JP2948826B2 - Sintering method of ceramic piezoelectric element - Google Patents
Sintering method of ceramic piezoelectric elementInfo
- Publication number
- JP2948826B2 JP2948826B2 JP8366589A JP8366589A JP2948826B2 JP 2948826 B2 JP2948826 B2 JP 2948826B2 JP 8366589 A JP8366589 A JP 8366589A JP 8366589 A JP8366589 A JP 8366589A JP 2948826 B2 JP2948826 B2 JP 2948826B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- furnace
- temperature
- degreasing
- ceramic piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000919 ceramic Substances 0.000 title claims description 14
- 238000005245 sintering Methods 0.000 title claims description 12
- 238000000034 method Methods 0.000 title claims description 7
- 238000005238 degreasing Methods 0.000 claims description 16
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- HTUMBQDCCIXGCV-UHFFFAOYSA-N lead oxide Chemical compound [O-2].[Pb+2] HTUMBQDCCIXGCV-UHFFFAOYSA-N 0.000 description 3
- 238000010304 firing Methods 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 229910000464 lead oxide Inorganic materials 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 210000005036 nerve Anatomy 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
Description
【発明の詳細な説明】 ［産業上の利用分野］ 本発明はセラミック圧電素子の焼結方法に関し、特に
脱脂後の炉温に改良を施したものである。Description: TECHNICAL FIELD The present invention relates to a method for sintering a ceramic piezoelectric element, and more particularly to a method for improving a furnace temperature after degreasing.
［従来の技術と課題］ 周知の如く、ドクタブレード成形，押出し成形等結合
材を多く含有する成形体を焼成する場合、脱脂工程に多
くの時間を要する。また、これらの成形体を焼結するに
は、長大なトンネル炉を使用しており、広いスペースを
必要とした。[Prior art and problems] As is well known, when a molded body containing a large amount of a binder, such as doctor blade molding and extrusion molding, is fired, much time is required for the degreasing step. In order to sinter these compacts, a long tunnel furnace was used, and a large space was required.
こうしたことから、セラミック圧電素子の脱脂をバッ
チ炉で行ない、脱脂後の圧電素子の焼結をトンネル炉を
行なう手段がとられている。こうした手段をとると、小
さなスペースで焼結作業が可能になるという長所を有す
る。しかし、一方で脱脂後の圧電素子は非常に脆い。従
って、圧電素子をバッチ炉からトンネル炉に移動する
際、慎重に取扱かわなければならず、作業性に問題があ
る。こうしたことから、脱脂した圧電素子の強度を向上
させることによって、移動の際の作業性を改善する必要
にせまられている。For this reason, means has been adopted in which the ceramic piezoelectric element is degreased in a batch furnace and the degreased piezoelectric element is sintered in a tunnel furnace. Taking such measures has the advantage that the sintering operation can be performed in a small space. However, on the other hand, the degreased piezoelectric element is very brittle. Therefore, when the piezoelectric element is moved from the batch furnace to the tunnel furnace, it must be handled carefully, and there is a problem in workability. For this reason, it is necessary to improve the workability during movement by improving the strength of the degreased piezoelectric element.
本発明は上記事情に鑑みてなされたもので、脱脂後圧
電素子の温度を所定の温度に上げることにより、脱脂後
の圧電素子の強度を上げ、作業性を改善し、かつ、十分
な電気特性が得られるセラミック圧電素子の焼結方法を
提供することを目的とする。The present invention has been made in view of the above circumstances, and by increasing the temperature of a piezoelectric element after degreasing to a predetermined temperature, the strength of the piezoelectric element after degreasing is increased, workability is improved, and sufficient electric characteristics are obtained. It is an object of the present invention to provide a method for sintering a ceramic piezoelectric element that can obtain the following.
