JP2897202B2 - Barrel polishing equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a barrel polishing apparatus used for chamfering a quartz plate, a piezoelectric ceramic plate, etc., such as a convex process.
More specifically, the present invention relates to a barrel polishing apparatus that performs chamfering using a curved surface of a barrel.

[0002]

2. Description of the Related Art Piezoelectric vibrating plates such as quartz plates and piezoelectric ceramic plates are widely used as frequency sources for communication devices or clock sources for computers and the like. For example, an AT-cut quartz plate corresponding to a relatively high frequency often uses a thickness-shear vibration mode. However, unnecessary vibration modes such as a contour vibration mode also exist near the frequency of the vibration mode, and these spuriously affect the desired vibration mode (frequency) and cause frequency fluctuation. . As one of the countermeasures for such spurious suppression, it has been considered to perform chamfering around the piezoelectric vibrating plate. As such a processing apparatus, for example, as shown in Japanese Utility Model Application Laid-Open No. 60-97247, the inner wall of a barrel is required. A barrel polishing apparatus having a curved surface over the entire surface is disclosed. With the polishing apparatus disclosed herein, the piezoelectric vibrating plate is subjected to convex processing or bevel processing, and a large flat portion of the piezoelectric vibrating plate can be obtained, so that a piezoelectric vibrating plate having stable electric characteristics can be obtained. .
FIG. 6 is a schematic view showing an example of such a conventional barrel polishing apparatus. The drum DA has a cylindrical shape and a drum shaft G1,
G1 is connected to both ends thereof, and inside the drum DA, a plurality of spherical barrels DC, DC having a spherical shape both inside and outside are provided. A predetermined amount of a piezoelectric vibrating plate and an abrasive to be polished are charged into the spherical barrels DC, DC, and rotated around a drum shaft at a predetermined rotation speed for a predetermined time, thereby forming an inner wall of the spherical barrel. A curved surface corresponding to the curvature is transferred to the piezoelectric diaphragm and chamfering is performed. That is, FIG.
By subjecting the piezoelectric vibration plate 1 shown in FIG. 7A to such barrel polishing, a piezoelectric vibration plate having a convex surface 11 and having many chamfered flat portions as shown in FIG. Can be. Usually, as shown in FIG.
A large number of piezoelectric diaphragms can be processed at one time.

[0003] However, when the inventor observes the inner wall of the barrel after using the barrel polishing apparatus using a spherical barrel as shown in FIG. 6, the portion contributing to polishing (contact with the piezoelectric vibration plate on the inner wall of the barrel). Portion) is limited to the portion indicated by the vertical line L, and it was found that both ends in the rotation axis direction of the spherical barrel did not contribute to polishing. Therefore, there is a problem that the throughput per unit volume of the barrel is low.

[0004]

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and has as its object to provide a barrel polishing apparatus capable of improving processing efficiency in a barrel polishing step. It is.

[0005]

In order to solve the above-mentioned problems, a barrel polishing apparatus according to the first aspect of the present invention supplies a piezoelectric vibrating plate and an abrasive to a barrel having a curved surface, and places the barrel around a rotating shaft. A barrel polishing apparatus for rotating and chamfering a piezoelectric vibrating plate corresponding to the curvature of the curved surface, wherein an inner wall of the barrel faces one spherical curved surface mainly contributing to polishing and both sides of the one spherical curved surface. And a curved surface or a flat surface that does not mainly contribute to polishing.

A barrel polishing apparatus according to claim 2 is
A barrel having an inner wall of the barrel mainly contributing to polishing, and a barrel having a curved surface or a flat surface formed on both sides of the one spherical curved surface and mainly not contributing to polishing, in the drum. By arranging multiple drums side by side and rotating this drum around its rotation axis,
The method is characterized in that chamfering of the piezoelectric diaphragm corresponding to the curvature of the spherical curved surface is performed.

Further, a barrel polishing apparatus according to claim 3 is
3. The barrel polishing apparatus according to claim 1, wherein a rotation axis of the barrel or the drum is inclined at 5 to 20 degrees with respect to a horizontal axis.

[0008]

As described above, in the barrel polishing apparatus using a spherical barrel as shown in FIG. 6, a portion contributing to polishing (a portion of the inner wall of the barrel that is in contact with the piezoelectric vibration plate) is indicated by a vertical line L. It is limited to a portion, and both ends of the spherical barrel in the rotation axis direction do not contribute to polishing. As described in claim 1, a configuration in which the shape of the barrel inner wall mainly comprises one spherical curved surface which mainly contributes to polishing, and a curved surface or a flat surface formed on both sides of the one spherical curved surface so as not to mainly contribute to polishing. By adopting the shape, each of the eight corners of the piezoelectric vibrating plate can be convex-processed, which is an advantage when a conventional spherical barrel is used, and more flat portions of the piezoelectric vibrating plate can be obtained. Further, since there is no portion that protrudes in the direction of the rotation axis as in the case of a spherical barrel, the volume of the barrel can be reduced, and the throughput of a single piezoelectric vibration plate as a whole can be increased.

According to a second aspect of the present invention, a plurality of barrels each having the configuration described in the first aspect are arranged in a drum, and the barrel is polished by rotating the drum about a rotation axis thereof. Can be increased, and the processing amount of the piezoelectric vibrating plate at one time can be increased as a whole.

According to claim 3, claim 1 or claim 2
By mounting the barrel or the drum at an angle of 5 ° to 20 ° with respect to the horizontal axis, the polished surface of the piezoelectric vibration plate, which is the object to be polished, is easily inverted, and the chamfering process becomes uniform. According to experiments, the angle of inclination is about 5 degrees with respect to the horizontal axis, and the effect of making the chamfering process uniform by reversing action becomes remarkable. It was confirmed that the polishing efficiency was too low and the overall polishing efficiency was lowered.

[0011]

DESCRIPTION OF THE PREFERRED EMBODIMENTS First Embodiment An embodiment according to the present invention will be described with reference to the drawings, taking a centrifugal barrel polishing apparatus as an example. FIG. 1 is a schematic internal sectional view showing a part of a centrifugal barrel polishing apparatus according to a first embodiment of the present invention, FIG. 2 is a schematic internal sectional view showing the inside of a drum constituting a part of FIG. FIG. 3 is a perspective view of the barrel alone.

The centrifugal barrel polishing apparatus includes a cylindrical outer drum D that rotates at high speed about a main rotation axis G, and drum shafts G1, G2, and G provided at predetermined positions on the outer drum D.
Cylindrical drums D1 and D rotating about G3 and G4
2, D3, and D4, and each drum is installed with its rotation axis inclined at about 14 degrees with respect to the horizontal direction.
Inside each of these drums, there are barrels B1, B of a Tyco shape.
2, B3 are stored and installed obliquely. As shown in FIG. 3, each of the barrels B1, B2, and B3 has a partially spherical curved surface Ba that mainly contributes to polishing and a plane Bb that does not mainly contribute to polishing.

As shown in FIG. 2, a predetermined number of rectangular-shaped piezoelectric vibrating plates 1 and an abrasive C are charged (only a part is shown).
Drums D1, D containing barrels B1, B2, B3
2, D3 and D4 are installed on the exterior drum D, and this exterior drum D is rotated at high speed in the direction of arrow A1 as shown in FIG. As a result, each drum performs planetary rotation, rotates in the direction of arrow A2, and the piezoelectric vibrating plate 1 and the abrasive C in the Tyco-shaped barrel installed on each drum are pressed against the inner wall of the barrel by the action of centrifugal force. As a result, the piezoelectric vibrating plate 1 is polished at its eight corners by the abrasive C in accordance with the curvature of the inner wall of the barrel. By inverting the rotation direction of the exterior drum, an opportunity to invert the polished surface of the piezoelectric vibrating plate is provided, and the chamfering process can be made uniform. Further, in this embodiment, each drum is installed with its rotation axis inclined at about 14 degrees with respect to the horizontal direction, whereby the polished surface of the piezoelectric vibrating plate is easily inverted and the chamfering process is made more uniform. Can be.

Second Embodiment An embodiment according to the present invention will be described with reference to the drawings, taking a centrifugal barrel polishing apparatus as an example. FIG. 4 is a schematic internal sectional view showing the inside of the drum according to the second embodiment of the present invention. The description of the same components as those of the first embodiment is omitted. In the drum D1, barrels E1, E2, E3 are stored and installed upright. Each barrel is composed of a partially spherical curved surface Ea mainly contributing to polishing and a low curved surface Eb mainly not contributing to polishing. As in the first embodiment, a drum containing a predetermined amount of the piezoelectric vibrating plate 1 and a barrel in which the abrasive C is charged is installed on the outer drum, and the outer drum is moved in the direction of arrow A1 as shown in FIG. Rotate at high speed. As a result, each drum performs planetary rotation, rotates in the direction of arrow A2, and the piezoelectric vibrating plate 1 and the abrasive C in the Tyco-shaped barrel installed on each drum are pressed against the inner wall of the barrel by the action of centrifugal force. Be slid. As a result, the piezoelectric vibrating plate 1 is polished at its eight corners by the abrasive C in accordance with the curvature of the inner wall of the barrel. Incidentally, as in the first embodiment, the chamfering can be made uniform by reversing the rotation direction of the exterior drum.

Third Embodiment An embodiment according to the present invention will be described with reference to the drawings, taking a centrifugal barrel polishing apparatus as an example. FIG. 5 is a schematic internal sectional view showing the inside of the drum according to the third embodiment of the present invention. Drum D
Inside 1, barrels F1, F2, and F3 are stored and installed obliquely. Each barrel is composed of a partially spherical curved surface Fa mainly contributing to polishing and a curved surface Fb mainly not contributing to polishing, and has a substantially gourd-shaped cross section as a whole. In the second and third embodiments, it is also possible to adopt a configuration in which the rotation axis is rotated at an angle of 5 to 20 degrees from the horizontal.

Next, experimental data showing the polishing efficiency of the barrel polishing apparatus according to the present invention and that of the conventional product are shown. As a conventional product, two spherical barrels having a radius of curvature R = 65 mm are mounted on a predetermined drum, and this drum is installed at an angle of about 14 degrees from the horizontal axis.
The same drum as shown in the first embodiment is mounted on three drums each having a 25 mm spherical barrel with both ends in the rotation axis direction cut off by 25 mm, and the drum is installed at an inclination of about 14 degrees from the horizontal axis. As the product 2 of the present invention, a product having the same barrel and drum configuration as the product 1 of the present invention and having the drum installed without tilting was used. Fig. 1 shows each of these drums.
, Centrifugal barrel polishing was performed using a centrifugal barrel polishing apparatus having a plurality of outer drums. To each barrel, 1,000 rectangular quartz plates having a long side of 8.0 mm, a short side of 2.0 mm, and a thickness of 0.47 mm, and a polishing material of GC # 320 as a polishing material of 20 g were added. The amount of time was measured. The rotation direction of the exterior drum was 180 / rpm, and the rotation direction was reversed at 10 minute intervals. As a result of the experiment, the polishing time was 12 hours according to the conventional product, but the polishing time was 12 hours in the product 1 of the present invention, and the polishing time of
In each case, it was reduced to 10 hours. 1 for each invention
The number of barrels that can be mounted on one drum has been increased from two to three in the past, and polishing efficiency has been improved by about 1.8 to 2 times. Further, according to the product 1 of the present invention, compared to the product 2 of the present invention, the uniformity of the polishing amount on both the front and back surfaces was increased, and high-quality chamfering was performed. Although the reason why the polishing time has been shortened is not clear, in the case of the conventional spherical barrel, there are many chances that the object to be polished stays in an extra space in the direction of the rotation axis which does not contribute to the polishing. According to this, it is considered that the polishing time was shortened because the space in which such a state was obtained was small.

[0017]

According to the first aspect of the present invention, the partially spherical curved surface mainly contributing to the polishing enables chamfering such as convex processing of the piezoelectric vibrating plate, and can increase the flat portion of the piezoelectric vibrating plate. Since there is no portion protruding in the direction of the rotation axis unlike a spherical barrel, the volume of the barrel can be reduced. Therefore, the processing amount of the piezoelectric vibrating plate at one time can be increased as a whole. Also,
As is clear from the experimental data, the polishing efficiency has been improved,
Productivity can be improved as a whole.

According to the second aspect, a plurality of barrels having the configuration described in the first aspect are arranged in a drum, and the barrel is polished by rotating the drum around its rotation axis. The number of barrels to be processed can be increased, and the polishing processing amount of the piezoelectric vibrating plate at one time can be increased as a whole.

According to the third aspect, the polished surface of the piezoelectric vibration plate, which is the object to be polished, is easily inverted, and the chamfering process becomes uniform. A high-quality chamfered piezoelectric vibration plate can be obtained in a short time.

[Brief description of the drawings]

FIG. 1 is a schematic internal sectional view showing a part of a centrifugal barrel polishing apparatus according to a first embodiment.

FIG. 2 is a schematic internal sectional view showing the inside of a drum constituting a part of FIG. 1;

FIG. 3 is a perspective view of a barrel alone.

FIG. 4 is a schematic internal cross-sectional view showing a second embodiment.

FIG. 5 is a schematic internal cross-sectional view showing a third embodiment.

FIG. 6 is a diagram showing a conventional example.

7A is a diagram illustrating a configuration of a quartz plate before barrel polishing, and FIG. 7B is a diagram illustrating a configuration of a quartz plate after barrel polishing.

[Explanation of symbols]

D Exterior drum G Rotation axis D1, D2, D3, D4, DA drum G1, G2, G3, G4 Drum rotation axis B1, B2, B3, E1, E2, E3, F1, F2, F
3 barrel DC spherical barrel 1 quartz plate (piezoelectric vibration plate) 11 convex surface

Claims (3)

(57) [Claims] 1. A barrel polishing apparatus for feeding a piezoelectric vibrating plate and an abrasive into a barrel having a curved surface, rotating the barrel about a rotation axis, and chamfering the piezoelectric vibrating plate corresponding to the curvature of the curved surface. The inner wall of the barrel is one spherical shape that mainly contributes to polishing
The curved surface is formed to face both sides of the one spherical curved surface.
Further, a barrel polishing apparatus characterized in that the barrel polishing apparatus has a configuration mainly including a curved surface or a flat surface that does not contribute to polishing. 2. A spherical surface whose inner wall mainly contributes to polishing and a pair of spherical surfaces on both sides of the spherical surface.
A plurality of barrels, each of which has a curved surface or a flat surface that does not mainly contribute to polishing , are formed side by side in the drum.
And rotate the drum about its axis of rotation.
The piezoelectric vibration corresponding to the curvature of the spherical curved surface
Barrel polishing apparatus characterized by performing chamfering of a plate
Place. Wherein the barrel or barrel polishing apparatus according to claim 1 or claim 2, wherein in that the rotation axis of the drum set up at an angle 20 degrees from 5 degrees to the horizontal axis.