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JP2872834B2 - Method for manufacturing two-layer flexible printed circuit board - Google Patents
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JP2872834B2 - Method for manufacturing two-layer flexible printed circuit board - Google Patents

Method for manufacturing two-layer flexible printed circuit board

Info

Publication number
JP2872834B2
JP2872834B2 JP3230738A JP23073891A JP2872834B2 JP 2872834 B2 JP2872834 B2 JP 2872834B2 JP 3230738 A JP3230738 A JP 3230738A JP 23073891 A JP23073891 A JP 23073891A JP 2872834 B2 JP2872834 B2 JP 2872834B2
Authority
JP
Japan
Prior art keywords
printed circuit
flexible printed
circuit board
layer
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP3230738A
Other languages
Japanese (ja)
Other versions
JPH04359490A (en
Inventor
良隆 奥川
俊夫 中尾
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Bakelite Co Ltd
Original Assignee
Sumitomo Bakelite Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Bakelite Co Ltd filed Critical Sumitomo Bakelite Co Ltd
Priority to JP3230738A priority Critical patent/JP2872834B2/en
Publication of JPH04359490A publication Critical patent/JPH04359490A/en
Application granted granted Critical
Publication of JP2872834B2 publication Critical patent/JP2872834B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

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  • Laser Beam Processing (AREA)
  • Laminated Bodies (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、支持フィルム層に開孔
部を有する2層フレキシブル印刷回路用基板を製造する
方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a two-layer flexible printed circuit board having an opening in a support film layer.

【0002】[0002]

【従来の技術】従来のフレキシブル印刷回路用基板は、
電子機器の小型・軽量化が進むにつれ、ますます用途が
拡大し、最近は従来の様な配線基板としてだけでなく、
TAB用キャリアテープの様な支持フィルムに孔のあい
た基板の利用も増大してきている。このような、支持フ
ィルム層に孔加工がされ、かつ導体配線を有するフレキ
シブル印刷回路用基板の製造方法としては、予め支持フ
ィルム層にパンチング等で孔加工を行い、接着剤を用い
て導体層を貼合わせた後、配線回路を形成する方法や、
導体層にポリアミック酸溶液を直接塗布し、乾燥・イミ
ド化を行うか、支持フィルム層に蒸着法やスパッタリン
グ法によって導体層を形成して2層フレキシブル印刷回
路用基板を作製した後、レーザーあるいは強アルカリ性
溶液によって支持フィルム層に孔加工を行い、その後配
線回路を形成する方法が用いられている。
2. Description of the Related Art Conventional flexible printed circuit boards are:
As electronic devices have become smaller and lighter, their applications have expanded, and recently, not only as conventional wiring boards,
The use of substrates having holes in a support film such as a carrier tape for TAB is also increasing. As a method of manufacturing a substrate for a flexible printed circuit having a hole formed in the support film layer and having conductor wiring, a hole is formed in the support film layer in advance by punching or the like, and the conductor layer is formed using an adhesive. After laminating, how to form a wiring circuit,
Apply a polyamic acid solution directly to the conductor layer and dry / imidize it, or form a conductor layer on the support film layer by vapor deposition or sputtering to produce a two-layer flexible printed circuit board, and then apply laser or strong A method has been used in which a hole is formed in a support film layer with an alkaline solution, and then a wiring circuit is formed.

【0003】特に近年、耐熱性の要求される用途には、
後者の方法で作製した2層構造のフレキシブル印刷回路
用基板が利用されているが、強アルカリ性溶液による加
工は、フィルム層の種類によっては加工に非常に時間が
かかるといった問題点があった。そこでレーザーによる
加工が行われているが、細線リードはチップとの圧接そ
の他の取扱時に曲がり易く、場合によっては折れてしま
うこともある。タイバーを設ける等の工夫がとられてい
るが、特にレーザーを用いて加工を行った孔は、エッジ
が鋭いので、リードの穴エッジ部分にクラックが入った
り、断線したりするといった問題点があり、また、レー
ザー加工時に発生するススが導体表面やフィルム面に付
着するために、メッキが出来なかったり、製品の電気特
性が低下してしまうという問題点もあった。
In particular, in recent years, applications requiring heat resistance include:
Although a flexible printed circuit board having a two-layer structure manufactured by the latter method is used, there is a problem that processing with a strong alkaline solution takes a very long time depending on the type of a film layer. Therefore, processing by laser is performed, but the fine wire lead is easily bent at the time of pressure contact with the chip or other handling, and may be broken in some cases. Although tie bars have been devised, holes that are processed using a laser have sharp edges, so there are problems such as cracks and breaks in the lead hole edges. In addition, since soot generated during laser processing adheres to the surface of the conductor or the surface of the film, plating cannot be performed or the electrical characteristics of the product deteriorate.

