JP2898111B2 - Plasma jet torch and plasma jet oscillating method - Google Patents
Plasma jet torch and plasma jet oscillating methodInfo
- Publication number
- JP2898111B2 JP2898111B2 JP3040273A JP4027391A JP2898111B2 JP 2898111 B2 JP2898111 B2 JP 2898111B2 JP 3040273 A JP3040273 A JP 3040273A JP 4027391 A JP4027391 A JP 4027391A JP 2898111 B2 JP2898111 B2 JP 2898111B2
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- electrode
- magnetic
- arc current
- nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 title claims description 8
- 230000004907 flux Effects 0.000 claims description 39
- 239000007769 metal material Substances 0.000 description 15
- 238000010438 heat treatment Methods 0.000 description 5
- 239000000498 cooling water Substances 0.000 description 4
- 230000007547 defect Effects 0.000 description 4
- 230000003111 delayed effect Effects 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 238000001739 density measurement Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000004575 stone Substances 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- 229910000976 Electrical steel Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- LFYJSSARVMHQJB-QIXNEVBVSA-N bakuchiol Chemical compound CC(C)=CCC[C@@](C)(C=C)\C=C\C1=CC=C(O)C=C1 LFYJSSARVMHQJB-QIXNEVBVSA-N 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Landscapes
- Plasma Technology (AREA)
- Arc Welding In General (AREA)
Description
【0001】[0001]
【産業上の利用分野】本発明は、電気ア−ク放電により
プラズマ化した高温ガスを噴射するプラズマジェットト
−チおよびその揺動方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a plasma jet torch for injecting a high-temperature gas converted into a plasma by an electric arc discharge and a method of swinging the plasma jet torch.
【0002】[0002]
【従来技術】この種のト−チは、物体の高温処理又は加
工に使用され、例えば金属の加熱,溶融等に用いられ
る。2. Description of the Related Art A torch of this kind is used for high-temperature processing or processing of an object, for example, for heating or melting metal.
【0003】例えば特開昭54−24249号公報に
は、鋳造金属材又は圧延金属材の表面の欠陥を、金属材
表面を移行式のプラズマジェットト−チで溶融させるこ
とにより除去する、欠陥除去方法が提示されている。幅
広い欠陥除去を行なうために、プラズマジェットト−チ
と金属材との間に、電磁石コアが配置され、これがト−
チから金属材に移行するア−クすなわちプラズマア-ク
電流に対して直交する磁界を及ぼし、プラズマア-ク電
流を偏向させる。電磁石の通電方向を交互に反転するこ
とにより、プラズマア-ク電流が往復動して金属材表面
を走査する。これにより幅広い面積の欠陥除去が行なわ
れる。特開昭54−24249号公報には、移行式のプ
ラズマア-ク電流と金属材との間に、電気コイルを介挿
しこれによりプラズマア-ク電流を往復動させる態様も
開示されている。[0003] For example, Japanese Patent Application Laid-Open No. 54-24249 discloses a defect removal method in which a defect on the surface of a cast metal material or a rolled metal material is removed by melting the metal material surface with a transfer type plasma jet torch. A method is presented. In order to remove a wide range of defects, an electromagnet core is arranged between the plasma jet torch and the metal material, and this is used as a torch.
An orthogonal magnetic field is applied to the arc, ie, the plasma arc current, which transfers from the metal to the metal material to deflect the plasma arc current. By alternately reversing the energizing direction of the electromagnet, the plasma arc current reciprocates and scans the surface of the metal material. Thereby, a wide area of the defect is removed. Japanese Patent Laying-Open No. 54-24249 also discloses a mode in which an electric coil is inserted between a transfer type plasma arc current and a metal material to thereby reciprocate the plasma arc current.
【0004】ところで、非移行式のプラズマア-クは、
高温極部加熱が特徴であったが、鋼板のミクロンオ−ダ
での表面処理では均一で広範囲な熱源が必要となる。し
かし、非移行式のプラズマジェットト−チにおけるプラ
ズマジェット揺動装置は今迄なかった。[0004] By the way, non-transfer type plasma arc is
Although high-temperature electrode heating was characteristic, surface treatment of steel sheets on the order of microns requires a uniform and wide range of heat sources. However, there has not been a plasma jet oscillating device in a non-transfer type plasma jet torch.
【0005】[0005]
【発明が解決しようとする課題】非移行式のプラズマジ
ェットト−チの先端の外側に磁束発生器を取付けイオン
化した高温プラズマジェットフレ−ムに交番磁束をかけ
揺動させたが、問題があり実用化できなかった。すなわ
ち、イオン化したプラズマジェットフレ−ムの中の電荷
の流れに磁束を作用させる為、ア−ク電流に磁束を直接
作用させる場合に比べ、効率が非常に悪く、高出力の磁
束発生器が必要となる。ト−チ軸線上に放出されたプラ
ズマフレ−ムは指向性(慣性力)が強く、揺動させるに
は高出力の磁束発生器が必要となる。磁束発生器がト−
チの先端の更に前方にあるため高温雰囲気にあり、耐熱
性の問題がある。A magnetic flux generator is mounted outside the tip of a non-transferred plasma jet torch to apply an alternating magnetic flux to an ionized high-temperature plasma jet frame to oscillate, but there is a problem. It could not be put to practical use. In other words, since magnetic flux acts on the flow of electric charge in the ionized plasma jet frame, the efficiency is extremely poor compared to the case where magnetic flux acts directly on the arc current, and a high-output magnetic flux generator is required. Becomes The plasma frame emitted on the torch axis has a strong directivity (inertial force), and a high-output magnetic flux generator is required to swing the plasma frame. The magnetic flux generator
Because it is further forward of the tip of the switch, it is in a high-temperature atmosphere and has a problem of heat resistance.
【0006】本発明は、この種の従来の問題点を改善す
ることを目的とする。The object of the present invention is to remedy this kind of conventional problems.
【0007】[0007]
【課題を解決するための手段】本願の第1番の発明の、
非移行式のプラズマジェットト−チは、電極(1),電極
(1)の先端に対向する位置にプラズマノズル(6n)を有す
る内ノズル部材(6),内ノズル部材(6)と電極(1)の間の
空間にガスを供給するためのガス流路、および、プラズ
マノズル(6n)に対向する位置にプラズマ出射開口(11n)
を有する外電極部材(11)、を有するプラズマジェットト
-チにおいて、内ノズル部材(6)と外電極部材(11)の間に
介挿され、プラズマノズル(6n)からプラズマ出射開口(1
1n)に進むプラズマ流路を囲む断熱筒体(13);および、
断熱筒体(13)を横切る磁束を発生するための電気コイル
(10);を備えることを特徴とする。Means for Solving the Problems According to the first invention of the present application,
The non-transfer type plasma jet torch is composed of an electrode (1), an electrode
(1) an inner nozzle member (6) having a plasma nozzle (6n) at a position facing the tip, a gas flow path for supplying gas to a space between the inner nozzle member (6) and the electrode (1), And a plasma emission opening (11n) at a position facing the plasma nozzle (6n)
An external electrode member (11) having
-H, inserted between the inner nozzle member (6) and the outer electrode member (11), from the plasma nozzle (6n) to the plasma emission opening (1).
