JP2876445B2 - Centrifugal substrate drying equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a centrifugal substrate drying apparatus for draining and drying a substrate to be processed such as a semiconductor substrate.

[0002]

2. Description of the Related Art Japanese Patent Application Laid-Open No. 60-59740 is known as a conventional centrifugal substrate drying apparatus. In this centrifugal substrate drying apparatus, a plurality of carriers accommodating a plurality of substrates are accommodated in a rotor that rotates at a high speed about the vertical axis, and the washing liquid is separated by centrifugal force generated by rotation of the rotor.

As a substitute for the rotor having the vertical axis, a centrifugal substrate drying apparatus using a rotor having a horizontal axis shown in FIG. 6 has been proposed. In the substrate drying apparatus 42, a rotor 44 in a chamber 43 is rotated at a high speed by a motor provided at one end of a shaft thereof to separate water droplets on a substrate 46 provided in the rotor 44.

The rotor 44 is constituted by connecting a pair of side plates 46 by a plurality of shafts 47, 48, 49, 50, 51, 52, and the shafts 47, 48 are each provided with a movable substrate holding member 53. , 54 are swingably provided, and the shaft 55 is provided with the movable substrate holding member 53.
A lock member 57 for fixing the movable substrate holding portion 53 by engaging with a pin 56 provided on the base member is swingably provided.

The movable substrate holding member 53 and the movable substrate holding member 54 are connected by a connecting rod 58, and the lock member 5
7 and the movable substrate holding member 54 are connected by a tension bar 59, so that the movable substrate holding members 53 and 54 are fixed in a closed state by engaging the lock member 57 with the pin 56 of the movable substrate holding member 53. If the lock member 57 is rotated rightward in the figure,
The movable substrate holding members 54 and 55 interlock with the lock member 57.
Can be opened.

As described above, the conventional centrifugal substrate drying apparatus 42
Closes the movable substrate holding members 53 and 54 and
7 is engaged with the pin 56, the carrier 45 accommodating a plurality of substrates 46 is securely held in the rotor 44, and the rotor 44 is rotated to dry the substrate 46.

[0007]

However, in the conventional configuration, the release of the lock member 57 is supported only by the tension bar 59, so that the movable substrate holding members 53 and 54 are rotated while the rotor 43 is rotating at a high speed. When the centrifugal force acts on the lock member 57 and the tension member 5 during rotation,
9, the lock member 57 is released, the movable substrate holding members 53 and 54 are opened by centrifugal force, and the substrate 46 to be processed and the carrier 45 may jump out and be damaged.

[0008] The present invention provides a method for rotating a centrifugal substrate drying apparatus during rotation.
Prevent opening of movable substrate holding member due to centrifugal force,
An object is to prevent damage to a substrate to be processed and a carrier.

[0009]

Means for Solving the Problems In order to solve the above problems, a centrifugal substrate drying apparatus according to the present invention comprises, as first means, a pair of side plates and a carrier which is placed between the side plates and stores a plurality of substrates. a carrier holding member for holding, is skein rotatably between the pair of side plates, the movable carrier holding member having a carrier abutting the carrier holding portion and the substrate abutting the substrate holder when closed it With
In a centrifugal substrate drying apparatus that rotates a rotor at a high speed to dry a substrate, the position of the center of gravity of the movable carrier holding member when the movable carrier holding member is closed is set to the rotation center of the rotor and the rotation axis of the movable carrier holding member. The carrier holding portion and the substrate holding portion are on the opposite side to the extension of the above.

As a second means, a pair of side plates, a substrate holding member bridged between the side plates and holding a plurality of substrates, and a pair of side plates rotatably mounted between the pair of side plates and closed. Yes having a substrate holding portion contacting the substrate and those at the time
A rotor comprising a moving substrate holding member and a
In a centrifugal substrate drying apparatus for drying a plate, the position of the center of gravity of the movable substrate holding member when the movable substrate holding member is closed is defined with respect to an extension line between the rotation center of the rotor and the rotation axis of the movable substrate holding member. The substrate holding portion is on the opposite side.

[0011]

Embodiment An embodiment of the present invention will be described with reference to the drawings. Figure 1
Partial sectional view of a side surface of a rotor of a centrifugal substrate drying apparatus, FIG.
Is a front sectional view of a centrifugal substrate drying apparatus, and FIG.
FIG. 4 is a side cross-sectional view of the drying device, and FIG. 4 shows a state different from FIG.
It is a sectional side view of a rotor .

The rotor 2 of the centrifugal substrate drying apparatus 1 includes a pair of side plates 3, a pair of inner plates 4, a plurality of frames 5,
6, 7, 8 and the carrier holding plate 9 form a schematic skeleton.

