸化イッテルビウムと酸
化ニオブをボールミルによる湿式混合後、混合粉末を1
125℃、1h、大気中で仮焼しYbNbOを得た。
第2段階として前記YbNbOと残りの組成物を混合
し、850℃、2h、大気中で仮焼した。仮焼粉を粉砕
後、造粒、成形し、1000℃、2時間、大気中で焼成
を行い、長さ60mm、幅30mm、厚さ10mmの焼
結ブロックを得た。
The synthesis was divided into two stages. As the first step, first, ytterbium oxide and niobium oxide are wet-mixed with a ball mill for synthesizing YbNbO 4 , and then the mixed powder is mixed.
Calcination was performed in the air at 125 ° C. for 1 hour to obtain YbNbO 4 .
As a second step, the YbNbO 4 and the remaining composition were mixed and calcined at 850 ° C. for 2 hours in the air. The calcined powder was pulverized, granulated, molded, and fired in the air at 1000 ° C. for 2 hours to obtain a sintered block having a length of 60 mm, a width of 30 mm, and a thickness of 10 mm.

【0019】このブロックを切断、研磨により43×7
×1mmの矩形板に加工した後、相対向する両主面に
銀電極を焼き付け、100℃の絶縁油中で4kV/mm
の直流電界を1時間印加して分極処理を施した。24時
間室温放置した後、定電流駆動回路により圧電横効果長
さ縦振動の基本モードを励振させ、振動レベル限界の測
定を行った。振動レベルは光学式変位測定器から得られ
る振動子の最大先端振動振幅ξmと振動子の共振周波数
の測定から算出できる次式の実効的振動速度v
表した。
This block is cut and polished to 43 × 7
After processing into a rectangular plate of × 1 mm t , silver electrodes were baked on both opposing main surfaces, and 4 kV / mm in 100 ° C. insulating oil.
Was applied for one hour to perform a polarization treatment. After standing at room temperature for 24 hours, the fundamental mode of the piezoelectric transverse effect length longitudinal vibration was excited by the constant current drive circuit, and the vibration level limit was measured. Vibration level was expressed by the effective vibration velocity v 0 of the following formula can be calculated from measurements of the resonance frequency f 0 of the maximum tip vibration amplitude ξm the vibrator of the vibrator resulting from the optical displacement measuring instrument.

【0020】 v=√2πfξm (1) 振動レベル(速度)限界は圧電振動子の振動の節点に設
けられた熱電対の温度測定により、その振動子の内部エ
ネルギー損失により誘起される温度上昇(振動子の温度
と室温の差)ΔTが20℃になる振動速度をv0max
と表し、これを振動レベル限界とした。
V 0 = {2πf 0 } m (1) The vibration level (speed) limit is a temperature induced by internal energy loss of the vibrator by measuring the temperature of a thermocouple provided at a node of vibration of the piezoelectric vibrator. increasing the vibration speed (temperature and the difference between the room temperature of the vibrator) [Delta] T is 20 ° C. v 0max
And this was taken as the vibration level limit.

【0021】まず、マンガン・アンチモン酸鉛[Pb
(Mn1/3Sb2/3)O]と、イッテルビウム・
ニオブ酸鉛[Pb(Yb1/2Nb1/2)O]と、
チタン酸鉛[PbTiO]からなり、組成式[Pb
(Mn1/3Sb2/3)O]x[Pb(Yb1/2
Nb1/2)O]y[PbTiO]z(ただし、x
+y+z=1)で表される3成分組成物の主成分配合
比、キュリー温度、比誘電率及び振動レベル限界の相関
を表1に示す。なお、表1中、試料番号の右に記された
*は、3mol%≦x≦15mol%、30mol%≦
y≦72mol%、25mol%≦z≦55mol%の
範囲外の試料番号である。
First, manganese lead antimonate [Pb
(Mn 1/3 Sb 2/3 ) O 3 ] and ytterbium.
Lead niobate [Pb (Yb 1/2 Nb 1/2 ) O 3 ];
It consists of lead titanate [PbTiO 3 ] and has a composition formula [Pb
(Mn 1/3 Sb 2/3 ) O 3 ] x [Pb (Yb 1/2
Nb 1/2 ) O 3 ] y [PbTiO 3 ] z (where x
+ Y + z = 1) Table 1 shows the correlation among the main component mixture ratio, the Curie temperature, the relative dielectric constant, and the vibration level limit of the three-component composition represented by + y + z = 1). In Table 1, * written on the right of the sample number indicates 3 mol% ≦ x ≦ 15 mol% and 30 mol% ≦
The sample number is out of the range of y ≦ 72 mol% and 25 mol% ≦ z ≦ 55 mol%.

