JP2856491B2 - Fθ lens for optical scanning device - Google Patents
Fθ lens for optical scanning deviceInfo
- Publication number
- JP2856491B2 JP2856491B2 JP8255890A JP8255890A JP2856491B2 JP 2856491 B2 JP2856491 B2 JP 2856491B2 JP 8255890 A JP8255890 A JP 8255890A JP 8255890 A JP8255890 A JP 8255890A JP 2856491 B2 JP2856491 B2 JP 2856491B2
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- Prior art keywords
- lens
- scanning direction
- sub
- deflecting
- group
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- 230000003287 optical effect Effects 0.000 title claims description 28
- 238000003384 imaging method Methods 0.000 claims description 4
- 230000005499 meniscus Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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- Mechanical Optical Scanning Systems (AREA)
Description
【発明の詳細な説明】 [産業上の利用分野] 本発明は光走査装置のfθレンズに関する。Description: TECHNICAL FIELD The present invention relates to an fθ lens of an optical scanning device.
[従来の技術] fθレンズは、回転多面鏡やピラミダルミラー等、光
束を等角速度的に偏向させる光偏向装置を用いる光走査
装置に於いて被走査面の光走査を等速的に行わせるため
のレンズとして知られ、従来から種々のものが知られて
いる。2. Description of the Related Art An fθ lens is used to perform light scanning of a surface to be scanned at a constant speed in an optical scanning device using an optical deflector such as a rotary polygon mirror or a pyramidal mirror that deflects a light beam at a constant angular velocity. Various types of lenses have been known.
回転多面鏡やピラミダルミラーには所謂「面倒れ」の
問題がある。面倒れの問題は面倒れ補正用レンズを補助
的に用いることにより解消できるが近来、fθレンズを
アナモフィックなレンズ系とすることによりfθレンズ
自体に面倒れ補正機能を持たせたfθレンズも種々提案
されている。(例えば特開昭62−105114号公報)。Rotating polygon mirrors and pyramidal mirrors have a problem of so-called "face tilt". The problem of surface tilt can be solved by using a lens for correcting surface tilt as an auxiliary, but in the near future, various types of fθ lenses that have fθ lenses themselves with surface tilt correction functions by using fθ lenses as anamorphic lens systems have been proposed. Have been. (For example, JP-A-62-105114).
[発明が解決しようとする課題] しかし上記公知のアナモフィックなfθレンズは主・
副走査方向の像面像面湾曲が有効走査領域の全域にわた
って十分には考慮されておらず、高密度の光走査を行っ
た場合に光スポット径の変動を生ずる恐れがある。[Problems to be Solved by the Invention] However, the known anamorphic fθ lenses are mainly
The field curvature in the sub-scanning direction is not sufficiently considered over the entire effective scanning area, and the light spot diameter may fluctuate when high-density optical scanning is performed.
本発明は上述した事情に鑑みてなされたものであっ
て、面倒れ補正機能を持ち、しかも主・副走査方向の像
面湾曲を有効走査領域全域にわたって良好に補正した新
規なfθレンズの提供を目的とする。The present invention has been made in view of the above-described circumstances, and provides a novel fθ lens having a surface tilt correction function, and in which the curvature of field in the main and sub scanning directions has been favorably corrected over the entire effective scanning area. Aim.
[課題を解決するための手段] 以下、本発明を説明する。[Means for Solving the Problems] Hereinafter, the present invention will be described.
本発明のfθレンズは「光源装置からの略平行な光束
を光偏向装置の偏向反射面近傍に主走査対応方向に長い
線像として結像させ、偏向反射面による反射光束を光偏
向装置により等角速度的に偏向させ、結像レンズにより
被走査面上に光スポットとして結像させて光走査を行う
光走査装置」において結像レンズとして用いられるレン
ズであり、副走査方向に関しては「偏向反射面位置と被
走査面とを幾何光学的に略共役な関係にする機能」を持
ち主走査方向に関しては「fθ特性」を有する。The fθ lens according to the present invention is configured such that “a substantially parallel light beam from the light source device is imaged as a long linear image in the main scanning corresponding direction in the vicinity of the deflecting reflection surface of the light deflecting device, and the light beam reflected by the deflecting reflection surface is reflected by the light deflecting device. A lens used as an image forming lens in an optical scanning device that performs optical scanning by deflecting at an angular velocity and forming an image as a light spot on a surface to be scanned by an image forming lens. And a function of making the position and the surface to be scanned substantially geometrically conjugate with each other in the main scanning direction.
