JP2956191B2 - Power supply circuit - Google Patents
Power supply circuitInfo
- Publication number
- JP2956191B2 JP2956191B2 JP2273868A JP27386890A JP2956191B2 JP 2956191 B2 JP2956191 B2 JP 2956191B2 JP 2273868 A JP2273868 A JP 2273868A JP 27386890 A JP27386890 A JP 27386890A JP 2956191 B2 JP2956191 B2 JP 2956191B2
- Authority
- JP
- Japan
- Prior art keywords
- power supply
- feedback
- circuit
- input
- pellet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000008188 pellet Substances 0.000 description 21
- 239000000523 sample Substances 0.000 description 14
- 239000004065 semiconductor Substances 0.000 description 10
- 230000000694 effects Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Semiconductor Integrated Circuits (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、半導体装置などの電気特性を測定する装置
に関し、特に被測定物に電源を供給するための回路の構
成に関する。Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for measuring electrical characteristics such as a semiconductor device, and more particularly to a circuit configuration for supplying power to a device under test.
第２図に、従来の半導体電気特性測定装置における電
源供給回路の回路構成を示す。FIG. 2 shows a circuit configuration of a power supply circuit in a conventional semiconductor electrical characteristic measuring device.
又、この図には、半導体集積回路装置（以下ICと記
す）のペレットを例にして、上記の電源供給回路からこ
のICペレットに電源を供給する方法についても模式的に
示してある。FIG. 2 also schematically shows a method of supplying power to the IC pellet from the power supply circuit, taking a pellet of a semiconductor integrated circuit device (hereinafter, referred to as an IC) as an example.
第２図において、電源供給回路１は、入力抵抗RAと、
この抵抗RAを介して入力される基準電位を増幅する増幅
器2aと、この増幅器2aの出力の一部を入力側へ帰還する
ための帰還抵抗RFaと、電源供給端子３と帰還端子4aと
が開放となった場合に帰還ループを確保するための短絡
抵抗RDとからなる。In FIG. 2, a power supply circuit 1 includes an input resistor RA ,
An amplifier 2a for amplifying a reference potential input through the resistor RA ; a feedback resistor R Fa for feeding back a part of the output of the amplifier 2a to the input side; a power supply terminal 3 and a feedback terminal 4a; And a short-circuit resistance RD for securing a feedback loop when is opened.
上述のような電源供給回路１を用いて、ICペレット５
に電源VCCを供給する場合には、第２図に示すように、
電源供給端子３に探針6aを接続し、この探針6aをICペレ
ット５上の電源パッド７に接触させ、この電源パッド７
からICペレット５上の配線８を通して回路ブロック９に
電源VCCを供給する。Using the power supply circuit 1 as described above, the IC pellet 5
When the power supply V CC is supplied, as shown in FIG.
The probe 6 a is connected to the power supply terminal 3, and the probe 6 a is brought into contact with the power pad 7 on the IC pellet 5.
To supply the power supply V CC to the circuit block 9 through the wiring 8 on the IC pellet 5.
なお、他の電源やグランドラインについても電源VCC
の場合と同様の方法をとる。Note that the power supply V CC
Take the same method as in
上述の場合、探針6aと電源パッド７との間には接触抵
抗が介在し、又、配線８が有限の抵抗を持つ。In the case described above, a contact resistance is interposed between the probe 6a and the power supply pad 7, and the wiring 8 has a finite resistance.
このため、電源パッド７の近くに配置された回路ブロ
ックに供給される電源電位と、電源パッド７から遠くは
なれた回路ブロックに供給される電源電位とは必ずしも
同じくはならない。For this reason, the power supply potential supplied to the circuit block disposed near the power supply pad 7 is not necessarily the same as the power supply potential supplied to the circuit block far from the power supply pad 7.
従って、ICペレット５上の各回路ブロックは、それが
配置されている場所によってそれぞれの基準電位や入出
力レベルが異なってしまう。Therefore, each circuit block on the IC pellet 5 has a different reference potential and input / output level depending on the place where it is arranged.
このような状態でこのICペレットの電気特性を測定し
ても正確な評価はできない。Even if the electrical characteristics of the IC pellet are measured in such a state, accurate evaluation cannot be performed.
しかし、今ここで、帰還端子4aに探針6bを接続し、こ
の探針6bをICペレット５上のセンスパッド10に接触させ
ると、増幅器2aの出力と入力との間には、電源供給端子
3,探針6a,電源パッド7,配線8,センスパッド10,探針6b,
帰還端子4a,帰還抵抗RFaを介して帰還ループができる。However, now, when the probe 6b is connected to the feedback terminal 4a and the probe 6b is brought into contact with the sense pad 10 on the IC pellet 5, a power supply terminal is provided between the output and the input of the amplifier 2a.
3, probe 6a, power supply pad 7, wiring 8, sense pad 10, probe 6b,
A feedback loop is formed via the feedback terminal 4a and the feedback resistor R Fa .