【0022】[0022]

【表1】 また、マンガン・ニオブ酸鉛[Pb(Mn1/3Nb
2/3)O]と、イッテルビウム・ニオブ酸鉛[Pb
(Yb1/2Nb1/2)O]と、チタン酸鉛[Pb
TiO]からなり、組成式[Pb(Mn1/3Nb
2/3)O]x[Pb(Yb1/2Nb1/2
]y[PbTiO]z(ただし、x+y+z=
1)で表される3成分組成物の主成分配合比、キュリー
温度、比誘電率及び振動レベル限界の相関を表2に示
す。なお、表2中、試料番号の右に記された*は、0.
5mol%≦x≦3mol%、46mol%≦y≦6
2.5mol%、37mol%≦z≦51mol%の範
囲外の試料番号である。
[Table 1] In addition, manganese lead niobate [Pb (Mn 1/3 Nb
2/3 ) O 3 ] and ytterbium lead niobate [Pb
(Yb 1/2 Nb 1/2 ) O 3 ] and lead titanate [Pb
TiO 3 ] and a composition formula [Pb (Mn 1/3 Nb)
2/3 ) O 3 ] x [Pb (Yb 1/2 Nb 1/2 )
O 3 ] y [PbTiO 3 ] z (where x + y + z =
Table 2 shows the correlation among the main component mixing ratio, Curie temperature, relative dielectric constant and vibration level limit of the three-component composition represented by 1). In Table 2, * on the right side of the sample number indicates 0.
5 mol% ≦ x ≦ 3 mol%, 46 mol% ≦ y ≦ 6
The sample numbers are out of the range of 2.5 mol% and 37 mol% ≦ z ≦ 51 mol%.

【0023】[0023]

【表2】 また、マンガン・タングステン酸鉛[Pb(Mn1/3
2/3)O]と、イッテルビウム・ニオブ酸鉛[P
b(Yb1/2Nb1/2)O]と、チタン酸鉛[P
bTiO]からなり、組成式[Pb(Mn1/3
2/3)O]x[Pb(Yb1/2Nb1/2
]y[PbTiO]z(ただし、x+y+z=
1)で表される3成分組成物の主成分配合比、キュリー
温度、比誘電率及び振動レベル限界の相関を表3に示
す。なお、表3中、試料番号の右に記された*は、0.
5mol%≦x≦3mol%、46mol%≦y≦6
2.5mol%、37mol%≦z≦51mol%の範
囲外の試料番号である。
[Table 2] In addition, manganese lead tungstate [Pb (Mn 1/3
W 2/3 ) O 3 ] and ytterbium lead niobate [P
b (Yb 1/2 Nb 1/2 ) O 3 ] and lead titanate [P
bTiO 3 ] and a composition formula [Pb (Mn 1/3 W
2/3 ) O 3 ] x [Pb (Yb 1/2 Nb 1/2 )
O 3 ] y [PbTiO 3 ] z (where x + y + z =
Table 3 shows the correlation among the main component mixing ratio, Curie temperature, relative permittivity, and vibration level limit of the three-component composition represented by 1). In Table 3, the asterisk (*) to the right of the sample number indicates a value of 0.
5 mol% ≦ x ≦ 3 mol%, 46 mol% ≦ y ≦ 6
The sample numbers are out of the range of 2.5 mol% and 37 mol% ≦ z ≦ 51 mol%.

