JP2907263B2 - Film sticking device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a film sticking apparatus for sticking a film on the surface of a substrate for printed wiring or the like.

[0002]

2. Description of the Related Art In the process of manufacturing a printed wiring board used for electronic equipment such as a computer, there is a step of attaching a laminate film to the surface of a printed wiring board.

A film sticking apparatus for sticking a laminated film as described above guides a continuous film loaded on a film supply roll to a leading end of a substrate conveyed by conveyance means via a guide roll. After being temporarily attached to the front end of the substrate by a temporary attaching means, the substrate is transported while the film is pressed against the substrate by a lamination roll.

[0004] As such a film sticking apparatus, for example, a mechanism described in Japanese Patent Application No. 6-1767 "A mechanism for peeling a protective film from the tip of a film with a protective layer on a photosensitive layer with an adhesive tape. A photosensitive layer laminating apparatus having a pair of opposed thermocompression rollers for advancing while holding and pressing the film with the photosensitive layer and the substrate, and a mechanism for cutting the photosensitive layer on the film with the protective film and the photosensitive layer; An adhesive tape roll that can take up and drive the peeling mechanism, a pressing bar that presses the adhesive tape against the protective film tip and retreats, a dancer roller that adjusts the path length of the adhesive tape, and a delivery roll of the film with a photosensitive layer With a protective film collecting roll that winds up the protective film by surface friction drive. "

The pressing bar has a sharp end, and when the adhesive tape is pressed against the front end of the protective film, the adhesive tape is pulled to remove the tape having the length stored by the dancer roller. It is pulled and pressed.

Further, the mechanism for cutting the photosensitive layer on the protective film and the film with the photosensitive layer is to move a rotation-free round blade cutter (disc cutter) from above the protective film to move it in the film width direction. .

The pressure-sensitive adhesive tape is usually arranged at two places in the width direction of the film, and the pressing bar is swingable within a certain range and is advanced and retracted by an air cylinder. The pair is arranged on the left and right sides in the film width direction, and is driven synchronously.

[0008]

Since the pressing bar is moved forward and backward by the left and right, synchronized air cylinders as described above, it is necessary to equalize the pressing force on the right and left of the pressing bar. When the adjustment is difficult, there is a problem that even if the pressure-sensitive adhesive tape is pressed against the protective film by the pressing bar, one of them cannot be peeled off.

Further, if the pressing force by the air cylinder is too large, there is a problem that the film is damaged.
Further, there is a problem that the dancer roller for adjusting the path length of the adhesive tape is provided separately from the pressing bar, and the swing range of the dancer roller is large, so that a large space is required in the apparatus. Was.

The cutting mechanism having the round blade cutter holds a film on a cutter table, and cuts a part of the film in a thickness direction by pressing the round blade cutter against the film. When the blade cutter rides on the cutter table, a concentrated impact load is generated at the corner of the cutter table, and the blade is easily spilled, so that the round blade cutter must be frequently replaced.

SUMMARY OF THE INVENTION The present invention has been made to solve the problem of Japanese Patent Application No. 6-1767, and provides a film sticking apparatus capable of reliably peeling off a cover film. Aim.

Another object of the present invention is to provide a film sticking apparatus in which blade spilling hardly occurs at the time of cutting, so that the replacement life of the round blade cutter can be extended.

A further object of the present invention is to provide a film sticking apparatus in which the mechanism for adjusting the path length of the adhesive tape when the cover film is peeled off with the adhesive tape is miniaturized and whose structure is simplified. .

[0014]

