JP2886240B2 - Semiconductor device production instruction device and production condition instruction system - Google Patents

Description

Description: BACKGROUND OF THE INVENTION (Field of Industrial Application) The present invention relates to an apparatus for designating manufacturing conditions at the time of manufacturing a semiconductor, and more particularly, to a robot in a manufacturing line in which steps of different automation levels of a manufacturing line are arranged. The present invention relates to a semiconductor device manufacturing instruction apparatus and a manufacturing condition instruction system for performing an instruction on manufacturing conditions and collecting results when an automatic machine and a human operation are mixed.

(Prior Art) A semiconductor integrated circuit is obtained by forming an active element and a wiring connecting these elements on a silicon wafer.
In order to realize this, it is necessary to form a layered structure, and its manufacture is made up of each step of repeatedly forming an element pattern, a circuit pattern, a thin film, etc., and the number of manufacturing steps inevitably increases. Therefore, in the actual situation such as the formation of a circuit pattern, the work of different processes is often performed using the same equipment.

Therefore, in order to carry out the manufacturing process of a product, it is necessary to inform the worker of the progress of the process and the working conditions in advance as information, and conventionally, the worker understands the contents of the information written on paper. Work had been carried out since then. Also, when this operation is automated by a machine, that is, in a line configured to automatically set the operating conditions of the manufacturing equipment or to automatically transport the wafers, the process progress of the product and the manufacturing conditions are automatically adjusted. Japanese Patent Laid-Open Publication No.
-503260 and JP-A-63-503259.

(Problems to be Solved by the Invention) In the above-described conventional technology, a communication mechanism capable of taking in a transfer mechanism for receiving and receiving a wafer, a manufacturing process, manufacturing conditions, and the like is provided for all the equipment on the manufacturing line. This is a requirement for automation. For this reason, there is a problem in that large-scale investment and time are required to automate a conventional existing line, and when a wafer being manufactured on an automated line is manufactured on another non-automated line, manufacturing is difficult. No consideration is given to a method of transmitting necessary information to the other line that is not automated. The present invention solves the above-mentioned problems of the prior art, and can indicate the progress of the wafer manufacturing process and the manufacturing operation conditions to both the automated line and the non-automated line, that is, both the manufacturing equipment and the worker. It is another object of the present invention to provide a condition indicating device and a manufacturing condition indicating system for inputting and storing the operation results.

(Means for Solving the Problems) The above object is achieved by a semiconductor device manufacturing instruction apparatus having the following conditions and a manufacturing condition instruction system using the same.

Information such as a semiconductor manufacturing process sequence and a process name, and manufacturing conditions is stored, and a communication function capable of transferring the information to the manufacturing facility by connection with the manufacturing facility is provided. And the manufacturing conditions are displayed on a display unit provided in the indicating device, so that the manufacturing process and the manufacturing conditions can be indicated to both the manufacturing device and the worker.

Further, the input of the manufacturing conditions by the communication function and the work results by the displayed manufacturing conditions is performed by a function to be received by communication from the manufacturing equipment and a worker operating the input device such as a ten-key pad or a function key on the pointing device. And a function that can be input, and the input result data is stored in the pointing device.

Furthermore, the instruction by the indicating device stores the manufacturing process sequence stored in advance and the manufacturing condition data corresponding to each process in the indicating device, and the output of the data is sequentially performed by the manufacturing device in accordance with the manufacturing process order. Alternatively, the process is output to the operator. At this time, the process in which the operation has been completed is determined based on the presence / absence of the actual result data of the operation, and the instruction information is output.

(Operation) With the above configuration, in the manufacture of a semiconductor device, the manufacturing conditions of a product can be accurately instructed to a manufacturing apparatus and an operator for each manufacturing process. Can be recorded and displayed.

Example An example of the present invention will be described with reference to the drawings.