【0024】[0024]

【表3】 また、マンガン・タンタル酸鉛[Pb(Mn1/3Ta
2/3)O]と、イッテルビウム・ニオブ酸鉛[Pb
(Yb1/2Nb1/2)O]と、チタン酸鉛[Pb
TiO]からなり、組成式[Pb(Mn1/3Ta
2/3)O]x[Pb(Yb1/2Nb1/2
]y[PbTiO]z(ただし、x+y+z=
1)で表される3成分組成物の主成分配合比、キュリー
温度、比誘電率及び振動レベル限界の相関を表4に示
す。なお、表4中、試料番号の右に記された*は、0.
5mol%≦x≦6mol%、43mol%≦y≦6
2.5mol%、37mol%≦z≦51mol%の範
囲外の試料番号である。
[Table 3] In addition, manganese lead tantalate [Pb (Mn 1/3 Ta)
2/3 ) O 3 ] and ytterbium lead niobate [Pb
(Yb 1/2 Nb 1/2 ) O 3 ] and lead titanate [Pb
TiO 3 ] and a composition formula [Pb (Mn 1/3 Ta)
2/3 ) O 3 ] x [Pb (Yb 1/2 Nb 1/2 )
O 3 ] y [PbTiO 3 ] z (where x + y + z =
Table 4 shows the correlation among the main component mixing ratio, Curie temperature, relative dielectric constant and vibration level limit of the three-component composition represented by 1). In Table 4, * on the right of the sample number indicates 0.
5 mol% ≦ x ≦ 6 mol%, 43 mol% ≦ y ≦ 6
The sample numbers are out of the range of 2.5 mol% and 37 mol% ≦ z ≦ 51 mol%.

【0025】[0025]

【表4】 ここで、表1〜表4及び後述の表5〜表16において、
PMS、PMN、PMW、PMT、PYN、PTはそれ
ぞれマンガン・アンチモン酸鉛[Pb(Mn /3Sb
2/3)O]、マンガン・ニオブ酸鉛[Pb(Mn
1/3Nb2/3)O]、マンガン・タングステン酸
鉛[Pb(Mn1/32/3)O]、マンガン・タ
ンタル酸鉛[Pb(Mn1/3Ta2/3)O]、イ
ッテルビウム・ニオブ酸鉛[Pb(Yb1/3Nb
2/3)O]、及びチタン酸鉛[PbTiO]の略
称を示す。
[Table 4] Here, in Tables 1 to 4 and Tables 5 to 16 described below,
PMS, PMN, PMW, PMT, PYN, PT each manganese, antimony, lead [Pb (Mn 1/3 Sb
2/3 ) O 3 ], manganese lead niobate [Pb (Mn)
1/3 Nb 2/3 ) O 3 ], manganese lead tungstate [Pb (Mn 1/3 W 2/3 ) O 3 ], manganese lead tantalate [Pb (Mn 1/3 Ta 2/3 ) O 3 ], ytterbium lead niobate [Pb (Yb 1/3 Nb
2/3 ) O 3 ] and lead titanate [PbTiO 3 ].