［課題を解決するための手段］ 本発明は、セラミック圧電素子を脱脂した後、炉の温
度を850〜950℃まで昇温し、その後前記圧電素子を別な
炉へ移動し、焼結を行うことを特徴とするセラミック圧
電素子の焼結方法である。Means for Solving the Problems According to the present invention, after the ceramic piezoelectric element is degreased, the temperature of the furnace is raised to 850 to 950 ° C., and then the piezoelectric element is moved to another furnace and sintered. A sintering method for a ceramic piezoelectric element, characterized in that:
本発明において、脱脂後の温度を上記のように限定し
たのは、850℃未満では十分な強度が得られず、また950
℃を越えると強度は向上するが十分な電気特性が得られ
ないからである。ちなみに、従来は550〜700℃程度で脱
脂を行なっていた。また、一般に、PbO（酸化鉛）を含
むセラミック圧電材料は700℃以上ではPbOが蒸発し特性
劣化・外観不良等の問題を生じる為、焼結は密閉容器を
用いてPbOの蒸発を防止していた。In the present invention, the reason for limiting the temperature after degreasing as described above is that if the temperature is lower than 850 ° C., sufficient strength cannot be obtained, and 950 ° C.
If the temperature exceeds ℃, the strength is improved, but sufficient electrical characteristics cannot be obtained. Incidentally, conventionally, degreasing was performed at about 550 to 700 ° C. Generally, ceramic piezoelectric materials containing PbO (lead oxide) evaporate at 700 ° C or higher, causing problems such as characteristic deterioration and poor appearance. Therefore, sintering uses a closed container to prevent evaporation of PbO. Was.
［作用］ 本発明によれば、セラミック圧電素子を脱脂した後、
炉の温度を850〜950℃まで昇温することにより、脱脂し
た後の圧電素子の強度を強くし、もってバッチ炉から焼
結を行うトンネル炉への移動の際の作業性を改善でき、
十分な電気特性を得ることができる。[Operation] According to the present invention, after degreasing the ceramic piezoelectric element,
By raising the temperature of the furnace to 850 to 950 ° C., the strength of the piezoelectric element after degreasing is increased, and the workability when transferring from the batch furnace to the tunnel furnace for sintering can be improved,
Sufficient electrical characteristics can be obtained.
［実施例］ 以下、本発明の一実施例を第１図、第２図及び第３図
を参照して説明する。ここで、第１図はバッチ炉での脱
脂時間と温度との関係を示す特性図、第２図はブッシャ
ー炉での時間と温度の関係を示す特性図、第３図はバッ
チ炉内のセラミック圧電素子の状態を示す図である。[Embodiment] An embodiment of the present invention will be described below with reference to FIGS. 1, 2, and 3. FIG. Here, FIG. 1 is a characteristic diagram showing a relationship between degreasing time and temperature in a batch furnace, FIG. 2 is a characteristic diagram showing a relationship between time and temperature in a busher furnace, and FIG. 3 is a ceramic diagram in a batch furnace. It is a figure showing the state of a piezoelectric element.
即ち、本実施例では、まずドクターブレードで成形し
たジルコン酸チタン酸鉛（以下、PZTと呼ぶ）のグリー
ンシートを第３図のような状態でバッチ炉で脱脂した。
なお、第３図中の１は敷板、２は圧電素子グリーンシー
トである。つまり、バッチ炉では、第１図に示す如く、
600℃（30時間）位迄昇温し、更に600℃で４〜５時間脱
脂を行なった後、約36時間目前後で炉の温度を900℃へ
昇温した。これにより、脱脂後の素体は、十分強度を増
していた。ひきつづき、トンネル炉で焼成を行ない、PZ
Tの焼結体とした。That is, in this example, first, a green sheet of lead zirconate titanate (hereinafter referred to as PZT) formed by a doctor blade was degreased in a batch furnace in a state as shown in FIG.
In FIG. 3, reference numeral 1 denotes a sole plate, and reference numeral 2 denotes a piezoelectric element green sheet. That is, in a batch furnace, as shown in FIG.
The temperature was raised to about 600 ° C. (30 hours), and after degreasing at 600 ° C. for 4 to 5 hours, the temperature of the furnace was raised to about 900 ° C. in about 36 hours. As a result, the element body after degreasing had sufficiently increased strength. Then, firing in a tunnel furnace, PZ
A sintered body of T was used.