A heat insulating cylinder (13) surrounding the plasma flow path going to 1n); and
Electric coil for generating magnetic flux across the heat insulating cylinder (13)
(10);
【0008】本願の第2番の発明の、非移行式のプラズ
マジェット揺動方法は、電極(1),電極(1)の先端に対向
する位置にプラズマノズル(6n)を有する内ノズル部材
(6),内ノズル部材(6)と電極の間の空間にガスを供給す
るためのガス流路,プラズマノズルに対向する位置にプ
ラズマ出射開口(11n)を有する外電極部材(11),内ノズ
ル部材(6)と外電極部材(11)の間に介挿され、プラズマ
ノズル(6n)からプラズマ出射開口(11n)に進むプラズマ
流路を囲む断熱筒体(13),先端面が断熱筒体(13)の外側
面に対向し断熱筒体(13)を間に置いて互に対向する2対
以上の磁極端(9a,9b,9c,9d)を有する磁性体コア(9)、お
よび、磁性体コア(9)に巻回され、相対向する磁極端(9
a,9b),(9c,9d)間に断熱筒体(13)を横切る磁束を発生す
るための複数個の電気コイル(10a,10b,10c,10d)、を備
えるプラズマジェットト−チの、前記電気コイル(10a,1
0b,10c,10d)のそれぞれに、磁極端(9a,9b,9c,9d)の先端
で囲まれる空間に回転磁界を生ずる正弦波交番電圧を印
加することを特徴とする。According to a second aspect of the present invention, there is provided a non-transfer type plasma jet oscillating method, comprising: an inner nozzle member having a plasma nozzle (6n) at a position facing an electrode (1) and a tip of the electrode (1);
(6), a gas flow path for supplying gas to a space between the inner nozzle member (6) and the electrode, an outer electrode member (11) having a plasma emission opening (11n) at a position facing the plasma nozzle, A heat insulating cylinder (13) inserted between the nozzle member (6) and the outer electrode member (11) and enclosing the plasma flow path that advances from the plasma nozzle (6n) to the plasma emission opening (11n), and has a heat insulating cylinder end A magnetic core (9) having two or more pairs of pole tips (9a, 9b, 9c, 9d) facing the outer surface of the body (13) and facing each other with the heat insulating cylinder (13) interposed therebetween, and The magnetic poles (9
a, 9b) and (9c, 9d) of a plasma jet torch comprising a plurality of electric coils (10a, 10b, 10c, 10d) for generating a magnetic flux crossing the heat insulating cylinder (13). The electric coil (10a, 1
0b, 10c, 10d), characterized by applying a sine wave alternating voltage that generates a rotating magnetic field in a space surrounded by the tips of the magnetic pole tips (9a, 9b, 9c, 9d).
【0009】なお、カッコ内の記号は、図面に示し後述
する実施例の対応要素を示す。Symbols in parentheses indicate corresponding elements in the embodiment shown in the drawings and described later.
【0010】[0010]
【作用】第1番の発明の非移行式のプラズマジェットト
−チでは、電気コイル(10a,10b,10c,10d)が、電極(1)〜
内ノズル(6n)〜外ノズル(8n)〜断熱筒体(13)〜外電
極(11n)と流れるプラズマア-ク電流を横切る磁束を発生
する。According to the first aspect of the present invention, the electric coils (10a, 10b, 10c, 10d) are composed of the electrodes (1) to (4).
A magnetic flux crossing the plasma arc current flowing through the inner nozzle (6n), the outer nozzle (8n), the heat insulating cylinder (13), and the outer electrode (11n) is generated.
【0011】ア−ク電流に交番する磁束を流すとフレミ
ングの左手の法則で磁束の流れに対し直角方向に力が作
用しプラズマア−ク電流を曲げることが出来る。又、磁
束の流れの方向を逆にすると作用する力は逆方向に変わ
る。When a magnetic flux alternating with the arc current flows, a force acts in a direction perpendicular to the flow of the magnetic flux according to Fleming's left-hand rule to bend the plasma arc current. When the direction of the magnetic flux is reversed, the acting force changes in the opposite direction.
【0012】電気コイル(10a,10b,10c,10d)に交流を使
用すると交流周期に対応した周波数でア−クを揺動する
ことができる。When an alternating current is used for the electric coils (10a, 10b, 10c, 10d), the arc can be oscillated at a frequency corresponding to the alternating cycle.
【0013】プラズマア−ク電流は、加熱ガスを加熱し
プラズマジェットフレ−ム化する熱源であるので、ア−
ク電流の揺動は同時にプラズマジェットフレ−ムの揺動
となる。The plasma arc current is a heat source that heats the heating gas to form a plasma jet frame.
The swing of the arc current simultaneously causes the swing of the plasma jet frame.
【0014】又、磁束をかける位置が、ト−チ内のア−
ク電流を狭窄している部位で作用させているため、比較
的に小さい磁極端(9a,9b)で偏向に十分な磁界が効果的
にプラズマア−ク電流に作用する。したがって電気コイ
ル(10a,10b,10c,10d)は比較的に小サイズで比較的に大
きい偏向角を得ることができる。The position where the magnetic flux is applied is determined by the arc in the torch.
Since the arc current is applied to the constricted portion, a magnetic field sufficient for deflection at the relatively small pole tips (9a, 9b) effectively acts on the plasma arc current. Therefore, the electric coils (10a, 10b, 10c, 10d) can have a relatively small size and a relatively large deflection angle.
【0015】プラズマア−ク電流は該元部で磁界の作用
を受けて偏向し、熱処理対象材例えば金属材に向かうの
で、金属材表面でのプラズマア−ク電流の偏向量は大き
い。このように、比較的に小さい電気コイルで比較的に
大きな偏向量を得ることができ、偏向磁界を与えるため
の電力は小電力で済むようになる。Since the plasma arc current is deflected by the action of the magnetic field at the base and directed toward the material to be heat-treated, for example, a metal material, the amount of deflection of the plasma arc current on the surface of the metal material is large. As described above, a relatively large amount of deflection can be obtained with a relatively small electric coil, and a small amount of power is required for applying a deflection magnetic field.
【0016】更に、プラズマア−ク電流と電気コイル(1
0a,10b,10c,10d)の間には断熱筒体(13)があり、元部で
はプラズマア−ク電流のゆらぎがほとんど無いことと相
伴って、電気コイル(10a,10b,10c,10d)にプラズマフレ
−ムが当ることがなく、電気コイルがプラズマフレ−ム
で焼損することがなくなる。断熱筒体(13)もプラズマア
−ク電流の元部に位置するので、比較的に小径でもプラ
ズマア−ク電流に触れることはない。Further, the plasma arc current and the electric coil (1)
0a, 10b, 10c, and 10d), there is a heat insulating cylinder (13), and the electric coils (10a, 10b, 10c, and 10d) are associated with almost no fluctuation of the plasma arc current at the base. ) Is not hit by the plasma frame, and the electric coil is not burned by the plasma frame. Since the heat insulating cylinder (13) is also located at the base of the plasma arc current, it does not touch the plasma arc current even if its diameter is relatively small.