【0026】次に、上記の各3成分組成物における組成
物の配合比率を限定した理由について表1〜表4に従い
説明する。まず、PMS、PMN、PMWあるいはPM
Tの配合比率x(ただし、%表示)を、表1においては
3mol%≦x≦15mol%、表2及び表3において
はそれぞれ0.5mol%≦x≦3mol%、表4にお
いては0.5mol%≦x≦6mol%に定めた理由
は、配合比率0mol%(例えば表1の試料番号1〜4
参照)であると、強誘電体分域壁の運動に伴い内部摩擦
による損失が大きいため、振動レベル限界は低く、一
方、表1では15mol%、表2及び表3では3mol
%、表4では6mol%を越えると、パイロクロア等の
異相が生成し、従って弾性的な損失を引き起こすからで
ある。
Next, the reasons for limiting the compounding ratio of each of the above three-component compositions will be described with reference to Tables 1 to 4. First, PMS, PMN, PMW or PM
The blending ratio x of T (expressed in%) is 3 mol% ≦ x ≦ 15 mol% in Table 1, 0.5 mol% ≦ x ≦ 3 mol% in Tables 2 and 3, respectively, and 0.5 mol in Table 4. % ≦ x ≦ 6 mol% is determined because the mixing ratio is 0 mol% (for example, sample numbers 1 to 4 in Table 1).
), The vibration level limit is low because the loss due to internal friction is large due to the movement of the ferroelectric domain wall, while 15 mol% in Table 1 and 3 mol in Tables 2 and 3
%, And in Table 4, when it exceeds 6 mol%, a heterophase such as pyrochlore is formed, thus causing an elastic loss.

【0027】また、PYNの配合比率y(ただし、%表
示)を、表1においては30mol%≦y≦72mol
%、表2及び表3においてはそれぞれ46mol%≦y
≦62.5mol%、表4においては43mol%≦y
≦62.5mol%に定めた理由は、この範囲外の比率
にすると、電気エネルギーを機械的なエネルギーに変換
する能力が極端に下がるため、振動レベル限界が低くな
るからである。
In Table 1, the mixing ratio y of PYN (expressed in%) is 30 mol% ≦ y ≦ 72 mol.
%, In Tables 2 and 3, respectively, 46 mol% ≦ y
≦ 62.5 mol%, and in Table 4, 43 mol% ≦ y
The reason for setting ≦ 62.5 mol% is that if the ratio is out of this range, the ability to convert electrical energy into mechanical energy is extremely reduced, and the vibration level limit is reduced.

【0028】また、PTの配合比率z(ただし、%表
示)は、PMS、PMN、PMWあるいはPMTのうち
のいずれか一つの配合比率xと、PYNの配合比率yと
が決まれば、x+y+z=1なる式から必然的に定ま
る。以上から表1〜表4においては、それぞれ*を付し
ていない試料番号の試料が高い比誘電率と高い振動レベ
ル限界を有する試料であり、これにより高振動レベルま
たは大振幅で駆動させる圧電デバイスへの応用が可能と
なる。
The mixing ratio z of PT (however, expressed in%) is given by x + y + z = 1 if the mixing ratio x of any one of PMS, PMN, PMW and PMT and the mixing ratio y of PYN are determined. It is inevitably determined from the following formula. From the above, in Tables 1 to 4, the samples with the sample numbers without * are samples having a high relative dielectric constant and a high vibration level limit, and are thereby driven at a high vibration level or a large amplitude. Application to

【0029】次に、表1〜表4において、それぞれ*を
付していない試料番号の3成分組成物(図1〜図4の領
域1〜4内及び境界線上の3成分組成物)の構成成分で
ある鉛(Pb)をカルシウム(Ca)、ストロンチウム
(Sr)及びバリウム(Ba)で置換した場合について
説明する。
Next, in Tables 1 to 4, the constitutions of the three-component compositions (samples 3 to 4 in the regions 1 to 4 and the boundary lines in FIGS. 1 to 4) indicated by the sample numbers without * are shown. A case where lead (Pb) as a component is replaced with calcium (Ca), strontium (Sr) and barium (Ba) will be described.