According to the present invention, a laminated film comprising at least a base film, a photosensitive layer and a cover film laminated on the photosensitive layer and wound on a film supply roll is passed through a guide roll, After being guided to the leading end of the substrate conveyed by the carrying means and temporarily attaching to the leading end of the substrate by the temporary attaching means in a state where the cover film is peeled off, the film is adhered to the substrate by a lamination roll while the film is being transported. In the apparatus, a vertical surface along a path of the laminated film, a first inclined surface that refracts and extends in a direction obliquely away from the path obliquely from the distal end of the vertical surface, at the substrate-side tip of the tacking means, and 1
A second inclined surface refracting in a direction away from the path from the tip of the inclined surface, and a suction hole for sucking and holding the laminated film on the vertical surface and the first and second inclined surfaces. And a half-cut device that is arranged on the upstream side of the tacking means and moves in the film width direction to cut the cover film and the photosensitive layer while leaving the base film, and a vicinity of the tacking means. Placed in
An adhesive tape supply device that supplies an adhesive tape in parallel with the laminated film and moves in a moving direction; and the first and second inclined surfaces that are disposed along the laminated film in a width direction thereof and at a tip of the temporary attaching means. And a pressing roll that rolls the pressure-sensitive adhesive tape from the pressure-sensitive adhesive tape supply device with its pressure-sensitive adhesive surface outside, and rotatably supports the pressing roll, A pressing roll driving device that presses while rotating from the first inclined surface at the tip of the means to the tip of the second inclined surface to adhere the adhesive tape to the cover film, and separates from the second inclined surface tip position; When the pressing roll is separated from the second inclined surface, the adhesive tape pull-back means pulls the adhesive tape in a direction away from the inclined surface in synchronization with the pressing roll. And a film / tape winding device that winds the cover film adhered to the adhesive tape and peeled off from the photosensitive layer on the base film by separating the adhesive tape, together with the adhesive tape adhered thereto. The above object is achieved.

According to a second aspect of the present invention, the pressing roll driving device includes a supporting shaft disposed in parallel with the pressing roll, and a supporting shaft substantially at the center of the supporting path in the film path width direction. An adjusting frame supported at a position where the adjusting frame is supported, and at a position near the adjusting frame, the supporting frame is swingably supported around the axis of the supporting shaft and extends on both sides along the supporting shaft. The first frame is provided at both ends in the longitudinal direction of the support frame.
A pair of linear shafts which are supported so as to be able to expand and contract in the direction of the inclined surface and rotatably support the pressing rolls at the ends thereof, an actuator which moves the linear shaft in the axial direction, and which is disposed between the adjustment frame and the support frame. The support frame may be configured to include a spring that biases the adjustment frame in a direction in which the pressing roll at the tip of the linear shaft presses against the inclined surface.

Further, the pressure-sensitive adhesive tape pulling-back means is attached to the pressing roll driving device so as to be movable in parallel with the pressing roll and in the direction of movement of the pressing roll. Between the roll and the film tape winding device, a dancer roll around which the adhesive tape and the cover film peeled off by this are wound, and the dancer roll is urged in the pressing roll retraction direction, and the spring force is The spring may be configured to be contracted by a tensile force applied to the adhesive tape when the pressing roll is protruded by the pressing roll driving device.

Further, the half-cut device is rotatable in the width direction of the laminated film so as to be rotatable in a plane orthogonal to the laminated film and in the width direction of the laminated film. A free disk cutter and a pair of rotatable disks are provided adjacent to both sides in the moving direction of the disk cutter in a plane parallel to the rotation surface of the disk cutter, and a common circumscribed surface of the pair of rotation surfaces on the laminated film side is provided. A guide roll substantially circumscribing the rotating blade edge of the disc cutter,
May be provided.

According to a fifth aspect of the present invention, the half-cut device is provided with a width-direction drive device including a guide member arranged in the width direction along the laminated film, and the guide member is formed by the width-direction drive device. Along, is supported so as to be able to reciprocate in the width direction of the laminated film, and supports a slide member that supports the guide roll, and supports the disk cutter, and is capable of moving forward and backward within a certain range in the laminated film direction. A movable member supported by the slide member,
A spring may be provided between the movable member and the slide member to urge the movable member in the direction of the laminated film, and spring adjusting means for adjusting a set length of the spring.

Further, a cutter base made of an elastic material against which the disc cutter is pressed via the laminated film is provided at a position facing the running locus of the disc cutter with the laminated film interposed therebetween. It may be provided.

Further, the width direction driving device and the cutter table may be supported by the same unit frame.

[0021]

According to the first aspect of the present invention, the tip of the sticking means on the substrate side is formed from a vertical plane along the path of the laminated film to the first inclined plane and the second inclined plane, and the pressing roll is provided here. As a result, the pressure-sensitive adhesive tape is pressed from the first inclined surface to the tip of the second inclined surface, so that the adhesive tape is securely adhered to the cover film, so that the cover film can be reliably peeled.

According to the second aspect of the present invention, the support frame for supporting the pressing roll via the pair of linear shafts is disposed substantially at the center in the longitudinal direction of the supporting shaft disposed in parallel with the pressing roll. Therefore, it is easy to adjust the balance between the left and right of the pressing roll, and accordingly, the pressure contact force of the pressure-sensitive adhesive tape to the film at the left and right positions of the pressing roll can be adjusted equally, so that the cover film can be reliably peeled off.