【0017】第2番の発明のプラズマジェットト-チの
揺動方法では、上述の第1番の発明の作用効果が同様に
もたらされると共に、磁極端(9a,9b,9c,9d)が2対以上
かつ電気コイル(10a,10b,10c,10d)が複数個であって、
しかも電気コイル(10a,10b,10c,10d)のそれぞれには、
磁極端(9a,9b,9c,9d)の先端で囲まれる空間に回転磁界
を生ずる正弦波交番電圧が印加されるので、プラズマア
−ク電流は、電極(1)の先端とプラズマノズル(6n)の中
心とを結ぶ直線(電極1の中心軸)を中心とする円周に沿
う円運動を行ない、プラズマア−ク電流が、電極(1)の
先端から金属材の間で円錐を描く。電気コイル(10a,10
b,10c,10d)に印加される交流が正弦波であるので、該円
運動は実質上等速円運動であるので、プラズマア−ク電
流の移動が非常に滑らかで形状が安定し、偏向運動によ
るフレ−ムのゆらぎを実質上生じない。In the method of swinging the plasma jet torch according to the second aspect of the present invention, the operation and effect of the first aspect of the invention are similarly provided, and the number of magnetic poles (9a, 9b, 9c, 9d) is reduced to two. More than one pair and a plurality of electric coils (10a, 10b, 10c, 10d),
Moreover, each of the electric coils (10a, 10b, 10c, 10d) has
Since a sine-wave alternating voltage that generates a rotating magnetic field is applied to the space surrounded by the tips of the magnetic pole tips (9a, 9b, 9c, 9d), the plasma arc current flows between the tip of the electrode (1) and the plasma nozzle (6n). ) Makes a circular motion along a circumference centered on a straight line (the central axis of the electrode 1), and the plasma arc current draws a cone between the metal material from the tip of the electrode (1). Electric coil (10a, 10
Since the alternating current applied to (b, 10c, 10d) is a sine wave, the circular motion is a substantially constant-velocity circular motion, so that the movement of the plasma arc current is very smooth, the shape is stable, and the deflection is large. Substantially no frame fluctuation due to movement.
【0018】本願の各発明の他の目的および特徴は、図
面を参照した以下の実施例の説明より明らかになろう。Other objects and features of the present invention will become apparent from the following description of embodiments with reference to the drawings.
【0019】[0019]
【第1実施例】図1に本願の第1番の発明の一実施例の
縦断面を示し、図2に、図1に示すプラズマジェットト
-チの下面を示す。なお、図1は図2のI−I線断面図
である。ト−チ基幹5の上端部には電極台4が装着され
ており、この電極台4に電極キャップ3が結合されてい
る。電極キャップ3は、電極1が通ったチャック2を締
め付けており、これにより電極1を、円筒状基幹5の中
心軸位置に、位置決めしている。FIG. 1 shows a longitudinal section of an embodiment of the first invention of the present application, and FIG. 2 shows a plasma jet printer shown in FIG.
-Shows the underside of the switch. FIG. 1 is a sectional view taken along line II of FIG. An electrode base 4 is mounted on the upper end of the torch base 5, and the electrode cap 3 is coupled to the electrode base 4. The electrode cap 3 fastens the chuck 2 through which the electrode 1 has passed, thereby positioning the electrode 1 at the center axis position of the cylindrical main body 5.
【0020】基幹5の下端部には内ノズル部材6が装着
されており、内ノズル部材6と電極1の間にセンタリン
グスト−ン7が介挿され、このセンタリングスト−ン7
が、基幹5の下端部において、内ノズル部材6の中心軸
に電極1の中心軸を合わすように、電極1を位置決めし
ている。内ノズル部材6の下底の中心位置には内ノズル
(プラズマノズル)6nが開けられている。電極1と内
ノズル部材6の間の空間には、電極ガスが供給される。An inner nozzle member 6 is mounted on the lower end of the main body 5, and a centering stone 7 is interposed between the inner nozzle member 6 and the electrode 1.
However, the electrode 1 is positioned such that the central axis of the electrode 1 is aligned with the central axis of the inner nozzle member 6 at the lower end of the main body 5. An inner nozzle (plasma nozzle) 6n is opened at the center position of the lower bottom of the inner nozzle member 6. An electrode gas is supplied to a space between the electrode 1 and the inner nozzle member 6.
【0021】基幹5の下端には外ノズル部材8が装着さ
れており、その中心軸に、電極1の中心軸および内ノズ
ル6nの中心軸に合せて、内ノズル6nよりもやや大径
の外ノズル8nが開けられている。内ノズル部材6の下
底外表面と外ノズル8の上面の間には、半径方向にガス
通口を開けたリング状の絶縁カラ−14が介挿されてい
る。内ノズル部材6と外ノズル部材8の間の空間には加
熱ガスが供給される。外ノズル部材8にはト−チ冷却水
が供給され、この冷却水は外ノズル部材8から出て基幹
5の水路を通って内ノズル部材6の水路に入り、そして
内ノズル部材6を出て更に基幹5を通ってト−チ外部に
排出される。An outer nozzle member 8 is attached to the lower end of the main body 5. The outer nozzle member 8 is slightly larger in diameter than the inner nozzle 6n in accordance with the center axis of the outer nozzle member 8 and the center axis of the electrode 1 and the center axis of the inner nozzle 6n. The nozzle 8n is open. Between the lower bottom outer surface of the inner nozzle member 6 and the upper surface of the outer nozzle 8, a ring-shaped insulating collar 14 having a gas passage opened in the radial direction is inserted. A heating gas is supplied to a space between the inner nozzle member 6 and the outer nozzle member 8. Torch cooling water is supplied to the outer nozzle member 8, and the cooling water exits the outer nozzle member 8, passes through the water passage of the main body 5, enters the water passage of the inner nozzle member 6, and exits the inner nozzle member 6. Further, it is discharged outside the torch through the trunk 5.
【0022】外ノズル部材8の下底外表面部にはリング
状の断熱カラ−13の上端が固着され、断熱カラ−13
の下端に外電極11が固着されている。なお、外電極1
1は、図示しない絶縁材を介して外ノズル部材8にも固
着されている。断熱カラ−13の円形空間の中心軸は外
ノズル8nの中心軸に合せてある。外電極11の外電極
ノズル11nは、断熱カラ−13と連続する円形開口
と、図2に示す長円形開口とをつなぐ偏平化した円錐形
状である。すなわち、プラズマア−ク電流の左右方向の
偏向においてもプラズマア−ク電流が実質上外電極11
に直接に当らないように、外電極ノズル11の形状が設
定されている。外電極ノズル11の内部の水路には、外
電極冷却水が供給され、この冷却水は図示しない回収管
を通して外電極ノズル11の外部に排出される。The upper end of a ring-shaped heat insulating collar 13 is fixed to the lower bottom outer surface of the outer nozzle member 8.