【0030】以下に示す表5、表6及び表7は図1の領
域1及び境界線上の、組成式[Pb(Mn1/3Sb2/3
3]x[Pb(Yb1/2Nb1/2)O3]y[PbTiO
3]z(ただし、x+y+z=1)で表される3成分組
成物の構成成分である鉛(Pb)をカルシウム(C
a)、ストロンチウム(Sr)及びバリウム(Ba)で
置換した場合の主成分配合比及び振動レベル限界の相関
を、表8、表9及び表10は図2の領域2及び境界線上
の、組成式[Pb(Mn1/3Nb2/3)O3]x[Pb
(Yb1/2Nb1/2)O3]y[PbTiO3]z(ただ
し、x+y+z=1)で表される3成分組成物の構成成
分であるPbをCa、Sr及びBaで置換した場合の主
成分配合比及び振動レベル限界の相関をそれぞれ示す。
The following Tables 5, 6 and 7 show the composition formula [Pb (Mn 1/3 Sb 2/3 )] in region 1 and the boundary line in FIG.
O 3 ] x [Pb (Yb 1/2 Nb 1/2 ) O 3 ] y [PbTiO
3 ] Lead (Pb), which is a component of the three-component composition represented by z (where x + y + z = 1), is replaced with calcium (C
a), the correlation between the main component mixture ratio and the vibration level limit in the case of substitution with strontium (Sr) and barium (Ba) are shown in Table 8, Table 9 and Table 10 in the composition formula on region 2 and the boundary line in FIG. [Pb (Mn 1/3 Nb 2/3 ) O 3 ] x [Pb
(Yb 1/2 Nb 1/2 ) O 3 ] y [PbTiO 3 ] z (where x + y + z = 1), wherein Pb, which is a component of the ternary composition, is replaced by Ca, Sr and Ba 2 shows the correlation between the main component mixing ratio and the vibration level limit.

【0031】また、表11、表12及び表13は図3の
領域3及び境界線上の、組成式[Pb(Mn1/21/2
3]x[Pb(Yb1/2Nb1/2)O3]y[PbTiO
3]z(ただし、x+y+z=1)で表される3成分組
成物の構成成分であるPbをCa、Sr及びBaで置換
した場合の主成分配合比及び振動レベル限界の相関を示
し、更に、表14、表15及び表16は図4の領域4及
び境界線上の、組成式[Pb(Mn1/3Ta2/3)O3
x[Pb(Yb1/2Nb1/2)O3]y[PbTiO3]z
(ただし、x+y+z=1)で表される3成分組成物の
構成成分であるPbをCa、Sr及びBaで置換した場
合の主成分配合比及び振動レベル限界の相関をそれぞれ
示す。なお、表5〜表16中、試料番号の右に記された
*は、15mol%より大なる量でPbをCa、Sr又
はBaで置換した試料番号である。
Tables 11, 12 and 13 show the composition formula [Pb (Mn 1/2 W 1/2 )] on the region 3 and the boundary in FIG.
O 3 ] x [Pb (Yb 1/2 Nb 1/2 ) O 3 ] y [PbTiO
3 ] shows the correlation between the main component mixing ratio and the vibration level limit when Pb, which is a component of the three-component composition represented by z (x + y + z = 1), is substituted with Ca, Sr, and Ba; Tables 14, 15, and 16 show the composition formula [Pb (Mn 1/3 Ta 2/3 ) O 3 ] on the region 4 and the boundary line in FIG.
x [Pb (Yb 1/2 Nb 1/2 ) O 3] y [PbTiO 3] z
(However, the correlation of the main component mixing ratio and the vibration level limit when Pb which is a component of the three-component composition represented by (x + y + z = 1) is substituted with Ca, Sr and Ba) is shown. In Tables 5 to 16, * on the right of the sample number indicates a sample number in which Pb was replaced with Ca, Sr or Ba in an amount larger than 15 mol%.