【0004】[0004]

【発明が解決しようとする課題】本発明の目的とすると
ころは、2層フレキシブル印刷回路板の本来持っている
耐アルカリ性、耐溶剤性、耐熱性、電気特性を低下させ
ることなく、しかも回路パターンにクラックや断線を生
じさせず、メッキも容易に出来、ススの付着による電気
特性の低下もない、孔加工された支持フィルムを有する
2層フレキシブル印刷回路用基板の製造法を提供するも
のである。
SUMMARY OF THE INVENTION An object of the present invention is to provide a two-layer flexible printed circuit board without deteriorating its inherent alkali resistance, solvent resistance, heat resistance, and electrical characteristics, and at the same time, without reducing the circuit pattern. The present invention provides a method for manufacturing a two-layer flexible printed circuit board having a perforated support film, which does not cause cracking or disconnection, can be easily plated, and has no decrease in electrical characteristics due to soot adhesion. .

【0005】[0005]

【課題を解決するための手段】本発明は、導体箔上にポ
リアミック酸溶液を直接流延塗布し、乾燥させて得られ
る接着剤層のない2層フレキシブル印刷回路用基板を用
いて、導体箔上に回路形成を行い、次いでレーザー加工
によりフィルム層を0.5〜5μmの厚みで残して穴加
工を行い、しかる後に、アルカリ溶液中でエッチングを
行って残ったフィルム層を除去することを特徴とするフ
レキシブル印刷回路基板の製造方法である。
SUMMARY OF THE INVENTION The present invention relates to a method for forming a conductive foil using a two-layer flexible printed circuit board without an adhesive layer, which is obtained by directly casting and drying a polyamic acid solution on a conductive foil. A circuit is formed thereon, and then a hole is formed by laser processing while leaving the film layer with a thickness of 0.5 to 5 μm. Thereafter, etching is performed in an alkaline solution to remove the remaining film layer. The method for manufacturing a flexible printed circuit board described above.

【0006】本発明によれば、より高密度化された回路
作製のために加工精度の優れたレーザー加工を行う際
に、孔のエッジ部分と回路パターンの境界に発生するク
ラックや断線を防止し、また、レーザー加工時に発生す
るススの付着によってメッキが困難になったり、製品の
電気特性が低下してしまうことを防ぐことができる。
According to the present invention, it is possible to prevent cracks and disconnections occurring at the edge portion of a hole and the boundary between circuit patterns when performing laser processing with excellent processing accuracy in order to produce a circuit with higher density. Further, it is possible to prevent plating from becoming difficult due to the adhesion of soot generated at the time of laser processing, and to prevent the electrical characteristics of the product from being deteriorated.

【0007】本発明において用いる2層フレキシブル回
路用基板を得る方法としては例えば、特開昭62−20
0795号公報や、特開昭63−328858号公報に
示される方法が利用できる。
A method for obtaining a two-layer flexible circuit board used in the present invention is described in, for example, JP-A-62-20.
Methods described in JP-A-0795 and JP-A-63-328858 can be used.

【0008】導体層として用いることのできる材料とし
ては、銅、アルミニウム、コンスタンタン、ニッケル等
の金属箔が挙げられる。
[0008] Materials that can be used as the conductor layer include metal foils such as copper, aluminum, constantan, and nickel.

【0009】孔加工に使用するレーザーの種類として
は、エキシマレーザー、炭酸ガスレーザー、YAGレー
ザー等が挙げられるが、導体箔に与えるダメージが少な
く、しかもレーザーの出力の調整により、加工速度・加
工状態を自由に調整することが可能であるという点でエ
キシマレーザーが特に望ましい。
Examples of the type of laser used for drilling include an excimer laser, a carbon dioxide laser, a YAG laser, etc., but there is little damage to the conductor foil, and the processing speed and the processing state are adjusted by adjusting the laser output. Excimer lasers are particularly desirable in that they can be adjusted freely.

【0010】レーザーによって孔加工を行う方法として
は、サンプルを固定してレーザービームをスキャンする
方法や、レーザービームは固定し、XYテーブル上にの
せたサンプルを移動させる方法が用いられる。
[0010] As a method of forming a hole with a laser, a method of fixing a sample and scanning a laser beam, or a method of fixing a laser beam and moving a sample placed on an XY table are used.

【0011】フィルム層を0.5〜5μm残して穴加工
をする方法は、まず、次工程のアルカリエッチング用の
レジストをフィルム面に塗布する。レジストには通常の
アルカリエッチングで用いられるものが使用できる。フ
ィルムの開孔部となる部分は、レーザー加工によってレ
ジストも除去されるので、レジストの塗布はフィルム全
面に行ってよい。レーザー加工の後に残されたフィルム
厚みが0.5〜1μmの時にはアルカリエッチング用の
レジストの塗布を行わずにアルカリエッチングを行って
も実用上問題はないが、フィルム面に付着したススを完
全に除去する為には、レジストを塗布しておいた方がア
ルカリによる洗浄だけでなくレジストと共に除去される
のでより好ましい。
In the method of forming a hole while leaving a film layer of 0.5 to 5 μm, first, a resist for alkali etching in the next step is applied to the film surface. As the resist, those used in ordinary alkali etching can be used. Since the resist that is to be the opening portion of the film is also removed by laser processing, the resist may be applied to the entire surface of the film. When the film thickness left after the laser processing is 0.5 to 1 μm, there is no practical problem if alkali etching is performed without applying a resist for alkali etching, but soot adhering to the film surface is completely removed. In order to remove the resist, it is more preferable to apply the resist because the resist is removed together with the resist as well as the cleaning with alkali.

【0012】フィルムの厚みは、レーザーの照射時間を
調節することによって調節する。即ち、エキシマレーザ
ーでは1パルスで取り除く事の出来る厚みが一定である
ので、照射するパルス数を調節する事によって任意の厚
みにフィルムを除去する事が出来る。フィルム層を残す
厚みとしては、0.5〜5μmが望ましい。0.5μm
以下ではレーザー出力を低下させねば厚みの調節が難し
く、出力の低下によって加工時間が長くなるため好まし
くない。また、5μm以上の場合には、次工程のアルカ
リエッチングに時間がかかるため好ましくない。
The thickness of the film is adjusted by adjusting the laser irradiation time. That is, in the excimer laser, since the thickness that can be removed by one pulse is constant, the film can be removed to an arbitrary thickness by adjusting the number of irradiation pulses. The thickness which leaves the film layer is preferably 0.5 to 5 μm. 0.5 μm
In the following, it is difficult to control the thickness unless the laser output is reduced, and the processing time is prolonged due to the decrease in the output, which is not preferable. On the other hand, when the thickness is 5 μm or more, it takes a long time for alkali etching in the next step, which is not preferable.

【0013】[0013]

【作用】本発明によれば、導体箔上にポリアミック酸溶
液を直接塗布・乾燥して得られる2層フレキシブル回路
用基板に、導体配線の形成を行った後、フィルム層を
0.5〜5μmの厚みで残して穴加工を行い、アルカリ
性溶液によって加工する厚みを少なくし、しかる後に、
アルカリ溶液中でエッチングを行って残ったフィルム層
を除去することによってアルカリ加工時間を短かくし、
孔のエッジ部分と回路パターンの境界にクラックや断線
を生じたり、また、レーザー加工時に発生するススの付
着によってメッキが困難になったり、製品の電気特性が
低下してしまうことのないフレキシブル印刷回路基板を
製造することができる。
According to the present invention, after a conductor wiring is formed on a two-layer flexible circuit board obtained by directly applying and drying a polyamic acid solution on a conductor foil, the film layer is formed to a thickness of 0.5 to 5 μm. Perform hole processing while leaving at the thickness of, reduce the thickness processed by the alkaline solution, and then,
Shortening the alkali processing time by removing the remaining film layer by performing etching in an alkaline solution,
A flexible printed circuit that does not cause cracks or breaks at the boundary between the edge of the hole and the circuit pattern, and does not make plating difficult due to the adhesion of soot that occurs during laser processing or reduce the electrical characteristics of the product A substrate can be manufactured.