According to the third aspect of the present invention, since the dancer roll is provided in the pressing roll driving device, the space for the dancer roll can be reduced.

A spring is arranged between the dancer roll and the pressing roll driving device, and is moved in the direction of the pressing roll driving device against the spring when the pressure-sensitive adhesive tape presses the cover film of the adhesive tape, and thereby stored in the dancer roll. When the film that has been returned is returned and pressed against the cover film, and the pressing roll returns in the cover film peeling direction, the spring extends to absorb the slack of the adhesive tape due to the cover film peeling.

According to the fourth aspect of the present invention, a pair of guide rolls projecting to the same position as the rotary blade tip on both sides in the rotary blade moving direction of the disk cutter always contact the cover film when the rotary blade reciprocates. When the rotating blade climbs on the cutter table while suppressing the cover film, the preceding guide roll rides on the cutter table and lifts the rotating blade, thereby avoiding impact contact of the rotating blade with the corner of the cutter table or the like. Therefore, blade spilling of the rotary blade can be suppressed, and the replacement life can be extended.

According to the fifth aspect of the present invention, the disc cutter is urged in the projecting direction by the spring against the slide member, and the guide roll is fixedly supported by the slide member. In addition to suppressing the cover film, the disc cutter is returned against the spring when the disc cutter rides on a corner portion of the cutter table or the like, whereby it is possible to suppress the occurrence of an impact concentrated load.

Further, since the slide member is capable of moving straight back and forth in the direction of the laminated film, it is easy to follow the change in the unevenness on the cover film side, and it is easy to adjust the cutting force by adjusting the spring.

According to the sixth aspect of the present invention, since the cutter table opposed to the disk cutter via the laminated film is made of hard resin or metal, the laminated film does not escape from the disk cutter. Thus, the disk cutter can be securely inserted into the cover film.

According to the seventh aspect of the present invention, since the width direction driving device and the cutter table are supported by the same unit frame, the assembling is easy, and the laminated film is securely held and cut. can do.

[0030]

Embodiments of the present invention will be described below with reference to the drawings.

The film sticking apparatus 10 according to the embodiment of the present invention shown in FIG. 1 includes a base film 12A, a photosensitive layer 12B and a cover film 12 as shown in FIG.
The laminated film 12 formed by laminating C is guided from the film supply roll 14 through the guide roll 16 to the vicinity of the front end of the substrate 20 transported by the transporting means 18 composed of transport rolls, and the cover film 12C is peeled off. ,
After temporarily attaching to the vicinity of the front end of the substrate 20 by the temporary attaching means 22, the lamination roll 24 transports the substrate 20 while pressing the laminated film 12 from which the cover film 12C has been peeled off onto the substrate 20.

A vertical surface 22 along the path 13 of the laminated film 12 is provided at an end of the temporary attaching means 22 on the substrate 20 side.
A, a first inclined surface 22B that refracts and extends in a direction obliquely away from the path 13 from an end of the vertical surface 22A, and further extends from the end of the first inclined surface 22B to the path 13A.
A second inclined surface 22C refracting in a direction away from the vertical surface 22A is formed, and suction holes (not shown) for sucking and holding the laminated film 12 are formed in the vertical surface 22A, the first and second inclined surfaces 22B, 22C. ) Is formed.

On the upstream side of the tacking means 22, the laminated film 12 is moved in the film width direction along the path 13 of the laminated film to move the laminated film 12 into the base film 12A.
Is provided with a half-cut device 28 that cuts the photosensitive layer 12B and the cover film 12C while leaving the.

Further, in the vicinity of the tacking means 22, an adhesive tape 3 is provided in parallel with the laminating film 12 and in the moving direction.
An adhesive tape supply device 32 for supplying 0 is disposed. The pressure-sensitive adhesive tape supply device 32
Are arranged in the vicinity of both ends in the width direction of the adhesive tape.
The reference numeral 0 is also supplied at positions near both ends in the width direction of the laminated film 12 so as to face the cover film 12C.

The pressure-sensitive adhesive tape 30 supplied from the pressure-sensitive adhesive tape supply device 32 is wound around a pressing roll 34 with its pressure-sensitive adhesive surface outside. This pressing roll 34
Are disposed along the laminated film 12 in the width direction thereof, and the first and second inclined surfaces 22
B and 22C, and are rotatably supported by a pressing roll driving device 36.