【0032】[0032]

【表5】 [Table 5]

【0033】[0033]

【表6】 [Table 6]

【0034】[0034]

【表7】 [Table 7]

【0035】[0035]

【表8】 [Table 8]

【0036】[0036]

【表9】 [Table 9]

【0037】[0037]

【表10】 [Table 10]

【0038】[0038]

【表11】 [Table 11]

【0039】[0039]

【表12】 [Table 12]

【0040】[0040]

【表13】 [Table 13]

【0041】[0041]

【表14】 [Table 14]

【0042】[0042]

【表15】 [Table 15]

【0043】[0043]

【表16】 以上の表5〜表16から分かるように、各化合物のPb
をCa、Sr又はBaで置換しても、またPbを減少し
ても、高い振動レベル限界が得られるが、更にPbを過
剰量のCa、Sr又はBaで置換すると、圧電性が減少
するため、電気−機械エネルギー変換の効率が極端に減
少する。また、過剰のPbを減少させると、異相生成の
ため、その圧電性減少のため振動レベルは減少する。そ
れゆえ、実用的な組成範囲は、Pbの置換量については
上記のCa、Sr又はBaで15mol%以下に、また
Pb減少量については0.1〜10mol%の範囲に限
定される。
[Table 16] As can be seen from the above Tables 5 to 16, the Pb of each compound
Can be replaced with Ca, Sr or Ba, or even if Pb is reduced, a high vibration level limit can be obtained. However, when Pb is further replaced with an excessive amount of Ca, Sr or Ba, the piezoelectricity decreases. The efficiency of the electrical-mechanical energy conversion is greatly reduced. Also, when the excess Pb is reduced, the vibration level is reduced due to the generation of a different phase and the reduced piezoelectricity. Therefore, the practical range of the composition is limited to 15 mol% or less of the above-mentioned Ca, Sr or Ba for the substitution amount of Pb, and to the range of 0.1 to 10 mol% for the reduction amount of Pb.

【0044】[0044]

【発明の効果】以上説明したように、本発明によれば、
高い比誘電率と0.4m/s以上の振動レベル限界を得
ることができるため、従来に比し大幅に高振動レベル又
は大振幅で駆動させる圧電デバイスへの応用ができ、そ
の工業的価値は極めて大である。
As described above, according to the present invention,
Since a high dielectric constant and a vibration level limit of 0.4 m / s or more can be obtained, it can be applied to a piezoelectric device driven at a significantly higher vibration level or a larger amplitude than in the past, and its industrial value is Very large.

【図面の簡単な説明】[Brief description of the drawings]

【図1】第1の発明の圧電磁器組成物の3成分組成図で
ある。
FIG. 1 is a three-component composition diagram of a piezoelectric ceramic composition of the first invention.

【図2】第2の発明の圧電磁器組成物の3成分組成図で
ある。
FIG. 2 is a three-component composition diagram of the piezoelectric ceramic composition of the second invention.

【図3】第3の発明の圧電磁器組成物の3成分組成図で
ある。
FIG. 3 is a three-component composition diagram of the piezoelectric ceramic composition of the third invention.

【図4】第4の発明の圧電磁器組成物の3成分組成図で
ある。
FIG. 4 is a diagram showing a three-component composition of the piezoelectric ceramic composition of the fourth invention.

【符号の説明】[Explanation of symbols]