従って、探針6aと電源パッド７との間の接触抵抗や配
線８の抵抗の影響で、回路ブロック毎に電源電位が異な
り、従ってその回路ブロック毎の基準電位や入出力レベ
ルに差異が生ずるような場合でも、探針6bの電位が所望
の電位となるように、帰還抵抗RFaと入力抵抗RAとの比
率を調節することにより、上記の電源電位の違いによる
影響を補償することができる。Therefore, the power supply potential differs for each circuit block due to the influence of the contact resistance between the probe 6a and the power supply pad 7 and the resistance of the wiring 8, so that the reference potential and the input / output level differ for each circuit block. Even in such a case, by adjusting the ratio between the feedback resistor R Fa and the input resistor RA so that the potential of the probe 6b becomes a desired potential, it is possible to compensate for the influence of the difference in the power supply potential. .
従来の電源供給回路では、上に述べた、いわゆる電源
供給時のケルビン接続における帰還線は単線であり、被
測定物上の一点についてのみ帰還を掛けていた。In the conventional power supply circuit, the feedback line in the above-mentioned Kelvin connection at the time of power supply is a single line, and feedback is performed only at one point on the device under test.
上述したように、従来の電源供給回路１は、ICペレッ
トに電源を供給する場合、所望の部分の電源電位を増幅
器2aに帰還することにより、探針6aと電源パッド６との
間の接触抵抗や配線８の抵抗の影響で、ICペレット内の
場所毎に電源電位が異なる場合でもこの影響を補償する
ことができる。As described above, when power is supplied to the IC pellet, the conventional power supply circuit 1 feeds back the power supply potential of a desired portion to the amplifier 2a, thereby providing the contact resistance between the probe 6a and the power supply pad 6. This effect can be compensated for even when the power supply potential differs for each location in the IC pellet due to the influence of the resistance of the wiring 8 and the like.
しかし近年、半導体装置、特にICやLSIの機能が高度
化するのに伴って、その集積度が飛躍的に高まって来て
いる。However, in recent years, as the functions of semiconductor devices, particularly ICs and LSIs, have become more sophisticated, the degree of integration has been dramatically increased.
その結果、これら半導体装置のペレット上の配線は細
く、薄くなる傾向にあり、従って、配線の単位長当りの
抵抗が大きくなってきている。As a result, the wiring on the pellets of these semiconductor devices tends to be thinner and thinner, and accordingly, the resistance per unit length of the wiring is increasing.
更に又、ペレットのサイズも大型化してきている。 Furthermore, the size of pellets is also increasing.
このため、半導体装置の電気特性を測定する場合、ペ
レット上の場所毎に電源電位が異なることが測定結果に
及ぼす影響が大きくなってきており、従来の電源供給回
路のような一点のみの電位の帰還では、この影響を十分
には補償することができず、半導体装置の電気特性を正
確に測定できない。For this reason, when measuring the electrical characteristics of the semiconductor device, the influence of the difference in the power supply potential at each location on the pellet on the measurement result is increasing, and the potential of only one point as in the conventional power supply circuit is increased. The feedback cannot sufficiently compensate for this effect, and cannot accurately measure the electrical characteristics of the semiconductor device.
本発明による電源供給回路は、入力抵抗と、この入力
抵抗を介して入力される電位を増幅する増幅器と、前記
増幅器の入力に接続された帰還抵抗と、複数のケルビン
接続の帰還線と、前記複数の帰還線のそれぞれを介して
入力される電位を演算する演算回路とを有し、前記演算
回路の出力は前記帰還抵抗を介して前記増幅器の入力に
帰還されることを特徴とする。A power supply circuit according to the present invention includes an input resistor, an amplifier that amplifies a potential input through the input resistor, a feedback resistor connected to an input of the amplifier, a plurality of Kelvin-connected feedback lines, An arithmetic circuit for calculating an electric potential input through each of the plurality of feedback lines, wherein an output of the arithmetic circuit is fed back to an input of the amplifier via the feedback resistor.
次に本発明について図面を用いて説明する。 Next, the present invention will be described with reference to the drawings.
第１図は本発明の実施例の回路構成を示す図である。 FIG. 1 is a diagram showing a circuit configuration of an embodiment of the present invention.
第１図に示す本発明の実施例では、増幅器2aと帰還抵
抗RFaと入力抵抗RAと短絡抵抗RDとにより、第２図に示
す従来の電源供給回路１と同様の電源部11を構成し、こ
の電源部11の帰還端子12に、増幅器2bと帰還抵抗RFbと
複数の入力抵抗RB1,RB2,…,RBnとで構成された加算回路
13の出力を入力する。In the embodiment of the present invention shown in FIG. 1, an amplifier 2a, a feedback resistor R Fa , an input resistor RA, and a short-circuit resistor RD are used to connect a power supply unit 11 similar to the conventional power supply circuit 1 shown in FIG. And a feedback terminal 12 of the power supply unit 11, and an adder circuit including an amplifier 2b, a feedback resistor RFb, and a plurality of input resistors RB1 , RB2 , ..., RBn.
Input 13 outputs.