The pressing roll driving device 36 presses the adhesive tape 30 while rotating the pressing roll 34 from the first inclined surface 22B at the tip of the temporary attaching means 22 to the tip of the second inclined surface 22C. , Laminated film 1 suction-held on first and second inclined surfaces 22B, 22C
2, and is configured to separate the pressing roll 34 from the distal end position of the second inclined surface 22C.

When the pressing roll 34 is separated from the second inclined surface 22C, the pressure-sensitive adhesive tape 30 is moved to the first and second pressing rollers 34 in synchronization with the pressing roll 34. An adhesive tape pull-back means 38 for pulling in a direction away from the inclined surface is provided. Furthermore, the adhesive tape 30 is provided on the upper end of the film sticking device 10.
And a film / tape winding device 40 for winding the cover film 12C, which has been peeled off from the base film 12A and the photosensitive layer 12B by the separation of the adhesive tape 30, together with the adhesive tape 30 adhered thereto.

The reference numeral 42 in FIG.
2B shows a rotary cutter for cutting the laminated film 12 on the path 13 by 2B. The rotary blade 42A is configured by providing a spiral blade on the outer periphery of a cylindrical shaft, and the fixed blade 42B has a linear blade parallel to the cylindrical shaft.

As shown in FIG. 2, the pressing roll driving device 36 includes a support shaft 44 having a circular cross section arranged in parallel with the pressing roll 34, and a width direction of the support shaft 44 in the width direction of the film path 13. An adjustment frame 46 supported at a position substantially opposite the center, and supported by the support shaft 44 so as to swing around its axis so as to surround both sides and a lower side of the adjustment frame 46, A support frame 48 extending in both directions along 44 is supported at both longitudinal ends of the support frame 48 so as to be able to advance and retreat in the direction of the first inclined surface 22B. A pair of left and right linear shafts 50 for freely supporting, and an actuator 5 for moving the linear shafts 50 forward and backward in the axial direction
2, as shown in FIG. 3 in an enlarged manner, the support frame 48 is disposed between the adjustment frame 46 and the support frame 48, and the support frame 48 is pressed against the adjustment frame 46 by a pressing roll at the tip of the linear shaft 50. 34 includes a spring 54 that urges the first and second inclined surfaces 22B and 22C in a direction of pressing against the first and second inclined surfaces 22B and 22C. Reference numeral 56 in FIGS. 2 and 3 denotes an adjusting screw for adjusting the set load of the spring 54.

The adjusting frame 46 is provided at a chamfered portion on the upper surface in the longitudinal center of the cylindrical support shaft 44.
It is tightened and fixed by a screw 58.

On the other hand, the support frame 48 is arranged with the adjustment frame 46 interposed therebetween. The connecting portion 48A of the adjustment frame 46 which crosses the lower side in FIG.
3 constitutes a stopper surface 48B which comes into contact with the lower surface of the adjusting frame 46 in FIG. 3, and the support frame 48 urged clockwise about the support shaft 44 by the spring 54 in FIG. At 48B, it abuts against the lower side surface of the adjustment frame 46, and the position is regulated in the pressed state. Therefore, when the support frame 48 receives a force equal to or more than a predetermined value in the counterclockwise direction in FIG. 3, the spring 54 is compressed and swings counterclockwise.

Actuator 52 of support frame 48
A bearing 60 is disposed on the center side of the mounting portion, and the linear shaft 50 disposed in parallel with the actuator 52 is supported on the bearing 60 so as to be able to reciprocate in the axial direction. The pressing roll 3 of this linear shaft 50
Actuator 52A of actuator 52 is provided at the end opposite to 4
Is fixedly connected.

The adhesive tape withdrawing means 38 includes a guide shaft 66 which is mounted coaxially with the linear shaft 50 and protrudes in the opposite direction from the joint member 64, and is attached to the guide shaft 66 in the axial direction. A bearing member 68 slidably supported, a spring 70 for urging the bearing member 68 in a direction away from the joint member 64, and both ends in the longitudinal direction are rotatably supported by the bearing member 68. And a dancer roller 72. The guide shaft 66
The linear shaft 50 is formed by further extending the linear shaft 50 from the joint member 64.

Here, the spring 70 is set to have such a spring force that the spring 70 can be contracted by the tensile force applied to the adhesive tape 30 when the pressing roll 34 projects by the pressing roll driving device 36.

The dancer roller 72 reaches the film / tape winding device 40 via the pressing roll 34.
Adhesive tape 30 and cover film 1 adhered thereto
2C is to be wound.

The half-cut device 28 is, as shown in FIG. 4 and FIG. 5 in an enlarged manner, orthogonal to the laminated film 12 and rotatable within a plane in the width direction of the laminated film 12. A pair of disk cutters 78 that can reciprocate in the width direction of the film and a pair of rotatable adjacent to both sides in the moving direction of the disk cutter 78 are provided rotatably in a plane parallel to the rotation surface of the disk cutter 78. Roll 8 whose common circumscribed surface on the laminated film side of the surface substantially circumscribes the rotary cutting edge 78A of the disc cutter 78
0.

The half-cut device 28 has a built-in guideless rodless cylinder 82 disposed along the laminated film 12 in the width direction thereof, and reciprocates in the width direction of the laminated film 12 by the rodless cylinder 82. A movable member that is supported by the slide member 84 so as to be freely supported and to support the guide roll 80 and the disc cutter 78 and to be able to advance and retreat within a certain range in the direction of the laminated film 12. Member 8
6, a spring 88 mounted between the movable member 86 and the slide member 84 to urge the movable member 86 in the direction of the laminated film 12, and a spring adjusting means for adjusting a set length of the spring 88 And a micrometer 90.

Further, the half-cutting device 28 holds the disc cutter 7 with the laminated film 12 therebetween.
The disk cutter 7 is located at a position facing the running locus of the disk cutter 7.
8 is provided with a cutter table 92 made of a hard resin or metal pressed through the laminated film 12.

The rodless cylinder 82 and the cutter table 92 are supported by the same unit frame 94.

The unit frame 94 is arranged in the width direction of the apparatus in parallel with the pressing roll, and both ends thereof are fixed to the side wall 96 of the apparatus as shown in FIG.

As shown in FIG. 4, the upper end of the slide member 84 is fixed to the rodless cylinder 82 in the figure, and the other end of the slide member 84 projects below the movable member 86. Protrusion 84 that crosses the underside of the
A is provided.

A pair of guide roll supporting members 98 for rotatably supporting the guide rolls 80 are provided at the ends of the projecting portions 84A, which project beyond the movable member 86, and are connected. Have been.

The movable member 86 is provided between the pair of guide roll support members 98 and 98 and the slide member 8.
4 is slidably disposed via a slide shoe 86A.

The spring 88 is mounted between a projecting portion 84A of the slide member 84 and a spring receiver 86B projecting downward from the movable member 86 in FIG.
The movable member 86 is attached so as to urge the movable member 86 leftward in FIG. Reference numerals 88A and 8 in FIGS.
8B is a bolt for adjusting the set length of the spring 88;
Show the nut.

The micrometer 90 is attached to the movable member 86, and the tip of the spindle 90A contacts the end surface 84B of the slide member 84 at a position between the pair of guide roll support members 98. The position of the movable member 86 is regulated when the movable member 86 is biased rightward in FIGS. 4 and 5 against the biasing force of the spring 88.

As shown in FIG. 6, the adhesive tape supply device 32 is supported by the unit frame 94 via a slide mechanism 100 so as to be movable within a certain range in parallel with the pressing roll 34. This slide mechanism 100
Is a slide bar 100A arranged in parallel with the pressing roll 34, a slide member 100B slidably movable along the slide bar 100A, and supporting the brake 102, and the slide member 100B attached to the slide bar 100A. Screw 1 for tightening and fixing at any position along
00C.

A roll holder 106 for holding the adhesive tape roll 104 rotatably and detachably is attached to the brake 102.

The brake 102 is mounted on the roll holder 1.
Adhesive tape 3 from adhesive tape roll 104
At the time of unwinding 0, the rotation speed is regulated to apply a tension of a certain value or more to the adhesive tape 30.

Reference numerals 108A and 108B in FIGS.
A guide roll for guiding a film and an adhesive tape from the dancer roller 72 to the film tape winding device 40 is shown. These guide rolls 108
A and 108B are fixed to the unit frame 94 via a support plate 110.

As shown in FIGS. 7 and 8, the support shaft 44 of the pressing roll driving device 36 is moved to the vertical plane 22A of the temporary attaching means 22 via an advance / retreat mechanism 112 as shown in FIGS. It is attached to and supported by the side wall 96 so as to be able to advance and retreat within a certain range in a direction orthogonal to the direction.