1、2、3、4 領域 1, 2, 3, 4 area

Claims (6)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 マンガン・アンチモン酸鉛[Pb(Mn
1/3Sb2/3)O3]と、イッテルビウム・ニオブ酸鉛
[Pb(Yb1/2Nb1/2)O3]と、チタン酸鉛[Pb
TiO3]からなり、組成式[Pb(Mn1/3Sb2/3
3]x[Pb(Yb1/2Nb1/2)O3]y[PbTiO
3]z(ただし、x+y+z=1)で表される3成分組
成物であって、 前記組成式のx、y及びzが3元組成図において、x=
0.15、y=0.60、z=0.25の第1の点と、
x=0.03、y=0.72、z=0.25の第2の点
と、x=0.03、y=0.42、z=0.55の第3
の点と、x=0.15、y=0.30、z=0.55の
第4の点とを結ぶ線上及びこれら第1乃至第4の点で囲
まれた領域内で規定される組成を有することを特徴とす
る圧電磁器組成物。
1. A manganese lead antimonate [Pb (Mn)
1/3 Sb 2/3 ) O 3 ], lead ytterbium niobate [Pb (Yb 1/2 Nb 1/2 ) O 3 ], and lead titanate [Pb
TiO 3 ] and a composition formula [Pb (Mn 1/3 Sb 2/3 )
O 3 ] x [Pb (Yb 1/2 Nb 1/2 ) O 3 ] y [PbTiO
3 ] A three-component composition represented by z (where x + y + z = 1), wherein x, y, and z in the composition formula are x = y in the ternary composition diagram.
A first point of 0.15, y = 0.60, z = 0.25;
A second point at x = 0.03, y = 0.72, z = 0.25 and a third point at x = 0.03, y = 0.42, z = 0.55
And the composition defined on a line connecting the fourth point of x = 0.15, y = 0.30 and z = 0.55, and in a region surrounded by the first to fourth points. A piezoelectric ceramic composition comprising:
【請求項2】 マンガン・ニオブ酸鉛[Pb(Mn1/3
Nb2/3)O3]と、イッテルビウム・ニオブ酸鉛[Pb
(Yb1/2Nb1/2)O3]と、チタン酸鉛[PbTi
3]からなり、組成式[Pb(Mn1/3Nb2/3)O3
x[Pb(Yb1/2Nb1/2)O3]y[PbTiO3]z
(ただし、x+y+z=1)で表される3成分組成物で
あって、 前記組成式のx、y及びzが3元組成図において、x=
0.03、y=0.60、z=0.37の第1の点と、
x=0.005、y=0.625、z=0.37の第2
の点と、x=0.005、y=0.485、z=0.5
1の第3の点と、x=0.03、y=0.46、z=
0.51の第4の点とを結ぶ線上及びこれら第1乃至第
4の点で囲まれた領域内で規定される組成を有すること
を特徴とする圧電磁器組成物。
2. Manganese lead niobate [Pb (Mn 1/3
Nb 2/3 ) O 3 ] and ytterbium lead niobate [Pb
(Yb 1/2 Nb 1/2 ) O 3 ] and lead titanate [PbTi
O 3 ] and a composition formula [Pb (Mn 1/3 Nb 2/3 ) O 3 ]
x [Pb (Yb 1/2 Nb 1/2 ) O 3] y [PbTiO 3] z
(Where x + y + z = 1), wherein x, y, and z in the composition formula are x = y in a ternary composition diagram.
A first point of 0.03, y = 0.60, z = 0.37;
Second of x = 0.005, y = 0.625, z = 0.37
And x = 0.005, y = 0.485, z = 0.5
1 and x = 0.03, y = 0.46, z =
A piezoelectric ceramic composition having a composition defined on a line connecting a fourth point of 0.51 and an area surrounded by the first to fourth points.
【請求項3】 マンガン・タングステン酸鉛[Pb(M
1/21/2)O3]と、イッテルビウム・ニオブ酸鉛
[Pb(Yb1/2Nb1/2)O3]と、チタン酸鉛[Pb
TiO3]からなり、組成式[Pb(Mn1/21/2
3]x[Pb(Yb1/2Nb1/2)O3]y[PbTiO
3]z(ただし、x+y+z=1)で表される3成分組
成物であって、 前記組成式のx、y及びzが3元組成図において、x=
0.03、y=0.60、z=0.37の第1の点と、
x=0.005、y=0.625、z=0.37の第2
の点と、x=0.005、y=0.485、z=0.5
1の第3の点と、x=0.03、y=0.46、z=
0.51の第4の点とを結ぶ線上及びこれら第1乃至第
4の点で囲まれた領域内で規定される組成を有すること
を特徴とする圧電磁器組成物。
3. Manganese lead tungstate [Pb (M