FIG. 1 is a block diagram showing the configuration of the present invention. The manufacturing instruction device for a semiconductor device according to the present invention includes a control unit 101 for controlling the entire device, an input unit 102 using a keyboard, a display unit 105 for displaying work conditions to an operator, and scrolling of the displayed screen. A display control unit 103 for performing control,
A storage unit (memory) 104 for storing the displayed manufacturing process, manufacturing condition data, manufacturing result data, and a program for controlling the entire apparatus by the control unit 101; a communication output unit 107 for transmitting manufacturing conditions to the manufacturing apparatus; Communication input section for inputting the contents of work performance data received from manufacturing equipment based on manufacturing conditions
And a communication control unit 106 for controlling the communication output unit 107 and the communication input unit 108.

FIG. 2 shows a semiconductor device manufacturing instruction apparatus 20 according to the present invention.
1 shows a perspective view of the appearance, 202 is a display using a liquid crystal or light emitting element, the product type name, serial number of the product to be manufactured,
Display the manufacturing process. 203 is a communication output end for transmitting data to the manufacturing device by the light emitting element, 204 is a communication input end of the light receiving element for receiving the actual work data from the manufacturing device,
The keyboard is a display control key that scrolls the displayed contents
205, a process display key 211, a manufacturing condition display key 210, a communication transmission key 209, a communication reception key 208, various function keys such as a result input key 207, and a numeric keypad 206. In consideration of the above, the size of the display 202 is preferably about the size of a notebook.

In the embodiment of FIG. 2, the display 201 has a product name HG0001,
This shows a state in which cleaning of the previous process name, oxidation of the process name, and inspection of the next process name are displayed.

In the indicating device 201 of the present invention, when the worker performs the work while observing the manufacturing conditions, he or she presses the process display key 211, and the product type name, the serial number of the product to be worked, and the name of the process to be started. , And the names of the work steps before and after it. In this display, by pressing a scroll key of an up-down arrow of the control key 205, a subsequent process name or a process name which has already been processed can be displayed. Further, the process result can be inspected by pressing the scroll key of the left and right arrow.

Some of these actual data indicate inspection results.For example, if the process to be performed is a dry etching process for forming a pattern, the etching time is set based on the thickness of the film forming process in the preceding process. It will be helpful.
After the process to be executed is displayed, the condition display key 21
Pressing 0 displays the work conditions. This condition is a set value for the equipment when performing the work. For example, in the case of the oxidation process displayed on the display unit 202 in FIG. 2, the atmosphere in the oxidation, the flow rate of the oxidation gas, the oxidation temperature,
The oxidation time, the thickness specification of the oxide film at the time of inspection, the recipe number of the equipment, etc. correspond to this. Based on the content displayed on the display 202, the operator sets the manufacturing conditions for the manufacturing apparatus and performs the operation.

After the work is completed, the operator presses the result input key 207,
By further operating the numeric keypad 206, the pointing device 201
Is input to the memory 104 inside the.

Next, a situation in which conditions are automatically set for the manufacturing apparatus 301 will be described with reference to FIG. The indicating device 201 and the manufacturing device 301 are connected via an indicating data communication interface 303, whereby the output from the indicating device 201 is converted into a signal of the control computer 302 of the manufacturing equipment 301, and the manufacturing device 301 Manufacturing conditions can be set.

Although the instruction data communication interface 303 is installed in FIG. 3 for data conversion to the control computer 302 of the manufacturing apparatus 301, even if an interface capable of taking in the data of the instruction apparatus 201 is installed inside the control computer 302, Manufacturing conditions can be set in the manufacturing apparatus 301 in the same manner as in FIG.

FIG. 4 shows a manufacturing apparatus 403 with a communication function that can automatically set the manufacturing conditions in a manufacturing line, a manufacturing apparatus 403 ′ in which a communication function is incorporated in the apparatus, and a manufacturing apparatus 404 without a communication function. Indicating device 2 of the present invention
It is a figure which shows the Example of the manufacturing condition instruction | indication system which applied 01.

The manufacturing devices 403 and 403 ', which can set the manufacturing conditions by using the control computer 302 by the communication means, include the pointing device 20.
The manufacturing device 404 without the communication function allows the worker to perform the operation by looking at the condition and instruction contents of the instruction device 201, because the manufacturing condition 404 can be automatically set by 1.

As shown in FIG. 4 embodiment, the entire semiconductor device manufacturing line can instruct the manufacturing apparatus of accurate manufacturing conditions without introducing a network system by a host computer. As shown, the present invention is also applicable to a production line using a computer network. Furthermore, even on a production line including both a line in which the transfer of wafers for manufacturing equipment and semiconductor production is automated by a robot or the like, and a line that is not automated, input accurate production condition instructions and their work results, It can be stored and output.

FIG. 5 shows that the indicating device 201 has a product process order 1006,
An example is shown in which a sheet describing a process name 1005 and a result entry field 1004 indicating whether or not work has been completed is attached, and if the operator sees this sheet, the entire process of the product can be performed without operating the indicating device 201. Progress is known.

FIG. 6 is a view showing another embodiment in which the progress of the whole process of FIG. 5 can be recognized. One side (a) of the manufacturing condition indicating device is used as a progress display screen, and the back side (b) is displayed. , Function keys and numeric keys as shown in FIG. 2 are arranged. By operating the function keys on the back surface (b), the entire process is displayed on the front surface (a), and the process that has been completed is displayed in reverse with the display control key 205 so that the progress of the process can be known. It is composed. Similarly, the display of the work process and the manufacturing conditions can be switched by operating the function keys.

FIG. 7 shows an embodiment of a production condition indicating system different from that of FIG. Manufacturing equipment with communication function on the production line
403, manufacturing apparatuses 404 and 404 'without a communication function are mixedly provided, and a communication interface is provided near the manufacturing apparatus.
1001 is installed, and the manufacturing apparatus with communication function 403 is connected to the communication interface 1001 via a communication line 2001 for transferring manufacturing conditions and receiving manufacturing results. In addition, the manufacturing apparatuses 404 and 404 'without a communication function are configured to share the communication interface 1001 for a plurality of manufacturing facilities, and the communication interface 1001 is connected via a communication line 506 to the process progress management system 507, It is connected to the manufacturing condition management system 508. The instruction device 1003 stores the product serial number, product type name, manufacturing process sequence, manufacturing conditions, etc., secures a storage area for inputting results, and stores a sheet describing the manufacturing process progress order, process name, and results entry fields. is stuck on. The operator 503 understands the name of the process to be performed by observing the progress of the process of the sheet. After that, the indicating device 1003 connects to the communication interface 1001 to display the process to be performed, and the serial number of the product is transferred from the communication interface 1001 to the process progress management system 507 via the communication line 506. The process progress management system 507 responds to the communication interface 1001 with the latest process name corresponding to the process progress of the product or change information such as addition or deletion of the process, based on the product serial number.

The indicating device 1003 determines whether the responded process name and the instructing process are the same, and if so, displays so as to inform an operator that the process is correct. The change of the instruction process of the device 1003 is notified. If the above is correct, the indicating device 1003 displays the manufacturing conditions,
The worker sees the conditions and sets the conditions for the equipment to perform the manufacturing operation, or transmits the manufacturing conditions to the manufacturing equipment with communication function 403 and performs the operation according to the manufacturing conditions. This method has the effects of reducing defects due to manufacturing process errors and shortening the setting time of manufacturing conditions for equipment.

According to the above-described embodiment, the order of the manufacturing process and the manufacturing conditions for each product type can be designated, and there is an effect that occurrence of defects due to errors in the manufacturing conditions can be reduced.

With the indicating device and the manufacturing condition indicating system of the present invention,
A so-called paperless system that eliminates the use of paper from the production line can be realized, and the production operation can be performed in a clean environment.

(Effects of the Invention) By implementing the present invention, the entire semiconductor device manufacturing line can instruct the manufacturing apparatus of accurate manufacturing conditions without introducing a network system using a host computer, and the product manufacturing conditions can be reduced. It is possible to accurately instruct the manufacturing equipment and workers for each manufacturing process, reduce the incidence of defects due to incorrect selection of manufacturing conditions, and store and display work performance data to reduce the content of work. Since the check can be performed in detail after the end of the production, a remarkable effect such as the fact that the analysis of the product characteristics can be used to determine the content of the defect and to improve the product yield can be achieved.

[Brief description of the drawings]

FIG. 1 is a block diagram showing the configuration of a first embodiment of a semiconductor device manufacturing instruction apparatus according to the present invention, FIG. 2 is an external perspective view of a worker instruction instruction apparatus according to the present invention, and FIG. FIG. 4 is a perspective view of an embodiment showing a combination of a manufacturing instruction apparatus and a semiconductor manufacturing apparatus according to the present invention, and FIG.
FIG. 3 is an embodiment diagram showing the configuration of the manufacturing condition indicating system according to FIG. 3, FIG. 5 is a perspective view showing a second embodiment of the indicating device of the present invention, and FIGS. FIG. 7 is a diagram showing a third embodiment of the pointing device of the present invention, and FIG. 7 is a diagram showing another embodiment different from FIG. 4 showing the configuration of the manufacturing condition indicating system of the present invention. 101 control section, 102 key input section 103 display control section, 104 recording section 105 display section, 106 communication control section 107 communication output section, 108 communication input section 201 ... Indicator, 202 ... Display 203 ... Communication output terminal, 204 ... Communication input terminal 205 ... Display control key, 206 ... Ten key 207 ... Result input key, 208 ... Communication reception key 209 ... Communication transmission key 210 210 Condition display key 211 Process display key 301 Manufacturing device 302 Manufacturing device control computer 303 Instruction data communication interface 403 Manufacturing device with communication function 403 ′ Control computer Manufacturing equipment with communication interface 404… Manufacturing equipment without communication function 601… Switching key, 1001… Display device 1003… Instruction device 1010… Read / write device

──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Kazuhiko Maeda 292 Yoshida-cho, Totsuka-ku, Yokohama-shi, Kanagawa Prefecture Inside the Hitachi, Ltd. Production Technology Research Laboratory (72) Inventor Takemasa Iwasaki 292 Yoshida-cho, Totsuka-ku, Yokohama-shi, Kanagawa Stock (72) Inventor Sadao Shimosha 292 Yoshida-cho, Totsuka-ku, Yokohama-shi, Kanagawa Prefecture In-house Hitachi, Ltd. 20-1 Chome, Musashi Plant, Hitachi, Ltd. (72) Inventor Kanji Morikawa 5-20-1, Kamizu Honcho, Kodaira-shi, Tokyo Inside, Musashi Plant, Hitachi, Ltd. 5-20-1, Kamizuhoncho Inside Musashi Plant, Hitachi, Ltd. (58) Field surveyed (Int.Cl. ⁶ , DB name) H01L 21/0 2 H01L 21/68

Claims (5)

(57) [Claims] 1. A manufacturing instruction device for instructing a manufacturing condition of a semiconductor device, a storage unit for storing a manufacturing process sequence and manufacturing conditions corresponding to the manufacturing process, and instructing the manufacturing device from the storage unit to the manufacturing device. Means for displaying, a name and a manufacturing condition of the manufacturing process, and an output display means including a key input unit for displaying the manufacturing condition so as to be visible to an operator; a storage unit; a means for commanding the manufacturing condition; and the key input unit. And a control unit for controlling all the devices including the output display means. The production work results by the manufacturing apparatus or the operator are stored in the storage unit and selected via the output display means including the key input unit. A manufacturing instruction device for a semiconductor device, characterized in that display is possible. 2. The output display means which is visible to the worker,
2. The semiconductor device manufacturing instruction apparatus according to claim 1, further comprising means for displaying the work step and the steps before and after the work step, and displaying a manufacturing condition or a work condition of each step. 3. An output display means visible to the worker,
2. The semiconductor device manufacturing instruction apparatus according to claim 1, further comprising means for displaying all manufacturing steps and manufacturing progress status. 4. The apparatus according to claim 1, wherein the means for outputting the manufacturing conditions from the storage unit to the manufacturing apparatus is performed via a communication interface for converting a signal into a data format recognizable by the manufacturing equipment. The manufacturing instruction apparatus of the semiconductor device described in the above. 5. A manufacturing line in which a semiconductor device manufacturing apparatus having a communication function capable of automatically setting manufacturing conditions and a semiconductor device manufacturing apparatus having no communication function are mixed.
A semiconductor device manufacturing condition instruction system, comprising the production instruction device described above.