第1図に示すように光偏向装置側から被走査面側に向
かって第1群5,第2群6,第3群7がこの順序に配備され
る3群構成である。As shown in FIG. 1, there is a three-group configuration in which a first group 5, a second group 6, and a third group 7 are arranged in this order from the light deflecting device side toward the surface to be scanned.
第1群5は光偏向装置側に凹面を向けたメニスカスレ
ンズの球面単レンズである。The first group 5 is a meniscus spherical single lens having a concave surface facing the light deflector.
第2群6は光偏向装置側のレンズ面が副走査方向にの
み曲率をもつシリンダー面もしくは平面で被走査面側の
レンズ面が副走査方向に強い曲率をもつ凸のトーリック
面である単レンズである。The second group 6 is a single lens in which the lens surface on the side of the optical deflector has a curvature only in the sub-scanning direction or a flat surface and the lens surface on the scanned surface side is a convex toric surface having a strong curvature in the sub-scanning direction. It is.
第3群7は光偏向装置側のレンズ面が副走査方向にの
み曲率をもつ凹のシリンダー面で被走査面側のレンズ面
が副走査方向に強い曲率をもつ凸のトーリック面である
単レンズである。The third group 7 is a single lens in which the lens surface on the optical deflector side is a concave cylinder surface having a curvature only in the sub-scanning direction and the lens surface on the scanned surface side is a convex toric surface having a strong curvature in the sub-scanning direction. It is.
従って全体の構成は3群3枚構成である。 Therefore, the overall configuration is a three-group, three-element configuration.
全系の主走査方向の合成焦点距離をf、第2群及び第
3群の副走査方向に関する焦点距離をそれぞれf2Y,
f3Y、光偏向装置側から数えて第i番目のレンズ面の曲
率半径をi=1,2についてR1,R2、i=3〜6に対し副
走査方向に就いてRiY、面間隔をDi、偏向反射面による
偏向の起点から第1番目のレンズ面に到る距離をD0とす
るとき、 (I) −0.3 < R1/f < −0.05 (II) 0.7 < R1/R2 < 1.3 (III)−0.7 < D0/R1 < −0.2 (IV) 0.1 < D2/f < 0.3 (V) −0.35 < f2Y/f3Y < 0.15 (VI) 0.55 < R5Y/R4Y < 1.2 もしくは 0.55 < R5Y/R6Y < 1.2 なる条件が満足される。The combined focal length of the entire system in the main scanning direction is f, and the focal lengths of the second and third groups in the sub-scanning direction are f 2Y and f 2Y , respectively.
f 3Y , the radius of curvature of the i-th lens surface counted from the optical deflector side is R 1 , R 2 for i = 1 , 2 and R iY for the sub-scanning direction for i = 3 to 6, Is D i , and the distance from the origin of deflection by the deflecting reflecting surface to the first lens surface is D 0 , where (I) −0.3 <R 1 /f<−0.05 (II) 0.7 <R 1 / R 2 <1.3 (III) -0.7 <D 0 / R 1 <-0.2 (IV) 0.1 <D 2 / f <0.3 (V) -0.35 <f 2Y / f 3Y <0.15 (VI) 0.55 <R 5Y / The condition of R 4Y <1.2 or 0.55 <R 5Y / R 6Y <1.2 is satisfied.
なお本発明のfθレンズは上記条件(I)〜(VI)の
外に、各レンズの肉厚Di(i=2n−1,n:1〜3)が次の
条件 (VII) Di/f(i=2n−1,n:1〜3) < 0.05を満足
することが望ましい。In the fθ lens of the present invention, in addition to the above conditions (I) to (VI), the thickness D i (i = 2n−1, n: 1 to 3) of each lens is set according to the following condition (VII) D i / It is desirable to satisfy f (i = 2n-1, n: 1 to 3) <0.05.
[作用] 第2図(A)は、本発明のfθレンズを用いる光走査
装置の1例を示している。この図は光学配置を、偏向光
束の偏向により形成される面に直交する方向から見た状
態を示している。[Operation] FIG. 2A shows an example of an optical scanning device using the fθ lens of the present invention. This figure shows a state in which the optical arrangement is viewed from a direction perpendicular to a plane formed by the deflection of the deflected light beam.
光源装置1は例えば半導体レーザーとコリメートレン
ズとにより構成され、略平行な光束を放射する。この光
束はシリンダーレンズ2により光偏向装置3(図の例で
は回転多面鏡である)の偏向反射面の近傍に主走査対応
方向(第2図(A)の図面に平行な方向)に長い線像に
結像される。The light source device 1 includes, for example, a semiconductor laser and a collimating lens, and emits a substantially parallel light beam. This light beam is extended by the cylinder lens 2 near the deflecting and reflecting surface of the light deflecting device 3 (which is a rotating polygon mirror in the example in the figure) in a main scanning direction (a direction parallel to the drawing of FIG. 2A). The image is formed on the image.
偏向反射面による反射光束は光偏向装置3により等角
速度的に偏向され、第1群5と第2群6と第3群7とで
構成されるfθレンズにより被走査面8上に光スポット
として結像され、被走査面8を光走査する。図で被走査
面8の上下方向が主走査方向であり図面に直交する方向
が副走査方向である。The light beam reflected by the deflecting / reflecting surface is deflected at a constant angular velocity by the light deflecting device 3, and is formed as a light spot on the surface 8 to be scanned 8 by an fθ lens composed of a first group 5, a second group 6, and a third group 7. An image is formed, and the scanned surface 8 is optically scanned. In the figure, the vertical direction of the scanned surface 8 is the main scanning direction, and the direction orthogonal to the drawing is the sub-scanning direction.
第2図(B)は光源装置1から被走査面8に到る光学
配置を光路に沿って展開し、副走査方向が上下方向とな
るように描いたものである。FIG. 2 (B) shows an optical arrangement extending from the light source device 1 to the surface 8 to be scanned along the optical path, with the sub-scanning direction being the vertical direction.
図に示すように、副走査方向に関してはfθレンズが
偏向反射面位置と被走査面とを幾何光学的に略共役な関
係としているので偏向反射面4が符号4′で示すように
面倒れを生じて反射光束が破線で示すように副走査方向
に振られても光スポットの結像位置は副走査方向に殆ど
移動せず、面倒れの影響は良好に補正される。As shown in the figure, in the sub-scanning direction, since the fθ lens has a geometrically optically conjugate relationship between the position of the deflecting reflecting surface and the surface to be scanned, the deflecting reflecting surface 4 is tilted as indicated by reference numeral 4 '. Even if the resulting reflected light beam is swung in the sub-scanning direction as shown by the broken line, the image forming position of the light spot hardly moves in the sub-scanning direction, and the effect of surface tilt is well corrected.
光偏向装置が回転多面鏡の場合、回転軸は偏向反射面
と合致していないので回転多面鏡の回転に伴い偏向反射
面の位置はfθレンズの光軸方向に変動し、第2図
(C)に示すように線像の結像位置Pと偏向反射面4と
の間の距離ΔXが変動する。このΔXに対応して光スポ
ットの結像位置P′は被走査面8に対してΔX′だけ変
動する。ΔX′はfθレンズの副走査方向における縦倍
率をβとして、周知の如く、ΔX′=β2ΔXで与えら
れる。When the optical deflector is a rotary polygon mirror, the rotation axis does not coincide with the deflecting and reflecting surface, so the position of the deflecting and reflecting surface fluctuates in the optical axis direction of the fθ lens with the rotation of the rotating polygon mirror, and FIG. As shown in ()), the distance ΔX between the imaging position P of the line image and the deflecting reflection surface 4 fluctuates. The imaging position P 'of the light spot changes by ΔX' with respect to the surface 8 to be scanned in accordance with ΔX. As is well known, ΔX ′ is given by ΔX ′ = β 2 ΔX, where β is the vertical magnification of the fθ lens in the sub-scanning direction.