The movable carrier holding member 10 includes a pair of swinging plates 12 fixed to a shaft 11 rotatably provided on the side plate 3 and the inner plate 4, and a substrate suspended between the swinging plates 12. Holding rod 13, carrier holding rod 14, weight 15,
It is composed of positioning pins 16. The movable carrier holding member 17 includes a pair of swinging plates 19 fixed to a shaft 18 rotatably provided on the side plate 3 and the inner plate 4,
It is composed of a substrate holding rod 20 and a carrier holding rod 21 which are bridged between the rocking plates 19, a weight 22, and a positioning pin 23.

Weights 15 and 22 provided on the movable carrier holding member 10 and the movable carrier holding member 17, respectively.
Is that the position G of the center of gravity of the movable carrier holding member 10 and the position G ′ of the center of gravity of the movable carrier holding member 17 are with respect to extension lines D and E connecting the rotation center X of the rotor 2 and the shafts 11 and 18, respectively. The weights and positions are determined so as to be opposite to the positions of the substrate holding rods 13 and 20 and the carrier holding rods 14 and 21 (below the lines D and E in the figure).

The carrier 24 and the substrate 25 accommodated in the carrier 24 include a carrier holding plate 9 and a substrate holding rod 1 provided on movable carrier holding members 10 and 17.
3 and 20 and carrier holding rods 14 and 21.

The positioning of the substrate holding rods 13 and 20 is performed by abutting positioning pins 16 and 23 provided on the movable carrier holding members 10 and 17 against the upper surface of the inner plate 4. It is maintained by the tension of a tension bar 26 bridged between the member 10 and the movable carrier holding member 17.

A motor 27 is a drive source for rotating the rotor 2 , and an opening / closing lid 28 is slidably provided along the outer periphery of the centrifugal substrate drying apparatus 1, and is opened when a substrate is loaded and unloaded. It is closed during the rotation of 2. The discharge port 29 is for discharging the liquid separated from the substrate 25 by the rotation of the rotor 2.

Next, the operation of this embodiment will be described. The carrier is carried into the rotor 2 by a robot hand (not shown).
7 is in a state of open, as shown in FIG.

When the carrier 24 is placed on the carrier holding plate 9, the shaft 11 is rotated by a drive source (not shown) (in the direction of arrow A in FIG. 3). Thus, the movable carrier holding member 10 rotates in the closing direction, and the movable carrier holding member 17 also rotates in the closing direction via the tension bar 26.
Then, first, the positioning pin 23 of the movable carrier holding member 17 comes into contact with the upper surface of the inner plate 4, and the position of the movable carrier holding member 17 is regulated.

The other movable carrier holding member 10 further rotates against the tension of the tension bar 26, and when it exceeds the top dead center of the tension bar 26, the positioning pin 16 contacts the upper surface of the inner plate 4 and its position is regulated. Is done. Then, the movable carrier holding member 1 is moved by the tension of the tension bar 26.
0 and 17 maintain the closed state shown in FIG.

At this time, the carrier holding rods 14 and 21 are in contact with the carrier 24 and hold the carrier 24 in the rotor 2 together with the carrier holding plate 9.
0 abuts on the substrate 25 to be processed, and
Hold within.

Next, the motor 27 is driven, and the rotor 2 rotates. With this rotation, the movable carrier holding member 10,
A centrifugal force acts on 17. The centrifugal force is applied to the movable carrier holding member 1
Acting on the centers of gravity G and G ′ of 0 and 17, respectively, the movable carrier holding member 10 is about to rotate around the shaft 11 in the right direction of the arrow B in FIG. 3, and the movable carrier holding member 17 is around the shaft 18. 3 Try to rotate in the direction of arrow C.

Therefore, as the rotor 2 rotates at a higher speed, the centrifugal force acts to close the substrate holding rods 13 and 20 and the carrier holding rods 14 and 21 of the movable carrier holding members 10 and 17, so that the carrier 24 rotates during rotation. In addition, it is possible to prevent the substrate 25 from flapping and being damaged, and to eliminate the lock member, thereby reducing the number of components.

FIG. 5 is a side view of the rotor 2 of the centrifugal substrate drying apparatus according to the second embodiment.
An example will be described. In the second embodiment, the substrate 25 to be processed is directly held in the rotor 2 by a plurality of substrate holding members 30 and movable substrate holding members 31, 36.

The movable substrate holding member 31 includes a pair of swinging plates 33 fixed to a shaft 32 movably provided on the side plate 3 and the inner plate 4, and a substrate holding rod bridged over the swinging plate 33. The movable board holding member 36 is composed of a pair of swinging plates 38 fixed to a shaft 37 movably provided on the side plate 3 and the inner plate 4, and a pair of swinging plates 38.
8 and a weight (not shown) having the same configuration as the weight 35 of the movable substrate holding member 31.

