JP2874364B2 - Manufacturing method of thin rod-shaped material for vapor deposition - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing a thin rod-shaped material for vapor deposition used for forming a thin film on a film surface by an electron beam vapor deposition method.

[0002]

2. Description of the Related Art Generally, VTRs and Ds as information recording media are used.
AT magnetic tape or computer floppy disk is polyethylene terephthalate (PET)
And the like, a Ni-based alloy, a Co-based alloy, or the like is adhered as a thin film by, for example, a vapor deposition method using an electron beam. In this case, the Ni-based alloy or the Co-based alloy is used as a material in the form of a plate or a rod, or is used as a material in the form of a pellet. Conventionally, as a method of manufacturing a thin rod-shaped material, in order to prevent contamination of impurities, melting and refining in a vacuum, casting as an ingot with an ingot case lining the refractory on the surface, It is known that a predetermined final product shape is obtained by performing primary processing (rough processing) and secondary processing (finishing processing) such as finish forging and rolling.

[0003]

However, the above-mentioned conventional method for producing a material has the following problems. That is, 1) Generally, metals and alloys for vapor deposition have many difficulties in workability due to high purity, and it is difficult to obtain a desired product when trying to obtain a product by plastic working. 2) Pure metal and alloy Since plastic working is generally performed by hot work, the material absorbs gas or is oxidized during repeated high-temperature heating, resulting in a large loss of expensive metal. ) The cost increases due to an increase in the number of steps due to plastic working and a decrease in material yield.

The present invention has been made in view of the above circumstances, and an object of the present invention is to form a rod-shaped intermediate material directly by casting, whereby the number of plastic working steps can be reduced. It is an object of the present invention to provide a method for producing a thin rod-shaped material for vapor deposition, which can significantly improve the yield and can obtain a low-cost and high-quality product smoothly and reliably.

[0005]

In order to achieve the above object, a method for producing a thin rod-shaped material for vapor deposition according to the present invention comprises the steps of:
Gold, Ni-based alloy is supplied from above the mold into a cylindrical mold set up in a vacuum, and after casting a rod-shaped intermediate material,
The rod-shaped intermediate material is processed at a processing temperature of 600 to 1100 ° C.
It is to work to a predetermined sectional shape by hot rolling under a condition of a rate of 75% or more .

[0006]

In the method for producing a thin rod-shaped material for vapor deposition according to the present invention, high purity Co, Ni or a Co-based alloy or a Ni-based alloy is placed in a cylindrical mold standing in a vacuum from above. after supplying the molten metal is cooled and solidified to obtain an intermediate material of the rod-shaped, the
For bar-shaped intermediate material, processing temperature 600-1100 ° C, processing rate
Hot rolling is performed under a condition of 75% or more to produce a thin rod-shaped material for vapor deposition having a predetermined size. In this case, the above rolling conditions
The reason is that when the processing temperature is 1100 ° C or higher, the surface oxidation
Remarkably, oxidation loss occurs, and oxidized skin during hot working
While the film is entangled and adversely affects the quality,
Below 00 ° C, if a nest occurs inside the ingot,
Incomplete crimping of nests adversely affects deposition characteristics?
And at the processing temperature of 600 to 1100 ° C.
If the processing rate is less than 75% even if
This is because crimping of the nest of the kit becomes insufficient.

[0007]

An embodiment of the present invention will be described below.

First, a high-purity metal or alloy (for example, pure Co, Co-20% N
i, Co-10% Cr, Co-15% Cr, Co-20
% Cr, Co-30% Cr, pure Ni, etc.), and then supply the molten metal of this high-purity metal or alloy into an upright cylindrical mold in a vacuum from above. . Then, when the molten metal supplied into the mold is cooled and solidified, the casting is taken out of the mold. In this case, since the casting in the mold is contracted by cooling and solidification, it can be smoothly extracted.