回転多面鏡の回転に伴いfθレンズに対して副走査方
向の光源となる線像の位置(偏向反射面による線像の反
射像)の位置変動は2次元的に変動するので上記ΔX′
による像面湾曲も有効走査領域全域にわたって補正する
必要があり、主走査方向に対しては像面湾曲とともにf
θ特性も良好に補正されねばならない。With the rotation of the rotary polygon mirror, the position of the line image serving as a light source in the sub-scanning direction with respect to the fθ lens (reflection image of the line image by the deflecting reflection surface) changes two-dimensionally.
It is also necessary to correct the field curvature due to the entire scanning range, and f
The θ characteristic must also be corrected well.
上記各条件を説明する。 Each of the above conditions will be described.
条件(I)は主走査方向の像面湾曲を補正するための
条件であり、主走査方向の像面湾曲は上限を越えるとア
ンダー、下限を越えるとオーバーになる。The condition (I) is a condition for correcting the curvature of field in the main scanning direction. The curvature of field in the main scanning direction is under when the upper limit is exceeded, and over when the lower limit is exceeded.
条件(II)も主走査方向の像面湾曲を補正するための
条件であり、主走査方向の像面湾曲は上限を越えるとオ
ーバー、下限を越えるとアンダーになる。The condition (II) is also a condition for correcting the field curvature in the main scanning direction. The field curvature in the main scanning direction is over when the upper limit is exceeded, and under when the lower limit is exceeded.
条件(III)は主走査方向の像面湾曲とfθ特性即ち
リニアリティを補正するための条件であり、主走査方向
の像面湾曲は上限を越えるとオーバー、下限を越えると
アンダーになり、fθ特性はこの条件の条件を外れると
オーバーになる。The condition (III) is a condition for correcting the field curvature in the main scanning direction and the fθ characteristic, that is, the linearity. The field curvature in the main scanning direction becomes over when the upper limit is exceeded, and becomes under when the lower limit is exceeded. Is over if the condition of this condition is not satisfied.
条件(IV)はfθ特性を良好に補正するための条件
で、上限を越えるとfθ特性がアンダーとなり、下限を
越えるとオーバーとなる。The condition (IV) is a condition for satisfactorily correcting the fθ characteristic. When the value exceeds the upper limit, the fθ characteristic becomes under, and when the value exceeds the lower limit, the value becomes over.
条件(V),(VI)はともに副走査方向の像面湾曲を
補正するためのもので、副走査方向の像面湾曲はこれら
の条件の上限を越えるとアンダーになり、下限を越える
とオーバーになる。The conditions (V) and (VI) are both for correcting the field curvature in the sub-scanning direction. The field curvature in the sub-scanning direction becomes under when the upper limit of these conditions is exceeded, and becomes over when the lower limit is exceeded. become.
条件(VII)はfθレンズの全レンズ5,6,7をプラスチ
ックレンズで構成する場合にレンズの成形を容易にする
ための条件である。Condition (VII) is a condition for facilitating lens molding when all the lenses 5, 6, and 7 of the fθ lens are formed of plastic lenses.
[実施例] 以下、具体的な実施例を8例挙げる。EXAMPLES Hereinafter, eight specific examples will be given.
全系の主走査方向の合成焦点距離をf(100に規格化
する)、光偏向装置側から数えて第i番目のレンズ面の
曲率半径を主走査方向に就いてRix,副走査方向に就い
てRiY、面間隔をDi、偏向反射面による偏向の起点から
第1番目のレンズ面に到る距離をD0とする。また光偏向
装置側から数えてj番目のレンズの屈折率をnjとし、第
2、第3番目のレンズの副走査方向の焦点距離をf2Y,f
3Yとする。さらに、2θを以て偏向角(単位:度)を表
し、K1=R1/f,K2=R1/R2,K3=D0/R1,K4=D2/f,K5=
f2Y/f3Y,K6=R5Y/R4Y(もしくはR6Y)とする。なお
光偏向装置から数えて第1番目のレンズは球面レンズで
あるからi=1,2に対してはRiX=RiYである。The combined focal length of the entire system in the main scanning direction is f (normalized to 100), and the radius of curvature of the i-th lens surface counted from the optical deflecting device side is R ix in the main scanning direction. Here , R iY , the surface interval is D i , and the distance from the starting point of deflection by the deflecting reflecting surface to the first lens surface is D 0 . Further, the refractive index of the j-th lens counted from the optical deflector side is n j, and the focal lengths of the second and third lenses in the sub-scanning direction are f 2Y and f 2Y .
3Y . Further, the deflection angle (unit: degree) is represented by 2θ, and K 1 = R 1 / f, K 2 = R 1 / R 2 , K 3 = D 0 / R 1 , and K 4 = D 2 / f, K 5 =
f 2Y / f 3Y , K 6 = R 5Y / R 4Y (or R 6Y ). Since the first lens counted from the optical deflecting device is a spherical lens, R iX = R iY for i = 1,2.
また光偏向装置としては全実施例を通じて回転多面鏡
が想定され、同回転多面鏡の偏向反射面数は6、内接円
半径は15、偏向反射面への入射光束の中心光線とfθレ
ンズ光軸のなす角は90度である。A rotating polygon mirror is assumed as an optical deflecting device throughout the embodiments. The number of deflecting and reflecting surfaces of the rotating polygon mirror is 6, the radius of the inscribed circle is 15, the central ray of the light beam incident on the deflecting and reflecting surface, and the fθ lens light. The angle between the axes is 90 degrees.
第3図乃至第11図に順次、実施例1〜9に関する像面
湾曲及びfθ特性の図を示す。像面湾曲図に於いて実線
は副走査方向、破線は主走査方向の結像位置を表す。 FIGS. 3 to 11 show diagrams of the field curvature and the fθ characteristics for the first to ninth embodiments. In the field curvature diagram, a solid line indicates an image forming position in the sub-scanning direction, and a broken line indicates an image forming position in the main scanning direction.
fθ特性は周知の如く、主走査方向の焦点距離fと偏
向角θ、実際の像高H′を用いて fθ特性={(H′−f・θ)/f・θ}・100(%) で定義される量である。As is well known, the fθ characteristic is obtained by using the focal length f in the main scanning direction, the deflection angle θ, and the actual image height H ′. fθ characteristic = {(H′−f · θ) / f · θ} · 100 (%) Is the quantity defined by
[発明の効果] 以上、本発明によれば光走査装置の新規なfθレンズ
を提供できる。[Effects of the Invention] As described above, according to the present invention, a novel fθ lens of an optical scanning device can be provided.
このfθレンズは上記の如く主・副走査方向の像面湾
曲が有効走査領域の全域で良好に補正され、fθ特性が
良好であるので高密度走査に対しても光スポット径の変
動の小さい極めて良好な光走査を実現できる。また屈折
率の低い材料の使用が可能であるのでプラスチックレン
ズで全系を構成することもできる。As described above, the fθ lens has the field curvature in the main and sub-scanning directions well corrected over the entire effective scanning area, and has a good fθ characteristic. Good optical scanning can be realized. Further, since a material having a low refractive index can be used, the entire system can be constituted by a plastic lens.