The outer electrode 11 is fixed to the lower end of the substrate. The outer electrode 1
1 is also fixed to the outer nozzle member 8 via an insulating material (not shown). The central axis of the circular space of the heat insulating collar 13 is aligned with the central axis of the outer nozzle 8n. The outer electrode nozzle 11n of the outer electrode 11 has a flattened conical shape connecting a circular opening continuous with the heat insulating collar 13 and an oblong opening shown in FIG. That is, even when the plasma arc current is deflected in the left-right direction, the plasma arc current is substantially reduced to the outer electrode 11.
The shape of the outer electrode nozzle 11 is set so as not to directly hit the nozzle. External electrode cooling water is supplied to a water passage inside the external electrode nozzle 11, and the cooling water is discharged to the outside of the external electrode nozzle 11 through a recovery pipe (not shown).
【0023】断熱カラ−13の外側部には、大略でC型
の、ケイ素鋼板の積層体でなる磁性体コア9が配置され
ており、該コア9の相対向する1対の磁極端9a,9b
が断熱カラ−13を挟んでいる。すなわち、磁極端9
a,9bの相対向する端面の間に断熱カラ−13があ
る。磁性体コア9には電気コイル10が巻回されてい
る。なお、磁性体コア9は、図示しない絶縁材を介して
外ノズル部材8および外電極11に固着されている。On the outer side of the heat-insulating collar 13, a magnetic core 9 made of a generally C-shaped laminated body of silicon steel plates is arranged. A pair of magnetic pole tips 9a, 9a, 9b
Sandwich the heat insulating collar 13. That is, the pole tip 9
There is a heat insulating collar 13 between the opposite end faces of a and 9b. An electric coil 10 is wound around the magnetic core 9. The magnetic core 9 is fixed to the outer nozzle member 8 and the outer electrode 11 via an insulating material (not shown).
【0024】電極1(負極)と内ノズル部材6(正極)
の間にア−ク電圧を印加して電極1と内ノズル6nの間
にア−クを生起し次に外ノズル部材8に正極電圧を印加
して電極1/内ノズル6n間のア−クを電極1/外ノズ
ル8n間に移行させ、更に次に外電極11に正極電圧を
印加して電極1/外ノズル8n間のア−クを電極1/外
電極ノズル11n間に移行させることにより、外電極ノ
ズル11nからプラズマア−ク電流が噴射されるように
なる。このプラズマア−ク電流は、電極1,内ノズル6
n,外ノズル8n,断熱カラ−13および外電極ノズル
11nの中心軸の延長線に沿って噴き出す。Electrode 1 (negative electrode) and inner nozzle member 6 (positive electrode)
An arc voltage is applied between the electrode 1 and the inner nozzle 6n to generate an arc between the electrode 1 and the inner nozzle 6n. Then, a positive voltage is applied to the outer nozzle member 8 to apply an arc voltage between the electrode 1 and the inner nozzle 6n. Is shifted between the electrode 1 and the outer nozzle 8n, and then the positive voltage is applied to the outer electrode 11 to shift the arc between the electrode 1 and the outer nozzle 8n between the electrode 1 and the outer electrode nozzle 11n. Then, a plasma arc current is injected from the outer electrode nozzle 11n. This plasma arc current is applied to the electrode 1, the inner nozzle 6
n, the outer nozzle 8n, the heat insulating collar 13 and the outer electrode nozzle 11n are ejected along the extension of the central axis.
【0025】電気コイル10に正方向の通電をすると、
磁極端9aと9bの間に、図2に一点鎖線で示すように
磁束が流れ、プラズマア−ク電流の流れる方向(図2で
紙面と垂直方向)、および、磁極端9aと9bを結ぶ線
(図2上で縦方向)に垂直な方向(図2上で左右方向:
例えば左方向)にプラズマア−ク電流が偏向される(フ
レミングの左手の法則:図3)。これにともないプラズ
マジェットフレ-ムも同様に偏向される。電気コイル1
0に逆方向の通電をすると、プラズマア−ク電流が、そ
れの流れる方向(図2で紙面と垂直方向)、および、磁
極端9aと9bを結ぶ線(図2上で縦方向)に垂直な方
向(図2上で右方向)にプラズマア−ク電流が偏向され
る(フレミングの左手の法則)。これにともないプラズ
マジェットフレ-ムも同様に偏向される。When the electric coil 10 is energized in the positive direction,
A magnetic flux flows between the magnetic pole tips 9a and 9b as indicated by a dashed line in FIG. 2, and the direction in which the plasma arc current flows (perpendicular to the plane of FIG. 2) and the line connecting the magnetic pole tips 9a and 9b. (Vertical direction in FIG. 2)
The plasma arc current is deflected (for example, leftward) (Fleming's left-hand rule: FIG. 3). Accordingly, the plasma jet frame is similarly deflected. Electric coil 1
When a current is applied in the opposite direction to 0, the plasma arc current is perpendicular to the flowing direction (the direction perpendicular to the plane of FIG. 2) and the line connecting the magnetic pole tips 9a and 9b (the vertical direction in FIG. 2). The plasma arc current is deflected in an appropriate direction (rightward in FIG. 2) (Fleming's left-hand rule). Accordingly, the plasma jet frame is similarly deflected.
【0026】図3に、電気コイル10に通電していると
きのプラズマア−ク電流の偏向態様を示す。プラズマア
−ク電流の偏向角度θは、プラズマア−ク電流のア−ク
電流値と、磁極端9a,9b間の磁界強度によって定ま
り、該磁界強度は、電気コイル10に流す電流値によっ
て定まる。FIG. 3 shows how the plasma arc current is deflected when the electric coil 10 is energized. The deflection angle θ of the plasma arc current is determined by the arc current value of the plasma arc current and the magnetic field strength between the magnetic pole tips 9a and 9b, and the magnetic field strength is determined by the current value flowing through the electric coil 10. .
【0027】磁極端9aと9bの間の、電極1の軸心位
置の磁束密度とプラズマア−ク電流の振れ角度(ア−ク
振れ角度)との関係を図4に示す。磁束密度を40ガウ
スから120ガウス程度まで高くするにつれて、実質上
リニアにア−ク振れ角度が増大する。このように比較的
に低い磁束密度で大きい偏向を示すのは、プラズマア−
ク電流の場合、ア−ク電流値が高い(例えば150A)
からである。FIG. 4 shows the relationship between the magnetic flux density at the axial center of the electrode 1 between the magnetic pole tips 9a and 9b and the deflection angle of the plasma arc current (arc deflection angle). As the magnetic flux density is increased from 40 gauss to about 120 gauss, the arc deflection angle increases substantially linearly. Such a large deflection at a relatively low magnetic flux density is caused by a plasma arc.
In the case of the arc current, the arc current value is high (for example, 150 A).
Because.