The reciprocating mechanism 112 includes a slide member 112A for supporting an end of the support shaft 44, a guide shaft 112B for slidably supporting the slide member 112A in a direction perpendicular to the vertical plane 22A, A second guide shaft 112C attached to the slide member 112A in parallel with the guide shaft 112B, and the second guide shaft 112 is slidably guided within a certain range, and is tightened by the tightening handle 112D. The second guide shaft 112
And a fastening member 112E which is fastened and fixed to C.

The range of movement of the support shaft 44 and the members supported by the support shaft 44 in the direction perpendicular to the vertical plane 22A by the advance / retreat mechanism 112 is shown by a solid line and a two-dot chain line in FIG. In the state shown by the solid line in FIG. 1, the normal operation (set) is performed.
The position indicated by the two-dot chain line indicates that the laminated film 12 is set manually or the rotary cutter 42
Also, it is a position where the temporary attachment means 22 is retracted to facilitate this during maintenance.

Next, the operation of the above embodiment will be described.

First, the support shaft 44 is moved backward to the position shown by the two-dot chain line in FIG.
A gap is formed between the pressing roll 34 and the temporary attaching means 22, and the gap is set through the laminated film 12. Next, the support shaft 44 is set at the position shown by the solid line in FIG.

At the start of the operation, the first and second inclined surfaces 22B, 22C at both ends of the pressing roll 34
Adjust the balance of contact pressure to Pressing roll 34
The supporting frame 48 supporting both ends of the pressing roll 3
4 and is attached to the support shaft at a substantially central portion thereof, so that the adjusting operation is easy.

First, as shown in FIG. 9, first and second inclined surfaces 22B,
The laminated film 12 is supplied up to 22C, and the laminated film 12 is fixed in the state shown in FIG. 9 by the negative pressure applied from the suction hole.

At this time, the cover film 12C and the photosensitive layer 12B are cut by the half-cutting device 28 at the rear end position where the photosensitive layer 12B is exposed. In this case, the base film 12A may be slightly cut.

In this process, the slide member 84 is driven by the rodless cylinder 82 in the half-cutting device 28, so that the disk cutter 78 rotates and the photosensitive layer 12B and the cover film 12C between the cutter table 92 are inserted. Disconnect this by

At this time, before and after the disk cutter 78, the guide roll 80 presses the laminated film 12 against the cutter table 92 at a position substantially equal to the rotating blade edge 78A of the disk cutter 78 in the film thickness direction. Only the cover film 12C and the photosensitive layer 12B can be cut by the disk cutter 78 while the laminated film 12 is securely restrained. Also, the preceding guide roll 8
Since the disk cutter 78 is lifted by the 0 riding on, for example, a corner of the cutter base 92, the rotating blade 78A of the disk cutter 78 does not crash into the corner or the like to cause blade spilling. Further, since the cutter table 92 is formed of a hard resin or metal, the entire laminated film 12 does not escape when the cover film 12C and the photosensitive layer 12B are cut by the disk cutter 78. By precisely adjusting the cutting depth, only the cover film 12C and the photosensitive layer 12B can be reliably cut.

Next, the linear shaft 50 is driven by the actuator 52 of the pressing roll driving device 36, and the pressing roll 34 supported at the tip thereof is advanced, and the pressing roll 34 is further moved from the first inclined surface 22B of the temporary fixing means 22. Is moved while pressing the adhesive surface of the adhesive tape 30 to the tip of the second inclined surface 22C (see FIG. 10). At this time, when the brake 102 (see FIG. 6) in the adhesive tape supply device 32 is operated to fix the roll holder 106 and regulate the unwinding of the adhesive tape 30, the adhesive tape 30 is moved to the film / tape winding device 40. Dancer roller 7 from the side
2 will be supplied.

At this time, if the film / tape winding device 40 is restrained, the first and second inclined surfaces 22B,
The adhesive tape 30 supplied to the 22C is
2 will be supplied by compressing the spring 70 which biases it and shortening the path length of the adhesive tape.

Next, as shown in FIG. 11, the pressing roll 34 is returned to the original position by the actuator 52 via the linear shaft 50. At this time, the adhesive tape 30
Is pulled by the spring 70 for urging the dancer roller 72 returning to the original length. At the same time, only the cover film 12C which adheres to the base film 12A and the photosensitive layer
2B.

Next, as shown in FIG. 12, the temporary attaching means 22 is lowered, and the base film 12A and the photosensitive layer 12B sucked and held at the leading ends thereof are moved from the photosensitive layer 12B side to the vicinity of the leading end of the substrate 20. At the same time, the adhesive tape 30 and the cover film 12C to which the adhesive tape 30 is adhered are wound by the film / tape winding device 40 in synchronization with the lowering of the tacking means 22. At this time, the adhesive tape 30 is unwound from the adhesive tape supply device 32 while applying a constant tension by the brake 102.

Next, as shown in FIG. 13, the laminated film 12 is cut in the width direction by the rotary cutter 42 at a position further above the cutting line of the cover film 12C by the disk cutter 78.

Therefore, the cover film 12C is left at a fixed length on the rear end side of the base film 12A and the photosensitive layer 12B.

As shown in FIG. 14, the remaining area of the cover film 12C is set so as to protrude from the rear end 20A of the substrate 20 by a certain distance, for example, 1 to 2 cm.

As a result, as shown in FIG. 15, the portion of the photosensitive layer 12B protruding from the rear end 20A of the substrate 20 is formed by the base film 12A and the cover film 12A.
By holding the protruding portion with a nip device (not shown), the base film 12A can be easily peeled in a later step, and the photosensitive layer 12B is not exposed. Therefore, when gripping by the nip device, there is no sticking to this.

In the half-cut device 28, the slide member 84 is driven by the rodless cylinder 82. However, the present invention is not limited to this.
Any device may be used as long as the slide member 84 is driven by a device that reciprocates in the film width direction, such as a chain or a screw shaft.

[Brief description of the drawings]

FIG. 1 is a sectional view showing a film sticking apparatus according to an embodiment of the present invention.

FIG. 2 is an enlarged plan view showing a main part of the pressing roll driving device in the embodiment.

FIG. 3 is an enlarged sectional view taken along line III-III in FIG. 2;

FIG. 4 is a side view showing a half section of the half-cutting device in the embodiment;

FIG. 5 is a view taken along line V-V in FIG.

FIG. 6 is a rear view showing the adhesive tape supply device of the embodiment.

FIG. 7 is a partially sectional front view showing a mechanism for moving the adhesive tape supply device of the embodiment forward and backward.

8 is a sectional view taken along the line VIII-VIII in FIG.

FIG. 9 is a sectional view showing a standby state of a step of peeling a cover film by the apparatus of the embodiment.

FIG. 10 is a sectional view showing an adhesive tape pressing process in the peeling process.

FIG. 11 is a sectional view showing a state of a pressing roll retracted position in the peeling step.

FIG. 12 is a sectional view showing a process of temporarily attaching the laminated film after the cover film is peeled off in the apparatus of the embodiment.

FIG. 13 is a sectional view showing a state immediately before the step of attaching the laminated film to the substrate according to the embodiment.

FIG. 14 is a sectional view showing a state of the laminated film attached to the substrate by the apparatus of the embodiment.

FIG. 15 is a sectional view showing a process of peeling a base film while leaving a photosensitive layer on a substrate.

FIG. 16 is an enlarged sectional view showing a laminated film.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 ... Film sticking apparatus 12 ... Laminated film 12A ... Base film 12B ... Photosensitive layer 12C ... Cover film 13 ... Path 14 ... Film supply roll 16 ... Guide roll 18 ... Conveying means 20 ... Substrate 22 ... Temporary attaching means 22A ... Vertical surface 22B: First inclined surface 22C: Second inclined surface 24: Lamination roll 28: Half cut device 30: Adhesive tape 32: Adhesive tape supply device 34: Press roll 36: Press roll drive device 38: Adhesive tape pull-back means 40 ... Film / tape winding device 44 ... Support shaft 46 ... Adjustment frame 48 ... Support frame 52 ... Actuator 54,70,88 ... Spring 56 ... Adjustment screw 58 ... Screw 60 ... Bearing 66 ... Guide shaft 72 ... Dancer roller 78 ... Disk cutter 78A: Rotary blade 8 2. Rodless cylinder 84 Slide member 86 Movable member 90 Micrometer 92 Cutter base 94 Unit frame

────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-3-270897 (JP, A) JP-A-2-95851 (JP, A) JP-A-7-209878 (JP, A) (58) Field (Int.Cl. ⁶ , DB name) B65H 37 / 04,41 / 00 B32B 7/06 G03F 7/26 H05K 3/06

Claims (7)

(57) [Claims] 1. A substrate comprising at least a base film, a photosensitive layer, and a cover film laminated on the photosensitive layer, and a laminated film wound on a film supply roll and transported by a transport means via a guide roll. In a film sticking apparatus that transports the substrate while temporarily bonding the substrate to the front end of the substrate by a temporary attaching means in a state where the cover film is peeled off, and then pressing the lamination roll on the substrate, At the substrate-side tip, a vertical surface along the path of the laminated film, a first inclined surface that refracts and extends in a direction away from the path obliquely from the distal end of the vertical surface, and a distal end of the first inclined surface. Further, a second inclined surface refracting in a direction away from the path is formed, and the laminated film is suction-held on these vertical surfaces and the first and second inclined surfaces. A half-cut device that forms a suction hole to be held and that is arranged on the upstream side of the temporary attaching means and moves in a film width direction to cut the cover film and the photosensitive layer while leaving the base film; An adhesive tape supply device that is arranged in the vicinity of the attaching means and is in parallel with the laminated film and supplies the adhesive tape in the moving direction, and is arranged in the width direction along the laminated film, and the tip of the temporary attaching means is A pressing roll that is rotatable with respect to the first and second inclined surfaces and that wraps the adhesive tape from the adhesive tape supply device with its adhesive surface out, and rotatably supports the pressing roll; At the same time, this is pressed while rotating from the first inclined surface at the tip of the temporary attaching means to the tip of the second inclined surface, to adhere the adhesive tape to the cover film, And a pressing roll driving device for separating from the second inclined surface tip position, and at the time of separating the pressing roll from the second inclined surface,
The pressure-sensitive adhesive tape, in synchronization with the pressing roll, a pressure-sensitive adhesive tape pull-back means for pulling in a direction away from the inclined surface, adhered to the pressure-sensitive adhesive tape, peeled from the photosensitive layer on the base film by separation of the pressure-sensitive adhesive tape Film that winds the cover film together with the adhesive tape
And a tape winding device. 2. The pressing roll driving device according to claim 1, wherein the pressing roll driving device is supported at a position facing a substantially center of the supporting shaft arranged in parallel with the pressing roll in the film path width direction. An adjustment frame, a support frame which is supported by the support shaft so as to be swingable around its axis at a position near the adjustment frame, and which extends on both sides along the support shaft; and a longitudinal direction of the support frame. A pair of linear shafts supported at both ends so as to be extendable and contractible in the direction of the first inclined surface and rotatably supporting the pressing roll at the distal end, an actuator for moving the linear shaft in an axial direction, and the adjusting frame And the support frame, the support frame is pressed against the adjustment frame by a pressing roll at the tip of the linear shaft. Serial inclined surface film applying apparatus characterized by being configured to include a spring for urging in a direction to press, to. 3. The pressing tape driving device according to claim 1, wherein the adhesive tape pulling-back means is attached to the pressing roll driving device so as to be movable in a direction parallel to the pressing roll and in a direction in which the pressing roll advances and retreats. Between the roll and the film tape take-up device, a dancer roll around which the adhesive tape and the cover film peeled off by this are wound, and the dancer roll is urged in the pressing roll retraction direction, and the spring force is A spring that is contracted by a tensile force applied to the adhesive tape when the pressing roll is protruded by the pressing roll driving device. 4. The laminated film according to claim 1, 2 or 3, wherein the half-cutting device is rotatable in a direction perpendicular to the laminated film and in a plane in a width direction of the laminated film. A movable disc cutter and a pair of disc cutters are provided adjacent to both sides in the moving direction of the disc cutter so as to be rotatable in a plane parallel to the rotation plane of the disc cutter.
A film sticking device, wherein a common circumscribed surface of the pair of rotating surfaces on the side of the laminated film has a guide roll substantially circumscribing the rotating blade edge of the disc cutter. 5. The width cutting device according to claim 4, wherein the half cutting device includes a width direction driving device including a guide member arranged in the width direction along the laminated film, and the half direction cutting device is arranged along the guide member by the width direction driving device. The slide member is supported so as to be able to reciprocate in the width direction of the laminated film, supports the guide roll, and supports the disc cutter, and is capable of moving forward and backward within a certain range in the laminated film direction. A movable member supported by the movable member, a spring mounted between the movable member and the slide member, and biasing the movable member in the direction of the laminated film; and a spring adjusting means for adjusting a set length of the spring. A film sticking device, characterized in that: 6. A cutter base made of an elastic material against which the disk cutter is pressed via the laminated film at a position opposed to a running locus of the disk cutter with the laminated film interposed therebetween. A film sticking device, which is provided. 7. The film sticking apparatus according to claim 6, wherein the width direction driving device and the cutter table are supported by the same unit frame.