第1図は、本発明のfθレンズのレンズ構成を説明する
ための図、第2図は、本発明のfθレンズを用いた光走
査装置を説明するための図、第3図乃至第11図は各実施
例に関する像面湾曲図とfθ特性図である。 5……第1群、6……第2群、7……第3群FIG. 1 is a view for explaining the lens configuration of the fθ lens of the present invention, FIG. 2 is a view for explaining an optical scanning device using the fθ lens of the present invention, and FIGS. FIG. 4 is a field curvature diagram and an fθ characteristic diagram for each embodiment. 5 First group, 6 Second group, 7 Third group
Claims (1)
の偏向反射面近傍に主走査対応方向に長い線像に結像さ
せ、偏向反射面による反射光束を上記光偏向装置により
等角速度的に偏向させ、偏向光束を結像レンズにより被
走査面上に光スポットとして結像させて光走査を行う光
走査装置において結像レンズとして用いられるレンズで
あって、 副走査方向に関して偏向反射面位置と被走査面とを幾何
光学的に略共役な関係にするとともに、主走査方向に関
してはfθ特性を有し、 光偏向装置側から被走査面側に向かって、第1乃至第3
群の順に配備され、 第1群は光偏向装置側に凹面を向けたメニスカスレンズ
の球面単レンズ、第2群は光偏向装置側のレンズ面が副
走査方向にのみ曲率をもつシリンダー面もしくは平面で
被走査面側のレンズ面が副走査方向に強い曲率をもつ凸
のトーリック面である単レンズ、第3群は光偏向装置側
のレンズ面が副走査方向にのみ曲率をもつ凹のシリンダ
ー面で被走査面側のレンズ面が副走査方向に強い曲率を
持つ凸のトーリック面である単レンズである3群3枚構
成であり、 全系の主走査方向の合成焦点距離をf、第2群の副走査
方向に関する焦点距離をf2Y、第3群の副走査方向に関
する焦点距離をf3Y、光偏向装置側から数えて第i番目
のレンズ面の曲率半径をi=1,2に就いてR1,R2、i=
3〜6に対し副走査方向に就いてRiY、面間隔をDi、偏
向反射面による偏向の起点から第1番目のレンズ面に到
る距離をD0とするとき、 (I) −0.3 < R1/f < −0.05 (II) 0.7 < R1/R2 < 1.3 (III)−0.7 < D0/R1 < −0.2 (IV) 0.1 < D2/f < 0.3 (V) −0.35 < f2Y/f3Y < 0.15 (VI) 0.55 < R5Y/R4Y < 1.2 もしくは 0.55 < R5Y/R6Y < 1.2 なる条件を満足することを特徴とする光走査装置のfθ
レンズ。An optical system according to claim 1, wherein a substantially parallel light beam from the light source device is formed into a long linear image in the main scanning direction in the vicinity of the deflecting / reflecting surface of the light deflecting device. Is a lens used as an imaging lens in an optical scanning device that performs optical scanning by optically scanning by deflecting a deflected light beam onto a surface to be scanned by an imaging lens as a light spot, and deflecting and reflecting surface in the sub-scanning direction. The position and the surface to be scanned are substantially conjugated geometrically and optically, and have an fθ characteristic in the main scanning direction.
The first group is a spherical single lens of a meniscus lens having a concave surface facing the light deflector, and the second group is a cylinder surface or a plane having a lens surface on the light deflector side having a curvature only in the sub-scanning direction. A single lens whose lens surface on the surface to be scanned is a convex toric surface having a strong curvature in the sub-scanning direction, and a third group is a concave cylinder surface whose lens surface on the optical deflector side has a curvature only in the sub-scanning direction. The lens surface on the scanning surface side is a single lens having a convex toric surface having a strong curvature in the sub-scanning direction, and has a three-group, three-element configuration. The combined focal length of the entire system in the main scanning direction is f, The focal length of the group in the sub-scanning direction is f 2Y , the focal length of the third group in the sub-scanning direction is f 3Y , and the radius of curvature of the i-th lens surface counted from the optical deflector is i = 1,2. And R 1 , R 2 , i =
When R iY in the sub-scanning direction, D i is the surface distance, and D 0 is the distance from the origin of deflection by the deflecting reflecting surface to the first lens surface with respect to 3 to 6, (I) −0.3 <R 1 / f <-0.05 ( II) 0.7 <R 1 / R 2 <1.3 (III) -0.7 <D 0 / R 1 <-0.2 (IV) 0.1 <D 2 / f <0.3 (V) -0.35 <F 2Y / f 3Y <0.15 (VI) 0.55 <R 5Y / R 4Y <1.2 or 0.55 <R 5Y / R 6Y <1.2
lens.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8255890A JP2856491B2 (en) | 1990-03-29 | 1990-03-29 | Fθ lens for optical scanning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8255890A JP2856491B2 (en) | 1990-03-29 | 1990-03-29 | Fθ lens for optical scanning device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03280008A JPH03280008A (en) | 1991-12-11 |
| JP2856491B2 true JP2856491B2 (en) | 1999-02-10 |
Family
ID=13777824
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8255890A Expired - Fee Related JP2856491B2 (en) | 1990-03-29 | 1990-03-29 | Fθ lens for optical scanning device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2856491B2 (en) |
-
1990
- 1990-03-29 JP JP8255890A patent/JP2856491B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03280008A (en) | 1991-12-11 |
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