【0028】電気コイル10に流す電流値と、磁極端9
a,9b間に発生される磁束の密度との関係を図6に示
す。図6のデ−タは、図5に示すように、磁極端9a,
9b間の距離を40mmとし、電気コイル10の巻回数
は2000回としたときのものであり、図6のデ−タA
は、磁極端9bの端面位置Aでの磁束密度を示し、デ−
タBは磁極端9a,9bを結ぶ中心軸上の中間点Bの磁
束密度を示し、デ−タCは、該中心軸より5mm外方に
外れた位置の磁束密度を示す。The value of the current flowing through the electric coil 10 and the magnetic pole 9
FIG. 6 shows the relationship with the density of the magnetic flux generated between a and 9b. As shown in FIG. 5, the data of FIG.
The distance between the coils 9b is 40 mm, and the number of turns of the electric coil 10 is 2,000.
Indicates the magnetic flux density at the end position A of the magnetic pole tip 9b.
Data B indicates a magnetic flux density at an intermediate point B on the central axis connecting the magnetic pole tips 9a and 9b, and data C indicates a magnetic flux density at a position off by 5 mm from the central axis.
【0029】図4に示すデ−タと図6に示すデ−タAよ
り、電極1の軸心位置(図5のB位置)にあるプラズマ
ア−ク電流を25°振らせるには、140ガウス程度の
磁束密度が必要であり(図4)、この磁束密度を得るた
めには、0.6A程度の電流を電気コイル10に流せばよ
いことが分かる。この電流値は、得られるア−ク振れ角
に対比してかなり小さい。From the data shown in FIG. 4 and the data A shown in FIG. 6, it is necessary to make the plasma arc current at the axial center position of the electrode 1 (position B in FIG. It is understood that a magnetic flux density of about Gauss is required (FIG. 4), and that a current of about 0.6 A may be passed through the electric coil 10 in order to obtain this magnetic flux density. This current value is considerably smaller than the obtained arc deflection angle.
【0030】図1に示す実施例では、磁極端9a,9b
が1対であるので、プラズマア−ク電流は一軸方向のみ
の往復運動を行なわせることになる。図7の(A)に示
すように、電気コイル10に正,逆通電を交互に行なう
ことにより、プラズマア−ク電流が左(図3),右と交
互に移動し、+θ°〜−θ°の範囲で往復動する。図7
の(A)に示すようにパルス状に、正方向通電,通電休
止,逆方向通電とこの順番の通電を繰返すと、プラズマ
ア−ク電流は、+θ°偏向位置,中心位置,−θ°偏向
位置の3位置をとり、これらの位置ではある時間移動を
停止するが、それらの位置間を移動する速度は極めて速
い。すなわちプラズマア−ク電流の移動が不等速運動と
なるので、プラズマア−ク電流に往復の折り返しによる
ゆらぎを生じ、また、金属材表面においてプラズマア−
ク電流の均一走査(均熱走査)が得られない。そこで、
同一金属材の連続表面のある範囲を均一に走査するとき
には、図7の(B)に示すように、電気コイル10に、
正弦波交流電圧を印加する。これによりプラズマア−ク
電流は、折り返し点(+θ°偏向位置,−θ°偏向位
置)の間では実質上等速運動となり、プラズマア−ク電
流のゆらぎが少くなり、金属材表面の走査が均一とな
る。In the embodiment shown in FIG. 1, the pole tips 9a, 9b
Are a pair, the plasma arc current reciprocates only in one axial direction. As shown in FIG. 7A, the plasma arc current alternately moves to the left (FIG. 3) and to the right by alternately energizing the electric coil 10 in the forward and reverse directions. Reciprocate in the range of °. FIG.
As shown in (A), when the energization in the order of forward energization, energization suspension, and reverse energization is repeated in a pulsed manner, the plasma arc current is deflected by + θ ° deflection position, center position, -θ ° deflection. It takes three positions and stops moving for some time at these positions, but the speed of moving between those positions is extremely fast. That is, since the movement of the plasma arc current becomes a non-uniform movement, the plasma arc current fluctuates due to the reciprocating turn, and the plasma arc current is generated on the surface of the metal material.
It is not possible to obtain a uniform scan (thermal soaking scan) of the current. Therefore,
When uniformly scanning a certain area of the continuous surface of the same metal material, as shown in FIG.
Apply a sine wave AC voltage. As a result, the plasma arc current substantially moves at a constant speed between the turning points (+ θ ° deflection position and −θ ° deflection position), the fluctuation of the plasma arc current decreases, and the scanning of the metal material surface is reduced. Become uniform.
【0031】いずれにしても、図3に示すように、プラ
ズマア−ク電流には、外ノズル8nの直近の元部に偏向
磁界が加わるので、この偏向磁界の比較的に低い強度で
プラズマア−ク電流の先端部近くのフレ−ム部が大きく
左,右に移動し偏向量が大きい。つまり比較的に小さい
磁性体コア9および電気コイル10で、比較的に大きな
偏向量が得られる。電気コイル10に流す電流値は比較
的に低くてよいので、電力消費が小さい。断熱カラ−1
3は該元部にあるので、その直径が比較的に小さくても
それにプラズマア−ク電流が直接に当ることはなく、断
熱カラ−13が、プラズマア−ク電流の磁極端9a,9
bへの当りや高熱を遮断する。すなわち断熱カラ−13
が、磁極端9a,9bのコンパクトな配設を可能にして
いる。In any case, as shown in FIG. 3, since a deflection magnetic field is applied to the plasma arc current at the base near the outer nozzle 8n, the plasma arc current is generated at a relatively low intensity of the deflection magnetic field. The frame portion near the tip of the peak current moves largely left and right, and the deflection amount is large. That is, a relatively large deflection amount can be obtained with the relatively small magnetic core 9 and the electric coil 10. Since the value of the current flowing through the electric coil 10 may be relatively low, power consumption is small. Insulated collar-1
3 is located at the base, the plasma arc current does not directly hit it even if its diameter is relatively small, and the adiabatic collar 13 forms the magnetic pole tips 9a, 9 of the plasma arc current.
b. That is, the heat insulation color 13
However, the arrangement of the magnetic pole tips 9a and 9b can be made compact.
【0032】[0032]
【第2実施例】図8にもう1つの実施例の下面を示し、
図9にそのIX−IX線拡大断面を示す。この実施例で
は、磁性体コア9が、リング状の共通磁路よりリング中
心に向けて互に90度の角度をなす4本の分枝を突出さ
せて、これらの分枝の先端を磁極端9a〜9dとして断
熱カラ−13の外側面に実質上当接させている。4本の
分枝の元部にはそれぞれ電気コイル10a〜10dが巻
回されている。外電極ノズル11nは、この実施例では
プラズマア−ク電流に円錐状の運動を与えるので、裁頭
円錐状に形成されている。その他の構造は、上述の第1
実施例の構造と同様である。Second Embodiment FIG. 8 shows a lower surface of another embodiment,
FIG. 9 shows an enlarged cross section taken along line IX-IX. In this embodiment, the magnetic material core 9 protrudes four branches that form an angle of 90 degrees with each other from the ring-shaped common magnetic path toward the center of the ring. 9a to 9d substantially contact the outer surface of the heat insulating collar 13. Electric coils 10a to 10d are wound around the bases of the four branches, respectively. The outer electrode nozzle 11n is formed in a truncated cone shape in this embodiment because it imparts a conical movement to the plasma arc current. Other structures are the same as those of the first structure described above.