Next, the cast product (bar-shaped intermediate material) obtained as described above is rolled by a hot groove roll. Rolling conditions in this case, the processing temperature 600 to 1100 ° C., pressurized
Efficiency (cross-section reduction rate: 1-a / A, A is the cross-sectional area before processing,
a is set to be equal to or more than 75%. The reason is that first, pure Co, C
Assuming o-20% Ni, Co-10-30% Cr, and pure Ni, if the processing temperature is 1100 ° C. or higher, the surface oxidation is remarkable, causing oxidation loss and entrapment of an oxide film during hot working. Etc. occur and adversely affect the quality.
Below 00 ° C, if a nest occurs inside the ingot,
This is because the compression of the nest is incomplete and adversely affects the vapor deposition characteristics, and when the processing rate is less than 75% even when processing at the processing temperature of 600 to 1100 ° C., the compression of the nest of the ingot is not performed properly. In order to be sufficient, a processing rate of 75% or more is desirable.

As a result, the nest remaining inside the rod-shaped intermediate material is crushed and completely pressed to obtain a rolled product having a uniform material and a predetermined sectional shape. Subsequently, an oxide film is removed from the rolled product by polishing or the like to obtain a material for vapor deposition. Further, depending on the conditions of use, this thin rod is cut by a press or the like and used in the form of pellets.

Although the above embodiment has been described using the cylindrical mold 4, the present invention is not limited to this, and a square tube-shaped mold or another mold having a cross-sectional shape may be used.

[0012]

As described above, the method for producing a thin rod-shaped material for vapor deposition according to the present invention is a method for producing a high-purity material that has been melted and refined in a vacuum.
Of Co, Ni or Co based alloys, Ni-based alloy, is supplied from above the said template in a cylindrical mold which is erected in a vacuum, after casting the intermediate material of the rod-shaped, the rod-shaped intermediate members , Add
Conditions of processing temperature 600-1100 ° C and processing rate 75% or more
In this case, high-purity Co, Ni or a Co-based alloy or a Ni-based alloy is placed in a cylindrical mold that is erected in a vacuum from above. After supplying the molten metal and cooling and solidifying it to obtain a rod-shaped intermediate material,
A processing temperature of 600 to 1100 ° C is applied to this rod-shaped intermediate material.
By performing hot rolling under conditions of 75% or more and producing a thin rod-shaped material for vapor deposition of a predetermined size, the number of plastic working steps can be reduced, and the material yield is greatly improved. In addition, low-cost and high-quality products can be obtained smoothly and reliably. In this case,
The reason for the rolling conditions is that if the processing temperature is 1100 ° C or higher,
The surface is remarkably oxidized, causing oxidation loss, and at the time of hot working
Entrapment of the oxide film on the surface may occur, adversely affecting the quality
On the other hand, when the temperature was 600 ° C or lower, a nest occurred inside the ingot.
In this case, the compression of this nest is incomplete and adversely affects the deposition characteristics.
And the above processing temperature of 600 to 1100
If the processing rate is less than 75% even when processing at ℃
Insufficient crimping of the ingot nest
You.

────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Akifumi Sato 1230 Kamijiya, Okegawa-shi, Saitama Mitsubishi Materials Corporation Okegawa Daiichi Works (56) References JP-A-63-199844 (JP, A) JP-A 64-11967 (JP, A) JP-A-1-108367 (JP, A) JP 2-62110 (JP, B2) (58) Fields investigated (Int. Cl. ⁶ , DB name) C23C14 / 00-14/58 B22D 18/06

Claims (1)

(57) [Claims] 1. High-purity Co melted and refined in a vacuum ,
Ni or Co-based alloy or Ni-based alloy is supplied from above the mold into a cylindrical mold that is erected in a vacuum, and after casting a rod-shaped intermediate material, the rod- shaped intermediate material is processed at a processing temperature. 60
Hot rolling under the conditions of 0 to 1100 ° C and working ratio of 75% or more
A method for producing a thin rod-shaped material for vapor deposition, characterized in that the material is processed to a predetermined cross-sectional shape by the method.