【0014】[0014]

【実施例】市販の35μm厚の電解銅箔上に、ポリアミ
ック酸溶液をスピンナーで塗布し、110℃から350
℃まで2時間かけて昇温して乾燥を行い、2層フレキシ
ブル回路用基板を得た。得られたポリイミド層の厚みは
25μmであった。この2層フレキシブルプリント回路
用基板の銅箔面上に通常のエッチングにより回路パター
ンを形成した後、フィルム面にアルカリエッチング用の
レジストを塗布し、次にKrFエキシマレーザーを用い
て、フィルム層がA(μm)残るように穴加工を行っ
た。エキシマレーザーは、出力50w、周波数200H
z、エネルギー密度0.8J/cmの条件で使用し
た。孔加工は、XYテーブル上に上記のフレキシブルプ
リント回路基板を固定し、レーザービームを固定して、
XYテーブルをスキャンさせる事によっておこなった。
得られたフレキシブルプリント回路基板を、ヒドラジン
溶液中でアルカリエッチングを行ない、残ったフィルム
層を除去した。水洗後、レジストを除去し、開孔部のあ
るフレキシブルプリント回路用基板を得た。条件を変え
て加工を行なった結果を表1に示した。
EXAMPLE A polyamic acid solution was applied on a commercially available electrolytic copper foil having a thickness of 35 μm with a spinner.
The temperature was raised to 2 ° C. over 2 hours and dried to obtain a two-layer flexible circuit board. The thickness of the obtained polyimide layer was 25 μm. After a circuit pattern is formed on the copper foil surface of the two-layer flexible printed circuit board by ordinary etching, a resist for alkali etching is applied to the film surface, and then the film layer is formed into an A by using a KrF excimer laser. (Μm) Hole processing was performed so as to remain. Excimer laser, output 50W, frequency 200H
z, and the energy density was 0.8 J / cm 2 . For drilling, fix the flexible printed circuit board on the XY table, fix the laser beam,
This was done by scanning the XY table.
The obtained flexible printed circuit board was subjected to alkali etching in a hydrazine solution to remove the remaining film layer. After washing with water, the resist was removed to obtain a flexible printed circuit board having openings. Table 1 shows the results of processing under different conditions.

【0015】[0015]

【表1】 [Table 1]

【0016】[0016]

【発明の効果】本発明によれば、レーザーによる孔加工
を精度よく、しかも加工後の孔のエッジ部分と回路パタ
ーンの境界にクラックや断線を生じたり、また、レーザ
ー加工時に発生するススの付着によってメッキが困難に
なったり、製品の電気特性が低下してしまうことなく、
支持フィルムに孔を有するフレキシブル印刷回路用基板
を得ることができる。本発明は、連続シートを用いたフ
レキシブル印刷回路用基板の連続生産工程にも容易に適
用でき、孔加工されたフレキシブル印刷回路用基板の工
業的な製造方法として好適なものである。
According to the present invention, laser drilling is performed with high accuracy, and cracks or disconnections occur between the edge of the drilled hole and the boundary between the circuit pattern and soot generated during laser processing. Without making plating difficult or reducing the electrical properties of the product.
A flexible printed circuit board having holes in the support film can be obtained. INDUSTRIAL APPLICABILITY The present invention can be easily applied to a continuous production process of a flexible printed circuit board using a continuous sheet, and is suitable as an industrial method for manufacturing a hole-processed flexible printed circuit board.

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 2層フレキシブル印刷回路用基板のフィ
ルムにレーザー加工により所定の開孔部を設けるにあた
り、フィルム層を0.5〜5μmの厚みで残して穴加工
を行い、しかる後にアルカリ溶液中でエッチングを行っ
て、残ったフィルムを除去することを特徴とする2層フ
レキシブル印刷回路基板の製造方法。
When providing a predetermined opening portion by laser processing on a film of a substrate for a two-layer flexible printed circuit, a hole is formed by leaving a film layer with a thickness of 0.5 to 5 μm, and then the film layer is treated with an alkaline solution. And removing the remaining film by etching.
JP3230738A 1991-06-05 1991-06-05 Method for manufacturing two-layer flexible printed circuit board Expired - Fee Related JP2872834B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3230738A JP2872834B2 (en) 1991-06-05 1991-06-05 Method for manufacturing two-layer flexible printed circuit board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3230738A JP2872834B2 (en) 1991-06-05 1991-06-05 Method for manufacturing two-layer flexible printed circuit board

Publications (2)

Publication Number Publication Date
JPH04359490A JPH04359490A (en) 1992-12-11
JP2872834B2 true JP2872834B2 (en) 1999-03-24

Family

ID=16912531

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3230738A Expired - Fee Related JP2872834B2 (en) 1991-06-05 1991-06-05 Method for manufacturing two-layer flexible printed circuit board

Country Status (1)

Country Link
JP (1) JP2872834B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5600492B2 (en) 2010-06-28 2014-10-01 キヤノン株式会社 Data processing apparatus, data processing method, control apparatus, control method, and program

Also Published As

Publication number Publication date
JPH04359490A (en) 1992-12-11

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