It is the same as the structure of the embodiment.
【0033】この第2実施例では、図11に示すように
電気コイル10a,10cと電気コイル10b,10d
に交互に電流を流すことにより、例えば図10の
(A)、次に(B)、次に(C)、次に(D)、そして
また(A)に戻る態様で、磁極端9a〜9dの先端面で
囲まれた空間で磁界が回転する。すなわち、電気コイル
10aに正方向通電して磁極端9aをN極に磁化し、か
つ電気コイル10cに逆方向通電して磁極端9cをS極
に磁化することにより、図10の(A)に示すように、
磁極端9aから9cに磁束Mfが流れて、プラズマア−
ク電流は図10の(A)に示すように磁極端9bから9
dに向かう方向Fに力を受けて同方向Fに偏向する。次
に、電気コイル10dに正方向通電して磁極端9dをN
極に磁化し、かつ電気コイル10bに逆方向通電して磁
極端9bをS極に磁化することにより、図10の(B)
に示すように、磁極端9dから9bに磁束Mfが流れ
て、プラズマア−ク電流は図10の(B)に示すように
磁極端9aから9cに向かう方向Fに力を受けて同方向
Fに偏向する。次に、電気コイル10cに正方向通電し
て磁極端9cをN極に磁化し、かつ電気コイル10aに
逆方向通電して磁極端9aをS極に磁化することによ
り、図10の(C)に示すように、磁極端9cから9a
に磁束Mfが流れて、プラズマア−ク電流は図10の
(C)に示すように磁極端9dから9bに向かう方向F
に力を受けて同方向Fに偏向する。次に、電気コイル1
0bに正方向通電して磁極端9bをN極に磁化し、かつ
電気コイル10dに逆方向通電して磁極端9bをS極に
磁化することにより、図10の(D)に示すように、磁
極端9bから9dに磁束Mfが流れて、プラズマア−ク
電流は図10の(D)に示すように磁極端9cから9a
に向かう方向Fに力を受けて同方向Fに偏向する。In the second embodiment, as shown in FIG. 11, electric coils 10a and 10c and electric coils 10b and 10d
The magnetic poles 9a to 9d are formed, for example, in the manner shown in FIG. 10A, then (B), then (C), then (D), and then back to (A). The magnetic field rotates in the space surrounded by the tip surface of the. That is, by energizing the electric coil 10a in the forward direction to magnetize the magnetic pole tip 9a to the N pole and energizing the electric coil 10c in the reverse direction to magnetize the magnetic pole tip 9c to the S pole, As shown,
The magnetic flux Mf flows through the magnetic pole tips 9a to 9c, and the plasma arc
As shown in (A) of FIG.
It is deflected in the same direction F by receiving a force in the direction F toward d. Next, by energizing the electric coil 10d in the positive direction, the magnetic pole 9d is set to N.
10B by magnetizing the magnetic pole 9b and magnetizing the magnetic pole 9b to the south pole by applying a reverse current to the electric coil 10b.
As shown in FIG. 10, a magnetic flux Mf flows from the pole tips 9d to 9b, and the plasma arc current receives a force in the direction F from the pole tips 9a to 9c as shown in FIG. To deflect. Next, by energizing the electric coil 10c in the forward direction to magnetize the magnetic pole tip 9c to the N pole, and energizing the electric coil 10a in the reverse direction to magnetize the magnetic pole tip 9a to the S pole, (C) of FIG. As shown in FIG.
The magnetic flux Mf flows through the magnetic poles 9a, and the plasma arc current flows in the direction F from the magnetic pole tips 9d to 9b as shown in FIG.
And is deflected in the same direction F. Next, the electric coil 1
By energizing the pole tip 9b to the N pole by energizing the pole 0b in the positive direction and energizing the pole tip 9b to the S pole by energizing the electric coil 10d in the reverse direction, as shown in FIG. The magnetic flux Mf flows through the pole tips 9b to 9d, and the plasma arc current is changed from the pole tips 9c to 9a as shown in FIG.
And is deflected in the same direction F by receiving a force in the direction F toward the same direction.
【0034】図11の(A)に示すようなパルス通電で
は、プラズマア−ク電流は、図10に示す(A),
(B),(C)および(D)の偏向による4位置をと
り、各位置には比較的に長く留まるが、各位置間の移動
は急激であり、4角形を描く不等速運動となる。各電気
コイルの通電休止時間を零又は極短時間としかつ、1組
の電気コイル(例えば10aと10c)の正,逆通電期
間中(例えば該通電期間の中間点)に他の1組の電気コ
イル(10b,10c)の正,逆通電を開始する態様で
通電周期および通電位相差を小さくすると、プラズマア
−ク電流は、図12に示す(A),(AB),(B),
(BC),(C),(CD),(D)および(DA)の
偏向による8位置をとり、各位置間の移動は急激で各位
置には比較的長く留まる、8角形を描く不等速運動とな
る。この、8角形を描く不等速運動は、円運動に近く上
述の4角形を描く不等速運動よりも円滑な動きであり、
プラズマア−ク電流の偏向移動による先端部フレ−ムの
ゆらぎは少ない。When the pulse current is applied as shown in FIG. 11A, the plasma arc current is changed as shown in FIGS.
(B), (C), and (D) take four positions and stay at each position for a relatively long time, but the movement between the positions is rapid, resulting in a non-uniform movement in a quadrangular shape. . The energization suspension time of each electric coil is set to zero or a very short time, and another set of electric power is supplied to one set of electric coils (for example, 10a and 10c) during the forward and reverse energization periods (for example, the midpoint of the energization period). When the energizing cycle and energizing phase difference are reduced in a manner in which the forward and reverse energization of the coils (10b, 10c) are started, the plasma arc current becomes (A), (AB), (B),
(BC), (C), (CD), (D), and (DA) take eight positions, and the movement between the positions is abrupt and stays relatively long at each position. It becomes fast movement. This unequal-velocity motion drawing an octagon is closer to a circular motion, and is a smoother motion than the unequal-velocity motion drawing a quadrangle described above.
The fluctuation of the tip frame due to the deflection movement of the plasma arc current is small.