しかして、本発明によれば、バッチ炉で600℃（30時
間）位迄昇温し、更に600℃で４〜５時間脱脂を行なっ
た後、約36時間目前後で炉の温度を900℃へ昇温するた
め、バッチ炉で脱脂後の素体（セラミック圧電素子）は
十分強度を増した。従って、圧電素子をバッチ炉から焼
結を行うトンネル炉へ移動する際、従来のように慎重に
取扱う必要がなく、その作業性を著しく改善できる。ま
た、得られたPZTの焼結体は、プッシャー炉で焼成（例
えば第２図に示す如く、約30時間迄比例的に昇温し、約
５時間程度そのまま維持し、その後約200℃程度迄下げ
（脱脂）、更に再度比例的に1200℃程度迄昇温して焼
成）して得られたPZT焼結体と同等の電気的特性を示し
た。According to the present invention, the temperature is raised to about 600 ° C. (30 hours) in a batch furnace, and further degreasing is performed at 600 ° C. for 4 to 5 hours. In order to raise the temperature, the element body (ceramic piezoelectric element) after degreasing in a batch furnace had sufficiently increased strength. Therefore, when the piezoelectric element is moved from the batch furnace to the tunnel furnace for sintering, it is not necessary to handle the piezoelectric element with care as in the related art, and the workability can be significantly improved. Further, the obtained sintered body of PZT is fired in a pusher furnace (for example, as shown in FIG. 2, the temperature is increased proportionally up to about 30 hours, maintained for about 5 hours, and then maintained at about 200 ° C.). The PZT sintered body obtained by lowering (degreasing) and then again proportionally raising the temperature to about 1200 ° C. and firing) showed the same electrical characteristics as the PZT sintered body.
なお、上記実施例では、PZTを用いた場合について述
べたが、これに限定されないことは勿論のことである。In the above embodiment, the case where PZT is used has been described, but it is needless to say that the present invention is not limited to this.
［発明の効果］ 以上詳述した如く本発明によれば、セラミック圧電素
子を脱脂した後、炉の温度を850〜950℃まで昇温するこ
とにより、脱脂した後の圧電素子の強度を強くし、もっ
てバッチ炉から焼結を行うトンネル炉への移動の際従来
ほど神経を使わずに作業性を改善しえ、かつ、十分な電
気特性が得られるセラミック圧電素子の焼結方法を提供
できる。[Effects of the Invention] As described above in detail, according to the present invention, after the ceramic piezoelectric element is degreased, the temperature of the furnace is raised to 850 to 950 ° C to increase the strength of the degreased piezoelectric element. Accordingly, a method for sintering a ceramic piezoelectric element can be provided which can improve workability without using nerves as compared with the conventional method when transferring from a batch furnace to a tunnel furnace for sintering, and can obtain sufficient electric characteristics.
第１図はバッチ炉での脱脂時間と温度との関係を示す特
性図、第２図はプッシャー炉での時間と温度の関係を示
す特性図、第３図はバッチ炉内のセラミック圧電素子の
状態を示す図である。 １……敷板、２……圧電素子グリーンシート。FIG. 1 is a characteristic diagram showing the relationship between degreasing time and temperature in a batch furnace, FIG. 2 is a characteristic diagram showing the relationship between time and temperature in a pusher furnace, and FIG. It is a figure showing a state. 1 ... Bottom plate, 2 ... Piezoelectric element green sheet.
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平２−6337（ＪＰ，Ａ) 特開 平２−79482（ＪＰ，Ａ) (58)調査した分野(Int.Cl.6，ＤＢ名) H01L 41/22 C04B 35/64 ────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-2-6337 (JP, A) JP-A-2-79482 (JP, A) (58) Fields investigated (Int.Cl. 6 , DB name) H01L 41/22 C04B 35/64
Claims (1)
度を850〜950℃まで昇温し、その後前記圧電素子を別な
炉へ移動して、焼結を行うことを特徴とするセラミック
圧電素子の焼結方法。1. A ceramic piezoelectric element, comprising: degreasing a ceramic piezoelectric element, increasing the temperature of a furnace to 850 to 950 ° C., and thereafter moving the piezoelectric element to another furnace to perform sintering. Element sintering method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8366589A JP2948826B2 (en) | 1989-03-31 | 1989-03-31 | Sintering method of ceramic piezoelectric element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8366589A JP2948826B2 (en) | 1989-03-31 | 1989-03-31 | Sintering method of ceramic piezoelectric element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02262384A JPH02262384A (en) | 1990-10-25 |
| JP2948826B2 true JP2948826B2 (en) | 1999-09-13 |
Family
ID=13808759
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8366589A Expired - Fee Related JP2948826B2 (en) | 1989-03-31 | 1989-03-31 | Sintering method of ceramic piezoelectric element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2948826B2 (en) |
-
1989
- 1989-03-31 JP JP8366589A patent/JP2948826B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02262384A (en) | 1990-10-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |