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JP2930466B2 - 2D image radiation detector - Google Patents
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JP2930466B2 - 2D image radiation detector - Google Patents

2D image radiation detector

Info

Publication number
JP2930466B2
JP2930466B2 JP2826092A JP2826092A JP2930466B2 JP 2930466 B2 JP2930466 B2 JP 2930466B2 JP 2826092 A JP2826092 A JP 2826092A JP 2826092 A JP2826092 A JP 2826092A JP 2930466 B2 JP2930466 B2 JP 2930466B2
Authority
JP
Japan
Prior art keywords
plate
vacuum vessel
radiation
entrance window
optical fiber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2826092A
Other languages
Japanese (ja)
Other versions
JPH05225933A (en
Inventor
郁夫 若元
和範 手島
信幸 福田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP2826092A priority Critical patent/JP2930466B2/en
Publication of JPH05225933A publication Critical patent/JPH05225933A/en
Application granted granted Critical
Publication of JP2930466B2 publication Critical patent/JP2930466B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
  • Measurement Of Radiation (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、X線やγ線等の放射線
の発生源の形状あるいは出力密度分布を2次元像として
高感度に検出する放射線カメラの検出部の構造に関し、
各種産業用放射線カメラの他、人工衛星や天文台等での
宇宙望遠鏡に適用して有用である。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a structure of a detection unit of a radiation camera for detecting the shape or output density distribution of a radiation source such as X-rays or gamma rays as a two-dimensional image with high sensitivity.
It is useful when applied to space telescopes in artificial satellites, observatories, etc., in addition to various industrial radiation cameras.

【0002】[0002]

【従来の技術】従来、可視光の2次元像を高感度に検出
するものとしてイメージ増強検出器(カメラ)がある
が、X線等の放射線を対象した高感度な2次元像の検出
技術はない。
2. Description of the Related Art Conventionally, there has been an image intensifying detector (camera) for detecting a two-dimensional image of visible light with high sensitivity. Absent.

【0003】図3に、微弱な可視光を対象としたイメー
ジ増強検出器の構成を示す。図3において、円筒状の真
空容器2の前方開口部全体がガラス製の入射窓11で塞
がれ、真空容器2の後方開口部の手前に有感部としての
マイクロチャンネルプレート(Micro Channel Plate ;
以下MCPとも略称する)3及び蛍光板4が設けられ、
真空容器2の後方開口部に光ファイバプレート5が挿入
されて、全体が真空封止されている。
FIG. 3 shows a configuration of an image intensifying detector for weak visible light. In FIG. 3, the entire front opening of the cylindrical vacuum vessel 2 is closed by a glass entrance window 11, and a micro channel plate (Micro Channel Plate; a sensitive part) is provided in front of the rear opening of the vacuum vessel 2.
(Hereinafter abbreviated as MCP) 3 and a fluorescent screen 4 are provided,
The optical fiber plate 5 is inserted into the rear opening of the vacuum vessel 2 and the whole is vacuum-sealed.

【0004】動作としては、可視光源14から発生した
光13が光学レンズ12により真空容器2中のマイクロ
チャンネルプレート3上に結像され、マイクロチャンネ
ルプレート3及び蛍光板4により増幅及び可視化され、
光ファイバプレート5を通ってCCD(Charge Coupled
Device )素子6に入射される。
In operation, light 13 generated from a visible light source 14 is imaged on a microchannel plate 3 in a vacuum vessel 2 by an optical lens 12 and amplified and visualized by the microchannel plate 3 and a fluorescent screen 4.
CCD (Charge Coupled) through the optical fiber plate 5
Device) Light is incident on the element 6.

【0005】[0005]

【発明が解決しようとする課題】従来のイメージ増強検
出器では、低エネルギのX線や微弱なX線の2次元像を
検出することが不可能であった。その理由を下記
(1),(2)に示す。 (1)可視光を通すために入射窓11がガラス製である
ため、X線等の放射線はガラスでの吸収損失が大きく、
従って、低エネルギの放射線の検出は不可能である。 (2)真空容器2の前方開口部全体を入射窓11で塞ぐ
ため、ガラスの厚みを大きくする必要があり、それだけ
放射線の減衰が大きくなり、従って低エネルギX線や、
微弱なX線の検出が困難である。
The conventional image-enhanced detector cannot detect a two-dimensional image of low-energy X-rays or weak X-rays. The reasons are shown in (1) and (2) below. (1) Since the entrance window 11 is made of glass for transmitting visible light, radiation such as X-rays has a large absorption loss in the glass,
Therefore, detection of low energy radiation is not possible. (2) Since the entire front opening of the vacuum vessel 2 is closed by the entrance window 11, the thickness of the glass needs to be increased, and the attenuation of radiation increases accordingly.
It is difficult to detect weak X-rays.

【0006】本発明は上記従来技術の問題点に鑑み、高
感度な2次元像放射線検出器を提供することを目的とす
る。
The present invention has been made in view of the above-mentioned problems of the prior art, and has as its object to provide a two-dimensional image radiation detector with high sensitivity.

【0007】[0007]

【課題を解決するための手段】本発明の2次元像放射線
検出器の構成は、放射線の吸収損失がガラスよりも少な
いベリリウム箔等の材料でできた放射線の入射窓を有す
る真空容器と、この真空容器中にそれぞれ順に設けられ
た、入射窓に近接するピンホール部材,光電面にCsI
等仕事関数の小さい物質がコーティングされたマイクロ
チャンネルプレート及び蛍光板と、真空容器の壁に貫通
して蛍光板の後方に設けられた光ファイバプレートと、
真空容器外にて光ファイバプレートに結合されたCCD
素子とを具備するものである。この場合、真空容器には
ピンホール部材とマイクロチャンネルプレートとの間の
距離を可変にするベローズを設けても良い。
According to the present invention, there is provided a two-dimensional image radiation detector comprising: a vacuum vessel having a radiation entrance window made of a material such as beryllium foil which absorbs less radiation than glass; A pinhole member close to the entrance window and a CsI
A microchannel plate and a fluorescent plate coated with a substance having a small work function and an optical fiber plate provided behind the fluorescent plate through the vacuum vessel wall,
CCD coupled to optical fiber plate outside vacuum vessel
And an element. In this case, the vacuum vessel may be provided with a bellows for varying the distance between the pinhole member and the microchannel plate.

【0008】[0008]

【作用】[Action]

(1)電子線やX線等の放射線は入射窓を通して真空容
器内に入り、ピンホール部材によりマイクロチャンネル
プレートに結像し、ここで電子増倍作用により増幅さ
れ、蛍光板に増倍電子が当って発光することにより可視
化され、光信号が光ファイバプレートを通って真空容器
外のCCD素子に導かれ、映像信号となる。ベローズが
有る場合は、ピンホール部材とマイクロチャンネルプレ
ートとの距離を変えることにより、撮像倍率が変わる。 (2)この場合、入射窓がベリリウム箔等、ガラスより
も放射線の吸収損失が少ない材料でできているため、入
射窓を通過する際の損失が少なく、検出感度の向上が可
能である。 (3)また、入射窓に近接してピンホール部材を設けた
ため、入射窓の開口面積はピンホールに放射線が入るに
必要な極く狭いもので十分であり、従って入射窓の板厚
を薄くすることが可能となり、それだけ放射線の減衰が
少なくなって低エネルギや微弱な放射線を検出すること
ができる。なお、入射窓の板厚について述べると、等分
布荷重を受ける周辺固定の円形平板の場合、その最大曲
げ応力σ max は、 σmax =(3/4)(ωR2 )/t2 ここでω:等分布荷重 R:平板の半径 t:平板の板厚 で表わされるから、入射窓の半径を例えば15mmから
0.5mmへと1/30にすることにより、板厚も1/3
0にすることが可能となり、入射窓の材料による減衰が
低減する。
 (1) Radiation such as electron beam and X-ray is vacuumed through the entrance window.
Once inside the vessel, the microchannel is
Image on the plate, where it is amplified by electron multiplication
Visible when the multiplied electrons hit the fluorescent screen and emit light.
Optical signal passes through the fiber optic plate
It is guided to an external CCD element and becomes a video signal. Bellows
If there is a pinhole member and microchannel press
By changing the distance to the port, the imaging magnification changes. (2) In this case, the entrance window is made of glass such as beryllium foil.
Is made of a material with low radiation absorption loss.
Low loss when passing through the window, improving detection sensitivity
Noh. (3) Also, a pinhole member is provided near the entrance window.
Therefore, the opening area of the entrance window is
The very narrow required is sufficient, and therefore the thickness of the entrance window
Can be made thinner, and radiation attenuation
Detect low energy and weak radiation
Can be. In addition, the plate thickness of the entrance window
In the case of a circular flat plate fixed to the periphery under the cloth load, its maximum bending
Stress σ maxIs σmax= (3/4) (ωRTwo) / TTwo Here, ω: Uniformly distributed load R: Radius of flat plate t: Thickness of flat plate
By reducing to 1/30 to 0.5mm, the thickness is reduced to 1/3
0, and the attenuation due to the material of the entrance window
Reduce.

【0009】[0009]

【実施例】以下、図面に基づいて本発明の実施例を説明
する。
Embodiments of the present invention will be described below with reference to the drawings.

【0010】[第1実施例]図1に本発明の第1実施例
に係る2次元像放射線検出器の構成を示す。図1におい
て、円筒状の小さな真空容器2の前面は中央の一部だけ
が狭い面積で開口しており、この狭い開口部をベリリウ
ム(Be)箔等の放射線透過率の良い材料の薄板を用い
た開口面積の小さい入射窓1で塞いである。1Aは入射
窓1の取付具である。この入射窓1に接してピンホール
7Aを有する鉛や金等のピンホール部材7を真空容器2
内に固定してある。真空容器2の後方開口部には光ファ
イバプレート5を挿入、固定し、真空容器2外部にて光
ファイバプレート5の出力端にCCD素子6を結合して
ある。真空容器2内には、マイクロチャンネルプレート
3と蛍光板4を重ねたものを光ファイバプレート5の入
力端に配置して固定してある。真空容器2は入射窓1と
光ファイバプレート5により真空封止されている。
[First Embodiment] FIG. 1 shows a configuration of a two-dimensional image radiation detector according to a first embodiment of the present invention. In FIG. 1, only a part of the center of the front surface of a small cylindrical vacuum vessel 2 has an opening with a small area, and this narrow opening is formed by using a thin plate of a material having good radiation transmittance such as beryllium (Be) foil. The entrance window 1 having a small opening area is closed. 1A is a fixture for the entrance window 1. A pinhole member 7 such as lead or gold having a pinhole 7A is brought into contact with the entrance window 1 by a vacuum container 2.
It is fixed inside. An optical fiber plate 5 is inserted and fixed in the rear opening of the vacuum vessel 2, and a CCD element 6 is connected to an output end of the optical fiber plate 5 outside the vacuum vessel 2. In the vacuum vessel 2, a microchannel plate 3 and a fluorescent plate 4 which are superposed are arranged and fixed at an input end of an optical fiber plate 5. The vacuum container 2 is vacuum-sealed by the entrance window 1 and the optical fiber plate 5.

【0011】上記第1実施例の動作としては、放射源9
からのX線等の放射線8がベリリウム箔等の薄く且つ小
さい入射窓1を通って真空容器2内に入り、ピンホール
部材7を通ってマイクロチャンネルプレート3に結像す
る。この時の2次元像の放射線がマイクロチャンネルプ
レート3で電子を発生させ、電子増倍作用により増幅さ
れる。この増倍電子が蛍光板4に当って発光が生じ、こ
れにより可視化され、その光信号が光ファイバプレート
5を通って真空容器2外部即ち大気中のCCD素子6に
導かれて映像信号となる。
In the operation of the first embodiment, the radiation source 9
Radiation 8 such as X-rays enters the vacuum vessel 2 through a thin and small entrance window 1 such as beryllium foil and forms an image on the microchannel plate 3 through a pinhole member 7. At this time, the radiation of the two-dimensional image generates electrons in the microchannel plate 3 and is amplified by an electron multiplying action. The multiplied electrons impinge on the fluorescent screen 4 to emit light, thereby being visualized, and the optical signal is guided through the optical fiber plate 5 to the outside of the vacuum vessel 2, that is, to the CCD element 6 in the atmosphere, to become a video signal.

【0012】[第2実施例]図2に本発明の第2実施例
に係る2次元像放射線検出器の構成を示す。本実施例の
構成は、真空容器2を2分してベローズ10で継いであ
る点が図1に示した第1実施例と異なるだけで、他は同
じである。従って、説明の重複を省く。即ち、ベローズ
10はピンホール7Aとマイクロチャンネルプレート3
間の距離を可変できる位置に設けてある。従って、ベロ
ーズ10を伸縮して真空容器2の長さを変えることによ
り撮像倍率を変化することができる。
[Second Embodiment] FIG. 2 shows a configuration of a two-dimensional image radiation detector according to a second embodiment of the present invention. The configuration of this embodiment is the same as the first embodiment shown in FIG. 1 except that the vacuum vessel 2 is divided into two parts and connected by a bellows 10. Therefore, redundant description is omitted. That is, the bellows 10 has the pinhole 7A and the microchannel plate 3
It is provided at a position where the distance between them can be varied. Therefore, the imaging magnification can be changed by changing the length of the vacuum container 2 by expanding and contracting the bellows 10.

【0013】ここで、図4を参照してマイクロチャンネ
ルプレート3について説明する。図4(a)において、
2枚のマイクロチャンネルプレート3に蛍光板4が重ね
合わされているが、マイクロチャンネルプレート3には
微細な小孔であるチャンネル3Aが2次元的に多数配列
されており、図4(b)に示すように各チャンネル3A
の入射端とその出射端間に電圧VD を印加する。チャン
ネル壁3Bである光電面にはCsI等の仕事関数の小さ
い物質をコーティングしてある。従って、放射線がチャ
ンネル3Aに入射してチャンネル壁3Bで反射を繰り返
すことにより、出力電子が増倍する。
Here, the microchannel plate 3 will be described with reference to FIG. In FIG. 4A,
The fluorescent plate 4 is superimposed on the two microchannel plates 3, and the microchannel plate 3 has a large number of channels 3A, which are fine small holes, arranged two-dimensionally, as shown in FIG. 3A for each channel
Applying a voltage V D across ends of incident and its exit end. The photocathode, which is the channel wall 3B, is coated with a material having a small work function such as CsI. Therefore, the output electrons are multiplied by the radiation incident on the channel 3A and being repeatedly reflected on the channel wall 3B.

【0014】なお、ベリリウム箔等の入射窓1の半径
は、例えば真空容器2の半径が15mmであれば、0.5
mmなどと極めて小さくしてある。
The radius of the entrance window 1 of beryllium foil or the like is, for example, 0.5 if the radius of the vacuum vessel 2 is 15 mm.
It is extremely small, such as mm.

【0015】[0015]

【発明の効果】本発明の2次元像放射線検出器によれ
ば、入射窓が従来のガラスに比べてベリリウムなど極め
て放射線の吸収損失が少ない材料でできているため、低
エネルギや微弱な放射線を検出できた。しかも、ピンホ
ール部材を真空容器中にて入射窓に接して設けられるこ
とから、入射窓を小さくすることができ、従って板厚を
薄くできるため、低エネルギあるいは微弱な放射線を高
感度に検出することができた。また、ピンホールとマイ
クロチャンネルプレート間の距離をベローズにより可変
することにより、マイクロチャンネルプレートに結像す
る像の大きさ(撮像倍率)を調整することができ、2次
元像放射線検出の自由度が増した。
According to the two-dimensional image radiation detector of the present invention, since the entrance window is made of a material such as beryllium which has extremely small radiation absorption loss as compared with conventional glass, low energy or weak radiation can be obtained. Could be detected. In addition, since the pinhole member is provided in contact with the entrance window in the vacuum vessel, the entrance window can be made smaller, and thus the plate thickness can be reduced, so that low-energy or weak radiation can be detected with high sensitivity. I was able to. Also, by varying the distance between the pinhole and the microchannel plate with the bellows, the size (imaging magnification) of the image formed on the microchannel plate can be adjusted, and the degree of freedom of two-dimensional image radiation detection is increased. Increased.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の第1実施例の2次元像放射線検出器の
構成図。
FIG. 1 is a configuration diagram of a two-dimensional image radiation detector according to a first embodiment of the present invention.

【図2】本発明の第2実施例の2次元像放射線検出器の
構成図。
FIG. 2 is a configuration diagram of a two-dimensional image radiation detector according to a second embodiment of the present invention.

【図3】従来のイメージ増強検出器の構成図。FIG. 3 is a configuration diagram of a conventional image enhancement detector.

【図4】マイクロチャンネルプレートの説明図。FIG. 4 is an explanatory view of a microchannel plate.

【符号の説明】[Explanation of symbols]

1 入射窓 2 真空容器 3 マイクロチャンネルプレート 4 蛍光板 5 光ファイバプレート 6 CCD素子 7 ピンホール部材 7A ピンホール 8 放射線 9 放射線源 10 ベローズ DESCRIPTION OF SYMBOLS 1 Injection window 2 Vacuum container 3 Microchannel plate 4 Fluorescent plate 5 Optical fiber plate 6 CCD element 7 Pinhole member 7A Pinhole 8 Radiation 9 Radiation source 10 Bellows

───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.6,DB名) H01J 31/50 ──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. 6 , DB name) H01J 31/50

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 放射線の吸収損失がガラスよりも少ない
ベリリウム箔等の材料でできた放射線の入射窓を有する
真空容器と、この真空容器中にそれぞれ順に設けられ
た、入射窓に近接するピンホール部材,光電面にCsI
等仕事関数の小さい物質がコーティングされたマイクロ
チャンネルプレート及び蛍光板と、真空容器の壁に貫通
して蛍光板の後方に設けられた光ファイバプレートと、
真空容器外にて光ファイバプレートに結合されたCCD
素子とを具備する2次元像放射線検出器。
1. A vacuum vessel having a radiation entrance window made of a material such as beryllium foil, which has a smaller radiation absorption loss than glass, and pinholes respectively provided in the vacuum vessel and adjacent to the entrance window. CsI on member and photocathode
A microchannel plate and a fluorescent plate coated with a substance having a small work function and an optical fiber plate provided behind the fluorescent plate through the vacuum vessel wall,
CCD coupled to optical fiber plate outside vacuum vessel
Two-dimensional imaging radiation detector comprising:
【請求項2】 前記真空容器はピンホール部材とマイク
ロチャンネルプレートとの間の距離を可変にするベロー
ズを有することを特徴とする請求項1記載の2次元像放
射線検出器。
2. The two-dimensional image radiation detector according to claim 1, wherein the vacuum container has a bellows for changing a distance between the pinhole member and the microchannel plate.
JP2826092A 1992-02-14 1992-02-14 2D image radiation detector Expired - Fee Related JP2930466B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2826092A JP2930466B2 (en) 1992-02-14 1992-02-14 2D image radiation detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2826092A JP2930466B2 (en) 1992-02-14 1992-02-14 2D image radiation detector

Publications (2)

Publication Number Publication Date
JPH05225933A JPH05225933A (en) 1993-09-03
JP2930466B2 true JP2930466B2 (en) 1999-08-03

Family

ID=12243603

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2826092A Expired - Fee Related JP2930466B2 (en) 1992-02-14 1992-02-14 2D image radiation detector

Country Status (1)

Country Link
JP (1) JP2930466B2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005002213A1 (en) * 2003-06-30 2005-01-06 Japan Science And Technology Agency Intermediate imaging of information propagating as wave motion passing through open hole
US7684545B2 (en) * 2007-10-30 2010-03-23 Rigaku Innovative Technologies, Inc. X-ray window and resistive heater
CN107228871B (en) * 2017-07-21 2023-07-04 中国地质大学(武汉) Portable X-ray analysis device
CN107320120B (en) * 2017-08-01 2021-08-24 中国工程物理研究院激光聚变研究中心 An X-ray Framing Imaging Device

Also Published As

Publication number Publication date
JPH05225933A (en) 1993-09-03

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