【0035】本発明の好ましい実施例では、プラズマア
−ク電流の偏向運動を更に円滑な円運動とするために、
各電気コイル10a〜10dには、図11の(B)に示
すように、正弦波状の交流電流を通電する。すなわち、
電気コイル10aに所要レベルの交流電圧を印加し、電
気コイル10に印加する交流電圧に対して、電気コイル
10bには270度位相が遅れた交流電圧を、電気コイ
ル10cには180度位相が遅れた交流電圧を、また電
気コイル10dには90度位相が遅れた交流電圧を印加
する。これにより磁極端9a〜9dの先端面で囲まれる
空間には、実質上完全な等速円運動磁界が発生し、プラ
ズマア−ク電流が等速円運動する。したがってプラズマ
ア−ク電流の運動は円滑であり、運動によるプラズマア
−ク電流フレ−ムのゆらぎは生じない。またプラズマア
−ク電流の走査幅内における金属材表面の加熱がより一
層均一となる。In a preferred embodiment of the present invention, in order to make the plasma arc current deflection movement smoother,
As shown in FIG. 11B, a sinusoidal alternating current is applied to the electric coils 10a to 10d. That is,
An AC voltage of a required level is applied to the electric coil 10a, and the AC voltage applied to the electric coil 10 is delayed by 270 degrees in phase to the electric coil 10b, and 180 degrees delayed in phase to the electric coil 10c. The applied AC voltage is applied to the electric coil 10d, and an AC voltage delayed by 90 degrees is applied to the electric coil 10d. As a result, a substantially complete constant-velocity circular motion magnetic field is generated in the space surrounded by the tip surfaces of the magnetic pole tips 9a to 9d, and the plasma arc current makes a constant circular motion. Therefore, the movement of the plasma arc current is smooth, and the fluctuation of the plasma arc current frame due to the movement does not occur. Further, the heating of the surface of the metal material within the scanning width of the plasma arc current becomes more uniform.
【0036】[0036]
【効果】本願の第1番の発明のプラズマジェットト−チ
は、非移行式ト−チにおいて、磁束発生用の電気コイル
をト−チ内部に設置し、プラズマジェット発生用ア-ク
電流に直接磁束を作用させる為非常に効率が良く、少量
の磁束で確実な揺動が得られる。電気コイルの耐熱性が
十分向上した。The plasma jet torch of the first invention of the present application is a non-transitional torch, in which an electric coil for generating a magnetic flux is installed inside the torch, and an arc current for generating a plasma jet is generated. Since the magnetic flux is applied directly, the efficiency is very high, and a reliable swing can be obtained with a small amount of magnetic flux. The heat resistance of the electric coil has been sufficiently improved.
【0037】本願の第2番の発明の非移動式のプラズマ
ジェットの揺動方法では、上述の第1番の発明の作用効
果が同様にもたらされると共に、磁極端(9a,9b,9c,9d)
が2対以上かつ電気コイル(10a,10b,10c,10d)が複数個
であって、しかも電気コイル(10a,10b,10c,10d)のそれ
ぞれには、磁極端(9a,9b,9c,9d)の先端で囲まれる空間
に回転磁界を生ずる正弦波交番電圧が印加されるので、
プラズマア−ク電流は、電極(1)の先端とプラズマノズ
ル(6n)の中心とを結ぶ直線(電極1の中心軸)を中心とす
る円周に沿う円運動を行ない、プラズマア−ク電流が、
電極(1)の先端から金属材の間で円錐を描く。電気コイ
ル(10a,10b,10c,10d)に印加される交流が正弦波である
ので、該円運動は実質上等速円運動であるので、プラズ
マア−ク電流の移動が非常に滑らかで形状が安定し、偏
向運動によるフレ−ムのゆらぎを実質上生じない。In the swinging method of the non-movable type plasma jet according to the second invention of the present application, the same effects as those of the first invention described above are similarly obtained, and the magnetic poles (9a, 9b, 9c, 9d) are obtained. )
And two or more pairs of electric coils (10a, 10b, 10c, 10d), and each of the electric coils (10a, 10b, 10c, 10d) has a magnetic pole tip (9a, 9b, 9c, 9d). ), A sine wave alternating voltage that generates a rotating magnetic field is applied to the space surrounded by the tip of
The plasma arc current makes a circular motion along a circumference centered on a straight line (center axis of the electrode 1) connecting the tip of the electrode (1) and the center of the plasma nozzle (6n). But,
Draw a cone between the metal material and the tip of the electrode (1). Since the alternating current applied to the electric coils (10a, 10b, 10c, 10d) is a sine wave, the circular motion is a substantially constant-velocity circular motion, so that the movement of the plasma arc current is very smooth and shaped. Is stable, and the frame does not substantially fluctuate due to the deflection motion.
【図1】 本願の第1番の発明の第1実施例の縦断面図
であり、図2のI−I線断面図である。1 is a longitudinal sectional view of a first embodiment of the first invention of the present application, and is a sectional view taken along the line II of FIG. 2;
【図2】 図1に示すプラズマジェットト−チの下面を
示す平面図である。FIG. 2 is a plan view showing a lower surface of the plasma jet torch shown in FIG.
【図3】 図1に示すプラズマジェットト−チの一部を
示す縦断面図であり、偏向されたプラズマア−ク電流を
示す。FIG. 3 is a longitudinal sectional view showing a part of the plasma jet torch shown in FIG. 1, and shows a deflected plasma arc current.
【図4】 図3に示すプラズマジェットト−チの、磁極
端間の磁束密度とプラズマア−ク電流のア−ク振れ角の
関係を示すグラフである。4 is a graph showing a relationship between a magnetic flux density between magnetic pole tips and an arc deflection angle of a plasma arc current of the plasma jet torch shown in FIG. 3;
【図5】 図2に示すプラズマジェットト−チの、磁束
密度測定点を示す縮小平面図である。FIG. 5 is a reduced plan view showing magnetic flux density measurement points of the plasma jet torch shown in FIG. 2;
【図6】 図5に示す磁束密度測定点の、電気コイル通
電電流値と磁束密度との関係を示すグラフである。FIG. 6 is a graph showing a relationship between an electric current flowing through an electric coil and a magnetic flux density at a magnetic flux density measurement point shown in FIG. 5;
【図7】 図1に示すプラズマジェットト−チの電気コ
イル10に流す電流の波形を示すタイムチャ−トであ
る。7 is a time chart showing a waveform of a current flowing through an electric coil 10 of the plasma jet torch shown in FIG.
【図8】 本願の第1番の発明の第2実施例の下面を示
す平面図である。FIG. 8 is a plan view showing the lower surface of the second embodiment of the first invention of the present application.
【図9】 図8のIX−IX線拡大断面図である。FIG. 9 is an enlarged sectional view taken along line IX-IX of FIG. 8;
【図10】 図8に示す第2実施例の電気コイル10a
〜10dに図11の(A)に示す電流を流したときの、
磁極端間に発生する磁束の方向Mfを示す平面図であ
る。FIG. 10 shows an electric coil 10a according to a second embodiment shown in FIG.
When a current shown in FIG.
FIG. 4 is a plan view showing a direction Mf of a magnetic flux generated between magnetic pole ends.
【図11】 図8に示す第2実施例の電気コイル10a
〜10dに流す電流の波形を示すタイムチャ−トであ
り、図中の(B)が本願の第2番の発明の一実施例で電
気コイルに流す電流の波形を示す。11 is an electric coil 10a according to the second embodiment shown in FIG.
10A to 10D are time charts showing waveforms of a current flowing through the coil, and FIG. 6B shows a waveform of a current flowing through the electric coil in the embodiment of the second invention of the present application.
【図12】 図8に示す第2実施例の電気コイル10a
〜10dに図11の(B)に示す電流を流したときの、
磁極端間に発生する磁束の方向Mfを示す平面図であ
り、図12の(A)は図11の(B)に示すタイミング
aのものを、図12の(AB)は図11の(B)に示す
タイミングabのものを、図12の(B)は図11の
(B)に示すタイミングbのものを、図12の(BC)
は図11の(B)に示すタイミングbcのものを、図1
2の(C)は図11の(B)に示すタイミングcのもの
を、図12の(CD)は図11の(B)に示すタイミン
グcdのものを、図12の(D)は図11の(B)に示
すタイミングdのものを、図12の(DA)は図11の
(B)に示すタイミングdaのものを示す。FIG. 12 shows an electric coil 10a according to the second embodiment shown in FIG.
When a current shown in FIG.
FIG. 12A is a plan view showing the direction Mf of the magnetic flux generated between the magnetic pole ends. FIG. 12A shows the timing a shown in FIG. 11B, and FIG. ), And FIG. 12 (B) shows the timing b shown in FIG. 11 (B), and FIG.
FIG. 1B shows the timing bc shown in FIG.
2 (C) shows the timing c shown in FIG. 11 (B), FIG. 12 (CD) shows the timing cd shown in FIG. 11 (B), and FIG. 12 (D) shows the timing c shown in FIG. FIG. 12B shows the timing d shown in FIG. 11B, and FIG. 12D shows the timing da shown in FIG. 11B.
【符号の説明】 1:電極 2:チャック
3:キャップ 4:電極台 5:基幹
6:内ノズル部材 6n:内ノズル 7:センタリングスト−ン
8:外ノズル部材 8n:外ノズル 9:磁性体コア
9a〜9d:磁極端 10,10a〜10d:電気コイル
11:外電極 11n:外電極ノズル 12:コイルリ−ド
12a,12b:端子 13:断熱カラ− 14:絶縁カラ−[Explanation of Signs] 1: Electrode 2: Chuck
3: Cap 4: Electrode stand 5: Backbone
6: Inner nozzle member 6n: Inner nozzle 7: Centering stone 8: Outer nozzle member 8n: Outer nozzle 9: Magnetic core
9a-9d: Magnetic pole 10, 10a-10d: Electric coil
11: Outer electrode 11n: Outer electrode nozzle 12: Coil lead
12a, 12b: Terminal 13: Insulated color 14: Insulated color
───────────────────────────────────────────────────── フロントページの続き (72)発明者 酒 井 巌 千葉県習志野市東習志野7丁目6番1号 日鐵溶接工業株式会社 機器事業部 内 (56)参考文献 特開 昭51−135852(JP,A) (58)調査した分野(Int.Cl.6,DB名) B23K 10/00 504 H05H 1/40 B23K 9/08 ──────────────────────────────────────────────────続 き Continuation of the front page (72) Inventor Iwao Sakai 7-6-1, Higashi Narashino, Narashino City, Chiba Prefecture Nippon Steel Welding Industry Co., Ltd. Equipment Division (56) References JP-A-51-135852 (JP, A) (58) Field surveyed (Int. Cl. 6 , DB name) B23K 10/00 504 H05H 1/40 B23K 9/08
Claims (2)
ラズマノズルを有する内ノズル部材,該内ノズル部材と
前記電極の間の空間にガスを供給するためのガス流路、
および、前記プラズマノズルに対向する位置にプラズマ
出射開口を有する外電極部材、を有する非移行式プラズ
マジェットト−チにおいて、前記内ノズル部材と外電極
部材の間に介挿され、前記プラズマノズルからプラズマ
出射開口に進むプラズマ流路を囲む断熱筒体;および、
断熱筒体を横切る磁束を発生するための電気コイル;を
備えることを特徴とする非移行式のプラズマジェットト
−チ。An electrode, an inner nozzle member having a plasma nozzle at a position facing a tip of the electrode, a gas flow path for supplying gas to a space between the inner nozzle member and the electrode,
And a non-transitional plasma jet torch having an outer electrode member having a plasma emission opening at a position facing the plasma nozzle, interposed between the inner nozzle member and the outer electrode member, and A heat-insulating cylinder surrounding the plasma flow path leading to the plasma emission opening; and
A non-transferring plasma jet torch comprising: an electrical coil for generating a magnetic flux across the insulated cylinder.
ラズマノズルを有する内ノズル部材,該内ノズル部材と
前記電極の間の空間にガスを供給するためのガス流路,
前記プラズマノズルに対向する位置にプラズマ出射開口
を有する外電極部材,前記内ノズル部材と外電極部材の
間に介挿され、前記プラズマノズルからプラズマ出射開
口に進むプラズマ流路を囲む断熱筒体,先端面が該断熱
筒体の外側面に対向し断熱筒体を間に置いて互に対向す
る2対以上の磁極端を有する磁性体コア、および、該磁
性体コアに巻回され、相対向する前記磁極端間に前記断
熱筒体を横切る磁束を発生するための複数個の電気コイ
ル、を備えるプラズマジェットト−チの、前記電気コイ
ルのそれぞれに、前記磁極端の先端で囲まれる空間に回
転磁界を生ずる正弦波交番電圧を印加することを特徴と
する、非移行式のプラズマジェットの揺動方法。2. An electrode, an inner nozzle member having a plasma nozzle at a position facing a tip of the electrode, a gas flow path for supplying gas to a space between the inner nozzle member and the electrode,
An outer electrode member having a plasma emission opening at a position facing the plasma nozzle, a heat insulating cylinder interposed between the inner nozzle member and the outer electrode member and surrounding a plasma flow path from the plasma nozzle to the plasma emission opening; A magnetic core having two or more pairs of magnetic poles having a tip end surface facing the outer surface of the heat-insulating cylinder and facing each other with the heat-insulating cylinder interposed therebetween; and a magnetic core wound around the magnetic core and facing each other. A plurality of electric coils for generating a magnetic flux traversing the heat insulating cylinder between the magnetic poles, in each of the electric coils in a space surrounded by the tip of the magnetic pole. A non-transitional plasma jet oscillating method, characterized by applying a sinusoidal alternating voltage that generates a rotating magnetic field.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3040273A JP2898111B2 (en) | 1991-03-06 | 1991-03-06 | Plasma jet torch and plasma jet oscillating method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3040273A JP2898111B2 (en) | 1991-03-06 | 1991-03-06 | Plasma jet torch and plasma jet oscillating method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04279284A JPH04279284A (en) | 1992-10-05 |
| JP2898111B2 true JP2898111B2 (en) | 1999-05-31 |
Family
ID=12576029
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3040273A Expired - Lifetime JP2898111B2 (en) | 1991-03-06 | 1991-03-06 | Plasma jet torch and plasma jet oscillating method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2898111B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008071611A (en) * | 2006-09-14 | 2008-03-27 | Sekisui Chem Co Ltd | Electrode structure of plasma surface treatment equipment |
| KR100967016B1 (en) * | 2007-09-20 | 2010-06-30 | 주식회사 포스코 | Plasma torch device and plasma processing method |
| US11295932B2 (en) * | 2016-08-11 | 2022-04-05 | Fuji Corporation | Plasma generation device and plasma irradiation method |
-
1991
- 1991-03-06 JP JP3040273A patent/JP2898111B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04279284A (en) | 1992-10-05 |
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