The weight 35 of the movable substrate holding member 31 and the weight (not shown) of the movable substrate holding member 36 are such that the center of gravity g of the movable substrate holding member 31 and the center of gravity g ′ of the movable substrate holding member 36 are the rotation centers of the rotor 2 respectively. x and axis 32 and axis 37
The weight and position of the extension lines H and I are determined so as to be opposite to the positions of the substrate holding rods 34 and 39 (below the lines H and I in the figure). Is

With the movable substrate holding members 31 and 36 closed for holding the substrate, the positioning portion 40 of the movable substrate holding member 31 and the positioning portion (not shown) of the movable substrate holding member 36 are connected to the frames 7 and 8 respectively. In contact therewith, the positions of the movable substrate holding members 31, 36 are regulated. Also, the tension bar 41 causes the movable substrate holding members 31, 3
6 is maintained in the closed position.

Therefore, according to the second embodiment, it is possible to provide a centrifugal substrate drying apparatus in a carrier-less line process, and it is possible to increase the efficiency of manufacturing a semiconductor substrate by eliminating the carrier. Further, the higher the speed of the rotation of the rotor 2, the more the centrifugal force acts to close the substrate holding members 31 and 35, so that the substrate to be processed does not rattle and the same effect as in the first embodiment can be obtained.

Although the movable carrier holding member is eliminated in the first embodiment and the lock member for fixing the movable substrate holding member is eliminated in the second embodiment, this may be provided. Thus, the movable carrier holding member or the movable substrate holding member can be more securely fixed in the closed state.

[0030]

As described above, first, in the centrifugal movable substrate drying apparatus for holding a substrate to be processed via a carrier, the center of gravity of the movable carrier holding member in a state where the movable carrier holding member is closed is described. Since the position is on the side opposite to the positions of the carrier holding portion and the substrate holding portion with respect to the extension line between the rotation center of the rotor and the rotation axis of the movable carrier holding member, it acts on the movable carrier holding member during rotation of the rotor. The centrifugal force acts to close the substrate holding portion and the carrier holding portion of the movable carrier holding member, and can eliminate the conventional fluttering of the target substrate due to the lifting of the substrate holding member and the damage of the target substrate due to the floating. Second, in a centrifugal substrate drying apparatus that directly holds a substrate to be processed without using a carrier, the position of the center of gravity of the movable substrate holding member in a state where the movable substrate holding member is closed is determined by the rotation center of the rotor and the movable substrate holding member. Since it is on the opposite side of the position of the substrate holding part with respect to the extension line with the rotation axis of the member, the centrifugal force acting on the movable substrate holding member during rotation of the rotor closes the substrate holding part of the movable substrate holding member. Because it works, it is possible to eliminate the fluttering of the substrate due to the lifting of the conventional substrate holding member and the damage of the substrate to be processed thereby,

[Brief description of the drawings]

FIG. 1 is a rotor of a centrifugal substrate drying apparatus according to the present invention.
Partial sectional view of the side

FIG. 2 is a front view of a centrifugal substrate drying apparatus according to the present invention.
Front view

FIG. 3 is a side sectional view of a centrifugal substrate drying apparatus according to the present invention.
Figure

FIG. 4 is a side sectional view of the rotor in a state different from FIG . 1;

FIG. 5 is a side sectional view of a rotor of a centrifugal substrate drying apparatus according to a second embodiment of the present invention.

FIG. 6 is a side sectional view of a conventional centrifugal substrate drying apparatus.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 centrifugal substrate drying device 2 rotor 5, 6, 7, 8 frame 9 carrier holding plate 10, 17 movable carrier holding member 11, 18 shaft 12, 19 rocking plate 13, 20 substrate holding rod 14, 21 carrier holding rod 15 , 22 weight 16, 23 positioning pin 24 carrier 25 substrate to be processed 26 tension bar 27 motor 28 opening / closing lid 30 substrate holding member 31, 36 movable substrate holding member 34, 39 substrate holding rod

Claims (2)

(57) [Claims] 1. A pair of side plates, a carrier holding member that is mounted between the side plates and holds a carrier that stores a plurality of substrates, and is rotatably mounted between the pair of side plates and closed. A movable carrier holding member having a carrier holding portion that sometimes comes into contact with a carrier and a substrate holding portion that comes into contact with a substrate
A centrifugal substrate drying apparatus that rotates a rotor having high speed to dry a substrate.The centrifugal substrate drying apparatus, wherein the position of the center of gravity of the movable carrier holding member when the movable carrier holding member is closed is set to the rotation center of the rotor. A centrifugal substrate drying apparatus characterized in that the carrier holding section and the substrate holding section are on the opposite side to the extension of the rotation axis of the movable carrier holding member and the movable carrier holding member. 2. A pair of side plates, a substrate holding member bridged between the side plates to hold a plurality of substrates, and a pair of side plates rotatably bridged between the pair of side plates. A movable base having a substrate holding part to abut
The high-speed rotation of the rotor comprising the plate holding member
In a centrifugal substrate drying apparatus that performs drying, the position of the center of gravity of the movable substrate holding member when the movable substrate holding member is closed is set such that the substrate is positioned with respect to an extension line between the rotation center of the rotor and the rotation axis of the movable substrate holding member. A centrifugal substrate drying apparatus characterized in that it is on the side opposite to the position of the holding unit.