n 1/2 W 1/2 ) O 3 ], lead ytterbium niobate [Pb (Yb 1/2 Nb 1/2 ) O 3 ], and lead titanate [Pb
TiO 3 ] and a composition formula [Pb (Mn 1/2 W 1/2 )
O 3 ] x [Pb (Yb 1/2 Nb 1/2 ) O 3 ] y [PbTiO
3 ] A three-component composition represented by z (where x + y + z = 1), wherein x, y, and z in the composition formula are x = y in the ternary composition diagram.
A first point of 0.03, y = 0.60, z = 0.37;
Second of x = 0.005, y = 0.625, z = 0.37
And x = 0.005, y = 0.485, z = 0.5
1 and x = 0.03, y = 0.46, z =
A piezoelectric ceramic composition having a composition defined on a line connecting a fourth point of 0.51 and an area surrounded by the first to fourth points.
【請求項4】 マンガン・タンタル酸鉛[Pb(Mn
1/3Ta2/3)O3]と、イッテルビウム・ニオブ酸鉛
[Pb(Yb1/2Nb1/2)O3]と、チタン酸鉛[Pb
TiO3]からなり、組成式[Pb(Mn1/3Ta2/3
3]x[Pb(Yb1/2Nb1/2)O3]y[PbTiO
3]z(ただし、x+y+z=1)で表される3成分組
成物であって、 前記組成式のx、y及びzが3元組成図において、x=
0.06、y=0.57、z=0.37の第1の点と、
x=0.005、y=0.625、z=0.37の第2
の点と、x=0.005、y=0.485、z=0.5
1の第3の点と、x=0.06、y=0.43、z=
0.51の第4の点とを結ぶ線上及びこれら第1乃至第
4の点で囲まれた領域内で規定される組成を有すること
を特徴とする圧電磁器組成物。
4. Manganese lead tantalate [Pb (Mn)
1/3 Ta 2/3 ) O 3 ], lead ytterbium niobate [Pb (Yb 1/2 Nb 1/2 ) O 3 ], and lead titanate [Pb
TiO 3 ] and a composition formula [Pb (Mn 1/3 Ta 2/3 )
O 3 ] x [Pb (Yb 1/2 Nb 1/2 ) O 3 ] y [PbTiO
3 ] A three-component composition represented by z (where x + y + z = 1), wherein x, y, and z in the composition formula are x = y in the ternary composition diagram.
A first point of 0.06, y = 0.57, z = 0.37;
Second of x = 0.005, y = 0.625, z = 0.37
And x = 0.005, y = 0.485, z = 0.5
1 and x = 0.06, y = 0.43, z =
A piezoelectric ceramic composition having a composition defined on a line connecting a fourth point of 0.51 and an area surrounded by the first to fourth points.
【請求項5】 前記3成分組成物の組成式中のPbを、
カルシウム、ストロンチウム及びバリウムのうちのいず
れか一元素により15mol%以下の量で置換したこと
を特徴とする請求項1乃至4のうちいずれか一項記載の
圧電磁器組成物。
5. The method of claim 1, wherein Pb in the composition formula of the three-component composition is
The piezoelectric ceramic composition according to any one of claims 1 to 4, wherein the composition is replaced with any one of calcium, strontium, and barium in an amount of 15 mol% or less.
【請求項6】 前記3成分組成物の組成式中のPbを、
0.1〜10mol%の範囲内で減じたことを特徴とす
る請求項1乃至4のうちいずれか一項記載の圧電磁器組
成物。
6. Pb in the composition formula of the three-component composition,
The piezoelectric ceramic composition according to any one of claims 1 to 4, wherein the composition is reduced within a range of 0.1 to 10 mol%.
JP8137905A 1996-05-31 1996-05-31 Piezoelectric ceramic composition Expired - Fee Related JP2856147B2 (en)

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JP2856147B2 true JP2856147B2 (en) 1999-02-10

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