JP2901637B2 - Scanning X-ray microscope - Google Patents

Description

The present invention relates to a scanning X-ray microscope using fluorescent (or scattered) X-rays as an image signal, and a method for producing a contrast thereof, and particularly, to a method of forming irregularities on a sample surface. The present invention relates to a scanning X-ray microscope for generating a shadow contrast.

[Conventional technology]

Conventionally, a scanning X-ray microscope for detecting fluorescent X-rays has been disclosed in Japanese, Journal, Ob, Applied, Physics, Vol. 26 (1987), pages L1260 to L1262 (Jp.
nJAppl.phys. 26 (1987) ppL1260-1262).

The signal intensity in this case corresponds to the abundance (or concentration) of the specific element identified by the energy of the fluorescent X-ray at each point of the sample. Accordingly, a scanning X-ray microscope image corresponding to the mapping for each element can be obtained by the apparatus described in the above document.

[Problems to be solved by the invention]

However, the above prior art does not consider the dependence of signal intensity on the incident direction of X-rays and the observation direction of fluorescent X-rays. For this reason, no concavo-convex contrast based on the shape of the sample surface as in a scanning electron microscope is observed.

The present invention provides a scanning X-ray microscope that generates a detection signal contrast due to irregularities on the surface of a sample and displays an image having a three-dimensional shadow as if observing the sample by obliquely incident visible light. It was made for the purpose.

[Means for solving the problem]

In order to achieve the above object, according to the present invention, the incident direction of the X-ray irradiating the sample is made substantially perpendicular to the sample surface, and the fluorescent (or scattered) X-ray detection direction is set at a shallow angle with respect to the sample surface. And 36
Only a signal in a specific emission direction in a component having a shallow emission angle with respect to the sample surface distributed to 0 is used as an image signal.

[Action]

 The operation of the present invention will be described with reference to FIG.

For the sake of simplicity, a case where there is one projection on a flat sample surface will be described. When the position A on the sample is irradiated with the incident X-ray beam, the fluorescent (or scattered) X-rays reach the detector. However, when the sample is scanned so that the incident X-rays are incident on the position B, the emitted X-rays are intercepted by the convex portion on the sample with respect to the detector and are detected because they are absorbed. The (or scattering) X-ray intensity is weaker than at point A. Therefore, point A is displayed bright and point B is displayed dark as a scanning X-ray microscope image. As a result, the unevenness of the sample surface can be observed as a shadow contrast, as if a visible light was obliquely applied to the sample surface and a photograph was taken from directly above.

〔Example〕

Hereinafter, an embodiment of the present invention will be described with reference to FIG. X
X-rays emitted from the ray generator 5 are incident on the sample 1 as micro X-ray beams 3 using the X-ray focusing mirror 6.
The sample 1 is two-dimensionally scanned by the sample scanning mechanism 7. The fluorescent X-rays 4 emitted from the sample 1 are counted by the X-ray detector 2. The detected X-ray signal is sent to the measurement image processing computer 8. The computer 8 controls the sample scanning mechanism 5.

In order to measure a two-dimensional scanning X-ray microscope image, sample 1
Is scanned two-dimensionally and the fluorescent X-ray intensity at each point is counted, and the information is stored in the memory of the computer 8. An image is displayed by giving the display 9 a screen brightness corresponding to the fluorescent X-ray intensity at each point on the sample 1.

〔The invention's effect〕

ADVANTAGE OF THE INVENTION According to this invention, since the contrast resulting from the unevenness | corrugation of a sample surface can be produced | generated in the scanning X-ray microscope of the type which detects fluorescence (or scattered X-ray), there exists an effect that a sample surface shape can be measured.

[Brief description of the drawings]

FIG. 1 is a side view showing the principle of the present invention, and FIG. 2 is a side view of an X-ray microscope according to one embodiment of the present invention. DESCRIPTION OF SYMBOLS 1 ... Sample, 2 ... X-ray detector, 3 ... Micro X-ray beam incident on sample, 4 ... Fluorescent (or scattered) X-ray emitted from sample, 5 ... X-ray generator, 6 ... X-ray collection Light mirror, 7
... sample scanning mechanism, 8 ... measurement image processing computer, 9 ... display.

────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-62-106352 (JP, A) JP-A-60-76652 (JP, A) JP-A-1-232647 (JP, A) Uchida, Shigeta, Suzuki , “Observation of GaAsFET device structure with scanning X-ray microscope”, Journal of the Japan Society of Precision Engineering, Vol. 58, No. 3, pp. 546-551 (58) Fields investigated (Int. Cl. ⁶ , DB name) G21K7 / 00 JICST file (JOIS)

Claims (1)

(57) [Claims] 1. A scanning X-ray microscope apparatus comprising a finely focused X-ray beam, a sample scanning mechanism, a fluorescent X-ray or scattered X-ray detector, and an image display for displaying a detection signal as an image. An X-ray generator that reflects the X-rays, and an X-ray focusing mirror that reflects the X-rays to convert the X-ray into a finely focused X-ray beam. Scanning X-rays, characterized in that, among the portions radiated at a shallow angle with respect to the sample surface at the X-ray detection angle, those radiated in a desired specific direction are used as display signals. Line microscope.