上述のような構成の電源供給回路で、ICペレットに電
源を供給する場合には、上記の複数の帰還端子4bのそれ
ぞれに個別の探針を接続し、これらの探針をICペレット
上の、配線から分岐して設けた複数のセンスパッドに接
触させ、電源供給端子３接続した探針をICペレット上の
電源パッドに接触させる。When power is supplied to the IC pellet with the power supply circuit configured as described above, individual probes are connected to each of the plurality of feedback terminals 4b, and these probes are connected to the IC pellet. A plurality of sense pads branched from the wiring are brought into contact with each other, and the probe connected to the power supply terminal 3 is brought into contact with a power supply pad on the IC pellet.
このようにすると、ICペレット上の複数部分の電源電
位について、その平均電位を帰還することができる。With this configuration, the average potential of the power supply potentials of a plurality of portions on the IC pellet can be fed back.
更に、帰還抵抗RFbと各入力抵抗RB1,RB2,…,RBnの比
率を変えることによって、ICペレット上のどの部分から
の帰還を重視するかという、重み付けをすることができ
る。Further, by changing the ratio between the feedback resistor R Fb and each of the input resistors R B1 , R B2 ,..., R Bn , it is possible to weight which portion on the IC pellet is important for feedback.
以上説明したように、本発明によれば、半導体装置な
どの電気特性を測定するに当って、これに電源を供給す
る際、ペレット上の複数部分の電源電位の帰還を掛けな
がら電源を供給することができる。As described above, according to the present invention, when measuring the electrical characteristics of a semiconductor device or the like, when supplying power to the semiconductor device, the power is supplied while applying the feedback of the power supply potential of a plurality of portions on the pellet. be able to.
しかも、この帰還においては、どの部分からの帰還を
重視するかという、重み付けをすることができる。In addition, in this feedback, it is possible to weight which part the feedback is important.
従って、本発明によれば、被測定物内の配線抵抗や接
触抵抗など測定系の抵抗に起因する、被測定物内の場所
の違いによる電源電位の違いが大きくなった場合でも、
この影響に対して、従来の電源供給回路を用いた場合よ
りも更に精度よく補償することができる。Therefore, according to the present invention, even when the difference in power supply potential due to the difference in the location in the object to be measured is large due to the resistance of the measurement system such as the wiring resistance and contact resistance in the object to be measured,
This effect can be more accurately compensated than in the case where a conventional power supply circuit is used.
第１図は、本発明の実施例の回路構成を表す図、第２図
は、従来の電源供給回路の回路構成と、この電源供給回
路を用いてICペレットに電源を供給する場合の概略を表
す図である。 １……電源供給回路、2a,2b……増幅器、３……電源供
給端子、4a,4b,12……帰還端子、５……半導体集積回路
装置（IC）ペレット、6a,6b……探針、７……電源パッ
ド、８……配線、９……回路ブロック、10……センスパ
ッド、11……電源部、13……加算回路。FIG. 1 is a diagram showing a circuit configuration of an embodiment of the present invention, and FIG. 2 is a schematic diagram showing a circuit configuration of a conventional power supply circuit and a case where power is supplied to an IC pellet using the power supply circuit. FIG. DESCRIPTION OF SYMBOLS 1 ... Power supply circuit, 2a, 2b ... Amplifier, 3 ... Power supply terminal, 4a, 4b, 12 ... Feedback terminal, 5 ... Semiconductor integrated circuit device (IC) pellet, 6a, 6b ... Probe .. 7 power supply pad, 8 wiring, 9 circuit block, 10 sense pad, 11 power supply section, 13 addition circuit.
Claims (1)
れる電位を増幅する増幅器と、前記増幅器の入力に接続
された帰還抵抗と、複数のケルビン接続の帰還線と、前
記複数の帰還線のそれぞれを介して入力される電位を演
算する演算回路とを有し、前記演算回路の出力は前記帰
還抵抗を介して前記増幅器の入力に帰還されることを特
徴とする電源供給回路。An amplifier for amplifying a potential input through the input resistor; a feedback resistor connected to an input of the amplifier; a plurality of Kelvin-connected feedback lines; An operation circuit for calculating an electric potential input through each of the lines, wherein an output of the operation circuit is fed back to an input of the amplifier via the feedback resistor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2273868A JP2956191B2 (en) | 1990-10-12 | 1990-10-12 | Power supply circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2273868A JP2956191B2 (en) | 1990-10-12 | 1990-10-12 | Power supply circuit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04148561A JPH04148561A (en) | 1992-05-21 |
| JP2956191B2 true JP2956191B2 (en) | 1999-10-04 |
Family
ID=17533684
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2273868A Expired - Fee Related JP2956191B2 (en) | 1990-10-12 | 1990-10-12 | Power supply circuit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2956191B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2020149104A1 (en) * | 2019-01-15 | 2021-11-25 | 株式会社村田製作所 | Electronic circuit modules, inspection methods, and communication equipment |
-
1990
- 1990-10-12 JP JP2273868A patent/JP2956191B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04148561A (en) | 1992-05-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |