JP2899250B2 - Semiconductor manufacturing equipment - Google Patents

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor manufacturing apparatus having a stage device for moving a movable stage along a guide, for example, a projection exposure apparatus, an electron beam drawing apparatus, or a wire. The present invention relates to a semiconductor manufacturing apparatus such as a bonder. 2. Description of the Related Art A stage device used in a conventional semiconductor manufacturing apparatus comprises a movable stage portion and a transmission mechanism using an Al-based, Ti-based, or Mg-based light alloy or another metal material. doing. [0003] However, these metallic materials have rigidity, deformation due to temperature change, abrasion resistance, and the like.
There is a problem in terms of rust prevention and the like. In particular, when the stage device is used in a vacuum atmosphere, the use of a lubricant is restricted, so that the wear resistance is further deteriorated. [0004] Maintaining the accuracy of a high-precision stage device used in the semiconductor manufacturing field is a very difficult problem in view of the aging of metal materials. The present invention has been made in view of the above circumstances, and has as its object to solve the above-mentioned problems of the prior art and to enable high-speed and high-precision movement of a movable stage. An object of the present invention is to provide an excellent semiconductor manufacturing apparatus provided with a stage device that can be used without any problem even in a vacuum atmosphere. In order to solve this problem, a semiconductor manufacturing apparatus according to the present invention comprises a first stage linearly moving in a first direction in a plane, and a guide provided on the first stage. A second stage linearly guided in a second direction orthogonal to the first direction by being guided by the unit, a chuck installed on the second stage to hold a silicon wafer, and the first stage together with the second stage. A first motor for generating a driving force for moving in the first direction, a second motor for generating a driving force for moving the second stage with respect to the first stage in the second direction, An air bearing for supporting and guiding the second stage by air; and a coupling for transmitting a driving force from the first motor to the first stage, wherein the air bearing connects the second stage to the first stage. Moth A first air pad for guiding in the second direction along the guide portion, and a second air pad for supporting the second stage in a direction perpendicular to the plane; The second stage, the guide section, the chuck, the first air pad, the second
The material of the air pad and the coupling is made of ceramics. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail with reference to the drawings. In FIG. 1, reference numeral 1 denotes a chuck made of alumina ceramics, which vacuum-adsorbs a silicon wafer or a sample placed thereon. Although not illustrated, the chuck 1 is provided with an opening for vacuum suction and a duct leading to a vacuum pump. Reference numeral 2 denotes an alumina ceramic X stage for transferring the chuck 1 in the X direction. 3
Is a sliding member made of alumina ceramics or further having a sliding surface coated with Teflon (registered trademark), and provided on the inner surface of the X stage 2. Reference numeral 4 denotes a ceramic ball nut for applying a feeding force to the X stage 2, which is connected to the X stage 2 via a connecting member, and contains a non-metallic ball such as a ceramic or ruby or sapphire. A feed ball screw 5 made of ceramics is screwed with the ball nut 4. Reference numeral 6 denotes a ceramic housing for holding the ball screw 5, in which a non-metallic bearing such as ruby or sapphire is accommodated for receiving the ball screw 5. Reference numeral 7 denotes a power transmission coupling made of ceramics. One of the couplings 7 is connected to the ball screw 5 and the other is connected to a drive shaft of a motor 8 for driving the X stage. Reference numeral 9 denotes a sliding guide made of ceramics for regulating the movement of the X stage 2. One surface of the sliding guide 9 contacts the rolling guide (see FIG. 2), and the other surface contacts the sliding member 3. . Reference numeral 10 denotes a ceramic Y stage, which supports the protruding portions 2 ', 2' of the X stage 2 and has an X-direction sliding guide 9 connected thereto. Reference numeral 11 denotes a sliding member made of ceramics or further coated with Teflon (registered trademark), and is provided inside the Y stage 10. Reference numeral 12 denotes a ceramic linear guide sliding guide for restricting the movement of the Y stage 10 and is coupled to a ceramic base 18. Reference numerals 13 and 14 denote ceramic housings made of ceramics for holding a ball screw 15 for feeding in the Y direction. Housings 13 and 14 accommodate bearings made of a ceramic material or a nonmetal material such as ruby or sapphire. Have been. Although not shown in the drawing, a ball nut is screwed into the ball screw 15 and fixed inside the Y stage 10. Reference numeral 16 denotes a power transmission coupling, which is made of ceramics and is coupled to a motor 17 for driving the Y stage 10. Reference numerals 19 to 22 denote sliding surfaces made of ceramics which are lapping and mirror-finished on a flat surface, and sliding surfaces 19 and 20 support lower protruding portions 2 'and 2' of the X stage 2 and slide surfaces. Reference numerals 21 and 22 support the lower projecting portions 10 'and 10' of the Y stage 10, respectively. FIGS. 2 and 3 show stages 2, 1 and 2, respectively.
FIG. 2 shows a structure of a reference example in comparison with the present invention, and FIG. 3 shows a structure according to the present invention. In FIG. 2 of the reference example, reference numeral 24 denotes a roller or needle bearing made of ceramics or a nonmetallic material. On the other hand, in FIG. 3 showing the structure of the present invention, 2
Reference numeral 5 denotes a ceramic air pad for using an air bearing. The air pad guides the X stage 2 in the moving direction (X direction) along the guide portion, and the X stage 2 moves in the vertical direction (Z direction). The air pads 25 are connected to a pneumatic duct (not shown). It should be noted that, among these members, a conventional alloy member can be used in a portion excluding the sliding surface and the rolling portion, depending on the application. In the above configuration, when the motor 8 fixed to the Y stage 10 is driven, the ball screw 5 rotates through the coupling 7 and the ball nut 4 screwed with the ball screw 5 is fed back and forth. The X stage 2 fixed thereto can be moved back and forth in the X direction. X stage 2 is flat 19
20 and 20, it is displaced in the horizontal plane without slight movement in the Z direction, and the fluctuation in the Y direction is regulated by the guide 9. On the other hand, if the motor 17 fixed to the base 18 is driven, the ball screw 15 rotates via the coupling 16 and the Y stage 10 can be moved back and forth in the Y direction. The Y stage 10 moves on planes 21 and 22 and is precisely displaced in the Y direction by being regulated by the guide 12. In this embodiment, coupling couplings 7, 1
The reason why ceramics is used as 6 is that vibration transmission from the feeder can be reduced with high rigidity and low inertia. In addition, if the entire stage is made of a ceramic material, the ceramic itself is a non-magnetic material, so that it can be used in an electron beam lithography apparatus requiring a non-magnetic stage, and there is a possibility that chemicals and the like may adhere to the stage. It is also possible to apply to a precision feeding device and a precision measuring device in a certain other field. In addition, since it can be used in a chemical solution or can be used in a vacuum, taking advantage of the advantage of no rust, it can be applied to space development. In addition, since the chuck that holds the wafer by suction is made of ceramics, the heat absorbed by the wafer during exposure is less likely to be transmitted to the stage, and the stage can be prevented from being deformed due to thermal distortion. According to the present invention, the weight of the movable portion of the stage can be reduced without reducing its rigidity.
The low thermal conductivity and low coefficient of thermal expansion of the ceramic material make it possible to provide excellent semiconductor manufacturing equipment with high-precision stage equipment that does not easily fluctuate with changes in ambient atmosphere temperature. The entire stage is made of ceramics, including the material of the air pad for guiding the moving direction and the air pad for supporting in the vertical direction, provided by the air bearing, so that the moving body is lightweight and can be used as a bearing. The small driving force and high control responsiveness can be obtained by the synergistic effect of the two points that the contact resistance is small. In addition, since the moving body is lightweight, the air supply to the air bearing can be floated at a small flow rate on the stage, and the size of the air bearing can be reduced. Furthermore, since the material of the air pad and the guide are both ceramics having a low coefficient of thermal expansion and a small change over time, a minute gap between the two, which is a key point of the air bearing, can be maintained with extremely high accuracy, and, as a result, more than before A semiconductor manufacturing apparatus capable of manufacturing semiconductors with high accuracy can be provided.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view showing the overall configuration of a stage device according to the present invention. FIG. 2 is a sectional view showing a structure of a roller or a needle bearing as a reference example for comparison with the present invention. FIG. 3 is a sectional view showing a structure of an air bearing according to the present invention. [Description of Signs] 1 chuck 2 X stage 3 sliding member 4 ball nut 5 ball screw 6 housing 7 coupling 8 X motor 9 X guide 10 Y stage 11 sliding member 12 Y guide 13, 14 housing 15 ball screw 16 coupling 17 Y motor 18 Base 19 Sliding surface 20 Sliding surface 21 Sliding surface 22 Sliding surface

Claims (1)

(57) [Claims] A first stage that moves linearly in a first direction in a plane;
The first stage is guided by a guide portion provided on the first stage.
A second stage linearly moving in a second direction orthogonal to the direction, a chuck installed on the second stage to hold a silicon wafer, and the first stage together with the second stage .
A first motor for generating a driving force for moving in the first direction; and a second motor for moving the second stage with respect to the first stage.
A second motor for generating a driving force for moving the second stage, an air bearing for supporting and guiding the second stage with air, and transmitting the driving force from the first motor to the first stage.
A first air pad for guiding the second stage in the second direction along a guide portion provided on the first stage; and a second air pad for guiding the second stage in the second direction.
A second for supporting the stage in a direction perpendicular to the plane;
An air pad, the first stage, the second stage, the guide portion, the chuck, the first air pad , the second air pad, and the cup
A semiconductor manufacturing apparatus characterized in that the material of the ring is ceramics. 2. 2. The semiconductor manufacturing apparatus according to claim 1, further comprising a ceramic ball screw mechanism for moving the stage by the driving force of the first and second motors.