JP2873585B2 - Low melting point molten metal immersion protection tube - Google Patents
Low melting point molten metal immersion protection tubeInfo
- Publication number
- JP2873585B2 JP2873585B2 JP1169357A JP16935789A JP2873585B2 JP 2873585 B2 JP2873585 B2 JP 2873585B2 JP 1169357 A JP1169357 A JP 1169357A JP 16935789 A JP16935789 A JP 16935789A JP 2873585 B2 JP2873585 B2 JP 2873585B2
- Authority
- JP
- Japan
- Prior art keywords
- molten metal
- weight
- protection tube
- melting point
- low melting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 229910052751 metal Inorganic materials 0.000 title claims description 21
- 239000002184 metal Substances 0.000 title claims description 21
- 238000002844 melting Methods 0.000 title claims description 7
- 238000007654 immersion Methods 0.000 title claims description 6
- 230000008018 melting Effects 0.000 title description 5
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 16
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 15
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 8
- 229910052582 BN Inorganic materials 0.000 claims description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 2
- 229910052799 carbon Inorganic materials 0.000 claims description 2
- 230000001681 protective effect Effects 0.000 description 8
- 230000004907 flux Effects 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 5
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 229910052725 zinc Inorganic materials 0.000 description 4
- 239000011701 zinc Substances 0.000 description 4
- 229910001018 Cast iron Inorganic materials 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 239000011780 sodium chloride Substances 0.000 description 2
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- 230000003078 antioxidant effect Effects 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- PUZPDOWCWNUUKD-UHFFFAOYSA-M sodium fluoride Chemical compound [F-].[Na+] PUZPDOWCWNUUKD-UHFFFAOYSA-M 0.000 description 1
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Ceramic Products (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、アルミニウム、亜鉛等の低融点金属の溶解
炉又は保持炉において溶融金属に浸漬して使用されるヒ
ーター、熱電対、ガス吹込管有を保護する低融点溶融金
属浸漬保護管に関する。Description: TECHNICAL FIELD The present invention relates to a heater, a thermocouple, and a gas injection pipe which are used by being immersed in a molten metal in a melting furnace or a holding furnace for a low melting point metal such as aluminum and zinc. The present invention relates to a low-melting-point molten metal immersion protective tube that protects a metal.
通常、この種の保護管としては、鋳鉄製若しくは炭素
（Ｃ）製のもの、又は窒化けい素（Si3N4）結合の炭化
けい素（SiC）焼結体からなるものが知られていた。Usually, as this kind of protection tube, a tube made of cast iron or carbon (C), or a tube made of silicon carbide (SiC) bonded with silicon nitride (Si 3 N 4 ) has been known. .
しかし、鋳鉄製のものは、溶融金属中に鉄分が溶出し
易いと共に、Ｃ製のものは、酸化消耗が激しく、５〜10
日の寿命であり、かつSi3N4結合のSiC焼結体からなるも
のは、16〜18％の気孔率を有しているため溶湯が漏出し
易く、ヒーター用保護管として使用する場合、使用不能
になる等の欠点があった。However, in the case of cast iron, iron is easily eluted into the molten metal, and in the case of cast iron, oxidation consumption is severe, and
When the product is made of a SiC sintered body with a life of 3 days and Si 3 N 4 bonded, it has a porosity of 16 to 18%, so that the molten metal easily leaks out. There were drawbacks such as becoming unusable.
一方、溶湯の表面には、一般にフラックスと呼ばれる
酸化防止剤が浮かべられるが、このフラックスは、塩化
ナトリウム（NaCl）、ふっ化ナトリウム（NaF）等のア
ルカリを主成分としているため侵食性が強く、特に二酸
化けい素（SiO2）等の保護管は短時間で反応するので使
用ができなかった。On the other hand, an antioxidant generally called a flux floats on the surface of the molten metal, and since the flux is mainly composed of an alkali such as sodium chloride (NaCl) and sodium fluoride (NaF), the flux is highly corrosive. In particular, a protective tube made of silicon dioxide (SiO 2 ) cannot be used because it reacts in a short time.
そこで、従来、アルミニウム（Al）、亜鉛（Zn）等の
低融点金属又はそれらのフラックスとの反応に対して抵
抗性のある再結晶SiCからなる低融点溶融金属浸漬保護
管が知られている（特開昭63−112482号公報参照）。Therefore, conventionally, a low-melting-point molten metal immersion protection tube made of recrystallized SiC having resistance to a reaction with a low-melting-point metal such as aluminum (Al) and zinc (Zn) or a flux thereof has been known ( See JP-A-63-112482).
しかしながら、上記従来の再結晶SiCからなる低融点
溶融金属浸漬保護管は、再結晶SiCがAl、Znの溶湯との
濡れが悪いため、見掛け気孔率５〜40％の気孔を有する
にもかかわらず、Si3N4結合のSiCからなるものに比して
溶湯の浸透が少ないが、それでも長時間の使用によって
徐々に浸透し、ついには内表面まで達する問題がある。However, the conventional low-melting-point molten metal immersion protection tube made of recrystallized SiC has poor apparent wet porosity of 5% to 40% because recrystallized SiC has poor wettability with Al and Zn melts. However, although the penetration of the molten metal is less than that of SiC having Si 3 N 4 bonds, there is still a problem that it gradually penetrates over a long period of use and finally reaches the inner surface.
又、Al融液に用いた場合、再結晶SiCは、本質的にはA
lと反応しにくいのであるが、炉内雰囲気や内部に収容
されたヒーターによって酸化され、SiO2が生成すると、
次式、 3SiO2＋4Al→2Al2O3＋3Si の反応が生じ、保護管の組織内部にAlが侵入し、寿命が
短くなる問題があった。Also, when used for an Al melt, recrystallized SiC is essentially A
Although it is difficult to react with l, it is oxidized by the furnace atmosphere and the heater housed inside, and when SiO 2 is generated,
The reaction of the following formula: 3SiO 2 + 4Al → 2Al 2 O 3 + 3Si occurs, and Al penetrates into the inside of the structure of the protective tube, resulting in a problem of shortening the life.
そこで、本発明は、AlやZn等の低融点金属又はそれら
のフラックスとの反応に応じて抵抗性があると共に、よ
り長寿命の低融点溶融金属浸漬保護管の提供を目的とす
る。Accordingly, an object of the present invention is to provide a low melting point molten metal immersion protective tube having resistance to a reaction with a low melting point metal such as Al or Zn or a flux thereof and having a longer life.
前記課題を解決するため、本発明は、40〜80重量％の
窒化ほう素（BN）と、60〜20重量％のSiCと、外率で１
〜５重量％のＣとからなるものである。In order to solve the above-mentioned problems, the present invention relates to a method for manufacturing a semiconductor device, comprising: 40 to 80% by weight of boron nitride (BN); 60 to 20% by weight of SiC;
-5% by weight of C.
上記手段においては、BNの存在によって溶湯に対する
耐食性が生じると共に、SiCの存在によって濡れにくく
なり、かつＣの存在によって焼結性及び加工性が向上す
る。In the above means, the corrosion resistance to the molten metal is generated by the presence of BN, the wettability is reduced by the presence of SiC, and the sinterability and workability are improved by the presence of C.
BNは、40重量％未満であると溶湯との濡れがよくなり
侵食され易く、80重量％を超えると焼結しない。If the BN content is less than 40% by weight, the wettability with the molten metal is improved and the BN is easily eroded, and if it exceeds 80% by weight, it does not sinter.
SiCは、60重量％を超えるとSiO2の生成量が多くな
り、Al溶湯との濡れがよくなり侵食され易く、20重量％
未満であると焼結しない。If SiC exceeds 60% by weight, the amount of SiO 2 generated will increase, and the wettability with Al molten metal will be improved, and it will be easily eroded.
If it is less than this, it does not sinter.
Ｃは、５重量％を超えると酸化消耗し易く、寿命が短
くなってしまい、１重量％未満であると焼結性及び加工
性が低下する。好ましくは１〜３重量％である。If C exceeds 5% by weight, it is liable to be oxidized and consumed, and its life is shortened. If it is less than 1% by weight, sinterability and workability deteriorate. Preferably, it is 1 to 3% by weight.
Ｃの他に、窒化アルミニウム（AlN）、炭化ほう素（B
4C）を焼結助剤として外率で１〜２重量％添加してもよ
く、これらは溶湯との濡れが悪いので、溶損防止に役立
つ。In addition to C, aluminum nitride (AlN), boron carbide (B
4 C) may be added as a sintering aid in an external ratio of 1 to 2% by weight. These have poor wettability with the molten metal, and thus are useful for preventing erosion.
以下、本発明の実施例を説明する。 Hereinafter, embodiments of the present invention will be described.
実施例１〜５ BNとSiCの粉末を第１表に示す割合で混合すると共
に、Ｃを焼結助剤として外率でそれぞれ５重量％添加
し、かつ有機バインダーを添加して外径80mm×内径60mm
×長さ600mmの一端封じの筒状成形体を得、これらを200
0℃の不活性雰囲気中で20時間焼成してそれぞれ保護管
を作製した。Examples 1 to 5 BN and SiC powders were mixed at the ratios shown in Table 1, and C was added as a sintering aid in an external ratio of 5% by weight, respectively, and an organic binder was added to obtain an outer diameter of 80 mm. Inner diameter 60mm
× Obtain a cylindrical molded body with a length of 600 mm sealed at one end,
Each protective tube was manufactured by baking for 20 hours in an inert atmosphere at 0 ° C.
これらの保護管を、750℃の温度の溶融Alに浸漬し、
溶融Alが保護管内面に達するまでの寿命を調べたとこ
ろ、比較例1,2を併記する第１表のようになった。Immerse these protective tubes in molten Al at a temperature of 750 ° C,
When the life until the molten Al reached the inner surface of the protective tube was examined, the results are as shown in Table 1, which also shows Comparative Examples 1 and 2.
従って、40〜80重量％のBNと、60〜20重量％のSiC
と、外率で１〜５重量％のＣとの焼結体からなる保護管
とすると、寿命を、SiCからなるもの、SiCとSi3N4とか
らなるものに比して２倍程度に延ばし得ることが判っ
た。 Therefore, 40-80% by weight of BN and 60-20% by weight of SiC
And a protective tube made of a sintered body of C having an external ratio of 1 to 5% by weight, the life is about twice as long as that made of SiC and that made of SiC and Si 3 N 4. It turned out that it could be extended.
〔発明の効果〕 以上のように本発明によれば、BNの存在によって溶湯
に対する耐食性が生じると共に、SiCの存在によって濡
れにくくなり、かつＣの存在によって焼結性及び加工性
が向上するので、AlやZn等の低融点金属又はそれらのフ
ラックスとの反応に対する抵抗性を高めることができる
と共に、従来のものに比してより一層の長寿命化を図る
ことができる。[Effects of the Invention] As described above, according to the present invention, the corrosion resistance to the molten metal is caused by the presence of BN, the wettability is reduced by the presence of SiC, and the sinterability and workability are improved by the presence of C. The resistance to the reaction with low-melting metals such as Al and Zn or their fluxes can be increased, and the service life can be further extended as compared with conventional ones.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 佐々木 泰実 山形県西置賜郡小国町大字小国町378番 地 東芝セラミックス株式会社小国製造 所内 (72)発明者 田中 隆 山形県西置賜郡小国町大字小国町378番 地 東芝セラミックス株式会社小国製造 所内 (56)参考文献 特開 昭63−74964（ＪＰ，Ａ) 特開 平１−290560（ＪＰ，Ａ) (58)調査した分野(Int.Cl.6，ＤＢ名) C04B 35/565 C04B 35/583 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Yasumi Sasaki 378 Oguni-machi, Oguni-machi, Oguni-machi, Nishiokitama-gun, Yamagata Prefecture Inside the Oguni Works of Toshiba Ceramics Co., Ltd. 378 Toshiba Ceramics Co., Ltd. Oguni Works (56) References JP-A-63-74964 (JP, A) JP-A-1-290560 (JP, A) (58) Fields investigated (Int. Cl. 6 , (DB name) C04B 35/565 C04B 35/583
Claims (1)
％の炭化けい素と、外率で１〜５重量％の炭素とからな
ることを特徴とする低融点溶融金属浸漬保護管。1. A low-melting molten metal immersion comprising 40 to 80% by weight of boron nitride, 60 to 20% by weight of silicon carbide, and 1 to 5% by weight of carbon in an external ratio. Protection tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1169357A JP2873585B2 (en) | 1989-06-30 | 1989-06-30 | Low melting point molten metal immersion protection tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1169357A JP2873585B2 (en) | 1989-06-30 | 1989-06-30 | Low melting point molten metal immersion protection tube |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0337160A JPH0337160A (en) | 1991-02-18 |
| JP2873585B2 true JP2873585B2 (en) | 1999-03-24 |
Family
ID=15885080
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1169357A Expired - Fee Related JP2873585B2 (en) | 1989-06-30 | 1989-06-30 | Low melting point molten metal immersion protection tube |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2873585B2 (en) |
-
1989
- 1989-06-30 JP JP1169357A patent/JP2873585B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0337160A (en) | 1991-02-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |